JP3206650B2 - Cooling apparatus for laser oscillator and method for cooling laser oscillator - Google Patents
Cooling apparatus for laser oscillator and method for cooling laser oscillatorInfo
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- JP3206650B2 JP3206650B2 JP17128198A JP17128198A JP3206650B2 JP 3206650 B2 JP3206650 B2 JP 3206650B2 JP 17128198 A JP17128198 A JP 17128198A JP 17128198 A JP17128198 A JP 17128198A JP 3206650 B2 JP3206650 B2 JP 3206650B2
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- cooling
- laser oscillator
- pure water
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Description
【０００１】[0001]
【発明の属する技術分野】本発明は、レーザ発振器用冷
却装置及びレーザ発振器の冷却方法に関するものであ
り、特に詳しくは、冷却用純水を循環させて当該レーザ
発振器を冷却するレーザ発振器用冷却装置及びレーザ発
振器の冷却方法に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laser oscillator cooling device and a laser oscillator cooling method, and more particularly, to a laser oscillator cooling device for circulating cooling water to cool the laser oscillator. And a method for cooling a laser oscillator.
【０００２】[0002]
【従来の技術】従来より、例えば、レーザ発振器に於
て、冷却用純水を使用して当該レーザ発振器を冷却する
方法としては、多くの技術が開示されている。一例とし
て、固体レーザを使用したレーザ発振器用冷却装置の純
水冷却装置として、図４に示すような構造のものが一般
的に使用されている。2. Description of the Related Art Conventionally, many techniques have been disclosed as a method of cooling a laser oscillator using pure water for cooling. As an example, as a pure water cooling device for a laser oscillator cooling device using a solid-state laser, one having a structure as shown in FIG. 4 is generally used.
【０００３】即ち、図４に示す様に、従来の固体レーザ
発振器用冷却装置２０としては、イオン交換樹脂５と熱
交換手段３とが、電源装置２ａ及びレーザ発振部２ｂと
から構成されているレーザ発振器２とシリーズに配置さ
れており、常に全流量をレーザ発振器２に流しながら、
イオン交換樹脂から構成されている当該イオン交換手段
５の流量調整が必要な場合に、バイパス配管を設ける構
成となっていた。That is, as shown in FIG. 4, as a conventional cooling device 20 for a solid-state laser oscillator, an ion exchange resin 5 and a heat exchange means 3 are composed of a power supply device 2a and a laser oscillation section 2b. It is arranged in series with the laser oscillator 2, while always flowing the entire flow rate to the laser oscillator 2,
When the flow rate of the ion exchange means 5 made of an ion exchange resin needs to be adjusted, a bypass pipe is provided.
【０００４】尚、図４に於ける１０は、適宜の流量調節
手段である。この構成では、圧力損失の大きいレーザ発
振器２およびレーザ発振器２と冷却器である熱交換手段
３とをつなぐ配管と同様に圧力損失の大きいイオン交換
手段５が、当該冷却用純水を送り出す液体循環手段１を
構成するポンプとシリーズに配置されるため、当該液体
循環手段１に必要な揚程が大きく、このため、送り出す
冷却用純水の水圧を大きく取りうる大型のポンプもしく
は特殊なポンプが必要であった。Incidentally, reference numeral 10 in FIG. 4 denotes an appropriate flow rate adjusting means. In this configuration, the ion circulating means 5 having a large pressure loss as well as the laser oscillator 2 having a large pressure loss and the pipe connecting the laser oscillator 2 and the heat exchanging means 3 as a cooler are used for liquid circulation for sending out the pure water for cooling. Since it is arranged in series with the pump constituting the means 1, the head required for the liquid circulating means 1 is large. Therefore, a large-sized pump or a special pump capable of taking a large pressure of the pure water for cooling to be sent out is required. there were.
【０００５】その為、コスト並びに電力消費量が増大す
ると共に、当該液体循環手段１の騒音もかなり問題とな
っていた。又、特開平４−１３０７８４号公報には、液
体循環手段に対してレーザ発振器と熱交換手段を経由し
て冷却水を循環させる経路と液体循環手段に対してイオ
ン交換手段を経由して冷却水を循環させる経路とを並列
的に配置したレーザ発振器用冷却装置が示されています
が、係る公知例に於いては、予め定められた固定の条件
下で当該冷却水を異なる経路に流す様に構成されてお
り、従って、レーザ発振器と熱交換手段を経由する経路
に流れる冷却水の流量と、イオン交換手段を経由する経
路に流れる冷却水の流量とは、予め定められた固定した
流量に設定されているものであって、レーザ発振器の作
動状態に応じて異なる経路に流れるそれぞれの冷却液の
流量を調整する様な構成は開示されていない。[0005] Therefore, the cost and the power consumption are increased, and the noise of the liquid circulating means 1 is also a considerable problem. Japanese Patent Laid-Open No. 4-130784 discloses a path for circulating cooling water through a laser oscillator and a heat exchanging means with respect to a liquid circulating means and a cooling water through an ion exchanging means with respect to a liquid circulating means. Although a cooling device for a laser oscillator in which a path for circulating the cooling water is arranged in parallel is shown, in such a known example, the cooling water is caused to flow through different paths under predetermined fixed conditions. Therefore, the flow rate of the cooling water flowing through the path passing through the laser oscillator and the heat exchange means and the flow rate of the cooling water flowing through the path passing through the ion exchange means are set to a predetermined fixed flow rate. However, there is no disclosure of a configuration that adjusts the flow rate of each coolant flowing through different paths according to the operation state of the laser oscillator.
【０００６】更に、特開平５−１３８４２号公報には、
第１と第２の流路を設けたレーザ発振器の冷却装置が示
されていますが、当該公報に於いては、当該レーザ発振
器を動作させる準備段階に於て、当該冷却用純水の純度
を高めておく為に当初は全ての冷却用純水がイオン交換
手段を経由して流され、その後適宜分流する方法が示さ
れていますが、レーザ発振器の作動状態に応じて異なる
経路に流れるそれぞれの冷却液の流量を調整する様な構
成は開示されていない。Further, Japanese Patent Laid-Open No. 5-13842 discloses that
Although a cooling device for a laser oscillator provided with first and second flow paths is shown, in this publication, the purity of the pure water for cooling is adjusted in a preparation stage for operating the laser oscillator. In order to keep it high, all cooling pure water is initially flowed through the ion exchange means, and then a method of diverting as appropriate is shown, but each flowing through different paths according to the operating state of the laser oscillator is shown. No arrangement for adjusting the flow rate of the cooling liquid is disclosed.
