CN214093282U - Sealing dish for vacuum sealing - Google Patents

Sealing dish for vacuum sealing Download PDF

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Publication number
CN214093282U
CN214093282U CN202022375485.6U CN202022375485U CN214093282U CN 214093282 U CN214093282 U CN 214093282U CN 202022375485 U CN202022375485 U CN 202022375485U CN 214093282 U CN214093282 U CN 214093282U
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CN
China
Prior art keywords
sealing
vacuum
plate
valve
base
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CN202022375485.6U
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Chinese (zh)
Inventor
胡晓
赵烨梁
张少辉
寇崇善
王衍圣
王志纮
许俊树
林赐民
蔡铭昇
顾文伟
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Shanghai High Light Tech Co ltd
Shanghai Advanced Research Institute of CAS
Shanghai Institute of Applied Physics of CAS
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Shanghai High Light Tech Co ltd
Shanghai Advanced Research Institute of CAS
Shanghai Institute of Applied Physics of CAS
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Application filed by Shanghai High Light Tech Co ltd, Shanghai Advanced Research Institute of CAS, Shanghai Institute of Applied Physics of CAS filed Critical Shanghai High Light Tech Co ltd
Priority to CN202022375485.6U priority Critical patent/CN214093282U/en
Priority to TW109214276U priority patent/TWM610255U/en
Priority to JP2020005439U priority patent/JP3231502U/en
Application granted granted Critical
Publication of CN214093282U publication Critical patent/CN214093282U/en
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Abstract

A sealing disc for vacuum sealing is suitable for moving to and fro to an opening position or a closing position to open or seal a valve port of an all-metal valve. The sealing plate of the sealing disk is formed with a first sealing surface, and the sealing disk is directly abutted against the valve port of the all-metal vacuum valve by the first sealing surface in the closed position. The utility model discloses by compensation motion and the regulation motion when the sealed face of metal material butt each other, can improve vacuum sealing nature and increase of service life.

