JP3181193B2 - Substrate for mounting electronic circuit components - Google Patents

Substrate for mounting electronic circuit components

Info

Publication number
JP3181193B2
JP3181193B2 JP15189995A JP15189995A JP3181193B2 JP 3181193 B2 JP3181193 B2 JP 3181193B2 JP 15189995 A JP15189995 A JP 15189995A JP 15189995 A JP15189995 A JP 15189995A JP 3181193 B2 JP3181193 B2 JP 3181193B2
Authority
JP
Japan
Prior art keywords
connection terminal
terminal group
layer
inner conductor
electrically connected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
JP15189995A
Other languages
Japanese (ja)
Other versions
JPH098459A (en
Inventor
元雄 浅井
洋一郎 川村
要二 森
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ibiden Co Ltd
Original Assignee
Ibiden Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=26437241&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=JP3181193(B2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Ibiden Co Ltd filed Critical Ibiden Co Ltd
Priority to JP15189995A priority Critical patent/JP3181193B2/en
Priority to PCT/JP1996/002608 priority patent/WO1998011605A1/en
Priority claimed from PCT/JP1996/002608 external-priority patent/WO1998011605A1/en
Publication of JPH098459A publication Critical patent/JPH098459A/en
Priority to US09/412,877 priority patent/US6384344B1/en
Application granted granted Critical
Publication of JP3181193B2 publication Critical patent/JP3181193B2/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/52Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/538Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames the interconnection structure between a plurality of semiconductor chips being formed on, or in, insulating substrates
    • H01L23/5384Conductive vias through the substrate with or without pins, e.g. buried coaxial conductors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/498Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
    • H01L23/49827Via connections through the substrates, e.g. pins going through the substrate, coaxial cables
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/498Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
    • H01L23/49866Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers characterised by the materials
    • H01L23/49894Materials of the insulating layers or coatings
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01RELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R12/00Structural associations of a plurality of mutually-insulated electrical connecting elements, specially adapted for printed circuits, e.g. printed circuit boards [PCB], flat or ribbon cables, or like generally planar structures, e.g. terminal strips, terminal blocks; Coupling devices specially adapted for printed circuits, flat or ribbon cables, or like generally planar structures; Terminals specially adapted for contact with, or insertion into, printed circuits, flat or ribbon cables, or like generally planar structures
    • H01R12/50Fixed connections
    • H01R12/51Fixed connections for rigid printed circuits or like structures
    • H01R12/52Fixed connections for rigid printed circuits or like structures connecting to other rigid printed circuits or like structures
    • H01R12/523Fixed connections for rigid printed circuits or like structures connecting to other rigid printed circuits or like structures by an interconnection through aligned holes in the boards or multilayer board
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/11Printed elements for providing electric connections to or between printed circuits
    • H05K1/111Pads for surface mounting, e.g. lay-out
    • H05K1/112Pads for surface mounting, e.g. lay-out directly combined with via connections
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/15Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151Die mounting substrate
    • H01L2924/1517Multilayer substrate
    • H01L2924/15172Fan-out arrangement of the internal vias
    • H01L2924/15173Fan-out arrangement of the internal vias in a single layer of the multilayer substrate
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151Die mounting substrate
    • H01L2924/1517Multilayer substrate
    • H01L2924/15172Fan-out arrangement of the internal vias
    • H01L2924/15174Fan-out arrangement of the internal vias in different layers of the multilayer substrate
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151Die mounting substrate
    • H01L2924/153Connection portion
    • H01L2924/1531Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
    • H01L2924/15311Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/02Fillers; Particles; Fibers; Reinforcement materials
    • H05K2201/0203Fillers and particles
    • H05K2201/0206Materials
    • H05K2201/0212Resin particles
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09Shape and layout
    • H05K2201/09209Shape and layout details of conductors
    • H05K2201/09218Conductive traces
    • H05K2201/09227Layout details of a plurality of traces, e.g. escape layout for Ball Grid Array [BGA] mounting
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09Shape and layout
    • H05K2201/09209Shape and layout details of conductors
    • H05K2201/09372Pads and lands
    • H05K2201/09472Recessed pad for surface mounting; Recessed electrode of component
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09Shape and layout
    • H05K2201/09209Shape and layout details of conductors
    • H05K2201/095Conductive through-holes or vias
    • H05K2201/09509Blind vias, i.e. vias having one side closed
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09Shape and layout
    • H05K2201/09209Shape and layout details of conductors
    • H05K2201/09654Shape and layout details of conductors covering at least two types of conductors provided for in H05K2201/09218 - H05K2201/095
    • H05K2201/09727Varying width along a single conductor; Conductors or pads having different widths
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/10Details of components or other objects attached to or integrated in a printed circuit board
    • H05K2201/10613Details of electrical connections of non-printed components, e.g. special leads
    • H05K2201/10621Components characterised by their electrical contacts
    • H05K2201/10674Flip chip
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/10Details of components or other objects attached to or integrated in a printed circuit board
    • H05K2201/10613Details of electrical connections of non-printed components, e.g. special leads
    • H05K2201/10621Components characterised by their electrical contacts
    • H05K2201/10734Ball grid array [BGA]; Bump grid array
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/46Manufacturing multilayer circuits
    • H05K3/4602Manufacturing multilayer circuits characterized by a special circuit board as base or central core whereon additional circuit layers are built or additional circuit boards are laminated

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は、表裏両面にそれぞれ接
続端子群が形成された電子回路部品搭載用基板に関する
ものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electronic circuit component mounting board having connection terminals on both sides.

【0002】[0002]

【従来の技術】従来より、電子回路部品を搭載するため
のプリント配線板として、いわゆる電子回路部品搭載用
基板が知られている。
2. Description of the Related Art Conventionally, a so-called electronic circuit component mounting board has been known as a printed wiring board for mounting electronic circuit components.

