JP3204408B2 - Magnetic head manufacturing equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

2. Description of the Related Art Thin film type magnetic heads for recording / reproducing information on / from a magnetic disk in a magnetic disk drive have been widely used instead of the conventional monolithic type. As a thin-film magnetic head, there has been proposed an integrated thin-film head in which a magnetic head element portion and a spring arm portion are integrally formed by thin-film technology.

[0002] The present invention relates to an apparatus for observing and evaluating the state of a sliding surface of a slider in a final step of manufacturing a thin film magnetic head, and then evaluating and evaluating the magnetic characteristics.

[0003]

[Prior art]

[Outline of Thin-Film Magnetic Head Integrated with Spring Arm] FIGS. 6 to 9 show the applicant of the present invention in Japanese Patent Application No. 3-178884.
FIG. 6 is a plan view and a side view showing the entirety of the integrated thin film head proposed in the above-mentioned publication. Reference numeral 1 denotes a spring arm portion, at the tip of which a magnetic head element portion 2 is formed, and at the tip of the magnetic head element portion 2, a sliding surface 3 is formed so as to protrude.

FIG. 7 is a longitudinal sectional view of the integrated thin film head. The magnetic head element section 2 includes a core 4 made of a magnetic material.
Then, the coil 5 is wound by a thin film technique, and the lead pattern 6 of the coil 5 is connected to the bonding pad 8 at the root (mounting portion) 7 of the spring arm 1.

As shown in FIG. 9, a magnetic pole 9 extending toward the magnetic disk D is connected to the tip of the core 4 and is covered with a protective film 21. On the other hand, the magnetic disk D
A rear end yoke 10 extending to the side is formed. A return yoke 11 is connected to the rear end yoke 10 in parallel with the core 4. In addition, each of the above-mentioned parts is manufactured by sequentially laminating as shown by a chain line by a thin film technique.

The integrated thin film head has a sliding surface 3 at the tip.
When an information signal is supplied to the coil 5 in a state where the magnetic disk D is in contact with the magnetic disk D rotating in the direction of the arrow, the magnetic pole 9
The magnetic flux 12 between the magnetic disk D and the return yoke 11
Permeation through the interior allows perpendicular magnetic recording.

FIG. 8A is a plan view showing a state in which the integrated thin-film head is mounted on a magnetic disk drive. The root 7 of the integrated thin-film head H is fixed to a mounting arm 13, and the mounting arm 13 is connected to a positioner. Fixed to 14. Same figure
4B is an enlarged side view showing a mounting portion of the integrated thin film head, and shows a state where the sliding surface 3 at the tip of the integrated thin film head H is pressed against the magnetic disk D, and the spring arm portion 1 is mounted.
Is mounted so that it bends somewhat.

[Conventional Magnetic Head Evaluation Method] When the integrated thin film head is completed, the surface of the slider portion s shown in FIG.
In addition to exposing the magnetic pole 9 by polishing 3a, it is necessary to evaluate the contact state between the sliding surface 3 and the magnetic disk surface, and to measure and evaluate the magnetic characteristics by recording / reproducing information on the magnetic recording medium. There is.

FIG. 10 is a diagram showing a conventional magnetic head evaluation apparatus. The lapping disk D1 is attached to the spindle 22 driven by the motor M, but can be removed and replaced with a glass disk D2 or a magnetic disk D3. 23 is a carriage, and its head arm 24
, The spring arm 1 is attached.

In this apparatus, the slider s at the end is sought on the lapping disk D1, and the sliding surface 3 of FIG. 9 is pressed against the lapping sheet surface of the lapping disk D1, whereby the tip of the magnetic pole 9 in FIG. Polish until wrap is exposed.

Next, the wrapping disk D1 is removed, and the glass disk D2 is mounted on the spindle 22 and rotated to bring the sliding surface 3 into pressure contact with the glass disk D2, and the interference fringes on the sliding surface 3 from the opposite side of the glass disk D2. To observe and evaluate the finished state of the sliding surface 3 and the contact state of the magnetic pole 9 with the magnetic disk surface.

