JP3194483B2 - Burn-in test method and burn-in test apparatus - Google Patents

Burn-in test method and burn-in test apparatus

Info

Publication number
JP3194483B2
JP3194483B2 JP29334491A JP29334491A JP3194483B2 JP 3194483 B2 JP3194483 B2 JP 3194483B2 JP 29334491 A JP29334491 A JP 29334491A JP 29334491 A JP29334491 A JP 29334491A JP 3194483 B2 JP3194483 B2 JP 3194483B2
Authority
JP
Japan
Prior art keywords
temperature
burn
electronic component
test method
test
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP29334491A
Other languages
Japanese (ja)
Other versions
JPH05136229A (en
Inventor
茂幸 丸山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
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Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP29334491A priority Critical patent/JP3194483B2/en
Publication of JPH05136229A publication Critical patent/JPH05136229A/en
Application granted granted Critical
Publication of JP3194483B2 publication Critical patent/JP3194483B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851Testing of integrated circuits [IC]
    • G01R31/2855Environmental, reliability or burn-in testing
    • G01R31/2872Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation
    • G01R31/2874Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation related to temperature
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851Testing of integrated circuits [IC]
    • G01R31/2855Environmental, reliability or burn-in testing
    • G01R31/286External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2863Contacting devices, e.g. sockets, burn-in boards or mounting fixtures

Landscapes

  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明はバーンイン試験方法及び
バーンイン試験装置に係り、特にプリント基板に実装さ
れた複数の電子部品を通電動作させつつ、所定時間、一
定温度に保持するバーンイン試験方法及びバーンイン試
験装置に関する。
The present invention relates to a burn-in test method and a burn-in test method.
The present invention relates to a burn-in test apparatus , and more particularly to a burn-in test method and a burn-in test method, in which a plurality of electronic components mounted on a printed circuit board are maintained at a constant temperature for a predetermined time while being energized.
Test equipment .

【0002】IC(集積回路)などにおいてはICの初
期不良を除去するため、ICチップ温度を150℃程度
の温度条件下で通電動作させることにより加速度的にI
Cの絶対変化を促進させるバーンイン工程が行われてい
る。
2. Description of the Related Art In an IC (integrated circuit) or the like, in order to remove an initial failure of the IC, an IC chip is energized under a temperature condition of about 150 ° C. to accelerate the IC.
A burn-in process for promoting an absolute change in C is performed.

【0003】このようなバーンイン工程においてはIC
チップを一定温度に保持することが要求されている。
In such a burn-in process, an IC
It is required to keep the chip at a constant temperature.

【0004】[0004]

【従来の技術】図8はバーンイン装置の構成図を示す。
同図中、1はバーンイン用のプリント板を示す。バーン
イン用プリント板1には図9に示すように複数のソケッ
ト1aが実装されている。ソケット1aはプリント板1
に形成された導電パターン1bによりエッジ部分に形成
された接続部1cと接続されている。
2. Description of the Related Art FIG. 8 shows a block diagram of a burn-in device.
In the drawing, reference numeral 1 denotes a printed board for burn-in. A plurality of sockets 1a are mounted on the burn-in printed board 1, as shown in FIG. Socket 1a is printed board 1
Is connected to the connection portion 1c formed at the edge portion by the conductive pattern 1b formed at the edge portion.

【0005】ソケット1aにはバーンイン処理を行おう
とするICチップ2が装着される。ICチップ2には接
続部1cより入力される駆動信号が導電パターン1b及
びソケット1aを介して供給される。ICチップ2は駆
動信号により試験的に動作する。プリント板1は装置4
内の収納部4aに設けられたカードエッジコネクタ3に
挿入され、保持される。
An IC chip 2 to be subjected to burn-in processing is mounted on the socket 1a. A drive signal input from the connection portion 1c is supplied to the IC chip 2 via the conductive pattern 1b and the socket 1a. The IC chip 2 operates experimentally by the drive signal. The printed board 1 is a device 4
It is inserted into and held by the card edge connector 3 provided in the accommodating portion 4a.

