JP3265831B2 - Non-reciprocal circuit device and manufacturing method thereof - Google Patents
Non-reciprocal circuit device and manufacturing method thereofInfo
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- JP3265831B2 JP3265831B2 JP13894894A JP13894894A JP3265831B2 JP 3265831 B2 JP3265831 B2 JP 3265831B2 JP 13894894 A JP13894894 A JP 13894894A JP 13894894 A JP13894894 A JP 13894894A JP 3265831 B2 JP3265831 B2 JP 3265831B2
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- fired body
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- capacitor
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Description
【0001】[0001]
【産業上の利用分野】本発明は、準マイクロ波帯,マイ
クロ波帯で使用される非可逆回路素子,及びその製造方
法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a quasi-microwave band, a nonreciprocal circuit device used in a microwave band, and a method of manufacturing the same.
【0002】[0002]
【従来の技術】携帯電話,自動車電話等の移動通信機器
に採用される非可逆回路素子は、信号を伝送方向にのみ
通過させ、逆方向への伝送を阻止する機能を有してい
る。この種の非可逆回路素子として、例えば複数の中心
電極を電気的絶縁状態でかつ交差させて配置し、該交差
部分にマイクロ波用磁性体を配設してなる集中定数型の
サーキュレータ,アイソレータがある。2. Description of the Related Art Non-reciprocal circuit elements used in mobile communication devices such as mobile phones and automobile phones have a function of passing a signal only in the transmission direction and preventing transmission in the reverse direction. As this type of non-reciprocal circuit device, for example, a lumped-constant type circulator or isolator in which a plurality of center electrodes are arranged in an electrically insulated state and cross each other, and a magnetic material for microwaves is arranged at the cross portion. is there.
【0003】図4及び図5は、それぞれ従来のY型広帯
域サーキュレータの等価回路図及び概略構成図を示す。
この集中定数型サーキュレータ1は、3つの中心電極2
をそれぞれ絶縁体を介在させて120度の角度をなすよ
う交差させ、この交差部分にマイクロ波用磁性体3を配
置するとともに、該磁性体3に永久磁石4により直流磁
界を印加して構成されている。上記各中心電極2の一端
部は外部導体5に、他端部は入力端子A,B,Cにそれ
ぞれ接続されており、この入力端子A〜Cにはインダク
タンス部Ls,キャパシタ部Csが接続されている。FIGS. 4 and 5 show an equivalent circuit diagram and a schematic configuration diagram of a conventional Y-type broadband circulator, respectively.
This lumped constant type circulator 1 has three center electrodes 2
Are intersected at an angle of 120 degrees with an insulator interposed therebetween, and the microwave magnetic body 3 is arranged at the intersection, and a DC magnetic field is applied to the magnetic body 3 by the permanent magnet 4. ing. One end of each of the center electrodes 2 is connected to the external conductor 5 and the other end is connected to input terminals A, B, and C, respectively. The input terminals A to C are connected to an inductance portion Ls and a capacitor portion Cs. ing.
【0004】また上記サーキュレータ1では中心周波数
の広帯域化を図るために、上記外部導体5とこれと絶縁
状態に配置された接地導体6との間に直列共振回路L
w,Cwを接続し、これにより使用周波数帯域の中心周
波数付近で共振させるようにしている。このような共振
回路は、従来、チタン酸バリウム等からなる誘電体基板
等に容量電極を形成し、これを上記外部導体5と接地導
体6との間に配設して構成するのが一般的である。In the circulator 1, in order to widen the center frequency, a series resonance circuit L is connected between the outer conductor 5 and a ground conductor 6 arranged in an insulated state.
w and Cw are connected, so that resonance occurs near the center frequency of the operating frequency band. Conventionally, such a resonance circuit is generally formed by forming a capacitor electrode on a dielectric substrate or the like made of barium titanate or the like and disposing the capacitor electrode between the external conductor 5 and the ground conductor 6. It is.
【0005】[0005]
【発明が解決しようとする課題】ところで、近年の移動
通信機器においては、その用途からして高性能化,小型
化,汎用化,低コスト化が進んでおり、これにともなっ
て非可逆回路素子においても高性能化,小型化,低コス
ト化等の要請が強くなっている。In recent years, mobile communication devices have been improved in performance, downsizing, versatility, and cost reduction because of their applications. Accordingly, non-reciprocal circuit devices have been developed. Demands for higher performance, smaller size, lower cost, etc. are increasing.
