JP3231502U - Sealing disc - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a sealing disk in which vacuum sealing property is improved and a life is extended by a correction motion and an adjustment motion generated when sealing surfaces made of a metal material come into contact with each other. SOLUTION: This is a vacuum sealing sealing disk 10 capable of opening or sealing the valve port of an all-metal valve by reciprocating to an open position or a closed position, and is integrally connected. A pedestal 20 and a seal plate 30 are provided. When the first sealing surface 32 is formed on the sealing plate 30 of the sealing disk 10 and the sealing disk 10 is in the closed position, the first sealing surface 32 is directly connected to the valve port of the all-metal vacuum valve. Contact. [Selection diagram] Fig. 3

Description

The present invention relates to a sealing disc, and more particularly to a sealing disc for vacuum sealing.

In a conventional vacuum valve, an elastic rubber material called an O-ring is generally used as a sealing element between the valve plate and the valve body. Since the O-ring achieves a sealing effect by being deformed by pressing, it can be applied only to a valve body whose sealing property is not very high. Therefore, such a sealing element cannot be applied to a high vacuum system and cannot be applied to a high temperature environment.

Also, some high vacuum systems employ all-metal valves instead of rubber sealing elements. However, this is to form a sealing surface by abutting the two metal layers against each other, but the closing force applied must increase as the number of times the valve is opened and closed increases, thus shortening the life. Further, when the metal layer changes in size due to heating or cooling, the two metal layers may move relative to each other to cause shear deformation, and the sealing surface may be destroyed.

In view of the above, a main object of the present invention is to provide a ceiling disk that can be applied to an ultra-high vacuum system.

The sealing disc according to the present invention is a sealing disc capable of reciprocating to an open position or a closed position to open or seal the valve opening of the vacuum valve, and is a pedestal having a first surface and a pedestal. When the sealing disk is in the closed position, the sealing plate is deformed by receiving the closing force from the inside of the vacuum valve and the atmospheric pressure from the outside of the vacuum valve at the same time. The first sealing surface rotates due to the closing force and atmospheric pressure, abuts on the second sealing surface at the valve opening of the vacuum valve, and holds a state in which the valve opening is sealed in an ultra-high vacuum, and the sealing plate. The first sealing surface of the valve body and the second sealing surface at the valve opening of the valve body include at least a sealing plate made of a metal material, and the sealing plate has a first connecting portion in ring contact with the pedestal. A first wing plate extending in a direction away from the first connecting portion at a first angle with respect to the annular surface of the first connecting portion, and a second connecting portion are in contact with the first wing plate, and the first wing plate is formed. By extending the wing plate of 1 in a direction away from the first surface of the pedestal at the second forming angle, a third forming angle with the annular surface of the first connecting portion is formed, and the edge thereof is formed. A first sealing surface is located on the surface of the seal plate, and the first sealing surface of the sealing plate includes a second wing plate which is an arcuate surface or a spherical surface.

In the sealing disc according to the present invention, the sealing plate is a bent plate, a corrugated plate or an arc-shaped plate, the angle of the first formed angle is in the range of 5 degrees to 45 degrees, and the angle of the third formed angle. Is in the range of 5 degrees to 45 degrees, and the total of the angle of the first formed angle, the angle of the second formed angle, and the angle of the third formed angle is 180 degrees in total. ..

In the sealing disc according to the present invention, the closing force is applied directly to the pedestal and indirectly applied to the sealing plate via the pedestal, or the closing force is applied to the second wing plate and the first wing plate. It is characterized in that it is directly added to the second connecting portion and the pedestal at the same time.

In the sealing disc according to the present invention, the pedestal has a second surface facing the first surface, and a positioning member is provided on the second surface, and the sealing disc is assembled into a vacuum valve by the positioning member. It is characterized by positioning the position of the sealing disc with respect to the valve opening during the attachment process.

In the sealing disc according to the present invention, the first sealing surface of the sealing plate is a surface that has been polished, and the sealing plate is ring-contacted with the pedestal so as to be integrated with the pedestal, or is attached to the pedestal. It is characterized in that it is detachably ringed.

The sealing disk according to the present invention is characterized in that the vacuum valve is a high frequency mask gate valve made of all metal.

The sealing disc according to the present invention is a sealing disc capable of reciprocating to an open position or a closed position to open or seal the valve opening of the valve body, and the outer edge thereof has a first sealing surface. However, when in the closed position, only the first sealing surface abuts on the second sealing surface at the valve opening of the valve body, and the first sealing surface of the sealing plate rotates when a force is applied. The first sealing surface of the sealing plate and the second sealing surface at the valve opening of the valve body shall be made of a metal material while maintaining the state of being in contact with the second sealing surface to seal the valve port. It is characterized by.