【0006】装置4内にはファン4b及び温度制御装置
4cが設けられて、収納部4aに一定温度に加熱又は冷
却された空気の送風を行ない、プリント板1上のICチ
ップ2での温度(ジャンクション温度:Tj)が150
°になるように収納部4a内の雰囲気全体を一定温度に
制御していた。
A fan 4b and a temperature control device 4c are provided in the device 4 to blow air heated or cooled to a constant temperature into the storage portion 4a, and the temperature at the IC chip 2 on the printed board 1 ( Junction temperature: Tj) is 150
°, the entire atmosphere in the storage section 4a was controlled to a constant temperature.

【0007】このような従来のバーンイン装置について
いえば、装置本体部の熱操作部のみで温度コントロール
しているため、デバイスの発熱量の増大や空気抵抗が大
きいパッケージやこれらによってもたらされる槽内の雰
囲気温度:Ta のばらつきが生じる。このばらつきに対
して雰囲気循環用のファン4bの送風能力を大きくした
り、ばらつきに応じて槽内の雰囲気温度の設定を変化さ
せる方法をとっていた。また、熱抵抗が大きいパッケー
ジに対しては(Tj=150℃になるよう)雰囲気温度
を低く設定するなど温度設定変更で対処していた。
In the case of such a conventional burn-in apparatus, since the temperature is controlled only by the thermal operation section of the apparatus main body, the heat generation of the device is increased, the package having a large air resistance, and the inside of the tank provided by these are increased. ambient temperature: variation in T a occurs. In order to cope with this variation, the blowing capacity of the atmosphere circulation fan 4b is increased, or the setting of the ambient temperature in the tank is changed according to the variation. In addition, for a package having a large thermal resistance (Tj = 150 ° C.), the temperature setting is changed, for example, by setting a lower ambient temperature.

【0008】さらに、放熱特性を向上させるために(図
10に示す)ような試験工程専用の放熱フィン5を固定
金具6を用いて、放熱フィン5とソケット1aでICを
挟み込むように装着する方法も考えられていた。
Further, in order to improve the heat radiation characteristics, a method of mounting a heat radiation fin 5 dedicated to the test process as shown in FIG. 10 by using a fixing metal 6 so as to sandwich the IC between the heat radiation fin 5 and the socket 1a. Was also considered.

【0009】[0009]

【発明が解決しようとする課題】しかるに、従来のバー
ンイン装置ではICの温度(Tj )の制御性・精度は、
(他に熱操作機能を持たないため)装置本体部の熱的諸
能力(冷却・加熱・送風等の能力)にのみ依存してい
た。
However, in the conventional burn-in apparatus, the controllability and accuracy of the temperature (T j ) of the IC are:
(Because there is no other thermal operation function), it depends only on the thermal capabilities (cooling, heating, air blowing, etc.) of the device main body.

【0010】しかし、近年のIC/LSIの高集積化の
勢いは著しく、これに伴い、これらのICのパワー(消
費電力)の増大もまた顕著である。
However, the recent trend of high integration of ICs / LSIs is remarkable, and accordingly, the power (power consumption) of these ICs is also remarkable.

【0011】パワーの大きいICは自己発熱が大きく、
必要に応じた温度コントロール(冷却)能力を考慮しな
くてはICの温度を一定に保つことが出来ず、過昇して
しまい必要なB/I条件が得られない。
An IC having a large power generates a large amount of heat.
The temperature of the IC cannot be kept constant unless the necessary temperature control (cooling) capability is taken into consideration, and the temperature rises excessively, and the necessary B / I conditions cannot be obtained.

【0012】また、送風能力が十分でないと雰囲気の循
環路の前方後方及び上下で温度差が生じ、ICの温度も
位置により差が生じる。これも自己発熱の大きいICほ
ど顕著に現れる。
If the air blowing capacity is not sufficient, a temperature difference is generated between the front and rear and upper and lower sides of the circulation path of the atmosphere, and the temperature of the IC also differs depending on the position. This also becomes more pronounced for ICs that generate more heat.

