JP3189042B2 - Material supply device for vacuum film formation - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vacuum film forming material supply apparatus for forming a film on a substrate by heating and evaporating an evaporating material, and more particularly to a method for replenishing an evaporating material without stopping the operation of the apparatus. The present invention relates to a vacuum film-forming material supply apparatus capable of performing the above-described steps.

[0002]

2. Description of the Related Art Generally, a vacuum deposition apparatus and an ion plating apparatus are known as vacuum film forming apparatuses. In such a vacuum film forming apparatus, a film is formed on a substrate by applying heat to an evaporation material placed on a hearth and evaporating the material. And, as a heating source of the evaporation material, an induction heating device, an electron gun,
Plasma guns are known.

As a heating source of the ion plating apparatus, for example, a pressure gradient plasma source or H
CD plasma sources or electron guns are known. In such an ion plating apparatus having a plasma beam generator (plasma source), a plasma beam is generated between a hearth (anode) arranged in a vacuum vessel and the plasma beam generator, The evaporation material placed on the hearth is heated and evaporated. Then, the evaporated metal particles from the evaporated material are ionized by the plasma beam, and the ion particles adhere to the substrate surface of the negative voltage, and a film is formed on the substrate.

In such an ion plating apparatus, when performing ion plating continuously, it is necessary to continuously supply the evaporation material to the hearth. As such a continuous supply type ion plating apparatus, for example, an ion plating apparatus described in JP-A-62-247067 is known. In this ion plating apparatus, it is shown that the evaporation material is continuously supplied to the hollow crucible from below.

[0005]

However, in the above-described ion plating apparatus, the evaporation material to be replenished is arranged in the vacuum vessel, and the number thereof is limited. Therefore, when all of the replenishment evaporating material prepared in the vacuum container has been used up, the operation of the apparatus must be stopped to perform the replenishment operation.

This refilling operation must be performed in a state where the operation of the apparatus is stopped and the inside of the vacuum vessel is returned to the atmosphere.
Therefore, when the operation is resumed, the vacuum container is evacuated again,
Work for adjusting the operating conditions is required, and the problems of increasing the work and lowering the operation efficiency remain.

It is an object of the present invention to provide a material supply apparatus for vacuum film formation that can replenish the evaporating material without stopping the operation of the apparatus.

[0008]

According to a first aspect of the present invention, there is provided a heating source, and a hearth disposed in a vacuum vessel, wherein the heating source evaporates an evaporation material stored in the hearth. In a vacuum film forming apparatus for forming a film on the substrate by attaching the evaporated substance to the surface of the substrate, a through-hole extending vertically is formed in the hearth,
A support portion for the evaporation material, which is provided directly below the through hole so as to be vertically movable, a first drive mechanism for driving the support portion,
A replenishing unit for storing a plurality of evaporating materials, having a chamber that can be brought into a vacuum state independently of the vacuum container,
A supply unit for supplying a plurality of evaporative materials to the support unit, and a seal for transferring the evaporative materials by connecting the replenishment unit and a predetermined position of the supply unit. A support passage provided with a closed passage body having a passage, the middle of which can be opened and closed by a gate valve, and a transfer mechanism for transferring the evaporated material from the replenishment unit to a predetermined position of the supply unit through the closed passage body; The part is smaller than the diameter of the evaporation material
A rod made of an insulating material having a large diameter,
A mechanism is disposed within the closed passage within the evaporative material.
At the tip of a support rod having a diameter smaller than the diameter,
It is mounted and transported vertically by the second drive mechanism.
The supply unit is located at a position corresponding to the rod-shaped body.
At a position corresponding to the support rod and a hole through which it can be inserted.
Table having a hole through which it and the evaporating material can be inserted
And the two positions located above the fixed table
Holes through which the evaporating material can be inserted at regular intervals on the circumference including
A first turntable having a plurality of first turntables;
A first for driving the table to rotate about the center of the circumference;
Having a rotation drive mechanism, the replenishment unit and the supply unit,
Immediately below the hole provided in the fixed table,
The closed passage extending downwardly through the wall of the empty container.
And the evaporating material is provided in the chamber of the replenishing unit.
Has a hole smaller than the diameter of
A second turntable is rotatably arranged,
The second turntable is moved forward by a second rotary drive mechanism.
The rotary drive so that the hole passes immediately below the closed passage body.
And the bottom of the chamber corresponding to the area immediately below the closed passage body
The support rod is inserted into the wall in a sealed state, and the support rod is
The closed passage body through a hole in the second turntable
To the hole of the fixed table of the supply section.
Thus, a material supply device for vacuum film formation characterized in that the material supply device is configured to be reachable.