Description

Sealing dish for vacuum sealing
Technical Field
The present invention relates to a sealing dish, and more particularly to a sealing dish for vacuum sealing.
Background
Conventional vacuum valves mostly use rubber-like elastic materials commonly known as O-rings as sealing members between the valve plate and the valve body. Because the O-ring achieves the required sealing effect by extrusion deformation, the O-ring is only suitable for valve bodies with low requirements on sealing property. Therefore, such sealing assemblies are not suitable for high vacuum systems and are not suitable for use in high temperature environments.
Some high vacuum systems have employed all-metal valves in place of rubber-based sealing assemblies. However, since the two metal layers abut against each other to form the sealing surface, the applied closing force needs to be increased as the number of times of opening and closing the valve is increased, and the service life is shortened. In addition, the dimensional change of the metal layers caused by heating or cooling can cause relative movement between the two metal layers and cause shear deformation, thereby damaging the sealing surface.
SUMMERY OF THE UTILITY MODEL
Accordingly, the present invention is directed to a sealing disc for vacuum sealing, which is suitable for use in an ultra-high vacuum system to solve the above-mentioned problems in the prior art.
To achieve the above object, the present invention provides a sealing disc for vacuum sealing, which is adapted to be reciprocally moved to an opening position or a closing position to open or seal a valve port of a metal material of a vacuum valve, the sealing disc at least comprising: a base having a first surface; and a sealing plate surrounding the base, wherein the sealing disc in the closed position simultaneously bears a closing force applied from the inside of the vacuum valve and an atmospheric pressure applied from the outside of the vacuum valve, so that a first sealing surface of the sealing plate directly abuts against a second sealing surface in the valve port of the vacuum valve, and the first sealing surface can rotate relative to the second sealing surface along with the applied closing force and the atmospheric pressure simultaneously to keep vacuum sealing the valve port.
Wherein, the sealing plate is a bending plate, a wave plate or an arc plate.
Wherein, this sealing plate contains: a first wing plate, which is connected to the base at a first joint and extends outward in a direction away from the first joint at a first included angle relative to a ring surface of the first joint; and a second wing plate, wherein the second wing plate is connected to the first wing plate at a second joint portion in a looping manner and extends outwards relative to the first wing plate in a direction away from the first surface of the base at a second included angle, so that a third included angle is formed between the second wing plate and the loop surface at the first joint portion, and the first sealing surface is positioned on the end edge of the second wing plate.
Wherein the closing force is directly applied to the second ring joint of the second wing plate and the first wing plate and the base at the same time.
Wherein the closing force is directly applied to the base to be indirectly applied to the sealing plate through the base.
Wherein the first angle is between 5 degrees and 45 degrees, the third angle is between 5 degrees and 45 degrees, and the sum of the first angle, the second angle and the third angle is 180 degrees.
The base has a second surface opposite to the first surface, and the second surface is provided with a positioning member for positioning the sealing disk relative to the valve port of the vacuum valve during the process of assembling the sealing disk on the vacuum valve.
Wherein the first sealing surface of the sealing plate is an arc surface or a spherical surface.
Wherein the first sealing surface of the sealing plate is a surface treated by lubrication and polishing.
Wherein, the sealing plate is made of metal.
Wherein, the vacuum valve is an all-metal valve.
Wherein, the vacuum valve is an all-metal high-frequency shielding gate valve.
Wherein, the sealing plate is integrally connected with the base in a surrounding manner.
Wherein, the sealing plate is detachably connected with the base in a ring mode.
To achieve the above object, the present invention further provides a sealing plate suitable for moving to an opening position or a closing position to open or close a valve port of a valve body, the sealing plate having a first sealing surface at an outer edge thereof, the sealing plate rotatably abutting against a second sealing surface of the valve port of the valve body at the closing position by the first sealing surface, so as to seal the valve port in a vacuum manner, wherein the sealing plate is a bending plate, a corrugated plate or an arc plate.
