JP3242830B2 - Color filter density measurement method - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for measuring the density of a color filter for measuring the color density of a color filter substrate using light.
But about the law, for example, it is to measure the color density of a color filter substrate having a three-color filter characteristics for use in a liquid crystal display panel on one substrate.

[0002]

2. Description of the Related Art In the following description, a filter substrate of three colors of red, green and blue used for a liquid crystal display panel, that is, an RGB three-color filter substrate will be described as an example. FIG. 7 is an explanatory view showing a general manufacturing process of the RGB three-color filter substrate, and the description will be given using this. (1) As shown in FIG. 7A, a black matrix layer (hereinafter, referred to as a BM layer) 12 is formed on a transparent substrate 11. The BM layer 12 is usually a metal layer, and its shape is RG
-B Constructs the outline of the portion that will be each pixel.
Since the BM layer 12 is not directly related to the present invention, the description of the manufacturing method is omitted. (2) After forming the BM layer 12 on the transparent substrate 11, FIG.
As shown in (b), the R color filter layer 13 is
Apply evenly over the top and evenly. (3) Then, unnecessary portions are removed by a photo-etching technique as shown in FIG. As a result, the R color pixels 23 are formed only in the necessary portions. (4) After forming the R color pixel 23 on the transparent substrate 11, FIG.
As shown in (d), the G color filter layer 14 is formed on the transparent substrate 11.
Apply evenly over the top and evenly. (5) Then, unnecessary portions are removed by a photo-etching technique as shown in FIG. As a result, a portion to be the G color pixel 24 is formed only in a necessary portion, so that the R-G pixels are formed adjacent to each other. (6) After forming the R pixel 23 and the G pixel 24 on the transparent substrate 11, as shown in FIG.
Is uniformly applied on the transparent substrate 11 over the entire surface. (7) Then, unnecessary portions are removed by a photo etching technique as shown in FIG. As a result, a portion that becomes the B-color pixel 25 is formed only in a necessary portion, so that each of the RGB pixels is formed. (8) After this, there are further steps such as formation of a transparent electrode, but these steps are omitted because they are not directly related to the present invention. When the color filter substrate 2 in which the three colors of R, G, and B pixels are provided on the same substrate is completed, whether or not the color filter substrate 2 is non-defective is inspected in an inspection process.

The light transmittance of each color of the R, G, and B filters has, for example, the characteristics shown in FIG. In general,
It is theoretically possible to measure the color density of each color by irradiating white light from one surface of the RGB three-color filter substrate and measuring the amount of transmitted light to the other surface for each pixel. Are known. In this conventional method, for example, consider a case where the color density is increased by doubling the filter film thickness of the R color pixel. It is assumed that the light transmitted through the R pixel is red and the transmittance of the red light is 90%. This is 2
When the film thickness becomes twice as large, the transmitted light amount is 90% × 90% = 81%. In terms of the change in light amount, the film thickness is doubled, and the ratio before and after the film thickness is 90: 81 = 10: 9. Yes, the change can be regarded as 10%. In the above calculation example, the film thickness changes twice, but when the film thickness changes by several percent, the change in the amount of light becomes extremely small and a slight change in color density caused by a change in film thickness or the like. Cannot be measured with high accuracy.

[0004] In addition, in order to make the color density uniform, there are cases where means for controlling the material of the applied filter material and controlling the film thickness of each applied color are used. However, since these are substitute characteristics and the color density of the filter is not directly measured, there is an error factor, and there is an obstacle in producing a large amount of color filter substrates with stable quality.

Further, when there is an abnormality in the process, there is a risk that a large number of defective products may be manufactured. To avoid this, the color density is measured immediately after the application of each color filter. If there is an abnormality, it is desirable to take prompt measures based on the result. Of course, in measuring the color density of the color filter, optical measurement which is not a substitute characteristic is desirable. However, when a photosensitive material is used by a photo-etching technique in the vicinity of the color filter coating process, generation and irradiation of ultraviolet and blue light are prohibited, including in the vicinity of the process. In such a case, it is necessary to perform the measurement in an environment of only a light source that does not generate or irradiate ultraviolet or blue light, for example, only a yellow light-emitting fluorescent lamp called a yellow light. Therefore, in the conventional method, it is necessary to irradiate blue light for the measurement of B color, and it cannot be adopted. For the measurement of B color, it is necessary to take out the substrate in the process out of the process and perform the optical measurement outside the yellow room. was there.

