JP3215268B2 - Vacuum container device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vacuum vessel device having a shaft sealing mechanism for sealing a shaft around a rotating shaft of a rotary machine using a magnetic fluid and vacuum sealing.

[0002]

2. Description of the Related Art Magnetic fluids are used for shaft sealing regardless of stationary or rotating fields, and are often used in shaft sealing mechanisms for vacuum or gas sealing. Magnetic fluid is formed and stored in a minute gap. Therefore, the shaft sealing mechanism has been downsized and simplified, and its reliability has been improved.

FIG. 9 is a partial sectional view showing a schematic structure of a vacuum vessel device used in a conventional rotary machine. First and second bearings 4 are inserted into the outer peripheral surface of the rotating shaft 1 at intervals along the axial direction, and a cylindrical housing 5 is fixed to the outer peripheral surface of the bearing 4.

A plurality of annular magnetic poles 2 and 3 are arranged and fixed on the inner peripheral surface of the housing 5 along the axial direction with an interval therebetween, and a permanent magnet ( A plurality of magnets 6 are arranged in the circumferential direction.
In this case, a minute gap δ is formed between the magnetic poles 2 and 3 and the outer peripheral surface of the rotating shaft 1, and the minute gap δ is formed.
Is filled with a magnetic fluid 7. As a result, the magnetic flux generated by the magnet 6 passes through a closed magnetic path formed between the pair of magnetic poles 2 and 3 and the magnetic fluid 7, whereby the rotating shaft 1 and the magnetic poles 2 and 3 are in a non-contact state. A shaft sealing mechanism is configured. Cooling coolant transport holes 5a, 5b,
5c, 5d and cooling refrigerant conveying grooves 2a, 3a are formed, and a communication passage 1a communicating with the inside of a vacuum vessel (not shown) is formed in the axial direction of the outer peripheral surface of the rotary shaft 1. A hole 5e is formed to allow communication with the communication passage 1a and to connect a vacuum exhaust system for evacuating the inside of the vacuum vessel.

[0005]

In the conventional vacuum vessel apparatus shown in FIG. 9, the characteristic between the magnetic field and the rotating shaft 1 is varied depending on various conditions such as the formation of the characteristic magnetic field of the magnetic fluid 7 itself and the rotational peripheral speed. An appropriate minute gap δ is determined, and a shaft sealing mechanism is configured.

However, the stationary magnetic poles 2, 3
And the magnetic fluid 7 stored in the minute gap δ between the rotating shaft 1 is rubbed by the rotation of the rotating shaft 1, thereby generating heat. This heat is generated by the bearing 4 which is also a heat source,
They are stored in the housing 5 surrounding them, and do not bring good results such as heating of the magnetic fluid 7 itself and deformation of the magnetic poles 2 and 3. For this reason, in order to protect the shaft sealing mechanism and maintain reliability, holes 5a, 5b, 5b, 5b are formed in the wall surface of the housing 5 so that the magnetic poles 2, 3 are cooled by the cooling medium.
5c and 5d are formed, and each of the magnetic poles 2 and 3 is formed with a cooling refrigerant conveying groove 2a and 3a in the circumferential direction.

In addition, the pressure in the vacuum vessel is in a state of constantly increasing due to the function of the vacuum evacuation system, degassing from the surface layer material of the vessel or between the component surfaces, and furthermore, permeation. This vacuum pressure needs to be monitored, and pressure improvement is a necessary task each time. However, it is necessary to connect the vacuum exhaust system while rotating and stopping the rotating vacuum vessel each time.

SUMMARY OF THE INVENTION The present invention has been made to solve such problems of the prior art, and uses a magnetic fluid stored in a minute gap between a rotating shaft and a magnetic pole in a state equivalent to a rotating stationary field. An object of the present invention is to provide a vacuum vessel device which is made possible and has improved reliability.

