JP3113885B2 - Discharge cell for ozone generator - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a discharge cell used in a plate type ozone generator.

[0002]

2. Description of the Related Art A discharge cell shown in FIG. 7 is known as one of the discharge cells used in a plate type ozone generator.

The discharge cell shown in FIG. 7 has a pair of low-voltage electrodes 1, 1 also serving as a heat sink, and a pair of low-voltage electrodes 1, 1.
1 and spacers 4 for forming discharge gaps 3 on both sides of the dielectric unit 2. The dielectric unit 2 includes a high-voltage electrode 2 between two glass plates 2a, 2a as a dielectric.
This is a multilayer structure with b interposed. The spacers 4, 4,... Are made of metal, ceramic, glass, resin, or the like, and are arranged at predetermined intervals in a direction perpendicular to the gas flow direction in the discharge gap 3.

In an ordinary plate-type ozone generator, the low-voltage electrodes 1, 1 and the dielectric unit 2 constitute one module, and the modules are stacked in the thickness direction so that the low-voltage electrodes 1, 1 are shared between adjacent modules. As a result, a discharge cell is formed.

[0005] When generating ozone, a dielectric gas 2 or a mixed gas containing an oxygen gas is passed through discharge gaps 3 and 3 formed on both sides of the dielectric unit 2 while flowing the raw material gas therein. A predetermined high voltage is applied to the high voltage electrode 2b. When a high voltage is applied, silent discharge is generated in the discharge gaps 3 and 3, and oxygen gas in the source gas is ozonized.

In such a discharge cell for a plate-type ozone generator, it has been a recent tendency to reduce the gap amount G of each of the discharge gaps 3 and 3. This is because, by reducing the gap amount G of each of the discharge gaps 3, 3, the cooling efficiency in the discharge gaps 3, 3 is increased, thereby making it possible to increase the concentration of ozone gas. The effect is obtained, and the cooling efficiency in the discharge gaps 3 and 3 is increased, so that the cooling structure of the high-voltage electrode 2a can be omitted, and the thickness of the high-voltage electrode 2a and thus the thickness of the discharge cell can be reduced. Is the reason.

[0007] Regarding the reduction of the discharge gap amount G, the effect of reducing the discharge gap amount to 0.005 inch or less (0.13 mm or less) is described in the published specification of PCT / US / 10765. In fact, tests by the present inventors
According to the analysis, the gap amount G of 0.4 mm or less, especially 0.2 mm or less is clearly effective for generating high-concentration ozone.

[0008]

SUMMARY OF THE INVENTION However, 0.2
It is not easy to stably realize a minimum discharge gap amount G of not more than mm in a mass production level.

That is, in order to realize the minimum discharge gap G, the spacers 4 having the same thickness as the gap G are used.
4 ... is required. As the material of the spacers 4, 4,..., Metal, ceramic, glass, resin, or the like is used as described above.

In the discharge cell shown in FIG. 7, since the assembly pressure F of the cell is directly applied to the spacers 4, 4,.
If the material of the spacers 4, 4,... Is an elastic body such as a resin, the magnitude of the discharge gap G changes depending on the magnitude of the assembly pressure F. Therefore, the discharge gap G is stably controlled to a constant value. It is difficult.

When the material of the spacers 4, 4,... Is a rigid body such as metal, ceramic, glass or the like, a predetermined gap amount G is temporarily secured because compression in the thickness direction does not occur. Since the pressure F is directly applied to the spacers 4, 4,... And the dielectric unit 2, the minute spacers 4, 4,. , 2a may be damaged.

In any case, since it is necessary to pressurize the entire discharge cell evenly, it is inevitable that the pressurizing mechanism (tightening mechanism) becomes large.

It is an object of the present invention to stably secure an extremely small discharge gap amount G of 0.2 mm or less at a mass-production level, and furthermore, to damage cell components and increase the size of a pressure mechanism (clamping mechanism). To provide a discharge cell for an ozone generator that can avoid the above.

