JP3246280B2 - Method for measuring impedance characteristics of piezoelectric components - Google Patents
Method for measuring impedance characteristics of piezoelectric componentsInfo
- Publication number
- JP3246280B2 JP3246280B2 JP18271495A JP18271495A JP3246280B2 JP 3246280 B2 JP3246280 B2 JP 3246280B2 JP 18271495 A JP18271495 A JP 18271495A JP 18271495 A JP18271495 A JP 18271495A JP 3246280 B2 JP3246280 B2 JP 3246280B2
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- Japan
- Prior art keywords
- phase
- frequency
- resonance
- piezoelectric component
- resonance frequency
- Prior art date
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- Measurement Of Resistance Or Impedance (AREA)
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Description
【0001】[0001]
【発明の属する技術分野】本発明は、圧電部品、特に発
振回路や共振回路等に使用される圧電部品のインピーダ
ンス特性測定方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for measuring the impedance characteristics of a piezoelectric component, particularly a piezoelectric component used in an oscillation circuit or a resonance circuit.
【0002】[0002]
【従来の技術】従来、圧電セラミック振動子の共振周波
数fr、反共振周波数fa、共振インピーダンスZr及び
反共振インピーダンスZaを測定する場合は、共振周波
数fr及び反共振周波数faを含む周波数領域を一定の周
波数ピッチでサンプリングし、それぞれのサンプリング
で得られたインピーダンス値を検討して共振周波数
fr、反共振周波数fa、共振インピーダンスZr及び反
共振インピーダンスZaを求めていた。Conventionally, the resonance frequency f r of the piezoelectric ceramic resonator, the anti-resonance frequency f a, when measuring the resonance impedance Z r and antiresonant impedance Z a is a resonant frequency f r and the antiresonance frequency f a a frequency region including sampled at a constant frequency pitch, resonance frequency f r consider impedance values obtained for each sampling, the anti-resonance frequency f a, had sought resonance impedance Z r and the anti-resonance impedance Z a .
【0003】[0003]
【発明が解決しようとする課題】しかしながら、従来の
方法にあっては、周波数領域を一定の周波数ピッチでサ
ンプリングするため、測定に長時間を要し、しかも、測
定に無駄があった。なぜなら、実際に必要なインピーダ
ンス値は、共振周波数fr及び反共振周波数fa近傍のも
のだけであり、残りの測定データは殆んど必要としない
からである。However, in the conventional method, since the frequency domain is sampled at a constant frequency pitch, a long time is required for the measurement, and the measurement is wasteful. Because the actually required impedance values, and only those of the resonance frequency f r and the antiresonance frequency f a vicinity of the rest of the measurement data is do not require almost.
【0004】そこで、本発明の目的は、測定の効率化を
図ると共に、測定精度を容易にアップさせることができ
る、圧電部品のインピーダンス特性測定方法を提供する
ことにある。Accordingly, an object of the present invention is to provide a method for measuring the impedance characteristic of a piezoelectric component, which can improve the efficiency of the measurement and can easily increase the measurement accuracy.
【0005】[0005]
【課題を解決するための手段】以上の目的を達成するた
め、本発明に係る圧電部品のインピーダンス特性測定方
法は、 (a)所定の周波数ピッチΔfSで圧電部品の位相が0
゜になる周波数を含む周波数領域をサンプリングし、位
相0゜を通過する前のサンプリング周波数f1及びその
位相φ1と、位相0゜を通過した後のサンプリング周波
数f2およびその位相φ2を測定する工程と、 (b)仮の共振周波数f r1 および仮の反共振周波数f a1
のいずれか一方の周波数を、関係式 f r1 もしくはf a1 =f1+(ΔfS・φ1)/(φ1−φ2) を用いて導出する工程と、 (c)前記仮の共振周波数f r1 での圧電部品の位相φ5
もしくは仮の反共振周波数f a1 での圧電部品の位相φ6
を測定する工程と、 (d)前記位相φ5もしくはφ6が所定の位相公差内で
あるとき、前記仮の共振周波数f r1 もしくは仮の反共振
周波数f a1 で圧電部品のインピーダンスを測定する工程
と、を備えたことを特徴とする。Means for Solving the Problems] To achieve the above object, the impedance characteristic measurement method of a piezoelectric component according to the present invention, the piezoelectric component of the phase in (a) predetermined frequency pitch Delta] f S 0
Sampling the frequency domain including the frequency that becomes ゜ and measuring the sampling frequency f 1 and its phase φ 1 before passing through the phase 0 °, and the sampling frequency f 2 and its phase φ 2 after passing through the phase 0 ° (B) the provisional resonance frequency f r1 and the provisional anti-resonance frequency f a1
One of the frequency, and deriving with the relation f r1 or f a1 = f 1 + (Δf S · φ 1) / (φ 1 -φ 2), (c) a resonance frequency of the provisional the phase of the piezoelectric component in the f r1 φ5
Or the phase φ6 of the piezoelectric component at the temporary anti-resonance frequency f a1
And (d) the phase φ5 or φ6 is within a predetermined phase tolerance.
