JPS6346175Y2 - - Google Patents

Description

[Detailed Description of the Invention] [Technical Field of the Invention] The present invention utilizes a hole drilled in the center in the process of manufacturing a magnetic disk medium of a magnetic disk device used as an external storage device of an information processing device. The present invention relates to a device for checking.

[Conventional technology]

To manufacture magnetic disk media, which serve as information storage media in magnetic disk devices, aluminum disks are rotated at high speed to make the surface flat, polished, washed and dried, and then mixed with magnetic powder. It is necessary to apply and dry the resin. In the case of double-sided discs, these treatments must be performed on both the front and back sides of the disc, but in order to make these operations easier, the hole in the center of the disc is used to hold the magnetic disc. It is better to do so.

By the way, as a means for checking from the inner circumferential side of the disk, a configuration as shown in FIG. 3 has conventionally been used. That is, a disk 4 serving as a workpiece is mounted from the small diameter portion 3 side of the disk 2 fixedly attached to the spindle 1, and the small diameter portion 3 is inserted into the central hole. Next, the cup 5 is attached and pressed by the shaft 7 through the thrust bearing 6, so that the disk 4 is sandwiched between the cup 5 and the large diameter portion 8 of the disk 2. After performing a predetermined process while rotating the disc 4 at high speed in this state, the shaft 7 and the cup 5 are removed.

However, with such a configuration, it takes time to attach the cup 5, press it with a spring or air cylinder via the shaft 7, and remove the cup 5, and the process of installing the disk 4 takes longer than the processing time of the disk 4. There is a drawback that the removal work takes too much time, resulting in poor work efficiency. Also disk 4
Processes such as surface treatment and magnetic film coating are performed by rotating at high speeds of several thousand revolutions, but a complicated structure in which the shaft is rotated while being pressed against the shaft 7 impedes high-speed rotation and also requires cleaning. In some cases, the cleaning liquid may splash onto the thrust bearing 6, etc., resulting in a deterioration of the bearing function.

Therefore, the applicant of the present invention solved such problems with the conventional inner edge chuck mechanism, and made it possible to easily and reliably attach and detach the workpiece with one touch.
In order to have a simple structure suitable for high-speed rotation and cleaning, the Utility Application No. 59-29083 was developed in Figures 4 to 4.
We proposed a configuration as shown in Figure 7.

FIG. 4 is a cross-sectional view showing the entire structure of the inner edge chuck mechanism, in which A is a front view and B is a cross-sectional view of FIG. Reference numeral 9 denotes a cylindrical holder, which is connected to the spindle 1a. At the tip of this cylindrical holder 9,
An intermittent ring-shaped portion 10 is integrally formed to fit into a circular hole of the workpiece (disc) 4 via the disk-shaped portion 9a. FIG. 5 is a front view showing this intermittent ring-shaped portion 10. As shown in FIG. The intermittent ring-shaped portion 10 has a diameter of 360
They are not formed over the entire circumference, but are formed intermittently across slits 11 having a width of, for example, several tens of degrees. Note that the distal end of the intermittent ring-shaped portion 10 is tapered so that it can be easily inserted into the circular hole of the disk. Further, a stopper 12 having a larger diameter than the intermittent ring portion 10 is integrally formed at a position near the cylindrical holder 9 of the intermittent ring portion. Further, a cam 13 is formed on the inner surface of the cylindrical holder 9 so that the opening side of the cylindrical portion has a smaller diameter.

14 is a drive shaft connected to a cylindrical flexible section 15 inserted into the cylindrical holder 9;
A movable presser 20 that can be opened and closed is provided at the tip of the holder 5.

FIG. 6 is a diagram showing the opening/closing mechanism of the movable presser, in which A is a front view, B is a side view, and C is a longitudinal sectional view. The flexible part 15 is a cylindrical body with axial slits 16 at 90 degree intervals, leaving only the drive shaft 14 side, for example, to provide a leaf spring function. By increasing the diameter, cam 1
7 is formed. A disk-shaped portion 18 is integrally formed at the tip of the cylindrical flexible portion 15 . This disk-shaped portion 18 also has a slit 16 of the flexible portion 15...
Continuous slits 19 are formed radially. A movable retainer 20 that protrudes in the radial direction is formed at an intermediate position between the adjacent slits 19, 19.

The cylindrical flexible portion 15 having the movable presser 20 is inserted into the cylindrical portion of the holder 9 and connected to the drive shaft 14. A compression coil spring 22 is interposed between the holder 9 and a nut 21 provided at the tip of the drive shaft 14.
By positioning the movable pressers 20 so that they fit into the slits 11 of the holder 9, the movable pressers 20 are positioned between the adjacent intermittent ring-shaped portions 10.