Wherein, this sealing plate contains: a first wing plate, wherein the first wing plate is connected with a base in a first ring joint in a ring way and extends outwards in a direction away from the first ring joint at a first included angle relative to a ring surface of the first ring joint; and a second wing plate, wherein the second wing plate is connected with the first wing plate in a looping manner at a second looping position and extends outwards relative to the first wing plate in a direction away from a first surface of the base by a second included angle, so that a third included angle is formed between the second wing plate and the ring surface at the first looping position, and the first sealing surface is positioned on the end edge of the second wing plate.
Wherein the base is connected to a supporting member, and a closing force is applied to the second ring-shaped joint of the second wing plate and the first wing plate and/or the base through the supporting member.
Wherein the first angle is between 5 degrees and 45 degrees, the third angle is between 5 degrees and 45 degrees, and the sum of the first angle, the second angle and the third angle is 180 degrees.
Wherein the first sealing surface of the sealing plate is a surface subjected to a lubricating polishing treatment.
Wherein, the sealing plate is made of metal.
Wherein, the valve body is a vacuum valve.
Wherein, the valve body is an all-metal vacuum valve.
To sum up, the utility model discloses a sealed dish for vacuum sealing has following advantage:
(1) the sealing disc can directly abut against the valve port of the vacuum valve through the first sealing surface on the sealing plate, so that the vacuum sealing effect can be achieved, even the ultrahigh vacuum sealing effect can be achieved, and no gasket or gasket is needed to be additionally used.
(2) The sealing disc will not outgas under the ultra-high vacuum environment, so it is suitable for the valve body with high specification requirement, such as the all-metal high-frequency shielding gate valve.
(3) The sealing disk can simultaneously withstand the closing force applied to the sealing disk from the inside of the vacuum valve and the atmospheric pressure applied to the sealing disk from the outside of the vacuum valve even under an ultra-high vacuum environment, and can constantly maintain vacuum sealability.
(4) The first sealing surface of the sealing plate can rotate relative to the second sealing surface and can constantly keep contact, so that the lubricating effect when the sealing surfaces made of metal are mutually abutted can be provided, and the compensation motion and the adjustment motion can also be provided, so that the sealing property can be improved, and the service life can be prolonged.
In order to make the jun have a better understanding and appreciation of the technical features and technical effects of the invention, the preferred embodiments and the accompanying detailed description are considered in the following.
Drawings
Fig. 1 is a top perspective view of a sealing disk according to a preferred embodiment of the present invention.
Fig. 2 is a schematic bottom view of a sealing disk according to a preferred embodiment of the present invention.
FIG. 3 is a cross-sectional view of a sealing disk according to a preferred embodiment of the present invention.
Fig. 4 is a schematic cross-sectional view of the sealing disk in an open position according to the preferred embodiment of the present invention.
Fig. 5 is a cross-sectional view of the sealing disk in the closed position according to the preferred embodiment of the present invention.
Wherein:
10: sealed dish
20: base seat
21: screw hole
22: first surface
24: second surface
26: locating piece
30: sealing plate
32: first sealing surface
34: first wing plate
35: first ring joint
36: second wing plate
37: second ring joint
100: vacuum valve
102: valve port
104: second sealing surface
110: bearing part
114: containing groove
A1: first included angle
A2: second included angle
A3: third included angle
F: closing force
Detailed Description
In order to facilitate understanding of the technical features, contents, advantages and effects achieved by the present invention, the present invention will be described in detail with reference to the accompanying drawings and the embodiments, wherein the drawings are used only for illustration and supplementary description, and not necessarily for actual proportion and precise configuration after the implementation of the present invention, so the scope of the present invention in actual implementation should not be read and limited with reference to the proportion and configuration of the drawings. Moreover, for ease of understanding, like components in the following embodiments are illustrated with like reference numerals.