[0009]

[0010]

According to the second aspect, the support portion is a rod-shaped body made of an insulating material, and the supply portion extends from outside the vacuum vessel to immediately below the through hole of the hearth to store a plurality of evaporation materials. A tubular passage body capable of being accommodated and provided with a gate valve in the middle thereof, an extruding rod for moving the evaporating material accommodated in the tubular passage body, and a third drive mechanism for driving the extruded rod. And supplying the evaporating material to the rod-shaped body immediately below the through-hole with the push rod.

[0012] In the second aspect of the present invention, one end of the closed passage is connected to the cylindrical passage outside the vacuum vessel and extends upward, and an upper end thereof is a bottom of the chamber of the replenishing section. The transfer mechanism is connected to a wall side, and the transfer mechanism transfers the evaporative material from the chamber to the tubular passage body by mounting the evaporative material on a tip of a support rod arranged vertically movable in the closed passage body. Characterized in that:

[0013] In the second invention, a turntable having a plurality of holes in which the evaporative material can be inserted at regular intervals in a circumferential direction is rotatably disposed in the chamber of the replenishing section. The turntable is rotationally driven by a rotary drive mechanism such that the hole passes over a connection between the chamber and the closed passage.

In any of the first and second aspects of the present invention, it is preferable that the hearth is provided with a clamp mechanism for holding the evaporated material in the through hole.

[0015]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Referring now to FIG. 4, a brief description will be given of an ion plating apparatus in a vacuum film forming apparatus. The ion plating apparatus includes an airtight vacuum vessel 21. A plasma beam generator (for example, a pressure gradient plasma gun) 22 as a heating source is attached to the vacuum vessel 21 via a guide 21a. Have been. A steering coil 23 for guiding a plasma beam is disposed outside the guide portion 21a. In the plasma beam generator 22, a first intermediate electrode 24 and a second intermediate electrode 25 for converging a plasma beam are arranged concentrically. The first intermediate electrode 24 incorporates a permanent magnet 24 a so that the magnetic pole axis is parallel to the center axis of the plasma beam generator 22, and the second intermediate electrode 25 includes a coil 25.
a is built in.

The plasma beam generator 22 is provided with an insulating tube (for example, a glass tube) 26 connected to the passage defined by the first and second intermediate electrodes 24 and 25. The Mo cylinder 26a is arranged. Then, a Ta pipe 26b is arranged in the Mo cylinder 26a. Space defined by Mo tube 26a and Ta pipe 26b is isolated by the LaB ₆ made of an annular plate 26c. One ends of the insulating tube 26, the Mo cylinder 26a, and the Ta pipe 26b are attached to the conductor plate 26d.
Carrier gas inlet 2 formed in conductor plate portion 26d
A carrier gas is introduced from 6e, and the carrier gas passes through the Ta pipe 26b.

A substrate 27 as an object to be processed is disposed in a vacuum vessel 21 and supported by a transfer device 28, and a DC power supply for negative bias is connected to the substrate 27. A hearth (anode) 29 is arranged on the bottom surface of the vacuum vessel 21 so as to face the substrate 27.

Here, referring also to FIG. 5, the hearth 29 has a substantially cylindrical shape, and the upper surface of the hearth 29 is concave. At the center of the hearth 29, a through-hole 29c extending vertically in the figure is formed. The hearth 29 has a flange portion 29a extending in a radial direction at a lower portion thereof. Hearth 2
9, a passage 29b is formed.
Is connected to the cooling water pipe 30.

On the outer periphery of the hearth 29, a magnet case 31 for forming an auxiliary anode is arranged as shown in the figure. The magnet case 31 is a hollow ring-shaped magnet upper case 31.
a, a donut-shaped magnet lower case 31b, and an upper case 3
1a and an annular permanent magnet 31c arranged between the lower case 31b. The permanent magnet 31c is vertically magnetized in the figure. In the illustrated example, the upper side is an N pole, and the lower side is an S pole. A cooling water pipe 32 is connected to a hollow portion of the upper magnet case 31a.