【0013】またパッケージの多様化も著しく、例えば
TAB(Tape Automaded Bonding)パッケージのように
チップ温度(Tj )と雰囲気温度(Ta )間の熱抵
抗(:R j-a 〔℃/W〕)が極めて大きいパッケージも
あり、必要なTj を得るためには雰囲気温度Ta をかな
り低くコントロールするか、チップの放熱を促進する別
の手段を考慮する必要が生じる。
[0013] The diversification of packages is also remarkable.
Like TAB (Tape Automaded Bonding) package
Chip temperature (Tj) And ambient temperature (TaHeat resistance between
Anti (: R ja[° C / W])
Yes, necessary TjTo obtain the ambient temperature TaKana
Control or lower the chip heat dissipation.
It is necessary to consider the means of:

【0014】また放熱フィン部の大きいパッケージにつ
いてはフィンそのものが槽内の雰囲気循環の圧力損失要
素であり、装置の送風能力が十分でなければ、ICはそ
の位置によって温度差があり、目標(必要)温度より高
くなったり、低くなったりする結果となる。
In the case of a package having a large radiating fin portion, the fin itself is a pressure loss element for circulating the atmosphere in the tank. If the air blowing capacity of the device is not sufficient, the IC has a temperature difference depending on its position, and the target (necessary) ) The temperature may be higher or lower.

【0015】以上のようにB・I工程に要求される(温
度)条件の実現は厳しくなる一方であるが、装置の熱的
諸能力には限界があり、現状の方式では装置内の個々の
ICに均一に必要とされる熱条件(冷却あるいは加熱、
送風等)を安定して付与することが困難になってきてい
る。
As described above, the realization of the (temperature) conditions required for the BI process is becoming stricter, but the thermal capabilities of the apparatus are limited, and in the current system, each individual in the apparatus is limited. Thermal conditions (cooling or heating,
It is becoming difficult to stably apply air blow.

【0016】本発明は、上記の点に鑑みてなされたもの
で、電子部品の近傍から電子部品に対して冷却・加熱・
送風等の熱操作を加える温度モジュールを有することに
より、各種のICデバイス・パッケージに対して、その
温度を精度よく、効率よく必要温度にし、維持すること
が可能なバーンイン試験方法及びバーンイン試験装置
提供することを目的とする。
The present invention has been made in view of the above points, and has been made to cool, heat, and cool an electronic component from the vicinity of the electronic component.
A burn-in test method and a burn-in test device capable of accurately and efficiently setting and maintaining the temperature of various IC device packages by having a temperature module for performing a thermal operation such as air blowing. The purpose is to provide.

【0017】[0017]

【課題を解決するための手段】本発明は、バーンイン用
基板に試験を行う電子部品を装着する工程と、前記基板
に装着された電子部品の温度を制御する工程と、所望の
温度環境下で前記電子部品のバーンイン処理を行う工程
とを有し、前記基板を複数の部分に区切り、該部分毎に
温度制御を行うことを特徴とする。 また、基板に装着さ
れた各々の電子部品毎の温度制御を行うことを特徴とす
る。
SUMMARY OF THE INVENTION The present invention is directed to a burn-in
Mounting an electronic component to be tested on a substrate; and
Controlling the temperature of the electronic component mounted on the
Performing a burn-in process on the electronic component under a temperature environment
And dividing the substrate into a plurality of portions, and for each of the portions,
It is characterized by performing temperature control. Also attached to the board
Temperature control for each of the selected electronic components.
You.

【0018】[0018]

【作用】本発明によれば、バーンイン用基板に試験を行
う電子部品を装着し、基板に装着された電子部品の温度
を制御して、所望の温度環境下で電子部品のバーンイン
処理を行う際に基板を複数の部分に区切り、部分毎、ま
たは、基板に搭載された電子部品毎に温度制御を行なう
ことにより、きめ細かな温度制御が行え、試験の信頼性
を向上できる。
According to the present invention , a test is performed on a burn-in substrate.
The temperature of the electronic components mounted on the board
Control the burn-in of electronic components under the desired temperature environment
When performing processing, the substrate is divided into multiple parts,
Or, perform temperature control for each electronic component mounted on the board
This enables fine temperature control and reliability of the test.
Can be improved.

【0019】[0019]

【実施例】図1は本発明の一実施例の斜視図を示す。同
図中、7はプリント板で、プリント板7上には複数のソ
ケット8及びコネクタ9が実装されている。
FIG. 1 is a perspective view showing an embodiment of the present invention. In the figure, reference numeral 7 denotes a printed board on which a plurality of sockets 8 and connectors 9 are mounted.