[0014]

In order to achieve the above object, a discharge cell for an ozone generator according to the present invention comprises a pair of first electrodes formed of a flat rigid body, and a pair of first electrodes. A rigid body spacer for forming a space which is arranged between the gaps to form a space in which the gap amount is determined, and a plate-like rigid body formed by sandwiching a second electrode between a pair of dielectrics, A dielectric unit held at a neutral position in the space by a discharge gap forming spacer arranged in each discharge gap so as to form a pair of discharge gaps between the pair of first electrodes. .

In the discharge cell for an ozone generator according to the present invention,
The clamping pressure for cell assembly is applied only to the rigid spacers, and the clamping pressure is not directly applied to the dielectric unit in the space formed by the rigid spacers. The dielectric unit is held in the space by a discharge gap forming spacer different from the rigid body spacer, and forms a discharge gap on both sides. The gap amount G of the discharge gap is uniquely determined by the thickness of the rigid body spacer made of a rigid body and the thickness of the dielectric unit.

As described above, in the discharge cell for an ozone generator of the present invention, the space for accommodating the dielectric unit is separately formed by the rigid spacer, so that the discharge gap amount G as small as 0.2 mm or less can be obtained. Stably secured at mass production level. In addition, damage to the cell components and increase in the size of the pressing mechanism (tightening mechanism) can be effectively avoided.

For example, the following two spacers are preferably used as discharge gap forming spacers arranged in each discharge gap to hold the dielectric unit at a neutral position in the space.

An elastic spacer which is inserted into at least one position of each discharge gap in a compressed state, and which elastically presses the dielectric unit from both sides by the compression to hold the dielectric unit at a neutral position in the space.

A rigid body which is arranged at at least one position of each discharge gap and whose thickness is smaller than (G′−T) / 2, where G ′ is the gap amount of the space and T is the thickness of the dielectric unit. Spacer.

When the discharge gap forming spacer is an elastic spacer, the dielectric unit in the space formed by the rigid spacer is provided from both sides due to compression of the elastic spacer disposed in the discharge gap on both sides. , And the dielectric unit is held at a neutral position in the space by the elastic pressing force from both sides. Thus, the gap amount G of the discharge gap is uniquely determined by the thickness of the rigid spacer made of the rigid body and the thickness of the dielectric unit without depending on the elastic spacer. Due to the separation of the tightening pressure and the holding pressure by the combination of the rigid spacer and the elastic spacer, an extremely small discharge gap amount G of 0.2 mm or less can be stably secured at a mass production level. And the increase in the size of the pressurizing mechanism (tightening mechanism) can be effectively avoided.

As the material of the elastic spacer, PFA, PTF having particularly excellent ozone resistance and moderate elasticity are used.
E and the like are preferable. In the discharge cell for an ozone generator of the present invention, the elastic spacers arranged in the discharge gaps are:
It is exposed not only to ozone but also to discharge. If the elastic spacer is likely to be degraded by the influence of the discharge, for example, the second electrode in the dielectric unit may be partially removed in a portion corresponding to the elastic spacer into a long hole shape or the like. In this case, the discharge is stopped or reduced at the elastic spacer, and the spacer is reliably prevented from being deteriorated due to the discharge.

When the discharge gap forming spacer is a rigid spacer, its thickness is defined by the space gap amount G ',
Since the thickness of the dielectric unit is T and is smaller than (G'-T) / 2, no clamping pressure for cell assembly is applied to the dielectric unit. The dielectric unit disposed in the space has a slight backlash in the thickness direction in design, and this backlash makes the gap amounts G, G of the discharge gaps on both sides unstable. G does not become smaller than the thickness of the rigid spacer. According to experiments by the present inventors, the thickness of the rigid spacer and (G′−
Unless the difference from T) / 2 is excessive, it has been confirmed that the instability of the gap amounts G, G does not adversely affect ozone generation.

Rather, by using a rigid spacer as the discharge gap forming spacer, the area occupied by the discharge gap is reduced, and the ozone generation efficiency is increased. In addition, a metal can be used as the material thereof, thereby ensuring extremely high ozone resistance and discharge resistance. In addition, the dielectric or the first
The integration with the electrodes becomes possible, and the assemblability of the discharge cell is improved.

