JP3233329B2 - Radiation temperature measuring device and radiation temperature measuring method - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a radiation temperature measuring device and a radiation temperature measuring device.
The present invention relates to an irradiation temperature measuring method . More specifically, a radiation temperature for measuring the temperature of the measured part in a non-contact manner by comparing and referring to the spectral radiated output radiated from the measured part with the spectral radiated radiation output from a reference part different from the measured part. The present invention relates to a measuring device and a radiation temperature measuring method .

[0002]

2. Description of the Related Art The energy of heat radiation radiated from a measurement site depends on the temperature of the measurement site. When the object is a black body, a relational expression between spectral radiance and temperature is established according to Planck's radiation law. Although the temperature of an object that is not a black body needs to be obtained by correcting it with emissivity, there is a pyrometer as a measuring device that corrects the luminance temperature with emissivity. In practice, however, there is a problem that it is often very difficult to determine the emissivity. One of the methods for measuring temperature using thermal radiation without correcting the emissivity is a two-color radiation temperature measurement method. In this method, the temperature is obtained from the radiance ratios at two different measurement wavelengths. If the part to be measured is a gray body, the emissivity is constant regardless of the wavelength, so that the true temperature can be obtained regardless of the emissivity. In addition, even when the body is not a gray body, the temperature, the measurement angle, and the surface condition of the measurement site affect
The effect of the wavelength on the radiance ratio is almost negligible and can be regarded as constant.

[0003] In determining the temperature by the two-color radiation temperature measurement method, it is assumed that the measurement site is a gray body, and the Wien formula is applied. When the two measured wavelengths are λ ₁ and λ ₂ , respectively, and the ratio of the spectral radiance to the spectral radiance of the equation based on Planck's radiation law is R for each of the two wavelengths, the temperature T is expressed by the following equation (1) ). However,
C ₂ is the second coefficient of radiation, C ₂ = ch / k (where c
Is the speed of light, h is Planck's constant, and k is Boltzmann's constant.

[0004]

(Equation 1)

[0005]

In general, a method of detecting temperature by detecting heat radiation from a measurement site is to obtain a temperature by detecting other radiation superimposed on heat radiation from the measurement site. Values contain errors. The conventional two-color radiation temperature measurement method sets the emissivity by comparing the luminance temperature obtained from the radiance of monochromatic radiation with the emissivity (for example, a method used in an optical pyrometer). The influence of the error on the temperature value is reduced.

However, when other radiation is superimposed on the thermal radiation from the part to be measured, there remains a problem that the obtained temperature value still contains an error. For example, when measuring the electrode temperature of a discharge lamp, since the electrodes are present in the arc tube, a temperature measurement method using thermal radiation, which is a non-contact method, must be used. Therefore, the electrodes are often buried in the sheath of the radiation by the discharge, and there is a problem that the radiation by the discharge is inevitably detected in a superposed manner even if only the heat radiation from the electrode is to be detected.

[0007] When the two-color radiation temperature measurement method is applied, the present inventors have variously studied how to reduce the error detected by the detector by superimposing other radiation on the heat radiation from the measurement site. investigated. As a result, the present inventors have found that it is possible to reduce or correct the generated error by knowing what kind of spectral radiation characteristic of the radiation other than the superimposed thermal radiation has, and have made the present invention.

In view of the above problems, the present invention performs two-color radiation temperature measurement in accordance with the spectral radiation characteristics of other radiation detected by being superimposed on heat radiation radiated from a measurement site,
A radiation temperature measuring device and a radiation temperature measuring device capable of obtaining an accurate temperature by calculating a temperature based on the measured value.
It is intended to provide a degree measurement method .