As described above, there has been a demand for a measuring method and a measuring device for measuring the color density of the three colors RGB which can be used in an environment of yellow light, but no such measuring device has been hitherto found.

[0007]

As described above, in order to make the color density uniform, means for controlling the raw material of the applied filter material and managing the film thickness of each applied color are not available. Because the color density of the filter is not directly measured, it includes error factors, hinders the production of a large number of color filter substrates with stable quality, and the environment in which the filter material is applied is a yellow room. In the case of the environment, irradiation of ultraviolet light and blue light is prohibited, so that there is a problem that the color density cannot be measured optically immediately after the filter material is applied.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and it is possible to measure the color density on the spot immediately after applying each color filter, and to affect the surroundings even under a yellow light environment. An object of the present invention is to provide a color filter density measuring method for directly measuring optical color density with extremely high accuracy and high sensitivity without giving it.

[0009]

A color filter according to the present invention is provided.
The method for measuring the density of the first portion includes a first portion having a first color filter layer having a high light transmittance in a first wavelength region of visible light.
And the first color filter layer, and the first color filter
A second wave of visible light provided between the layer and the transparent substrate.
A second color filter layer having a high light transmittance in a long region.
From one side of the color filter substrate and a second portion
The color filter substrate is irradiated with light, and light receiving means arranged on the other surface side of the color filter substrate causes light out of the light having passed through the color filter substrate other than the first wavelength region to pass therethrough .
The light amount of the wavelength in a predetermined range is measured, and the calculation unit connected to the light receiving unit outputs the first part from the output of the light receiving unit.
This is to calculate the density of the minute color.

The method for measuring the density of a color filter according to the present invention includes a method of measuring a first light having a high light transmittance in a first wavelength region of visible light .
A first portion having a first color filter layer ;
Between the first color filter layer and the transparent substrate.
Provided, the second part the color filter substrate from one surface side of the color filter substrate comprising a <br and a second second color filter layer having a high light transmittance in the wavelength region of visible light />, And light receiving means arranged on the other surface side of the color filter substrate, the light having passed through the color filter substrate other than the first wavelength region and the second wave
The amount of light having a wavelength in a predetermined region other than the long region is measured, and the color density of the first portion is calculated from the output of the light receiving means by the calculating means connected to the light receiving means.

According to the method for measuring the density of a color filter according to the present invention, a first filter having a high light transmittance in a first wavelength region of visible light is used .
A first portion having a first color filter layer;
Between the first color filter layer and the transparent substrate.
A second portion having a second color filter layer having a high light transmittance in a second wavelength region of visible light ;
A first color filter layer and the first color filter layer
Provided between the substrate and the third wavelength region of visible light.
The color from one side of the color filter substrate comprising a third portion <br/> having a light transmittance higher third color filter layer Fi
The filter substrate is irradiated with light, and a light receiving unit disposed on the other surface side of the color filter substrate is used to detect a wave of a predetermined region other than the first wavelength region in the light passing through the color filter substrate.
The long light quantity is measured, and the color density of the first portion is calculated from the output of the light receiving means by the calculating means connected to the light receiving means.

[0012]

DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to an RGB three-color filter substrate used for a liquid crystal display panel as an example. Embodiment 1 FIG. FIG. 1 is a front view showing a configuration of a color filter density measuring apparatus according to Embodiment 1 of the present invention, and FIG. 2 is a perspective view showing a configuration of a color filter density measuring apparatus according to Embodiment 1 of the present invention. is there. 1 and 2, reference numeral 1 denotes a color filter substrate to be measured, and 2 denotes the color filter substrate 1.
The light projecting means is provided on one side of the light emitting device, and is constituted by, for example, a lamp for generating yellow light. Numeral 3 is provided on the other surface side of the color filter substrate 1, and is a light receiving unit optically opposed to the light projecting unit 2 via the color filter substrate 1, and 4 is a device for detecting the density of the color filter substrate 1 from the output of the light receiving unit 3. It is an operation means for performing an operation.