【0006】このような要請に対応するには、マイクロ
波用磁性体と永久磁石との空間をできるだけ狭くするこ
とにより、該磁性体に直流磁界を効率良く印加すること
ができ、かつ小型化に貢献できる。しかしながら上記空
間を狭くすると、直列共振回路を構成する誘電体基板を
配設することが困難となり、高性能化,小型化に対応で
きないという問題がある。In order to meet such a demand, the space between the microwave magnetic body and the permanent magnet is made as narrow as possible, so that a DC magnetic field can be efficiently applied to the magnetic body and the size can be reduced. Can contribute. However, when the space is narrowed, it becomes difficult to dispose a dielectric substrate constituting a series resonance circuit, and there is a problem that high performance and miniaturization cannot be accommodated.
【0007】また上記直列共振回路を付加する場合、こ
れの付加位置によっては特性値が大幅に変化し易いた
め、入力端子に対して対称な位置関係を保つように中心
電極の外部導体の中心軸に付加する必要がある。ところ
が上述のように共振回路を付加する空間が極めて狭いこ
とから、正確な対称性を保つことが困難であり、高性能
化に対応できないという問題がある。In addition, when the above-mentioned series resonance circuit is added, the characteristic value is liable to change greatly depending on the position where the series resonance circuit is added. Must be added to However, since the space for adding the resonance circuit is extremely narrow as described above, it is difficult to maintain accurate symmetry, and there is a problem that high performance cannot be achieved.
【0008】さらに上記従来の構造では、マイクロ波用
磁性体,共振回路用誘電体基板等の別部品を組み立てる
という工程であることから、部品点数,製造工数が増え
る分だけコストが上昇し、この点からも上記要請に対応
できない。Further, in the above-described conventional structure, since a separate part such as a magnetic material for microwaves and a dielectric substrate for a resonance circuit is assembled, the cost increases as the number of parts and the number of manufacturing steps increase. From the point of view, we cannot respond to the above request.
【0009】本発明は上記従来の状況に鑑みてなされた
もので、高性能化,小型化,さらには低コスト化に対応
できる非可逆回路素子及びその製造方法を提供すること
を目的としている。The present invention has been made in view of the above-mentioned conventional circumstances, and has as its object to provide a non-reciprocal circuit device capable of coping with high performance, miniaturization, and cost reduction, and a method of manufacturing the same.
【0010】[0010]
【課題を解決するための手段】請求項1の発明は、マイ
クロ波用磁性材料からなるグリーンシートを積層して一
体焼結してなる焼成体内に、互いに電気的絶縁状態で、
かつ交差させて配置された複数の中心電極と、共振回路
用容量を取り出す容量電極とを積層して埋設し、上記各
中心電極の両端面及び上記容量電極の端面を上記焼成体
の外面に導出し、該各中心電極の一端面と上記容量電極
の端面とを上記焼成体の外面に形成された外部取り出し
用電極で接続し、上記焼成体の少なくとも一主面にアー
ス電極を形成し、該アース電極と上記容量電極との電極
間に上記マイクロ波用磁性体からなる共振回路用容量層
を形成したことを特徴としている。According to the first aspect of the present invention, a green body made of a magnetic material for microwaves is laminated and integrally sintered in a fired body in an electrically insulated state.
In addition, a plurality of center electrodes arranged in an intersecting manner and a capacitor electrode for taking out a capacitance for a resonance circuit are stacked and buried, and both end surfaces of each of the center electrodes and end surfaces of the capacitor electrode are led out to the outer surface of the fired body. Then, one end face of each of the center electrodes and the end face of the capacitor electrode are connected by an external extraction electrode formed on an outer surface of the fired body, and a ground electrode is formed on at least one main surface of the fired body. A resonance circuit capacitor layer made of the magnetic material for microwaves is formed between an electrode between the ground electrode and the capacitor electrode.
【0011】ここで、上記マイクロ波用磁性体には、イ
ットリウム鉄ガーネット,カルシウムバナジウムガーネ
ット,マンガンマグネシウムフェライト,ニッケル亜鉛
フェライト,リチウムフェライト等が採用できる。Here, yttrium iron garnet, calcium vanadium garnet, manganese magnesium ferrite, nickel zinc ferrite, lithium ferrite and the like can be used as the magnetic material for microwaves.