At some point, the provisional resonance frequency fr1 or the provisional anti-resonance
Measuring the impedance of the piezoelectric component at the frequency f a1 .
【0006】また、本発明に係る圧電部品のインピーダ
ンス特性測定方法は、 (e)圧電部品の共振周波数frと反共振周波数faの差
Δfより若干小さい周波数ピッチΔfSで、圧電部品の
位相が0゜になる周波数を含む周波数領域を低周波側か
ら順次サンプリングし、最初に位相0゜を通過する前の
サンプリング周波数f1及びその位相φ1と、最初に位相
0゜を通過した後のサンプリング周波数f2及びその位
相φ2と、再び位相0゜を通過する前のサンプリング周
波数f3及びその位相φ3と、再び位相0゜を通過した後
のサンプリング周波数f4及びその位相φ4を測定する工
程と、 (f)仮の共振周波数fr1と仮の反共振周波数fa1を、
それぞれ関係式 fr1=f1+(ΔfS・φ1)/(φ2−φ1) fa1=f3+(ΔfS・φ3)/(φ3−φ4) を用いて導出する工程と、 (g)前記仮の共振周波数f r1 での圧電部品の位相φ5
と前記仮の反共振周波数f a1 での圧電部品の位相φ6と
を測定する工程と、 (h)前記位相φ5とφ6が所定の位相公差内であると
き、 前記仮の共振周波数fr1及び仮の反共振周波数fa1
で圧電部品のインピーダンスを測定する工程と、を備え
たことを特徴とする。さらに、本発明に係る圧電部品の
インピーダンス特性測定方法は、前記位相φ5及び位相
φ6の少なくともいずれか一方の位相が所定の公差外で
あるとき、さらに、補間法を用いて公差内の位相が得ら
れるまで、前記各工程を繰り返すことを特徴とする。 [0006] The impedance characteristic measuring method of a piezoelectric component according to the present invention, (e) at a slightly smaller frequency pitch Delta] f S from the difference between Delta] f of the resonance frequency f r and the antiresonance frequency f a of the piezoelectric component, piezoelectric component phase Is sequentially sampled from the low frequency side including the frequency at which 0 ° is reached, and the sampling frequency f 1 and its phase φ 1 before first passing through the phase 0 °, and the sampling frequency f 1 after passing through the phase 0 ° first. The sampling frequency f 2 and its phase φ 2 , the sampling frequency f 3 and its phase φ 3 before passing through the phase 0 ° again, and the sampling frequency f 4 and its phase φ 4 after passing through the phase 0 ° again Measuring, and ( f ) the provisional resonance frequency f r1 and the provisional anti-resonance frequency f a1 ,
Derived using respective relationship f r1 = f 1 + (Δf S · φ 1) / (φ 2 -φ 1) f a1 = f 3 + (Δf S · φ 3) / (φ 3 -φ 4) process and, (g) said temporary piezoelectric component at the resonant frequency f r1 phase φ5
And the phase φ6 of the piezoelectric component at the provisional anti-resonance frequency f a1.
And (h) determining that the phases φ5 and φ6 are within a predetermined phase tolerance.