[0009]

In order to achieve the above object, an invention corresponding to claim 1 comprises a cylindrical housing having vacuum sealing means, and an inner peripheral surface of the housing which is located on an axial end side. A rotary shaft rotatably supported by bearings disposed at an interval from each other, and having a communication path connected to a vacuum vessel at an axial end thereof, and having a communication passage capable of communicating with the inside of the vacuum vessel; A pair of magnetic poles arranged and fixed on the inner peripheral surface at a distance from each other in the axial direction, and arranged so as to form a minute gap with respect to the outer peripheral surface of the rotating shaft; A magnetic fluid stored in a minute gap formed between the outer peripheral surfaces of the shaft and a space between the magnetic poles, a plurality of which are arranged in the circumferential direction, and a pair of the magnetic poles and the magnetic fluid. Multiple closed magnetic circuits It comprises a permanent magnet, and with the rotation of the rotary shaft, the magnetic pole, the permanent magnet, the housing is a vacuum chamber apparatus that follow rotate integrally.

In order to achieve the above object, a second aspect of the present invention provides a cylindrical housing having a vacuum sealing means, and an inner peripheral surface of the housing which is spaced apart from an axial end. A rotating shaft that is rotatably supported by bearings disposed at the axial end and has a communication passage connected to the inside of the vacuum container and that can communicate with the inside of the vacuum container; A pair of magnetic poles arranged and fixed at intervals in the direction, and arranged such that a minute gap is formed with respect to the outer peripheral surface of the rotating shaft,
A magnetic fluid stored in a minute gap formed between the magnetic pole and the outer peripheral surface of the rotating shaft; and a plurality of magnetic fluids disposed at intervals between the magnetic poles, the magnetic fluid being disposed in the circumferential direction. A plurality of permanent magnets forming a closed magnetic path between the magnetic fluids, and a rotational brake disposed on the outer peripheral surface side of the housing and braking the rotation of the housing to which the magnetic poles and the permanent magnets are fixed. A vacuum container device comprising a mechanism and a rotation fixing mechanism for rotating and fixing the housing.

According to a third aspect of the present invention, an adjusting weight is provided at an outer peripheral side of the housing and at a position symmetrical to the vacuum sealing means with respect to an axis of the housing. 3. The method according to claim 1, wherein
It is a vacuum container apparatus of 3.

According to a fourth aspect of the present invention, in order to achieve the above object, a measuring element for monitoring the pressure or temperature in the vacuum vessel is embedded in a wall of the vacuum vessel. A vacuum container device according to claim 2.

According to a fifth aspect of the present invention, a sliding ring is provided on an outer peripheral portion of the rotary shaft, and a pressure or temperature in the vacuum vessel is detected via a brush. 3. The vacuum vessel device according to claim 1, wherein the vacuum vessel device can be monitored.

According to a sixth aspect of the present invention, a housing having the magnetic poles and the permanent magnet is configured to rotate following the rotation of the rotating shaft, and to cool the magnetic poles. The vacuum container device according to claim 1 or 2, wherein the cooling refrigerant conveying groove is not provided.

According to a seventh aspect of the present invention, a projection is formed on the outer peripheral surface of the housing along a circumferential direction, and a hole for attaching a rotating parallel weight to the projection is provided.
The vacuum vessel device according to claim 1, wherein at least one of a grinding portion and a grindable portion is formed.

[0016]

According to the first aspect of the present invention, the rotation of the rotating shaft causes the magnetic pole, the magnet, and the housing to rotate following the rotation of the rotating shaft, so that the difference in the number of rotations between the rotating shaft and the magnetic pole is reduced. Friction stir of the magnetic fluid stored by the magnetic field is suppressed.

According to the second aspect of the present invention, since the housing can be arbitrarily stopped by the rotation braking mechanism and the rotation fixing mechanism, the vacuum sealing means in the vacuum exhaust hole can be released without stopping the rotation of the vacuum container. Then, a vacuum exhaust pipe can be connected to improve the vacuum pressure at any time.

