JP3266659B2 - Mold for molding optical element and method for molding optical element - Google Patents

Mold for molding optical element and method for molding optical element

Info

Publication number
JP3266659B2
JP3266659B2 JP24343992A JP24343992A JP3266659B2 JP 3266659 B2 JP3266659 B2 JP 3266659B2 JP 24343992 A JP24343992 A JP 24343992A JP 24343992 A JP24343992 A JP 24343992A JP 3266659 B2 JP3266659 B2 JP 3266659B2
Authority
JP
Japan
Prior art keywords
molding
optical element
mold
die
present
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP24343992A
Other languages
Japanese (ja)
Other versions
JPH0692658A (en
Inventor
孝紳 塩川
聡 檜山
Original Assignee
旭光学工業株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 旭光学工業株式会社 filed Critical 旭光学工業株式会社
Priority to JP24343992A priority Critical patent/JP3266659B2/en
Publication of JPH0692658A publication Critical patent/JPH0692658A/en
Application granted granted Critical
Publication of JP3266659B2 publication Critical patent/JP3266659B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B11/00Pressing molten glass or performed glass reheated to equivalent low viscosity without blowing
    • C03B11/06Construction of plunger or mould
    • C03B11/08Construction of plunger or mould for making solid articles, e.g. lenses
    • C03B11/082Construction of plunger or mould for making solid articles, e.g. lenses having profiled, patterned or microstructured surfaces
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B11/00Pressing molten glass or performed glass reheated to equivalent low viscosity without blowing
    • C03B11/06Construction of plunger or mould
    • C03B11/08Construction of plunger or mould for making solid articles, e.g. lenses
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2215/00Press-moulding glass
    • C03B2215/40Product characteristics
    • C03B2215/41Profiled surfaces
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2215/00Press-moulding glass
    • C03B2215/80Simultaneous pressing of multiple products; Multiple parallel moulds

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は、平面又は任意の曲面に
凹面のマイクロレンズを1個以上有する光学素子を成形
する成形型及び該型を用いた上記光学素子の成形方法に
関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a mold for molding an optical element having at least one microlens having a concave surface on a plane or an arbitrary curved surface, and a method for molding the optical element using the mold.

【0002】[0002]

【従来技術及びその問題点】従来、ガラス材料等から成
る光学素子は、研磨工程により製造されていたが、最近
では加熱により光学素子材料を軟化させ、一対の成形型
及び胴型の間で押圧成形して光学素子を製造するダイレ
クトプレス(ガラスモールド法)が採用されつつある。
このガラスモールド法に使用される成形型は、成形型素
材(WC、セラミックスなど)を所望の形状精度、面精
度の非球面形状に仕上げた母材上に、耐酸化性及び耐濡
れ性の向上を目的として保護膜(例えばPt −Rh 系:
特公昭63−95128号公報)を施したものである。
2. Description of the Related Art Conventionally, an optical element made of a glass material or the like has been manufactured by a polishing process. However, recently, the optical element material is softened by heating and pressed between a pair of a molding die and a body die. A direct press (glass molding method) for manufacturing an optical element by molding is being adopted.
The molding die used for this glass molding method is a material obtained by finishing a molding material (WC, ceramics, etc.) into an aspherical shape with the desired shape accuracy and surface accuracy, and improves oxidation resistance and wet resistance. Protective film (for example, Pt-Rh based:
JP-B-63-95128).

【0003】表面に小さな凹面状マイクロレンズを1個
以上有する光学素子を大量生産する場合にも、上記のよ
うに金型間で成形したいが、金型の成形面に小さな凸面
を形成するのは、極めて困難であり、多大な労力を要す
る。
[0003] Even when mass-producing an optical element having one or more small concave microlenses on its surface, it is desired to mold between the dies as described above, but a small convex surface is formed on the molding surface of the mold. Very difficult and requires a lot of effort.

【0004】[0004]

【発明の目的】本発明は、前記従来技術の問題点を解消
し、型表面に微小な凸面を作ることなく、表面に小さな
凹面状マイクロレンズを1個以上有する光学素子を大量
生産しうる成形型及び光学素子の成形方法を提供するこ
とを目的とする。
SUMMARY OF THE INVENTION It is an object of the present invention to solve the above-mentioned problems of the prior art, and to provide a mold capable of mass-producing an optical element having at least one small concave microlens on its surface without forming a minute convex surface on the mold surface. An object of the present invention is to provide a method for molding a mold and an optical element.