The provisional resonance frequency fr1 and the provisional anti-resonance frequency fa1
And measuring the impedance of the piezoelectric component. Further, the piezoelectric component according to the present invention
The impedance characteristic measuring method is based on the phase φ5 and the phase φ5.
At least one phase of φ6 is out of the specified tolerance
At some point, the phase within the tolerance was also obtained using interpolation.
Until the above steps are repeated.
【0007】[0007]
【作用】以上の方法は、共振周波数fr及び反共振周波
数faでの位相がそれぞれ0゜になることを利用した方
法である。そして、位相0゜の周波数に近づくにつれて
より小さい周波数ピッチでサンプリングする。従って、
共振周波数fr及び反共振周波数faの近傍であるかどう
かに関係なく、不必要な周波数をも一定の周波数ピッチ
でサンプリングしていた従来の方法と比較して、無駄の
ない、かつ精度の良い測定が迅速に行なわれる。[Action] above method is a method in which the phase of the resonant frequency f r and the antiresonance frequency f a is utilized to become 0 °, respectively. Then, sampling is performed at a smaller frequency pitch as the frequency approaches the phase 0 °. Therefore,
Regardless of whether it is in the vicinity of the resonance frequency f r and the antiresonance frequency f a, as compared with the conventional method which has been sampled at a constant frequency pitch unnecessary frequency, without waste, and the accuracy Good measurements are made quickly.
【0008】[0008]
【発明の実施の形態】以下、本発明に係る圧電部品のイ
ンピーダンス特性測定方法の一実施形態について添付図
面を参照して説明する。図1は、圧電セラミック振動子
のインピーダンス曲線1と位相曲線2を示すグラフであ
る。このインピーダンス曲線1と位相曲線2は圧電セラ
ミック振動子の代表値を示すものである。圧電セラミッ
ク振動子は、共振周波数frで振動子内に流れる電流は
最大になるため、インピーダンスは最小になる。一方、
反共振周波数faでは振動子内に流れる電流は最小にな
り、インピーダンスは最大になる。前者を共振インピー
ダンスZrといい、後者を反共振インピーダンスZaとい
う。また、圧電セラミック振動子は、共振周波数fr及
び反共振周波数faでは位相が0゜になる。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of a method for measuring impedance characteristics of a piezoelectric component according to the present invention will be described below with reference to the accompanying drawings. FIG. 1 is a graph showing an impedance curve 1 and a phase curve 2 of a piezoelectric ceramic vibrator. The impedance curve 1 and the phase curve 2 show typical values of the piezoelectric ceramic vibrator. The piezoelectric ceramic vibrator, a current flowing through the vibrator at the resonance frequency f r is to become the maximum, the impedance is minimized. on the other hand,
At the anti-resonance frequency f a , the current flowing in the vibrator is minimized and the impedance is maximized. It refers to the former and resonant impedance Z r, the latter is called anti-resonance impedance Z a. The piezoelectric ceramic resonator, the resonance frequency f r and the antiresonance frequency f a in the phase becomes 0 °.
【0009】以上の特性(代表値)を有する圧電セラミ
ック振動子の個々の共振周波数fr1、反共振周波数
fa1、共振インピーダンスZr及び反共振インピーダン
スZaを求める方法を説明する。まず、圧電セラミック
振動子の共振周波数(代表値)frと反共振周波数(代
表値)faの差Δfを図1に基づいて導出する。[0009] or more characteristics individual resonance of the piezoelectric ceramic resonator having a (typical) frequency f r1, the antiresonance frequency f a1, explaining the method of obtaining the resonance impedance Z r and antiresonant impedance Z a. First, derived on the basis of a difference Δf of the piezoelectric resonant frequency (typical) of the ceramic resonator f r and the anti-resonance frequency (typical) f a in FIG.