When the magnetic pole 9 is exposed by lap-polishing the sliding surface 3 with the lapping disk D1, it is impossible to completely wrap the sliding surface 3 in a plane. Excessive wrapping results in an arc.
For this reason, it is necessary to evaluate the finished state of the sliding surface 3 for each magnetic head, and adjust the mounting angle of the spring arm unit 1 to check whether the exposed tip of the magnetic pole 9 is surely in contact with the magnetic disk surface. The evaluation is performed using interference fringes, and the mounting angle of the spring arm is determined.

As a result, if the grinding state of the sliding surface 3 is poor or the tip of the magnetic pole 9 does not contact the surface of the glass disk D2, remove the glass disk D2, attach the wrapping disk D1 again, and slide the disk. After the lapping of the surface 3 is performed again, the glass disk D2 is replaced again and the evaluation is performed.

As a result of the evaluation using the glass disk D2, if it is determined to be non-defective, the glass disk D2 is removed,
The test magnetic disk D3 is mounted on the spindle 22, and the information is actually recorded / reproduced to measure and evaluate the magnetic characteristics and error occurrence status. This is not limited to the integrated thin-film head, but is substantially the same for conventional thin-film magnetic heads.

[0015]

However, in the apparatus as shown in FIG. 10, since the disk has to be replaced for each process, the result of the evaluation using the glass disk D2 in particular shows that the sliding surface wrapped by the wrapping disk D1 The magnetic head may be damaged when processing is performed, and the workability is poor, which is not suitable for mass production.

Further, in the apparatus as shown in the drawing, it is difficult to adjust or determine the mounting angle of the spring arm 1 so that the magnetic pole 9 is securely brought into contact with the magnetic disk surface. Lack.

Moreover, like an integrated thin film head,
When the slider section becomes thinner, it is difficult to load / unload the magnetic head under test on the disk. That is, as shown in FIG.
Is the glass disc by the spring force of the spring arm 1.
When the magnetic head is located outside the glass disk D2, as shown in FIG. 3B, the spring arm 1 is bent by the spring force because the magnetic head is pressed against D2.

Therefore, the magnetic head is connected to a glass disk.
Before seeking on D2, the load / unload bar 25 was advanced, and the carriage 23 was sought on the glass disk D2 in a state where the tip of the spring arm 1 was straightened against the spring force. Thereafter, it is necessary to retreat the load / unload bar 25 from the glass disk D2.

However, as shown in FIG. 3C, when the slider s is thinned due to the progress of the thin film technology, or when the slide surface 3 has a small protrusion amount as in the above-mentioned integrated thin film head, a spring arm is required. It becomes impossible to insert the load / unload bar 25 into the gap h between the part 1 and a disk such as the glass disk D2.

The technical problem of the present invention is to pay attention to such a problem, and it is possible to efficiently perform a series of operations such as polishing finishing of a sliding surface of a magnetic head and subsequent evaluation.
In addition, during evaluation work, the mounting angle of the spring arm can be easily adjusted or determined.
In addition, it is to facilitate loading / unloading to / from a disk.

[0021]

FIGS. 1A and 1B are diagrams for explaining the basic principle of a magnetic head manufacturing apparatus according to the present invention. FIG. 1A is a front view, FIG. 1B is a plan view of a disk, and FIG. It is a right view of the angle adjustment apparatus of a moving surface. The invention of claim 1 is a single circle
Seek the magnetic head on plate d to polish and finish the sliding surface
Continuous observation and evaluation of the beam state and measurement and evaluation of magnetic properties
YAW angle adjustment
A vertical adjustment stage 27 provided on a rotary plate 26 for
Between the head arm 28 for mounting the pulling arm
In addition, rolling direction adjuster 29 and pitching direction adjuster 30
Intervening.