【0012】請求項2の発明は、請求項1において、上
記共振回路用容量が、上記各中心電極の外部取り出し用
電極の中心軸と上記アース電極との間に直列接続されて
いることを特徴としている。According to a second aspect of the present invention, in the first aspect, the resonance circuit capacitor is connected in series between a center axis of an external extraction electrode of each of the center electrodes and the ground electrode. And
【0013】請求項3の発明は、上記非可逆回路素子の
製造方法であって、マイクロ波用磁性材料からなる複数
のグリーンシートを形成する第1工程と、各グリーンシ
ートに中心電極をパターン形成するとともに、他のグリ
ーンシートに共振回路用容量を取り出す容量電極をパタ
ーン形成し、上記各中心電極が形成されたグリーンシー
トの上,下面に残りのグリーンシートを重ねるととも
に、上記容量電極が形成されたグリーンシートを重ね、
該グリーンシートの下面に共振回路用容量層を構成する
グリーンシートを重ねて積層体を形成する第2工程と、
上記積層体と各中心電極及び容量電極とを同時に一体焼
成して焼成体を形成し、該焼成体の外面に上記各中心電
極の一端と容量電極の端面とを接続する外部取り出し電
極を形成し、上記焼成体の少なくとも一主面にアース電
極を形成する第3工程とを備えたことを特徴としてい
る。According to a third aspect of the present invention, there is provided the method of manufacturing a non-reciprocal circuit device, wherein a first step of forming a plurality of green sheets made of a magnetic material for microwaves, and forming a central electrode on each green sheet is performed. At the same time, a capacitance electrode for taking out the resonance circuit capacitance is formed in a pattern on another green sheet, and the remaining green sheets are overlapped on the upper and lower surfaces of the green sheet on which the respective center electrodes are formed. Layered green sheets,
A second step of stacking a green sheet constituting a resonance circuit capacitance layer on a lower surface of the green sheet to form a laminate;
Forming a fired body by simultaneously firing the laminate and each of the center electrode and the capacitor electrode to form a fired body, and forming an external extraction electrode connecting one end of each of the center electrodes and the end face of the capacitor electrode to the outer surface of the fired body. And a third step of forming a ground electrode on at least one main surface of the fired body.
【0014】[0014]
【作用】請求項1の発明に係る非可逆回路素子によれ
ば、共振回路用容量を取り出す容量電極をマイクロ波用
磁性体からなる焼成体内に一体に埋没したので、従来の
誘電体基板を不要にでき、それだけ磁性体と永久磁石と
の空間を狭くすることができる。その結果、直流磁界の
印加効率を向上でき、高性能化及び小型化に対応でき
る。また上記容量電極の誘電体部分を磁性体材料と同一
材料で構成したので、準マイクロ波帯,マイクロ波帯で
の誘電損失を小さくでき、Q値の高い共振容量が得ら
れ、この点からも高性能化に対応できる。According to the nonreciprocal circuit device according to the first aspect of the present invention, since the capacitor electrode for extracting the capacitance for the resonance circuit is integrally buried in the fired body made of the magnetic material for microwaves, the conventional dielectric substrate is unnecessary. Therefore, the space between the magnetic body and the permanent magnet can be narrowed accordingly. As a result, the DC magnetic field application efficiency can be improved, and higher performance and smaller size can be accommodated. Further, since the dielectric portion of the capacitor electrode is made of the same material as the magnetic material, dielectric loss in the quasi-microwave band and the microwave band can be reduced, and a high Q value resonance capacitance can be obtained. Compatible with high performance.
【0015】さらに本発明では、マイクロ波用磁性体内
に容量電極,容量層を一体形成するので、従来のそれぞ
れ別部品形成し、これを組立てるという工程を不要にで
き、部品点数,製造工数を削減できる分だけコストを低
減できる。Further, according to the present invention, since the capacitor electrode and the capacitor layer are integrally formed in the microwave magnetic body, the conventional steps of separately forming and assembling the components can be eliminated, and the number of components and the number of manufacturing steps can be reduced. Cost can be reduced as much as possible.
【0016】請求項2の発明では、上記共振回路用容量
を各中心電極の外部取り出し用電極の中心軸とアース電
極との間に直列接続したので、同相励振時のエネルギー
を効率良く増大でき、高性能化に対応できる。即ち、上
述のように磁性体と永久磁石とが近接した狭い空間に共
振回路用容量を設置できることから、該共振回路を中心
軸に付加することが可能となり、ひいては入力端子に対
して正確な対称性を保つことができる。According to the second aspect of the present invention, since the resonance circuit capacitor is connected in series between the center axis of the external extraction electrode of each center electrode and the ground electrode, the energy at the time of in-phase excitation can be increased efficiently. Compatible with high performance. That is, since the resonance circuit capacitor can be installed in a narrow space where the magnetic material and the permanent magnet are close to each other as described above, it is possible to add the resonance circuit to the center axis, and thus, it is possible to accurately adjust the resonance circuit with respect to the input terminal. Sex can be maintained.