The above-described magnet case 31 is joined to the flange portion 29a of the hearth 29 via an insulating plate 33. At this time, a slight gap is formed between the magnet case 31 and the side surface of the hearth 29. The magnet case 31 is supported on the bottom surface of the vacuum vessel 21 by the support member 34.

Referring again to FIG. 4, the negative end of variable power supply 40 is connected to conductive plate portion 26d, and its positive end is connected to first and second intermediate electrodes 24 via resistors R1 and R2, respectively. And 25.

On the other hand, an ammeter 41 is connected to the hearth 29, and the ammeter 41 is connected to the variable power supply 40 and the resistors R1 and R2. Further, the ammeter 41 has a resistor R3
And R4, and is connected to the vacuum vessel 21. A voltmeter 42 is connected in parallel with the resistor R3 (the resistor R3 is used as a standard resistor for voltage measurement and has a resistance of 1 M ohm or more).

Further, in the vicinity of the substrate 27, the substrate 2
A support plate member 43 is disposed outside the support 7, and a film thickness gauge 44 is disposed on the support plate member 43. In addition, a gas inlet 21b for introducing a carrier gas such as Ar gas is formed on a side wall of the vacuum vessel 21 and an exhaust port 21c for exhausting the inside of the vacuum vessel 21 is formed.

In the above-described ion plating apparatus, when a carrier gas is introduced from the carrier gas inlet 26e, a discharge starts between the first intermediate electrode 24 and the Mo cylinder 26a. As a result, a plasma beam 45 is generated. This plasma beam 45 is applied to the steering coil 23
And guided by the permanent magnet 31c in the magnet case 31,
It reaches the hearth 29 and the magnet case 31 used as an anode.

When a plasma beam is applied to the hearth 29, the evaporating material 39 that has penetrated the hearth 29 and has reached the upper surface of the hearth 29 is heated by Joule and evaporated. The evaporated metal particles are ionized by the plasma beam 45 and adhere to the surface of the substrate 27 to which the negative voltage is applied, and a film is formed on the substrate 27.

The evaporating material 39 is mounted on a push-up bar 35 acting as a support for the push-up bar 3.
5 is driven vertically by a drive mechanism 36 in the figure. The drive mechanism 36 includes an ammeter 41,
It is controlled based on the measurement results of the voltmeter 42 and the film thickness meter 44 and other predetermined film forming conditions so that the distance from the plasma beam generator 22 becomes constant even when the amount of the evaporated material 39 decreases. I have to. As a result, a film is formed on the substrate 27 with a uniform thickness. Such a control operation is disclosed in Japanese Patent Application No. Hei 6-270972, and a detailed description thereof will be omitted here.

The present invention is characterized in that in the above-described ion plating apparatus, a columnar evaporation material 39 can be continuously supplied.

Referring to FIGS. 1 and 2, a first embodiment of the present invention will be described. As mentioned above, Haas 2
Immediately below the through hole 29c, a push-up bar 35 acting as a support for the evaporation material 39 is provided so as to be vertically movable. The push-up rod 35 is a rod-shaped body made of an insulating material having a diameter smaller than the diameter of the evaporation material 39, and
1 through a bottom wall sealed with a seal member 51, and a driving mechanism 36 (first
(Up-and- down drive mechanism). The drive mechanism 36 is supported by the vacuum vessel 21 by a support frame (not shown). Outside the vacuum vessel 21, there is also provided a replenishing chamber 61 which can be evacuated independently of the vacuum vessel 21. In the replenishing chamber 61, a replenishing part 60 for storing a plurality of evaporation materials 39 is supported. It is arranged via a frame 67.
The replenishing unit 60 includes a turntable 62 and a
And a rotation drive mechanism 63. On the other hand, a plurality of evaporating materials 39 can be held in the vacuum vessel 21.
Supply unit 70 for supplying one to the upper end of the push-up bar 35
Is arranged. A closed passage body is provided between the replenishing section 60 and the supply section 70 for connecting these predetermined positions to transfer the evaporated material, and a closed passage body 80 which can be opened and closed by a gate valve 81 in the middle thereof. Is provided. Further, a transfer mechanism 90 for transferring the evaporated material from the replenishment unit 60 to a predetermined position of the supply unit 70 through the closed passage body 80 is provided below the replenishment unit 60.