【０００７】一方、特開平５−３２７０７２号公報、特
開平６−５８９８１号公報、及び特開平７−２８３４６
６号公報には、それぞれレーザ発振器用冷却装置に関し
て記載されてはいますが、いずれの公報にも、レーザ発
振器の作動状態に応じて異なる経路に流れるそれぞれの
冷却液の流量を調整する様な構成は開示されていない。On the other hand, JP-A-5-327072, JP-A-6-58981, and JP-A-7-28346
No. 6 describes cooling devices for laser oscillators, but in each of the publications, a configuration is used in which the flow rate of each coolant flowing through different paths is adjusted according to the operating state of the laser oscillator. Is not disclosed.
【０００８】[0008]
【発明が解決しようとする課題】従って、本発明の目的
は、上記した従来技術の欠点を改良し、レーザ発振器と
イオン交換樹脂をシリーズに配置する場合よりも圧力損
失が小さくでき、低揚程のポンプを使用する事によって
冷却装置の小型、低消費電力、低騒音、低価格化を実現
可能とするレーザ発振器用冷却装置及びレーザ発振器の
冷却方法を提供するものである。SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to improve the above-mentioned drawbacks of the prior art, to reduce the pressure loss as compared with a case where a laser oscillator and an ion exchange resin are arranged in series, and to achieve a low head. An object of the present invention is to provide a laser oscillator cooling device and a laser oscillator cooling method which can realize a compact cooling device, low power consumption, low noise, and low cost by using a pump.
【０００９】[0009]
【課題を解決するための手段】本発明は上記した目的を
達成する為、以下に示す様な基本的な技術構成を採用す
るものである。即ち、本発明の第１の態様としては、冷
却用純水を熱交換手段又はイオン交換手段の少なくとも
一つの手段を介して、適宜の液体循環手段により、レー
ザ発振器に対して循環供給させて、当該レーザ発振器を
冷却するレーザ発振器用冷却装置に於て、当該液体循環
手段から当該レーザ発振器と熱交換手段を経て当該液体
循環手段に戻る当該冷却用純水の第１の経路と当該液体
循環手段からイオン交換手段を経て当該液体循環手段に
戻る当該冷却用純水の第２の経路とを並列状態に形成配
置せしめたレーザ発振器用冷却装置であって、当該レー
ザ発振器用冷却装置は更に当該第１と第２の経路の少な
くとも一方に当該冷却用純水の貯留手段が設けられてい
ると同時に当該第１と第２の経路にそれぞれ流れる当該
冷却用純水の水量を所定の値に調整しえる水量調整手段
が設けられており、且つ、当該水量調整手段は、当該レ
ーザ発振器に於けるレーザ光発振状態に応答して当該第
１と第２の経路にそれぞれ流れる当該冷却用純水の水量
を調整する様に構成されているレーザ発振器用冷却装置
であり、又、本発明に係る第２の態様としては、冷却用
純水を熱交換手段又はイオン交換手段の少なくとも一つ
の手段を介して、適宜の液体循環手段により、レーザ発
振器に対して循環供給させて、当該レーザ発振器を冷却
するレーザ発振器用冷却装置に於て、当該液体循環手段
から当該レーザ発振器と熱交換手段を経て当該液体循環
手段に戻る当該冷却用純水の第１の経路と当該第１の経
路に対して並列状態に形成配置せしめた当該液体循環手
段からイオン交換手段を経て当該液体循環手段に戻る当
該冷却用純水の第２の経路を設け、当該レーザ発振器の
作動状態に応答して当該第１と第２の経路にそれぞれ流
れる当該冷却用純水の水量を所定の値に調整する様に構
成されたレーザ発振器の冷却方法に於て、当該レーザ発
振器の作動状態は、当該レーザ発振器に於ける発振状態
に基づいて判断する様に構成されているレーザ発振器の
冷却方法である。 In order to achieve the above-mentioned object, the present invention employs the following basic technical structure. That is, as a first aspect of the present invention, the pure water for cooling is circulated and supplied to the laser oscillator by an appropriate liquid circulating means through at least one of the heat exchange means and the ion exchange means, In a cooling device for a laser oscillator for cooling the laser oscillator, a first path of the cooling pure water returning from the liquid circulating unit to the liquid circulating unit via the laser oscillator and a heat exchange unit, and the liquid circulating unit A cooling device for a laser oscillator in which a second path of the pure water for cooling, which returns to the liquid circulation means through the ion exchange means, is formed and arranged in parallel.
The oscillator cooling device further comprises a small number of the first and second paths.
At least one of the cooling water storage means is provided.
At the same time as flowing through the first and second paths, respectively.
Water amount adjusting means for adjusting the amount of pure water for cooling to a predetermined value
And the water amount adjusting means is provided with
Response to the laser light oscillation state of the laser oscillator.
The amount of pure water for cooling flowing through the first and second paths, respectively
A cooling device for a laser oscillator configured to adjust the temperature of the laser oscillator , and as a second aspect according to the present invention, pure water for cooling is at least one of a heat exchange unit and an ion exchange unit. In the laser oscillator cooling device that cools the laser oscillator by circulating and supplying the laser oscillator to the laser oscillator by an appropriate liquid circulating unit through the unit, the liquid circulating unit causes the laser oscillator and the heat exchange unit to circulate. A first path of the cooling pure water returning to the liquid circulation means via the first circulation path and the liquid circulation means formed and arranged in parallel with the first path and returning to the liquid circulation means via the ion exchange means; A second path for cooling pure water is provided, and the amount of the pure cooling water flowing through each of the first and second paths is adjusted to a predetermined value in response to an operation state of the laser oscillator. Done leh At a oscillator cooling method, the laser onset
The operating state of the vibrator is the oscillation state of the laser oscillator.
Of a laser oscillator that is configured to make decisions based on
It is a cooling method .
【００１０】[0010]
【発明の実施の形態】即ち、本発明に係る当該レーザ発
振器用冷却装置及びレーザ発振器の冷却方法は、上記し
た様な技術構成を採用しているので、冷却用純水の循環
経路が、液体循環手段に対してレーザ発振器２側とイオ
ン交換樹脂５側とに並列配置され、然もレーザ発振器２
が発生する発熱量に応じて互いの経路を流れる流量を制
御可能となっている。DESCRIPTION OF THE PREFERRED EMBODIMENTS That is, the laser oscillator cooling device and the laser oscillator cooling method according to the present invention employ the above-described technical configuration. The laser oscillator 2 and the ion-exchange resin 5 are arranged in parallel with respect to the circulation means.
It is possible to control the flow rate flowing through each other's path according to the amount of heat generated.