The sealing disc for vacuum sealing of the present invention is suitable for moving to the opening position or the closing position of the vacuum valve in a reciprocating manner to open or seal the valve port of the vacuum valve. The vacuum Valve of the present invention is an All-Metal Valve (such as an All-Metal high-frequency shielded gate Valve), and the vacuum degree can reach an ultra-high vacuum level, so as to illustrate the high sealing property and structural strength of the sealing disk of the present invention. However, the vacuum valve to which the present invention is applied is not limited to a gate valve, and may be an angle valve, a pendulum valve, or various types of valves. The vacuum valve can be, for example, a metal valve, i.e., a metal material valve, and is preferably an all-metal valve, wherein the valve port is preferably a metal material. The sealing disc of the utility model can be applied to valve bodies made of various materials according to actual use situations, and is not limited to metal valves. The sealing disk of the present invention can be of single-side sealing type or double-side sealing type. In the case of a single-side sealing type, it includes a sealing plate and a base integrally connected. The sealing disk of the present invention can also be a double-side sealing type, which is composed of a sealing plate.
In detail, as shown in fig. 1 to 5, the preferred embodiment of the present invention is a single-side sealed type sealed disk. The sealing disk 10 of the present invention is suitable for opening or sealing the valve port 102 of the vacuum valve 100. The vacuum valve 100 may be, for example, but not limited to, an all-metal high frequency shield gate valve. The sealing disk 10 of the present invention comprises a base 20 and a sealing plate 30 integrally connected. The material of the base 20 and the sealing plate 30 is, for example, but not limited to, a metal material such as stainless steel or spring steel. The first surface 22 of the first side of the base 20 of the sealing disk 10 is adapted to be connected to a carrier 110, the carrier 110 being, for example, connected to a driving assembly (not shown) of the vacuum valve 100, for reciprocally moving the sealing disk 10 to an open position or a closed position for opening or sealing the valve port 102 of the vacuum valve 100. However, the present invention is not limited thereto, and the bearing member 110 may be omitted, that is, the sealing disk 10 may be selectively connected to the driving component of the vacuum valve 100 directly. In addition, the carrier 110 can also be a component of the driving component of the vacuum valve 100. The base 20 is shaped, for example, but not limited to, a cylinder. The carrier 110 may be in the form of, but not limited to, a carrier plate, a shaft or a link, etc. that can be connected to the seal disk 10. The carrier 110 may be connected to the first surface 22 of the base 20 of the sealing disk 10, for example, by screwing, so that the first surface 22 of the base 20 may have one or more screw holes 21, for example, but not limited thereto. The depth of the screw hole 21 is preferably not penetrating the base 20. In addition, the surface of the carrier 110 can have a corresponding number of screw holes (not shown) formed therethrough. Taking the carrier 110 as a carrier plate, the carrier 110 preferably has a receiving groove 114 for receiving the first side of the base 20. The surface of the receiving slot 114 of the carrier 110 preferably contacts the first surface 22 of the base 20.
In addition, the second side of the base 20 of the sealing disk 10 has a second surface 24 opposite to the first surface 22. The second surface 24 of the base 20 may optionally have a positioning element 26, such as, but not limited to, a positioning slot. If the second surface 24 of the base 20 of the sealing disk 10 has the positioning element 26, the positioning element 26 may be inserted into the positioning element 26 by a tool such as a jig during the process of assembling the sealing disk 10 to the vacuum valve 100 to position the sealing disk 10 relative to the valve port 102 of the vacuum valve 100. For example, the central axis of the positioning member 26 is preferably the same as the central axis of the base 20 and the seal disk 10. When the sealing disk 10 seals the valve port 102 of the vacuum valve 100, the central axis of the sealing disk 10 is, for example, coaxially aligned with the central axis of the valve port 102.
In the preferred embodiment of the present invention, the sealing plate 30 of the sealing disk 10 integrally surrounds the side of the first side or the second side of the base 20, and the sealing plate 30 preferably integrally surrounds the side of the second side of the base 20. The seal plate 30 has a first sealing surface 32. the first sealing surface 32 may be located at any position of the seal plate 30, wherein the first sealing surface 32 is preferably located at the outer edge of the seal plate 30. The valve port 102 has a second sealing surface 104 and is preferably located on the interior side of the valve port 102. In terms of appearance, the cross-sectional shape of the sealing plate 30 of the sealing disc 10 may be, for example, a bent plate, a wavy plate or an arc plate, which can increase the structural strength and the structural rigidity, i.e., can increase the structural toughness, so that the sealing disc 10 becomes a flexible structure with both strength and rigidity, but the present invention is not limited thereto, and the cross-sectional shape of the sealing plate 30 may also be, for example, a flat plate. When the utility model discloses a sealed dish 10 is applied to vacuum seal, the utility model discloses a sealed dish 10 not only can bear and apply in the closing force F of sealed dish 10 from