As a method for integrating the rigid spacer to the first electrode or the dielectric, when the rigid spacer is a metal, there is welding to the first electrode. As a welding method, resistance welding is preferable. In the resistance welding, the rigid body spacer (metal spacer) is crushed at the welded portion, so that the welded portion does not protrude toward the dielectric, thereby avoiding a situation in which the dielectric is destroyed at the time of assembling the discharge cell.

As an integration method other than welding, there is a spraying, plating, coating, enamel, or the like of the same material or a different material as the dielectric or the first electrode, or a portion other than the spacer is depressed by etching, grinding, pressing or the like. Sometimes

Specifically, the thickness of the rigid spacer for forming the discharge gap is preferably 80% or more of (G'-T) / 2. If this is less than 80%, the difference in the length of the discharge gap formed on both sides of the dielectric unit will exceed 50%, which may adversely affect ozone generation. The upper limit of the thickness is less than (G'-T) / 2 in order to avoid a situation in which the dielectric is broken by the spacer.

A problem that is feared when a rigid spacer for forming a discharge gap, particularly a conductive spacer is used is an adverse effect on ozone generation due to discharge occurring around the spacer. It has been found that if the occupied area of the conductive spacer in the discharge gap is 0.5% or less of the discharge area, a rapid decrease in the ozone generation performance caused when the conductive spacer is used is prevented (FIG. 6). reference).
Further, the reduction of the occupied area is effective because the effective discharge area for generating ozone is increased regardless of the material of the rigid spacer. Even with such a small occupied area, the rigid body spacer accurately holds the dielectric unit in the space and forms a discharge gap with high dimensional accuracy.

As the material of the rigid spacer, for example, a corrosion-resistant metal such as stainless steel, nickel, tungsten, or titanium, or a ceramic such as glass or alumina can be used.

The discharge gap amount G in the discharge cell for an ozone generator according to the present invention is set to 0.1 in order to increase the concentration of ozone gas.
It is preferably at most 4 mm, particularly preferably at most 0.2 mm.

The shape of the spacer can be any shape such as a disk shape, a band shape, a linear shape, etc., but it is preferable that the space for forming the discharge gap is a rigid spacer or an elastic spacer. And a wire disposed along the direction of flow of the source gas in the discharge gap. When the elastic spacer is a wire (because it is not a face material), the ratio of the area occupied by the spacer to the discharge area in the discharge gap becomes small, and the discharge area effective for ozone generation increases. Further, the gas flow is rectified by disposing the wire in the gas flow direction, and as a result, the gas flows uniformly in the discharge portion.

The wire is preferably one having a circular cross section. When the cross section of the wire is circular, the repulsion at the start of shape deformation is weak, and the repulsion increases as the shape deformation progresses. That is, the repulsion increases as the target discharge gap G approaches. For this reason, it becomes easy to elastically hold the dielectric unit at the neutral position.

The second electrode sandwiched between the pair of dielectrics in the dielectric unit is preferably a high-voltage electrode for easy insulation. In this connection, the first electrode is preferably a low voltage electrode, and the low voltage electrode also preferably functions as a heat sink. The electrode serving also as a heat sink is preferably a thin plate type in which at least two conductive thin plates are overlapped and a refrigerant flow passage is formed between the thin plates from the viewpoint of cell thinning.

As the dielectric material, a glass plate, particularly a glass plate for a liquid crystal substrate, is preferred because of its low cost, withstand voltage characteristics, dimensional accuracy, and the fact that the surface becomes a mirror surface without a polishing step. It is also possible to use a crystal plate such as the above, a ceramic coated plate formed by spraying alumina or the like, an enamel plate and the like.