The supply section 70 has a hole 71-1 at a position corresponding to the push-up rod 51 and a hole 71-1 through which the evaporating material 39 can be inserted at a position corresponding to the support rod 91.
-2 fixed table 71, and fixed table 71
A turntable (first turntable) 72 having a plurality of holes 72-1 through which the evaporating material 39 can be inserted at regular intervals on a circle including the two positions and disposed on the upper side of the turntable 72; A rotation drive mechanism (first rotation drive mechanism) 73 that is driven to rotate about the center of the circumference. The rotation drive mechanism 73 is also supported by the vacuum vessel 21 via a support frame (not shown), and has a rotation shaft 73-1.
Also penetrates the bottom wall of the vacuum vessel 21 in a sealed state. The fixed table 71 and the turntable 72
Is formed of an insulating material when a current flows from the hearth 29 side via the evaporation material 39. An insulator 35-1 is provided at the tip of the push-up bar 35.

The replenishing unit 60 and the supply unit 70 are connected to each other by a closed passage body 80 that extends downward through a bottom wall of the vacuum vessel 21 immediately below a hole 71-2 provided in the fixed table 71. The through portion of the vacuum vessel 21 in the closed passage body 80 is sealed. The connection between the closed passage body 80 and the replenishment chamber 61 is also performed in a sealed state. Replenishment unit 6
A turntable (second turntable) 62 smaller than the diameter of the evaporating material 39 and having a hole 62-1 through which the support rod 91 can be inserted is rotatably disposed in the replenishment chamber 61. The turntable 62 is a rotary drive mechanism (second
Of the closed passage body 8 by the rotation drive mechanism 63)
It is rotationally driven so as to pass through a region immediately below zero. Here, the rotation shaft of the rotation drive mechanism 63 is transmitted to the rotation shaft 65 of the turntable 62 via the bevel gear 64. Of course, the rotating shaft 65 also penetrates the bottom wall of the refill chamber 61 in a sealed state.

The transfer mechanism 90 is provided in the closed passage body 80 and has a diameter smaller than the diameter of the evaporation material 39.
The evaporating material is mounted on the tip of the drive mechanism 1 (the second push-up mechanism).
The transfer is performed in the up-down direction by a drive mechanism 92. For this purpose, a support rod 91 is inserted in a sealed state into the bottom wall of the refilling chamber 61 corresponding to a region directly below the closed passage body 80, and the support rod 91 is inserted into the hole 62-1 of the turntable 62.
Into the closed passage body 80 through the air passage, and can further reach the hole 71-2 of the fixed table 71 of the supply unit 70. The support rod 91 is driven in the vertical direction by a ball screw mechanism here, but may be a cylinder.

When the replenishing section 60 is expanded in detail, the replenishing chamber 61 can be maintained in a vacuum state by a vacuum exhaust device (not shown). On the upper wall of the replenishing chamber 61, a door 66 for replenishing the replenishing chamber 61 with the evaporation material 39 is provided so as to be sealable. Strictly speaking, the hole 62-1 provided in the turntable 62 has a step. That is, the lower side of the hole 62-1 has the support rod 91.
Is a small diameter portion smaller than the diameter of the evaporating material 39, and the upper side is a large diameter portion through which the evaporating material 39 can be inserted. This is because the evaporating material 39 is inserted into the large-diameter portion of the hole 62-1 to make it difficult to fall down. With such a structure, the turntable 62 is rotationally driven in a state where the upper end of the support rod 91 is at a position lower than the turntable 62, and the evaporation material 39 placed thereon corresponds to the upper end of the support rod 91. By stopping when it comes to the position, and then driving the support rod 91 upward, the turntable 62
The upper evaporating material 39 is supplied to the supply section 70 through the closed passage body 80.
Can be transported to the side. Although only two evaporating materials 39 are shown on the turntable 62 in FIG. 1, actually, a plurality of evaporating materials 39 are arranged at equal intervals on the circumference of the turntable 62 as described later. You.