FIG. 4 shows a state in which the drive shaft 14 is driven in the direction of arrow _a1 by an air cylinder or the like. When the flexible portion 15 is pushed in the direction of arrow _a1 by the drive shaft 14 in this way, the cam 17 on the outer periphery of the flexible portion 15 rides on the cam 13 on the inner periphery of the holder 9. Then, since the movable pressers 20 can be opened and closed by the slits 16 and 19, the movable pressers 20 close and their outer diameters are reduced as shown by solid lines in FIG.
The outer diameter when reduced in this way is smaller than the outer diameter of the intermittent ring-shaped portion 10.

Therefore, when the disk-shaped workpiece 4 is mounted from the front of the movable presser foot 20..., the movable presser footer 20... passes through the hole in the center of the workpiece, and the intermittent ring-shaped portion 10 fits into the center hole of the workpiece, as shown in FIG. The state is shown by the chain line. In this state, when the air cylinder is returned to its original position and the force in the direction of arrow a ₁ is released, the drive shaft 14 moves in the direction opposite to arrow a ₁ by the force of the coil spring 22, and the cam 17 is disengaged from the cam 13. The diameters of the cam 17 and the movable presser 20 are expanded. That is, the outer diameter of the movable retainer 20 becomes larger than the inner diameter of the hole at the center of the workpiece 4, and the workpiece 4 becomes unable to fall off. Further, as the drive shaft 14 continues to move to the right side in the figure, the workpiece 4 is moved to the stopper 1 by the movable presser 20...
2, and the workpiece 4 is clamped between the stopper 12 and the movable presser 20.

FIG. 7 is an enlarged cross-sectional view of main parts showing the state in which the work 4 is chucked in this manner. That is, an intermittent ring-shaped portion 10 is formed in the center hole of the workpiece 4.
... is inserted, the stopper 12 comes into pressure contact with the right edge of the workpiece center hole, and the movable presser 20... comes into pressure contact with the left edge of the workpiece center hole, whereby the workpiece 4 is chucked.

After checking the workpiece and finishing polishing, cleaning, etc., the drive shaft 14 is moved in the direction of arrow _a1 using an air cylinder or the like. Then, the movable presser foot 20 moves to the left side in the figure, releasing the chuck force on the workpiece 4, and moves further to the left, causing the cam 17 to ride on the cam 13, and move the movable presser foot 20.
The outer diameter of ... is further reduced to become smaller than the diameter of the central hole of the workpiece 4, and the workpiece 4 can be removed from the chuck mechanism using a handling robot or the like.

The flexible portions 15 can be restored from the state shown in FIG. 4 to the state shown in FIG. 7 by their own spring force, but if the restoring force is insufficient, a circumferential slit 23 is formed on the inner surface near the tip. Then, a return ring may be inserted therein. In addition, a ring-shaped groove is formed on the workpiece 4 side surface of the stationary stopper 12, and a sealing O-ring 24 is fitted into the groove, thereby sealing the gap between the workpiece 4 and the stopper 12. It is possible to prevent slippage and make the chuck more reliable.

According to this configuration, both the fixed side stopper and the movable holder are arranged on the same side with respect to the workpiece surface, and when the workpiece is mounted, the movable holder is smaller than the inner diameter of the workpiece, and the movable holder is After installation, the workpiece becomes larger than the inner diameter of the workpiece, so the workpiece can be easily and quickly removed from the front of the chuck mechanism. In addition, since the movable presser approaches the fixed stopper and holds the workpiece between them, it is possible to reliably check even if the thickness of the workpiece is slightly different.
Even if the workpiece is installed diagonally on the intermittent ring-shaped part, the movable holding workpiece is pressed against the stopper side and the workpiece is corrected to its normal state before being checked, so the handling robot does not feed and install the workpiece incompletely. Even if something happens, you can definitely check it. Furthermore, the flexible part on the movable presser side is inserted into the cylindrical holder on the stopper side, making it easy to rotate as a unit, making it suitable for high-speed rotation and having a simple configuration, so that the cleaning liquid can be used on the spindle, etc. It is possible to easily and reliably prevent the rotating part from being affected.

[Problem that the invention attempts to solve]

However, in this configuration, as shown in FIG.
In the anti-yuck state in which the movable presser 20 is retracted from the stopper 12, a gap 25 is generated between the outer periphery of the movable presser 20 and the outer periphery of the intermittent ring-shaped portion 10. For this reason, the alignment accuracy between the workpiece holding part of the handling robot and the intermittent ring-shaped part 10 is low.
Even if the workpiece 4 is attached to the tapered portion 26 of the intermittent ring-shaped portion 10 or is attached accurately as shown by the chain line, the workpiece 4 may become stuck in the gap 25 due to vibration or the like.
There is a risk of falling. As a result, the movable presser foot 20
Even if the workpiece 4 is closed and an attempt is made to clamp the workpiece 4 between the stopper 12, there is a risk that the workpiece 4 will be clamped in the gap 25 or fall, resulting in low reliability as a chuck mechanism.