The first electrode in contact with the discharge gap has a groove-shaped or slit-shaped gas lead-out path at the center of the portion in contact with the discharge gap in the gas flow direction.
The one having a gas outlet hole connected to the gas outlet path is preferable. In this connection, the rigid body spacer preferably has a gas lead-out hole in a portion corresponding to the gas lead-out hole of the first electrode. In this structure, as will be described later, ozone gas is extracted in the laminating direction using a first electrode and a rigid spacer.

[0035]

Embodiments of the present invention will be described below with reference to the drawings. 1 is a front view of a discharge cell for a plate-type ozone generator according to an embodiment of the present invention, FIG. 2 is an exploded perspective view of a cell module of the discharge cell, and FIG. 3 is a first electrode used in the cell module. FIG. 3 is an exploded perspective view of FIG.

As shown in FIG. 1, the discharge cell according to the present embodiment has a plurality of first electrodes 10 made of a flat rigid body.
Are laminated in the plate thickness direction with a pair of rigid spacers 20, 20 on both sides interposed therebetween to constitute a cell module laminate. The stacked body of the cell module is fixed between a pair of upper and lower end plates (not shown) by a plurality of bolts penetrating both sides in the stacking direction. In this laminate, the upper and lower cell modules are the first
The electrode 10 is shared.

Each cell module is, as shown in FIG.
A pair of upper and lower first electrodes 10, 10;
A pair of rigid body spacers 20, 20 sandwiched between the two,
The first electrode 1 is located inside the rigid spacers 20 and 20.
A plurality of discharge gaps provided between the dielectric unit 30 disposed between the first and second electrodes 10 and 10 to form the discharge gaps 50 on both sides of the dielectric unit 30. Elastic spacers 40, 40,.

In the drawings, the vertical dimensions are exaggerated, and the actual thickness is designed to be very thin, for example, 3 mm or less for the first electrode 10 and 3 mm or less for the rigid spacer 20. Have been.

The pair of upper and lower first electrodes 10, 10 are low-voltage electrodes that also serve as heat sinks. Each first electrode 10 is a thin plate-shaped conductive rigid body in which two conductive plates 15 made of a stainless steel plate or the like are joined to form a refrigerant flow passage between the plates.

On one side of the first electrode 10, a coolant introduction hole 1 for introducing cooling water as a coolant into the coolant flow passage.
1 and a coolant outlet hole 12 for taking out the cooling water from the flow passage are provided penetrating the two conductive plates 15 in the plate thickness direction. Further, in order to take out the ozone gas generated in the cell module, the first electrode 10 is provided with a pair of gas outlet holes 13 on both sides and a gas outlet hole 1.
A slit-like gas lead-out path 14 connecting the third and the third 13 is provided to penetrate the two conductive plates 15 and 15 in the plate thickness direction. A plurality of small round holes provided on both sides of the first electrode 10 are through holes for bolts.

Two conductive plates 1 constituting the first electrode 10
As shown in FIG. 3, U-shaped shallow and wide grooves are formed on both of the facing surfaces 5 and 15 so as to surround the gas outlet holes 13 and 13 and the gas outlet path 14. The grooves formed on both opposing surfaces are combined to form a refrigerant flow passage 16 between the conductive plates 15. This shallow and wide groove is easily formed by, for example, etching or the like.

One end of the refrigerant flow passage 16 is connected to the refrigerant introduction hole 11.
And the other end is connected to the refrigerant outlet hole 12. A plurality of ribs 17, 17,... Extending in the flow direction are provided in the refrigerant flow path 16 at predetermined intervals in a direction perpendicular to the flow direction. The ribs 17, 17,... Contribute to the uniform flow of the cooling water and the rigidity of the first electrode 10.

The pair of rigid body spacers 20 on both sides are
A thin plate-shaped conductive rigid body made of a conductive plate material such as a stainless steel plate, which is interposed on both side portions between the first electrodes 10, and between which a gap amount G ′ equal to the spacer thickness is provided.
To form a space. In addition, it functions as an electrical connection member for the first electrodes 10 and 10.