the inside of vacuum valve 100, also can bear vacuum valve 100 when vacuum state, applies in the atmospheric pressure of sealed dish 10 from the outside of vacuum valve 100. The higher the vacuum level of the vacuum valve 100, the higher the closing force F and the atmospheric pressure. For example, the sealing disk 10 can withstand a closing force F of up to about 500Kg when it is a stainless steel metal having a thickness of about 1.8mm, and a vacuum of up to about 7.33x10 when evacuated-11torr. Because, the utility model discloses can be applicable to and install the all-metal high frequency shielding gate valve in superconductive accelerator electron beam stream channel, show the utility model discloses a various functions and the pointer of sealed dish 10, like leakproofness, cleanliness nature and structural strength etc. accord with the specification requirement of super high vacuum valve body really.
The sealing plate 30 of the sealing disk 10 of the present invention comprises a first wing plate 34 and a second wing plate 36 integrally connected. The first wing 34 and/or the second wing 36 may be, for example, but not limited to, a flat plate, an arcuate plate, or a bent plate. Taking the flat plate as shown in the figure as an example, the first wing 34 is inclined in a direction different from that of the second wing 36. The first wing 34 is connected to the base 20 at the first joint 35 and extends outwardly away from the first joint 35 at a first included angle A1 relative to the annular surface of the first joint 35. The second wing 36 is connected to the first wing 34 at the second joint 37 and extends outwardly away from the first surface 22 of the base 20 at a second included angle a2 with respect to the first wing 34, so that a third included angle A3 is formed between the second wing 36 and the annular surface of the first joint 35, wherein the first sealing surface 32 is located on the end edge of the second wing 36.
When the carrier 110 is connected to the first surface 22 of the base 20 of the sealing disk 10 and a closing force F is applied to the carrier 110, the closing force F may be applied to the first surface 22 of the base 20 and/or the sealing plate 30, for example, via the carrier 110, thereby causing the sealing disk 10 to abut the second sealing surface 104 in the port 102 of the vacuum valve 100 with the first sealing surface 32 of the sealing plate 30 in the closed position. Wherein the first sealing surface 32 is, for example, in line contact with the second sealing surface 104. The surface configuration of the first sealing surface 32 is, for example, but not limited to, a circular arc surface or a spherical surface. The second sealing surface 104 may be, for example, but not limited to, a bevel, a radius, or a spherical surface. When the sealing disk 10 is brought from the open position into the closed position, the first sealing surface 32 may contact the second sealing surface 104 and the first sealing surface 32 may rotatably abut (in a direction towards or away from the valve port 102) the second sealing surface 104 even if the closing force F applied from the inside of the vacuum valve 100 causes the sealing disk 10 to be slightly elastically deformed.
In addition, in the closed position, when the vacuum degree of the vacuum valve becomes higher as the air is drawn out, the closing force F applied from the inside of the vacuum valve 100 pushes the seal disk 10 to the outside of the vacuum valve, and the atmospheric pressure applied from the outside of the vacuum valve pushes the seal disk 10 to the inside of the vacuum valve at the same time, so that even if the seal plate 30 is slightly elastically deformed, the first seal surface 32 can rotatably abut against the second seal surface 104 with the applied closing force F and the atmospheric pressure. In other words, when the first sealing surface 32 of the sealing plate 30 directly abuts against the second sealing surface 104 of the valve port 102 of the vacuum valve 100, the first sealing surface 32 of the arc surface or the spherical surface is allowed to rotate relative to the second sealing surface 104, and the first sealing surface 32 is kept to abut against the second sealing surface 104, so as to constantly maintain the vacuum sealing property, thereby improving the sealing property and prolonging the service life by the compensation motion and the adjustment motion when the sealing surfaces made of metal abut against each other, and avoiding the Abrasion (Abrasion) caused by the collision between metals.