The technical problem of the present invention is to eliminate such problems in the conventional inner edge chuck mechanism and to reliably chuck the workpiece in a predetermined position.
The purpose is to improve the reliability of the chuck mechanism.

[Means for solving problems]

The technical means of the present invention taken to solve this problem is to form an intermittent ring-shaped part by providing a slit into which a movable presser can be fitted in a ring-shaped part large enough to fit into the central hole of the workpiece. and is provided with a stopper fixed to the tip of the cylindrical holder and having a larger diameter than the intermittent ring-shaped part at a position closer to the cylindrical holder of the intermittent ring-shaped part,
The cylindrical holder is provided with fixed cams formed with different inner diameters in the axial direction, and the intermittent ring-shaped portion is attached to the tip of the movable cylindrical portion inserted into the cylindrical holder. A movable retainer that fits into the slit is provided, and on the outer periphery of the movable cylindrical part,
The movable cylindrical part is provided with a movable cam formed with different outer diameters in the axial direction, and a slit in the axial direction so that the movable cam and the movable retainer at the tip can be opened and closed in the radial direction. The fixed cam and the movable cam have flexibility, and when the movable presser moves in a direction away from the stopper,
The positional relationship is such that when the outer diameter of the movable presser is reduced and the movable presser moves in a direction approaching the stopper, the outer diameter of the movable presser is expanded. The outer periphery of the tip of the part is an inclined surface such that the diameter is larger on the stopper side, and the outer periphery of the movable presser has an inclined surface such that the diameter is larger on the stopper side. , the stroke of the movable presser is set within a range in which the inclined surface on the outer circumference of the movable presser does not deviate from the inclined surface on the outer circumference of the intermittent ring-shaped part in the axial direction, and furthermore, in the anti-yuck state, the inclined surface of the movable presser moves away from the inclined surface on the outer circumference of the intermittent ring-shaped part. The configuration requires that the inclined surface of the outer periphery be continuous in the direction parallel to the axis.

[Effect]

According to this technical means, the stroke of the movable presser is set within a range in which the outer periphery of the movable presser does not deviate from the outer circumference of the intermittent ring portion in the axial direction when the workpiece is in an anti-yuck state. There is no gap between the workpiece and the shaped part, and the workpiece does not fall into the gap as in the conventional case. Particularly in the anti-yuck state in which the movable presser is separated from the stopper, the inclined surface on the outer periphery of the movable presser is continuous with the inclined surface on the outer periphery of the intermittent ring-shaped portion. Therefore, there is no part that obstructs the movement of the workpiece between the outer circumferential tip of the movable presser and the stopper surface, and even when the workpiece is inserted into the sloped surface at the tip of the movable presser, it is smoothly guided to the sloped surface. and is guided to the stopper position. Therefore, even if the handling robot has low accuracy in positioning the workpiece to the chuck mechanism, the workpiece can be reliably placed in the chuck position.

〔Example〕

Next, how the inner edge chuck mechanism according to the present invention is actually implemented will be explained by way of an example. FIG. 1 is a sectional view of the inner edge chuck mechanism according to the present invention, with the upper half showing the anti-chuck state and the lower half showing the chuck state. FIG. 2A is an enlarged sectional view of the movable presser, and FIG. 2B is an enlarged sectional view of the intermittent ring-shaped portion. The intermittent ring-shaped portion 10 is not particularly different from the conventional one, and includes a portion 27 for holding the workpiece 4 on the outer periphery and a tapered inclined surface 26, and a stopper 12 is provided at the end of the workpiece holding portion 27. It is formed in one piece. The point that a slit 11 as shown in FIG. 5 is formed in the part into which the movable presser 20 is fitted is the same as in the conventional case.

On the side of the movable presser foot 20, unlike the conventional one, a tapered inclined surface 28 is formed in the same direction as the inclined surface 26 of the intermittent ring-shaped part 10, and only the end on the large diameter side is tapered in the opposite direction so as to be suitable for holding the workpiece 4. Orientation slope 29
is formed. Movable presser foot 20 in Fig. 2 A
is in a state in which the cams 13 and 17 are not driven, that is, in a chuck state, but in the anti-chuck state, the outer diameter of the movable presser 20 becomes smaller and the inclined surface 28 is the inclined surface of the intermittent ring-shaped portion 10. 26 and consecutive.

