JP3244770B2 - Method of manufacturing piezoelectric element for piezoelectric motor - Google Patents
Method of manufacturing piezoelectric element for piezoelectric motorInfo
- Publication number
- JP3244770B2 JP3244770B2 JP14419692A JP14419692A JP3244770B2 JP 3244770 B2 JP3244770 B2 JP 3244770B2 JP 14419692 A JP14419692 A JP 14419692A JP 14419692 A JP14419692 A JP 14419692A JP 3244770 B2 JP3244770 B2 JP 3244770B2
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric
- polarization
- electrode
- forming
- piezoelectric element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 9
- 239000000463 material Substances 0.000 claims description 51
- 230000010287 polarization Effects 0.000 claims description 43
- 238000000034 method Methods 0.000 claims description 17
- 239000002184 metal Substances 0.000 description 7
- 230000015572 biosynthetic process Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 238000007796 conventional method Methods 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 238000003672 processing method Methods 0.000 description 2
- 239000007858 starting material Substances 0.000 description 2
- 238000010923 batch production Methods 0.000 description 1
- 238000005422 blasting Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Description
【０００１】[0001]
【産業上の利用分野】この発明は、圧電モータに使用さ
れる圧電素子の製造方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a piezoelectric element used in a piezoelectric motor.
【０００２】[0002]
【従来の技術】従来、圧電モータに使用する圧電素子
は、円盤外径の加工及び中心穴加工を施した円筒材料も
しくはこの円筒材料をスライスした円盤を出発材料とし
た加工法（以降、円盤加工と呼ぶ）を行っていた。図３
に、従来の工程図を示す。まず、円筒状の圧電材料を用
意する。 ［工程３０１］所望の厚みに加工する。 ［工程３０２］片面に分極駆動共用電極を形成する。 ［工程３０３］分極駆動共用電極形成面の裏面に分極用
電極を形成する。 ［工程３０４］分極駆動共用電極と分極用電極を用い
て、分極処理を行う。 ［工程３０５］分極用電極形成面に駆動用電極を形成す
る。2. Description of the Related Art Conventionally, a piezoelectric element used in a piezoelectric motor is manufactured by a processing method using a cylindrical material obtained by processing an outer diameter of a disk and a center hole or a disk obtained by slicing the cylindrical material as a starting material (hereinafter, disk processing). Call). FIG.
FIG. First, a cylindrical piezoelectric material is prepared. [Step 301] Process to a desired thickness. [Step 302] A common electrode for polarization driving is formed on one side. [Step 303] A polarization electrode is formed on the back surface of the polarization drive common electrode formation surface. [Step 304] A polarization process is performed using the common electrode for polarization driving and the electrode for polarization. [Step 305] A drive electrode is formed on the polarization electrode formation surface.
【０００３】次に、図４に説明図を示す。図４（ａ）に
おいて、プレス成形にて、円筒状の圧電材料４２を作製
する。次に図４（ｂ）において、圧電材料のスライシン
グおよびラッピングを行い、圧電材料の厚み形状を作製
して円盤材料４５を形成する（工程３０１）。次に図４
（ｃ）において、圧電材料の一方の面に分極駆動共用電
極４４を全面に成膜する（工程３０２）。Next, FIG. 4 shows an explanatory diagram. In FIG. 4A, a cylindrical piezoelectric material 42 is produced by press molding. Next, in FIG. 4B, slicing and lapping of the piezoelectric material are performed to form a thickness shape of the piezoelectric material to form the disk material 45 (Step 301). Next, FIG.
In (c), the polarization driving shared electrode 44 is formed on one surface of the piezoelectric material over the entire surface (step 302).
【０００４】次に図４（ｄ）において、前記分極駆動共
用電極形成面の裏面に分極用電極４６をメタルマスクを
用いて成膜する（工程３０３）。次に図４（ｅ）におい
て、成膜した分極駆動共用電極と分極用電極を用いて、
圧電材料を分極する（工程３０４）。最後に図４（ｆ）
において、分極用電極を成膜した面に駆動用電極４７を
メタルマスクを用いて成膜する（工程３０５）。Next, in FIG. 4D, a polarization electrode 46 is formed on the back surface of the polarization drive common electrode forming surface using a metal mask (step 303). Next, in FIG. 4E, using the formed polarization driving shared electrode and the polarized electrode,
Polarize the piezoelectric material (step 304). Finally, FIG.
In, the driving electrode 47 is formed on the surface on which the polarization electrode is formed using a metal mask (step 305).