【００１１】このため、当該冷却装置に搭載する液体循
環手段であるポンプ１に必要とされる最大揚程、つまり
水圧を小さくすることができ、小型化・低騒音化・低価
格化が実現可能となる。Therefore, it is possible to reduce the maximum head required for the pump 1 as the liquid circulating means mounted on the cooling device, that is, the water pressure, and to realize a reduction in size, noise, and cost. Become.
【００１２】[0012]
【実施例】以下に、本発明に係るレーザ発振器用冷却装
置及びレーザ発振器の冷却方法の一具体例の構成を図面
を参照しながら詳細に説明する。即ち、図１は、本発明
に係るレーザ発振器用冷却装置２０の一具体例の構成を
示すブロックダイアグラムであり、図中、冷却用純水を
熱交換手段３又はイオン交換手段５の少なくとも一つの
手段を介して、適宜の液体循環手段１により、レーザ発
振器２に対して循環供給させて、当該レーザ発振器２を
冷却するレーザ発振器用冷却装置２０に於て、当該液体
循環手段１から当該レーザ発振器２と熱交換手段３を経
て当該液体循環手段１に戻る当該冷却用純水の第１の経
路３０と当該液体循環手段１からイオン交換手段５を経
て当該液体循環手段１に戻る当該冷却用純水の第２の経
路４０とを並列状態に形成配置せしめたレーザ発振器用
冷却装置２０が示されている。BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a block diagram showing an embodiment of a laser oscillator cooling apparatus and a laser oscillator cooling method according to the present invention. That is, FIG. 1 is a block diagram showing a configuration of a specific example of the laser oscillator cooling device 20 according to the present invention. In the drawing, pure water for cooling is converted into at least one of the heat exchange means 3 or the ion exchange means 5. The liquid circulating means 1 circulates and supplies the laser oscillator 2 to the laser oscillator 2 by an appropriate liquid circulating means 1 to cool the laser oscillator 2. 2 and a first path 30 of the cooling pure water returning to the liquid circulating means 1 via the heat exchange means 3 and the cooling pure water returning from the liquid circulating means 1 to the liquid circulating means 1 via the ion exchanging means 5. The cooling device 20 for a laser oscillator in which the water second passage 40 is formed and arranged in parallel is shown.
【００１３】本発明に於ける当該レーザ発振器用冷却装
置２０に於いては、例えば、当該第１と第２の経路３
０、４０の少なくとも一方に当該冷却用純水の貯留手段
４が設けられている事が望ましい。又、本発明に於いて
は、当該液体循環手段１は、適宜のポンプ手段で構成さ
れているものであって、従来のレーザ発振器用冷却装置
に於ける様に、水圧を大きく取りうるポンプである必要
はなく、当該冷却用純水の供給水量を大きく設定出来る
構成を有するものである事が望ましく、例えば渦巻き型
ポンプ等が好ましい。In the laser oscillator cooling device 20 of the present invention, for example, the first and second paths 3
It is desirable that at least one of 0 and 40 is provided with the storage means 4 for the pure water for cooling. Further, in the present invention, the liquid circulating means 1 is constituted by an appropriate pump means, and is a pump capable of taking a large water pressure as in a conventional cooling device for a laser oscillator. It is not necessary to have such a configuration, and it is preferable that the configuration has a configuration in which the supply amount of the cooling pure water can be set large. For example, a spiral pump or the like is preferable.
【００１４】本発明に於いては、当該液体循環手段１を
採用する事によって、ポンプの小型化、低消費電力化、
低騒音化が実現可能となる。一方、本発明に於いては、
当該第１の経路３０と第２の経路４０にそれぞれ流れる
当該冷却用純水の水量を任意に調整しえる水量調整手段
８が設けられているものであって、当該水量調整手段８
は、例えば当該レーザ発振器２の発熱量或いは当該レー
ザ発振器に於けるレーザ光発振状態に応答して当該第１
と第２の経路にそれぞれ流れる当該冷却用純水の水量を
調整する様に構成されているものである。In the present invention, the use of the liquid circulating means 1 reduces the size and power consumption of the pump,
Low noise can be realized. On the other hand, in the present invention,
Water amount adjusting means 8 for arbitrarily adjusting the water amount of the pure cooling water flowing through the first path 30 and the second path 40, respectively, is provided.
Corresponds to the amount of heat generated by the laser oscillator 2 or the state of laser light oscillation in the laser oscillator, for example.
And the amount of the pure cooling water flowing through the second path is adjusted.
【００１５】例えば、当該水量調整手段８は、当該レー
ザ発振器２を冷却した後の当該冷却用純水の温度を検出
する温度センサ７を設けておき、当該温度センサ７の出
力情報に応答して当該第１と第２の経路にそれぞれ流れ
る当該冷却用純水の水量を調整する様に構成されている
事も望ましい。より具体的には、当該レーザ発振器２を
冷却した後の当該冷却用純水の温度を検出する温度セン
サ７が当該レーザ発振器２と当該熱交換手段３との間に
設けられている事が望ましく、より詳細な具体例として
は、例えば、当該水量調整手段８は、当該レーザ発振器
２から出る当該冷却用純水の温度が高い場合には、当該
第１の経路３０に流れる当該冷却用純水の水量を増大さ
せると共に当該第２の経路４０に流れる当該冷却用純水
の水量を減少させる様に作動するものである。For example, the water amount adjusting means 8 is provided with a temperature sensor 7 for detecting the temperature of the cooling pure water after cooling the laser oscillator 2, and responds to the output information of the temperature sensor 7. It is also desirable that the amount of the cooling pure water flowing through the first and second paths be adjusted. More specifically, it is desirable that a temperature sensor 7 for detecting the temperature of the cooling pure water after cooling the laser oscillator 2 be provided between the laser oscillator 2 and the heat exchange means 3. As a more detailed specific example, for example, when the temperature of the pure water for cooling emitted from the laser oscillator 2 is high, the water amount adjusting means 8 may be configured to supply the pure water for cooling to the first path 30. And the amount of pure water for cooling flowing through the second path 40 is decreased.
【００１６】係る構成を実現する為には、図１に示す様
に、例えば第２の当該経路４０の一部に適宜の流量制御
手段６、例えば流量調整弁等を設けておき、当該水量調
整手段８からの出力によって、当該流量調整弁の開閉度
を変化させる事によって、当該第２の経路４０を流れる
冷却用純水の水量を変化させる事によって、当該第１の
経路３０を流れる冷却用純水の水量は増加する。In order to realize such a configuration, as shown in FIG. 1, for example, a suitable flow control means 6, for example, a flow control valve, is provided in a part of the second path 40, and the water flow control is performed. The cooling water flowing through the first passage 30 is changed by changing the opening / closing degree of the flow control valve according to the output from the means 8 to change the amount of pure cooling water flowing through the second passage 40. The amount of pure water increases.