【0003】この種の電子回路部品搭載用基板において
は、ベース基板として、例えばサブトラクティブ法によ
って形成される導体層を基材の表裏両面に持つ両面板な
どが使用される。ベース基板の表面の中央部には、通
常、フリップチップ等のようなLSIのベアチップや、
BGA等のようなパッケージを表面実装するためのエリ
アが設けられている。同エリア内には、多数のパッドか
らなる第1のパッド群が密集した状態で形成されてい
る。一方、ベース基板の裏面の外周部には、多数のパッ
ドからなる第2のパッド群が形成されている。そして、
これらのパッド上には、マザーボード側との接続を図る
ための突起電極としてバンプが形成されている。また、
ベース基板の外周部には、表裏を貫通する多数のスルー
ホールが形成されている。これらのスルーホールと第1
のパッド群を構成する各パッドとは、ベース基板の表面
に形成された導体パターンを介して接続されている。ま
た、スルーホールと第2のパッド群を構成する各パッド
とは、同様にベース基板の裏面に形成された導体パター
ンを介して接続されている。その結果、この電子回路部
品搭載用基板においては、第1のパッド群と第2のパッ
ド群とが互いに電気的に接続された状態となっている。
In this type of electronic circuit component mounting board, a double-sided board having a conductor layer formed by a subtractive method on both front and back surfaces of a base material is used as a base board. In the central part of the surface of the base substrate, usually, an LSI bare chip such as a flip chip,
An area for surface mounting a package such as a BGA is provided. In the area, a first pad group including a large number of pads is formed in a dense state. On the other hand, a second pad group including a large number of pads is formed on the outer peripheral portion on the back surface of the base substrate. And
Bumps are formed on these pads as bump electrodes for connection with the motherboard. Also,
A large number of through holes penetrating the front and back are formed in the outer peripheral portion of the base substrate. These through holes and the first
Each of the pads constituting the pad group is connected via a conductor pattern formed on the surface of the base substrate. Further, the through-holes and the respective pads constituting the second pad group are similarly connected via conductor patterns formed on the back surface of the base substrate. As a result, in the electronic circuit component mounting board, the first pad group and the second pad group are electrically connected to each other.

【0004】[0004]

【発明が解決しようとする課題】ところで、表面側に導
体パターンを形成する場合、第1のパッド群の外周部に
位置するパッドからベース基板の外周部に向けて導体パ
ターンを引き出すことは、それほど困難ではない。その
反面、同パッド群の中央部に位置するパッドについて
は、それらよりも外側に位置するパッドが邪魔になるた
め、外周部への導体パターンの引き出しが困難である。
従って、当該パッドから導体パターンを引き出すために
は、全体的に配線密度を低くしなければならない。それ
ゆえ、電子回路部品搭載用基板の高密度化や小型化を充
分に図ることができないという問題がある。
When a conductor pattern is formed on the front surface side, it is not so much to draw the conductor pattern from the pads located on the outer periphery of the first pad group toward the outer periphery of the base substrate. Not difficult. On the other hand, with respect to the pads located at the center of the pad group, the pads located outside thereof become an obstacle, so that it is difficult to draw out the conductor pattern to the outer periphery.
Therefore, in order to draw out the conductor pattern from the pad, the wiring density must be reduced as a whole. Therefore, there is a problem that the density and size of the electronic circuit component mounting board cannot be sufficiently increased.

【0005】また、近年においては、マスラミネーショ
ン技術などを利用した4層板や6層板等の多層板が製造
されるようになってきている。しかし、このような多層
板をベース基板として用いたとしても、高密度化や小型
化には一定の限界があるといわざるえない。
In recent years, multilayer boards such as four-layer boards and six-layer boards using mass lamination technology have been manufactured. However, even if such a multilayer board is used as a base substrate, it cannot be said that there is a certain limit to high density and miniaturization.

【0006】本発明は上記の課題を解決するためなされ
たものであり、その目的は、高密度化及び小型化を達成
することができる電子回路部品搭載用基板を提供するこ
とにある。
SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and an object of the present invention is to provide an electronic circuit component mounting substrate capable of achieving high density and miniaturization.

【0007】[0007]

【課題を解決するための手段】上記の課題を解決するた
めに、請求項1に記載の発明は、スルーホールを有する
ベース基板の一方の面の所定箇所に第1の接続端子群が
密集した状態で形成され、その反対側の面の少なくとも
外周部に第2の接続端子群が形成され、第1の接続端子
群と第2の接続端子群とがスルーホールを介して電気的
に接続されてなる電子回路部品搭載用基板において、前
記ベース基板の第1の接続端子群が形成される側には、
内層導体層と絶縁層とが交互に積層され、内層導体層同
士がバイアホールにて電気的に接続され、また内層導体
層がスルーホールと電気的に接続されたビルドアップ多
層配線層が形成されてなり、前記第1の接続端子群は、
該ビルドアップ多層配線層の最外層に形成されるととも
に、前記第1の接続端子群の中央部に位置する接続端子
は、バイアホールを介して前記ビルドアップ多層配線層
の内層導体層と電気的に接続され、前記第1の接続端子
群の中央部に位置する接続端子よりも外側に位置する接
続端子は、基板外周部に向かって延びる外層導体層に接
続されてなることを特徴とする電子回路部品搭載用基板
をその要旨とする。
According to a first aspect of the present invention, a first connection terminal group is provided at a predetermined position on one surface of a base substrate having a through hole.
The second connection terminal group is formed in a dense state, and the second connection terminal group is formed at least on the outer peripheral portion of the opposite surface, and the first connection terminal group and the second connection terminal group are electrically connected through a through hole. In the connected electronic circuit component mounting board, on the side of the base board where the first connection terminal group is formed,
An inner conductor layer and an insulating layer are alternately laminated, a build-up multilayer wiring layer is formed in which the inner conductor layers are electrically connected to each other through via holes, and the inner conductor layers are electrically connected to the through holes. Wherein the first connection terminal group comprises:
A connection terminal formed at the outermost layer of the build-up multilayer wiring layer and located at the center of the first connection terminal group is electrically connected to an inner conductor layer of the build-up multilayer wiring layer via a via hole. Connected to the first connection terminal
Connections located outside the connection terminals located in the center of the group
The connection terminal is connected to the outer conductor layer extending toward the outer peripheral portion of the substrate.
The gist is an electronic circuit component mounting substrate characterized by being continued .