[0013] Next, a description will be given of concentration measurement method of the color filter. FIG. 3 is a specific configuration diagram of the color filter density measuring device according to Embodiment 1 of the present invention. As shown in FIG. 3, the color filter substrate 1 is conveyed at a predetermined speed. A linear light source is disposed above the passage as the light projecting unit 2, and a light receiving unit 3 is disposed below the passage of the color filter substrate 1 so as to face the light projecting unit 2. FIG. 4 shows a flowchart of the color density measurement in this case.

The method for measuring the density of the color filter will be described with reference to this flowchart. First, light is emitted from the light projecting means 2 to the light receiving means 3 (step 1). Next, it is detected that the color filter substrate 1 has entered the irradiation position of the light from the light projecting means 2 (step 2). The light receiving unit 3 measures the amount of light having a low light transmittance among the light from the light projecting unit 2 passing through the color filter substrate 1 (step 3). Then, completion of passage of the color filter substrate 1 is detected (step 4). Then, the light receiving means 3 is calculated by the arithmetic means 4.
Then, the color density of the color filter substrate 1 is calculated from the output (step 5). Returning to step 2 as necessary, the above operation is repeated.

Next, the R-G-B3 color filter substrate manufacturing process shown in FIG 7, as shown in FIG. 7 (b), the coated and R color filter layer 1 3 on the transparent substrate 11 The density measurement when measuring the color density of the R color filter layer 13 immediately after will be described. As shown in FIG. 7B, the measurement target has a BM layer 12 on a transparent substrate 11, and an R color filter layer 13 is applied on the BM layer 12. As shown in FIG. 8, the R color filter layer 13 transmits light of a red wavelength well, but hardly transmits other visible light. Therefore, in the conventional method for measuring the density of a color filter, white light is radiated to this filter, and the color density is measured from the change in the amount of transmitted light. However, the main component of the transmitted light is light of a wavelength having a high transmittance. Therefore, even if the light source is changed from white light to, for example, red light, the degree of the light amount change is considered to be substantially the same.

It is now assumed that light having a wavelength λ1 shown in FIG. 8 is emitted from the light projecting portion. At this time, the R color filter layer 1
Assuming that the color becomes darker due to the doubling of the film thickness of No. 3, light can be considered to transmit twice through a filter having a transmittance of 90%, so that a light amount of 90% × 90% = 81% is obtained. Will be done. Speaking of the change in light amount, the ratio before and after the film thickness has doubled is 90: 81 = 10: 9, and the change amount can be regarded as 10%. This is an index that gives the sensitivity when the color density is optically measured in the related art.

Meanwhile, the first embodiment of the invention, the low wavelength region transmittance light, for example light having a wavelength λ2 as shown in FIG. 8 R
A case where the amount of transmitted light is measured by irradiating the color filter layer 13 will be considered. Assuming that the transmittance of the light having the wavelength λ2 is 10%, when the film thickness is doubled, the light amount becomes 10% × 10% = 1%. As the film thickness is doubled, the ratio before and after the light amount change is 10: 1, and the change amount can be seen as 10 times. As described above, when the color density of the R color filter layer 13 is optically measured, compared with the case where the light amount of the light of the wavelength λ1 having a high transmittance of the R color filter layer 13 is measured,
By measuring the amount of light of the wavelength λ2 having a low transmittance of the R color filter layer 13, it is possible to detect the change in color density with extremely high sensitivity.

In the above description, the film thickness is doubled.
The point is that the amount of light changes according to the color density, so there is no need to limit to this, and the output of the present principle may be any as long as it corresponds to the color density felt by humans. It is understood that the color density of the R-color filter layer 13 can be measured even in a yellow light environment by selecting a wavelength longer than the blue range, for example, light having a wavelength λ2 when selecting a wavelength region having a low transmittance.