According to a second aspect of the present invention, the magnetic head is a magnetic head.
The disc d to be polished has a lap abrasive grain region d1 on the plate.
The three regions of the glass region d2 and the magnetic film region d3 are concentric.
It is arranged in.

According to a third aspect of the present invention, the head arm 28 includes a carriage-side head arm 28c and a head-side head arm 28.
h and the head arm 28
Are connected by hinge means 31 so that the head-side head arm 28h bends in a direction to withdraw from the disk surface.

The carriage-side head arm
Positioning stopper at the end of 28c to prevent the head-side head arm 28h from moving excessively toward the disk
32 are fixed. The head-side head arm 28h is disposed above and below the head-side head arm 28h.
A pair of loading / unloading means 33 moving up and down with
Has 34.

[0025]

According to the first aspect of the present invention, the rotary disk for adjusting the YAW angle is provided.
The vertical adjustment stage 27 provided above and the spring arm
Between the head arm 28 for mounting the
Pitch direction adjuster 29 and pitching direction adjuster 30
With a single device, the head arm 28 can be
The vertical position of the sliding surface of the attached magnetic head and the YAW
In addition to corners, you can adjust the rolling direction and pitching direction
You.

Therefore, the sliding of the slider of the magnetic head
A single device for all directions required for surface orientation
Can be adjusted and the adjustment value is retained.
Work and evaluation can be performed, and workability is improved.

As described in claim 2, one disk d is
Area d1 of the abrasive grains, area d2 of the glass, and area d3 of the magnetic film.
Since the regions are arranged concentrically, one disk d
In the above, the sliding surface is lap-polished in the area d1 of the lap abrasive.
Then, seek to the glass area d2 to finish the sliding surface.
Observation and evaluation of the state of the magnetic film, etc.
Magnetic properties and the like can be measured and evaluated.

Therefore, the three operations are performed on a single disk d.
Can be performed continuously on a
Since there is no need to change, the work efficiency is improved. Also, magnetic
There is no need to unload the air head outside the disk d.
Each work with the slider s in the same posture
And the reliability of observation and measurement evaluation is improved.

In the apparatus according to the third aspect, the magnetic head is sought on the disk d in a state where the head-side head arm 28h is bent away from the disk d by the unloading means. Because it can be loaded on the disk d,
There is no need to move the load / unload means 33, 34 between the disk d and the spring arm 1.

Therefore, even if the slider has a small amount of protrusion of the sliding surface 3 such as a thin magnetic head or an integrated thin film head, the slider can be reliably loaded / unloaded onto the disk d. Further, since the positioning stopper 32 is fixedly provided at the tip of the carriage-side head arm 28c, the contact pressure between the slider s and the disk d can be set accurately.

[0031]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, a description will be given of an embodiment of how a magnetic head manufacturing apparatus according to the present invention is actually embodied. FIG. 2 is a perspective view showing an embodiment of the second aspect of the present invention . In this embodiment, on one glass disk gd, a region d1 of lap abrasive grains, a region d2 of glass, and a region d3 of a magnetic film from the outer peripheral side.
Are arranged concentrically.

Therefore, the glass disk gd is rotated, the magnetic head is sought by the carriage to the region d1 of the outermost lap abrasive grains, and the lap polishing of the sliding surface of the magnetic head is performed. Seek to the area d2 and observe the stripe pattern from the back side to evaluate the shape of the sliding surface 3 and the contact state between the tip of the magnetic pole and the area d2 of the glass.

As a result, if it is normal, the magnetic film is moved to the next region d3 of the magnetic film, information is recorded / reproduced on the magnetic film, and the electromagnetic conversion characteristics and error characteristics are tested. If abnormal
It is moved to the lap abrasive region d1 again, lapping is performed again, and the reevaluation is performed again in the glass region d2. Only in a normal case, the test in the magnetic film region d3 is performed.