In the sealing disc according to the present invention, the seal plate has a pedestal ring-contacted with the first connecting portion, and the sealing plate has a pedestal ring-contacted with respect to the annular surface of the first connecting portion at a first angle formed from the first connecting portion. The first wing plate extending in the direction away from the first wing plate and the second connecting point are entwined with the first wing plate, and the first surface of the pedestal is formed by a second angle with respect to the first wing plate. It is provided with a second wing plate, which forms a third angle with the annular surface of the first connecting portion by extending in a direction away from the first connecting portion, and a first sealing surface is located at the edge thereof. It is a feature.

In the sealing disc according to the present invention, the sealing plate is made of a metal material, the valve body is a metal vacuum valve, and the first sealing surface of the sealing plate rotates when a force is applied to the second sealing surface. It is characterized in that it abuts on the valve and seals the valve port to maintain a vacuum state.

In the sealing disc according to the present invention, the pedestal is connected to the carrier, the force includes the closing force and the atmospheric pressure, and the closing force is the second from the inside of the valve body via the carrier. A second joint and / or pedestal connecting the wing plate and the first wing plate is applied, and atmospheric pressure is applied to the seal plate from the outside of the valve body.

The sealing disc according to the present invention includes a closing force and an atmospheric pressure, and the closing force is applied directly to the pedestal from the inside of the valve body, and indirectly to the seal plate via the pedestal. In addition, atmospheric pressure is applied to the seal plate from the outside of the valve body.

The sealing disc according to the present invention is characterized in that the valve body is an ultra-high vacuum valve made of all metal.

In the sealing disc according to the present invention, the angle of the first formed angle is in the range of 5 degrees to 45 degrees, the angle of the third formed angle is in the range of 5 degrees to 45 degrees, and the first formed angle is in the range of 5 degrees to 45 degrees. The sum of the angle of the angle, the angle of the second formed angle, and the angle of the third formed angle is 180 degrees in total.

The sealing disc according to the present invention is characterized in that the first sealing surface of the sealing plate is deformed and rotated by a force, comes into contact with the second sealing surface, and maintains a state in which the valve opening is sealed. And.

The sealing disc according to the present invention is characterized in that the first sealing surface of the sealing plate is a polished arcuate surface or spherical surface.

In the sealing disc according to the present invention, the pedestal has a second surface facing the first surface, and a positioning member is provided on the second surface, and the sealing disc is assembled into a vacuum valve by the positioning member. It is characterized in that the position of the sealing disc with respect to the valve opening is positioned during the attaching process.

The sealing disc according to the present invention has the following effects.
(1) The effect of vacuum sealing can be achieved by directly contacting the first sealing surface of the sealing plate with the valve port of the vacuum valve, and further, the effect of ultra-high vacuum sealing can be achieved. It can be done, and there is no need to use packing or gasket separately.

(2) Since leakage does not occur in an ultra-high vacuum environment, it can be applied to a valve body (for example, an all-metal high-frequency mask gate valve) whose specifications are strictly required.

(3) Even in an ultra-high vacuum environment, a closing force from the inside of the vacuum valve and an atmospheric pressure from the outside of the vacuum valve are applied to the sealing disk at the same time, so that high vacuum sealing performance can be maintained. ..

(4) Lubrication when the first sealing surface of the sealing plate rotates with respect to the second sealing surface and is in continuous contact with the second sealing surface so that the sealing surfaces made of a metal material come into contact with each other. The effect is increased and corrective and regulatory movements occur, resulting in increased sealing and longer life.

It is a perspective view which looked at the sealing disk which concerns on embodiment of this invention from above. It is a perspective view which looked at the sealing disk which concerns on embodiment of this invention from below. It is sectional drawing which shows the sealing disk which concerns on embodiment of this invention. It is sectional drawing which shows the state which the sealing disk which concerns on embodiment of this invention is in an open position. It is sectional drawing which shows the state which the sealing disk which concerns on embodiment of this invention is in a closed position.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. The proportions and layout of each member in the drawings of the embodiments of the present invention are shown for easy understanding of the description and are not the actual proportions and layout. Further, for convenience of understanding, the same parts will be described with the same reference numerals in the following embodiments.