Although not shown, the replenishing section 60 is further provided with a sensor for detecting the number of evaporating materials 39 in the replenishing chamber 61. When the remaining number of the evaporation materials 39 in the replenishing chamber 61 becomes two or three, this sensor sends a detection signal to the control device. Upon receiving this detection signal, the control device issues an alarm or the like to prompt the operator to replenish the evaporation material 39.

The supply unit 70 will be described in detail. The holes 71-1 and 71-2 of the fixed table 71 are
They are provided at positions on the same circumference and spaced at an angle of 180 °. Further, in order to transfer the above-mentioned evaporation material 39 by the support rod 91 and to push up the evaporation material 39 from the fixed table 71 by the push-up rod 35 in parallel, a hole is provided immediately below the hole 72-1 of the turntable 72. 71-
1, 71-2. The reason why the diameter of the hole 71-1 is smaller than the diameter of the evaporation material 39 is that the evaporation material 3
9 is inserted into the hole 72-1 so that the evaporation material 39 can be mounted on the fixed table 71. The evaporation material 39 is prevented from falling down, and the evaporation material 39 is rotated by rotating the turntable 72. It can slide and move on the fixed table 71.

When the evaporation material 39 on the support rod 91 is moved onto the fixed table 71 by the rotation of the turntable 72 , the upper end of the support rod 91 is placed between the turntable 72 and the fixed table 71 , in other words, fixed. Table 71
It must be positioned slightly higher than the top .

FIG. 1 shows a state in which the evaporating material 39 on the fixed table 71 can be pushed up by the push-up bar 35. That is, when the evaporation material 39 in the hearth 29 decreases, the push-up bar 35 is driven upward, and the evaporation material 39 placed on the upper end thereof is pushed into the through hole 29 c of the hearth 29. Then, control is performed by the above-described control device such that the uppermost end of the evaporation material 39 in the through hole 29c is always at a fixed position.

On the other hand, when replenishing the evaporation material 39 onto the fixed table 71 by the transfer mechanism 90,
5 is lowered to a position where the turntable 72 is not hindered from rotating. At this time, a clamp mechanism 55 for holding the evaporation material 39 is provided below the hearth 29 in order to temporarily hold the evaporation material 39 in the through hole 29c. The operation of holding and releasing the clamp mechanism 55 is performed by the control device described above. In the state of FIG. 1, the support rod 91 is driven upward to put the evaporative material 39 on the turntable 62 on the upper end of the support rod 91, and is driven upward as it is so that the lower end of the evaporative material 39 is Stop at the position corresponding to the upper surface. When the turntable 72 is rotated by a predetermined angle in this state, the evaporation material 39 placed on the upper end of the support rod 91 is removed from the hole 7 of the turntable 72.
The user slides on the fixed table 71 while being held at 2-1. The predetermined angle is the same as the angle interval between the holes 72-1 provided in the turntable 72. Although only one evaporating material 39 is shown on the fixed table 71, actually, a plurality of evaporating materials 39 are arranged at equal intervals on the circumference of the fixed table 71 as described later. Rotation drive mechanism 6
3, 73 and drive control of drive mechanism 92, gate valve 8
1 is also controlled by the above-described control device.

Since a large current flows through the hearth 29 during operation of the apparatus, it goes without saying that the hearth 29 and the surrounding members are insulated by an insulator. In addition, these are also made of an insulating material so that no electric leakage occurs from the push-up bar 35, the fixed table 71 and the turntable 72 through the evaporating material 39.

FIG. 2 shows the positional relationship between the turntable 62, the fixed table 71, and the turntable 72 in the state shown in FIG. 1. A plurality of evaporating materials are arranged on the turntable 62 and the fixed table 71, respectively. I can understand that. As described above, the turntable 6
2. The rotation angle per turn of the turntable 72 is determined by the angular intervals α ₁ and α ₂ between the hole 62-1 and the hole 72-1 respectively.

