CN112442659B

CN112442659B - Device and method for automatic material changing, heating and vaporizing of coating material

Info

Publication number: CN112442659B
Application number: CN201910824241.0A
Authority: CN
Inventors: 林明达
Original assignee: Aiyi Group Co ltd
Current assignee: Aiyi Group Co ltd
Priority date: 2019-09-02
Filing date: 2019-09-02
Publication date: 2023-06-16
Anticipated expiration: 2039-09-02
Also published as: CN112442659A

Abstract

The invention discloses a device and a method for automatically changing and heating and vaporizing coating materials, wherein the device comprises the following components: the medicine bag is internally filled with a sealed coating material; a material bay that moves in a fixed point between first, second and third positions; a storage compartment having a heating chamber, an introduction hole, and a discharge hole; the filling and cooling unit is used for placing the medicine bags in the material cabin at the first position or firstly cooling and then placing the medicine bags; the breaking and clamping unit is used for unsealing or taking out the medicine bag in the material cabin at the second position; the medicine bag heating unit is arranged near the third position and is used for heating the material heating cup sealed with the pressure storage cabin to heat, so that the coating material in the medicine bag is evaporated into gas, and the gas is introduced into the introduction hole to enter the heating cabin and then is introduced into the coating cabin body; and the control units are respectively electrically coupled with and control the operation of each unit.

Description

Device and method for automatic material changing, heating and vaporizing of coating material

Technical Field

The present invention relates to a device and a method for heating and vaporizing coating materials, and more particularly, to a device and a method for automatically changing and heating and vaporizing coating materials for sealing the coating materials in a medicine tank.

Background

The existing equipment of the type such as coating materials applied to a vapor deposition device belongs to a mode of one-time coating material placement and material production, so that the material replacement is needed in a manual mode. However, the above-mentioned manual feeding and feeding operation mode is that the plated film is taken out by personnel and then replaced by a mode put by personnel, which generally results in the problems of personnel contact pollution process and the like if applied to the semiconductor or panel industry, and when the plated film material is replaced by the above-mentioned equipment adopting the manual mode, the material cabin is in evaporation operation of the plated film material, and the heater of the material cabin is integrally designed, so that only the cooling fan can be used together for heat dissipation and cooling, the whole cooling process needs at least forty minutes, and the plated film material can be added after the material cabin is cooled, thereby the production efficiency is poor.

On the other hand, in the current equipment design, the material cabin of the coating material is evaporated and then enters the deposition cabin to carry out deposition coating, and the gas is conveyed without steady flow design, so that the processing quality of the deposition coating operation is affected to a certain extent.

Disclosure of Invention

The invention aims to provide a device for automatically discharging, feeding and evaporating coating materials, discharging the evaporated coating materials, and automatically changing the coating materials and heating and evaporating the discharged coating materials.

The invention further aims at providing a method for automatically changing materials of coating materials and heating and vaporizing the coating materials.

In order to achieve the purpose of the automatic material changing and heating vaporization device for coating materials, the invention provides an automatic material changing and heating vaporization device for coating materials, which comprises the following components: a medicine bag which comprises a sealing body, wherein the inside of the sealing body is filled with a sealed coating material; a material compartment having a material heating cup for receiving the medicine bag and transporting the heating cup to a first position, a second position or a third position by a mechanical transport unit; the pressure storage cabin is provided with a heating cabin, an introduction hole which is arranged at the lower position of the heating cabin and communicated with the heating cabin space, and a discharge hole which is arranged at the position higher than the introduction hole and communicated with the heating cabin space, and the discharge hole is connected with the coating cabin body through a pipeline; a filling and cooling unit for placing a sealed medicine bag on the material heating cup at the first position or placing the sealed medicine bag after cooling the material heating cup; a breach and gripping unit for unsealing the sealed capsule carried in the material heating cup in the second position or removing the evaporated capsule from the material heating cup; the medicine bag heating unit is arranged near the third position and is used for heating the material heating cup which is positioned at the third position and sealed with the pressure storage cabin, so that the coating material in the medicine bag of the material heating cup is evaporated into gas in a sealed space, and the gas is led into the leading-in hole of the pressure storage cabin and enters the heating cabin; the control unit is electrically coupled with the mechanical conveying unit, the pressure storage cabin, the filling and cooling unit, the breaking and clamping unit and the medicine bag heating unit respectively, and controls the linkage of the units.