【0020】複数のソケット8及びコネクタ9はプリン
ト板7上に形成された導電パターン7aによりエッジ部
分に形成された接続部7bと接続されている。
The plurality of sockets 8 and connectors 9 are connected to connection portions 7b formed at the edge portions by conductive patterns 7a formed on the printed board 7.

【0021】ソケット8にはバーンイン処理を行なう電
子部品であるIC10が挿着される。また、コネクタ9
には温度モジュール11が装着される。
An IC 10 as an electronic component for performing a burn-in process is inserted into the socket 8. The connector 9
Is mounted with a temperature module 11.

【0022】温度モジュール11は図2に示すように複
数の開口部11aが形成され、複数の開口部11aの夫
々に送風ファン11bを配設してなる。
As shown in FIG. 2, the temperature module 11 has a plurality of openings 11a, and a blower fan 11b is provided in each of the plurality of openings 11a.

【0023】温度モジュール11にはコネクタ9と係合
する接続部11cが形成されていて、温度モジュール1
1は接続部11cをコネクタ9に挿入することによりプ
リント板7に保持されると共にコネクタ9を介してプリ
ント板7と温度モジュール11とを電気的に接続する。
The temperature module 11 is provided with a connection portion 11c for engaging with the connector 9.
Reference numeral 1 denotes a connector that is held by the printed board 7 by inserting the connecting portion 11 c into the connector 9 and electrically connects the printed board 7 and the temperature module 11 via the connector 9.

【0024】プリント板7の接続部7bには図1に示す
制御装置(図示せず)に接続されたカードエッジコネク
タ12に挿入され、プリント板7には制御装置からIC
10を駆動制御する信号と温度モジュール11を構成す
る送風ファン11bを駆動する信号とが供給される。
The connection portion 7b of the printed board 7 is inserted into a card edge connector 12 connected to a control device (not shown) shown in FIG.
A signal for driving and controlling the fan 10 and a signal for driving the blower fan 11b constituting the temperature module 11 are supplied.

【0025】温度モジュール11が設けられたプリント
板7は恒温槽内に設置され、IC10は所要温度(Tj
=150℃)で、所要時間(一般に48〜196時間程
度でICによる異なる)バーンイン処理が行なわれる。
The printed circuit board 7 on which the temperature module 11 is provided is installed in a thermostat, and the IC 10 is operated at a required temperature (Tj).
= 150 ° C.), and burn-in processing is performed for a required time (generally about 48 to 196 hours, which depends on the IC).

【0026】このようにプリント板7上に複数の送風フ
ァン11bからなる温度モジュール11を設けることに
よりIC10に対して送風の効率が良い方向(一般的に
は真上)から送風することができ、IC10の放熱・吸
熱を促進し、B・I装置本体の送風の不足・ばらつきを
補うことができる。このとき送風の方向(角度)はパッ
ケージ、B・I条件により設定される。
By providing the temperature module 11 composed of a plurality of blower fans 11b on the printed board 7 as described above, it is possible to blow air to the IC 10 from a direction in which air is efficiently blown (generally right above). The heat radiation and heat absorption of the IC 10 can be promoted, and the shortage / variation in the air flow of the BI apparatus main body can be compensated. At this time, the blowing direction (angle) is set according to the package and the BI conditions.

【0027】図3は本発明の第2実施例の要部の構成図
を示す。同図中、図1,図2と同一構成部分には同一符
号を付し、その説明は省略する。本実施例は温度モジュ
ール11に送風ファン11bに加えて、ヒータ11dを
設けたものである。
FIG. 3 is a block diagram showing a main part of a second embodiment of the present invention. In the figure, the same components as those in FIGS. 1 and 2 are denoted by the same reference numerals, and description thereof will be omitted. In this embodiment, a temperature module 11 is provided with a heater 11d in addition to a blower fan 11b.

【0028】ヒータ11dは格子状のフレーム11d−
1に電熱線11d−2を巻回した構成とされている。
The heater 11d has a grid-like frame 11d-
1 has a configuration in which a heating wire 11d-2 is wound.