According to the third aspect of the present invention, the rotationally unbalanced state can be changed from the rotationally unbalanced state by the vacuum exhaust hole and the vacuum sealing means formed on the outer peripheral surface of the housing to the rotationally balanced state by the adjusting weight. It becomes possible.

According to the fourth aspect of the present invention, since the measuring element for measuring the vacuum pressure or temperature is embedded in the wall surface of the vacuum vessel, the pressure or temperature of the vacuum vessel can be easily measured. According to the invention corresponding to claim 5, since the sliding ring is provided on the outer peripheral portion of the rotating shaft, the pressure, the temperature, and the like of the vacuum vessel can be monitored as needed.

According to the sixth aspect of the present invention, since there is no need to provide a cooling refrigerant conveying groove, the shaft sealing means has a simple structure. According to the invention corresponding to claim 7, since the projection is formed on the outer peripheral surface of the housing, the housing can be in a rotationally balanced state.

[0021]

Embodiments of the present invention will be described below in detail with reference to the drawings. <First Embodiment> FIG. 1 is a sectional view in the axial direction of a shaft sealing mechanism which is a part of a first embodiment of the vacuum vessel apparatus of the present invention. Bearing 4, housing 5,
It comprises a permanent magnet 6, a magnetic fluid 7, and a vacuum sealing means 9.

That is, the housing 5 is cylindrical, and a vacuum exhaust hole 8 communicating with the inside thereof is formed in a part of the wall surface. Vacuum sealing means 9 is attached. The rotary shaft 1 is integrally connected to a vacuum container 14 at one end in the axial direction, and has an axial communication hole 1a formed on the outer peripheral surface of the rotary shaft 1 so as to communicate with the vacuum container 14. The rotating shaft 1 is rotatably supported by bearings 4, 4 disposed at intervals on both ends in the axial direction inside the housing 5. The magnetic poles 2 and 3 are arranged and fixed on the inner peripheral surface of the housing 1 at a distance from each other in the axial direction.
Are arranged to be formed.

The magnetic fluid 7 is stored in a minute gap δ formed between the magnetic poles 2 and 3 and the outer peripheral surface of the rotating shaft 1.
The permanent magnets 6 are provided at intervals between the magnetic poles 2 and 3 and are arranged in plural numbers in the circumferential direction so that a closed magnetic path is formed between the two pairs of magnetic poles 2 and 3 and the magnetic fluid 7. Has become. As described above, the magnetic poles 2 and 3, the permanent magnet 6, and the housing 5 are integrally formed, and the shaft sealing mechanism of this integrated structure provides the magnetic force of the permanent magnet 6 between the rotating shaft 1 and the magnetic poles 2 and 3. , And is configured to rotate following the rotation of the rotating shaft 1.

In order to rotate the vacuum vessel apparatus of the first embodiment constructed as described above, a vacuum exhaust pipe (not shown) is attached to the vacuum sealing means 9 attached to the vacuum exhaust hole 8, and the vacuum sealing is performed. After the inside of the vacuum vessel 14 connected to the communication hole 1a of the rotating shaft 1 is evacuated by the operation of the means 9, the vacuum exhaust pipe is removed from the vacuum sealing means 9,
What is necessary is just to operate a vacuum container apparatus. In this case, the shaft sealing mechanism receiver 4 including the magnet 6, the magnetic poles 2, 3 and the magnetic fluid 7 follows the rotation of the rotating shaft 1. Therefore, as compared with the above-described conventional apparatus, the rotational speed difference between the rotating shaft 1 and the magnetic poles 2 and 3 is reduced, and the friction and the stirring of the magnetic fluid 7 are reduced by this amount,
The magnetic fluid can be used in a state equivalent to a rotating stationary field.
For this reason, not only the cooling refrigerant transport groove provided in the magnetic pole to suppress the heat generation of the magnetic fluid, which was required in the above-described conventional apparatus, is unnecessary, but also it is not necessary to perform indirect cooling.
At the same time, there is no need for a supply and transport system for cooling refrigerant. As a result, the reliability of the first embodiment is improved.