[0009]

In order to achieve the above object, a first radiation temperature measuring device according to the present invention comprises a discharge lamp.
A radiation temperature measuring device for measuring an electrode temperature of a probe, a first multi-wavelength detecting means for detecting a multi- wavelength spectral radiation output radiated from a measured portion, and a reference portion different from the measured portion. Second multi-wavelength detecting means for detecting the emitted multi- wavelength spectral radiation output, and the second multi-wavelength detecting means
Input the spectral radiation output detected in
In which the output is not present at two wavelengths, or
Two wavelengths with negligible output, or constants for correction
Wavelength selection method for selecting one of two wavelengths that are easy to set
And the two wavelengths selected by the two wavelength selecting means.
Determine the content of the correction according to the content and, based on the content of the correction,
The measured part using the spectral radiation output of the reference part
And a calculating means for calculating the temperature value by correcting the spectral radiation output .

Next, a second radiation temperature measuring device of the present invention is a radiation temperature measuring device for measuring an electrode temperature of a discharge lamp.
A is, of moving the multiple wavelength detection means for detecting the spectral radiation output of the multi-wavelength emitted from the measurement site, the detection means
Driving means for, using the calculation from the detected site
To select a reference site different from the measurement site to be used.
Illuminated site selecting means; and a spectral emission radiated from the reference site.
Of the spectral radiation output based on the radiation output
Two wavelengths that do not exist, or their output is negligible
Two wavelengths or two waves for which constants are easy to set when performing correction
Two wavelength selecting means for selecting one of the lengths, and the two wavelengths
Correction according to the contents of the two wavelengths selected by the selection means
Determine the content, and based on the correction content,
The spectral radiation output of the measurement site using the spectral radiation output.
A calculating means for performing a correction and calculating a temperature value.

In the above arrangement, the two-wavelength selecting means
Are the two wavelengths whose output does not exist
If, the spectral radiation output of the measurement site is corrected.
It is preferable not to know.

Next, a first radiation temperature measuring method according to the present invention is a radiation temperature measuring method for measuring an electrode temperature of a discharge lamp.
And multi-wavelength spectral radiation radiated from the measurement site
The step of detecting the output is different from the measured part
Detects multi-wavelength spectral radiation output radiated from a reference site
The spectral radiation emitted from the reference site.
Based on the force, there is an output in this spectral radiation output
Not two wavelengths, or two waves whose output is negligible
Length or two wavelengths for which constants are easy to set when performing correction
Selecting any one of the two wavelengths
The correction content is determined according to the content of the correction, and based on the correction content,
The measured part using the spectral radiation output of the reference part
To correct the spectral radiation output of
It is characterized by including a tip.

[0013] The second radiation temperature measuring method of the present invention then, the radiation temperature measuring method for measuring the electrode temperature of the discharge lamp
A is a step of detecting the spectral radiation output of the multi-wavelength emitted from the measurement site, calculating from the detected site
Select a reference site different from the measurement site to be used for
The spectral radiation emitted from the reference site.
Based on the force, there is an output in this spectral radiation output
Not two wavelengths, or two waves whose output is negligible
Length or two wavelengths for which constants are easy to set when performing correction
Selecting any one of the two wavelengths
The correction content is determined according to the content of the correction, and based on the correction content,
The measured part using the spectral radiation output of the reference part
The method further comprises the step of correcting the spectral radiation output of each position and calculating a temperature value. In the previous SL method, select
The two selected wavelengths are the two wavelengths whose output does not exist
In this case, it is preferable not to correct the spectral radiation output of the measurement site .

[0014]