The sealing disk according to the present invention can open or seal the valve opening of the vacuum valve by reciprocating and reciprocating the open position or the closed position of the vacuum valve.
The vacuum valve to which the present invention is applicable is an all-metal valve (All-Metal Valve), and will be described by taking, for example, an all-metal high-frequency mask gate valve as an example. The all-metal high-frequency mask gate valve can achieve a degree of vacuum in the ultra-high vacuum class, which can explain the high sealing performance and structural strength of the sealing disk according to the present invention. However, the vacuum valve to which the present invention can be applied is not limited to a gate valve, and can be applied to, for example, an angle valve, a pendulum valve, various valves, and the like. The above vacuum valve is, for example, a metal valve, that is, a valve using a metal material, and is preferably an all-metal valve. It is preferable to use a metal material for the valve port. The sealing disc according to the present invention is not limited to a metal valve because it can be applied to a valve body using various materials depending on the actual use. The sealing disc according to the present invention is, for example, a one-sided seal type or a two-sided seal type. A one-sided seal type ceiling disc will be described as an example. The one-sided seal type sealing disc includes a seal plate and a pedestal that are integrally connected. The sealing disc according to the present invention is composed of a sealing plate when it is a double-sided sealing type.

Specifically, as shown in FIGS. 1 to 5, in the embodiment of the present invention, a one-sided seal type ceiling disc will be described as an example. The sealing disc 10 according to the present invention can be applied to open or seal the valve port 102 of the vacuum valve 100. The vacuum valve 100 is, for example, an all-metal high-frequency mask gate valve, but is not limited thereto.
The sealing disc 10 according to the present invention includes a pedestal 20 and a sealing plate 30 that are integrally connected to each other. The material of the pedestal 20 and the seal plate 30 is, for example, a metal material such as stainless steel or spring steel, but the material is not limited thereto. The first surface 22 on the first side of the pedestal 20 of the sealing disk 10 is for connecting with the carrier 110. The carrier 110 is, for example, a driving element (not shown) that is connected to the vacuum valve 100, and by moving the sealing disk 10 back and forth to an open position or a closed position, the valve port 102 of the vacuum valve 100 is opened or the valve port 102 is opened. Seal. However, the present invention is not limited to this. In the present invention, for example, the carrier 110 may be omitted. That is, the sealing disk 10 may selectively be directly connected to the driving element of the vacuum valve 100. On the other hand, the carrier 110 may be, for example, a part of a driving element of the vacuum valve 100.
The pedestal 20 is, for example, a cylinder, but is not limited thereto. The carrier 110 is, for example, a connecting member that connects with a sealing disc 10 such as a carrier plate, a shaft, and a connecting rod, but is not limited thereto. Since the carrier 110 is connected to the first surface 22 of the pedestal 20 of the sealing disk 10 by connection with screws, for example, the first surface 22 of the pedestal 20 has, for example, one or a plurality of screw holes 21. However, it is not limited to this. The depth of the screw hole 21 is preferably such that it does not penetrate the pedestal 20. Further, the surface of the carrier 110 is provided with, for example, screw holes (not shown) having a corresponding quantity. Taking the carrier 110 as a carrier plate as an example, the carrier 110 preferably has a storage space 114 for accommodating the first side of the pedestal 20. The surface of the accommodation space 114 of the carrier 110 is preferably in contact with the first surface 22 of the pedestal 20.

On the other hand, the second side of the pedestal 20 of the sealing disk 10 has a second surface 24 facing the first surface 22. A positioning member 26 is selectively provided on the second surface 24 of the pedestal 20. The positioning member 26 is, for example, a positioning groove, but is not limited thereto.
When the positioning member 26 is provided on the second surface 24 of the pedestal 20 of the sealing disk 10, for example, a tool such as a jig is attached to the positioning member 26 during the process of assembling the sealing disk 10 to the vacuum valve 100. By inserting the sealing disk 10, the position of the vacuum valve 100 of the sealing disk 10 with respect to the valve port 102 can be positioned. As an example, the central axis of the positioning member 26 is preferably the same as the central axis of the pedestal 20 and the sealing disk 10. When the valve port 102 of the vacuum valve 100 is sealed by the sealing disk 10, the central axis of the sealing disk 10 is coaxial with, for example, the central axis of the valve port 102.