【０００５】[0005]
【発明が解決しようとする課題】しかし、従来行なわれ
ていた円盤加工では、１つづつの材料を各工程でハンド
リングしなければならず、これによる工程時間が非常に
大きかった。特に、分極駆動共用電極形成後、その裏面
に形成する分極用電極の形成のために円盤材料を反転さ
せる作業に時間がかかっていた。However, in the conventional disk processing, one material must be handled in each process, and the process time is very long. In particular, after forming the common electrode for polarization driving, it takes time to invert the disk material to form a polarization electrode formed on the back surface.
【０００６】この発明の目的は、従来のこのような課題
を解決するため、工程時間を短くし、費用を削減するこ
とにある。[0006] An object of the present invention is to reduce the processing time and cost in order to solve such conventional problems.
【０００７】[0007]
【課題を解決するための手段】上記課題を解決するため
に、この発明は、工程全体で行われていた、円盤材料の
ハンドリングを減少させるために、可能な限りバッチ処
理で進められる方法をとった。すなわち、供給する圧電
材料の形状において、円筒状の材料に変えてブロック状
の材料を用いることにした。本発明によりば、前記ブロ
ック状の材料を平板形状とするため、スライシング、ラ
ッピングを行う。そして、この平板形状の圧電材料か
ら、最終的に少なくとも１個以上の圧電素子を取り出す
平板加工工程を行うようにしたものである。SUMMARY OF THE INVENTION In order to solve the above-mentioned problems, the present invention takes a method which can be carried out in a batch process as much as possible in order to reduce the handling of the disc material, which has been performed in the whole process. Was. That is, in the shape of the piezoelectric material to be supplied, a block-shaped material is used instead of the cylindrical material. According to the present invention, slicing and lapping are performed to make the block-like material into a flat plate shape. Then, a flat plate processing step of finally extracting at least one or more piezoelectric elements from the flat plate-shaped piezoelectric material is performed.
【０００８】本発明の製造方法を以下に説明すれば、ま
ず、ブロック状の圧電材料を用意し、次に、前記圧電材
料のスライシングを行う。その後ラッピングを行い所定
の厚みに形成して平板状の圧電材料を作製する。次に、
平板状の圧電材料の一方の面に分極駆動共用電極となる
金属を全面に成膜する。次に、前記分極駆動共用電極が
成膜された圧電素子材料から少なくとも１個以上の円盤
材料を取り出す。この工程以降は、従来の方法と同様で
ある。The manufacturing method of the present invention will be described below. First, a block-shaped piezoelectric material is prepared, and then the piezoelectric material is sliced. After that, lapping is performed to form a predetermined thickness to produce a flat piezoelectric material. next,
A metal film to be used as a common electrode for polarization driving is formed on one surface of a flat piezoelectric material over the entire surface. Next, at least one disk material is taken out from the piezoelectric element material on which the polarization common electrode is formed. After this step, it is the same as the conventional method.
【０００９】以上の工程により、圧電素子作製の前半工
程のバッチ処理を可能とし、作業工程と費用の削減を図
るようにした。[0009] By the above-described steps, batch processing in the first half of the production of the piezoelectric element is made possible, thereby reducing the number of working steps and costs.
【００１０】[0010]
【作用】上記のように構成された圧電モータ用圧電素子
の製造方法においては、前半工程の１個づつのハンドリ
ングを行う必要が無くなり、少なくとも１個以上の円盤
材料を取り出せる平板材料をハンドリングすることにな
り、ハンドリング作業の削減が可能となる。また、治具
へのセッティング工数が減り、作業時間の短縮かつ費用
の削減を行うことができる。In the method of manufacturing the piezoelectric element for a piezoelectric motor configured as described above, it is not necessary to perform the handling of each one of the first half processes, and the flat material from which at least one or more disc materials can be taken out can be handled. And the handling work can be reduced. In addition, the number of setting steps for the jig is reduced, so that the working time and the cost can be reduced.
【００１１】[0011]
【実施例】以下に、この発明の実施例を図に基づいて説
明する。図１に本発明の実施例の工程図を示す。まず、
ブロック状態に形成された圧電材料を用意する。 ［工程１０１］ 前記ブロック状の圧電材料を所望の厚みに加工する。 ［工程１０２］ 前記所望の厚みに加工された圧電材料の一方の面に分極
駆動共用電極を形成する。 ［工程１０３］ 前記分極駆動共用電極を形成した圧電材料を所定の形状
に加工する。 ［工程１０４］ 形状加工を行った前記圧電材料の分極駆動共用電極形成
面の裏面に分極用電極を形成する。 ［工程１０５］ 前記分極駆動共用電極と分極用電極をもちいて圧電材料
の分極処理を行う。 ［工程１０６］ 分極用電極形成面に駆動用電極を形成、もしくは、前記
分極用電極を剥離した後、駆動用電極を形成する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings. Shows a process diagram of an embodiment of the present invention in FIG. First,
A piezoelectric material formed in a block state is prepared. [Step 101] The block-shaped piezoelectric material is processed into a desired thickness. [Step 102] A common electrode for polarization driving is formed on one surface of the piezoelectric material processed to the desired thickness. [Step 103] The piezoelectric material on which the polarization driving shared electrode is formed is processed into a predetermined shape. [Step 104] A polarization electrode is formed on the back surface of the shape-processed piezoelectric material on the surface on which the polarization drive common electrode is formed. [Step 105] Polarization of the piezoelectric material is performed using the polarization drive common electrode and the polarization electrode. [Step 106] A driving electrode is formed on the polarization electrode forming surface, or the driving electrode is formed after the polarization electrode is peeled off.