The rigid spacer 20 has a coolant introduction hole 21 and a coolant discharge hole 22 communicating with the coolant introduction hole 11 and the coolant discharge hole 12 of the first electrode 10, respectively. ing. Both rigid spacers 2
A cut-out gas lead-out hole 23 communicating with the gas lead-out hole 13 of the first electrode 10 is provided at each inner edge of 0 and 20 so as to penetrate in the plate thickness direction. Further, through holes for bolts are provided similarly to the first electrode 10.

A dielectric unit 30 disposed in a space surrounded by a pair of upper and lower first electrodes 10, 10 and a pair of rigid spacers 20, 20 on both sides is provided with a pair of upper and lower glass plates 31, 31 as a dielectric. It is a thin plate-shaped rigid body having a sandwich structure with the second electrode 32 interposed therebetween. The thickness T of the dielectric unit 30 is slightly smaller than the gap amount G 'of the space, and more specifically, G'-2G, where G is the gap amount of each of the discharge gaps 50,50. In order to adjust the thickness T, an appropriate number of conductive thin plates are inserted between the glass plates 31, 31 as shims. By this thickness adjustment, an arbitrary discharge gap amount G can be accurately obtained.

The second electrode 32 is a high-voltage electrode made of a conductive thin plate such as a stainless steel plate, and a part thereof is led out from between the glass plates 31, 31 as a terminal portion 32 '. The lateral width of the second electrode 32 is smaller than the lateral width of the glass plates 31, 31, and the rigid spacers 20,
Insulators 33, 33 are provided for insulation between them.

The discharge gap 5 is provided on both sides of the dielectric unit 30.
Elastic spacers 40, 40 for forming discharge gaps provided between the first electrodes 10, 10 to form 0, 50.
Is a thin resin wire having a circular cross section and having ozone resistance and elasticity, and is disposed at predetermined intervals in the width direction of the discharge gap 50 (direction perpendicular to the gas flow direction). The thickness (outer diameter D of the wire) of each elastic spacer 40 is 5 times smaller than each gap amount G of the discharge gaps 50, 50 in a state without compression.
It is set to about 50% larger.

With this setting, the elastic spacers 40, 4
0 .. are compressed from above and below by the first electrode 10 and the dielectric unit 30, and by this compression, the dielectric unit 30 is elastically pressed from above and below with uniform pressure, and is held at the center in the vertical direction in the space. Is done. As a result, the discharge gaps 5 having a uniform gap amount G
0,50 are formed.

On both sides of each of the discharge gaps 50, tape-shaped insulating members 41, 41 made of an elastic material are provided, which also serve as an elastic spacer and a sealing member.

Next, a method of assembling, using, and functions of the discharge cell according to this embodiment will be described.

In assembling the discharge cell, a plurality of first electrodes 10, 10,...
Are sandwiched between each other with the rigid spacers 20, 20, the dielectric unit 30, and the elastic spacers 40, 40,... Sandwiched therebetween, and both sides are fastened in the overlapping direction by a plurality of bolts (not shown).

Thus, in each cell module, discharge gaps 50 are formed on both sides of the dielectric unit 30. Here, the upper and lower first electrodes 10 and 10, the rigid spacers 20 and 20 on both sides, and the dielectric unit 30 are rigid bodies that do not generate compression.
Since 0 .. causes compression, the gap amount G of each discharge gap 50 becomes a constant value of (G'-T) / 2. Therefore, 0.
A small gap amount G of 2 mm or less can be stably realized.

The fastening is performed by the rigid spacers 20,
This is done on both sides where the 20 is located and there is no need to pressurize the entire discharge cell evenly, thus simplifying the clamping mechanism. Further, the elastic spacers 40 and 4 are tightened.
The glass plate 31 in the dielectric unit 30,
No breakage of 31 occurs.

The assembled discharge cells are housed in a tank (not shown) in order to introduce raw material gas into the discharge gaps 50 of each cell module from the front and rear.