【0010】次に、図2に示すように、このΔfより若
干小さい周波数ピッチΔfSで、圧電セラミック振動子
の位相特性を低周波側から順次サンプリングする。この
ときのサンプリング領域は、共振周波数(代表値)fr
と反共振周波数(代表値)faを含んでいる。これによ
って位相が0゜になる周波数を含む周波数領域をサンプ
リングすることになる。さらに、サンプリング領域を略
2ΔfSとするのが好ましい。サンプリング数が少なく
てすみ、測定をより迅速に行なうことができるからであ
る。ただし、周波数ピッチΔfSはこれに限るものでは
なく、Δfの1/2や1/3等の周波数ピッチで位相特
性をサンプリングしてもよい。Next, as shown in FIG. 2, the phase characteristics of the piezoelectric ceramic vibrator are sampled sequentially from the low frequency side at a frequency pitch Δf S slightly smaller than Δf. The sampling area at this time is the resonance frequency (representative value) fr
And the anti-resonance frequency (representative value) f a . As a result, a frequency region including a frequency at which the phase becomes 0 ° is sampled. Further, it is preferable that the sampling area be approximately 2Δf S. This is because the number of samplings can be reduced and the measurement can be performed more quickly. However, the frequency pitch Δf S is not limited to this, and the phase characteristics may be sampled at a frequency pitch such as や or の of Δf.
【0011】そして、最初に位相0゜を通過する前のサ
ンプリング周波数f1とその位相φ1を測定し、最初に位
相0゜を通過した後のサンプリング周波数f2とその位
相φ2を測定し、再び位相0゜を通過する前のサンプリ
ング周波数f3とその位相φ3を測定し、再び位相0゜を
通過した後のサンプリング周波数f4とその位相φ4を測
定する。ただし、本実施形態では、測定を迅速に行なう
ことができるようにサンプリング数を減らしているた
め、サンプリング周波数f2とf3が同一周波数となり、
位相φ3とφ4も同一数値となる。Then, the sampling frequency f 1 before passing through the phase 0 ° and its phase φ 1 are measured first, and the sampling frequency f 2 after passing through the phase 0 ° and its phase φ 2 are measured first. The sampling frequency f 3 before passing through the phase 0 ° again and its phase φ 3 are measured, and the sampling frequency f 4 after passing through the phase 0 ° again and its phase φ 4 are measured. However, in the present embodiment, since the reduced number of samples to be able to quickly carry out the measurement, the sampling frequency f 2 and f 3 become equal frequency,
4, then the phase φ 3 φ is also the same numerical value.
【0012】次に、補間法という関数近似の方法を利用
して、以下の関係式(1)及び(2)から仮の共振周波
数fr1と仮の共振周波数fa1をそれぞれ導出する。 fr1=f1+(ΔfS・φ1)/(φ2−φ1) ……(1) fa1=f3+(ΔfS・φ3)/(φ3−φ4) ……(2) (ただし、f1<f2<f3<f4,φ2>0>φ1,φ3>
0>φ4) 次に、図3に示すように、仮の共振周波数fr1及び仮の
反共振周波数fa1での圧電セラミック振動子の位相
φ5,φ6を測定する。そして、位相φ5,φ6が所定の位
相公差内であれば、仮の共振周波数fr1及び仮の反共振
周波数fa1をこの圧電セラミック振動子の共振周波数
(測定値)及び反共振周波数(測定値)とすると共に、
これらの周波数fr1,fa1でのインピーダンスを測定し
てそれぞれ共振インピーダンスZrと反共振インピーダ
ンスZaを求める。Next, a temporary resonance frequency f r1 and a temporary resonance frequency f a1 are derived from the following relational expressions (1) and (2) using a function approximation method called an interpolation method. f r1 = f 1 + (Δf S · φ 1) / (φ 2 -φ 1) ...... (1) f a1 = f 3 + (Δf S · φ 3) / (φ 3 -φ 4) ...... ( 2) (However, f 1 <f 2 <f 3 <f 4 , φ 2 >0> φ 1 , φ 3 >)
0> φ 4 ) Next, as shown in FIG. 3, the phases φ 5 and φ 6 of the piezoelectric ceramic vibrator at the provisional resonance frequency fr 1 and the provisional anti-resonance frequency f a1 are measured. If the phases φ 5 and φ 6 are within the predetermined phase tolerance, the provisional resonance frequency fr 1 and the provisional anti-resonance frequency f a1 are changed to the resonance frequency (measured value) and the anti-resonance frequency ( Measured value)
Each measured impedance at these frequencies f r1, f a1 seek resonance impedance Z r and the anti-resonance impedance Z a.