SUMMARY OF] According to the configuration of the first radiation temperature measuring device and the radiation temperature measuring method, the thermal radiation emitted from the measurement site using a first first multiple wavelength detector, heat to be superimposed simultaneously Spectral radiation output as a combination of radiation other than radiation is detected at multiple wavelengths without being limited to two specific wavelengths, and is then radiated from a reference portion different from the measured portion using a second multi-wavelength detecting means. Spectral radiation output of the same multi-wavelength as the part to be measured is detected, and it is suitable for calculating a temperature value based on the spectral radiation output radiated from the reference part using the two-wavelength selection means, that is, radiation from the reference part. Two wavelengths whose output does not exist in the spectral radiation output where thermal radiation does not coexist, two wavelengths whose output is sufficiently negligible if they do not exist, and subtracted if they do not exist Two wavelengths for which constants are easy to set Then, the outputs from the measured part and the reference part of the selected two wavelengths are input to the calculating means, and the output of the reference part is subtracted from the output from the measured part or subtracted by multiplying by an appropriate constant. As a result, it is possible to obtain a two-wavelength spectral radiation output ratio due to the net heat radiation radiated from the measurement site, and obtain a true temperature by an arithmetic process based on a two-color radiation temperature measurement method. No.
According to the second configuration of the radiation temperature measurement standing and the radiation temperature measurement method, first, the multi-wavelength detection means is used to combine the heat radiation radiated from the measurement site with the radiation other than the heat radiation simultaneously superimposed. Is detected at multiple wavelengths without being limited to two specific wavelengths, and then the detecting means is moved to at least two or more parts different from the part to be measured using the driving means, and the part to be measured is It is suitable for detecting the spectral radiation output of the same multiple wavelengths and calculating the temperature value from the part detected using the reference part selection means, that is, there is no mixed heat radiation or if there is no heat radiation other than heat radiation Select a reference site that is different from the measured site, and obtain a spectral output that clearly shows the correlation between the radiated output of the measured site and the radiated output other than the heat radiation from the measured site. Suitable for calculating the temperature value from the injection force, i.e. emitted from the reference site, and its output in the spectral radiation output does not come mix of thermal radiation is not present 2
Wavelength, two wavelengths whose output can be neglected sufficiently if they do not exist, and two wavelengths whose constants are easily set when subtracting if they do not exist are selected. By inputting the output from the measured part and the output from the reference part, and subtracting the output of the reference part from the output from the measured part or by multiplying by an appropriate constant, the net heat radiation radiated from the measured part , And a true temperature can be obtained by arithmetic processing based on a two-color radiation temperature measurement method.

According to the configuration of the radiation temperature measuring device of the second invention, first, the specific two wavelengths as a combination of the radiation other than the heat radiation superimposed simultaneously with the heat radiation radiated from the measurement site by using the detecting means. Then, using the driving means, the detecting means is moved to a reference part capable of detecting only the radiation other than the heat radiation in which the heat radiation from the part to be measured is not mixed, and specified from the reference part. Detect the two-wavelength spectral radiation output, input the output from the measured part and the output from the reference part to the calculating means, and subtract the output of the reference part from the output from the measured part, or subtract it by multiplying by an appropriate constant. As a result, the spectral radiation output ratio of two wavelengths due to the net heat radiation radiated from the measurement site can be obtained, and the true temperature can be obtained by the arithmetic processing based on the two-color radiation temperature measurement method.

According to the above configuration of the radiation temperature measuring device of the third invention, first, the first multi-wavelength detecting means is used to measure the heat radiation radiated from the measurement site and the radiation other than the heat radiation superimposed simultaneously. Spectral radiation output as synthesis is detected at multiple wavelengths without being limited to two specific wavelengths, and then is measured using a second multi-wavelength detecting means to be the same as the measured part radiated from a reference part different from the measured part. Thermal radiation that is suitable for detecting multi-wavelength spectral radiation output and calculating a temperature value based on the spectral radiation output emitted from the reference site using the two-wavelength selection means, that is, emitted from the reference site Among the spectral radiation outputs that do not coexist, two wavelengths whose output does not exist, two wavelengths whose output can be neglected if they do not exist, and constants in the case of subtraction if they do not exist are easy to set Select two wavelengths and play By inputting the output of the measured part and the reference part of the specific two wavelengths selected as the means, and subtracting the output of the reference part from the output from the measured part or by multiplying by an appropriate constant, the measured A spectral radiation output ratio of two wavelengths due to the net thermal radiation radiated from the site is obtained, and a true temperature can be obtained by arithmetic processing based on a two-color radiation temperature measurement method.