In the case of the illustrated example, there are two sets each including a lap abrasive grain region d1, a glass region d2, and a magnetic film region d3. Using the lap abrasive region d1, the glass region d2, and the magnetic film region d3, lapping, sliding surface evaluation, and magnetic property test can be repeated again. In the illustrated example, there are two sets, but if the width of each area is reduced or a large-diameter disc is used,
More than one set is possible, and conversely, only one set is sufficient.

[0035] In this way, the region d1 of the wrap abrasive grains, the region of the glass d2, in Rukoto with a third region of the area d3 of the magnetic film, Ru can be done all the work in one of the disc gd.

[0036]

FIG. 3 is an exploded perspective view showing an embodiment of the present invention . The spring arm 1 supporting the magnetic head slider s is fixed to the head arm 28 via a rigid base 33, and the head arm 28 is connected via a mounting block 34 to a rolling direction adjuster 29 of an attitude adjusting device. Is mounted on the movable part 29a of

The base side of the rolling direction adjuster 29
29b is attached to the movable portion 30a of the pitching direction adjuster 30 via the attachment block 35. The base side 30b of the pitching direction adjuster 30 is attached to the mounting block.
It is attached to the movable part 27a of the vertical adjustment stage 27 via 36. The base side 27b of the vertical adjustment stage 27 is mounted on a rotary disk 26 for adjusting the YAW angle.

In this apparatus, the rotating disk 26 on the base 37
Is rotated, the entire posture adjustment device rotates in a horizontal plane, and the YAW angle of the slider s with respect to the disk d can be adjusted. Further, by rotating the handle 38 to move the movable portion 27a of the up-down direction adjustment stage 27 up and down, the whole magnetic head is moved up and down together with the rolling direction adjuster 29 and the pitching direction adjuster 30 to form a circle. The vertical position of the slider s with respect to the plate surface can be adjusted.

Further, by rotating the knob 39, the movable portion 30a of the pitching direction adjuster 30 is rotated together with the rolling direction adjuster 29 in the longitudinal direction of the spring arm 1 around the slider s. Thus, the pitching direction of the slider s can be adjusted. Then, the knob 40 is rotated to move the movable portion of the rolling direction adjuster 29.
The rolling direction of the slider s can be adjusted by rotating the slider 29a about the longitudinal axis of the spring arm 1 about the slider s.

Each adjusting mechanism connects each handle 38 and knobs 39 and 40 directly to the worm supported on the base side.
The worm gear meshing with the worm is moved to the movable side 27a, 30
a, 29a. Also, the base side 29b of the rolling direction adjuster 29 is attached to the movable part 27a of the vertical adjustment stage 27, and the base side 30b of the pitching direction adjuster 30 is attached to the movable part 29a.
A magnetic head can also be attached to the.

FIGS. 4A and 4B show a conventional thin-film magnetic head assembly. FIG. 4A is a plan view, FIG. 4B is a front view, and FIG. 4C is a right side view. The slider s of the thin film magnetic head is a gimbal
It is attached to the spring arm 1 via 41, and the spring arm 1 is fixed to the rigid base 33. The magnetic head is attached to the carriage or the head arm 28 of the attitude adjusting device shown in FIG.

In such a magnetic head assembly, rolling of the magnetic head is a rotation operation in the direction indicated by arrow θ1, and pitching is a rotation operation in the direction indicated by arrow θ2. The arrow Z direction is the vertical direction, which is the position of the slider s in the vertical direction with respect to the magnetic disk surface.

According to the attitude adjusting apparatus of the present invention, the attitude of the magnetic head attached to the head arm 28 can be adjusted in all directions, and the sliding surface of the magnetic head can be changed by the combination of these. Can be set in any position with respect to the surface.

Therefore, by adjusting the attitude adjusting device while observing the stripe pattern from the back surface of the glass disk in a state where the magnetic head is sought in the glass area d2 in the embodiment of FIG. It can be adjusted so as to have a desired posture with respect to the disk surface, or can be adjusted so that the tip of the magnetic pole 9 at the tip of the sliding surface 3 in FIG. 9 surely contacts the magnetic disk surface.