【0013】一方、位相φ5又はφ6の少なくともいずれ
か一方が所定の位相公差外であれば、さらに補間法を利
用して公差内の位相が得られるまで前記処理を繰り返
す。例えば、仮の共振周波数fr1での位相φ5が所定の
位相公差から外れており、かつ、φ5>0である場合、
図4に示すように、仮の共振周波数fr1を始点にして、
周波数ピッチΔfSの1/2以下の周波数ピッチΔfS2
で圧電セラミック振動子の位相特性を低周波側へ順次サ
ンプリングする。本実施形態ではΔfS2=(Δf S/
2)とした。そして、最初に位相0゜を通過する前のサ
ンプリング周波数f5とその位相φ7を測定し、最初に位
相0゜を通過した後のサンプリング周波数f6とその位
相φ8を測定する。ただし、本実施例では、サンプリン
グ周波数f5が仮の共振周波数fr1となり、位相φ5とφ
7も同一数値となる。On the other hand, the phase φFiveOr φ6At least one of
If one of them is out of the predetermined phase tolerance, further use the interpolation method.
Repeat the above process until a phase within the tolerance is obtained
You. For example, the temporary resonance frequency fr1Phase atFiveIs given
Out of phase tolerance and φFiveIf> 0,
As shown in FIG. 4, the temporary resonance frequency fr1Starting from
Frequency pitch ΔfSFrequency pitch Δf less than half ofS2
The phase characteristics of the piezoelectric ceramic
Sample. In the present embodiment, ΔfS2= (Δf S/
2). Then, before passing through phase 0 ° for the first time,
Sampling frequency fFiveAnd its phase φ7Measure and rank first
Sampling frequency f after passing through phase 0 °6And that place
Phase φ8Is measured. However, in this embodiment,
Frequency fFiveIs the temporary resonance frequency fr1And the phase φFiveAnd φ
7Also have the same numerical value.
【0014】次に、補間法を利用して、以下の関係式
(3)から再び仮の共振周波数fr2を導出する。 fr2=f6+(ΔfS2・φ8)/(φ5−φ8) ……(3) 次に、この仮の共振周波数fr2での圧電セラミック振動
子の位相φ9を測定する。そして、位相φ9が所定の位相
公差内であれば、仮の共振周波数fr2をこの圧電セラミ
ック振動子の共振周波数(測定値)とすると共に、この
周波数fr2でのインピーダンスを測定して共振インピー
ダンスZrを求める。Next, using the interpolation method, a temporary resonance frequency fr2 is derived again from the following relational expression (3). fr 2 = f 6 + (Δf S2 · φ 8 ) / (φ 5 -φ 8 ) (3) Next, the phase φ 9 of the piezoelectric ceramic vibrator at the provisional resonance frequency fr 2 is measured. Then, if the phase phi 9 is within a predetermined phase tolerance, the resonance frequency f r2 provisional with the resonance frequency of the piezoelectric ceramic vibrator (measured value), measures the impedance at the frequency f r2 by resonance determine the impedance Z r.
【0015】以上の方法によれば、位相0゜の周波数
(すなわち、共振周波数及び反共振周波数)に近づくに
つれてより小さい周波数ピッチでサンプリングすること
になり、共振周波数及び反共振周波数の近傍であるかど
うかに関係なく、不必要な周波数をも一定の周波数ピッ
チでサンプリングしていた従来の方法と比較して、無駄
なくかつ精度良くインピーダンス特性の測定を行なうこ
とができる。According to the above method, sampling is performed at a smaller frequency pitch as the frequency approaches the phase 0 ° (ie, the resonance frequency and the antiresonance frequency). Irrespective of whether or not the unnecessary frequency is sampled at a constant frequency pitch, the impedance characteristic can be measured without waste and with high accuracy as compared with the conventional method.
【0016】なお、本発明に係る圧電部品のインピーダ
ンス特性測定方法は前記実施形態に限定するものではな
く、その要旨の範囲内で種々に変更することができる。The method for measuring the impedance characteristic of a piezoelectric component according to the present invention is not limited to the above-described embodiment, but can be variously modified within the scope of the gist.