【００１７】上記した本発明に係る当該レーザ発振器用
冷却装置２０の具体例に付いてより詳細に説明するなら
ば、図１に示すように、純水（または精製水）を、純水
タンク４内より液体循環手段１の一例であるポンプ１に
てレーザ発振器２に圧送し、レーザ発振器２で発生する
熱を水冷し、暖まった純水を熱交換器３で冷やして純水
タンク４に戻す構成を持つ冷却装置であり、本発明にお
いては、当該液体循環手段１から圧送される純水がレー
ザ発振器２とイオン交換樹脂で構成されるイオン交換手
段５の両方同時に流れるように構成され、イオン交換手
段５側に流れる水量を調節するための流量制御装置６が
備えられている。More specifically, with reference to a specific example of the laser oscillator cooling device 20 according to the present invention, as shown in FIG. 1, pure water (or purified water) is supplied to a pure water tank 4. A pump 1 which is an example of the liquid circulating means 1 is pumped from the inside to a laser oscillator 2, the heat generated by the laser oscillator 2 is water-cooled, and the heated pure water is cooled by a heat exchanger 3 and returned to a pure water tank 4. In the present invention, pure water pumped from the liquid circulating means 1 is configured to flow simultaneously to both the laser oscillator 2 and the ion exchange means 5 composed of an ion exchange resin. A flow control device 6 for adjusting the amount of water flowing to the exchange means 5 is provided.
【００１８】本発明の上記具体例に於いては、図１に示
すように液体循環手段１から圧送される純水がレーザ発
振器２とイオン交換樹脂５の両方同時に並列に流れるよ
うに配管経路３０、４０が構成され、イオン交換手段５
側に流れる水量を調節するための流量制御装置６が備え
られているため、レーザ発振器２側の流量が多く必要な
場合、即ち多量の発熱が生じ、より多くの冷却水が必要
な場合は、流量制御装置６によりイオン交換手段５側に
流す水量を少なくするすることによりレーザ発振器２側
の流量を増加させ、一方、レーザ発振器２側の流量が少
なくて済む場合、即ち発熱がさほど生じない場合は、イ
オン交換手段５側に流す水量を増加させることにより、
純水の電気伝導度を小さく保つことが可能となる。In the above embodiment of the present invention, as shown in FIG. 1, the piping path 30 is provided so that the pure water pumped from the liquid circulating means 1 simultaneously flows in both the laser oscillator 2 and the ion exchange resin 5 in parallel. , 40, and the ion exchange means 5
Since the flow rate control device 6 for adjusting the amount of water flowing to the side is provided, when a large flow rate on the laser oscillator 2 side is required, that is, when a large amount of heat is generated and more cooling water is required, When the flow rate on the laser oscillator 2 side is increased by reducing the amount of water flowing to the ion exchange means 5 side by the flow rate control device 6, on the other hand, when the flow rate on the laser oscillator 2 side is small, that is, when heat is not generated so much Is increased by increasing the amount of water flowing to the ion exchange means 5 side.
The electric conductivity of pure water can be kept small.
【００１９】尚、本実施例では、レーザ発振器２での発
熱量を、レーザ発振器２で暖められた純水の温度を温度
センサ７で測定することにより得ている。また、流量制
御装置６には流量制御バルブやマスフローメータが使用
可能である。本発明に係る当該レーザ発振器用冷却装置
２０の他の具体例としては、図２に示す様に当該水量調
整手段８は、当該レーザ発振器２に供給される投入電力
量に応答して当該第１と第２の経路にそれぞれ流れる当
該冷却用純水の水量を調整する様に構成されているもの
である。In this embodiment, the calorific value of the laser oscillator 2 is obtained by measuring the temperature of pure water heated by the laser oscillator 2 with the temperature sensor 7. A flow control valve or a mass flow meter can be used for the flow control device 6. As another specific example of the cooling device 20 for a laser oscillator according to the present invention, as shown in FIG. And the amount of the pure cooling water flowing through the second path is adjusted.
【００２０】つまり、本具体例に於いては、図２に示す
様に、前記した具体例の発熱量に応じた流量制御を、レ
ーザ発振器２の電源装置２ａからレーザ発振部２ｂに投
入される電力量を測定するか、あるいは動作条件から算
出することにより、発熱量を推定する見込み制御を採用
したものである。即ち、本具体例に於いては、投入電力
量に応じてレーザ発振器２側に流れる流量が増減するよ
う流量制御装置６を水量調整手段８から制御するため、
急激な動作条件の変更に対しても、即時に流量を制御す
ることができる利点がある。That is, in this embodiment, as shown in FIG. 2, the flow control according to the heat generation amount of the above-described embodiment is applied from the power supply device 2a of the laser oscillator 2 to the laser oscillation section 2b. Prospective control for estimating the calorific value by measuring the electric energy or calculating from the operating condition is adopted. That is, in this specific example, the flow rate control device 6 is controlled from the water amount adjusting means 8 so that the flow rate flowing to the laser oscillator 2 side increases or decreases in accordance with the input power amount.
There is an advantage that the flow rate can be immediately controlled even for a sudden change in operating conditions.
【００２１】次に、本発明に係るレーザ発振器用冷却装
置の更に別の具体例としては、図３に示す様に、当該水
量調整手段８は、当該レーザ発振器２に於けるレーザ光
発振状態に応答して当該第１と第２の経路にそれぞれ流
れる当該冷却用純水の水量を調整する様に構成されてい
るものである。即ち、本具体例に於いては、当該水量調
整手段８は、例えば、当該レーザ発振器２ｂからレーザ
光発振出力されている間は、当該第１の経路３０に流れ
る当該冷却用純水の水量を増大させる様に構成されてお
り、又、当該レーザ発振器２からレーザ光発振出力され
ている間は、当該第２の経路４０は閉鎖する様に構成さ
れている事も望ましい。Next, as still another specific example of the cooling device for a laser oscillator according to the present invention, as shown in FIG. In response, the amount of the pure water for cooling flowing through the first and second paths is adjusted. That is, in this specific example, the water amount adjusting means 8 adjusts the water amount of the cooling pure water flowing through the first path 30 while the laser light is oscillated and output from the laser oscillator 2b, for example. It is also preferable that the second path 40 is configured to be closed while the laser light is oscillated and output from the laser oscillator 2.