According to the above configuration of the radiation temperature measuring device of the fourth invention, first, the multi-wavelength detecting means is used to combine the heat radiation radiated from the measurement site with the radiation other than the heat radiation superimposed simultaneously. The spectral radiation output is detected at multiple wavelengths without being limited to two specific wavelengths, and then the detection means is moved to at least two or more different parts from the part to be measured by using the driving means. It is appropriate to detect the same multi-wavelength spectral radiation output and to calculate the temperature value from the parts detected using the reference part selecting means, that is, there is no mixture of heat radiation or if there is no heat radiation other than heat radiation Select a reference site that is different from the measured site, and obtain a spectral emission output at the selected reference site that provides a spectral emission output that clearly shows the correlation between the radiated output and the radiated output other than heat radiation from the measured site. To compute the temperature values from the appropriate,
That is, two wavelengths in which the output does not exist in the spectral radiation output which is not mixed with the heat radiation radiated from the reference portion,
If it does not exist, two wavelengths whose output can be neglected sufficiently, and if it does not exist, two wavelengths whose constants to be subtracted are easy to set are selected, and the measured two specific wavelengths selected by the arithmetic means are measured. By inputting the output from the part and the output from the reference part, and subtracting the output of the reference part from the output from the part to be measured or by multiplying the output by an appropriate constant, 2 by the net heat radiation radiated from the part to be measured The true temperature can be obtained by calculating the spectral radiation output ratio of the wavelength and performing arithmetic processing based on the two-color radiation temperature measurement method.

According to the preferred embodiment of the radiation temperature measuring apparatus of the fifth invention, the radiation is first emitted from at least two parts including the part to be measured by using the multi-part, multi-wavelength simultaneous detection means E.
Suitable for simultaneously detecting at least two wavelengths of spectral radiation output and then calculating a temperature value from the detected parts using the reference part selection means, that is, if there is no mixed heat radiation or there is no heat radiation, Select a reference site different from the measured site, and obtain a spectral output that clearly shows the correlation between the radiated output other than radiation and the radiated output other than heat radiation from the measured site, and then spectroscopy at the selected reference site Two wavelengths that are appropriate for calculating the temperature value from the radiation output, that is, two wavelengths where the output does not exist in the spectral radiation output that is not mixed with the heat radiation emitted from the reference part, and that it is not enough Two wavelengths whose outputs are negligible, and two wavelengths whose constants are easily set when subtracting if there is no such output are selected.
By inputting the output from the measured part and the output from the reference part, and subtracting the output of the reference part from the output from the measured part or by multiplying by an appropriate constant, the net heat radiation radiated from the measured part , And a true temperature can be obtained by arithmetic processing based on a two-color radiation temperature measurement method.

[0019]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the radiation temperature measuring apparatus according to the present invention will be described with reference to the drawings. (Embodiment 1) FIG. 1 is a view for explaining an embodiment of a radiation temperature measuring apparatus according to the present invention, and is a view for explaining a case where the present invention is applied to measurement of an electrode temperature of a discharge lamp. Figure 1 seen from the vertical direction
As shown in (a), the electrode 9 is buried in the sheath (atmosphere) of radiation by the discharge arc 10 during the operation of the discharge lamp. In FIG. 1, reference numeral 1 denotes a measured portion, 2 denotes a reference portion, 6
Denotes detection means A, 7 denotes detection means B, 8 denotes arithmetic means,
Reference numeral 3 denotes heat radiation, 4 denotes radiation other than heat radiation detected to be superimposed on the heat radiation 3, and 5 denotes radiation other than heat radiation in which heat radiation is not mixed.

The detecting means A6 is a device for detecting the radiation radiated from the portion to be measured 1 (the central portion of the electrode tip in FIG. 1 as viewed from the lateral direction), and comprises a measuring optical system, an aperture, a spectroscope, and a bandpass filter. And a photodetector (silicon photodiode, photomultiplier, etc.) for receiving the spectral emission output.