Next, an example of the operation of each unit will be described. At the start of the operation, it is assumed that all the evaporable materials 39 that can be held on the fixed table 71 and the turntable 62 are held in the through hole 29c of the hearth 29 as well as on the fixed table 71 and the turntable 62.
At the start of the operation, the push-up bar 35 is in a state of pushing up the evaporation material 39 in the through hole 29c. Then, control is performed to push up the evaporating material 39 in the through hole 29c so that the upper end thereof is maintained at a constant height even if the evaporating material 39 decreases with time. When the upper end of the push-up bar 35 moves up to a position close to the clamp mechanism 55, the clamp mechanism 55 temporarily holds the evaporation material 39 in the through hole 29c. Subsequently, the upper end of the push-up bar 35 is lowered to a position slightly lower than the fixed table 71 and the turntable 72 is rotated by a predetermined angle, so that the evaporation material 39 on the fixed table 71 is removed from the hole 71-1. Sent over. Then, the push-up bar 35 moves up again to load the evaporating material 39 on the upper end thereof and feed it into the through hole 29c.
At this time, the holding operation of the clamp mechanism 55 is released.

By repeating such an operation, when the evaporating material 39 on the fixed table 71 is exhausted, the clamp mechanism 55 temporarily holds the evaporating material 39 in the through hole 29c, and the upper end of the push-up bar 35 is raised. Fixed table 71
Can be lowered to a slightly lower position. Subsequently, the gate valve 81 is opened, and the support rod 91 is driven to move upward. The support rod 91 is loaded with the evaporating material 39 on the turntable 62 while moving upward, and feeds it into the empty hole 72-1. The upper end is located at a position slightly lower than the turntable 72 , in other words, from the upper end of the fixed table 71. Somewhat high
Stop at the position . Subsequently, the turntable 72 is Ru is a predetermined angle rotation, the evaporation material 39 on support bar 91 is transferred on the fixed table 71. At this time,
The next empty hole 72-1 of the turntable 72 is located above the hole 71-2 of the fixed table 71. Next, the support bar 91 is lowered to a position slightly lower than the turntable 62, the turntable 62 is rotated by a predetermined angle, and the next evaporation material 39 is sent to a position corresponding to the upper end of the support bar 91. . The support rod 91 carries the evaporating material 39 on the turntable 62 while moving upward, and feeds it into the empty hole 72-1.
A position slightly lower than 2 , that is , the upper end of the fixed table 71
Stop at a slightly higher position . Thereafter, the same operation is repeated, and the evaporation material 39 on the turntable 62 is transferred to the fixed table 71. The above operation is completed in such a time that the evaporation material 39 in the through-hole 29c does not significantly decrease, for example, about 1 minute. When the transfer is completed, the gate valve 81 is closed.

Thereafter, the door 66 is opened with the replenishing chamber 61 in the air state, and the evaporating material 39 is replenished in the replenishing chamber 61.
When the refilling is completed, the replenishing chamber 61 is evacuated by the evacuation device to prepare for the next refilling operation.

The above-described replenishment operation is an operation which is performed at a time when all the evaporation material 39 on the fixed table 71 is exhausted. One evaporation material 39 on the fixed table 71 is fed into the through hole 29c. An operation of replenishing the fixed table 71 one by one each time it is performed may be used.

The second embodiment will be described with reference to FIG. In this embodiment, the push-up rod 35 and the drive mechanism 3 similar to those in the first embodiment are used to push up the evaporating material 39 by being disposed immediately below the hearth 29.
6 is used, but the structure of the supply unit is different. That is,
The supply unit 100 extends horizontally from the outside of the vacuum vessel 21 to immediately below the through hole 29c of the hearth 29, can accommodate a plurality of evaporation materials 39, and has a tubular passage body 102 provided with a gate valve 101 in the middle thereof. An extruding rod 103 for moving the evaporating material 39 stored in the cylindrical passage body 102;
A drive mechanism (third drive mechanism) 104 for driving the push rod 103 is provided, and the push rod 103 supplies the evaporation material 39 to the upper end of the push rod 35 immediately below the through hole 29c. The tubular passage body 102 is made of an insulator. An insulating material is also provided at the tip of the push rod 103.

Due to the structure of the supply unit 100 as described above, one end of the closed passage body 80 is connected to the cylindrical passage body 102 outside the vacuum vessel 21 and extends upward. It is connected to the bottom wall side of the replenishing chamber 61. In the middle of the closed passage body 80, a gate valve 81 is provided.
Is provided.

The transfer mechanism 90 ′, similar to the transfer mechanism 90 in the first embodiment, replenishes by mounting an evaporating material on the tip of a support rod 91 ′ that is vertically movable within the closed passage 80. The transfer from the chamber 61 to the cylindrical passage body 102 is performed, and the drive mechanism 92 ′ for the support rod 91 ′ is provided.

