JP3222610B2 - A substrate holding device that rotates while holding a disk-shaped substrate - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a holding device for holding and rotating a disk-shaped substrate, and more particularly to a substrate holding device for holding a disk-shaped substrate at at least three locations and rotating at a high speed.

[0002]

2. Description of the Related Art In recent years, the tendency to use a hard disk as an auxiliary storage device of electronic equipment such as a computer has been particularly strong, and there has been an increasing demand for manufacturing a hard disk quickly and inexpensively with high precision. As is well known, before providing a magnetic material on a hard disk substrate, after grinding a hard disk substrate (hereinafter sometimes simply referred to as a substrate),
It is necessary to wash and dry the substrate after each step after polishing.

As a method for drying a washed hard disk substrate, there is a method in which a substrate is rotated at a high speed to remove a cleaning liquid (hereinafter referred to as cleaning water) adhering to the substrate by centrifugal force. The present invention relates to a substrate holding apparatus that rotates a substrate at a high speed and removes cleaning water attached to the substrate.

A conventional method for holding a substrate will be briefly described with reference to FIG. FIG. 5 shows the substrate holding unit 2 of the substrate holding device.
a, 2b, and 2c show the disk-shaped substrate 4 held by them. That is, the edge of the circular opening (through hole) 6 provided at the center of the substrate 4 is engaged with the groove (not shown) provided in each of the substrate holding portions 2a-2c, and the substrate 4 is moved outward. The substrate 4 is held by pressing in the direction. In FIG. 5, illustration of the entire substrate holding device is omitted.

The substrate holding device holding the substrate 4 by the substrate holding portions 2a-2c is, for example, about 6000 r in the direction of an arrow 8 about an axis passing through the center point of the opening 6 and perpendicular to the substrate surface.
Rotating at pm, the washing water attached to the surface of the substrate 4 is removed by centrifugal force.

According to the conventional method, the holding portions 2a-2c
Is subjected to a centrifugal force radially outward of the substrate 4 by high-speed rotation, so that there is an advantage that the holding portions 2a to 2c are unlikely to come off from the inner end of the substrate 4.

However, as the substrate is downsized, the circular opening 6 provided at the center of the substrate becomes smaller,
It has become difficult to dispose the holding portions 2a-2c in the openings 6.

In order to solve this problem, a holding device for holding the outer end of the substrate has been considered. However, since the centrifugal force acting on the holding portion due to the high-speed rotation of the substrate holding device is outward in the radial direction of the substrate, the method of pressing the outer end of the substrate has a problem that the holding portion is likely to come off the substrate.

Therefore, in the method of holding the outer end of the substrate, it is necessary to press the outer end of the substrate with a large force in order to surely hold the substrate against centrifugal force. But,
If the edge of the substrate is strongly pressed, there is a serious problem that the substrate is distorted or the edge is damaged.

[0010]

SUMMARY OF THE INVENTION The present invention provides a substrate holding apparatus capable of reliably holding the outer end of a small (ie, small diameter) disk-shaped substrate without causing distortion or damage to the substrate. That is.

[0011]

Means for Solving the Problems At least three holding means for holding at least three outer end portions of a disk-shaped substrate, and urging means for urging the at least three holding means in a substrate pressing direction. And each of the three holding means has a fulcrum, a first means rotatable around the fulcrum, and a biasing force of the biasing means fixed to the first means. Second means for receiving and supporting the disc-shaped substrate by pressing through the fulcrum, and applying a centrifugal force due to rotation of the apparatus to the second means via the fulcrum, fixed to the first means; ,
Third means for further urging the second means in the substrate pressing direction,
Having.

[0012]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to FIGS. FIG. 1 is a schematic front view showing a substrate 4 held by a holding device according to the present invention, and FIG. 2 is a sectional view 10a-10b of FIG.
FIG. 4 is a cross-sectional view (partially showing a side view) taken along a line. 3 and 4
FIG. 4 is a diagram illustrating mounting of a substrate.

First, the present invention will be described with reference to FIGS. As shown in FIG. 1, the holding unit 12 of the substrate holding device
a, 12b, and 12c hold the substrate 4 by pressing the outer end of the substrate 4. Actually, the outer end of the substrate 4 is engaged with a groove (described later) provided in each of the holding portions 12a to 12c, and the holding portions 12a to 12c are placed inside (in the center direction of the substrate 4).
To hold the substrate 4. That is, as shown in FIG. 2, the substrate 2 is formed by a groove 14a provided at the tip of the holding portion 12a.
Hold the end of Each of the other holding parts 12b and 12c is provided with a groove similar to the groove 14a. In the present embodiment, three holding parts 12a to 12c (FIG. 1) are provided, but four or more holding parts may be provided in some cases.

In FIG. 2, the above-mentioned substrate holding part 12a (second means) and the substrate pressing auxiliary part 18a (third means) are provided at both upper ends of the columnar member 16a (first means). For convenience of explanation, a portion composed of the members 16a, 12a and 18a is referred to as a T-shaped portion 20. The central portion of the columnar member 16a is rotatably provided on a shaft (fulcrum) 22. On the other hand, a shaft 28 fixed to the projection 26 of the cylindrical portion 24
Is rotatably engaged with a recess provided at the lower end of the columnar member 16a.