Next, the R-G-B3 color filter substrate manufacturing process shown in FIG 7, as shown in FIG. 7 (d), the after forming the R Iroga element 2 3 on the transparent substrate 11 , it will be described for measuring the color intensity of the G color filter layer 14 immediately after uniformly coated on the G color filter layer 1 4 a transparent substrate 11. As shown in FIG. 7 (d), the material of the G color filter layer 14 is uniformly applied to the entire surface of the substrate of the color filter substrate 1, but the R color pixels 23 are formed thereunder. Therefore, there is a portion including only the G color filter layer 14 and a portion where the G color filter layer 14 and the R color pixel 23 are stacked. In this case, the G color filter layer 1 to be measured
It is sufficient to measure the amount of transmitted light of wavelength 4 having a low transmittance, for example, light of λ1 in FIG. Although there is light passing through only the G color filter layer 14 and light passing through the portion where the G color filter layer 14 and the R pixel 23 are stacked, the light of λ1 is less attenuated in the R pixel 23. Therefore, the amount of light reaching the light receiving means 3 is equal to the amount of light transmitted through only the G filter layer 14.
The light amount is obtained by adding the light amount transmitted through the portion where the color filter layer 14 and the R color pixel 23 are stacked, and as a result, the light amount becomes close to the light amount when the R color pixel 23 is not provided.

[0020] Thus, since the amount of light intensity even with R color pixels 23 is not reduced, it is possible to reduce the influence of stray light reaching the light receiving unit 3, becomes stronger with respect to noise correspondingly, improvement in measurement accuracy Can be expected. Accordingly, since the total amount of light is light having a wavelength with a low transmittance of the G color filter layer 14, it can be detected with extremely high sensitivity to a change in the color density. In this case, when selecting a wavelength region having a low transmittance, for example, by selecting a wavelength longer than the blue region, such as light of wavelength λ1, the G color filter layer 1 can be formed even in a yellow light environment.
4 can be measured.

Next, FIG. 7 in R-G-B3 color filter substrate manufacturing process shown in, as shown in FIG. 7 (f), R color pixel 23 to the transparent substrate 11 and the G Iroga element 2 The case where the color density of the B color filter layer 15 is measured immediately after the B color filter layer 15 is uniformly coated on the transparent substrate 11 after the formation of the layer 4 will be described. As shown in FIG. 7 (f), the color filter substrate 1 has a B color filter layer 15 material uniformly coated on the entire surface of the substrate, but below the R color pixels 23 and the G color pixels 24. Therefore, only the B color filter layer 15 and the B color filter layer 15
The portion where the color pixels 23 are stacked, and the B color filter layer 1
5 and a portion where the G color pixels 24 are stacked.
Even in this case, according to the present invention, the color density can be measured with extremely high sensitivity. That is, the transmitted light amount of a wavelength having a low transmittance of the B color filter layer 15 to be measured, for example, light having a wavelength λ1 or light having a wavelength λ2 in FIG. 8 may be measured. The light transmitted through only the B color filter layer 15 and the B color filter layer 1
5 and the R color pixel 23 are laminated, and the light transmitted through the B color filter layer 15 and the G pixel 24 are laminated. Since the attenuation at the color pixel 23 is small, the amount of light reaching the light receiving unit 3 is transmitted through the portion where the B color filter layer 15 and the R color pixel 23 are laminated to the amount of light transmitted through only the B color filter layer 15. The light amount is the light amount obtained by adding the light amount, and as a result, the light amount is close to the light amount when there is no R color pixel 23. In addition, the wavelength λ2
Since the light of the color (A) is less attenuated by the G color pixel 24, the amount of light reaching the light receiving means 3 is equal to the amount of light transmitted through only the B color filter layer 15, and the B color filter layer 15 and the G color pixel 24 The light amount is the light amount obtained by adding the light amount transmitted through the present portion, and as a result, the light amount is close to the light amount when there is no G color pixel 24.

[0022] Thus, R-color pixel 23 and the G-color pixel 2
4, the total amount of light does not decrease.
The effect of stray light arriving at the object can be reduced, so that the noise becomes stronger and the measurement accuracy can be improved. Since the total amount of light in this case is light having a wavelength at which the transmittance of the B color filter layer 15 is low, it can be detected with extremely high sensitivity to a change in the color density. In selecting a wavelength region having a low transmittance, for example, by selecting a wavelength longer than the blue region, such as light of wavelength λ1 or light of wavelength λ2, the density of the B color filter layer can be measured even in a yellow light environment.