In a preferred embodiment, the capsule heating unit is a one-piece or multi-piece heating body and is detachably contacted with the material compartment for heating.

In a preferred embodiment, the capsule is made of a metal material that can be electroplated.

In a preferred embodiment, the filling and cooling unit comprises a cooling mechanism provided with at least one nozzle at the periphery of the material heating cup in the first position and cooling the material compartment with air jets.

In a preferred embodiment, the filling and cooling unit comprises a filling mechanism comprising a filling box having a guiding chamber for accommodating a plurality of capsules in a large number and guiding the capsules to an outlet in a funnel-shaped guiding structure, a turntable disposed at the outlet for transferring the capsules at the outlet to the sliding guide rail for guiding the capsules to a desired angle and being output by an output port corresponding to the material heating cup moved to the first position.

In a preferred embodiment, a duckbill filter is disposed in the inlet opening of the pressure chamber.

In a preferred embodiment, the medicine bag recycling unit further comprises a funnel, and when the opening and clamping unit takes out the medicine bag from the material heating cup, the medicine bag recycling unit is used for containing the medicine bag and then transferring the medicine bag into the funnel of the medicine bag recycling unit.

In order to achieve the above-mentioned purpose of automatic material changing and heating vaporization of coating material, the invention provides a method for automatic material changing and heating vaporization of coating material comprising the steps of: providing a device for automatically changing materials and heating and vaporizing the coating materials; a cooling and filling step: the control unit controls the material cabin to move to the first position, and fills a medicine bag with the filling and cooling unit or firstly sprays air to cool the material cabin and then fills the medicine bag; a breaking step: the control unit is used for controlling the material cabin to move to the second position, and the breaking and clamping unit is used for breaking the medicine bag into a breaking opening; a medicine bag heating step: then the control unit controls the material cabin to move to the third position, and the medicine bag heating unit is used for heating, so that the coating material in the medicine bag is in a gasification state; a capsule removing step: and (3) moving the material cabin where the heated coating material is evaporated to the second position, and taking out the medicine bag from the material cabin by the breaking and clamping unit.

In a preferred embodiment, the capsule heating unit maintains a holding temperature lower than the heating temperature of the capsule heating step but higher than room temperature after the capsule heating step is completed.

In a preferred embodiment, the capsule heating unit heats the material compartment in a clamping or pushing manner.

The invention is characterized in that: the coating material of the invention is made into medicine bag sealing, so the coating material can be filled into a mode of a large number of medicine bags at one time, so the filling is facilitated at any time, and the defect that the known coating material is in powder form and is easy to cause dust pollution can be overcome. The process of filling medicine bags is automatic and mechanical. The heating device of the material cabin is designed as a separable heating device, so that the material cabin can be cooled independently and rapidly, the heating device of the material cabin can not be cooled, and the heating time and energy sources for heating the material cabin again can be saved. The invention can combine the mechanical arm to automatically perform the functional operation of changing the medicine bag (sealed coating material or evaporated empty can), and becomes completely unmanned automatic equipment. The coating material enters the storage cabin after the material cabin is evaporated, and then enters the coating cabin body for deposition, and the storage cabin stores gas and then enters the coating cabin body, so that stable airflow velocity can be provided, and the storage cabin has a filtering function in the sublimation input process of the material cabin: when the vacuum degree is in molecular flow, the evaporated gas molecules enter the pressure storage cabin after being heated by the material heating cup, the pressure storage cabin is designed into a duckbill filter plate (rod) which is arranged in a bottom-up evaporation pipeline by using gravity and a front end leading-in hole, the materials which are not gasified, such as larger molecules or materials brought by material eruption, are blocked to form a filtering effect, and are gasified into gas to achieve the filtering and regation function, so that the pressure storage cabin can provide the filtering effects of pressure storage steady flow and regation, the pressure storage cabin (heating) is designed into an up-down flow-around mode, the functions of storage, slow flow, filtering and the like are achieved in the vacuum molecular flow state, and the eruption phenomenon can not be directly formed.