【0005】[0005]

【発明の概要】本発明は、成形型の成形面とは反対側か
ら特定の深さ及び径を有する穴を設けることによって上
記目的を達成したものである。すなわち、本発明による
平面又は任意の曲面に凹面のマイクロレンズを1個以上
有する光学素子を成形する成形型は、その成形面に対し
て裏面に、所望のマイクロレンズ径と同径で、穴の先端
が成形面より1.5mm以下で成形面に貫通しない深さ
の穴をマイクロレンズの所望の数だけ設けたことを特徴
とする。
SUMMARY OF THE INVENTION The present invention has achieved the above object by providing a hole having a specific depth and diameter from the side opposite to the molding surface of a mold. That is, a mold for molding an optical element having one or more concave microlenses on a flat surface or an arbitrary curved surface according to the present invention has a hole having the same diameter as the desired microlens diameter on the back surface with respect to the molding surface. It is characterized in that a desired number of microlenses are provided with holes whose tip ends are 1.5 mm or less from the molding surface and do not penetrate the molding surface.

【0006】さらに、本発明による光学素子の成形方法
は、平面又は任意の曲面に凹面のマイクロレンズを1個
以上有する光学素子を成形するにあたり、上型及び/又
は下型として請求項1記載の成形型を用い、光学素子材
料及び成形型を加熱し、光学素子材料を軟化させた後、
成形型により成形することを特徴とする。
Further, in the method of molding an optical element according to the present invention, an upper and / or lower mold is used as an upper mold and / or a lower mold when molding an optical element having at least one microlens having a concave surface on a plane or an arbitrary curved surface. Using a mold, heat the optical element material and the mold, after softening the optical element material,
It is characterized by being molded by a molding die.

【0007】本発明において、成形型の母材は、特に制
限されるものではなく、各種のものを使用でき、例え
ば、ステンレス鋼、各種の耐熱合金、各種のセラミック
ス、炭化タングステン、炭化珪素、窒化珪素などから成
るものが挙げられる。これらの母材は、超精密加工で平
面又は所望の曲面に削った後、ダイヤモンドペースト研
磨材などを使用して表面粗さがRmax =0.02μm以下
になるように表面を研磨される。この母材の表面には耐
酸化性及び耐濡れ性の向上を目的として被膜が設けられ
る。被膜は、スパッタリング法、イオンプレーティング
法、化学的気相成長(CVD)法など、公知の方法で貴
金属、貴金属合金、セラミックス又は貴金属とセラミッ
クスとの混合物を用いて設けられる。
In the present invention, the base material of the mold is not particularly limited, and various types can be used. For example, stainless steel, various heat-resistant alloys, various ceramics, tungsten carbide, silicon carbide, nitrided One made of silicon or the like can be used. These base materials are ground into a flat surface or a desired curved surface by ultra-precision processing, and then the surfaces thereof are polished using a diamond paste abrasive or the like so that the surface roughness becomes R max = 0.02 μm or less. A coating is provided on the surface of the base material for the purpose of improving oxidation resistance and wet resistance. The coating is provided by a known method such as a sputtering method, an ion plating method, and a chemical vapor deposition (CVD) method, using a noble metal, a noble metal alloy, a ceramic, or a mixture of a noble metal and a ceramic.

【0008】本発明の成形型は、上記のように、その成
形面に対して裏面に、所望のマイクロレンズ径と同径
で、穴の先端が成形面より1.5mm以下で成形面に貫
通しない深さの穴を有する。この成形型を用いて凹面の
マイクロレンズを有する光学素子を成形しうるメカニズ
ムは、必ずしも完全には解明されていないが、成形型を
加熱した際に、穴の先端部、すなわち型の肉厚の薄い部
分が他の部分より大きく膨張し、表面に凸面を有する成
形型に変形し、これと接触した光学素子材料を、凹面の
マイクロレンズを有する光学素子に成形するものと考え
られる。
As described above, the molding die of the present invention has the same diameter as the desired microlens on the back surface with respect to the molding surface, and the tip of the hole is 1.5 mm or less from the molding surface and penetrates the molding surface. Not having holes of depth. The mechanism by which this mold can be used to mold an optical element having a concave microlens has not been completely elucidated, but when the mold is heated, the tip of the hole, that is, the thickness of the mold, is reduced. It is considered that the thin portion expands more than the other portions and deforms into a mold having a convex surface, and the optical element material in contact therewith is molded into an optical element having a concave microlens.