In the embodiment of the present invention, the seal plate 30 of the sealing disc 10 is integrally entwined with the side side of the first side or the second side of the pedestal 20. It is preferable that the seal plate 30 is integrally ring-contacted with the side side of the pedestal 20 on the second side.
The seal plate 30 has a first seal surface 32. The first sealing surface 32 is located at any position of the sealing plate 30. The first sealing surface 32 is preferably located on the outer edge of the sealing plate 30. The valve port 102 has a second sealing surface 104. The second sealing surface 104 is preferably located inside the valve port 102. The cross-sectional form of the seal plate 30 of the sealing disc 10 is, for example, a curved plate, corrugated plate or arcuate plate, which can increase the strength and rigidity of the structure, i.e., increase the toughness of the structure. it can. Thereby, the sealing disc 10 can obtain a toughness structure having both strength and rigidity, but the present invention is not limited to this. The cross-sectional form of the seal plate 30 is, for example, a flat plate.
When the sealing disc 10 according to the present invention is applied to vacuum sealing, the sealing disc 10 according to the present invention can receive a closing force F applied to the sealing disc 10 from the inside of the vacuum valve 100. It is also possible to receive the atmospheric pressure applied to the sealing disk 10 from the outside of the vacuum valve 100 when the vacuum valve 100 is in a vacuum state. The higher the degree of vacuum of the vacuum valve 100, the higher the closing force F and the atmospheric pressure. As an example, when the sealing disc 10 is made of stainless steel having a thickness of about 1.8 mm, the closing force F that can be received is about 500 kg, and when a vacuum is created, the degree of vacuum is about 7.33 × ^10-11 torr. Can be reached.
Since the present invention is applicable to the all-metal high-frequency mask gate valve attached to the electron beam channel of the superconducting accelerator, each function and index of the sealing disk 10 according to the present invention (for example, sealability, cleanliness and structural strength). Can reliably meet the requirements of ultra-high vacuum valve specifications.

The sealing plate 30 of the sealing disc 10 according to the present invention includes, for example, a first wing plate 34 and a second wing plate 36 that are integrally connected to each other. The first wing plate 34 and / or the second wing plate 36 is, for example, a flat plate, a curved plate, or a bent plate, but is not limited thereto. Taking a flat plate as an example, the inclination direction of the first wing plate 34 is different from that of the second wing plate 36.
The first wing plate 34 is in contact with the pedestal 20 at the first connecting point 35, and is separated from the first connecting point 35 at the first formed angle A1 with respect to the annular surface of the first connecting point 35. Extend to. The second wing plate 36 is in circular contact with the first wing plate 34 at the second connecting point 37, and the first surface 22 of the pedestal 20 at the second formed angle A2 with respect to the first wing plate 34. It extends away from. As a result, the second wing plate 36 and the annular surface of the first connecting portion 35 form a third formed angle A3. The first sealing surface 32 is located at the edge of the second wing plate 36.

When the carrier 110 is connected to the first surface 22 of the pedestal 20 of the sealing disk 10 and the closing force F is applied to the carrier 110, the closing force is applied to the first surface of the pedestal 20 via, for example, the carrier 110. In addition to 22 and / or the seal plate 30, the sealing disc 10 is in the closed position and the first seal surface 32 of the seal plate 30 abuts on the second seal surface 104 at the valve opening 102 of the vacuum valve 100. .. The first sealing surface 32 is in line contact with, for example, the second sealing surface 104.
The surface form of the first sealing surface 32 is, for example, an arcuate surface or a spherical surface, but is not limited thereto. The second sealing surface 104 is, for example, a slope, an arcuate surface, or a spherical surface, but is not limited thereto. When the sealing disk 10 moves from the open position to the closed position, the first sealing surface 32 comes into contact with the second sealing surface 104, and the sealing disk 10 is slightly elastic due to the closing force F applied from the inside of the vacuum valve 100. Even if it is deformed to, the first sealing surface 32 rotates (in the direction toward the valve opening 102 or away from the valve opening 102) and comes into contact with the second sealing surface 104.

On the other hand, when the vacuum valve is in the closed position, when the degree of vacuum of the vacuum valve becomes higher and higher due to air bleeding, the sealing disk 10 is pressed to the outside of the vacuum valve by the closing force F applied from the inside of the vacuum valve 100, and the outside of the vacuum valve The sealing disk 10 is pressed into the inside of the vacuum valve by the atmospheric pressure applied from the vacuum valve.
Even if the sealing plate 30 is slightly elastically deformed, the first sealing surface 32 rotates due to the applied closing force F and atmospheric pressure and comes into contact with the second sealing surface 104. In other words, the first sealing surface 32 of the sealing plate 30 is an arcuate surface or a spherical surface when directly contacting the second sealing surface 104 at the valve port 102 of the vacuum valve 100. Rotation of the 32 with respect to the second sealing surface 104 is allowed so that the first sealing surface 32 is in continuous contact with the second sealing surface 104. Therefore, the vacuum sealing property can be well maintained, and the sealing property can be improved by the correction motion and the adjustment motion generated when the sealing surfaces made of metal materials come into contact with each other. The life can be extended, and wear due to collision between metals can be avoided.