The first angle a1 has an angle value of, for example, 5 degrees to 45 degrees, preferably 10 degrees to 25 degrees, and more preferably 15 degrees, the third angle A3 has an angle value of, for example, 5 degrees to 45 degrees, preferably 10 degrees to 25 degrees, and more preferably 15 degrees, and the sum of the angle values of the first angle a1, the second angle a2, and the third angle A3 is 180 degrees. Therefore, when the sealing disc 10 of the present invention is applied to vacuum sealing, the sealing plate 30 of the present invention can not only bear the closing force F applied to the bearing member 110 from the inside of the vacuum valve 100, but also bear the atmospheric pressure applied to the outside of the vacuum valve 100 after the vacuum valve 100 is vacuumized, and can also constantly maintain the vacuum sealing property. In addition, taking the sealing plate 30 of the bent plate type as an example, the sealing plate 30 of the sealing disk 10 of the present invention is not limited to include the first wing plate 34 and the second wing plate 36 integrally connected, and the sealing plate 30 may further include another first wing plate connected to the second wing plate 36, and may further include another second wing plate 36 connected to the another first wing plate, and so on.
As shown, when the carrier 110 is connected to the seal disk 10, the carrier 110 may be connected to the base 20, the carrier 110 preferably abuts the seal plate 30, and preferably abuts both the second flange 36 and the second junction 37 of the first flange 34 and the base 20, whereby when a closing force F is applied to the carrier 110, the closing force F may be directly applied to the seal plate 30 and the base 20 via the carrier 110, thereby causing the seal disk 10 to abut the second sealing surface 104 of the port 102 of the vacuum valve 100 with the first sealing surface 32 in the closed position. Further, if the carrier 110 does not abut the seal plate 30, the closing force F may be applied to the seal plate 30 indirectly, for example, via the base 20. The thickness of the first wing 34 is, for example, but not limited to, the same as the thickness of the second wing 36. The projected length of the first wing 34 is, for example, but not limited to, the same as the projected length of the second wing 36. The projected length of the first wing plate 34 is approximately 0.8 to 1.5 times the projected length of the second wing plate 36. The projection length of the base 20 is approximately 2 to 5 times of the projection length of the first wing plate 34. However, the above numerical values are only examples and are not intended to limit the present invention.
The first sealing surface 32 of the sealing plate 30 of the sealing disk 10 of the present invention can be selectively lubricated and polished by a Dry polishing technique, such as Dry blasting or jet polishing, by spraying abrasive particles to reduce the surface roughness and increase the lubricity, so that the surface roughness (Ra) is preferably less than about 0.3 μm, and more preferably less than about 0.1 μm. Wherein, the utility model discloses do not have the kind and the material of abrasive particle of the specific polishing technique of restricting to, as long as can make first sealed face have can vacuum seal the surface roughness and the lubricity of valve port and can be applicable to the utility model discloses.
In another preferred embodiment of the present invention, the sealing plate can be a double-side sealing type. Compared with the single-side sealing type sealing disk of the above preferred embodiment, another preferred embodiment is different from the above preferred embodiment only in that the sealing plate of the double-side sealing type has a first sealing surface and a third sealing surface (not shown) on both sides, respectively, wherein the first sealing surface is used for sealing the valve port of the vacuum valve, and the third sealing surface is used for abutting against a fourth sealing surface (not shown) of the base. That is, the sealing plate of the double-sided sealing type of this other preferred embodiment is not integrally connected to the base. Wherein the third sealing surface has the same material and type as the first sealing surface.
To sum up, the utility model discloses a sealed dish for vacuum sealing has following advantage:
(1) the sealing disc can directly abut against the valve port of the vacuum valve through the first sealing surface on the sealing plate, so that the vacuum sealing effect can be achieved, even the ultrahigh vacuum sealing effect can be achieved, and no gasket or gasket is needed to be additionally used.
(2) The sealing disc will not outgas under the ultra-high vacuum environment, so it is suitable for the valve body with high specification requirement, such as the all-metal high-frequency shielding gate valve.
(3) The sealing disk can simultaneously withstand the closing force applied to the sealing disk from the inside of the vacuum valve and the atmospheric pressure applied to the sealing disk from the outside of the vacuum valve even under an ultra-high vacuum environment, and can constantly maintain vacuum sealability.
(4) The first sealing surface of the sealing disc can rotate relative to the second sealing surface and can be kept in contact constantly, so that the lubricating effect when the sealing surfaces made of metal are abutted against each other can be provided, and the compensation motion and the adjustment motion can also be provided, so that the sealing property can be improved, and the service life can be prolonged.
The foregoing is by way of example only, and not limiting. It is intended that all equivalent modifications and variations not departing from the spirit and scope of the present invention be included in the following claims.