【0009】本発明により成形される光学素子上のマイ
クロレンズの形状は、裏面からの穴の先端の形状、穴先
端と成形面との間の肉厚、成形温度、圧力等に依存す
る。また、光学素子材料としては、各種の光学ガラスの
みならず、樹脂を使用することもできる。さらに、成形
方法としても、押圧成形のみならず、射出成形、熱垂下
成形法など、様々な方法を適用することができる。
The shape of the microlens on the optical element formed by the present invention depends on the shape of the tip of the hole from the back surface, the thickness between the tip of the hole and the molding surface, the molding temperature, the pressure, and the like. Further, as the optical element material, not only various optical glasses but also resins can be used. Further, as a molding method, not only press molding but also various methods such as injection molding and hot sag molding can be applied.

【0010】[0010]

【実施例】次に、図面を参照して本発明を実施例によっ
て詳細に説明するが、本発明はこれに限定されるもので
はない。図1は本発明の一実施例を示す成形型の斜視図
であり、図2は図1に示した成形型の断面図である。図
1及び2において、成形型1は、その成形面2に被膜3
を有し、成形面2に対して裏面から複数個の穴4が設け
られている。この穴4は、所望のマイクロレンズと同径
で、その先端が成形面より1.5mm以下で、成形面に
貫通しない深さとなっている。
Next, the present invention will be described in detail by way of examples with reference to the drawings, but the present invention is not limited to these examples. FIG. 1 is a perspective view of a molding die showing one embodiment of the present invention, and FIG. 2 is a sectional view of the molding die shown in FIG. 1 and 2, a molding die 1 has a coating 3 on a molding surface 2 thereof.
And a plurality of holes 4 are provided on the molding surface 2 from the back surface. The hole 4 has the same diameter as the desired microlens, its tip is 1.5 mm or less from the molding surface, and has a depth not penetrating the molding surface.

【0011】上記成形型を用いて光学素子を成形する方
法を図3及び図4により説明する。図3は、光学素子材
料の押圧成形前の、図1に示した本発明の成形型を上型
として用いた成形部の状態を示す概略説明図であり、図
4は、成形中の成形部の状態を示す概略説明図である。
成形型1を上部シリンダー5に取り付け、下型6上に光
学素子材料11を載せてセットし、ヒーター8で成形部
を加熱する。加熱温度は、熱電対10によって測定され
る。高温時には、酸化による型部材の劣化を防ぐため雰
囲気シールボックス9内に雰囲気ガス供給口13から不
活性ガス、例えは窒素ガスを供給することができる。な
お、7は光学素子の厚み調整スペーサーである。
A method for forming an optical element using the above-described mold will be described with reference to FIGS. FIG. 3 is a schematic explanatory view showing a state of a molding part using the molding die of the present invention shown in FIG. 1 as an upper mold before press molding of an optical element material, and FIG. FIG. 4 is a schematic explanatory diagram showing the state of FIG.
The molding die 1 is attached to the upper cylinder 5, the optical element material 11 is set on the lower die 6, and the molding part is heated by the heater 8. The heating temperature is measured by the thermocouple 10. At a high temperature, an inert gas, for example, a nitrogen gas can be supplied from the atmosphere gas supply port 13 into the atmosphere seal box 9 in order to prevent deterioration of the mold member due to oxidation. Reference numeral 7 denotes a spacer for adjusting the thickness of the optical element.

【0012】光学素子材料11が軟化したら上部シリン
ダー5を降ろし、光学素子材料11を所望の圧力で押圧
し、成形する。その後、徐冷し、成形部の温度が光学素
子材料11のガラス転移点より低くなったときに圧力を
除き、上部シリンダー5を上昇させて成形品12を取り
出す。得られた成形品12の断面図を図5に示す。これ
を必要とする大きさにカットして様々な用途に使用する
ことができる。
When the optical element material 11 is softened, the upper cylinder 5 is lowered, and the optical element material 11 is pressed at a desired pressure to be molded. Thereafter, the temperature is gradually cooled, and when the temperature of the molded portion becomes lower than the glass transition point of the optical element material 11, the pressure is removed, and the upper cylinder 5 is raised to take out the molded product 12. FIG. 5 shows a sectional view of the obtained molded product 12. This can be cut to the required size and used for various applications.