In the discharge cell, the refrigerant introduction hole 11 of the first electrode 10 and the refrigerant introduction hole 21 of the rigid body spacer 20 are united to form a refrigerant introduction passage that is continuous in the stacking direction. Further, the refrigerant outlet hole 12 of the first electrode 10 and the refrigerant outlet hole 22 of the rigid body spacer 20 are combined to form a refrigerant outlet path that is continuous in the stacking direction.
Further, the gas outlet holes 13, 13 of the first electrode 10 and the rigid body 2
By merging the 0, 20 gas outlet holes 23, 23, a pair of gas outlet paths on both sides continuous in the laminating direction is formed.

The refrigerant introduction path, the refrigerant discharge path, and the gas discharge path communicate with the outside of the tank through openings provided in the upper end plate and pipes connected to the openings. On the other hand, the lower end plate functions as a lid plate that closes these paths.

When generating ozone, a source gas is supplied into a tank containing a discharge cell. In addition, cooling water is supplied to the refrigerant introduction path. In this state, a high voltage is applied to the second electrode 32 provided in the dielectric unit 30 of each cell module, and silent discharge is generated in the discharge gaps 50,50.

The raw material gas supplied into the tank flows into the upper and lower discharge gaps 50 and 50 in each cell module from front and rear, and is exposed to discharge in the process of flowing toward the center in the front and rear direction to become ozone gas. . The ozone gas generated in the discharge gaps 50, 50 passes through gas outlet paths 14, 14 provided in the upper and lower first electrodes 10, 10, and the gas outlet holes 1 on both sides.
3 and 13 are taken out above the discharge cell through a pair of gas outlet paths on both sides formed on both sides of the discharge cell,
Furthermore, it is taken out of the tank.

The cooling water supplied to the coolant introduction passage enters the coolant flow passage 16 through the coolant introduction holes 11 provided in the upper and lower first electrodes 10 of each cell module, and flows through the discharge gaps 50. Water cooling from the low voltage electrode side. First electrode 1
The cooling water flowing out of the coolant outlet holes 12 and 12 is taken out above the discharge cell through a coolant outlet passage formed on one side of the discharge cell, and further taken out of the tank.

Here, the gas flow in the discharge gap 50 will be described. Conventionally, the gas flow in the discharge gap 50 is one-way from one end of the discharge gap 50 to the other end. In this case, in order to take out the ozone gas, it is necessary to attach a header to an end surface perpendicular to the stacking direction of the discharge cells. However, the end faces of the discharge cells perpendicular to the stacking direction are not flat because the end faces of the stacked members appear. For this reason, sealing between the header and the end face becomes difficult.

On the other hand, in the discharge cell according to the present embodiment, the gas lead-out passage 14 is provided at the center of the first electrode 10 in contact with the discharge gap 50 in the gas flow direction in the discharge gap 50. , The rigid body spacer 20 of the first electrode 10,
Gas outlet holes 13, 13 that are connected to the gas outlet path 14 are provided in a portion in contact with 20. In addition, the rigid body spacer 2
Gas outlet holes 23, 23 are provided at 0, 20 corresponding to the gas outlet holes 13, 13, respectively.

As a result, the source gas flows in from both one end and the other end of the discharge gap 50. Both inflowing gases are ozonized in the discharge gap 50, enter the gas outlet path 14 of the first electrode 10 at the center of the discharge gap 50, and enter the gas outlet holes 13 on both sides.
13 flows out in the stacking direction and is taken out of the discharge cells. Therefore, the ozone gas is taken out from the first electrode 10
Or two tubes from the surface of the end plate. These surfaces are flat unlike the end faces,
Sealing is easy and headers are not required. Further, since the flow direction of the cooling water and the extraction direction of the ozone gas are the same, the piping structure is simplified, and the size of the apparatus is reduced.

The gas extraction structure according to the present invention is applicable to a structure in which a space is formed between a pair of first electrodes by a spacer, a dielectric unit is arranged in this space, and discharge gaps are formed on both sides of the dielectric unit. The present invention is also applicable to discharge cells other than the discharge cells.

FIG. 4 is a partially enlarged front view of a discharge cell for an ozone generator according to another embodiment of the present invention, and FIG. 5 is a longitudinal sectional front view of a discharge unit using the discharge cell for the ozone generator. is there.