<Second Embodiment> FIG. 2 is a sectional view showing a part of a second embodiment of the vacuum vessel apparatus according to the present invention, which is viewed in a direction perpendicular to the axial direction of the rotary shaft 1 in FIG. FIG.
The difference from the first embodiment is that a vacuum exhaust pipe 10, a rotation braking mechanism 11, and a rotation fixing mechanism 12 are newly added. That is, the housing 5
Brake mechanism 1 that puts brakes into a braking state without stopping rotation
1 and a rotation fixing mechanism 12 provided on the outer peripheral portion of the housing 5 to stop the rotation of the housing 5 and maintain this state.

According to the second embodiment configured as described above, the following operation and effect can be obtained in addition to the operation and effect of the first embodiment. That is, the pressure in the vacuum container (14 in FIG. 1) may increase due to degassing from the constituent materials and the part contact surface, etc. To improve the vacuum pressure, the rotation of the vacuum container 14 must be stopped. The rotation braking mechanism 11 disposed on the outer periphery of the housing 5 can be operated, and the rotation stop mechanism can be maintained by the rotation fixing mechanism 12. Since the housing can be arbitrarily stopped by the rotation braking mechanism 11 and the rotation fixing mechanism 12 of the housing 5, the vacuum sealing in the vacuum exhaust hole is released without stopping the rotation of the vacuum vessel, and the vacuum exhaust pipe 10 is connected. Thus, the vacuum pressure can be improved at any time.

<Third Embodiment> FIG. 3 is a cross-sectional view showing a part of a third embodiment of the vacuum vessel device of the present invention, as viewed in a direction perpendicular to the axial direction of the housing 5 of FIG. FIG. 4 is a cross-sectional view, which is different from the first embodiment in that the position is shifted by 180 degrees with respect to the vacuum sealing means 9 formed in the housing 5.
The adjustment weight 13 is newly provided.

The housing 5 is configured such that the rotation of the rotating shaft 1
Following rotation is performed by the rolling of No. 3. When the rotating shaft 1 rotates at a high speed, the housing 5 must follow the rotation in its rotation range and at the same time rotate in a balanced state.

For this reason, in the first and second embodiments, the housing 5 is provided with the vacuum exhaust holes 8 and the vacuum sealing means 9, so that the housing 5 is in a rotationally unbalanced state. Therefore, in the third embodiment, the adjustment weights 13 equivalent to the vacuum evacuation holes 8 on the outer periphery of the housing 5 and the vacuum sealing means 9 are disposed at positions different by 180 degrees, so that the equilibrium state is obtained when the housing 5 rotates. Rotate with.

<Fourth Embodiment> FIG. 4 is a sectional view showing a fourth embodiment of the vacuum vessel device of the present invention.
A new vacuum pressure gauge 15, a measuring wire 16 and a sliding ring 1
7 and a brush 18.

That is, a vacuum pressure gauge 15 is buried in a fraction 14a in the direction perpendicular to the axis constituting the vacuum vessel 14, and a sliding line arranged on the outer periphery of the rotary shaft 1 with a measurement line 16 from the vacuum pressure gauge 15 is provided. It is connected to a ring 17 so that a vacuum pressure can be detected by a brush 18.

According to the fourth embodiment configured as described above, the following operation and effect can be obtained in addition to the operation and effect of the first embodiment. That is, the free rotation of the housing 5 is not restricted, and the vacuum pressure can be monitored at all times or at any time, and the temperature may be monitored instead of the vacuum pressure gauge 15 instead of the temperature gauge.

Now, suppose that in FIG. 4, a vacuum pressure measurement hole (not shown) communicating with the vacuum from the vacuum vessel 14 is provided in the housing 5, and a pressure gauge is attached to the vacuum pressure measurement hole. However, with such a configuration, there is a problem that it is difficult to hold in a rotating field including rotation equilibrium, and wiring of a measurement line cannot be rotated. Therefore, it is essential not to dispose a measuring device for monitoring the vacuum pressure or the temperature on the freely rotating housing 5 at all times or at any time, and the embodiment of FIG. 4 satisfies this.