Embodiment 2 FIG . As shown in FIG. 7D, since the laminated portion of the R color pixel 23 and the G color filter layer 14 is convex, the G color filter layer 14
Immediately after application, the G color filter layer 14 flows out according to its viscosity, and the thickness of the convex portion of the G color filter layer 14 may be reduced. This difference in thickness varies depending on the manufacturing method, and there are many factors such as the viscosity of the coating material and the size and shape of the R-color pixel 23. However, the thickness of the convex portion of the filter layer and the other portions is different. Often there is a very strong correlation.
In other words, if one thickness is known, the other thickness can be identified. However, when the error of the identification value becomes a problem, it can be measured by the above-described method. That is, the wavelength of the light to be measured is selected, and the R pixel 2
A wavelength that is attenuated by the wavelength 3 and is also attenuated by the G color filter layer 14, for example, light having a wavelength λ3 in FIG.

In this case, the total amount of light is 1 /
8, and the light is attenuated by 1/10 in the G color filter layer 14. The amount of light reaching the light receiving means 3 is smaller than the amount of light transmitted through only the G filter layer 14.
The amount of light transmitted through the portion where the pixel 4 and the R color pixel 23 are stacked is に よ り and the area is １ ／ according to the transmittance, so that the amount of light from the convex portion of the filter layer is
It becomes 1/16 of the light quantity of the portion of only 4. Therefore, the total light quantity reflects the color density of the portion of only the G filter layer 14. Thus, the total amount of light is
Since the light has a low transmittance, the relationship between the color density and the light amount is extremely large, and as in the first embodiment,
The film thickness can be detected with high sensitivity.

[0025] Embodiment 3. Also, as shown in FIG. 7 (f), since the layered portion of the R color pixel 23 and the G color pixel 24 and the B color filter layer 15 is convex, similar to the one shown in FIG. Immediately after the application of the B color filter layer 15, the B color filter layer 1
5 may have a reduced thickness. In this case as well, light having a wavelength at which the transmittance of the B color filter layer 15 to be measured is low and the transmittance of the R color pixel 23 and the transmittance of the G color pixel 24 are both low, for example, light of wavelength λ4 in FIG. I just need. The light having the wavelength λ4 is attenuated to 1/3 by the R color pixel 23 or the G color pixel 24, and is attenuated to 1/20 by the B color filter layer 15. The amount of light transmitted through the portion where the R color pixel 23 and the B color filter layer 15 are stacked and the portion where the G pixel 24 and the B color filter layer 15 are stacked are determined by the transmittance of the portion where only the B color filter layer 15 is provided. 1/3 of the amount of transmitted light,
The total amount of light reflects the color density of the portion of only the B color filter layer 15. That is, since the total amount of light is light having a wavelength with a low transmittance of the B color filter layer 15, the relationship between the color density and the amount of light is large, and the film thickness can be detected with high sensitivity as in the first and second embodiments. it can.

[0026] Embodiment 4. In the first, second, and third embodiments, a more specific method for detecting a specific wavelength can be realized by disposing an optical filter that transmits a specific wavelength in the light receiving unit 3. In this way, the light source may emit light of a broadband wavelength, so that the degree of freedom in selecting the light source is increased. FIG. 5 is a front view showing the configuration of such a color filter density measuring device according to the fourth embodiment. Reference numeral 5 denotes an optical filter that allows the light receiving unit 3 to transmit a specific wavelength.
The same or corresponding parts as those in FIG. 1 are denoted by the same reference numerals. As described above, the optical filter 5 is connected to the color filter substrate 1.
Between the light receiving means 3 and only the specific wavelength.
The light source (light projecting means) 2 can use light having a wide wavelength band. Therefore, the light projecting means 2 can use a fluorescent tube of yellow color called yellow light, and does not exert any adverse optical influence on the surroundings even if it is installed in an environment where the photosensitive material is handled.

Embodiment 5 FIG . Further, as a specific method different from the method of detecting the specific wavelength according to the fourth embodiment, the specific wavelength may be generated by the light projecting means 2. For example, a laser light source or an LED light source is used as the light projecting unit 2. According to the fifth embodiment, the R color filter layer 13 shown in the first, second, and third embodiments,
The color density of the G color filter layer 14 and the B color filter layer 15 can be measured with high sensitivity.