Drawings

FIGS. 1A-1C are front views of various embodiments of a cartridge of the apparatus for automatic material changing and heating vaporization of a coating material of the present invention, respectively;

FIG. 2 is a system block diagram of an embodiment of an apparatus for automatic material changing and heating vaporization of a coating material according to the present invention;

FIG. 3 is a perspective view of an embodiment of an apparatus for automatic material changing and heating vaporization of a coating material according to the present invention;

FIG. 4 is a perspective view of a cartridge heating unit of the apparatus for automatic material changing and heating vaporization of a coating material of the present invention;

FIG. 5 is a schematic front view of a pressure storage compartment of the apparatus for automatic material changing and heating vaporization of coating material of the present invention;

FIG. 6A is a schematic perspective view of a loading mechanism of the apparatus for automatic material changing and heating vaporization of a coating material according to the present invention;

FIG. 6B is a schematic cross-sectional view of the loading mechanism of the apparatus for automatic material changing and heating vaporization of coating material of the present invention;

FIG. 6C is a schematic cross-sectional view of the actuation and delivery ports of the slide bore rail of the apparatus for automatic reloading and heating vaporization of coating materials of the present invention;

FIG. 7 is a schematic perspective view of a cooling mechanism of the apparatus for automatic material changing and heating vaporization of a coating material according to the present invention;

FIG. 8 is a schematic diagram of the opening and the opening cone action of the clamping unit of the device for automatic material changing and heating vaporization of the coating material of the present invention;

FIG. 9 is a schematic diagram showing the operation of the cartridge heating unit of the apparatus for automatic material changing and heating vaporization of coating material according to the present invention;

FIG. 10 is a flow chart of the steps of the method for automatic material changing and heating vaporization of a coating material according to the present invention.

Symbol description in the drawings:

1, a device for automatically changing materials and heating and vaporizing coating materials;

11. 11',11 "sachets;

111. 111',111 "seal;

12 material cabin;

121 material heating cup;

13 storing the ballast;

131 heating the cabin;

132 lead-in holes;

1321 filter sheets;

133 a lead-out hole;

14 a filling and cooling unit;

141 a cooling mechanism;

1411 nozzles;

142 loading mechanisms;

1421 packing box;

1422 guide the chamber;

14221. a guide structure;

14222. an outlet;

1423 a dial;

1424 smooth bore guide rails;

1425 output port;

15 a breach and clamping unit;

151 break cone;

152 a robotic arm;

a 16 medicine bag heating unit;

161 a heater;

17 a control unit;

18 a sachet recovery unit;

181 hopper mouth;

2 a mechanical conveying unit;

a coating cabin body;

l1 is a first position;

an L2 second position;

l3 third position;

and step S11 to step S15, a method for automatically changing the coating material and heating and vaporizing the coating material.

Detailed Description

The following detailed description of the embodiments of the present invention is mainly simplified in schematic diagram, which illustrates the basic structure of the present invention by way of illustration only, and therefore, only the components related to the present invention are labeled in the drawings, and the components shown are not drawn in terms of the number, shape, size ratio, etc. of the embodiments, and the specification and size of the embodiments are optional designs, and the layout of the components may be more complex.

Please refer to fig. 1A, 1B and 1C. In order to solve the problem, the present invention makes the coating material into a capsule 11 and seals the capsule 11, wherein the capsule 11 comprises a tube or a can with at least one opening at one end, and after the coating material is placed in the tube or can, all openings of the tube are sealed by a sealing material which is easy to puncture, so that the coating material can be filled into a mode of a plurality of capsules 11 at a time, and the automatic conveying is convenient, and the purpose of replacing the coating material can be achieved by removing and refilling the capsules into a material heating cup (as shown in fig. 2 and 4 described below). In order to withstand heat, the material of the medicine bag is preferably metal, so that the heat conduction is facilitated to evaporate the coating material, and in addition, the material of the medicine bag 11 is preferably a metal material capable of being electroplated, so that the residual materials are cleaned. In particular, the shape of the drug sac 11 can be changed according to the capacity and design requirements, such as the drug sac 11 of the embodiment of fig. 1A having one end opened and one end closed; the medicine bag 11 'of the embodiment of fig. 1B is opened at one end and closed at one end, but the diameter is larger than that of the medicine bag 11 of the embodiment of fig. 1A, the medicine bag 11″ of the embodiment of fig. 1C is opened at two ends, and after the film coating material is put in the open end of the medicine bag (11, 11',11 "), the open end is sealed with a metal sheet or a material easy to break so as to form a seal (111, 111', 111"), so that the metal sheet break of the seal (111, 111',111 ") is opened or recovered later, and then the film coating material is filled.