<Fifth Embodiment> The same configuration as that of the fourth embodiment (the embodiment of FIG. 4) may be applied to the second embodiment (the embodiment of FIG. 2). Not only the same operation and effect as the second embodiment can be obtained, but also the operation and effect of the fourth embodiment can be obtained.

<Sixth Embodiment> FIGS. 5 to 7 show a sixth embodiment of the present invention.
It is a figure for explaining an example. FIG. 5 is a view for explaining the elimination of the cooling coolant conveying grooves 2a and 3a from the magnetic poles 2 and 3 in the embodiment described above. FIG. The magnetic fluid 7 stored in the minute gap δ between the magnetic poles 2 and 3 and the rotating shaft 1 generates heat due to the friction associated with the rotation of the rotating shaft 1, and therefore the magnetic poles 2 and 3 include FIG. There is a problem that the system price rises, for example, requiring the cooling refrigerant transport grooves 2a and 3a as shown in FIGS. 6 and 7, and a cooling refrigerant supply / transport system (not shown).

In the first embodiment, since the magnetic poles 2 and 3 follow the rotation of the rotating shaft 1, the friction of the magnetic fluid 7 is reduced and the heat generation is suppressed. The cooling coolant conveying grooves 2a and 3a shown in FIGS. 5 to 7 are intended to indirectly cool the heat generated by the magnetic fluid 7 by cooling the magnetic poles 2 and 3. However, the shaft sealing mechanism that suppresses the heat needs cooling. Therefore, a simple configuration without the cooling coolant conveying grooves 2a, 3a, that is, a magnetic pole 2, 3 and a shaft sealing mechanism as shown in FIG. 1 is achieved.

<Seventh Embodiment> FIG. 8 is an axially upper half sectional view of a seventh embodiment of the vacuum vessel apparatus according to the present invention. A projection 5a having a new screw hole 5b in the direction is formed.

With such a configuration, the housing 5 can be rotated in a balanced manner, thereby improving the long-term reliability of not only the bearing 4 but also the magnetic fluid 7 itself. For example, in the embodiment shown in FIG. 1, the housing 5 containing the magnetic poles 2 and 3 and the magnet 6 may be assembled and provided to a high-speed rotation field, even if the manufacturing accuracy of each component is high. Rotational imbalance may occur. Therefore,
In the seventh embodiment, a projection 5a formed on the outer periphery of the housing 5
By partially grinding the magnet, the magnetic poles 2 and 3 and the magnet 6
In the housing 5, the rotational unbalance due to the built-in assembly can be balanced by adjusting the weight.

[0039]

According to the present invention, the shaft sealing mechanism that rotates following the rotation of the rotating shaft makes it possible to reduce the frictional heating of the magnetic fluid stored in the minute gap between the rotating shaft and the magnetic pole. A container device can be provided.

[Brief description of the drawings]

FIG. 1 is an axial sectional view of a shaft sealing mechanism of a vacuum vessel according to a first embodiment of the present invention.

FIG. 2 is a sectional view taken along a line perpendicular to the axis of FIG. 1 according to a second embodiment of the present invention.

FIG. 3 is a sectional view taken along a direction perpendicular to an axis of a housing according to a third embodiment of the present invention.

FIG. 4 is an axial sectional view of a shaft sealing mechanism and a vacuum vessel according to fourth and fifth embodiments of the present invention.

FIG. 5 is a partial axial sectional view of a conventional shaft sealing mechanism for explaining a sixth embodiment of the present invention.

FIG. 6 is a modified example of the groove cross-sectional shape of the cooling-coolant conveying groove of the magnetic pole used in the description of the sixth embodiment.

FIG. 7 is a modified example of the groove cross-sectional shape of the cooling-coolant conveying groove of the magnetic pole used in the description of the sixth embodiment.