【0029】フレーム11d−1の格子のピッチは例え
ばプリント板7上に配置されたIC10のピッチに対応
して設けられる。電熱線11d−2には送風ファン11
b同様にコネクタ9を介して駆動電力が供給され、電熱
線11b−2が加熱される。送風ファン11bを回転さ
せることにより図3(B)矢印の方向にヒータ11dに
より加熱された空気が送風されIC10が加熱され、I
C10の温度がバーンイン温度約150℃で保持され
る。
The lattice pitch of the frame 11d-1 is provided, for example, in correspondence with the pitch of the ICs 10 arranged on the printed board 7. The fan 11 is connected to the heating wire 11d-2.
Similarly, the driving power is supplied via the connector 9 to heat the heating wire 11b-2. By rotating the blower fan 11b, the air heated by the heater 11d is blown in the direction of the arrow in FIG.
The temperature of C10 is maintained at a burn-in temperature of about 150 ° C.

【0030】図4は本発明の第3実施例の概略構成図を
示す。同図中、図1,図2と同一部分には同一符号を付
し、その説明は省略する。
FIG. 4 is a schematic block diagram of a third embodiment of the present invention. In the figure, the same parts as those in FIGS. 1 and 2 are denoted by the same reference numerals, and description thereof will be omitted.

【0031】本実施例は特にパワーの大きいICに用い
られるもので、温度モジュール11は送風ファン11b
及びヒーンシンク11eにより構成される。
The present embodiment is used for an IC having a particularly large power.
And a heat sink 11e.

【0032】ヒートシンク11eはIC10と接触する
冷却部11e−1と送風ファン11b側に設けられ放熱
を行なう放熱部11e−2とを金属板11e−3を介し
て一体的に形成してなる。
The heat sink 11e is formed by integrally forming a cooling portion 11e-1 in contact with the IC 10 and a heat radiating portion 11e-2 provided on the blower fan 11b side to radiate heat via a metal plate 11e-3.

【0033】送風ファン11bにより図4(B)に示す
ように送風することにより、放熱部11e−2より放熱
を行ない冷却部11e−1の冷却を行ないIC10の冷
却を促進しIC10の温度を所要バーン温度(約150
℃)で保持している。
By blowing air from the blower fan 11b as shown in FIG. 4 (B), heat is radiated from the heat radiating portion 11e-2, the cooling portion 11e-1 is cooled, cooling of the IC 10 is promoted, and the temperature of the IC 10 is required. Burn temperature (about 150
(° C).

【0034】このような構成とすることにより効率良
く、プリント板7上の全IC10の温度を略均一に保持
できる。
With such a configuration, the temperatures of all the ICs 10 on the printed board 7 can be efficiently maintained substantially uniformly.

【0035】図5は本発明の第4実施例の構成図を示
す。同図中、図1,図2及び図4と同一構成部分には同
一符号を付し、その説明は省略する。
FIG. 5 shows a block diagram of a fourth embodiment of the present invention. 5, the same components as those in FIGS. 1, 2, and 4 are denoted by the same reference numerals, and the description thereof will be omitted.

【0036】本実施例は第3実施例における放熱部11
e−2及び冷却部11e−1を夫々別の金属板11e−
3’,11e−3”上に形成し、金属板11e−3’及
び金属板11−e3”間に温度制御手段となるペルチェ
素子等よりなる電子冷却器11e−4を挟持した構成と
してなる。
This embodiment is different from the third embodiment in that the heat radiating portion 11 is used.
e-2 and the cooling unit 11e-1 are each separated from another metal plate 11e-
3 ', 11e-3 ", and an electronic cooler 11e-4 such as a Peltier element serving as a temperature control means is sandwiched between the metal plates 11e-3' and 11-e3".

【0037】電子冷却器11e−4を用いることによ
り、ヒートシンク11eのIC10に接する冷却部11
eの温度を常温以下に設定することも可能なため、それ
まで困難だった熱抵抗の大きなパッケージの温度制御
(冷却)が可能になる。
By using the electronic cooler 11e-4, the cooling unit 11 in contact with the IC 10 of the heat sink 11e
Since the temperature of e can be set to a normal temperature or lower, temperature control (cooling) of a package having a large thermal resistance, which has been difficult until now, can be performed.

【0038】また、電子冷却器11d−4をペルチェ素
子で、構成した場合ペルチェ素子に印加する電圧の極性
を反転すれば、ヒータとなり、ヒートシンク11dを通
してIC10を加熱することも可能である。
When the electronic cooler 11d-4 is constituted by a Peltier device, the polarity of the voltage applied to the Peltier device is inverted, so that it becomes a heater, and the IC 10 can be heated through the heat sink 11d.