Please refer to fig. 2, 3 and 4 again. The device for automatic material changing and heating vaporization of a coating material of this embodiment is suitable for introducing a coating material into a coating cabin C of a vapor deposition apparatus, for example, after heating vaporization of a coating material, and performing vapor deposition operation on a workpiece, and the device 1 for automatic material changing and heating vaporization of a coating material comprises: the medicine bag 11, the material chamber 12, the pressure storage chamber 13, the filling and cooling unit 14, the breaking and gripping unit 15, the medicine bag heating unit 16, and the control unit 17.

The medicine bag 11 comprises a sealing body, at least one end of the sealing body is provided with an opening, the inside of the sealing body is filled with a sealed coating material, and the opening is sealed by a sealing material which is easy to puncture;

the material chamber 12 has a material heating cup 121 for receiving the medicine bag 11, and the material heating cup 121 is transported by a mechanical transporting unit 2 mounted on and movable on the machine to move between a first position L1, a second position L2, and a third position L3. In the present embodiment, in the first position L1, the control unit 17 may fill the material heating cup 121 transferred to this position with the medicine bag 11 with the sealing coating material or fill the empty material heating cup 121 with the medicine bag 11 with the sealing coating material after cooling by the cooling mechanism 141 described later; in the second position L2, the control unit 17 may perform opening of the sealing material of the medicine bag 11 of the material heating cup 121 transferred to this position or may pinch the empty medicine bag 11 after evaporation of the coating material after opening is completed out of the material heating cup 121; in the third position L3, the control unit 17 may heat the material heating cup 121 transferred thereto by using the heater 161. The heater 161 of the medicine bag heating unit 16 is a single-piece type or multi-piece type heating body, as shown in fig. 2, 4 and 9, and the embodiment of the present invention is a dual-piece type heating body, and the heating units are detachably contacted with the material heating cup 121 to heat the medicine bag heating unit 16, which has the advantage that when the medicine bag heating unit 16 holds the material heating cup 121 to complete heating, the heater 161 releases the material heating cup 121, so that the material heating cup 121 can be quickly cooled by the cooling mechanism 141 (shown in fig. 7) to replace a new medicine bag 11.

The ballast 13 comprises a heating chamber 131, an inlet 132 disposed at a lower position of the heating chamber 131 and in communication with the space of the heating chamber 131, and an outlet 133 disposed at a position higher than the inlet 132 and in communication with the space of the heating chamber 131, wherein the outlet 133 is connected to the coating chamber C by a pipeline, and the inlet 132 is sealed with the space of the material heating cup 121 moving to the third position L3 to evaporate the coating material and then convey the coating material into the inlet 132 and then into the heating chamber 131. When the evaporated coating material passes through the introduction hole 132, it passes through the duckbill-shaped and heated filter sheet 1321, so that the coating material which is not completely vaporized is blocked and is vaporized again into gas, thereby having the functions of filtering and regasifying. Furthermore, the heatable pressure chamber 13 is designed to be a vertical flow-around type, and in a vacuum molecular flow state, functions such as storage, slow flow, filtration and the like are achieved without directly forming a eruption phenomenon, as shown in fig. 5.

The filling and cooling unit 14 is configured to place a sealed capsule 11 with a coating material on the material heating cup 121 at the first location L1 or to place the sealed capsule 11 after cooling the coating material heating cup 121. The filling and cooling unit 14 includes a cooling mechanism 141, as shown in fig. 7, which is provided with at least one nozzle 1411 at the periphery of the material heating cup 121 at the first position L1, and cools the material heating cup 121 of the coating material of the material compartment 12 by air injection.

The breach and gripping unit 15 is used to perform an opening operation of the sealed medicine bag 11 carried in the material heating cup 121 at the second position L2 or an operation of taking out the evaporated medicine bag 11 from the material heating cup 121. Specifically, as shown in fig. 8, after the material heating cup 121 is conveyed to the second position L2 in the above-described operation of unsealing the medicine bag 11, the material heating cup 121 is lifted up, and the sealing material is pierced by the opening of the sealing material corresponding to the medicine bag 11 in the material heating cup 121 and the opening cone 151 of the gripping means 15, so that the medicine bag 11 is unsealed.

The medicine bag heating unit 16 is disposed near the third location L3, and is configured to heat the material heating cup 121 located at the third location L3 and sealed with the pressure storage chamber 13, so that the coating material in the medicine bag 11 of the material heating cup 121 evaporates into a gas in a sealed space, and the gas is introduced into the introduction hole 132 of the pressure storage chamber 13 and enters the heating chamber 131.

