JP3278662B2 - Discharge cell for ozone generator - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a discharge cell used in a plate type ozone generator.

[0002]

2. Description of the Related Art A discharge cell shown in FIG. 6 is known as one of discharge cells used in a plate type ozone generator.

The discharge cell shown in FIG. 6 has a pair of low-voltage electrodes 1, 1 also serving as a heat sink, and a pair of low-voltage electrodes 1, 1.
1 and spacers 4 for forming discharge gaps 3 on both sides of the dielectric unit 2. The dielectric unit 2 includes a high-voltage electrode 2 between two glass plates 2a, 2a as a dielectric.
It has a three-layer structure with b interposed. The spacers 4, 4,... Are made of metal, ceramic, glass, resin, or the like, and are arranged at predetermined intervals in a direction perpendicular to the gas flow direction in the discharge gap 3.

When ozone is generated, a source gas composed of oxygen gas or a mixed gas containing oxygen gas is allowed to flow through discharge gaps 3 and 3 formed on both sides of the dielectric unit 2, while the inside of the dielectric unit 2 is being discharged. A predetermined high voltage is applied to the high voltage electrode 2b. When a high voltage is applied, silent discharge is generated in the discharge gaps 3 and 3, and oxygen gas in the source gas is ozonized.

[0005]

In such a discharge cell for an ozone generator, the low-voltage electrodes 1, 1 and the dielectric unit 2 are formed as one module, and the low-voltage electrodes 1, 1 are shared between adjacent modules. The modules are stacked in the thickness direction.

The number of stacked modules is as large as 30, for example.
For this reason, reducing the manufacturing cost of each module greatly affects the cost reduction of the discharge cell for the zon generator.
It is known that cooling of the high voltage electrode 2b interposed between the two glass plates 2a, 2a in the dielectric unit 2 becomes unnecessary due to thinning. From this viewpoint, both the glass plates 2a, 2a are required. Was formed by integrally coating a conductive material on the surface with metallization, plating, thermal spraying or the like.

Thus, the glass plate 2a and the high voltage electrode 2b
A gap is removed from between the gaps, and a discharge required for generation of ozone is stably generated in the discharge gap 3. However, on the other hand, the coating cost for forming the electrodes has increased, which has been a major factor in increasing the manufacturing cost of each module. Also,
There have also been problems in that the glass plate 2a is heated during the coating process, and secondary drawbacks in terms of mechanical and physical properties and difficulty in drawing out the terminal portion are also problems.

Conventionally, the high-voltage electrode 2b is formed so as to cover substantially the entire surface of the glass plates 2a, 2a. The depth in the front-rear direction is the same as the depth of the glass plates 2a, 2a. It was substantially the same as the depth. However, as a recent trend, in order to reduce the size of the discharge cell, the thickness of the glass plate 2a has been reduced, the distance between the components of the discharge cell has been reduced, and the distance between the high-voltage electrode 2b and the low-voltage The sufficient insulation distance could not be secured. For this reason, abnormal discharge frequently occurs between the high-voltage electrode 2b and the low-voltage electrodes 1 and 1, and the reliability of the discharge cells has been reduced.

A first object of the present invention is to provide an economical discharge cell for an ozone generator which can reduce the cost of manufacturing a module, particularly the cost of forming an electrode.

A second object of the present invention is to provide a highly reliable discharge cell for an ozone generator which does not cause abnormal discharge.

[0011]

According to the present invention, a discharge cell for an ozone generator has a pair of first electrodes, and a pair of discharge gaps formed between each pair of first electrodes. A pair of dielectrics arranged with a gap between them, and a second electrode disposed between the pair of dielectrics in contact with each of the dielectrics. It is formed of a conductive thin plate and is held between a pair of dielectrics .
Located on both sides of the space to form a space between the electrodes
A pair of spacers between the pair of first electrodes,
A pair of dielectrics sandwiching the thin plate is placed between the pair of first electrodes.
It is arranged in the space so that a discharge gap is formed .