The angle of the first formed angle A1 is, for example, in the range of 5 degrees to 45 degrees, preferably in the range of 10 degrees to 25 degrees, and more preferably 15 degrees. The angle of the third formed angle A3 is, for example, in the range of 5 degrees to 45 degrees, preferably in the range of 10 degrees to 25 degrees, and more preferably 15 degrees. The total of the angle of the first formed angle A1, the angle of the second formed angle A2, and the angle of the third formed angle A3 is 180 degrees in total. Therefore, when the sealing disk 10 according to the present invention is applied to vacuum sealing, the sealing plate 30 according to the present invention is not only a closing force F applied to the carrier 110 from the inside of the vacuum valve 100, but also a vacuum. After the valve 100 is evacuated, it also receives the atmospheric pressure applied to the outside of the vacuum valve 100, so that the vacuum-sealed state can be well maintained.
On the other hand, taking the seal plate 30 in the form of a bent plate as an example, the seal plate 30 of the sealing disk 10 according to the present invention is integrally connected to the first wing plate 34 and the second wing plate 36. The seal plate 30 may further include, for example, another first wing plate that is in contact with the second wing plate 36, and, for example, the other first wing plate. A second wing plate 36 may be further provided which is connected to the wing plate of the above.

When the carrier 110 is connected to the sealing disk 10, the carrier 110 is preferably connected to the pedestal 20 and abuts to the seal plate 30, and the second wing plate 36 and the first wing plate 34 are connected to each other. It is preferable that the second connecting portion 37 and the pedestal 20 are in contact with each other at the same time. As a result, when the closing force F is applied to the carrier 110, the closing force F is applied directly to the seal plate 30 and the pedestal 20 at the same time via the carrier 110. As a result, the sealing disc 10 is in the closed position, and the first sealing surface 32 directly contacts the second sealing surface 104 of the valve port 102 of the vacuum valve 100.
On the other hand, when the carrier 110 does not abut on the seal plate 30, the closing force F is indirectly applied to the seal plate 30 via, for example, the pedestal 20. The thickness of the first wing plate 34 is, for example, the same as, but not limited to, the thickness of the second wing plate 36. The projected length of the first wing plate 34 is, for example, the same as, but not limited to, the projected length of the second wing plate 36. The projected length of the first wing plate 34 is approximately 0.8 to 1.5 times the projected length of the second wing plate 36, but is not limited thereto. The projected length of the pedestal 20 is approximately 2 to 5 times the projected length of the first wing plate 34, but is not limited to this. The above figures are merely examples, and the present invention is not limited thereto.

The first sealing surface 32 of the sealing plate 30 of the sealing disc 10 according to the present invention selectively performs a machining process such as a polishing process. It is preferable to employ a dry polishing technique, for example, a dry blasting technique or a fluid-jet polishing technique. This is to reduce the surface roughness and increase the lubricity by injecting abrasive particles, and the surface roughness (Ra) thereof is preferably about 0.3 μm or less, preferably about 0. It is more preferably 1 μm or less. The present invention is not limited to the type of polishing technique and the material of the abrasive particles, and the first sealing surface may have surface roughness and lubricity capable of vacuum-sealing the valve opening.

In another embodiment of the present invention, the sealing disc is, for example, a double-sided seal type. Compared with the one-sided seal type sealing disk according to the above embodiment, the difference from the above-described embodiment of the present embodiment is that both sides of the double-sided seal type seal plate have a first seal surface and a third seal. Each has a surface (not shown), the first sealing surface is for sealing the valve port of the vacuum valve, and the third sealing surface is the fourth sealing surface of the pedestal (not shown). ) Is to be in contact with. That is, the double-sided seal type seal plate according to the present embodiment is not integrally connected to the pedestal. The material and form of the third sealing surface are, for example, the same as those of the first sealing surface.

The sealing disc according to the present invention has the following effects.
(1) The effect of vacuum sealing can be achieved by directly contacting the first sealing surface of the sealing plate with the valve port of the vacuum valve, and further, the effect of ultra-high vacuum sealing can be achieved. It can be done, and there is no need to use packing or gasket separately.