【００２２】本具体例の構成及び作動についてより詳細
に説明するならば、図３（Ａ）に示す様に、本具体例
は、特にフラッシュランプによるパルス励起固体レーザ
に本発明の冷却器を用いた実施例の構成図である。即
ち、パルス励起固体レーザの場合、図３（Ｂ）に示す様
に、パルス発振光をある決まった繰り返し周波数で続け
て何発か利用するような使われ方をする場合が多い（バ
ーストモード）。The structure and operation of this embodiment will be described in more detail. As shown in FIG. 3A, this embodiment uses the cooler of the present invention particularly for a pulse-pumped solid-state laser using a flash lamp. FIG. 2 is a configuration diagram of an embodiment. That is, in the case of the pulse-pumped solid-state laser, as shown in FIG. 3B, the pulsed light is often used continuously at a certain repetition frequency (burst mode). .
【００２３】それゆえ、バースト中は流量制御装置とし
て使用する開閉バルブ９を閉じ、全流量をレーザ発振器
２側、つまり第１の経路３０に当該冷却用純水を流し、
レーザ発振を行わないで待機状態にいるシマー放電中は
開閉バルブ９を開け、レーザ発振器２側とイオン交換手
段５側の両方同時に冷却用純水を流す２値制御を行うこ
とが可能である。Therefore, during the burst, the opening / closing valve 9 used as a flow control device is closed, and the cooling pure water flows through the laser oscillator 2, that is, the first path 30, for the entire flow.
During simmer discharge, which is in a standby state without performing laser oscillation, the open / close valve 9 is opened, and it is possible to perform binary control in which pure water for cooling is supplied to both the laser oscillator 2 and the ion exchange means 5 at the same time.
【００２４】尚、開閉バルブ９を開けレーザ発振器２側
とイオン交換樹脂５側の両方同時に純水を流す場合の純
水流量のバランスを取るため、開閉バルブ９の前または
後にオリフィス等の流量調整手段１０を使用したり、あ
らかじめ配管の圧力損失や開閉バルブ９のオリフィス径
を調整しておくことが必要である。本実施例は制御が比
較的簡単であり、流量制御装置に安価な開閉バルブを使
用できるという利点がある。In order to balance the flow rate of pure water when the pure water flows simultaneously on both the laser oscillator 2 side and the ion exchange resin 5 side by opening the open / close valve 9, the flow rate of the orifice or the like is adjusted before or after the open / close valve 9. It is necessary to use the means 10 or to adjust the pressure loss of the pipe and the orifice diameter of the on-off valve 9 in advance. This embodiment has the advantage that the control is relatively simple and an inexpensive on-off valve can be used for the flow control device.
【００２５】上記した本発明に係るレーザ発振器用冷却
装置の具体例から理解される様に、本発明に係るレーザ
発振器の冷却方法としては、基本的には、以下の構成を
採用するものである。即ち、冷却用純水を熱交換手段又
はイオン交換手段の少なくとも一つの手段を介して、適
宜の液体循環手段により、レーザ発振器に対して循環供
給させて、当該レーザ発振器を冷却するレーザ発振器用
冷却装置に於て、当該液体循環手段から当該レーザ発振
器と熱交換手段を経て当該液体循環手段に戻る当該冷却
用純水の第１の経路と当該第１の経路に対して並列状態
に形成配置せしめた当該液体循環手段からイオン交換手
段を経て当該液体循環手段に戻る当該冷却用純水の第２
の経路を設け、当該レーザ発振器の作動状態に応答して
当該第１と第２の経路にそれぞれ流れる当該冷却用純水
の水量を任意に調整する様に構成したレーザ発振器の冷
却方法である。As can be understood from the specific example of the laser oscillator cooling device according to the present invention described above, the laser oscillator cooling method according to the present invention basically employs the following configuration. . That is, the cooling water for the laser oscillator is circulated and supplied to the laser oscillator by a suitable liquid circulating means through at least one of the heat exchange means or the ion exchange means, and the cooling water is used for cooling the laser oscillator. In the apparatus, a first path of the cooling pure water returning from the liquid circulating means to the liquid circulating means via the laser oscillator and the heat exchanging means is formed and arranged in parallel with the first path. The second pure water for cooling returned from the liquid circulation means to the liquid circulation means via the ion exchange means.
And a method of cooling the laser oscillator configured such that the amounts of the pure water for cooling flowing through the first and second paths are arbitrarily adjusted in response to the operation state of the laser oscillator.
【００２６】本発明に係る当該レーザ発振器の冷却方法
に於いては、当該レーザ発振器の作動状態は、当該レー
ザ発振器に於ける発熱量に基づいて判断されるものであ
る事が望ましい。又、本発明に係る当該レーザ発振器の
冷却方法に於いては、当該レーザ発振器の作動状態は、
当該レーザ発振器に於ける発振状態に基づいて判断され
るものである事が好ましい。In the laser oscillator cooling method according to the present invention, it is desirable that the operating state of the laser oscillator be determined based on the amount of heat generated in the laser oscillator. In the cooling method of the laser oscillator according to the present invention, the operating state of the laser oscillator is:
It is preferable that the determination be made based on the oscillation state of the laser oscillator.
【００２７】上記具体例に於いては、当該レーザ発振器
からレーザ光発振出力されている間は、当該第１の経路
に流れる当該冷却用純水の水量を増大させる様に構成さ
れている事が望ましく同様に当該レーザ発振器からレー
ザ光発振出力されている間は、当該第２の経路を閉鎖す
る様に構成されている事も望ましい。一方、本発明に係
る当該レーザ発振器の冷却方法に於いては、他の具体例
として、当該レーザ発振器を冷却した後の当該冷却用純
水の温度に応答して当該第１と第２の経路にそれぞれ流
れる当該冷却用純水の水量を調整する様に構成されてい
るものであっても良く、更には、当該レーザ発振器に供
給される投入電力量に応答して当該第１と第２の経路に
それぞれ流れる当該冷却用純水の水量を調整する様に構
成されている様に構成されているものであっても良い。In the above specific example, while the laser light is oscillated and output from the laser oscillator, the amount of the cooling pure water flowing through the first path may be increased. Desirably, it is also desirable that the second path be closed while the laser oscillator oscillates and outputs the laser light. On the other hand, in the method for cooling the laser oscillator according to the present invention, as another specific example, the first and second paths are responsive to the temperature of the pure water for cooling after cooling the laser oscillator. May be configured to adjust the amount of the cooling pure water flowing to each of the first and second cooling water in response to the amount of power supplied to the laser oscillator. The configuration may be such that the amount of the cooling pure water flowing through each of the paths is adjusted.
【００２８】つまり、本発明に於いては、当該レーザ発
振器から出る当該冷却用純水の温度が高い場合には、当
該第１の経路に流れる当該冷却用純水の水量を増大させ
ると共に当該第２の経路に流れる当該冷却用純水の水量
を減少させる様に構成されている事が好ましい。That is, in the present invention, when the temperature of the pure water for cooling emitted from the laser oscillator is high, the amount of the pure water for cooling flowing in the first path is increased and the amount of the pure water for cooling is increased. It is preferable that the configuration is such that the amount of the pure cooling water flowing through the second path is reduced.