In the discharge cell for an ozone generator of the present invention ,
Since the second electrode interposed between the pair of dielectrics is formed of a conductive thin plate, the manufacturing cost of the dielectric unit is very low. In addition, since the thin plate is held between a pair of highly rigid dielectrics, the thin plate has a high flatness, and depending on the material (for example, stainless steel, etc.), the thin plate itself has a high flatness. Enables stable discharge.
Further, by pulling out a part of the edge in a strip shape from between the pair of dielectrics to the outside, a flexible and easy-to-handle terminal portion is easily formed.

The thickness of the thin plate is preferably 200 μm or less.
If it exceeds 200 μm, the rigidity of the thin plate increases, and mechanical damage such as cracks may be generated in the dielectric during assembly work or the like. The lower limit is preferably 10 μm or more from the viewpoint of a decrease in workability during assembly.

Suitable materials for the thin plate include metals such as stainless steel, nickel alloys, aluminum alloys, and steel alloys. Among them, stainless steel is preferable from the viewpoint of corrosion resistance and availability of materials. Metal sheets are usually manufactured by rolling, and the rolled material is preferable in that flatness and rigidity due to work hardening can be expected.In particular, the as-rolled material that has been omitted from annealing after rolling is work hardened. This is preferable because the rigidity and the maintenance of the flatness due to the rigidity can be utilized as it is.
Particularly preferred are as-rolled stainless steel sheets.

As the dielectric material, a glass plate, particularly a glass plate having the following composition, is preferable because of its low cost, withstand voltage characteristics, dimensional accuracy, and the fact that the surface becomes a mirror surface without a polishing step. It is also possible to use a crystal plate such as sapphire, a ceramic coated plate formed by spraying alumina or the like, an enamel plate, and the like.

The preferred composition of the glass plate is SiO:
40 to 70%, Al ₂ O ₃ : 5 to 30%, B ₂ O ₃ : 0
-20%, MgO: 0-5%, CaO: 0-10%, S
rO: 0 to 8%, BaO: 0 to 20%, ZnO: 0 to 1
% Substantially. A glass plate having this composition is mainly used for a glass substrate for liquid crystal, and has excellent advantages as a dielectric for an ozone generator, having high flatness and few internal defects such as bubbles, and is easily available. is there. The glass plate having this composition is effective regardless of the structure of the discharge cell.

The thickness of the glass plate is preferably 0.3 to 1.5 mm. When the glass plate is thick, the voltage drop in the glass plate increases, and the supply voltage to the discharge cells increases. If it is thin, workability at the time of assembling will be reduced, and breakage due to insufficient mechanical strength will occur.

The pair of dielectrics can be joined via the second electrode. By this bonding, the dielectric and the electrode can be completely adhered to each other, and unnecessary discharge generated in the gap between the dielectric and the electrode can be prevented. As the joining method, polyimide, PF
A and FEP are preferably used for heat welding and bonding with silicone resin and epoxy resin. When the ozone concentration is high, heat welding using polyimide, PFA and FEP is preferable.

The terminal portion formed by pulling out a part of the edge of the thin plate in a strip shape from between the pair of dielectrics to the outside thereof is not only easy to form, but also has a high flexibility in the plate thickness direction. When stacking the modules in the plate pressure direction, the terminal portions can be easily overlapped between the modules. Further, the fuse portion can be easily formed integrally by reducing the width of a part of the terminal portion in the longitudinal direction.

The width of the terminal may be appropriately selected within the range of the width of the thin plate.

Since the terminal portion is a thin plate and has low heat diffusion, if an abnormal discharge occurs in the terminal portion, the heat may cause a fusing. For this reason, it is preferable to attach a heat dissipation promoting member to the terminal portion.

Also, the discharge cell for an ozone generator according to the present invention.
In a pair of dielectric wider than the second electrode, it is Rukoto is projected the edge at substantially the entire circumference of the pair of dielectric outside of the edge portion of the second electrode.

In this discharge cell for an ozone generator, the pair of dielectrics is wider than the second electrode, and the edges of the pair of dielectrics protrude outward from the edge of the second electrode over substantially the entire periphery of the pair of dielectrics. Abnormal discharge starting from the edges of the two electrodes is effectively suppressed.