【0008】請求項2に記載の発明は、スルーホールを
有するベース基板の一方の面の所定箇所に第1の接続端
子群が密集した状態で形成され、その反対側の面の少な
くとも外周部に第2の接続端子群が形成され、第1の接
続端子群と第2の接続端子群とがスルーホールを介して
電気的に接続されてなる電子回路部品搭載用基板におい
て、前記ベース基板の両面には、内層導体層と絶縁層と
が交互に積層され、内層導体層同士がバイアホールにて
電気的に接続され、また内層導体層がスルーホールと電
気的に接続されたビルドアップ多層配線層が形成されて
なり、前記第1の接続端子群及び第2の接続端子群は、
それぞれ該ビルドアップ多層配線層の最外層に形成され
るとともに、前記第1の接続端子群の中央部に位置する
接続端子及び第2の接続端子群を構成する各接続端子
は、バイアホールを介して前記ビルドアップ多層配線層
の内層導体層と電気的に接続され、前記第1の接続端子
群の中央部に位置する接続端子よりも外側に位置する接
続端子は、基板外周部に向かって延びる外層導体層に接
続されてなることを特徴とする電子回路部品搭載用基板
をその要旨とする。
According to a second aspect of the present invention, the first connection terminal group is formed at a predetermined position on one surface of the base substrate having a through hole in a dense state, and the first connection terminal group is formed on at least the outer peripheral portion of the opposite surface. An electronic circuit component mounting board in which a second connection terminal group is formed and the first connection terminal group and the second connection terminal group are electrically connected via through holes; Has a built-up multilayer wiring layer in which inner conductor layers and insulating layers are alternately laminated, the inner conductor layers are electrically connected to each other via holes, and the inner conductor layers are electrically connected to through holes. Are formed, and the first connection terminal group and the second connection terminal group are
Each of the connection terminals formed on the outermost layer of the build-up multilayer wiring layer and located at the center of the first connection terminal group and the connection terminals constituting the second connection terminal group are connected via via holes. And electrically connected to the inner conductor layer of the build-up multilayer wiring layer by the first connection terminal.
Connections located outside the connection terminals located in the center of the group
The connection terminal is connected to the outer conductor layer extending toward the outer peripheral portion of the substrate.
The gist is an electronic circuit component mounting substrate characterized by being continued .

【0009】[0009]

【作用】請求項1,2に記載の発明によると、第1の接
続端子群の中央部に位置する接続端子はバイアホールを
介して内層導体層に接続されているため、最表層におい
て基板外周部への導体層の引き出しを行うことが不要に
なる。よって、配線を行う際であっても、前記接続端子
よりも外側に位置する接続端子が邪魔になるということ
もない。また、バイアホールや内層導体層が形成されて
いるのはビルドアップ多層配線層であるため、従来に比
較して配線密度を高くすることができる。
According to the first and second aspects of the present invention, the connection terminal located at the center of the first connection terminal group is connected to the inner conductor layer via the via hole. It is not necessary to draw out the conductor layer to the part. Therefore, even when wiring is performed, the connection terminal located outside the connection terminal does not become an obstacle. In addition, since the via holes and the inner conductor layer are formed in the build-up multilayer wiring layer, the wiring density can be increased as compared with the related art.

【0010】[0010]

【実施例】以下、本発明を具体化した一実施例を図1に
基づき詳細に説明する。この電子回路部品搭載用基板1
では、ベース基板として両面板2が使用されている。こ
の両面板2は、サブトラクティブ法によって形成された
導体層3,4を樹脂製の基材5の表面S1 及び裏面S2
の両方に有している。この両面板2には、全面にわたっ
て、導体層3,4間の導通を図るためのスルーホール6
が形成されている。これらのスルーホール6内には、銅
などの金属粉末を含む導電性樹脂7等が充填されてい
る。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment embodying the present invention will be described below in detail with reference to FIG. This electronic circuit component mounting substrate 1
Here, a double-sided board 2 is used as a base substrate. The double-sided board 2 is formed by connecting the conductor layers 3 and 4 formed by the subtractive method to the front surface S1 and the back surface S2 of the resin base material 5.
Have both. Through holes 6 for conducting between the conductor layers 3 and 4 are provided on the entire surface of the double-sided board 2.
Are formed. These through holes 6 are filled with a conductive resin 7 containing a metal powder such as copper.

【0011】ベース基板である両面板2の表面S1 及び
裏面S2 には、層間絶縁層8a,8bと導体層9a,9
bとを交互に積層してなるビルドアップ多層配線層B1
,B2 がそれぞれ形成されている。
On the front surface S1 and the back surface S2 of the double-sided board 2 as a base substrate, interlayer insulating layers 8a and 8b and conductor layers 9a and 9b are provided.
b) and a build-up multilayer wiring layer B1 formed by alternately stacking
, B2 are formed respectively.