【0017】請求項3の発明では、マイクロ波用磁性材
料からなる複数のグリーンシートに中心電極,容量電極
をパターン形成し、該グリーンシートと残りのグリーン
シートとを積層した後一体焼成し、該焼成体の外面に各
中心電極と容量電極とを接続する外部取り出し用電極を
形成するとともに、上記焼成体の一主面にアース電極を
形成したので、直流磁界が印加される磁性体と共振回路
用容量とを同時に形成でき、上述のようにコストを低減
できる。According to the third aspect of the present invention, a center electrode and a capacitor electrode are formed in a pattern on a plurality of green sheets made of a magnetic material for microwaves, and the green sheets and the remaining green sheets are laminated and then integrally fired. An external electrode for connecting each center electrode and the capacitor electrode is formed on the outer surface of the fired body, and a ground electrode is formed on one main surface of the fired body. Capacity can be formed at the same time, and the cost can be reduced as described above.
【0018】[0018]
【実施例】以下、本発明の実施例を添付図に基づいて説
明する。図1ないし図3は、請求項1〜3の発明の一実
施例による非可逆回路素子及びその製造方法を説明する
ための図であり、図1は本実施例の非可逆回路素子の斜
視図、図2は本実施例素子の概略構成図、図3は上記実
施例素子の製造工程を示す分解斜視図である。本実施例
では、集中定数型のサーキュレータに適用した場合を例
にとって説明する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the accompanying drawings. 1 to 3 are views for explaining a non-reciprocal circuit device and a method for manufacturing the same according to one embodiment of the first to third aspects of the present invention. FIG. 1 is a perspective view of the non-reciprocal circuit device of the present embodiment. FIG. 2 is a schematic structural view of the device of this embodiment, and FIG. 3 is an exploded perspective view showing a manufacturing process of the device of the above embodiment. In this embodiment, a case where the present invention is applied to a lumped constant type circulator will be described as an example.
【0019】図において、10は集中定数型のサーキュ
レータであり、これは円柱状の焼成体11からなり、該
焼成体11は磁気閉回路を構成する図示しない金属ヨー
ク内に収容されている。上記焼成体11内には3つの中
心電極12a〜12cが埋設されており、この各中心電
極12a〜12cは互いに電気的絶縁状態で、かつ12
0度の角度ごとに交差させて配置されている。上記各中
心電極12a〜12cの両端面は上記焼結体11の外周
面11aに導出されており、この導出部には外部取り出
し用電極13a〜13c,14a〜14cが接続形成さ
れている。また上記焼結体11の両端面11b,11c
にはアース電極15,15が形成されており、該アース
電極15は金属ヨークに接地されている。In the figure, reference numeral 10 denotes a lumped constant type circulator, which comprises a cylindrical fired body 11, which is housed in a metal yoke (not shown) constituting a magnetic closed circuit. In the fired body 11, three center electrodes 12a to 12c are buried, and the center electrodes 12a to 12c are electrically insulated from each other.
They are arranged so as to intersect at every 0 degree angle. Both end surfaces of each of the center electrodes 12a to 12c are led out to the outer peripheral surface 11a of the sintered body 11, and external lead-out electrodes 13a to 13c and 14a to 14c are connected to the lead portions. Further, both end faces 11b and 11c of the sintered body 11 are provided.
Are formed with ground electrodes 15, 15 which are grounded to a metal yoke.
【0020】上記焼成体11は後述するマイクロ波用磁
性材料からなるグリーンシートを積層し、これを一体焼
成して形成されたもので、この焼成体11の両端面11
b,11cには永久磁石16,16が近接して配置され
ており、この永久磁石16により上記焼成体11に直流
磁界が印加されている。The fired body 11 is formed by laminating green sheets made of a magnetic material for microwaves, which will be described later, and integrally firing the green sheets.
Permanent magnets 16, 16 are arranged close to b, 11 c, and a DC magnetic field is applied to the fired body 11 by the permanent magnets 16.