The protrusion of the edge of the dielectric is preferably 2 to 70 mm. When the protrusion amount is less than 2 mm, the effect of suppressing abnormal discharge is small. If it exceeds 70 mm, the dielectric becomes large, and the size and cost of the discharge cell increase. A particularly preferred protrusion amount is 5 to 50 mm.

The pair of dielectrics can be joined with the second electrode interposed therebetween. As the joining method, for example, heat welding with polyimide, PFA, FEP, silicon resin,
Adhesion with an epoxy resin can be used, and when the ozone concentration is high, heat welding with polyimide, PFA, or FEP is preferable. However, in order to reduce stress on the dielectric, at least a portion outside the edge of the second electrode is preferably used. It is preferable to join a pair of dielectrics. In this case, an inorganic bonding material such as a glass sealing material having a coefficient of expansion close to that of the dielectric can be used.

When joining a pair of dielectrics outside the edge of the second electrode, it is preferable to separate the joint from the inside second electrode. Thereby, the insulation around the second electrode is improved, and abnormal discharge is suppressed. Here, the separation distance is preferably 1 to 10 mm. If less than 1mm,
The effect of improving the insulating property is small, and the problem of interference between the electrode and the junction occurs. If it exceeds 10 mm, cracks may occur in the dielectric.

[0027]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a front view of a discharge cell for a plate-type ozone generator according to an embodiment of the present invention, FIG. 2 is an exploded perspective view of a cell module used in the discharge cell, and FIG. 3 is used in the cell module. FIG. 4 is a perspective view of a dielectric unit used in the cell module, and FIG. 5 is a vertical sectional front view of the dielectric unit.

As shown in FIG. 1, the discharge cell according to the present embodiment includes a plurality of first electrodes 10 made of a flat rigid body.
Are laminated in the plate thickness direction with a pair of rigid spacers 20, 20 on both sides interposed therebetween to constitute a cell module laminate. The stacked body of the cell module is fixed between a pair of upper and lower end plates (not shown) by a plurality of bolts penetrating both sides in the stacking direction. In this laminate, the upper and lower cell modules are the first
The electrode 10 is shared.

Each cell module is, as shown in FIG.
A pair of upper and lower first electrodes 10, 10;
A pair of rigid body spacers 20, 20 sandwiched between the two,
The first electrode 1 is located inside the rigid spacers 20 and 20.
A plurality of elastic spacers provided between the dielectric unit 30 disposed between the first and second electrodes 10 and 10 to form discharge gaps 50 on both sides of the dielectric unit 30. 40, 40...

In the drawings, the vertical dimensions are exaggerated, and the actual thickness is designed to be very thin, for example, 3 mm or less for the first electrode 10 and 3 mm or less for the rigid spacer 20. Have been.

The pair of upper and lower first electrodes 10, 10 are low-voltage electrodes that also serve as heat sinks. Each first electrode 10 is a thin plate-shaped conductive rigid body in which two conductive plates 15 made of a stainless steel plate or the like are joined to form a refrigerant flow passage between the plates.

On one side of the first electrode 10, a coolant introduction hole 1 for introducing cooling water as a coolant into a coolant flow passage.
1 and a coolant outlet hole 12 for taking out the cooling water from the flow passage are provided penetrating the two conductive plates 15 in the plate thickness direction. Further, in order to take out the ozone gas generated in the cell module, the first electrode 10 is provided with a pair of gas outlet holes 13 on both sides and a gas outlet hole 1.
A slit-like gas lead-out path 14 connecting the third and the third 13 is provided to penetrate the two conductive plates 15 and 15 in the plate thickness direction. A plurality of small round holes provided on both sides of the first electrode 10 are through holes for bolts.