【0012】表面S1 側に形成されたビルドアップ多層
配線層B1 において、内層に位置する第1の層間絶縁層
8aの上面には、永久レジスト10が形成されている。
この永久レジスト10が形成されていない部分には、内
層導体層9aが形成されている。そして、この内層導体
層9aと両面板2側の内層導体層3とは、第1の層間絶
縁層8aに設けられたバイアホール11によって電気的
に接続されている。また、前記層間絶縁層8aに設けら
れた第2の層間絶縁層8b上にも、同様に永久レジスト
10が形成されている。この永久レジスト10が形成さ
れていない部分には、外層導体層9bが形成されてい
る。そして、この外層導体層9bと内層導体層9aと
は、第2の層間絶縁層8bに設けられたバイアホール1
1によって電気的に接続されている。また、第2の層間
絶縁層8bの中央部は、電子回路部品としてのLSIの
ベアチップC1 を搭載するための部品搭載エリアになっ
ている。このエリア内には、接続端子としての多数のパ
ッド12A,12Bからなる第1のパッド群が密集した
状態で形成されている。なお、これらのパッド12A,
12Bの位置は、ベアチップC1 の底面に形成されたバ
ンプBPの形成位置に対応している。なお、第1のパッ
ド群において最外周に位置しているものを「エクスター
ナルパッド12B」と呼ぶことにする。そして、第1の
パッド群の中央部に位置するもの、即ち前記エクスター
ナルパッド12Bよりも内側に位置するものを「インタ
ーナルパッド12A」と呼ぶことにする。
In the build-up multilayer wiring layer B1 formed on the surface S1 side, a permanent resist 10 is formed on the upper surface of the first interlayer insulating layer 8a located in the inner layer.
An inner conductor layer 9a is formed in a portion where the permanent resist 10 is not formed. The inner conductor layer 9a and the inner conductor layer 3 on the double-sided board 2 are electrically connected by via holes 11 provided in the first interlayer insulating layer 8a. Further, a permanent resist 10 is similarly formed on the second interlayer insulating layer 8b provided on the interlayer insulating layer 8a. An outer conductor layer 9b is formed in a portion where the permanent resist 10 is not formed. The outer conductor layer 9b and the inner conductor layer 9a are connected to the via hole 1 provided in the second interlayer insulating layer 8b.
1 electrically connected. The central portion of the second interlayer insulating layer 8b is a component mounting area for mounting a bare chip C1 of an LSI as an electronic circuit component. In this area, a first pad group including a large number of pads 12A and 12B as connection terminals is formed in a dense state. Note that these pads 12A,
The position 12B corresponds to the formation position of the bump BP formed on the bottom surface of the bare chip C1. Note that the outermost one in the first pad group is referred to as “external pad 12B”. The pad located at the center of the first pad group, that is, the pad located inside the external pad 12B is referred to as "internal pad 12A".

【0013】面S2側に形成されたビルドアップ多層
配線層B2において、内層に位置する第1の層間絶縁層
8a上には、永久レジスト10が形成されている。この
永久レジスト10が形成されていない部分には、内層導
体層9aが形成されている。そして、この内層導体層9
aと両面板2側の内層導体層4とは、第1の層間絶縁層
8aに設けられたバイアホール11によって電気的に接
続されている。また、前記層間絶縁層8aに設けられた
第2の層間絶縁層8b上にも、同様に永久レジスト10
が形成されている。この永久レジスト10が形成されて
いない部分には、外層導体層9bが形成されている。そ
して、この外層導体層9bと内層導体層9aとは、第2
の層間絶縁層8bに設けられたバイアホール11によっ
て電気的に接続されている。また、第2の層間絶縁層8
bの外周部には、接続端子としての多数のパッド13か
らなる第2のパッド群が形成されている。これらのパッ
ド13上には、図示しないマザーボード側との電気的な
接続を図るための突起電極としてバンプ14が形成され
ている。
[0013] In the build-up multilayer wiring layer B2 formed on the back surface S2 side, on the first interlayer insulating layer 8a that is located in an inner layer, a permanent resist 10 is formed. An inner conductor layer 9a is formed in a portion where the permanent resist 10 is not formed. The inner conductor layer 9
a and the inner conductor layer 4 on the side of the double-sided board 2 are electrically connected by via holes 11 provided in the first interlayer insulating layer 8a. Similarly, the permanent resist 10 is formed on the second interlayer insulating layer 8b provided on the interlayer insulating layer 8a.
Are formed. An outer conductor layer 9b is formed in a portion where the permanent resist 10 is not formed. The outer conductor layer 9b and the inner conductor layer 9a are
Are electrically connected by via holes 11 provided in the interlayer insulating layer 8b. Also, the second interlayer insulating layer 8
A second pad group including a large number of pads 13 as connection terminals is formed on the outer peripheral portion of b. Bumps 14 are formed on these pads 13 as protruding electrodes for establishing electrical connection with a motherboard (not shown).

【0014】この電子回路部品搭載用基板1において、
第1のパッド群のうちのエクスターナルパッド12B
は、基板外周部に向かって延びる外層導体層9bを介し
て、バイアホール11に電気的に接続されている。一
方、その内側に位置するインターナルパッド12Aは、
外層導体層9bを介することなく、バイアホール11の
上面に直接電気的に接続されている。このような第2の
層間絶縁層8bのバイアホール11は、さらに内層導体
層9a、バイアホール11及び内層導体層3を介してス
ルーホール6に電気的に接続されている。そして、同ス
ルーホール6に接続される内層導体層4は、バイアホー
ル11、内層導体層9a、バイアホール11及び外層導
体層9bを介して、第2のパッド群を構成するパッド1
3に電気的に接続されている。また、第1のパッド群及
び第2のパッド群をつなぐ内層導体層3,4,9a及び
外層導体層9bは、基板外周部に向かって常に順方向に
かつ遠心的に配線されている。
In this electronic circuit component mounting board 1,
External pad 12B of the first pad group
Is electrically connected to the via hole 11 via an outer conductor layer 9b extending toward the outer peripheral portion of the substrate. On the other hand, the internal pad 12A located inside is
It is directly electrically connected to the upper surface of the via hole 11 without passing through the outer conductor layer 9b. The via hole 11 of the second interlayer insulating layer 8b is further electrically connected to the through hole 6 via the inner conductor layer 9a, the via hole 11, and the inner conductor layer 3. The inner conductor layer 4 connected to the through hole 6 is connected to the pad 1 forming the second pad group via the via hole 11, the inner conductor layer 9a, the via hole 11, and the outer conductor layer 9b.
3 is electrically connected. The inner conductor layers 3, 4, 9a and the outer conductor layer 9b connecting the first pad group and the second pad group are always wired forward and centrifugally toward the outer peripheral portion of the substrate.