【0017】[0017]
【発明の効果】以上の説明で明らかなように、本発明に
よれば、位相0゜の周波数、すなわち共振周波数及び反
共振周波数に近づくにつれて、より小さい周波数ピッチ
でサンプリングすることになり、無駄のない、かつ、精
度の良い測定を迅速に行なうことができる。As apparent from the above description, according to the present invention, as the frequency approaches the phase 0 °, that is, the resonance frequency and the anti-resonance frequency, sampling is performed at a smaller frequency pitch, and wastefulness is obtained. It is possible to quickly perform accurate and accurate measurement.
【図1】本発明に係る圧電部品のインピーダンス特性測
定方法の一実施形態を説明するための、圧電部品のイン
ピーダンス特性及び位相特性を示すグラフ。FIG. 1 is a graph illustrating impedance characteristics and phase characteristics of a piezoelectric component, for describing an embodiment of a method for measuring impedance characteristics of a piezoelectric component according to the present invention.
【図2】図1に示した特性を有する圧電部品のインピー
ダンス特性を測定する方法を説明するためのグラフ。FIG. 2 is a graph for explaining a method for measuring impedance characteristics of a piezoelectric component having the characteristics shown in FIG.
【図3】図2に続くインピーダンス特性測定方法を説明
するためのグラフ。FIG. 3 is a graph for explaining a method of measuring impedance characteristics following FIG. 2;
【図4】図3に続くインピーダンス特性測定方法を説明
するためのグラフ。FIG. 4 is a graph illustrating a method of measuring impedance characteristics following FIG. 3;
fr…共振周波数 fa…反共振周波数 ΔfS…周波数ピッチ f1,f2,f3,f4…サンプリング周波数 φ1,φ2,φ3,φ4…位相 fr1…仮の共振周波数 fa1…仮の反共振周波数f r ... resonant frequency f a ... antiresonant frequency Delta] f S ... frequency pitch f 1, f 2, f 3 , f 4 ... sampling frequency φ 1, φ 2, φ 3 , φ 4 ... phase f r1 ... resonant frequency of temporary f a1 : provisional anti-resonance frequency
───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.7,DB名) G01H 15/00 G01R 27/02 G01R 29/22 H03H 3/02 ──────────────────────────────────────────────────続 き Continuation of front page (58) Field surveyed (Int.Cl. 7 , DB name) G01H 15/00 G01R 27/02 G01R 29/22 H03H 3/02
Claims (3)
位相が0゜になる周波数を含む周波数領域をサンプリン
グし、位相0゜を通過する前のサンプリング周波数f1
及びその位相φ1と、位相0゜を通過した後のサンプリ
ング周波数f2およびその位相φ2を測定する工程と、仮の共振周波数f r1 および仮の反共振周波数f a1 のいず
れか一方の周波数を、 関係式 f r1 もしくはf a1 =f1+(ΔfS・φ1)/(φ1−φ2) を用いて導出する工程と、前記仮の共振周波数f r1 での圧電部品の位相φ5もしく
は仮の反共振周波数f a1 での圧電部品の位相φ6を測定
する工程と、 前記位相φ5もしくはφ6が所定の位相公差内であると
き、 前記仮の共振周波数f r1 もしくは仮の反共振周波数
f a1 で圧電部品のインピーダンスを測定する工程と、 を備えたことを特徴とする圧電部品のインピーダンス特
性測定方法。1. A frequency range including a frequency at which a phase of a piezoelectric component becomes 0 ° at a predetermined frequency pitch Δf S is sampled, and a sampling frequency f 1 before passing through a phase of 0 ° is sampled.
And its phase phi 1, the phase 0゜Wo measuring a sampling frequency f 2 and the phase phi 2 after passing the temporary resonant frequency f r1 and the temporary antiresonance frequency f a1 noise
Re or one of the frequency, in relation f r1 or f a1 = f 1 + (Δf S · φ 1) / (φ 1 -φ 2) a step of deriving with the resonance of the temporary frequency f r1 Phase of piezoelectric component φ5 or
Measures the phase φ6 of the piezoelectric component at the temporary anti-resonance frequency f a1
And the phase φ5 or φ6 is within a predetermined phase tolerance.