【００２９】[0029]
【発明の効果】以上説明したように、本発明のレーザ発
振器用冷却装置では上記した様な構成を採用しているこ
とから、圧力損失の比較的大きいレーザ発振器とイオン
交換樹脂とが並列に配置されているため、レーザ発振器
とイオン交換樹脂をシリーズに配置する場合よりも圧力
損失が小さくでき、低揚程のポンプが使用可能となる。As described above, since the cooling device for a laser oscillator of the present invention employs the above-described configuration, the laser oscillator having a relatively large pressure loss and the ion exchange resin are arranged in parallel. Therefore, the pressure loss can be reduced as compared with the case where the laser oscillator and the ion exchange resin are arranged in series, and a pump with a low head can be used.
【００３０】このため、冷却装置の小型、低消費電力、
低騒音、低価格化が実現可能となる。For this reason, the cooling device has a small size, low power consumption,
Low noise and low cost can be realized.
【図１】図１は、本発明に係るレーザ発振器用冷却装置
の一具体例の構成を示すブロックダイアグラムである。FIG. 1 is a block diagram showing a configuration of a specific example of a laser oscillator cooling device according to the present invention.
【図２】図２は、本発明に係るレーザ発振器用冷却装置
の他の具体例の構成を示すブロックダイアグラムであ
る。FIG. 2 is a block diagram showing the configuration of another specific example of the laser oscillator cooling device according to the present invention.
【図３】図３は、本発明に係るレーザ発振器用冷却装置
の更に別の具体例の構成を示すブロックダイアグラムで
ある。FIG. 3 is a block diagram showing a configuration of still another specific example of the cooling device for a laser oscillator according to the present invention.
【図４】図４は、従来に於けるレーザ発振器用冷却装置
の一例の構成を示すブロックダイアグラムである。FIG. 4 is a block diagram showing a configuration of an example of a conventional laser oscillator cooling device.
１…液体循環手段、ポンプ ２…レーザ発振器 ２ａ…電源装置 ２ｂ…レーザ発振部 ３…熱交換手段 ４…純水貯留タンク ５…イオン交換手段 ６…流量制御装置 ７…温度センサ ８…水量調整手段 ９…開閉バルブ １０…流量調節器 ２０…レーザ発振器用冷却装置 ３０…第１の経路 ４０…第２の経路 DESCRIPTION OF SYMBOLS 1 ... Liquid circulation means, pump 2 ... Laser oscillator 2a ... Power supply device 2b ... Laser oscillation part 3 ... Heat exchange means 4 ... Pure water storage tank 5 ... Ion exchange means 6 ... Flow control device 7 ... Temperature sensor 8 ... Water amount adjustment means 9 Opening / closing valve 10 Flow rate controller 20 Cooling device for laser oscillator 30 First path 40 Second path
Claims (12)
手段の少なくとも一つの手段を介して、適宜の液体循環
手段により、レーザ発振器に対して循環供給させて、当
該レーザ発振器を冷却するレーザ発振器用冷却装置に於
て、当該液体循環手段から当該レーザ発振器と熱交換手
段を経て当該液体循環手段に戻る当該冷却用純水の第１
の経路と当該液体循環手段からイオン交換手段を経て当
該液体循環手段に戻る当該冷却用純水の第２の経路とを
並列状態に形成配置せしめたレーザ発振器用冷却装置で
あって、当該レーザ発振器用冷却装置は更に当該第１と
第２の経路の少なくとも一方に当該冷却用純水の貯留手
段が設けられていると同時に当該第１と第２の経路にそ
れぞれ流れる当該冷却用純水の水量を所定の値に調整し
える水量調整手段が設けられており、且つ、当該水量調
整手段は、当該レーザ発振器に於けるレーザ光発振状態
に応答して当該第１と第２の経路にそれぞれ流れる当該
冷却用純水の水量を調整する様に構成されている事を特
徴とするレーザ発振器用冷却装置。 1. A laser for circulating and supplying cooling pure water to a laser oscillator through at least one of a heat exchange unit and an ion exchange unit by an appropriate liquid circulation unit. In the cooling device for an oscillator, the first pure water for cooling returned from the liquid circulation means to the liquid circulation means via the laser oscillator and the heat exchange means.
In the laser oscillator cooling device was allowed formed and arranged in parallel state from the path and the liquid circulation means and a second path of the cooling purified water back to the liquid circulation means through an ion exchange means
In addition, the cooling device for a laser oscillator further includes the first and the second cooling devices.
A reservoir for the pure water for cooling is provided in at least one of the second paths.
At the same time that steps are provided, the first and second paths
Adjust the flow of the cooling pure water to a specified value.
Means for adjusting the amount of water
The adjusting means controls the laser light oscillation state in the laser oscillator.
In response to the first and second paths, respectively.
It is specially designed that the amount of pure water for cooling is adjusted.
Cooling device for laser oscillator.
からレーザ光発振出力されている間は、当該第１の経路
に流れる当該冷却用純水の水量を増大させる様に構成さ
れている事を特徴とする請求項１記載のレーザ発振器用
冷却装置。 2. The method according to claim 1, wherein the water amount adjusting means is a laser oscillator.
While the laser light is being output from the first path,
Is configured to increase the amount of the pure water for cooling flowing to the
2. The laser oscillator according to claim 1, wherein
Cooling system.
からレーザ光発振出力されている間は、当該第２の経路
を閉鎖する様に構成されている事を特徴とする請求項１
記載のレーザ発振器用冷却装置。 3. The laser oscillator according to claim 2, wherein the water amount adjusting means is a laser oscillator.
While the laser light is being output from the second path,
2. The device according to claim 1, wherein the device is configured to be closed.
A cooling device for a laser oscillator as described in the above.
供給水量を大きく設定出来る構成を有するものである事
を特徴とする請求項１乃至３の何れかに記載のレーザ発
振器用冷却装置。 4. The liquid circulating means is provided with the pure water for cooling.
It must have a configuration that can set a large amount of water supply
The laser emitting device according to any one of claims 1 to 3, wherein
Cooling device for shaker.