As with the replenishing section 60 in the first embodiment, the replenishing section 60 'is similar to the replenishing section 60 in the first embodiment, and is not shown in the drawings. ) Is provided, but differs in the following points.
That is, in the replenishment chamber 61, a turntable 62 'having a plurality of holes 62-1' in which the evaporating material 39 can be inserted in a loosely fitted state at equal intervals in the circumferential direction is rotatably arranged. The turntable 62 ′ has a rotation drive mechanism 63.
Accordingly, the hole 62-1 ′ is rotationally driven via the bevel gear 64 such that the hole 62-1 ′ passes over the connection portion between the refilling chamber 61 and the closed passage body 80. The hole 62-1 'has the same diameter and the refilling chamber 61
The evaporating material 39 is held between the evaporating material 39 and the bottom wall. Refill room 6
The diameter of the connection between the first passage 1 and the closed passage body 80 is larger than the diameter of the evaporating material 39, and the turntable 62 'is rotated while the upper end of the support rod 91' is pushed up to the height of this connection. When the evaporation material 39 comes to the connection, the evaporation material 39
Is transferred to the upper end of the support rod 91 '. When this transfer is completed, the support rod 9 with the evaporating material 39 mounted on the upper end
1 'is lowered to the position shown in FIG. Then, in this state, the push rod 103 is driven to transfer the evaporation material 39 at the upper end of the support rod 91 ′ to the cylindrical passage body 102.

The driving mechanisms 36, 92 ', 1
04, drive control of rotation drive mechanism 63, clamp mechanism 55
The holding and releasing operations and the opening and closing control of the gate valves 81 and 101 are all performed by a control device (not shown), and the description thereof is omitted because it is basically the same as that of the first embodiment. Also in this example, a plurality of evaporation materials may be replenished at once or one at a time. However, the filling of the cylindrical passage 102 is performed earlier than the gate valve 101, and 101 is preferably kept in a normally closed state. Further, the evaporation material is a cylinder, but may be a prism.

[0049]

As described above, according to the present invention, the replenishment of the evaporative material into the vacuum vessel can be performed without stopping the operation of the apparatus. Every time the operation of the device is stopped,
There is no need to perform evacuation work, and the operating efficiency can be greatly improved.

[Brief description of the drawings]

FIG. 1 is a longitudinal sectional view showing a first embodiment of the present invention.

FIG. 2 is a plan view for explaining a positional relationship between a turntable in a replenishment chamber and a turntable and a fixed table in a supply unit in FIG. 1;

FIG. 3 is a longitudinal sectional view showing a second embodiment of the present invention.

FIG. 4 is a longitudinal sectional view showing a structure of an ion plating apparatus to which the present invention is applied.

FIG. 5 is an enlarged sectional view showing a structure around a hearth in FIG. 4;

[Explanation of symbols]

 29 Hearth 35 Push-up rod 36, 92, 92 ', 104 Drive mechanism 39 Evaporation material 64, 73 Rotary drive mechanism 60 Replenishment unit 61 Replenishment chamber 62, 72 Turntable 70, 100 Supply unit 71 Fixed table 80 Sealed passage 81, 101 Gate valve 90, 90 'Transfer mechanism 102 Cylindrical passage body 103 Push rod

──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-8-74039 (JP, A) JP-A-62-247067 (JP, A) JP-A-8-134636 (JP, A) Jpn. 162860 (JP, U) (58) Field surveyed (Int. Cl. ⁷ , DB name) C23C 14/00-14/58

Claims (6)