【００１２】次に、図２は本発明の実施例を模式的に説
明した説明図である。図２（ａ）において、ブロックの
圧電材料２１を用意する。次に図２（ｂ）において、ダ
イシングソーを用いて、スライシングを行う。このとき
の板厚は約２００μｍである。さらに、研磨材を用いて
ラッピングを行い厚さ約８０μｍの平板材料２３に仕上
げる（工程１０１）。次に図２（ｃ）において、前記平
板材料の片面に分極駆動共用電極２４となる金属を蒸着
する（工程１０２）。FIG. 2 is an explanatory view schematically illustrating an embodiment of the present invention. In FIG. 2A, a piezoelectric material 21 for a block is prepared. Next, in FIG. 2B, slicing is performed using a dicing saw. The plate thickness at this time is about 200 μm. Furthermore, lapping is performed using an abrasive to finish the flat plate material 23 having a thickness of about 80 μm (step 101). Next, in FIG. 2 (c), a metal to be used as the polarization driving common electrode 24 is deposited on one surface of the flat plate material (step 102).
【００１３】次に図２（ｄ）において、ＹＡＧレーザー
を用いて、内径、外径の加工を行い円盤材料２５を形成
する（工程１０３）。次に図２（ｅ）において、前記分
極駆動共用電極形成面の裏面に、分極用電極２６となる
金属をマスク蒸着により成膜する（工程１０４）。次に
図２（ｆ）において、前記分極駆動共用電極と分極用電
極を用いて、分極処理を行う。分極駆動共用電極はＧＮ
Ｄにおとし、分極用電極パターンの２つおきに＋１７０
Ｖ、−１７０Ｖを印加した。雰囲気温度は１５０℃であ
る（工程１０５）。Next, referring to FIG. 2D, the inner and outer diameters are processed by using a YAG laser to form a disk material 25 (step 103). Next, in FIG. 2E, a metal to be the polarization electrode 26 is formed on the back surface of the polarization drive common electrode formation surface by mask vapor deposition (Step 104). Next, in FIG. 2F, a polarization process is performed using the polarization drive common electrode and the polarization electrode. Polarization drive common electrode is GN
D is +170 for every third electrode pattern for polarization.
V and -170 V were applied. The ambient temperature is 150 ° C. (Step 105).
【００１４】次に図２（ｇ）において、分極用電極形成
面に駆動用電極２７となる金属をマスク蒸着により成膜
する（工程１０６）。以上のように作製した圧電素子
は、従来行っていた円盤加工によるものと特性的な大き
な差は見られなかった。また、電極金属の成膜には、蒸
着以外にもスパッタ、ＣＶＤなどの一般的な成膜方法で
も作製することができる。Next, as shown in FIG. 2 (g), a metal to be a driving electrode 27 is formed on the polarization electrode forming surface by mask vapor deposition.
(Step 106). The piezoelectric element manufactured as described above did not show a large difference in characteristics from the conventional one obtained by disk processing. In addition, the electrode metal film can be formed by a general film forming method such as sputtering or CVD other than vapor deposition.
【００１５】また、圧電材料はＰＺＴ、ＢａＴｉＯ 3 な
どの一般的に用いられる材料を用いたが、どの材料にお
いても作製することができる。また、形状加工は、エッ
チング、ブラストなどの一般的な加工方法でも行うこと
ができる。また、電極パターンの形成は、選択的成膜、
リフトオフ、エッチングなどの一般的なパターニング方
法でも行うことができる。Although the piezoelectric material used is a generally used material such as PZT or BaTiO 3 , any material can be used. The shape processing can also be performed by a general processing method such as etching and blasting. In addition, the formation of the electrode pattern includes selective film formation,
General patterning methods such as lift-off and etching can also be performed.