The ozone generator discharge cell according to this embodiment is different from the above-described ozone generator discharge cell in the following point.

That is, instead of the elastic spacers 40, 40..., Rigid spacers 60, 60.
The difference is that the glass plates 31, 31 are joined so as to integrate them. The other configuration is the same as that of the above-described discharge cell for an ozone generator, and a detailed description thereof will be omitted.

Rigid spacers 60, 6 for forming discharge gaps
0 ··· discharge gap 5 on both sides of dielectric unit 30
It is provided between the first electrodes 10 and 10 to form 0,50. The rigid body spacers 60, 60,... Are thin metal wires having a circular cross section made of stainless steel or the like, and are arranged at predetermined intervals in the width direction of the discharge gap 50 (the direction perpendicular to the gas flow direction). Each rigid body spacer 60
It is fixed to the surface of the first electrode 10 by resistance welding at a plurality of locations in the longitudinal direction. The thickness (outer diameter D of the wire) of each rigid body spacer 60 is determined by (G′−T) / (G′−T) / the gap amount G ′ of the space defined by the rigid body spacers 20 and the thickness T of the dielectric unit 30. 2 are set slightly smaller than the regular gap amounts G of the discharge gaps 50, 50.

With this setting, the dielectric unit 30
In design, the first electrode 1 is formed by the rigid body spacers 20 and 20.
It is accommodated in the space formed between 0 and 10 with a slight play in the thickness direction. In order to avoid the disassembly of the dielectric unit 30 due to the backlash and to prevent unnecessary discharge generated in the gap between the dielectric and the electrodes in the unit, the dielectric unit 30 has the structure shown in FIGS. As shown in the figure, the glass plates 31, 31 are integrated by joining them.

That is, in FIG. 5A, the glass plates 31, 3
1 is joined and integrated by upper and lower adhesive layers 35, 35 with the second electrode 32 and insulating spacers 33, 33 disposed on both sides of the second electrode 32 interposed therebetween. Insulating spacers 33, 33
Has the same thickness as the second electrode 32. Adhesive layers 35, 35
Is an ozone-resistant polyimide, PFA, F
It is a heat welding layer of EP or the like. That is, the glass plates 31, 31
Are integrated with the inner second electrode 32 and the insulating spacers 33, 33 by thermal welding using an ozone-resistant resin such as polyimide, PFA, or FEP.

In FIGS. 5B and 5C, the glass plates 31, 31 are partially joined only on both sides of the second electrode 32 by thermal welding. In this case, since the adhesive layers 35, 35, which are bonding portions, are removed to the side of the second electrode 32, the thickness of the dielectric unit 30 is reduced, and the dielectric unit 30 functions as an insulating spacer on both sides. Adhesive layers 35 on both sides,
As for 35, as shown in FIG.
Gaps 36, 36 can be provided between 2 and the adhesive layers 35, 35 on both sides. Thereby, an insulated space is formed between the adhesive layers 35, 35, so that the adhesive layers 35, 35 are formed.
It is possible to prevent insulation breakdown due to tree discharge occurring in the inside.

In the discharge cell for an ozone generator according to the present embodiment, as in the discharge cell for an ozone generator described above, tightening is performed on both sides where the rigid spacers 20 and 20 are arranged, and the discharge cell is discharged. Since it is not necessary to pressurize the entirety uniformly, the tightening mechanism is simplified, and the glass plates 31, 3 in the dielectric unit 30 are tightened.
1 is prevented, and a small gap amount G of 0.2 mm or less is stably realized.

[0072]

As described above, in the discharge cell for an ozone generator according to the present invention, the space for accommodating the dielectric unit is formed by the rigid spacer, and the dielectric unit is independently accommodated in the space. By holding at the neutral position in the space by the discharge gap forming spacers on both sides,
An extremely small discharge gap amount G of 2 mm or less can be stably secured at a mass production level, and furthermore, damage to cell constituent members and enlargement of a pressurizing mechanism (tightening mechanism) can be effectively avoided.