The two conductive plates 1 constituting the first electrode 10
As shown in FIG. 3, U-shaped shallow and wide grooves are formed on both of the facing surfaces 5 and 15 so as to surround the gas outlet holes 13 and 13 and the gas outlet path 14. The grooves formed on both opposing surfaces are combined to form a refrigerant flow passage 16 between the conductive plates 15. This shallow and wide groove is easily formed by, for example, etching or the like.

One end of the refrigerant flow passage 16 is connected to the refrigerant introduction hole 11.
And the other end is connected to the refrigerant outlet hole 12. A plurality of ribs 17, 17,... Extending in the flow direction are provided in the refrigerant flow path 16 at predetermined intervals in a direction perpendicular to the flow direction. The ribs 17, 17,... Contribute to the uniform flow of the cooling water and the rigidity of the first electrode 10.

The pair of rigid body spacers 20 on both sides are
A thin plate-shaped conductive rigid body made of a conductive plate material such as a stainless steel plate, which is interposed on both side portions between the first electrodes 10, and between which a gap amount G ′ equal to the spacer thickness is provided.
To form a space. In addition, it functions as an electrical connection member for the first electrodes 10 and 10.

On one rigid body spacer 20, a refrigerant introduction hole 21 and a refrigerant extraction hole 22 communicating with the refrigerant introduction hole 11 and the refrigerant exit hole 12 of the first electrode 10, respectively, are provided penetrating in the plate thickness direction. ing. Both rigid spacers 2
A cut-out gas lead-out hole 23 communicating with the gas lead-out hole 13 of the first electrode 10 is provided at each inner edge of 0 and 20 so as to penetrate in the plate thickness direction. Further, through holes for bolts are provided similarly to the first electrode 10.

As shown in FIG. 4, a dielectric unit 30 disposed in a space surrounded by a pair of upper and lower first electrodes 10 and a pair of rigid spacers 20 on both sides, as shown in FIG. Of the second electrode 3 between the glass plates 31
2 is a thin plate-shaped rigid body having a sandwich structure sandwiching the two. The thickness T of the dielectric unit 30 is slightly smaller than the gap amount G 'of the space, and more specifically, the discharge gap 50,
G is defined as G′−2G, where G is the amount of each gap.

The second electrode 32 is a high-voltage electrode and is made of a conductive thin plate such as a stainless steel plate, and its thickness is suitably 200 μm or less. The width W2 of the second electrode 32 is
1, 31 are set to be narrower than the width W1, whereby the edges on both sides of the second electrode 32 are separated from the glass plates 31, 31.
.DELTA.W, .DELTA.W inward from the edges on both sides of. ΔW is suitably 2 to 70 mm. Second electrode 32
Is set shorter than the depth L1 of the glass plates 31, 31, so that the front and rear edges of the second electrode 32 are inward from the front and rear edges of the glass plates 31, ΔL, ΔL. It will enter each time. ΔL is also 2-70m
m is appropriate.

The depth L2 of the second electrode 32 is also set to be greater than the depth of the pair of upper and lower first electrodes 10, 10, so that the front and rear edges of the second electrode 32 are made of glass plates 31, 31. From the front and rear edges. An appropriate amount of the protrusion is 2 to 20 mm.

That is, the depth of each member in the cell module increases in the order of the first electrode 10, 10, the second electrode 32, and the glass plate 31, 31, and the depth of the rigid spacers 20, 20 is the first electrode. Same as 10,10 depth.

A part of the front edge of the second electrode 32 protrudes as a terminal portion 32 'from between the glass plates 31, 31 in a band shape to the front. The terminal portion 32 'is provided with a heat dissipation promoting portion 34 formed by winding an aluminum foil, and is integrally formed with a fuse portion 32 "located in front of the heat dissipation promoting portion 34. , Terminal portion 32 '
Is formed by reducing its width at a part in the longitudinal direction.

As shown in FIG. 5A, the glass plates 31, 31 sandwich the second electrode 32 and the insulating spacers 33, 33 disposed on both sides thereof, with the upper and lower adhesive layers 35, 3 therebetween.
5 are integrated. Insulating spacer body 3
3 and 33 have the same thickness as the second electrode 32. Adhesive layer 3
5, 35 are ozone-resistant polyimides, for example, P
It is a heat welding layer of FA, FEP, or the like. That is, the glass plate 3
1, 31 are integrated with the inner second electrode 32 and the insulating spacers 33, 33 by thermal welding using an ozone-resistant resin such as polyimide, PFA, or FEP.