【００１６】[0016]
【発明の効果】この発明は、以上説明したように、分極
駆動共用電極の成膜の工程までを平板状の圧電材料を用
いたバッチ処理により行うようにしたので、ハンドリン
グ作業の削減、作業時間の短縮、費用の削減等の効果が
ある。さらに、平板材料からの円盤材料の切り出し方法
を用いたため、圧電素子の大きさの変更および多品種製
造を行う場合でも、出発材料の変更を行わなくてもよ
い。これは、治具や材料などを含めた生産費用の削減を
可能とする効果がある。As described above, according to the present invention, the steps up to the film formation of the common electrode for polarization driving are performed by batch processing using a plate-shaped piezoelectric material. This has the effect of shortening the cost and reducing the cost. Further, since the method of cutting out the disk material from the flat plate material is used, the starting material does not need to be changed even when the size of the piezoelectric element is changed and a multi-product manufacturing is performed. This has the effect of reducing production costs including jigs and materials.
【図１】本発明の実施例の工程図である。FIG. 1 is a process chart of an embodiment of the present invention.
【図２】本発明の実施例の説明図である。FIG. 2 is an explanatory diagram of an embodiment of the present invention.
【図３】従来の方法の工程図である。FIG. 3 is a process chart of a conventional method.
【図４】従来の方法の説明図である。FIG. 4 is an explanatory diagram of a conventional method.
２１ ブロックの圧電材料 ４２ 円筒状の圧電材料 ２３ 平板材料 ２４、４４ 分極駆動共用電極 ２５、４５ 円盤材料 ２６、４６ 分極用電極 ２７、４７ 駆動用電極 21 Block Piezoelectric Material 42 Cylindrical Piezoelectric Material 23 Flat Plate Material 24, 44 Polarization Drive Common Electrode 25, 45 Disk Material 26, 46 Polarization Electrode 27, 47 Driving Electrode
Claims (1)
この振動体に接触する回転体を回転させる圧電モータ用
圧電素子の製造方法において、複数の圧電モ−タ用圧電素子を取り出すことができる大
きさの圧電材料を、前記圧電モ−タ用圧電素子の厚みに
厚み加工をする工程と、 前記厚み加工を行った圧電材料の一方の面に分極駆動共
用電極を形成する工程と、 前記分極駆動共用電極を形成した圧電材料を複数の圧電
モ−タ用圧電素子の形状に加工する工程と、 前記形状加工を行った圧電材料の前記分極駆動共用電極
形成面の裏面に分極用電極を形成する工程と、 前記分極駆動共用電極と分極用電極をもちいて圧電材料
の分極処理を行う工程と、 前記分極用電極の表面に駆動用電極を形成する工程、も
しくは、前記分極用電極を剥離した後、駆動用電極を形
成する工程とを有することを特徴とする圧電モータ用圧
電素子の製造方法。1. Deformation of a vibrating body having a piezoelectric element,
In this method of manufacturing a piezoelectric element for a piezoelectric motor that rotates a rotating body that contacts a vibrating body , a large-sized piezoelectric element for a plurality of piezoelectric motors can be taken out.
Forming a thickness of the piezoelectric material for the piezoelectric motor to a thickness of the piezoelectric element for a piezoelectric motor ; forming a common electrode for polarization driving on one surface of the processed piezoelectric material; a piezoelectric material forming the driving shared electrodes plurality of piezoelectric
Processing the piezoelectric element for a motor into a shape; forming a polarization electrode on the back surface of the polarization driving shared electrode forming surface of the piezoelectric material subjected to the shape processing; A step of performing a polarization process on the piezoelectric material using the electrode; a step of forming a drive electrode on the surface of the polarization electrode; or a step of forming a drive electrode after peeling the polarization electrode. A method for manufacturing a piezoelectric element for a piezoelectric motor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14419692A JP3244770B2 (en) | 1992-06-04 | 1992-06-04 | Method of manufacturing piezoelectric element for piezoelectric motor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14419692A JP3244770B2 (en) | 1992-06-04 | 1992-06-04 | Method of manufacturing piezoelectric element for piezoelectric motor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH05343759A JPH05343759A (en) | 1993-12-24 |
| JP3244770B2 true JP3244770B2 (en) | 2002-01-07 |
Family
ID=15356452
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14419692A Expired - Fee Related JP3244770B2 (en) | 1992-06-04 | 1992-06-04 | Method of manufacturing piezoelectric element for piezoelectric motor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3244770B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5780910B2 (en) * | 2011-10-03 | 2015-09-16 | オリンパス株式会社 | Method for manufacturing cylindrical piezoelectric element |
| US8810971B1 (en) * | 2013-04-08 | 2014-08-19 | HGST Netherlands B.V. | Single sheet differential-poled piezoelectric microactuator for a hard disk drive |
-
1992
- 1992-06-04 JP JP14419692A patent/JP3244770B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH05343759A (en) | 1993-12-24 |
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