[Brief description of the drawings]

FIG. 1 is a front view of a discharge cell for a plate-type ozone generator according to an embodiment of the present invention.

FIG. 2 is an exploded perspective view showing a structure of a cell module of the discharge cell.

FIG. 3 is an exploded perspective view showing a structure of a first electrode used in the cell module.

FIG. 4 is a partially enlarged front view of a discharge cell for a plate-type ozone generator according to another embodiment of the present invention.

FIG. 5 is a vertical sectional front view of a dielectric unit used in a cell module of the discharge cell.

FIG. 6 is a graph showing a relationship between an occupied area of a conductive spacer and an ozone generation amount.

FIG. 7 is a schematic configuration diagram of a conventional discharge cell for a plate-type ozone generator.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 1st electrode (low pressure electrode) 11 Refrigerant introduction hole 12 Refrigerant extraction hole 13 Gas derivation hole 14 Gas derivation path 15 Conductive plate 16 Refrigerant flow path 17 Rib 20 Spacer-forming rigid spacer 21 Refrigerant introduction hole 22 Refrigerant extraction hole 30 Dielectric unit 31 Glass plate (dielectric) 32 Second electrode (high-voltage electrode) 40 Elastic spacer for forming discharge gap 50 Discharge gap 60 Rigid spacer for forming discharge gap

──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Yuji Terashima 1-10 Fuso-cho, Amagasaki City, Hyogo Prefecture Within Sumitomo Precision Industries Co., Ltd. (72) Inventor Noriyo Soya 1-10 Fuso-cho, Amagasaki City, Hyogo Prefecture (72) Inventor Masaya Yoshimura 1-10 Fuso-cho, Amagasaki-shi, Hyogo Sumitomo Precision Industries, Ltd. (56) References JP-A-55-3334 (JP, A) JP-A-55-144407 (JP) , A) (58) Fields surveyed (Int. Cl. ⁷ , DB name) C01B 13/11 H01T 23/00

Claims (9)

(57) [Claims] 1. A space-forming rigid body which is disposed between a pair of first electrodes formed of a plate-like rigid body and a space in which a gap amount is defined between the pair of first electrodes. It is made of a flat rigid body having a spacer and a second electrode sandwiched between a pair of dielectrics, and is disposed in each discharge gap to form a pair of discharge gaps between the pair of first electrodes. A dielectric unit held at a neutral position in the space by the formed discharge gap forming spacer. 2. The discharge gap forming spacer is inserted into at least one position of each discharge gap in a compressed state, and the compression elastically presses the dielectric unit from both sides to reach a neutral position in the space. The discharge cell for an ozone generator according to claim 1, wherein the discharge cell is an elastic spacer to be held. 3. The discharge gap forming spacer is disposed at at least one position of each discharge gap, and has a thickness (G′−G), where G ′ is the gap amount of the space, and T is the thickness of the dielectric unit. 2. The discharge cell for an ozone generator according to claim 1, wherein the rigid spacer is smaller than T) / 2. 3. 4. The discharge cell according to claim 3, wherein the occupied area of the rigid spacer for forming the discharge gap in the discharge gap is 0.5% or less of the discharge area. 5. The ozone generator discharge cell according to claim 3, wherein the rigid spacer for forming the discharge gap is made of a conductive material. 6. The ozone generator according to claim 3, wherein the thickness of the rigid spacer for forming a discharge gap is 80% or more of (G′-T) / 2. Discharge cell. 7. The ozone generator discharge cell according to claim 1, wherein the discharge gap forming spacers are dispersed at a plurality of positions in the discharge gap. 8. The discharge gap forming spacer according to claim 1, 2, 3, 4, 5, 6, or 7, wherein the discharge gap forming spacer is a wire rod disposed along the flow direction of the source gas in the discharge gap. 3. The discharge cell for an ozone generator according to item 1. 9. The discharge cell for an ozone generator according to claim 8, wherein the wire has a circular cross section.