The discharge gap 5 is formed on both sides of the dielectric unit 30.
The elastic spacers 40, 40,... Provided between the first electrodes 10, 10 to form the electrodes 0, 50 are thin resin wires having a circular cross section and having ozone resistance and elasticity. The gaps 50 are arranged at predetermined intervals in the width direction (the direction perpendicular to the gas flow direction). The thickness (outer diameter D of the wire) of each elastic spacer 40 is set to be about 5% to 50% larger than each gap amount G of the discharge gaps 50, 50 in a state without compression.

With this setting, the elastic spacers 40, 4
0 .. are compressed from above and below by the first electrode 10 and the dielectric unit 30, and by this compression, the dielectric unit 30 is elastically pressed from above and below with uniform pressure, and is held at the center in the vertical direction in the space. Is done. As a result, the discharge gaps 5 having a uniform gap amount G
0,50 are formed.

In addition, on both sides of each discharge gap 50, tape-shaped insulating members 41, 41 made of an elastic material are provided, which also serve as an elastic spacer and a sealing member.

Next, a method of assembling, using, and functions of the discharge cell according to the present embodiment will be described.

In assembling the discharge cell, a plurality of first electrodes 10, 10...
Are sandwiched between each other with the rigid spacers 20, 20, the dielectric unit 30, and the elastic spacers 40, 40,... Sandwiched therebetween, and both sides are fastened in the overlapping direction by a plurality of bolts (not shown).

Thus, in each cell module, discharge gaps 50 are formed on both sides of the dielectric unit 30. Here, the upper and lower first electrodes 10 and 10, the rigid spacers 20 and 20 on both sides, and the dielectric unit 30 are rigid bodies that do not generate compression.
Since 0 .. causes compression, the gap amount G of each discharge gap 50 becomes a constant value of (G'-T) / 2. Therefore, 0.
A small gap amount G of 2 mm or less can be stably realized.

The fastening is performed by the rigid spacers 20,
This is done on both sides where the 20 is located and there is no need to pressurize the entire discharge cell evenly, thus simplifying the clamping mechanism. Further, the elastic spacers 40 and 4 are tightened.
The glass plate 31 in the dielectric unit 30,
No breakage of 31 occurs.

The assembled discharge cells are housed in a tank (not shown) in order to introduce raw material gas into the discharge gaps 50 of each cell module from the front and rear.

In the discharge cell, the coolant introduction hole 11 of the first electrode 10 and the coolant introduction hole 21 of the rigid spacer 20 are united to form a coolant introduction passage that is continuous in the stacking direction. Further, the refrigerant outlet hole 12 of the first electrode 10 and the refrigerant outlet hole 22 of the rigid body spacer 20 are combined to form a refrigerant outlet path that is continuous in the stacking direction.
Further, the gas outlet holes 13, 13 of the first electrode 10 and the rigid body 2
By merging the 0, 20 gas outlet holes 23, 23, a pair of gas outlet paths on both sides continuous in the laminating direction is formed.

The refrigerant introduction path, the refrigerant discharge path, and the gas discharge path communicate with the outside of the tank through openings provided in the upper end plate and pipes connected to the openings. On the other hand, the lower end plate functions as a lid plate that closes these paths.

When generating ozone, a source gas is supplied into a tank containing a discharge cell. In addition, cooling water is supplied to the refrigerant introduction path. In this state, a high voltage is applied to the second electrode 32 provided in the dielectric unit 30 of each cell module, and silent discharge is generated in the discharge gaps 50,50.