Since the adjustment value at that time can be read on the scale of each movable portion of the attitude adjusting device, the optimum attitude can be obtained by mounting the magnetic head on the carriage of the magnetic disk drive in an attitude corresponding to the scale value. Thus, it can be mounted on a magnetic disk drive.

As shown in FIG.
Not only a disc having a plurality of work areas d1, d2, and d3 on a single disc, but also discs D1, D2, and D3 are replaced for each work as shown in FIG. 10 to evaluate lap polishing and lapping results. Also, the present invention can be applied to a case where a test of magnetic characteristics is performed.

FIG. 5 is a side view showing an embodiment of the third aspect of the present invention. The head arm 28 is divided into a carriage-side head arm 28c and a head-side head arm 28h, and a hinge 31 is connected between the carriage-side head arm 28c and the head-side head arm 28h.

That is, as shown by the solid line, the head-side head arm 28h is connected so as to bend in the direction of retreating from the disk d. On the side opposite to the hinge 31, a stopper 32 extending to above the head side head arm 28h
Are fixed to the carriage-side head arm 28c.

Therefore, the head-side head arm 28h
However, when the head is retracted from the disk d as shown by the solid line and approaches the disk d as shown by the broken line, the head-side head arm 28h hits the stopper 32 and stops. This prevents the head-side head arm 28h from excessively moving to the disk d side, and also allows the relative position between the magnetic head and the disk surface to be set, thereby achieving high-precision positioning.

A pair of loading / unloading means which moves up and down with the head side head arm 28h interposed therebetween is disposed on both upper and lower sides of the head side head arm 28h. That is, the unload bar 33 is disposed above the head-side head arm 28h, and the load bar 34 is disposed below the head arm 28h. The two are integrally connected so as to be able to move up and down.

Now, in the state shown by the broken line, the load /
When the unloading bars 33 and 34 are lowered together, the head-side head arm 28h is pushed down by the unloading bar 33, and the head-side head arm 28h bends from the hinge 31 as shown by a solid line and retreats from the disk d. I do.

Conversely, in the state shown by the solid line, the load /
When the unload bars 33 and 34 are lifted, the head arm 28h is pushed up by the load bar 34,
As shown by the broken line, it stops at the position in contact with the stopper 32. Moreover, the head side head arm 28h is a load bar.
Because it is constantly pressed toward the stopper 32 by 34,
A constant state is always maintained between the sliding surface of the magnetic head and the disk surface.

As described above, since the head side head arm 28h is retracted in the vertical direction with respect to the disk d by the load / unload bars 33 and 34 provided outside the disk d, as shown in FIG. Unlike the structure where the load / unload bar 25 is inserted between the tip of the spring arm and the disc,
Even if the slider portion of the magnetic head is miniaturized, it can be reliably loaded / unloaded.

The load / unload mechanism can be used not only for manufacturing and testing a magnetic head, but also for testing a single disk after a magnetic disk is completed.

[0056]

As described above, according to the first aspect of the present invention, the magnetic head attitude adjustment device is provided with a YAW angle adjustment circuit.
A vertical adjustment stage 27 provided on a turntable 26 and a magnetic head
Arm 28 for mounting the spring arm
Between the rolling direction adjuster 29 and the pitching direction adjuster.
Since the integrator 30 is interposed, a single device
In addition to the vertical position and YAW angle of the head sliding surface,
The pitching and pitching directions can also be adjusted, improving workability.
As well as accurate adjustments in each direction
You.

Also, as in claim 2, one disk d
Next, the area d1 of the lap abrasive, the area d2 of the glass, and the area of the magnetic film
Since the three regions d3 are formed concentrically,
On a disk, lap polishing of the sliding surface of the magnetic head and
Observation and evaluation of state, magnetic property test, recording / reproduction test, etc.
Can be performed continuously, replacing the disk as before
Work efficiency is improved, and the same conditions
Can perform each measurement and evaluation, improving reliability.
You.