If the detection means A6 tries to detect the radiation radiated from the measured part 1, radiation from other parts is actually superimposed and detected. The detection means A6 of the present embodiment uses a lens in the measurement optical system, collects radiation from the measured portion 1 to form an image, and forms an image through the aperture.
Thermal radiation of 5.4 nm and 945.0 nm is incident on the detecting means. Further, the measuring optical system may have a lens or an aperture. As the aperture, an apparatus based on a method of selecting a measurement site and allowing thermal radiation to pass, or an apparatus based on a method of using a plurality of apertures having the same diameter and converting the radiation from the measured site into parallel light and incident on the detection unit may be used. .

The detecting means B7 is an apparatus for detecting the radiation 5 other than the heat radiation of the reference part 2, which is a part different from the part 1 to be measured (right next to the electrode in FIG. 1). The detecting means B7, like the detecting means A6, includes a measuring optical system, an aperture, a spectroscopic means including a spectroscope, a band-pass filter, and the like, and a photoelectric detector (silicon photodiode) which receives a spectral radiation output through the spectroscopic means. , Photomultiplier tubes, etc.). The device configuration of the detecting means A7 is the same as that of the detecting means A6.

The calculating means 8 is a device for calculating the temperature from the heat radiation 3 and the radiation 5 other than the heat radiation. Detection means A
6, detecting a spectral radiation output in which the radiation 4 other than the thermal radiation superimposed on the thermal radiation 3 radiated from the measurement site is synthesized;
The detection means B7 detects the spectral radiation output of the radiation 5 other than the thermal radiation in which the thermal radiation does not coexist, inputs these two outputs, calculates the thermal radiation 3, and calculates the temperature.

Hereinafter, a description will be given of a method of calculating the temperature due to the net heat radiation radiated from the measurement site by the calculating means 8. First, the spectral radiation output of the radiation 5 other than the heat radiation in which no heat radiation is mixed is subtracted from the spectral radiation output in which the radiation 4 other than the thermal radiation superimposed on the thermal radiation 3 radiated from the measured portion is superimposed. Alternatively, by multiplying by an appropriate constant and subtracting the result, a spectral radiation output ratio of two wavelengths due to the net heat radiation radiated from the measurement site is obtained.

(A) When no radiation other than heat radiation is detected from the detection means B7 at the two-wavelength output of 835.4 nm and 945.0 nm measured in this case: In this case, radiation 4 other than heat radiation superimposed is used. Therefore, it is considered that the output of the two wavelengths is not detected. This is because, in the case of a discharge lamp, the radius of the surrounding sheath-shaped discharge arc 10 is sufficiently large compared to the distance between the measurement site 1 and the reference site 2, and light emission occurs at about the distance between the measurement site 1 and the reference site 2. This is because the distribution gradient of the particle density can be ignored. Therefore, by confirming that there is no output component of the two measured wavelengths in the spectral radiation output of the reference part 2, the detection means A6 detects the output component.
The outputs at the two measurement wavelengths of 35.4 nm and 945.0 nm are confirmed to be only three components of the heat radiation radiated from the measurement site. Λ ₁ = 8, two wavelengths measured from this
35.4 nm, λ ₂ = 945.0 nm and λ ₁ , λ ₂
The respective spectral radiation outputs are input to the calculating means 8 and the measurement 2
The wavelength radiation output ratio R is obtained, and further, the arithmetic processing is performed by the equation (1) to obtain the true temperature.

(B) From the detecting means B7, the measured two-wavelength outputs of 835.4 nm and 945.0 nm are output. On the other hand, the measured two-wavelength outputs are other than heat radiation in which heat radiation is not mixed. When radiation 5 is detected: In this case, it is considered that the output of the two wavelengths is detected from the radiation 4 other than the superimposed thermal radiation. Therefore, it is necessary to clarify the amount of radiation other than the superimposed thermal radiation out of the spectral radiation output detected by the detection means A6, and to subtract the radiation for the subsequent calculation.