The raw material gas supplied into the tank flows into the upper and lower discharge gaps 50 and 50 in each cell module from front and rear, and is exposed to discharge in the process of flowing toward the center in the front and rear direction to become ozone gas. . The ozone gas generated in the discharge gaps 50, 50 passes through gas outlet paths 14, 14 provided in the upper and lower first electrodes 10, 10, and the gas outlet holes 1 on both sides.
3 and 13 are taken out above the discharge cell through a pair of gas outlet paths on both sides formed on both sides of the discharge cell,
Furthermore, it is taken out of the tank.

The cooling water supplied to the refrigerant introduction path enters the refrigerant flow passage 16 through the refrigerant introduction holes 11 provided in the first electrodes 10 provided on the upper and lower sides of each cell module, and flows through the discharge gaps 50 50. Water cooling from the low voltage electrode side. First electrode 1
The cooling water flowing out of the coolant outlet holes 12 and 12 is taken out above the discharge cell through a coolant outlet passage formed on one side of the discharge cell, and further taken out of the tank.

Here, the dielectric unit 30 in each cell module does not require thermal spraying or plating to form the second electrode 32 in its manufacture, and the glass plates 31, 31 can be easily joined by thermal welding. Therefore, it is easy to manufacture and contributes to the cost reduction of the discharge cell.

In each dielectric unit 30, the second electrode 32
Are protruded forward and backward from the front and rear edges of the upper and lower first electrodes 10 and 10, respectively. For this reason, the electric field concentration between the respective edges is reduced, and dielectric breakdown of the dielectric can be prevented. The front and rear edges of the upper and lower glass plates 31 and 31 project further forward and rearward than the front and rear edges of the second electrode 32. Therefore, the first electrodes 10, 10 and the second electrode 3
A distance that does not cause dielectric breakdown between the two can be secured.

In the width direction of the dielectric unit 30, the second
A gap is secured between the electrode 32 and the rigid body spacers 20 on both sides, and insulating spacers 33 are arranged in each gap. Therefore, the second electrode 32 and the first electrode 1
Electrical insulation is obtained between the spacers 0, 10 or the rigid spacers 20, 20.

The terminal portion 32 'of the second electrode 32 bends freely in its thickness direction, that is, in the stacking direction of the modules. For this reason, each terminal portion 32 ′ is connected between a plurality of stacked modules.
Can be easily overlapped and combined.

In each of the terminal portions 32 ', since the heat radiation promoting portion 34 is attached, the heat diffusion is improved and the terminal portions 3' are improved.
Fusing by heat generated by abnormal discharge to 2 'can be prevented. Further, since the fuse portion 32 "is formed integrally, a fuse tube is not required.

As shown in FIG. 5B, the glass plates 31, 31 can be partially joined by heat welding only on both sides of the second electrode 32, as shown in FIG. In this case, since the bonding layers 35, 35, which are bonding portions, are removed to the side of the second electrode 32, the dielectric unit 3
In addition to reducing the thickness of 0, it functions as an insulating spacer on both sides. FIG. 5 shows the adhesive layers 35 on both sides.
As shown in (c), the second electrode 32 and the adhesive layers 35, 35
It is preferable to provide gaps 36 between them. This allows
Since an insulated space is formed between the adhesive layers 35, 35, dielectric breakdown due to tree discharge generated in the adhesive layers 35, 35 can be prevented.

Further, regarding the gas flow in the discharge gap 50, conventionally, this gas flow is one-way from the front end to the rear end of the discharge gap 50. In this case, in order to take out the ozone gas, it is necessary to attach a header to a rear surface perpendicular to the stacking direction of the discharge cells. However, the rear surface perpendicular to the stacking direction of the discharge cells is not flat because the end faces of the stacked members appear. This makes it difficult to seal between the header and the rear surface.

On the other hand, in the discharge cell according to the present embodiment, the gas lead-out passage 14 is provided in the portion of the first electrode 10 which is in contact with the discharge gap 50 at the center of the discharge gap 50 in the gas flow direction. , The rigid body spacer 20 of the first electrode 10,
Gas outlet holes 13, 13 that are connected to the gas outlet path 14 are provided in a portion in contact with 20. In addition, the rigid body spacer 2
Gas outlet holes 23, 23 are provided at 0, 20 corresponding to the gas outlet holes 13, 13, respectively.