(2) Since leakage does not occur in an ultra-high vacuum environment, it can be applied to a valve body (for example, an all-metal high-frequency mask gate valve) whose specifications are strictly required.

(3) Even in an ultra-high vacuum environment, a closing force from the inside of the vacuum valve and an atmospheric pressure from the outside of the vacuum valve are applied to the sealing disk at the same time, so that high vacuum sealing performance can be maintained. ..

(4) Lubrication when the first sealing surface of the sealing plate rotates with respect to the second sealing surface and is in continuous contact with the second sealing surface so that the sealing surfaces made of a metal material come into contact with each other. The effect is increased and corrective and regulatory movements occur, resulting in increased sealing and longer life.

Although the above description has been made with reference to specific examples of the present invention, these examples are for illustration purposes only and are not intended to limit the present invention to those who have ordinary knowledge in this field. , It can be seen that the embodiments disclosed herein may be modified, added, or deleted without departing from the gist of the present invention and the scope of claims for utility model registration.

The present invention provides a ceiling disc that can be applied to an ultra-high vacuum system.

10 Sealing disk 20 Pedestal 21 Screw hole 22 First surface 24 Second surface 26 Positioning member 30 Seal plate 32 First seal surface 34 First wing plate 35 First connection point 36 Second wing plate 37 No. 2 connecting points 100 Vacuum valve 102 Valve port 104 Second sealing surface 110 Carrier 114 Containment space A1 First formed angle A2 Second formed angle A3 Third formed angle F Closing force

Claims (10)

In a sealing disc that can be moved back and forth to an open or closed position to open or seal the valve opening of the valve body.
When the outer edge has a first sealing surface and is in the closed position, only the first sealing surface abuts on the second sealing surface at the valve opening of the valve body, and the sealing plate is said to have a first sealing surface. The first sealing surface rotates when it receives a force, abuts on the second sealing surface, and holds a state in which the valve opening is sealed, and the first sealing surface of the sealing plate and the valve. The second sealing surface at the valve port of the body is made of a metal material.
Sealing disc. The seal plate has a pedestal ring-contacted with the first connecting portion, and extends in a direction away from the first connecting portion at a first formed angle with respect to the annular surface of the first connecting portion. The wing plate 1 and the second connecting portion are in contact with the first wing plate, and are separated from the first surface of the pedestal at a second formed angle with respect to the first wing plate. By extending in the direction, a second wing plate is provided, which forms a third angle formed by the annular surface of the first connecting portion with the annular surface, and the first sealing surface is located at the end edge thereof. The sealing disc according to claim 1, wherein the sealing disc is characterized by. The seal plate is made of a metal material, the valve body is a vacuum valve made of metal, and the first seal surface of the seal plate rotates when it receives the force and comes into contact with the second seal surface. The sealing disk according to claim 2, wherein the valve port is sealed to maintain a vacuum state. The pedestal is connected to a carrier, and the force includes a closing force and an atmospheric pressure, and the closing force is applied from the inside of the valve body via the carrier to the second wing plate. And / or the pedestal to which the first wing plate is connected to the first wing plate, and the atmospheric pressure is applied to the seal plate from the outside of the valve body. The sealing disc according to claim 3. The closing force includes a closing force and an atmospheric pressure, and the closing force is directly applied to the pedestal from the inside of the valve body and indirectly applied to the seal plate via the pedestal. The sealing disc according to claim 3, wherein the atmospheric pressure is applied to the sealing plate from the outside of the valve body. The ceiling disc according to claim 3, wherein the valve body is an all-metal ultra-high vacuum valve. The angle of the first formed angle is in the range of 5 degrees to 45 degrees, the angle of the third formed angle is in the range of 5 degrees to 45 degrees, and the angle of the first formed angle, said. The sealing disc according to claim 2, wherein the total of the angle of the second formed angle and the angle of the third formed angle is 180 degrees in total. The first sealing surface of the sealing plate is deformed and rotated by the force to come into contact with the second sealing surface to maintain a state in which the valve port is sealed. The sealing disc according to claim 5. The sealing disc according to claim 5, wherein the first sealing surface of the sealing plate is a surface that has been polished. The pedestal has a second surface facing the first surface, and a positioning member is provided on the second surface, and the process of assembling the sealing disk to the valve body by the positioning member. The sealing disc according to claim 2, wherein the position of the sealing disc with respect to the valve opening is positioned therein.

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