Claims (13)

1. A sealing disk for vacuum sealing adapted to be reciprocally moved to an open position or a closed position to open or seal a port of a metal material of a vacuum valve, the sealing disk comprising:
a base having a first surface; and
a sealing plate surrounding the base, wherein the sealing plate in the closed position simultaneously receives a closing force applied from the inside of the vacuum valve and an atmospheric pressure applied from the outside of the vacuum valve, so that a first sealing surface of the sealing plate rotatably abuts against a second sealing surface of the valve port of the vacuum valve along with the closing force and the atmospheric pressure to keep vacuum sealing the valve port.
2. The sealing tray for vacuum sealing as claimed in claim 1, wherein the sealing plate is a bent plate, a wavy plate or an arc plate.
3. A sealing tray for vacuum sealing as claimed in claim 1, wherein the sealing plate comprises:
a first wing plate, which is connected to the base at a first joint and extends outward in a direction away from the first joint at a first included angle relative to a ring surface of the first joint; and
a second wing plate, wherein the second wing plate is connected to the first wing plate at a second connection point in a looping manner and extends outwards relative to the first wing plate in a direction away from the first surface of the base by a second included angle, so that a third included angle is formed between the second wing plate and the loop surface at the first connection point, and the first sealing surface is located on the end edge of the second wing plate.
4. The sealing tray for vacuum sealing as claimed in claim 3, wherein the closing force is applied directly to the second joint where the second wing connects with the first wing and the base at the same time.
5. The sealing tray for vacuum sealing as claimed in claim 3, wherein the closing force is applied directly to the base to be indirectly applied to the sealing plate via the base.
6. The sealing tray for vacuum sealing as claimed in claim 3, wherein the first angle has an angle value between 5 degrees and 45 degrees, the third angle has an angle value between 5 degrees and 45 degrees, and the sum of the angle values of the first angle, the second angle and the third angle is 180 degrees.
7. The sealing disk for vacuum sealing as claimed in claim 1, wherein the base has a second surface opposite to the first surface, the second surface being provided with a positioning element for positioning the sealing disk relative to the valve port of the vacuum valve during assembly of the sealing disk to the vacuum valve.
8. A sealing tray for vacuum sealing as claimed in claim 1, wherein the first sealing surface of the sealing plate is a circular arc surface or a spherical surface.
9. The seal tray for vacuum sealing as claimed in claim 1, wherein the first sealing surface of the seal plate is a lubricated polished surface.
10. A sealing tray for vacuum sealing as claimed in claim 1, wherein the sealing plate is made of metal and the vacuum valve is an all-metal valve.
11. The sealing tray for vacuum sealing as claimed in claim 1, wherein the sealing plate is made of metal, and the vacuum valve is an all-metal high-frequency shielding gate valve.
12. The sealing tray for vacuum sealing as claimed in claim 1, wherein the sealing plate integrally surrounds the base.
13. The sealing tray for vacuum sealing as claimed in claim 1, wherein the sealing plate detachably surrounds the base.
CN202022375485.6U 2020-10-23 2020-10-23 Sealing dish for vacuum sealing Active CN214093282U (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
CN202022375485.6U CN214093282U (en) 2020-10-23 2020-10-23 Sealing dish for vacuum sealing
TW109214276U TWM610255U (en) 2020-10-23 2020-10-29 Sealing disk for vacuum closure
JP2020005439U JP3231502U (en) 2020-10-23 2020-12-17 Sealing disc

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202022375485.6U CN214093282U (en) 2020-10-23 2020-10-23 Sealing dish for vacuum sealing

Publications (1)

Publication Number Publication Date
CN214093282U true CN214093282U (en) 2021-08-31

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Application Number Title Priority Date Filing Date
CN202022375485.6U Active CN214093282U (en) 2020-10-23 2020-10-23 Sealing dish for vacuum sealing

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JP (1) JP3231502U (en)
CN (1) CN214093282U (en)
TW (1) TWM610255U (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112268141A (en) 2020-10-23 2021-01-26 中国科学院上海高等研究院 Sealing dish for vacuum sealing

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TWM610255U (en) 2021-04-11
JP3231502U (en) 2021-04-08

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