FIG. 2 shows a concept for subtracting radiation other than heat radiation. The radiation 4 other than the superimposed heat radiation detected by the detection means A6 is an integral amount of arc radiation from the electrode in the measurement direction. The spectral radiation output detected by the detecting means B7 is an integral amount of radiation of all arcs in the measurement direction. Generally, the density distribution of the luminescent particles existing in the cross-sectional direction is distributed on a concentric circle centered on the electrode, and
Since the distance between the detection part A and the reference part 2 is sufficiently short with respect to the radius of the discharge arc 10, by subtracting の of the spectral radiation output detected by the detecting means B7 from the spectral radiation output detected by the detecting means A6, The net heat radiation radiated from the measurement site is separated, and thus the two-wavelength spectral radiation output ratio due to the net heat radiation radiated from the measurement site is obtained. In the same manner as in the case where there is no radiation 5, the true temperature can be obtained by the arithmetic processing based on the two-color radiation temperature measurement method.

In the first embodiment, two detecting means are used. However, as shown in FIG. 3, by combining a detecting means A6 with a driving means A (not shown), one detecting means of the present embodiment is used. The effect can be obtained.

(Embodiment 2) FIG. 4 is a diagram showing an example of a device configuration using a multi-wavelength detecting means as a detecting means. In the present embodiment, unlike the first embodiment, a multi-channel spectrometer is used instead of the detection means A6 and the detection means B7.
One multi-wavelength detecting means C of this multi-channel spectrometer
13 detects a spectral radiation output in which the radiation 4 other than the thermal radiation 3 superimposed on the thermal radiation 3 radiated from the part to be measured is synthesized, and the multi-wavelength detecting means D14 detects the thermal radiation which is not mixed with the thermal radiation. The spectral radiation output of the other radiation 5 is detected.

The multi-wavelength detecting means C13 and the multi-wavelength detecting means D14 include a measuring optical system, an aperture, a spectroscope,
It is constituted by a photodiode array, and a plurality of monochromatic radiations separated into each wavelength component are simultaneously detected in a required wavelength region by an array-like detector.

In this embodiment, since a multi-channel spectroscope is used, two wavelengths to be used in the subsequent calculation must be selected. Therefore, these multi-wavelength detecting means C13,
The spectral radiation output of D14 is input to the wavelength selecting means 12, and two wavelengths suitable for the calculation are selected. The criteria for selecting two wavelengths are:
As described in the operation of the third aspect, the two wavelengths are suitable for calculating the temperature value. Specifically, in the case of a high-pressure mercury lamp, two wavelengths of 655.0 nm and 750.0 nm are appropriate.

After selecting appropriate two wavelengths, for example, 655.0 nm and 750.0 nm, the spectral radiation output of each part corresponding to the two wavelengths is input to the calculating means 8. next,
As in the case of the first embodiment, first, the radiation 4 other than the thermal radiation superimposed on the thermal radiation 3 radiated from the measurement site is combined with the spectral radiation output and the radiation other than the heat radiation in which the heat radiation is not mixed. 5 with the spectral emission output. Subsequently, based on this comparison, the necessary true or correct temperature is obtained through necessary judgment or correction.

(Embodiment 3) FIG. 5 is a diagram showing an example in which a plurality of reference portions are set, and an apparatus configuration capable of selecting the most appropriate portion from the plurality of reference portions. In the present embodiment, unlike the second embodiment, one multi-wavelength detecting means C13 is used, and a driving means B15 for driving the multi-wavelength detecting means C13 so as to be connected to a portion to be measured for each output detection, and a reference portion are selected. Reference site selection means 16 is provided.