FIG. 8 is an axial sectional view of a shaft sealing mechanism according to a seventh embodiment of the present invention.

FIG. 9 is a sectional view of a conventional shaft sealing mechanism.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Rotating shaft, 2 ... Magnetic pole, 2a ... Cooling refrigerant conveyance groove, 3 ... Magnetic pole, 3a ... Cooling refrigerant conveyance groove, 4 ... Bearing, 5 ... Housing, 5a ... Projection, 5b ... Screw hole, 6 ... Permanent magnet, 7 ... magnetic fluid, 8 ... vacuum exhaust hole, 9 ... vacuum sealing means, δ ... micro gap, 10 ... vacuum exhaust pipe, 11 ... rotation braking mechanism, 12 ...
Rotation and fixing mechanism, 13: adjustment weight, 14: vacuum vessel, 14a
... End plate, 15 ... Vacuum pressure gauge, 16 ... Measurement line, 17 ...
Slide ring, 18 ... brush.

Claims (7)

(57) [Claims] 1. A cylindrical housing having vacuum sealing means, and a bearing rotatably supported by bearings disposed at an inner peripheral surface of the housing at an axial end portion with an interval therebetween, and A vacuum vessel connected to the axial end side, a rotating shaft having a communication path capable of communicating with the inside of the vacuum vessel, and fixedly arranged on the inner peripheral surface of the housing at intervals in the axial direction, and A pair of magnetic poles arranged such that a minute gap is formed with respect to the outer peripheral surface of the rotating shaft, a magnetic fluid stored in the minute gap formed between the magnetic pole and the outer peripheral surface of the rotating shaft, A plurality of permanent magnets arranged in the circumferential direction, a plurality of permanent magnets forming a closed magnetic circuit between the pair of magnetic poles and the magnetic fluid, and With rotation, the magnetic pole, the permanent Stone, vacuum container unit in which the housing is to follow rotate integrally. 2. A cylindrical housing having vacuum sealing means, and rotatably supported by bearings arranged at an inner peripheral surface of the housing at an axial end portion with an interval therebetween, and A vacuum vessel connected to the axial end side, a rotating shaft having a communication path capable of communicating with the inside of the vacuum vessel, and fixedly arranged on the inner peripheral surface of the housing at intervals in the axial direction, and A pair of magnetic poles arranged such that a minute gap is formed with respect to the outer peripheral surface of the rotating shaft, a magnetic fluid stored in the minute gap formed between the magnetic pole and the outer peripheral surface of the rotating shaft, A plurality of permanent magnets that are disposed between the magnetic poles and are disposed in the circumferential direction, and form a closed magnetic path between the pair of magnetic poles and the magnetic fluid; The magnetic pole and the permanent magnet Vacuum container device provided with a rotation locking mechanism magnet fixed or rotates the rotary brake mechanism and the housing brakes relative to the rotation of the fixed housing. 3. The adjusting weight according to claim 1, wherein an adjusting weight is provided on an outer peripheral side of the housing and at a position symmetrical to the vacuum sealing means with respect to an axis of the housing. Vacuum vessel equipment. 4. The vacuum vessel device according to claim 1, wherein a probe for monitoring the pressure or temperature in the vacuum vessel is embedded in a wall of the vacuum vessel. 5. A sliding ring is provided on an outer peripheral portion of the rotating shaft,
3. The vacuum container device according to claim 1, wherein a pressure, a temperature, and the like in the vacuum container can be detected and monitored via a brush. 6. A housing having the magnetic poles and the permanent magnets is configured to rotate in accordance with the rotation of the rotating shaft, and a cooling coolant conveying groove for cooling the magnetic poles is not provided. The vacuum vessel device according to claim 1 or 2. 7. A projection is formed on the outer peripheral surface of the housing along the circumferential direction, and at least one of a hole for attaching a rotating parallel weight to the projection and a grinding portion capable of being ground is formed. The vacuum container device according to claim 1 or 2, wherein