A spring 30 is provided inside the tubular portion 24. The right end (on the drawing) of the spring 30 is in contact with the inner wall of the closed end of the tubular portion 24, and the left end is a member (lid) 32. Is in contact with the inner wall of Since the lid 32 is fixed to the rotating body 34, the cylindrical portion 24 is pushed rightward by the spring 30,
The mold part 20 is urged in the direction of the arrow 36. Therefore, the substrate holding unit 12a holds the substrate 4 together with the other substrate holding units 12b and 12c.

The above-mentioned shaft 22 is fixed to the upper portion 36 of the rotating main body 34, and the columnar member 16a is rotatably provided on the shaft 22. As shown, the rotating body 34 is fixed to a rod-shaped substrate attaching / detaching member 40 by a suitable fixing means 38 such as a screw.
Is fixed to a cylindrical rotation applying member 42 having the inside. The rotation applying member 42 includes a rotation drive source (not shown).
As a result, it rotates in the direction of arrow 44, for example. Accordingly, the rotating body 34 rotates in the same direction, and the substrate 4 fixed by the substrate holding members 12a (and 12b, 12c) rotates in the same direction.

Next, the attachment of the substrate 4 to the apparatus will be described with reference to FIGS. As shown in FIG.
Is not attached, the cylindrical portion 24 is pushed rightward by the rightward pressing force of the spring 30. Therefore,
The right end of the tubular portion 24 comes into contact with the left end of the substrate attaching / detaching member 40 and stops. In this case, the shaft 28 fixed to the cylindrical portion 24
As a result, the T-shaped portion 20 rotates about the shaft 22 (fulcrum) and assumes the position shown in FIG.

Next, as shown in FIG. 4, when the substrate attaching / detaching member 40 is pushed to the left against the pressing force of the spring 30, the T-shaped portion 20 moves in the direction of arrow 45 around the shaft 22 (fulcrum). It turns to the position shown in FIG. In this state, the substrate 4
Is set at a predetermined position, and when the pressing of the substrate attaching / detaching member 40 in the left direction is released, the substrate 4 becomes the substrate holding portions 12a-12c (only 12a is shown in FIG. 2) as shown in FIGS. Is attached to the device.

The present invention will be described in more detail with reference to FIG. If the device is in the state of FIG. 2 and not rotating,
The T-shaped portion 20 is urged in the direction of the arrow 36 by the urging force of the spring 30, and the substrate 4 is held by the substrate holder 12a (and 12b and 12c not shown). When the apparatus rotates, the substrate holding unit 12a and the substrate pressing auxiliary unit 18
Centrifugal force is applied to a in the directions of arrows 46 and 48, respectively.

The centrifugal force applied to the substrate holding portion 12a acts in a direction to reduce the pressing force of the substrate, as in the conventional example. That is,
It acts to rotate the T-shaped part 20 in the direction of arrow 45. However, the centrifugal force acting on the substrate pressing assisting portion 18a acts to rotate the T-shaped portion 20 (that is, the substrate holding portion 12a) in the direction of the arrow 36 via the fulcrum (shaft) 22. The portion 12a is pressed against the center of the substrate 4.

[0021]

In the prior art, since the substrate is strongly pressed in consideration of the centrifugal force due to the rotation of the apparatus, as described above, the end of the substrate may be damaged or the substrate may be damaged when the apparatus is not rotating. There was a problem of giving distortion. However, in the present invention, in order to prevent the substrate from falling off during rotation, the substrate holding unit 1 is used.
2a, instead of increasing the pressing force,
Since the centrifugal force acting on a is used for pressing the substrate during rotation, the above-described problem of the conventional example can be solved.

[Brief description of the drawings]

FIG. 1 is a front view of a substrate held by an apparatus (only a part is shown) according to the present invention.

FIG. 2 is a cross-sectional view (partial side view) for explaining the device according to the present invention.

FIG. 3 is a sectional view (partial side view) for explaining the operation of the device according to the present invention.

FIG. 4 is a sectional view (partial side view) for explaining the operation of the device according to the present invention.

FIG. 5 is a front view of a substrate held by an apparatus (only a part is shown) according to a conventional example.

[Explanation of symbols]

 4 Disc-shaped substrate 12a Substrate holding part (second means) 16a Bar-shaped member (first means) 18a Substrate pressing auxiliary part (third means) 30 Spring (biasing means)

──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. ⁷ , DB name) G11B 5/84 G11B 7/26 B08B 3/04 B08B 11/02

Claims (1)

(57) [Claims] 1. At least three holding means for holding at least three outer end portions of a disk-shaped substrate, and urging means for urging the at least three holding means in a substrate pressing direction. Each of the three holding means includes a fulcrum, a first means rotatable around the fulcrum, and an urging force of the urging means fixed to the first means via the fulcrum. A second means for receiving and receiving the disc-shaped substrate to press and hold the disc-shaped substrate; and a centrifugal force caused by the rotation of the apparatus fixed to the first means.
A third means for applying the second means to the second means via the fulcrum, and further urging the second means in the direction of pressing the substrate; and a substrate holding device for holding and rotating the disk-shaped substrate. .