手段の少なくとも一つの手段を介して、適宜の液体循環
手段により、レーザ発振器に対して循環供給させて、当
該レーザ発振器を冷却するレーザ発振器用冷却装置に於
て、当該液体循環手段から当該レーザ発振器と熱交換手
段を経て当該液体循環手段に戻る当該冷却用純水の第１
の経路と当該液体循環手段からイオン交換手段を経て当
該液体循環手段に戻る当該冷却用純水の第２の経路とを
並列状態に形成配置せしめたレ ーザ発振器用冷却装置で
あって、当該レーザ発振器用冷却装置は更に当該第１と
第２の経路の少なくとも一方に当該冷却用純水の貯留手
段が設けられていると同時に当該第１と第２の経路にそ
れぞれ流れる当該冷却用純水の水量を所定の値に調整し
える水量調整手段が設けられており、且つ、当該水量調
整手段は、当該レーザ発振器の発熱量に応答して当該第
１と第２の経路にそれぞれ流れる当該冷却用純水の水量
を調整する様に構成されているレーザ発振器用冷却装置
に於て、当該水量調整手段は、当該レーザ発振器に供給
される投入電力量に応答して当該第１と第２の経路にそ
れぞれ流れる当該冷却用純水の水量を調整する様に構成
されている事を特徴とするレーザ発振器用冷却装置。 5. The pure water for cooling is subjected to heat exchange means or ion exchange.
Suitable liquid circulation via at least one of the means
Means to circulate and supply the laser to the laser oscillator.
In a laser oscillator cooling device for cooling the laser oscillator,
The liquid circulating means and the heat exchanger
A first cooling pure water returning to the liquid circulation means via a stage;
From the liquid circulation means and the ion exchange means.
A second path of the cooling pure water returning to the liquid circulation means.
In Les chromatography The oscillator cooling device was allowed formed and arranged in parallel state
In addition, the cooling device for a laser oscillator further includes the first and the second cooling devices.
A reservoir for the pure water for cooling is provided in at least one of the second paths.
At the same time that steps are provided, the first and second paths
Adjust the flow of the cooling pure water to a specified value.
Means for adjusting the amount of water
The adjusting means responds to the amount of heat generated by the laser oscillator.
The amount of pure water for cooling flowing through the first and second paths, respectively
Cooling device for laser oscillator configured to adjust pressure
In the above, the water amount adjusting means supplies the laser oscillator.
The first and second paths in response to the applied power amount.
It is configured to adjust the amount of pure water for cooling that flows respectively
A cooling device for a laser oscillator, characterized in that:
手段の少なくとも一つの手段を介して、適宜の液体循環
手段により、レーザ発振器に対して循環供給させて、当
該レーザ発振器を冷却するレーザ発振器用冷却装置に於
て、当該液体循環手段から当該レーザ発振器と熱交換手
段を経て当該液体循環手段に戻る当該冷却用純水の第１
の経路と当該液体循環手段からイオン交換手段を経て当
該液体循環手段に戻る当該冷却用純水の第２の経路とを
並列状態に形成配置せしめたレーザ発振器用冷却装置で
あって、当該レーザ発振器用冷却装置は更に当該第１と
第２の経路の少なくとも一方に当該冷却用純水の貯留手
段が設けられていると同時に当該第１と第２の経路にそ
れぞれ流れる当該冷却用純水の水量を所定の値に調整し
える水量調整手段が設けられており、且つ、当該水量調
整手段は、当該レーザ発振器の発熱量に応答して当該第
１と第２の経路にそれぞれ流れる当該冷却用純水の水量
を調整する様に構成されているレーザ発振器用冷却装置
に於て、当該水量調整手段は、当該レーザ発振器から出
る当該冷却用純水の温度が高い場合には、当該第１の経
路に流れる当該冷却用純水の水量を増大させると共に当
該第２の経路に流れる当該冷却用純水の水量を減少させ
る様に構成されている事を特徴とするレーザ発振器用冷
却装置。 6. Heat exchange means or ion exchange of pure water for cooling.
Suitable liquid circulation via at least one of the means
Means to circulate and supply the laser to the laser oscillator.
In a laser oscillator cooling device for cooling the laser oscillator,
The liquid circulating means and the heat exchanger
A first cooling pure water returning to the liquid circulation means via a stage;
From the liquid circulation means and the ion exchange means.
A second path of the cooling pure water returning to the liquid circulation means.
Cooling device for laser oscillators formed and arranged in parallel
In addition, the cooling device for a laser oscillator further includes the first and the second cooling devices.
A reservoir for the pure water for cooling is provided in at least one of the second paths.
At the same time that steps are provided, the first and second paths
Adjust the flow of the cooling pure water to a specified value.
Means for adjusting the amount of water
The adjusting means responds to the amount of heat generated by the laser oscillator.
The amount of pure water for cooling flowing through the first and second paths, respectively
Cooling device for laser oscillator configured to adjust pressure
At a, those water amount adjusting means, exits the laser oscillator
If the temperature of the cooling pure water is high, the first
Increase the amount of the cooling pure water flowing through the
Reducing the amount of the cooling pure water flowing through the second path.
For a laser oscillator, characterized in that
Device.
設けられている事を特徴とする請求項５又は６に記載の
レーザ発振器用冷却装置。 7. The apparatus according to claim 7, further comprising a flow rate adjusting means in said second path.
7. The method according to claim 5, wherein
Cooling device for laser oscillator.
手段の少なくとも一つの手段を介して、適宜の液体循環
手段により、レーザ発振器に対して循環供給 させて、当
該レーザ発振器を冷却するレーザ発振器用冷却装置に於
て、当該液体循環手段から当該レーザ発振器と熱交換手
段を経て当該液体循環手段に戻る当該冷却用純水の第１
の経路と当該第１の経路に対して並列状態に形成配置せ
しめた当該液体循環手段からイオン交換手段を経て当該
液体循環手段に戻る当該冷却用純水の第２の経路を設
け、当該レーザ発振器の作動状態に応答して当該第１と
第２の経路にそれぞれ流れる当該冷却用純水の水量を所
定の値に調整する様に構成されたレーザ発振器の冷却方
法に於て、当該レーザ発振器の作動状態は、当該レーザ
発振器に於ける発振状態に基づいて判断する様に構成さ
れている事を特徴とするレーザ発振器の冷却方法。 8. The cooling pure water is heat-exchanged or ion-exchanged.
Suitable liquid circulation via at least one of the means
By means to circulate supplied to the laser oscillator, those
In a laser oscillator cooling device for cooling the laser oscillator,
The liquid circulating means and the heat exchanger
A first cooling pure water returning to the liquid circulation means via a stage;
And the first path are formed and arranged in parallel with the first path.
From the circulated liquid circulation means via the ion exchange means.
A second path for the cooling pure water returning to the liquid circulation means is provided.
In response to the operating state of the laser oscillator,
The amount of the cooling pure water flowing through the second path is determined.
Cooling method of laser oscillator configured to adjust to a fixed value
In the method, the operating state of the laser
It is configured to judge based on the oscillation state in the oscillator
A cooling method for a laser oscillator, characterized in that the cooling method is performed.