【0013】実施例1 成形型は、SUS304ステンレス鋼を母材とし、成形
面は表面粗さが 0.02μm以下になるまで平面研磨し
た。成形面には、白金−金合金被膜を1μmの厚さでコ
ーティングした。成形型の裏面には、所望のマイクロレ
ンズと同径(直径1mm)の穴4をピッチ2mmの間隔
で、その先端が成形面まで0.5mmを残す深さに開け
た。また、穴の先端形状は、曲率半径0.5mmの球面
にした。
Example 1 A molding die was made of SUS304 stainless steel as a base material, and the molding surface was ground and polished until the surface roughness became 0.02 μm or less. The molding surface was coated with a platinum-gold alloy film to a thickness of 1 μm. Holes 4 having the same diameter (diameter: 1 mm) as the desired microlenses were formed on the back surface of the mold at intervals of 2 mm at a depth of 0.5 mm from the tip to the molding surface. The shape of the tip of the hole was a spherical surface having a radius of curvature of 0.5 mm.

【0014】このようにして作成した成形型を上部シリ
ンダーに取り付け、この上型と同材質から成るが、穴を
有しない下型上に光学素子材料である光学ガラスSFS
01(小原光学硝子社製)を載せ、セットした。ヒータ
ーで成形部を加熱し、440℃になった時点で上部シリ
ンダーを降ろし、光学素子材料を押圧成形した。その
後、冷却し、温度が380℃を下回ったらシリンダーを
上昇させ、成形品を取り出した。得られた成形品は、表
面に直径1mm、曲率半径0.5mmの凹レンズをピッ
チ2mmの間隔で有する光学素子であった。
The mold thus prepared is mounted on an upper cylinder, and an optical glass SFS as an optical element material is placed on a lower mold made of the same material as the upper mold but having no holes.
01 (manufactured by Ohara Optical Glass) was set. The molded part was heated with a heater, and when the temperature reached 440 ° C., the upper cylinder was lowered to press-mold the optical element material. Thereafter, it was cooled, and when the temperature was lower than 380 ° C., the cylinder was raised and the molded product was taken out. The obtained molded product was an optical element having concave lenses with a diameter of 1 mm and a radius of curvature of 0.5 mm on the surface at intervals of 2 mm.

【0015】なお、上記実施例には、上型のみに本発明
の成形型を用いたが、上型及び下型の両方に本発明の成
形型を用いれば、両面にマイクロレンズを有する光学素
子を製造できる。
In the above embodiment, the mold of the present invention was used only for the upper mold. However, when the mold of the present invention was used for both the upper mold and the lower mold, the optical element having microlenses on both surfaces was used. Can be manufactured.

【0016】[0016]

【発明の効果】本発明の成形型は、型表面に微小な凸面
を作る必要がないので、容易に安価に製造できる。ま
た、本発明の成形型を用いれば、表面に小さな凹面状マ
イクロレンズを1個以上有する光学素子を容易に大量生
産することができる。
The molding die of the present invention can be easily and inexpensively manufactured because it is not necessary to form a minute convex surface on the surface of the molding die. Further, by using the mold of the present invention, an optical element having one or more small concave microlenses on its surface can be easily mass-produced.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の一実施例を示す成形型の斜視図であ
る。
FIG. 1 is a perspective view of a mold showing one embodiment of the present invention.

【図2】図1の成形型の断面図である。FIG. 2 is a cross-sectional view of the mold of FIG.

【図3】光学素子材料の押圧成形前の成形部の状態を示
す概略説明図である。
FIG. 3 is a schematic explanatory view showing a state of a molded portion before press molding of an optical element material.

【図4】光学素子材料の押圧成形中の成形部の状態を示
す概略説明図である。
FIG. 4 is a schematic explanatory view showing a state of a molding portion during press molding of an optical element material.

【図5】押圧成形された成形品の断面図である。FIG. 5 is a cross-sectional view of a press-formed product.