【0015】ここで、ビルドアップ多層配線層B1 ,B
2 を構成する層間絶縁層8a,8bは、酸あるいは酸化
剤に難溶性の感光性樹脂と、酸あるいは酸化剤に可溶性
の耐熱性樹脂粒子とからなることが好ましい。その理由
は、耐熱性樹脂粒子が含まれていると露光時に光の散乱
が起こりやすく、よってアスペクト比の高いバイアホー
ル11であってもその形成時に現像残りが生じにくくな
るからである。従って、単なる感光性樹脂を使用した場
合に比べて、より小径(直径約80μm以下)のバイア
ホール11を形成することができる。
Here, the build-up multilayer wiring layers B1, B
It is preferable that the interlayer insulating layers 8a and 8b constituting 2 are made of a photosensitive resin hardly soluble in an acid or an oxidizing agent and heat-resistant resin particles soluble in an acid or an oxidizing agent. The reason is that if heat-resistant resin particles are included, light scattering is likely to occur at the time of exposure, and therefore, even if the via hole 11 has a high aspect ratio, development residue hardly occurs at the time of formation. Therefore, the via hole 11 having a smaller diameter (about 80 μm or less in diameter) can be formed as compared with the case where a mere photosensitive resin is used.

【0016】前記層間絶縁層8a,8bは、酸あるいは
酸化剤に難溶性であって熱硬化性樹脂を感光化した樹脂
及び熱可塑性樹脂の複合樹脂と、酸あるいは酸化剤の可
溶性の耐熱性樹脂粒子とからなることが好ましい。な
お、ここでいう酸あるいは酸化剤とは、例えば表面粗化
工程において使用される塩酸、リン酸、クロム酸、クロ
ム酸塩、過マンガン塩等を指す。
The interlayer insulating layers 8a and 8b are composed of a composite resin of a resin which is hardly soluble in an acid or an oxidizing agent and which is made of a thermosetting resin and a thermoplastic resin, and a heat-resistant resin which is soluble in an acid or an oxidizing agent. It preferably comprises particles. Here, the acid or oxidizing agent refers to, for example, hydrochloric acid, phosphoric acid, chromic acid, chromate, permanganate and the like used in the surface roughening step.

【0017】前記酸あるいは酸化剤に難溶性であって熱
硬化性樹脂を感光化した樹脂は、エポキシアクリレート
及び感光性ポリイミド(感光性PI)から選択される少
なくともいずれか1つの樹脂であることが好ましい。ま
た、前記熱可塑性樹脂は、ポリエーテルスルホン(PE
S)、ポリスルホン(PSF)、フェノキシ樹脂及びポ
リエチレン(PE)のうちから選択される少なくともい
ずれか1つの樹脂であることが好ましい。さらに、前記
耐熱性樹脂粒子は、アミノ樹脂粒子及びエポキシ樹脂
(EP樹脂)粒子のうちから選択される少なくともいず
れか1つであることが好ましい。なお、エポキシ樹脂は
ヒドロエキシエーテル構造を持っていることから、この
樹脂からなる粒子は特に溶けやすいという有利な性質を
有する。また、アミノ樹脂粒子としては、例えばメラミ
ン樹脂、尿素樹脂、グアナミン樹脂等が選択可能であ
る。なかでもメラミン樹脂を選択することが好ましい。
[0017] The resin which is insoluble in an acid or an oxidizing agent and which is obtained by sensitizing a thermosetting resin is at least one resin selected from epoxy acrylate and photosensitive polyimide (photosensitive PI). preferable. Further, the thermoplastic resin is a polyether sulfone (PE
It is preferably at least one resin selected from S), polysulfone (PSF), phenoxy resin and polyethylene (PE). Further, it is preferable that the heat-resistant resin particles are at least one selected from amino resin particles and epoxy resin (EP resin) particles. Since the epoxy resin has a hydroethoxy ether structure, particles made of this resin have an advantageous property of being particularly easily dissolved. Further, as the amino resin particles, for example, melamine resin, urea resin, guanamine resin and the like can be selected. Among them, it is preferable to select a melamine resin.

【0018】このような構成の電子回路部品搭載用基板
1は、例えば以下のような手順を経ることによって作製
することができる。層間絶縁層8a,8bを形成するた
めのアディティブ用接着剤の調製方法は、以下の通りで
ある。クレゾールノボラック型エポキシ樹脂のエポキシ
基の25%をアクリル化した感光性付与のオリゴマー
(CNA25,分子量4000)、PES(分子量17
000)、イミダゾール硬化剤(四国化成製,商品名:
2B4MZ−CN)、感光性モノマーであるトリメチル
トリアクリレート(TMPTA)、光開始剤(チバガイ
ギー製,商品名:I−907)を用い、下記組成でDM
Fを用いて混合し、さらにこの混合物に対してエポキシ
樹脂粉末(東レ製,商品名:トレパールEP−B)を平
均粒径5.5μmのものを20重量部、平均粒径0.5
μmのものを10重量部を混合した後、ホモディスパー
攪拌機で粘度120cps に調整し、続いて3本ロールで
混練することによって、アディティブ用接着剤とする。
次いで、この接着剤を両面板2の両面全体に塗布した
後、25℃で真空乾燥を行い、さらにUV硬化及び熱硬
化を行う。その結果、まず第1の層間絶縁層8aが形成
される。
The electronic circuit component mounting board 1 having such a configuration can be manufactured by, for example, the following procedure. The preparation method of the additive adhesive for forming the interlayer insulating layers 8a and 8b is as follows. An oligomer (CNA25, molecular weight 4000) of a cresol novolac type epoxy resin having photosensitized 25% of the epoxy group acrylated, PES (molecular weight 17)
000), imidazole curing agent (Shikoku Chemicals, trade name:
2B4MZ-CN), trimethyltriacrylate (TMPTA) which is a photosensitive monomer, and a photoinitiator (trade name: I-907, manufactured by Ciba Geigy).
F, and 20 parts by weight of an epoxy resin powder (manufactured by Toray, trade name: Trepearl EP-B) having an average particle size of 5.5 μm, and an average particle size of 0.5 μm.
After mixing 10 parts by weight of a μm product, the viscosity is adjusted to 120 cps with a homodisper stirrer, followed by kneading with a three-roll mill to obtain an additive adhesive.
Next, this adhesive is applied to both sides of the double-sided board 2, and then vacuum-dried at 25 ° C., followed by UV curing and heat curing. As a result, first, a first interlayer insulating layer 8a is formed.