【0021】上記焼成体11の下部には、直列共振回路
用容量を取り出す容量電極17が埋設されており、該容
量電極17の周端面は焼成体11の外周面11aに導出
されている。この容量電極17には上記外部取り出し電
極14a〜14cが接続されており、該電極17は外部
導体としても機能している。At the lower part of the fired body 11, a capacitor electrode 17 for taking out a capacitance for a series resonance circuit is embedded, and the peripheral end face of the capacitor electrode 17 is led out to the outer peripheral surface 11a of the fired body 11. The external electrodes 14a to 14c are connected to the capacitor electrode 17, and the electrode 17 also functions as an external conductor.
【0022】そして上記容量電極17と中心電極12a
〜12cとの間でマイクロ波用磁性体からなる容量層1
8が形成されており、この容量層18が集中定数型サー
キュレータのキャパシタ部Csとなっている。また、上
記容量電極17とアース電極15との間でマイクロ波用
磁性体からなる容量層19が形成されており、この容量
層19が中心周波数付近で共振する直列共振回路容量部
Cwとなっている。The capacitance electrode 17 and the center electrode 12a
Layer 1 made of a magnetic material for microwaves between
8 are formed, and the capacitance layer 18 serves as a capacitor portion Cs of the lumped constant circulator. Further, a capacitance layer 19 made of a magnetic material for microwaves is formed between the capacitance electrode 17 and the ground electrode 15, and this capacitance layer 19 becomes a series resonance circuit capacitance portion Cw that resonates near the center frequency. I have.
【0023】次に、上記サーキュレータ10の一製造方
法について説明する。まず、酸化イットリウム(Y2 O
3 )と酸化鉄(Fe2 O3 )を主成分とするマイクロ波
用磁性体粉末を準備し、該粉末をポリビニルアルコール
系バインダとともに有機溶剤中に分散してスラリーを形
成する。この磁性体スラリーをドクターブレード法によ
り厚さ数十μm のマザーシートを成形し、このシートを
40mm×20mmの長方形に打ち抜いて多数のマイク
ロ波用磁性体グリーンシート20〜22を形成する(第
1工程)。Next, a method of manufacturing the circulator 10 will be described. First, yttrium oxide (Y 2 O
3 ) A microwave magnetic powder mainly containing iron oxide (Fe 2 O 3 ) and iron oxide (Fe 2 O 3 ) is prepared, and the powder is dispersed in an organic solvent together with a polyvinyl alcohol-based binder to form a slurry. This magnetic slurry is formed into a mother sheet having a thickness of several tens of μm by a doctor blade method, and this sheet is punched into a rectangle of 40 mm × 20 mm to form a large number of magnetic green sheets for microwaves 20 to 22 (first). Process).
【0024】次いで、図3に示すように、パラジウム又
は白金粉末と有機溶剤とを混合してなる電極ペーストを
作成し、このペーストを上記3枚のグリーンシート20
の表面にスクリーン印刷して帯状の中心電極12a〜1
2cを形成する。また上記1枚のグリーンシート21の
表面に電極ペーストを印刷して円形の容量電極17を形
成する。Next, as shown in FIG. 3, an electrode paste is prepared by mixing palladium or platinum powder and an organic solvent, and this paste is applied to the three green sheets 20.
Center electrodes 12a-1 which are screen-printed on the surface of
2c is formed. Further, an electrode paste is printed on the surface of the one green sheet 21 to form the circular capacitor electrode 17.
【0025】そして上記各グリーンシート20をこれの
中心電極12a〜12cが互いに120度の交角をなす
ように重ね、これの上,下面に何も印刷されていない複
数枚のグリーンシート22,22を重ね、さらに下部グ
リーンシート22の下面に上記容量電極17が形成され
たグリーンシート21を重ねるとともに、これの下面に
複数枚のグリーンシート22を重ねて積層体を形成し、
この積層体を圧着する。この積層体を直径10mmの円
柱状に打ち抜いて未焼成チップを作成する(第2工
程)。Each of the green sheets 20 is overlapped such that the center electrodes 12a to 12c thereof form an intersection angle of 120 degrees with each other. A green sheet 21 on which the capacitance electrode 17 is formed is further stacked on the lower surface of the lower green sheet 22 and a plurality of green sheets 22 are stacked on the lower surface of the lower green sheet 22 to form a laminate.
This laminate is pressed. This laminated body is punched into a cylindrical shape having a diameter of 10 mm to form an unfired chip (second step).