According to a third aspect of the present invention, a head arm on the head side is provided.
28h is supported so as to be able to bend with respect to the carriage side head arm 28c, and the magnetic head is retracted or approached from the disk surface in the vertical direction. There is no need to insert a load / unload bar into the disk, and even if the slider portion is a thin magnetic head, it can be easily and reliably loaded / unloaded onto the disk.

[Brief description of the drawings]

FIG. 1 is a diagram illustrating the basic principle of a magnetic head manufacturing apparatus according to the present invention.

FIG. 2 is a perspective view showing an embodiment of the invention of claim 2 ;

FIG. 3 is an exploded perspective view showing the first embodiment of the present invention .

4A and 4B are diagrams illustrating an adjustment direction of the magnetic head, wherein FIG. 4A is a plan view, FIG. 4B is a front view, and FIG. 4C is a right side view.

FIG. 5 is a side view showing an embodiment of the third invention.

FIG. 6 is a plan view and a side view showing the entirety of the integrated thin film head.

FIG. 7 is a longitudinal sectional view of the integrated thin film head.

8A is a plan view showing a state where the integrated thin-film head is mounted on a magnetic disk drive, and FIG. 8B is an enlarged side view showing a mounting portion of the integrated thin-film head.

FIG. 9 is a cross-sectional view showing a completed state of a magnetic head element portion in the integrated thin film head.

FIG. 10 is a diagram illustrating a conventional magnetic head evaluation device.

FIG. 11 is a side view showing a conventional load / unload device for a magnetic head to be evaluated.

[Explanation of symbols]

 H Magnetic head 1 Spring arm (part) 2 Magnetic head element part s Slider (part) 3 Sliding surface 3a Slider surface before lap polishing D Magnetic disk 4 Core 5 Coil 7 Root of spring arm part 9 Magnetic pole 21 Protective film 22 Spindle M Spindle motor 23 Carriage 24 Head arm D1 Wrapping disk D2 Glass disk D3 Magnetic disk 25 Load / unload bar 26 Turntable 27 Vertical adjustment stage 28 Head arm 28c Carriage head arm 28h Head head arm 29 Rolling direction adjuster 30 Pitching direction adjuster 31 Hinge mechanism 32 Stopper 33 Unload bar 34 Load bar d Disk gd Glass disk d1 Area of lap abrasive grains d2 Area of glass d3 Area of magnetic film

Continuation of the front page (56) References JP-A-1-154377 (JP, A) JP-A-60-182076 (JP, A) JP-A-58-220268 (JP, A) JP-A-60-9656 (JP) , A) Shokai Sho 54-179722 (JP, U) (58) Fields investigated (Int. Cl. ⁷ , DB name) G11B 5/31 G11B 5/56-5/60

Claims (3)

(57) [Claims] 1. A magnetic head is sought on a single disk.
Polishing of the sliding surface, observation and evaluation of the finished state, and magnetic
Magnetic head manufacturing equipment that continuously measures and evaluates air quality
A vertical adjustment stay provided on a YAW angle adjustment rotary disc.
Head arm for attaching the spring arm
Between the rolling direction adjuster and the pitching direction adjuster
An apparatus for manufacturing a magnetic head, characterized in that a device is interposed . 2. The disk on which the magnetic head is sought is:
On the plate, the area of lap abrasive, the area of glass and the magnetic film
3. The magnetic head manufacturing apparatus according to claim 1 , wherein the three regions are arranged concentrically . The method according to claim 3, wherein said head arm, as well as divided into a carriage-side head arm and the head-side head arm, hinged to the head arm which is bisected, so as to be bent in a direction in which the head-side head arm is retracted from the disc surface it was ligated means, the tip of the carriage-side head arm, the head-side head arm has fixed positioning stopper to prevent the excessive movement to said disc side, disposed above and below the head side head arm are, according to claim 1 or請 characterized by being arranged a pair of loading / unloading means for vertically moving across the head side head arm
3. The apparatus for manufacturing a magnetic head according to claim 2 .