【0039】なお、前述してきた実施例は全て温度モジ
ュール11が、プリント板7から分離可能な構造であ
り、ICソケット8に対してIC10を挿抜する際に
は、温度モジュール11をプリント板7より外しておこ
なえば良い。
In all of the embodiments described above, the temperature module 11 can be separated from the printed board 7. When the IC 10 is inserted into or removed from the IC socket 8, the temperature module 11 is connected to the printed board 7. You can remove it.

【0040】このとき、図6(A),(B)に示すよう
にプリント板7にヒンジ等の支点13,14を設け、温
度モジュール11と、IC10を挿抜する際には、温度
モジュール11を支点13,14を中心にしてプリント
板7から退避するプリント板7とを結合し、構成として
もよい。
At this time, as shown in FIGS. 6A and 6B, fulcrums 13 and 14 such as hinges are provided on the printed board 7, and when the temperature module 11 and the IC 10 are inserted / extracted, the temperature module 11 is inserted. The printed circuit board 7 retreating from the printed circuit board 7 around the fulcrums 13 and 14 may be combined to form a configuration.

【0041】また、図7に示すように温度モジュール1
1に白金抵抗測温体などよりなる温度検知素子11fを
設け、温度検知素子11eで検出した温度に基づいて送
風ファン11bの回転制御や、ヒータ11cの加熱制
御、電子冷却器11d−4等の駆動信号制御を行なうこ
とにより更に保持温度の精度信頼性を向上させることが
できる。
Further, as shown in FIG.
1 is provided with a temperature detecting element 11f such as a platinum resistance temperature measuring element, and controls the rotation of the blower fan 11b based on the temperature detected by the temperature detecting element 11e, the heating control of the heater 11c, and the electronic cooler 11d-4. By performing the drive signal control, the accuracy and reliability of the holding temperature can be further improved.

【0042】なお、本実施例ではプリント板毎に温度モ
ジュール11を設けたが、夫々のIC10に対応して温
度モジュールを設けることにより更にきめの細かい温度
制御が可能となる。
In this embodiment, the temperature modules 11 are provided for each printed board. However, by providing the temperature modules corresponding to the respective ICs 10, more detailed temperature control can be performed.

【0043】[0043]

【発明の効果】上述の如く、本発明によれば、基板を複
数の部分に区切り、部分毎に温度制御を行うことによ
り、きめ細かな温度制御が行え、また、電子部品毎に温
度が異なることがなくなり、試験の信頼性を向上できる
等の特長を有する。
As described above, according to the present invention, multiple substrates are used.
By dividing into several parts and controlling the temperature for each part
Temperature control, and temperature control for each electronic component.
The degree does not differ, and the reliability of the test can be improved .

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の第1実施例の斜視図である。FIG. 1 is a perspective view of a first embodiment of the present invention.

【図2】本発明の第1実施例の要部の斜視図である。FIG. 2 is a perspective view of a main part of the first embodiment of the present invention.

【図3】本発明の第2実施例の要部斜視図である。FIG. 3 is a perspective view of a main part of a second embodiment of the present invention.

【図4】本発明の第3実施例の要部斜視図である。FIG. 4 is a perspective view of a main part of a third embodiment of the present invention.

【図5】本発明の第4実施例の要部斜視図である。FIG. 5 is a perspective view of a main part of a fourth embodiment of the present invention.

【図6】本発明の第1実施例の変形例の斜視図である。FIG. 6 is a perspective view of a modification of the first embodiment of the present invention.

【図7】本発明の第1実施例の他の変形例の斜視図であ
る。
FIG. 7 is a perspective view of another modification of the first embodiment of the present invention.

【図8】バーンイン装置の概略構成図である。FIG. 8 is a schematic configuration diagram of a burn-in device.

【図9】従来の一例の斜視図である。FIG. 9 is a perspective view of a conventional example.

【図10】従来の他の一例の要部斜視図である。FIG. 10 is a perspective view of a main part of another conventional example.