The provisional resonance frequency fr1 or the provisional anti-resonance frequency
measuring the impedance of the piezoelectric component at f a1 , and measuring the impedance characteristic of the piezoelectric component.
数faの差Δfより若干小さい周波数ピッチΔfSで、圧
電部品の位相が0゜になる周波数を含む周波数領域を低
周波側から順次サンプリングし、最初に位相0゜を通過
する前のサンプリング周波数f1及びその位相φ1と、最
初に位相0゜を通過した後のサンプリング周波数f2及
びその位相φ2と、再び位相0゜を通過する前のサンプ
リング周波数f3及びその位相φ3と、再び位相0゜を通
過した後のサンプリング周波数f4及びその位相φ4を測
定する工程と、 仮の共振周波数fr1と仮の反共振周波数fa1を、それぞ
れ関係式 fr1=f1+(ΔfS・φ1)/(φ2−φ1) fa1=f3+(ΔfS・φ3)/(φ3−φ4) を用いて導出する工程と、前記仮の共振周波数f r1 での圧電部品の位相φ5と前記
仮の反共振周波数f a1 での圧電部品の位相φ6とを測定
する工程と、 前記位相φ5とφ6が所定の位相公差内であるとき、 前
記仮の共振周波数fr1及び仮の反共振周波数fa1で圧電
部品のインピーダンスを測定する工程と、 を備えたことを特徴とする圧電部品のインピーダンス特
性測定方法。In 2. A piezoelectric component of the resonance frequency f r and the anti-resonance frequency f slightly smaller frequency pitch than the difference Delta] f of a Delta] f S, successively the frequency region including the frequency of the piezoelectric component of the phase becomes 0 ° from the low-frequency side Sampling and sampling frequency f 1 and its phase φ 1 before first passing through phase 0 °, sampling frequency f 2 and its phase φ 2 after first passing through phase 0 °, and phase 0 ° again Measuring the sampling frequency f 3 and its phase φ 3 before passing through, and the sampling frequency f 4 and its phase φ 4 after passing through the phase 0 ° again; a temporary resonance frequency fr 1 and a temporary anti-resonance The frequency f a1 is expressed by a relational expression fr 1 = f 1 + (Δf S · φ 1 ) / (φ 2 -φ 1 ) f a1 = f 3 + (Δf S · φ 3 ) / (φ 3 -φ 4 ) And the phase of the piezoelectric component at the provisional resonance frequency fr1. φ5 and above
Measure the phase φ6 of the piezoelectric component at the temporary anti-resonance frequency f a1
A step of, when said phase .phi.5 .phi.6 is within a predetermined phase tolerance, that and a step of measuring the impedance of the piezoelectric component in the provisional resonance frequency f r1 and the temporary anti-resonance frequency f a1 Characteristic impedance characteristic measuring method for piezoelectric components.
いずれか一方の位相が所定の公差外であるとき、さら
に、補間法を用いて公差内の位相が得られるまで、前記
各工程を繰り返すことを特徴する請求項1又は請求項2
に記載の圧電部品のインピーダンス特性測定方法。 3. At least one of the phase φ5 and the phase φ6
If either phase is out of the specified tolerance,
Until the phase within the tolerance is obtained using interpolation.
3. The method according to claim 1, wherein each step is repeated.
3. The method for measuring impedance characteristics of a piezoelectric component according to claim 1.
Priority Applications (1)
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JP18271495A JP3246280B2 (en) | 1995-07-19 | 1995-07-19 | Method for measuring impedance characteristics of piezoelectric components |
Applications Claiming Priority (1)
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---|---|---|---|
JP18271495A JP3246280B2 (en) | 1995-07-19 | 1995-07-19 | Method for measuring impedance characteristics of piezoelectric components |
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JPH0933334A JPH0933334A (en) | 1997-02-07 |
JP3246280B2 true JP3246280B2 (en) | 2002-01-15 |
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