【0026】次に、上記未焼成チップを1300〜15
00℃の温度で焼成し、焼成体11を形成する。この焼
成体11の外周面11aを研磨し、各中心電極12a〜
12c及び容量電極17の端面を露出させる。この後、
焼成体11の外周面11aにガラスフリットを含む金属
ペーストを塗布した後、焼き付けて外部取り出し電極1
4a〜14cを形成し、各中心電極12a〜12cの一
端面と容量電極17とを接続するとともに、各中心電極
12a〜12cの他端面に入力端子電極13a〜13c
を接続形成する(第3工程)。Next, the unfired chips are placed in a range of 1300 to 15
By firing at a temperature of 00 ° C., a fired body 11 is formed. The outer peripheral surface 11a of the fired body 11 is polished, and the center electrodes 12a to 12a are polished.
12c and the end face of the capacitor electrode 17 are exposed. After this,
After a metal paste containing glass frit is applied to the outer peripheral surface 11a of the fired body 11, it is baked to obtain the externally-taken electrode 1
4a to 14c are formed, one end of each of the center electrodes 12a to 12c is connected to the capacitor electrode 17, and the input terminal electrodes 13a to 13c are connected to the other end of each of the center electrodes 12a to 12c.
Is formed (third step).
【0027】しかる後、上記焼成体11の両端面11
b,11cにアース電極15を形成し、これを永久磁石
16とともに金属ヨーク内に収容する。なお、整合回路
用コンデンサは上記焼成体11の内部に設けてもよく、
また焼成体11の外部に設けてもよい。Thereafter, both end faces 11 of the fired body 11 are formed.
A ground electrode 15 is formed on each of the b and 11c, and is housed in a metal yoke together with the permanent magnet 16. The matching circuit capacitor may be provided inside the fired body 11,
Further, it may be provided outside the fired body 11.
【0028】次に、本実施例の作用効果について説明す
る。本実施例によれば、マイクロ波用磁性体からなる焼
成体11内に容量電極17を埋設して直列共振回路容量
を形成したので、従来の誘電体基板を不要にでき、それ
だけ焼成体11に永久磁石16を近接して配置すること
ができる。その結果、各中心電極12a〜12cに直流
磁界の印加効率を向上でき、高性能化に対応できるとと
もに、小型化に対応できる。また上記容量電極17の容
量層18,19をマイクロ波用磁性体により構成したの
で、準マイクロ波帯,マイクロ波帯での誘電損失を小さ
くでき、Q値の高い共振容量が得られ、この点からも高
性能化に対応できる。Next, the operation and effect of this embodiment will be described. According to the present embodiment, the capacitance electrode 17 is buried in the fired body 11 made of a magnetic material for microwaves to form a series resonance circuit capacitance. Therefore, the conventional dielectric substrate can be eliminated, and the fired body 11 can be used accordingly. The permanent magnets 16 can be arranged close to each other. As a result, it is possible to improve the efficiency of applying a DC magnetic field to each of the center electrodes 12a to 12c, thereby achieving high performance and downsizing. In addition, since the capacitance layers 18 and 19 of the capacitance electrode 17 are made of a microwave magnetic material, dielectric loss in the quasi-microwave band and the microwave band can be reduced, and a resonance capacitance having a high Q value can be obtained. Can respond to high performance.
【0029】さらに本実施例によれば、磁性体からなる
グリーンシート20〜22に各中心電極12a〜12
c,容量電極17を形成し、これらを積層した後一体焼
成して焼成体11を形成したので、従来構造に比べて部
品点数,製造工数を削減でき、コストを低減できるとと
もに、歩留まりを向上できる。Further, according to the present embodiment, each of the center electrodes 12a to 12
(c) Since the capacitor electrode 17 is formed, and these are laminated and then integrally fired to form the fired body 11, the number of parts and the number of manufacturing steps can be reduced as compared with the conventional structure, the cost can be reduced, and the yield can be improved. .
【0030】また本実施例では、上記容量電極17を中
心電極12a〜12cの中心軸とアース電極15との間
に直列接続したので、同相励振時のエネルギーを効率良
く増大でき、広帯域化を図る場合の対称性を正確に保つ
ことができ、この点からも高性能化に対応できる。In this embodiment, since the capacitance electrode 17 is connected in series between the center axis of the center electrodes 12a to 12c and the ground electrode 15, the energy at the time of in-phase excitation can be efficiently increased, and a wider band is achieved. In this case, the symmetry can be accurately maintained, and from this point, it is possible to cope with higher performance.
【0031】なお、上記実施例では、サーキュレータを
例にとって説明したが、本発明は1つの中心電極のポー
トに終端抵抗器を接続してなるアイソレータにも勿論適
用できる。In the above embodiment, a circulator has been described as an example, but the present invention can of course be applied to an isolator in which a terminal resistor is connected to one center electrode port.