【符号の説明】[Explanation of symbols]

7 プリント板 9 コネクタ 10 IC 11 温度モジュール 12 カードエッジコネクタ 7 printed board 9 connector 10 IC 11 temperature module 12 card edge connector

Claims (6)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 バーンイン用基板に試験を行う電子部品
を装着する工程と、 前記基板に装着された電子部品の温度を制御する工程
と、 所望の温度環境下で前記電子部品のバーンイン処理を行
う工程とを有し、 前記基板を複数の部分に区切り、該部分毎に温度制御を
行うことを特徴とするバーンイン試験方法。
(1)Electronic components for testing burn-in boards
Mounting the Controlling the temperature of the electronic component mounted on the substrate
When, Perform burn-in processing of the electronic component under a desired temperature environment.
And a step The substrate is divided into a plurality of portions, and temperature control is performed for each portion.
A burn-in test method characterized by being performed.
【請求項2】 前記温度は、ファンにより制御されるこ
とを特徴とする請求項1記載のバーンイン試験方法。
2. The burn-in test method according to claim 1, wherein the temperature is controlled by a fan.
【請求項3】 前記温度は、ペルチェ素子により制御さ
れることを特徴とする請求項1記載のバーンイン試験方
法。
3. The burn-in test method according to claim 1, wherein the temperature is controlled by a Peltier device.
【請求項4】 バーンイン用基板に試験を行う電子部品
を装着する工程と、 前記基板に装着された電子部品の温度を制御する工程
と、 所望の温度環境下で前記電子部品のバーンイン処理を行
う工程とを有し、 前記基板に装着された各々の電子部品毎に温度制御を行
うことを特徴とするバーンイン試験方法。
(4)Electronic components for testing burn-in boards
Mounting the Controlling the temperature of the electronic component mounted on the substrate
When, Perform burn-in processing of the electronic component under a desired temperature environment.
And a step Temperature control is performed for each electronic component mounted on the board.
A burn-in test method.
【請求項5】 試験を行う電子部品を搭載する基板と、 前記基板を複数の部分に区切り、該部分毎に前記電子部
品の温度を制御する温度制御手段とを有することを特徴
とするバーンイン試験装置。
5. The trialA board on which electronic components to be tested are mounted, The substrate is divided into a plurality of portions, and the electronic portion is provided for each of the portions.
Temperature control means for controlling the temperature of the article.
Burn-in test equipment.
【請求項6】 試験を行う電子部品を搭載する基板と、 前記基板に装着された各々の電子部品毎の温度を制御す
る温度制御手段とを有することを特徴とするバーンイン
試験装置。
6.A board on which electronic components to be tested are mounted; Controlling the temperature of each electronic component mounted on the substrate;
Burn-in having temperature control means
Testing equipment.
JP29334491A 1991-11-08 1991-11-08 Burn-in test method and burn-in test apparatus Expired - Lifetime JP3194483B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP29334491A JP3194483B2 (en) 1991-11-08 1991-11-08 Burn-in test method and burn-in test apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP29334491A JP3194483B2 (en) 1991-11-08 1991-11-08 Burn-in test method and burn-in test apparatus

Publications (2)

Publication Number Publication Date
JPH05136229A JPH05136229A (en) 1993-06-01
JP3194483B2 true JP3194483B2 (en) 2001-07-30

Family

ID=17793589

Family Applications (1)

Application Number Title Priority Date Filing Date
JP29334491A Expired - Lifetime JP3194483B2 (en) 1991-11-08 1991-11-08 Burn-in test method and burn-in test apparatus

Country Status (1)

Country Link
JP (1) JP3194483B2 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU9183498A (en) * 1998-08-19 2000-03-14 Eles Equipment S.R.L. Equipment for performing electrical and environmental tests on semiconductor electronic devices
JP4659328B2 (en) * 2002-10-21 2011-03-30 東京エレクトロン株式会社 Probe device for controlling the temperature of an object to be inspected
KR100948367B1 (en) * 2005-11-17 2010-03-17 가부시키가이샤 아드반테스트 Device-mounted apparatus, test head, and electronic component testing apparatus
JP4850576B2 (en) * 2006-05-01 2012-01-11 アルプス電気株式会社 Manufacturing method of circuit module and collective substrate for circuit module used therefor

Also Published As

Publication number Publication date
JPH05136229A (en) 1993-06-01

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