That is, as shown in the upper half of FIG. 1, when the movable cylindrical portion 15 is driven to the left side of the figure and the movable cam 17 rides on the inclined cam 13, the movable presser 20 is displaced inward and the diameter is reduced. becomes smaller. Further, the movement stroke S of the movable cam 17 is set within a range in which the inclined surface 28 of the movable presser 20 does not separate from the inclined surface 26 on the outer periphery of the intermittent ring-shaped portion 10.

Therefore, when viewed from the side as shown, the inclined surface 28 of the movable presser 20 and the inclined surface 26 of the intermittent ring-shaped portion 10 are continuous. Therefore, even if the work 4 comes into contact with the inclined surface 28 midway when it is mounted from the front, the work 4 is smoothly guided to the inclined surface 28 and then to the inclined surface 26, and the stopper 1
It can move until it touches 2. When the workpiece 4 is mounted in this manner, the movable presser 20 is driven to the right side in the figure by the coil spring 22, and becomes in the state shown in the lower half of FIG. That is, the inner edge of the workpiece 4 is held between the holding surface 30 of the stopper 12 and the inclined surface 29 of the movable presser 20.

In the anti-yuck state, it is desirable that the inclination angle of the inclined surface 28 of the movable retainer 20 coincides with the inclination angle β of the inclined surface 26 of the intermittent ring-shaped portion 10. It is sufficient that they are continuous, and they do not necessarily have to be at the same angle.

[Effects of the invention] As described above, according to the invention, the inclined surface on the outer periphery of the movable presser and the inclined surface on the outer periphery of the intermittent ring-shaped part are continuous in the anti-chuck state, and no gap is generated between them, so that the chuck of the workpiece is prevented. Even if the accuracy of alignment with the mechanism is poor, the workpiece is smoothly and reliably guided to the stopper position and can be chucked. Therefore, reliability as a chuck mechanism is guaranteed, and generation of defective products due to malfunction of the chuck mechanism and decrease in work efficiency due to malfunction are prevented.

[Brief explanation of the drawing]

FIG. 1 is a sectional view showing an embodiment of the inner edge chuck mechanism according to the present invention, FIG. 2 is an enlarged sectional view of essential parts of the inner edge chuck mechanism, FIG. 3 is a sectional view showing a conventional inner edge chuck mechanism, and FIG. 7 to 7 show an embodiment of the inner edge chuck mechanism previously proposed by the applicant of the present invention, FIG. 4 is a front view and a longitudinal sectional view, FIG. 5 is a front view of an intermittent ring-shaped portion, FIG. 6 is a front view, side view, and longitudinal sectional view of the movable presser provided at the tip of the flexible part, and FIG. 7 is an enlarged sectional view of the main part in a state in which a workpiece is chucked. In the figure, 4 is a workpiece (disc), 10 is an intermittent ring-shaped part, 12 is a stopper, 13 and 17 are cams, 15 is a flexible part, 16 and 19 are slits, and 20
indicates a movable presser, and 26 and 28 indicate inclined surfaces, respectively.

Claims (1)

[Claim for Utility Model Registration] A ring-shaped part large enough to fit into the center hole of a workpiece is provided with a slit into which a movable retainer can be fitted, thereby forming an intermittent ring-shaped part, and forming an intermittent ring-shaped part at the tip of a cylindrical holder. A stopper is fixedly installed and has a larger diameter than the intermittent ring part at a position near the cylindrical holder of the intermittent ring part, and the inside diameter of the cylindrical holder is different in the axial direction. A movable holder is provided at the tip of the movable cylindrical part inserted into the cylindrical holder, and the movable holder is fitted into the slit of the intermittent ring part, and the outer periphery of the movable cylindrical part is for,
The movable cylindrical part is provided with a movable cam formed with different outer diameters in the axial direction, and a slit in the axial direction so that the movable cam and the movable retainer at the tip can be opened and closed in the radial direction. The fixed cam and the movable cam have flexibility, and when the movable presser moves in a direction away from the stopper,
The positional relationship is such that when the outer diameter of the movable presser is reduced and the movable presser moves in a direction approaching the stopper, the outer diameter of the movable presser is expanded. The outer periphery of the tip of the part is an inclined surface such that the diameter is larger on the stopper side, and the outer periphery of the movable presser has an inclined surface such that the diameter is larger on the stopper side. , the stroke of the movable presser is set within a range in which the inclined surface on the outer circumference of the movable presser does not deviate from the inclined surface on the outer circumference of the intermittent ring-shaped part in the axial direction, and furthermore, in the anti-yuck state, the inclined surface of the movable presser moves away from the inclined surface on the outer circumference of the intermittent ring-shaped part. An inner edge chuck mechanism characterized by the following requirements: The inclined surface of the outer periphery is continuous in a direction parallel to the axis.