【0032】[0032]
【発明の効果】以上のように請求項1の発明に係る非可
逆回路素子によれば、共振回路用容量を取り出す容量電
極をマイクロ波用磁性体からなる焼成体内に埋設し、該
共振回路用容量の誘電体部分を上記マイクロ波用磁性体
と同一材料からなる容量層により構成したので、該磁性
体と永久磁石との空間を小さくすることができ、それだ
け高性能化に対応できるとともに、小型化に対応できる
効果があり、かつ部品点数,製造工数を削減してコスト
を低減できる効果がある。As described above, according to the non-reciprocal circuit device according to the first aspect of the present invention, the capacitance electrode for extracting the capacitance for the resonance circuit is embedded in the fired body made of the magnetic material for microwaves. Since the dielectric portion of the capacitor is constituted by the capacitor layer made of the same material as the magnetic material for microwaves, the space between the magnetic material and the permanent magnet can be reduced. In addition, the number of parts and the number of manufacturing steps can be reduced to reduce costs.
【0033】請求項2の発明では、上記共振用容量を各
中心電極の外部取り出し用電極の中心軸とアース電極と
の間に直列接続したので、入力端子に対して正確な対称
性を保つことができ、この点からも高性能化に対応でき
る効果がある。According to the second aspect of the present invention, since the resonance capacitor is connected in series between the center axis of the external extraction electrode of each center electrode and the ground electrode, accurate symmetry with respect to the input terminal is maintained. This also has the effect of being able to respond to higher performance.
【0034】請求項3の発明では、マイクロ波用磁性材
料からなる複数のグリーンシートに中心電極,容量電極
をパターン形成し、該グリーンシートと残りのグリーン
シートとを積層した後一体焼成したので、部品点数,製
造工数を削減してコストを低減できる効果がある。According to the third aspect of the present invention, the center electrode and the capacitor electrode are formed in a pattern on a plurality of green sheets made of a magnetic material for microwaves, and the green sheets and the remaining green sheets are laminated and then integrally fired. This has the effect of reducing costs by reducing the number of parts and manufacturing steps.
【図1】本発明の一実施例による集中定数型サーキュレ
ータの斜視図である。FIG. 1 is a perspective view of a lumped constant circulator according to an embodiment of the present invention.
【図2】上記実施例のサーキュレータの概略構成図であ
る。FIG. 2 is a schematic configuration diagram of a circulator of the embodiment.
【図3】上記実施例のサーキュレータの製造工程を示す
分解斜視図である。FIG. 3 is an exploded perspective view showing a manufacturing process of the circulator of the embodiment.
【図4】従来の集中定数型サーキュレータの等価回路図
である。FIG. 4 is an equivalent circuit diagram of a conventional lumped constant circulator.
【図5】従来のサーキュレータの概略構成図である。FIG. 5 is a schematic configuration diagram of a conventional circulator.
10 サーキュレータ(非可逆回路素子) 11 焼成体(マイクロ波用磁性体) 12a〜12c 中心電極 15 アース電極(接地導体) 17 容量電極 18,19 容量層 20〜21 グリーンシート Reference Signs List 10 circulator (non-reciprocal circuit device) 11 fired body (magnetic material for microwave) 12a to 12c center electrode 15 earth electrode (ground conductor) 17 capacitance electrode 18, 19 capacitance layer 20 to 21 green sheet
フロントページの続き (56)参考文献 特開 平5−95207(JP,A) 特開 平5−304404(JP,A) 特開 平4−345201(JP,A) 特開 平4−172702(JP,A) 特開 平6−69057(JP,A) 特開 昭49−73053(JP,A) 特開 昭57−61314(JP,A) 特開 昭48−101061(JP,A) 特開 昭63−300594(JP,A) 実開 昭56−123624(JP,U) (58)調査した分野(Int.Cl.7,DB名) H01P 1/383 H01P 11/00 Continuation of the front page (56) References JP-A-5-95207 (JP, A) JP-A-5-304404 (JP, A) JP-A-4-345201 (JP, A) JP-A-4-172702 (JP) JP-A-6-69057 (JP, A) JP-A-49-73053 (JP, A) JP-A-57-61314 (JP, A) JP-A-48-101061 (JP, A) 63-300594 (JP, A) Actually open 1981-123624 (JP, U) (58) Fields investigated (Int. Cl. 7 , DB name) H01P 1/383 H01P 11/00
Claims (3)
シートを積層して一体焼結してなる焼成体内に、互いに
電気的絶縁状態で、かつ交差させて配置された複数の中
心電極と、共振回路用容量を取り出す容量電極とを積層
して埋設し、上記各中心電極の両端面及び上記容量電極
の端面を上記焼成体の外面に導出し、該各中心電極の一
端面と上記容量電極の端面とを上記焼成体の外面に形成
された外部取り出し用電極で接続し、上記焼成体の少な
くとも一主面にアース電極を形成し、該アース電極と上
記容量電極との電極間に上記マイクロ波用磁性体からな
る共振回路用容量層を形成したことを特徴とする非可逆
回路素子。1. A green made of a magnetic material for microwaves.