(57) [Claims] 1. A heating device comprising: a heating source; and a hearth disposed in a vacuum vessel, wherein the heating source evaporates an evaporating material stored in the hearth, and attaches the evaporated substance to a surface of the substrate. in a vacuum deposition apparatus for forming a film on the substrate, before Symbol hearth is formed with a through hole extending in the vertical direction, the support of the evaporation material which is vertically movable to just under the prior SL through hole and parts, a first push-up drive mechanism for driving the support unit, before SL has a chamber that can be independently evacuated to the vacuum vessel, and refill unit for storing a plurality of evaporation materials It can hold multiple evaporation material to transfer the evaporated material by connecting a supply unit for supplying one of them to the support unit, the a pre-Symbol supplementing portion and a predetermined position of the supply unit With a closed passage for opening and closing the gate with a gate valve Comprising a sealed passage body and ability, and a transfer mechanism for transferring the evaporation material from the refill unit through the closed passage body to a predetermined position of the supply unit, the support portion is smaller in diameter than the diameter of the evaporation material Having
A rod-shaped body made of an insulating material, wherein the transfer mechanism is disposed in the closed passage, and
The steam is attached to the tip of a support rod having a diameter smaller than the diameter of the raw material.
Up and down by the second push-up drive mechanism with loading material
The supply unit is inserted into a position corresponding to the rod-shaped body.
Through the hole and the position corresponding to the support rod and evaporation
A fixing table having a hole through which a material can be inserted;
On the circumference that includes the two positions
Has a plurality of holes through which the evaporation material can be inserted at equal intervals
A first turntable and a front of the first turntable
A first rotation drive mechanism that rotates about the center of the circumference
And the replenishment unit and the supply unit are provided on the fixed table.
Through the wall of the vacuum vessel just below the hole
And is connected to the chamber of the replenishment section by a diameter smaller than the diameter of the evaporation material.
Second turn having inserted through possible holes in KuKatsu the support rod
A table is rotatably arranged, and the second turntable is moved forward by a second rotation drive mechanism.
The rotary drive so that the hole passes immediately below the closed passage body.
And the bottom wall of the chamber corresponding to the area immediately below the closed passage body is
The support rod is inserted in a sealed state, and the support rod is
Into the closed passage through the hole in the turntable
To reach the hole of the fixed table of the supply section
Material supply apparatus for a vacuum deposition, characterized in that it is configured. 2. The material supply device according to claim 1, wherein
The hearth holds the vaporized material in the through hole
Material supply device for vacuum film formation, characterized in that a clamp mechanism is provided . 3. A heating source, and a heater disposed in a vacuum vessel.
And contained in the hearth by the heating source.
Evaporate the evaporation material and attach the evaporated substance to the surface of the substrate
Vacuum film forming apparatus for forming a film on the substrate
The hearth has a through hole extending vertically.
The evaporating material is provided directly below the through hole so as to be vertically movable.
The support for the material, the first push-up driving mechanism for driving the support , and the vacuum container can be independently evacuated.
A replenishing unit for storing a plurality of evaporative materials and a plurality of evaporative materials, one of which can be
A supply section for supplying to the support section, and an evaporating material connecting the replenishment section and a predetermined position of the supply section.
There is a closed passage for transferring
Given a closed passage body which can be opened and closed in Lube, from the supplement section through the sealed passage of the supply unit
A transfer mechanism for transferring the evaporated material to a position, wherein the support portion is a rod-shaped body made of an insulating material,
The supply unit is provided directly outside the through hole of the hearth from outside the vacuum vessel.
Extends down to accommodate multiple evaporation materials
Is a tubular passage body provided with a gate valve, and the tubular passage body
Extrusion rod to move evaporative material stored in road body
And a third drive mechanism for driving the push rod.
The extruded material is used to push the evaporating material immediately below the through hole.
A material supply device for vacuum film formation, wherein the material is supplied to the rod-shaped body . 4. The material supply device according to claim 3 , wherein
One end of the closed passage body is located outside the vacuum vessel.
Connected to the tubular passage body and extends upward,
The end side is connected to the bottom wall side of the chamber of the replenishing unit,
The transfer mechanism is vertically movably disposed in the closed passage body.
The above-mentioned evaporation material is mounted on the tip of the
Wherein the material is transferred to the cylindrical passage body from a vacuum. 5. The material supply device according to claim 3 , wherein the evaporating material is inserted into the chamber of the replenishing unit.
Having a plurality of holes that can pass through at equal intervals in the circumferential direction
Table is rotatably arranged.
The hole is connected to the chamber by the rotary drive mechanism.
A material supply apparatus for vacuum film formation, which is driven to rotate so as to pass over a connection portion with a road body . 6. The material supply device according to claim 3 , wherein the hearth has a steam supply hole in the through hole.
A material supply device for vacuum film formation, comprising a clamp mechanism for holding a generated material.