Embodiment 6 FIG . The R color pixel 23 of the color filter substrate 1 in the state of FIG.
It can be adopted the following means in the case of measuring the G color pixel 24 and color strength of the B Iroga containing 2 5. That is, each pixel of RGB is generated in the color filter substrate 1 in the state of FIG. For example, when measuring the color density of the R-color pixel 23, one method is to irradiate a light beam not larger than the pixel to a pixel of the substrate using, for example, a laser beam and measure the light amount. According to this method, it is possible to measure the color density of each pixel, but when the number of pixels on the substrate is very large, the time to measure all the pixels becomes longer. Positional accuracy is required, and a very large and precise mechanism is required. Therefore, the light path of the light projecting means 2, the G color pixel 24, the B color pixel 25, and the light receiving means 3 is blocked, and a mask plate having a hole serving as an optical path passing only the R color pixel 23 is used. Of the light, only the light that has passed through the R color pixel 23 reaches the light receiving unit 3.

FIG . 6 is a configuration diagram showing a mask plate according to such a sixth embodiment. In the figure, reference numeral 6 denotes a mask plate, which is provided with a hole serving as an optical path that passes only the R color pixel 23, and blocks the optical paths of the G color pixel 24 and the B color pixel 25. Here, the color density of the R pixel 23 can be measured with high sensitivity by measuring the amount of light of the wavelength λ2 described above. still,
Although the R color pixel 23 has been described as an example, the G color pixel 24 or the B color pixel 25 has the same operation. According to the sixth embodiment, since the color type of the pixel to be measured is selected by the mask plate 6, the light amounts from a plurality of pixels of the same color are collectively measured, and the color density is minutely finer for each pixel. The present invention is effective when measurement of is not necessary.

[0030]

As described above, according to the present invention, the first light having a high light transmittance in the first wavelength region of the visible light .
A first portion having a first color filter layer ;
Between the first color filter layer and the transparent substrate.
And has a light transmittance in the second wavelength region of visible light.
A second portion having an elevated second color filter layer.
That light is irradiated from one surface side of the color filter substrate to the color filter substrate <br/>, the arranged light receiving means on the other surface side of the color filter substrate, the light passing through the color filter substrate The light intensity of a predetermined region other than the first wavelength region is measured, and the color density of the first portion is calculated from the output of the light receiving unit by the calculating unit connected to the light receiving unit. With this configuration, there is an effect that detection can be performed with extremely high sensitivity to a change in color density. Further, since a light source having the same color as the color of the filter to be measured is not required, light that can be used in the step of using a photosensitive material can be selected, so that the present invention can be applied to a yellow room. Sa
In addition, different color filter layers are doubled
Accurately measure the color depth of the color filter layer to be measured
There are effects such as being able to do.

According to this invention, a first portion having a first color filter layer having a high light transmittance at a first wavelength region of the visible light, and the first color filter layer, the first Color of
A second color filter layer provided between the filter layer and the transparent substrate and having high light transmittance in a second wavelength region of visible light ;
And irradiating the color filter substrate with light from one surface side of the color filter substrate composed of the second portion having the second portion. The first wavelength region of the transmitted light
Wavelength outside the range and in a predetermined range other than the second wavelength range
The amount of light is measured, and then, is computed color density of the first portion from the output of said light receiving means by connected operational means to said light receiving means, with respect to the change in color density There is an effect that detection can be performed with extremely high sensitivity. Also, since a light source of the same color as the filter color to be measured is not required ,
Since the light that can be used in the step of using a photosensitive material can be selected, the present invention can be applied to a yellow room. Further, similarly to the first aspect, there is an effect that the color density of the color filter layer to be measured can be accurately measured even when different color filter layers are doubled.

According to this invention, the having a first color filter layer having a high light transmittance at a first wavelength region of the visible light
1, the first color filter layer, and the first color
A second color filter layer provided between the filter layer and the transparent substrate and having high light transmittance in a second wavelength region of visible light;
A second portion having the first color filter layer,
Provided between the first color filter layer and the transparent substrate.
A third color filter having a high light transmittance in a third wavelength region of the viewing light.
The color filter substrate comprising a third portion having a filter layer is irradiated with light from one surface side of the color filter substrate, and light receiving means disposed on the other surface side of the color filter substrate causes the color filter substrate to emit light. Of the light passing through the substrate, the first
Since it is configured to measure the amount of light of a predetermined range of wavelengths other than the wavelength range and to calculate the color intensity of the first portion from the output of the light receiving means by the calculating means connected to the light receiving means, An output with extremely high sensitivity to a change in color density can be obtained. Further, since a light source having the same color as the color of the filter to be measured is not required , light that can be used in the step of using a photosensitive material can be selected, so that the present invention can be applied to a yellow room. In addition, the different dichroic Fi
Even when the color filter layer to be measured is overlaid on the pixel, the color density of the color filter layer to be measured can be measured accurately.