In a fired body made by laminating and integrally sintering sheets,
Electrically insulated and crossed
Laminated core electrode and capacitance electrode for extracting resonance circuit capacitance
And buried in both ends of each of the center electrodes and the capacitance electrodes
Of the center electrode is led out to the outer surface of the fired body.
The end face and the end face of the capacitor electrode are formed on the outer surface of the fired body
Connected with the external extraction electrode
At least one main surface is formed with an earth electrode, and
The above-mentioned magnetic material for microwaves is placed between the storage electrode and the electrode.
A non-reciprocal circuit device, comprising a resonance circuit capacitor layer formed thereon.
が、上記各中心電極の外部取り出し用電極の中心軸と上
記アース電極との間に直列接続されていることを特徴と
する非可逆回路素子。2. The method of claim 1, capacitor the resonance circuit is, on the central axis of the external lead electrodes of the respective central electrode
A non-reciprocal circuit device, which is connected in series with the earth electrode .
方法であって、マイクロ波用磁性材料からなる複数のグ
リーンシートを形成する第1工程と、各グリーンシート
に中心電極をパターン形成するとともに、他のグリーン
シートに共振回路用容量を取り出す容量電極をパターン
形成し、上記各中心電極が形成されたグリーンシートの
上,下面に残りのグリーンシートを重ねるとともに、上
記容量電極が形成されたグリーンシートを重ね、該グリ
ーンシートの下面に共振回路用容量層を構成するグリー
ンシートを重ねて積層体を形成する第2工程と、上記積
層体と各中心電極及び容量電極とを同時に一体焼成して
焼成体を形成し、該焼成体の外面に上記各中心電極の一
端と容量電極の端面とを接続する外部取り出し電極を形
成し、上記焼成体の少なくとも一主面にアース電極を形
成する第3工程とを備えたことを特徴とする非可逆回路
素子の製造方法。3. Production of the non-reciprocal circuit device according to claim 1.
A method, a first step of forming a plurality of green sheets made of a magnetic material for microwave, the green sheets
Pattern the center electrode on the other green
Pattern the capacitance electrode to take out the resonance circuit capacitance on the sheet
Of the green sheet on which the respective center electrodes are formed.
Stack the remaining green sheets on the upper and lower surfaces, and
The green sheets on which the storage electrodes are formed are stacked, and
To form a resonance circuit capacitance layer on the lower surface of the green sheet
A second step of forming a laminate by stacking sheet sheets;
Simultaneously firing the layer body and each center electrode and capacitor electrode
A fired body is formed, and one of the center electrodes is provided on the outer surface of the fired body.
Form an external extraction electrode that connects the end to the end face of the capacitor electrode.
And a ground electrode formed on at least one main surface of the fired body.
A method for manufacturing a non-reciprocal circuit device, comprising:
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13894894A JP3265831B2 (en) | 1994-06-21 | 1994-06-21 | Non-reciprocal circuit device and manufacturing method thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13894894A JP3265831B2 (en) | 1994-06-21 | 1994-06-21 | Non-reciprocal circuit device and manufacturing method thereof |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH088614A JPH088614A (en) | 1996-01-12 |
JP3265831B2 true JP3265831B2 (en) | 2002-03-18 |
Family
ID=15233905
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JP13894894A Expired - Fee Related JP3265831B2 (en) | 1994-06-21 | 1994-06-21 | Non-reciprocal circuit device and manufacturing method thereof |
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JP (1) | JP3265831B2 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1041706A (en) | 1996-07-26 | 1998-02-13 | Hitachi Metals Ltd | Irreversible circuit element |
-
1994
- 1994-06-21 JP JP13894894A patent/JP3265831B2/en not_active Expired - Fee Related
Also Published As
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JPH088614A (en) | 1996-01-12 |
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