The reference part selecting means 16 provides a suitable
This is a device for selecting a wavelength. As described in the section of the operation of the fourth invention, two wavelengths suitable for calculating the temperature value are selected. In the case of a high-pressure mercury lamp, for example, 655.0
nm, 750.0 nm.

Then, after the spectral radiation outputs of all the parts are obtained, the reference part selecting means 16 selects an appropriate part as the reference part. After determining the reference portion, two wavelengths to be used for the calculation are selected, and then the calculation is performed in the same manner as in the second embodiment to obtain the true temperature. (Embodiment 4) FIG. 6 is a diagram showing an example of a device configuration capable of simultaneously detecting three or more sites including the site 1 to be measured. In this embodiment, a multi-site / multi-wavelength simultaneous detection unit 17 is provided. The multi-site multi-wavelength simultaneous detecting means 17 prepares, for example, multi-channel spectrometers by the number of measurement sites and performs time-synchronous measurement. The flow from the detection of the spectral radiation output of each part until the true temperature is obtained is the same as in the third embodiment.

The multi-site / multi-wavelength simultaneous detecting means 17 does not necessarily have to be provided by the number of measurement sites.

[0037]

As described above, according to the present invention, the heat radiation radiated from the measured portion is mixed with the heat radiation radiated from the reference portion for each temperature measurement. By subtracting an estimate from radiation other than heat radiation that has not been obtained, the net heat radiation is separated, and a two-wavelength spectral radiation output ratio due to the net heat radiation can be obtained. Calculation based on the two-color radiation temperature measurement method True temperature can be obtained by processing.

Further, by using a multi-channel spectroscope as the detecting means and combining the wavelength selecting means, two wavelengths corresponding to the spectral radiation characteristics of the radiation other than the superposed heat radiation can be selected for each measurement. It is possible to reduce the influence of the radiation other than the superimposed heat radiation on the temperature value deviation as compared with the method of always measuring at two fixed wavelengths as in the two-color radiation temperature measurement device described above. .

If a plurality of reference parts are set and a part selection means capable of selecting the most appropriate part from the reference parts is combined, it is necessary to always fix the positional relationship between the part to be measured and the reference part. In addition, the position to be measured and the reference region can correspond to the measurement target in any positional relationship.

Further, if the multi-site multi-wavelength simultaneous detection means is combined, if the radiation from the measured part and the reference part fluctuates with time and the fluctuation is considered to have a large influence on the temperature value, the measured The selected two wavelengths of the spectral radiant output from the site and the reference site can be measured, and as a result, time-varying factors can be eliminated.

Further, when the electrode temperature largely reflects the information of the inside of the arc tube and the high-intensity radiation source (discharge arc) as in a discharge lamp or the like, it is necessary to measure the electrode temperature with high accuracy. It can be said that it is very effective for analyzing lamp life characteristics of electric lamps and physical and chemical characteristics of discharge arcs.

[Brief description of the drawings]

FIG. 1 is a configuration diagram of a radiation temperature measuring device according to a first embodiment of the present invention.

FIG. 2 is a schematic diagram for explaining a method of correcting a spectral radiation output according to the first embodiment of the present invention.

FIG. 3 is a configuration diagram of a radiation temperature measuring device according to a first embodiment of the present invention, which is different from FIG.

FIG. 4 is a configuration diagram of a radiation temperature measuring device according to a second embodiment of the present invention.

FIG. 5 is a configuration diagram of a radiation temperature measuring device according to a third embodiment of the present invention.