As a result, the raw material gas flows in from both ends of the discharge gap 50. Both inflowing gases are ozonized in the discharge gap 50, enter the gas outlet path 14 of the first electrode 10 at the center of the discharge gap 50, and enter the gas outlet holes 13 on both sides.
13 flows out in the stacking direction and is taken out of the discharge cells. Therefore, the ozone gas is taken out from the first electrode 10
Or two tubes from the surface of the end plate. These surfaces are flat unlike the end faces,
Sealing is easy and headers are not required. Further, since the flow direction of the cooling water and the extraction direction of the ozone gas are the same, the piping structure is simplified, and the size of the apparatus is reduced.

The gas extraction structure according to the present invention may be any structure in which a space is formed between a pair of first electrodes by a spacer, a dielectric unit is arranged in this space, and discharge gaps are formed on both sides of the dielectric unit. The present invention is also applicable to discharge cells other than the discharge cells.

[0066]

As described above, in the discharge cell for an ozone generator of the present invention , the second electrode is formed of a conductive thin plate and held between a pair of dielectrics, thereby reducing the cost of forming the electrode. Since the production cost can be remarkably reduced, the production cost can be suppressed at a low cost. Forming a space between the pair of first electrodes
Between the pair of first electrodes located on both sides of the space.
A pair of spacers are arranged, and a pair of dielectrics sandwiching the thin plate
A discharge gap is formed between the body and the pair of first electrodes.
As described above, the gap in the discharge gap is
Stably miniaturized and the spacers are arranged
The discharge cells evenly to
There is no need to apply pressure, so the tightening mechanism can be simplified
At the same time, it is possible to prevent the dielectric from being damaged by the tightening.

Further , the pair of dielectrics is made wider than the second electrode, and the edges of the pair of dielectrics are protruded outward from the edges of the second electrode substantially all around the pair of dielectrics. Since an electrical insulation distance to a member having the same potential as one electrode can be sufficiently ensured, high reliability in which abnormal discharge or the like does not occur can be ensured.

[Brief description of the drawings]

FIG. 1 is a front view of a discharge cell for a plate-type ozone generator according to an embodiment of the present invention.

FIG. 2 is an exploded perspective view of a cell module used in the discharge cell.

FIG. 3 is an exploded perspective view of a first electrode used in the cell module.

FIG. 4 is a perspective view of a dielectric unit used in the cell module.

FIG. 5 is a vertical sectional front view of the dielectric unit.

FIG. 6 is a schematic configuration diagram of a conventional discharge cell for a plate-type ozone generator.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 1st electrode (low-voltage electrode) 11 Refrigerant introduction hole 12 Refrigerant introduction hole 13 Gas derivation hole 14 Gas derivation path 15 Conductive plate 16 Refrigerant flow passage 17 Rib 20 Rigid body spacer 21 Refrigerant introduction hole 22 Refrigerant extraction hole 30 Dielectric unit 31 Glass plate (dielectric) 32 Second electrode (high voltage electrode) 32 'Terminal 32 "Fuse 33 Insulating spacer 34 Adhesive layer (joining) 35 Gap 40 Elastic spacer 50 Discharge gap

Continued on the front page. (72) Inventor Yuji Terashima 1-10 Fuso-cho, Amagasaki-shi, Hyogo Sumitomo Precision Industries, Ltd. (72) Inventor Masaya Yoshimura 1-10 Fuso-cho, Amagasaki City, Hyogo Prefecture Inside Sumitomo Precision Industries, Ltd. (56) References JP-A-55-3334 (JP, A) JP-A-55-162410 (JP, A) (58) Field surveyed (Int. Cl. ⁷ , DB name) C01B 13/11 H01T 23/00

Claims (18)