【0019】次に、この第1の層間絶縁層8aの表面を
クロム酸等の粗化剤で処理することによって、多数のア
ンカー用凹部を備える粗化面を形成する。この後、常法
に従って触媒核付与、永久レジスト10の形成、活性化
処理及び無電解銅めっきを行うことによって、内層導体
層9a及びバイアホール11を形成する。
Next, the surface of the first interlayer insulating layer 8a is treated with a roughening agent such as chromic acid to form a roughened surface having a large number of anchor recesses. Thereafter, the inner conductor layer 9a and the via hole 11 are formed by applying a catalyst nucleus, forming a permanent resist 10, activating and electroless copper plating according to a conventional method.

【0020】さらに、同じアディティブ用接着剤を両面
に塗布・硬化することにより、第2の層間絶縁層8bを
形成する。次いで、得られた第2の層間絶縁層8bの表
面を粗化剤で処理することによって、粗化面を形成す
る。この後、触媒核付与、永久レジスト10の形成、活
性化処理及び無電解銅めっきを行い、所定部分に外層導
体層9b、パッド12A,12B,13及びバイアホー
ル11を形成する。以上の工程を経ると、所望の電子回
路部品搭載用基板1が完成する。そして、このようにし
て得られた電子回路部品搭載用基板1上にベアチップC
1 を搭載すれば、図1のような電子回路部品搭載装置M
1 を得ることができる。
Further, the same adhesive for additive is applied and cured on both sides to form a second interlayer insulating layer 8b. Next, the surface of the obtained second interlayer insulating layer 8b is treated with a roughening agent to form a roughened surface. Thereafter, a catalyst nucleus is provided, a permanent resist 10 is formed, an activation process, and electroless copper plating are performed to form outer conductor layers 9b, pads 12A, 12B, 13 and via holes 11 in predetermined portions. Through the above steps, a desired electronic circuit component mounting substrate 1 is completed. The bare chip C is placed on the electronic circuit component mounting substrate 1 thus obtained.
1, the electronic circuit component mounting device M as shown in FIG.
You can get one.

【0021】さて、本実施例の電子回路部品搭載用基板
1によると、第1のパッド群の中央部に位置するインタ
ーナルパッド12Aは、いずれも外層導体層9bに接続
されることなく、バイアホール11の上面に直接電気的
に接続されている。つまり、各インターナルパッド12
Aは、バイアホール11を介して内層導体層9aに電気
的に接続されていることになる。そのため、第1のパッ
ド群が形成されている第2の層間絶縁層8b上におい
て、基板外周部への外層導体層9aの引き出しを行う必
要がない。よって、インターナルパッド12Aの外側に
エクスターナルパッド12Bが位置していたとしても、
配線を行う際にそれらが特に邪魔になるということもな
い。そして、上記のようにインターナルパッド12Aか
ら引き出される外層導体層9bが存在しなくなる結果、
エクスターナルパッド12Bから引き出される外層導体
層9bを密に配線することが可能になる。即ち、従来の
構成に比べて、全体的に配線密度を高くすることができ
る。
According to the electronic circuit component mounting board 1 of the present embodiment, the internal pads 12A located at the center of the first pad group are not connected to the outer conductor layer 9b, and are not connected to the vias. It is directly electrically connected to the upper surface of the hole 11. That is, each internal pad 12
A is electrically connected to the inner conductor layer 9a through the via hole 11. Therefore, on the second interlayer insulating layer 8b on which the first pad group is formed, it is not necessary to draw out the outer conductor layer 9a to the outer peripheral portion of the substrate. Therefore, even if the external pad 12B is located outside the internal pad 12A,
They do not particularly hinder the wiring. As a result, the outer conductor layer 9b pulled out from the internal pad 12A does not exist as described above.
The outer conductor layer 9b drawn from the external pad 12B can be densely wired. That is, the overall wiring density can be increased as compared with the conventional configuration.

【0022】また、本実施例では、ビルドアップ多層配
線層B1,B2を構成する層間絶縁層8a,8bの形成に
おいて、酸等に難溶性の感光性樹脂と酸等に可溶性の耐
熱性樹脂粒子とからなるアディティブ用接着剤が使用さ
れている。そのため、露光時にバイアホール形成用凹部
の底面に現像残りが生じにくい。よって、従来よりも小
径のバイアホール11を容易にかつ確実に形成すること
ができる。勿論、アディティブ法によって形成される導
体層9a,9bは、従来のサブトラクティブ法に従って
形成されるものに比べてファインなものになる。ゆえ
に、サブトラクティブ法のような従来構造に比べて、配
線密度を高くすることができる。
In the present embodiment, in forming the interlayer insulating layers 8a and 8b constituting the build-up multilayer wiring layers B1 and B2, a photosensitive resin which is hardly soluble in an acid or the like and a heat-resistant resin particle which is soluble in an acid or the like are used. And an additive adhesive is used. For this reason, development residue hardly occurs on the bottom surface of the via hole forming concave portion during exposure. Therefore, the via hole 11 having a smaller diameter than the conventional one can be formed easily and reliably. Of course, the conductor layers 9a and 9b formed by the additive method are finer than those formed by the conventional subtractive method. Therefore, the wiring density can be increased as compared with the conventional structure such as the subtractive method .

【0023】以上述べたように、本実施例の電子回路部
品搭載用基板1によると、従来のものに比較して高密度
化及び小型化を達成することができる。なお、本実施例
ではビルドアップ多層配線層B1 ,B2 を両面に形成し
ているため、例えば表面S1のみに形成した場合より
も、高密度化及び小型化を図ることができる。
As described above, according to the electronic circuit component mounting board 1 of the present embodiment, higher density and smaller size can be achieved as compared with the conventional one. In this embodiment, since the build-up multilayer wiring layers B1 and B2 are formed on both surfaces, it is possible to achieve a higher density and a smaller size than when, for example, only the surface S1 is formed.