FIG. 6 is a configuration diagram of a radiation temperature measuring device according to a fourth embodiment of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Measurement part 2 Reference part 3 Heat radiation radiated from a measurement part 4 Radiation other than superimposed heat radiation 5 Radiation other than heat radiation in which heat radiation does not mix 6 Detecting means A 7 Detecting means B 8 Arithmetic means 9 Electrode 10 Discharge arc 11 Driving means A 12 Wavelength selecting means 13 Multi-wavelength detecting means C 14 Multi-wavelength detecting means D 15 Driving means B 16 Reference site selecting means 17 Multi-site multi-wavelength simultaneous detecting means

────────────────────────────────────────────────── ─── Continuation of the front page (56) References JP-A-4-116433 (JP, A) JP-A-5-142051 (JP, A) JP-A-5-142052 (JP, A) JP-A-3- 287030 (JP, A) JP-A-3-287703 (JP, A) (58) Fields investigated (Int. Cl. ⁷ , DB name) G01J 5/00-5/62 G01J 1/00-1/46 G01N 21/00-21/61

Claims (6)

(57) [Claims] 1. A radiation temperature for measuring an electrode temperature of a discharge lamp.
A measuring device, a first multi-wavelength detection means for detecting the spectral radiation output of the multi-wavelength emitted from the measuring site, said multi-wavelength spectral radiation output emitted from different reference site and measurement site a second multiple wavelength detection means for detecting the
Inputting the spectral radiation output detected by the second multi-wavelength detecting means
However, in this spectral radiation output,
Wavelength, or two wavelengths whose output is negligible, or
Is one of two wavelengths for which constants can be easily set for correction
And a two-wavelength selecting means for selecting
The correction content according to the content of the two wavelengths selected
Based on the correction content,
Correction of the spectral radiation output of the measurement site using force.
And a calculating means for calculating a temperature value. 2. A radiation temperature for measuring an electrode temperature of a discharge lamp.
A measuring device, using a multiple wavelength detector for detecting a multi-wavelength spectral radiation output emitted from the measurement site, and drive means for moving the detecting means, the calculation from the detected site Based on a reference region selecting means for selecting a reference region different from the measured region, and a spectral radiation output radiated from the reference region ,
Two wavelengths where there is no output, or if there is not enough output
Set two wavelengths that can be viewed, or set constants when performing correction
A two-wavelength selecting means for selecting any one of the two wavelengths
According to the contents of the two wavelengths selected by the two wavelength selecting means.
The correction content, and based on the correction content,
Spectral emission of the measured part using the spectral emission output of the illumination part
A radiation temperature measuring device comprising: a calculating means for correcting a radiation output and calculating a temperature value. 3. The two wavelengths selected by the two wavelength selecting means.
Is the two wavelengths whose output does not exist,
It is characterized in that the spectral radiation output of the fixed site is not corrected
The radiation temperature measuring device according to claim 1 . 4. A radiation temperature for measuring an electrode temperature of a discharge lamp.
A measuring method, a step of detecting a multi- wavelength spectral radiant output radiated from the measured site, and a step of detecting a multi- wavelength spectral radiant output radiated from a reference portion different from the measured portion, Based on the spectral radiation output radiated from the reference part , the
Two wavelengths where there is no force, or its output is negligible
Easy to set up two wavelengths or constants for correction
Selecting one of the two wavelengths;
The correction content is determined according to the content of the two wavelengths, and the
Using the spectral radiation output of the reference site based on the volume
A method for measuring a radiation temperature, comprising: correcting a spectral radiation output of a measurement site to calculate a temperature value. 5. A radiation temperature for measuring an electrode temperature of a discharge lamp.
A measurement method, a step of detecting a multi- wavelength spectral radiation output radiated from the measured part, and selecting a reference part different from the measured part used for calculation from the detected part, Based on the spectral radiation output radiated from the reference part , the
Two wavelengths where there is no force, or its output is negligible
Easy to set up two wavelengths or constants for correction
Selecting one of the two wavelengths;
The correction content is determined according to the content of the two wavelengths, and the
Using the spectral radiation output of the reference site based on the volume
A method for measuring a radiation temperature, comprising: correcting a spectral radiation output of a measurement site to calculate a temperature value. 6. The two selected wavelengths, for which the output does not exist.
If there are two wavelengths, the spectral radiation output of the
6. The method according to claim 4, wherein no correction is performed.
Radiation temperature measuring method of the mounting.