【符号の説明】[Explanation of symbols]

1 成形型 2 成形面 3 被膜 4 穴 5 上部シリンダー 6 下型 7 厚み調整スペーサー 8 ヒーター 9 雰囲気シールボックス 10 熱電対 11 光学素子材料 12 成形品 Reference Signs List 1 molding die 2 molding surface 3 coating 4 hole 5 upper cylinder 6 lower die 7 thickness adjusting spacer 8 heater 9 atmosphere seal box 10 thermocouple 11 optical element material 12 molded product

フロントページの続き (56)参考文献 特開 平2−111635(JP,A) 特開 平1−188436(JP,A) 特開 昭61−95912(JP,A) 特開 昭62−278136(JP,A) 特開 平2−133326(JP,A) 特開 平2−149436(JP,A) 特開 平4−175228(JP,A) (58)調査した分野(Int.Cl.7,DB名) C03B 11/00 - 11/16 Continuation of the front page (56) References JP-A-2-111635 (JP, A) JP-A-1-188436 (JP, A) JP-A-69-195912 (JP, A) JP-A-62-278136 (JP) JP-A-2-133326 (JP, A) JP-A-2-149436 (JP, A) JP-A-4-175228 (JP, A) (58) Fields investigated (Int. Cl. 7 , DB Name) C03B 11/00-11/16

Claims (3)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 平面又は任意の曲面に凹面のマイクロレ
ンズを1個以上有する光学素子を成形する成形型であっ
て、その成形面に対して裏面に、所望のマイクロレンズ
径と同径で、穴の先端が成形面より1.5mm以下で成
形面に貫通しない深さの穴をマイクロレンズの所望の数
だけ設けたことを特徴とする光学素子成形用の成形型。
1. A molding die for molding an optical element having one or more concave microlenses on a flat surface or an arbitrary curved surface, wherein the molding surface has a back surface having the same diameter as a desired microlens diameter. A molding die for molding an optical element, wherein a desired number of microlenses are provided with holes whose tip ends are not more than 1.5 mm from the molding surface and do not penetrate the molding surface.
【請求項2】 平面又は任意の曲面に凹面のマイクロレ
ンズを1個以上有する光学素子を成形するにあたり、上
型及び/又は下型として請求項1記載の成形型を用い、
光学素子材料及び成形型を加熱し、光学素子材料を軟化
させた後、成形型により成形することを特徴とする光学
素子の成形方法。
2. In molding an optical element having one or more concave microlenses on a flat surface or an arbitrary curved surface, the molding die according to claim 1 is used as an upper die and / or a lower die.
A method for molding an optical element, comprising heating an optical element material and a mold to soften the optical element material, and then molding with a mold.
【請求項3】 成形を押圧成形法、射出成形法又は熱垂
下成形法によって行う請求項2記載の光学素子の成形方
法。
3. The method for molding an optical element according to claim 2, wherein the molding is performed by a press molding method, an injection molding method or a hot sag molding method.
JP24343992A 1992-09-11 1992-09-11 Mold for molding optical element and method for molding optical element Expired - Fee Related JP3266659B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24343992A JP3266659B2 (en) 1992-09-11 1992-09-11 Mold for molding optical element and method for molding optical element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24343992A JP3266659B2 (en) 1992-09-11 1992-09-11 Mold for molding optical element and method for molding optical element

Publications (2)

Publication Number Publication Date
JPH0692658A JPH0692658A (en) 1994-04-05
JP3266659B2 true JP3266659B2 (en) 2002-03-18

Family

ID=17103896

Family Applications (1)

Application Number Title Priority Date Filing Date
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Country Status (1)

Country Link
JP (1) JP3266659B2 (en)

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JP2000316069A (en) * 1999-04-30 2000-11-14 Rohm Co Ltd Manufacture of lens array and lens array
JP3307364B2 (en) 1999-05-11 2002-07-24 日本電気株式会社 Method for manufacturing solid-state imaging device
US6305194B1 (en) * 1999-07-15 2001-10-23 Eastman Kodak Company Mold and compression molding method for microlens arrays
JP4112776B2 (en) * 2000-05-02 2008-07-02 ローム株式会社 Lens array manufacturing method and lens array shading treatment method
JP2004309557A (en) * 2003-04-02 2004-11-04 Keiwa Inc Optical sheet and back light unit using optical sheet
TWI721368B (en) * 2018-04-17 2021-03-11 日商岡本硝子股份有限公司 Mold for molding glass optical parts and method for manufacturing glass optical parts using the mold

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