されている間は、当該第１の経路に流れる当該冷却用純
水の水量を増大させる様に構成されている事を特徴とす
る請求項８記載のレーザ発振器の冷却方法。9. The apparatus according to claim 8, wherein the amount of the pure cooling water flowing through the first path is increased while the laser light is being output from the laser oscillator. The cooling method of the laser oscillator described in the above.
力されている間は、当該第２の経路を閉鎖する様に構成
されている事を特徴とする請求項８記載のレーザ発振器
の冷却方法。10. The cooling method for a laser oscillator according to claim 8, wherein the second path is closed while the laser light is being output from the laser oscillator.
換手段の少なくとも一つの手段を介して、適宜の液体循
環手段により、レーザ発振器に対して循環供給させて、
当該レーザ発振器を冷却するレーザ発振器用冷却装置に
於て、当該液体循環手段から当該レーザ発振器と熱交換
手段を経て当該液体循環手段に戻る当該冷却用純水の第
１の経路と当該第１の経路に対して並列状態に形成配置
せしめた当該液体循環手段からイオン交換手段を経て当
該液体循環手段に戻る当該冷却用純水の第２の経路を設
け、当該レーザ発振器の作動状態に応答して当該第１と
第２の経路にそれぞれ流れる当該冷却用純水の水量を所
定の値に調整する様に構成されたレーザ発振器の冷却方
法であって、且つ当該レーザ発振器の作動状態は、当該
レーザ発振器に於ける発熱量に基づいて判断されるレー
ザ発振器の冷却方法に於て、当該レーザ発振器に供給さ
れる投入電力量に応答して当該第１と第２の経路にそれ
ぞれ流れる当該冷却用純水の水量を調整する様に構成さ
れている事を特徴とするレーザ発振器の冷却方法。 11. The cooling pure water is heat-exchanged or ion-exchanged.
Suitable liquid circulation via at least one of the
By the ring means, circulating supply to the laser oscillator,
Cooling device for laser oscillator that cools the laser oscillator
Heat exchange with the laser oscillator from the liquid circulation means
The cooling pure water returning to the liquid circulation means through the means
The first path and the first path are formed and arranged in parallel with each other.
From the liquid circulation means through the ion exchange means.
A second path for the cooling pure water returning to the liquid circulation means is provided.
In response to the operating state of the laser oscillator,
The amount of the cooling pure water flowing through the second path is determined.
Cooling method of laser oscillator configured to adjust to a fixed value
And the operating state of the laser oscillator is
The laser is determined based on the heat generated by the laser oscillator.
In the method of cooling the oscillator, the laser
To the first and second paths in response to the input power
It is configured to adjust the amount of the cooling pure water flowing
A cooling method for a laser oscillator, characterized in that the cooling method is performed.
換手段の少なくとも 一つの手段を介して、適宜の液体循
環手段により、レーザ発振器に対して循環供給させて、
当該レーザ発振器を冷却するレーザ発振器用冷却装置に
於て、当該液体循環手段から当該レーザ発振器と熱交換
手段を経て当該液体循環手段に戻る当該冷却用純水の第
１の経路と当該第１の経路に対して並列状態に形成配置
せしめた当該液体循環手段からイオン交換手段を経て当
該液体循環手段に戻る当該冷却用純水の第２の経路を設
け、当該レーザ発振器の作動状態に応答して当該第１と
第２の経路にそれぞれ流れる当該冷却用純水の水量を所
定の値に調整する様に構成されたレーザ発振器の冷却方
法であって、且つ当該レーザ発振器の作動状態は、当該
レーザ発振器に於ける発熱量に基づいて判断されるレー
ザ発振器の冷却方法に於て、当該レーザ発振器から出る
当該冷却用純水の温度が高い場合には、当該第１の経路
に流れる当該冷却用純水の水量を増大させると共に当該
第２の経路に流れる当該冷却用純水の水量を減少させる
様に構成されている事を特徴とするレーザ発振器の冷却
方法。 12. The cooling pure water is heat-exchanged or ion-exchanged.
Suitable liquid circulation via at least one of the
By the ring means, circulating supply to the laser oscillator,
Cooling device for laser oscillator that cools the laser oscillator
Heat exchange with the laser oscillator from the liquid circulation means
The cooling pure water returning to the liquid circulation means through the means
The first path and the first path are formed and arranged in parallel with each other.
From the liquid circulation means through the ion exchange means.
A second path for the cooling pure water returning to the liquid circulation means is provided.
In response to the operating state of the laser oscillator,
The amount of the cooling pure water flowing through the second path is determined.
Cooling method of laser oscillator configured to adjust to a fixed value
And the operating state of the laser oscillator is
The laser is determined based on the heat generated by the laser oscillator.
In the method of cooling the oscillator, exit from the laser oscillator
When the temperature of the cooling pure water is high, the first path
The amount of the pure water for cooling flowing to
The amount of the cooling pure water flowing in the second path is reduced.
Cooling of laser oscillator characterized by being configured in the following manner
Method.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17128198A JP3206650B2 (en) | 1998-06-18 | 1998-06-18 | Cooling apparatus for laser oscillator and method for cooling laser oscillator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17128198A JP3206650B2 (en) | 1998-06-18 | 1998-06-18 | Cooling apparatus for laser oscillator and method for cooling laser oscillator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2000012926A JP2000012926A (en) | 2000-01-14 |
| JP3206650B2 true JP3206650B2 (en) | 2001-09-10 |
Family
ID=15920425
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17128198A Expired - Lifetime JP3206650B2 (en) | 1998-06-18 | 1998-06-18 | Cooling apparatus for laser oscillator and method for cooling laser oscillator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3206650B2 (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100823586B1 (en) * | 2001-12-22 | 2008-04-21 | 주식회사 포스코 | Device for changing alkali ion resin |
| JP4317722B2 (en) | 2003-08-28 | 2009-08-19 | 浜松ホトニクス株式会社 | Solid state laser equipment |
| JP2014229720A (en) * | 2013-05-22 | 2014-12-08 | ビアメカニクス株式会社 | Gas laser oscillator, and laser processing device |
| CN107742817A (en) * | 2017-11-21 | 2018-02-27 | 山东省科学院激光研究所 | Laser cooling-cycle device and laser device |
| KR102092008B1 (en) * | 2018-05-28 | 2020-03-24 | 원텍 주식회사 | Laser having a cooling part in which a closed cooling loop is formed |
| CN113612104B (en) * | 2021-07-20 | 2022-08-19 | 酷凌时代科技(浙江)有限公司 | Heat dissipation system of high-power gap laser and using method thereof |
-
1998
- 1998-06-18 JP JP17128198A patent/JP3206650B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JP2000012926A (en) | 2000-01-14 |
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