A control unit 17 electrically coupled to the mechanical delivery unit 2, the pressure storage compartment 13, the filling and cooling unit 14, the breach and gripping unit 15, and the medicine bag heating unit 16, respectively, and controlling the operations of the units.

The heater 161 of the medicine bag heating unit 16 of the present invention may be a heating body of a single-piece type or a multi-piece type, and in this embodiment, the heating is performed by contacting the material heating cup 121 of the material chamber 12 in a separable manner. After the material heating cup 121 is heated, the two heaters 161 are separated from the material heating cup 121 to maintain a space, at this time, the material heating cup 121 can be quickly cooled and the next taking-out operation can be quickly performed, the two heaters 161 can be maintained at a certain maintaining temperature without completely cooling, and when the material heating cup 121 needs to be heated again, the temperature can be quickly increased to the required working temperature, so that the functions of quick cooling and quick heating are achieved.

As shown in fig. 6A, 6B, and 6C. The filling and cooling unit 14 of the present invention comprises a filling mechanism 142, which comprises a stuffing box 1421, wherein the stuffing box 1421 has a guiding chamber 1422, a rotating disc 1423, and a sliding guide 1424, the guiding chamber 1422 is used for accommodating a plurality of the medicine bags 11 in large quantity, the medicine bags 11 are sequentially guided to an outlet 14222 by a funnel-shaped guiding structure 14221, the rotating disc 1423 is arranged at the outlet 14222, and is used for moving the medicine bags 11 of the outlet 14222 to the sliding guide 1424, the sliding guide 1424 is used for guiding the medicine bags 11 to a required angle, such as a vertical angle, and is limited to be output by an output port 1425, and the output port 1425 corresponds to the material heating cup 121 moved to the first position L1, so that the medicine bags 11 output by the output port 1425 can fall into the material heating cup 121.

The present invention further comprises a medicine bag recycling unit 18, which comprises a funnel 181, wherein when the opening and clamping unit 15 takes out the medicine bag 11 from the material heating cup 121, the medicine bag is transferred into the funnel 181, and then the medicine bag 11 is guided to the recycling unit 18 through the funnel 181, and the medicine bag 11 is contained in the recycling unit 18.

In the present invention, the capsule heating unit 16 may heat the material chamber 12 by clamping or pushing.

The present invention further comprises a medicine bag recycling unit 18, which comprises a funnel 181, and when the opening and clamping unit 15 removes the medicine bag 11 from the material heating cup 121, the medicine bag recycling unit 18 is used for accommodating the medicine bag 11, and then transferring the medicine bag 11 into the funnel 181, and further guiding the medicine bag into a recycling bin.

Please refer to fig. 10. The method for automatically changing materials and heating and vaporizing the coating material in the embodiment comprises the following steps: providing the device 1 for automatically changing the coating material and heating and vaporizing (step S11); a cooling filling step (step S12): the control unit controls the material cabin to move to the first position, and fills a medicine bag with the filling and cooling unit or firstly sprays air to cool the material cabin and then fills the medicine bag; a breach step (step S13): the control unit is used for controlling the material cabin to move to the second position, and the breaking and clamping unit is used for breaking the medicine bag into a breaking opening; a medicine bag heating step (step S14): the control unit is used for controlling the material cabin to move to the third position, sealing the space between the material cabin and the pressure storage cabin, heating by the medicine bag heating unit, enabling the coating material in the medicine bag to form a gasification state, and inputting the coating material into the pressure storage cabin; a capsule-withdrawing step (step S15): and (3) moving the material cabin where the heated coating material is evaporated to the second position, and taking out the medicine bag from the material cabin by the breaking and clamping unit.

After the medicine bag heating step (step S14) is completed, the heater of the medicine bag heating unit can maintain a heating temperature lower than the medicine bag heating step (step S14) but a holding temperature higher than the room temperature, and when the material heating cup of the material cabin needs to be heated, the temperature of the heater can be quickly increased to the required working temperature so as to achieve the effects of quick cooling and quick heating.

The foregoing embodiments are merely illustrative of the principles, features and advantages of the invention, and are not intended to limit the scope of the invention, which may be modified or varied by those skilled in the art without departing from the spirit and scope of the invention. Any equivalent changes and modifications made by the present disclosure are intended to be covered by the scope of the appended claims. Accordingly, the scope of the invention is to be indicated by the appended claims.