(57) [Claims] 1. A pair of dielectrics disposed between a pair of first electrodes and a pair of first electrodes with a gap formed between the pair of first electrodes so as to form a pair of discharge gaps. If, between the pair of dielectric, and a second electrode disposed in contact with the dielectric, to hold the second electrode is formed of a conductive thin plate between a pair of dielectric With the pair of first electrodes
A pair is located on both sides of the space to form a space between
A pair of spacers is arranged between the first electrodes of
A pair of dielectrics is sandwiched between the pair of first electrodes and a discharge space.
A discharge cell for an ozone generator, wherein the discharge cell is arranged in the space so as to form a gap . 2. The ozone generating device discharge cell according to claim 1, wherein said thin plate has a thickness of 200 μm or less. 3. The ozone generating device discharge cell according to claim 1, wherein a glass plate is used as the pair of dielectrics. 4. The glass plate has a SiO: 40-70.
%, Al ₂ O ₃ : 5 to 30%, B ₂ O ₃ : 0 to 20%,
MgO: 0-5%, CaO: 0-10%, SrO: 0
4. The discharge cell for an ozone generator according to claim 3, wherein the discharge cell has a composition substantially consisting of 8%, BaO: 0 to 20%, and ZnO: 0 to 1%. 5. A method according to claim 1, wherein the pair of dielectrics is wider than the thin plate, and the edges of the pair of dielectrics project substantially outside the edges of the pair of dielectrics. 5. The discharge cell for ozone generation according to 3 or 4. 6. The discharge cell for an ozone generating apparatus according to claim 5, wherein a pair of dielectrics is joined at least at a part outside an edge of said thin plate. 7. The discharge cell for an ozone generator according to claim 6, wherein the joint is separated from the inner thin plate. 8. A terminal portion formed by extracting a part of an edge portion of the thin plate in a band shape from between a pair of dielectrics to the outside thereof. 8. The discharge cell for an ozone generator according to claim 6, 6 or 7. 9. The discharge cell for an ozone generator according to claim 8, wherein a heat radiation promoting member is attached to said terminal portion. 10. The discharge cell for an ozone generator according to claim 8, wherein a fuse portion is formed in a part of the terminal portion in a longitudinal direction with a reduced width. 11. A pair of side edges of said thin plate are
Penetrated 2-70 mm inside from the side edges on both sides of the conductor
Claims 1, 2, 3, 4, 5, 6, 7,
The discharge cell for an ozone generator according to 8, 9 or 10 . 12. A front edge portion and a rear edge portion of the thin plate are paired.
2 to 70 mm inward from the leading and trailing edges of the dielectric
1, 2, 3, 4, 5,
The discharge cell for an ozone generator according to 6, 7, 8, 9, 10 or 11 . 13. A thin plate having a front edge portion and a rear edge portion,
2 to 20 mm forward of the leading and trailing edges of the first electrode
And protruding rearward.
3, 4, 5, 6, 7, 8, 9, 10, 11 or 12
Ozonizer discharge cell for the mounting. 14. A pair of side portions of said thin plate
4. The method according to claim 1, wherein the dielectric is bonded.
4, 5, 6, 7, 8, 9, 10, 11, 12 or 13
An ozone generation device discharge cell as described in the above . 15. The joint is separated from the inner thin plate by 1 mm or more.
The discharge cell for an ozone generator according to claim 14, wherein: 16. A leading edge and / or a trailing edge of the sheet.
A part of the width direction, from between a pair of dielectrics forward and
And / or that the terminal part was formed by pulling it out in a belt shape to the rear.
Claims 1, 2, 3, 4, 5, 6, 7, 8,
The discharge cell for an ozone generator according to 9, 10, 11, 12, 13, 14, or 15 . 17. The conductive thin plate is manufactured by rolling.
Rolled metal plate that has not been subjected to heat treatment after rolling.
Claims 1, 2, 3, 4, 5, 6,
7, 8, 9, 10, 11, 12, 13, 14, 15, or
17. The discharge cell for an ozone generator according to item 16 . 18. The conductive thin plate is a stainless steel plate.
Claims 1, 2, 3, 4, 5, 6,
7, 8, 9, 10, 11, 12, 13, 14, 15, 1,
18. The discharge cell for an ozone generator according to 6 or 17 .