[Brief description of the drawings]

FIG. 1 is a front view showing an embodiment of a color filter density measuring method according to Embodiment 1 of the present invention;

FIG. 2 is a perspective view showing an embodiment of a color filter density measuring method according to Embodiment 1 of the present invention;

FIG. 3 is a specific configuration diagram showing an implementation configuration of a color filter density measuring method according to Embodiment 1 of the present invention;

FIG. 4 is a flowchart of color density measurement according to the first embodiment of the present invention.

FIG. 5 is a front view showing an embodiment of a color filter density measuring method according to Embodiment 4 of the present invention;

FIG. 6 is a configuration diagram showing a mask plate according to a sixth embodiment of the present invention.

FIG. 7 is a diagram illustrating a manufacturing process of a liquid crystal color filter substrate.

FIG. 8 is a characteristic diagram for explaining light transmittance of pixels of each color of RGB on a liquid crystal color filter substrate.

[Explanation of symbols]

 1 color filter substrate 2 light emitting means 3 light receiving means 4 arithmetic means 5 optical filter 6 mask plate 13 R color filter layer 14 G color filter layer 15 B color filter layer 23 R color pixel 24 G color pixel 25 B color pixel

────────────────────────────────────────────────── ─── Continued on the front page (58) Fields surveyed (Int. Cl. ⁷ , DB name) G01J 3/46-3/51 G01J 1/00-1/04 G01B 11/00-11/30 102 G01N 21 / 84-21/958 G01M 11/00 G02B 5/20 101 G02B 1/1335 505

Claims (3)

(57) [Claims] A first portion having a first color filter layer having a high light transmittance in a first wavelength region of visible light ;
A first color filter layer and the first color filter layer
Provided between the substrate and the second wavelength region of visible light.
A second part having a second color filter layer having high light transmittance
This from one side of the color filter substrate comprising a partial Irofu
The filter substrate is irradiated with light, and light receiving means arranged on the other surface side of the color filter substrate causes light of a predetermined region other than the first wavelength region of the light passing through the color filter substrate to pass therethrough .
A method for measuring the density of a color filter, comprising: measuring a light amount of a wavelength; and calculating a color density of the first portion from an output of the light receiving means by an arithmetic means connected to the light receiving means. 2. A first portion having a first color filter layer having high light transmittance in a first wavelength region of visible light, the first color filter layer, and the first color filter layer And transparent
A second color filter layer provided between the substrate and the second color filter layer , the second color filter layer having high light transmittance in a second wavelength region of visible light;
The Irofu from one surface side of the color filter substrate consisting minutes
The filter substrate is irradiated with light, and light receiving means disposed on the other surface side of the color filter substrate is used to light the light having passed through the color filter substrate in a region other than the first wavelength region.
Measuring a light amount of a wavelength in a predetermined region other than the second wavelength region ,
A method for measuring the density of a color filter, comprising: calculating a color density of the first portion from an output of the light receiving means by a calculating means connected to the light receiving means. 3. A first portion having a first color filter layer having high light transmittance in a first wavelength region of visible light ,
A first color filter layer and the first color filter layer
A second color filter layer provided between the substrate and the second color filter layer , the second color filter layer having high light transmittance in a second wavelength region of visible light;
Minute, the first color filter layer, and the first color filter.
Between the transparent layer and the transparent substrate.
A third color filter layer having a high light transmittance in a wavelength region;
From one side of the color filter substrate comprising a third portion
The color filter substrate is irradiated with light, and light receiving means arranged on the other surface side of the color filter substrate causes light out of the light having passed through the color filter substrate other than the first wavelength region to pass therethrough .
A method for measuring the amount of light having a wavelength in a predetermined range, and calculating a color density of the first portion from an output of the light receiving means by an arithmetic means connected to the light receiving means. .