Claims

1. The utility model provides a device of automatic reloading and heating vaporization of coating film material, is applicable to after heating vaporization with a coating film material, and leading into a coating film cabin, its characterized in that contains:

the medicine bag comprises a pipe body or a tank body with at least one end provided with an opening, and after the coating material is arranged in the medicine bag, all the openings of the medicine bag are sealed by a sealing material which is easy to puncture;

a material compartment having a material heating cup for receiving the medicine bag and being moved between a first position, a second position or a third position by a mechanical conveying unit;

the pressure storage cabin is provided with a heating cabin, an introduction hole which is arranged at the lower position of the heating cabin and communicated with the heating cabin space, and a discharge hole which is arranged at the position higher than the introduction hole and communicated with the heating cabin space, and the discharge hole is connected with the coating cabin body through a pipeline;

a filling and cooling unit for placing a sealed and unbroken sachet on the material heating cup at the first position or placing the sealed sachet after cooling the material heating cup;

a breaking and clamping unit for breaking the sealed medicine bag carried in the material heating cup at the second position or taking the evaporated medicine bag out of the material heating cup;

the medicine bag heating unit is arranged near the third position and is used for heating the material heating cup which is positioned at the third position and sealed with the pressure storage cabin, so that the coating material in the medicine bag of the material heating cup is evaporated into gas in a sealed space, and the gas is led into the leading-in hole of the pressure storage cabin and enters the heating cabin; and

and a control unit electrically coupled to the mechanical conveying unit, the pressure storage cabin, the filling and cooling unit, the opening and clamping unit and the medicine bag heating unit, respectively, and controlling the operations of the units.

2. The apparatus for automatic material changing and heating vaporization of coating material according to claim 1, wherein the heater of the cartridge heating unit is a single-piece type or multi-piece type heating body and is detachably contacted with the material chamber to heat the material chamber, respectively.

3. The apparatus for automatic material changing and heating vaporization of a plating material according to claim 1, wherein the cartridge is made of a metal material capable of being plated.

4. The apparatus according to claim 1, wherein the loading and cooling unit comprises a cooling mechanism having at least one nozzle disposed on the periphery of the material heating cup in the first position and cooling the material compartment by air jet.

5. The apparatus of claim 1, wherein the loading and cooling unit comprises a loading mechanism comprising a loading cartridge having a guiding chamber for receiving a plurality of capsules and guiding the capsules sequentially to an outlet with a funnel-shaped guiding structure, a turntable disposed at the outlet for transferring the capsules at the outlet to the sliding guide for guiding the capsules to a desired angle and limited output from an output port corresponding to the material heating cup moved to the first position.

6. The apparatus for automatic material changing and heating vaporization of a plating film according to claim 1, wherein a filter is provided in the introduction hole of the pressure storage chamber.

7. The apparatus according to claim 1, further comprising a capsule recycling unit comprising a funnel, wherein the capsule recycling unit is guided by the funnel after the capsule is removed from the material heating cup by the breach and gripping unit.

8. The apparatus of claim 7, wherein the step of removing the cartridge from the material heating cup and transferring the cartridge to the funnel is performed by a robotic arm.

9. The automatic material changing and heating vaporization method for coating material includes the following steps:

providing a device for automatically changing and heating and vaporizing coating materials according to claim 1;

a cooling and filling step: the control unit controls the material cabin to move to the first position, and the filling and cooling unit is used for filling the medicine bag or carrying out air injection cooling on the material cabin and then filling the medicine bag;

a breaking step: the control unit is used for controlling the material cabin to move to the second position, and the breaking and clamping unit is used for breaking the medicine bag into a breaking opening;

a medicine bag heating step: the control unit is used for controlling the material cabin to move to the third position, sealing the space between the material cabin and the pressure storage cabin, heating by the medicine bag heating unit, enabling the coating material in the medicine bag to form a gasification state, and inputting the coating material into the pressure storage cabin; and

a capsule removing step: and (3) moving the material cabin where the heated coating material evaporates to the second position, and taking the medicine bag out of the material cabin by the breaking and clamping unit.

10. The method of claim 9, wherein the cartridge heating unit maintains a holding temperature lower than the heating temperature of the cartridge heating step but higher than room temperature after the cartridge heating step is completed.