【0024】また、この電子回路部品搭載用基板1で
は、表面S1 及び裏面S2 にほぼ同じ厚さのビルドアッ
プ多層配線層B1 ,B2 が設けられている。このため、
両面板2の両側に付加する応力の大きさがほぼ等しくな
り、結果として応力が互いに相殺されやすくなる。よっ
て、反りにくい電子回路部品搭載用基板1を実現するこ
とができる。
Further, in the electronic circuit component mounting substrate 1, build-up multilayer wiring layers B1, B2 having substantially the same thickness are provided on the front surface S1 and the back surface S2. For this reason,
The magnitudes of the stresses applied to both sides of the double-sided board 2 become substantially equal, and as a result, the stresses tend to cancel each other. Therefore, it is possible to realize the electronic circuit component mounting board 1 that is hardly warped.

【0025】なお、本発明は例えば次のように変更する
ことが可能である。 (1)図2には、別例の電子回路部品搭載用基板18上
にベアチップC1 を搭載してなる電子回路部品搭載装置
M2 が示されている。この電子回路部品搭載用基板18
では、表面S1 側だけに3層構造のビルドアップ多層配
線層B3 が設けられている。一方、第2のパッド群を構
成するパッド13は、裏面S2 側に形成された導体層4
に接続されている。そして、裏面S2 側の導体層4は、
全体的にソルダーレジスト19によって被覆されてい
る。このような構成であっても、実施例と同様の作用効
果を奏する。
The present invention can be modified, for example, as follows. (1) FIG. 2 shows an electronic circuit component mounting apparatus M2 in which a bare chip C1 is mounted on an electronic circuit component mounting board 18 of another example. This electronic circuit component mounting board 18
In this example, a build-up multilayer wiring layer B3 having a three-layer structure is provided only on the surface S1 side. On the other hand, the pad 13 constituting the second pad group is formed by the conductor layer 4 formed on the back surface S2 side.
It is connected to the. The conductor layer 4 on the back surface S2 side
The whole is covered with a solder resist 19. Even with such a configuration, the same operation and effect as those of the embodiment can be obtained.

【0026】(2)ビルドアップ多層配線層B1 〜B3
の積層数(層間絶縁層8a,8bの層数)は2層または
3層に限定されることはなく、1層のみまたは4層,5
層,6層,7層,8層…であってもよい。また、表面S
1 側の積層数及び裏面S2 側の積層数は、必ずしも同一
でなくてもよい。
(2) Build-up multilayer wiring layers B1 to B3
Is not limited to two or three layers, but only one layer or four or five layers.
, Six, seven, eight,... The surface S
The number of laminations on one side and the number of laminations on the back side S2 need not necessarily be the same.

【0027】(3)ベース基板として両面板2を使用し
た実施例に代え、4層板,5層板,6層板,7層板,8
層板等の多層板を使用してもよい。なお、低コスト化を
優先したい場合には両面板2を選択することが有利であ
り、さらなる高密度化・小型化を達成したい場合には多
層板を選択することが有利である。
(3) Instead of the embodiment using the double-sided board 2 as the base substrate, a 4-layer board, 5-layer board, 6-layer board, 7-layer board, 8
A multilayer plate such as a layer plate may be used. In addition, it is advantageous to select the double-sided board 2 when priority is given to cost reduction, and it is advantageous to select a multilayer board to achieve further higher density and smaller size.

【0028】(4)第2の接続端子群を構成するパッド
13上には、実施例のバンプ14に代えてピン等を設け
ることが可能である。また、バンプ14もピンも設けな
い構成とすることも勿論可能である。
(4) A pin or the like can be provided on the pad 13 constituting the second connection terminal group instead of the bump 14 of the embodiment. Further, it is of course possible to adopt a configuration in which neither the bump 14 nor the pin is provided.

【0029】(5)部品搭載エリアは実施例のように1
つのみであってもよく、または複数であってもよい。 (6)第2のパッド群を構成するパッド13は、裏面S
2 側のビルドアップ多層配線層B2 の全体にわたって設
けられていてもよい。この構成であると、より多くのパ
ッド13を配置することができる。
(5) The component mounting area is 1 as in the embodiment.
There may be only one or a plurality. (6) The pad 13 constituting the second pad group has a rear surface S
It may be provided over the whole of the build-up multilayer wiring layer B2 on the second side. With this configuration, more pads 13 can be arranged.

【0030】(7)ビルドアップ多層配線層B1 〜B3
を構成する導体層9a,9bは、無電解銅めっき以外の
金属めっき(例えば、無電解ニッケルめっきや無電解金
めっきなど)であってもよい。また、めっきのような化
学的成膜方法によって形成される金属層に代え、例えば
スパッタリング等の物理的薄膜方法によって形成される
金属層を選択することも可能である。
(7) Build-up multilayer wiring layers B1 to B3
May be metal plating other than electroless copper plating (for example, electroless nickel plating or electroless gold plating). Instead of a metal layer formed by a chemical film forming method such as plating, it is also possible to select a metal layer formed by a physical thin film method such as sputtering.

【0031】(8)電子回路部品搭載用基板1上に搭載
される電子回路部品は、実施例のベアチップ2のほか
に、例えばBGA,QFN,ショートピンを持つPGA
等の半導体パッケージであってもよい。
(8) The electronic circuit components mounted on the electronic circuit component mounting board 1 are, for example, BGA, QFN, and PGA having short pins in addition to the bare chip 2 of the embodiment.
And the like.

【0032】[0032]

【0033】ここで、特許請求の範囲に記載された技術
的思想のほかに、前述した実施例及び別例によって把握
される技術的思想をその効果とともに以下に列挙する。 (1) 請求項1,2において、前記ビルドアップ多層
配線層を構成する絶縁層は感光性樹脂からなること。こ
の構成であると、より高密度化及び小型化を達成でき
る。
Here, in addition to the technical ideas described in the claims, the technical ideas grasped by the above-described embodiments and other examples are listed below together with their effects. (1) In Claims 1 and 2, the insulating layer constituting the build-up multilayer wiring layer is made of a photosensitive resin. With this configuration, higher density and smaller size can be achieved.

【0034】(2) 請求項1,2において、前記ビル
ドアップ多層配線層を構成する絶縁層は、酸あるいは酸
化剤に難溶性の感光性樹脂と、酸あるいは酸化剤に可溶
性の耐熱性樹脂粒子とからなること。この構成である
と、よりいっそう高密度化及び小型化を達成できる。
(2) In Claims 1 and 2, the insulating layer constituting the build-up multilayer wiring layer is made of a photosensitive resin which is hardly soluble in an acid or an oxidizing agent, and a heat-resistant resin particle which is soluble in an acid or an oxidizing agent. Consisting of With this configuration, higher density and smaller size can be achieved.

【0035】「アディティブ用接着剤: 絶縁層の形成
に使用される樹脂製接着剤であって、酸等に対して難溶
性の成分と可溶性の成分とを含むものをいう。」
"Adhesive for additive: A resin adhesive used for forming an insulating layer, which contains a component that is hardly soluble in acids and the like and a component that is soluble in acid."

【0036】[0036]

【発明の効果】以上詳述したように、請求項1に記載の
発明によれば、ビルドアップ多層配線層のバイアホール
を介して内層導体層に接続することとしたため、高密度
化及び小型化を達成することができる電子回路部品搭載
用基板を提供することができる。請求項2に記載の発明
によれば、よりいっそうの高密度化及び小型化を達成す
ることができる。さらに、配線設計が容易となる。
As described above in detail, according to the first aspect of the present invention, since the connection is made to the inner conductor layer via the via hole of the build-up multilayer wiring layer, the density is increased and the size is reduced. Can be provided. According to the second aspect of the present invention, further higher density and smaller size can be achieved. Furthermore, wiring design becomes easy.

【図面の簡単な説明】[Brief description of the drawings]

【図1】実施例の電子回路部品搭載用基板の概略断面
図。
FIG. 1 is a schematic cross-sectional view of an electronic circuit component mounting board according to an embodiment.

【図2】別例の電子回路部品搭載用基板の概略断面図。FIG. 2 is a schematic sectional view of another example of an electronic circuit component mounting substrate.

【符号の説明】[Explanation of symbols]

1,18…電子回路部品搭載用基板、2…ベース基板、
6…スルーホール、8a,8b…絶縁層、3,4,9a
…内層導体層、9b…外層導体層、11…バイアホー
ル、12A…第1の接続端子群の中央部に位置する接続
端子としてのインターナルパッド、12B…第1の接続
端子群の外側に位置する接続端子としてのエクスターナ
ルパッド、13…第2の接続端子を構成する接続端子
としてのパッド、B1 ,B2 ,B3 …ビルドアップ多層
配線層。
1, 18 ... board for mounting electronic circuit parts, 2 ... base board,
6 ... through-hole, 8a, 8b ... insulating layer, 3, 4, 9a
... inner conductor layer, 9b ... outer conductor layer, 11 ... via hole, 12A ... internal pad as a connection terminal located at the center of the first connection terminal group, 12B ... first connection
External unit as a connection terminal located outside the terminal group
Le Pad, 13 ... pad as a connection terminal which constitute the second connecting terminal groups, B1, B2, B3 ... build-up multilayer wiring layer.

───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 昭63−172490(JP,A) 特開 平6−314752(JP,A) 特開 平6−275959(JP,A) (58)調査した分野(Int.Cl.7,DB名) H05K 3/46 ────────────────────────────────────────────────── ─── Continuation of front page (56) References JP-A-63-172490 (JP, A) JP-A-6-3144752 (JP, A) JP-A-6-275959 (JP, A) (58) Field (Int.Cl. 7 , DB name) H05K 3/46

Claims (2)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】スルーホールを有するベース基板の一方の
面の所定箇所に第1の接続端子群が密集した状態で形成
され、その反対側の面の少なくとも外周部に第2の接続
端子群が形成され、第1の接続端子群と第2の接続端子
群とがスルーホールを介して電気的に接続されてなる電
子回路部品搭載用基板において、 前記ベース基板の第1の接続端子群が形成される側に
は、内層導体層と絶縁層とが交互に積層され、内層導体
層同士がバイアホールにて電気的に接続され、また内層
導体層がスルーホールと電気的に接続されたビルドアッ
プ多層配線層が形成されてなり、 前記第1の接続端子群は、該ビルドアップ多層配線層の
最外層に形成されるとともに、前記第1の接続端子群の
中央部に位置する接続端子は、バイアホールを介して前
記ビルドアップ多層配線層の内層導体層と電気的に接続
され、前記第1の接続端子群の中央部に位置する接続端
子よりも外側に位置する接続端子は、基板外周部に向か
って延びる外層導体層に接続されてなることを特徴とす
る電子回路部品搭載用基板。
A first connection terminal group is formed at a predetermined position on one surface of a base substrate having a through hole in a dense state, and a second connection terminal group is formed on at least the outer peripheral portion of the opposite surface. An electronic circuit component mounting substrate formed and electrically connected to a first connection terminal group and a second connection terminal group via through holes, wherein the first connection terminal group of the base substrate is formed. On the side to be built, the inner conductor layers and the insulating layers are alternately laminated, the inner conductor layers are electrically connected via holes, and the inner conductor layers are electrically connected to the through holes. A multilayer wiring layer is formed; the first connection terminal group is formed on an outermost layer of the build-up multilayer wiring layer; and a connection terminal located at a central portion of the first connection terminal group is: The building via via hole Is up multilayer interconnection layer electrically connected to the inner conductor layers, connection end located in the center of the first connecting terminal groups
Connection terminals located outside of the board
Characterized in that the substrate is connected to an outer conductor layer extending through the substrate.
【請求項2】スルーホールを有するベース基板の一方の
面の所定箇所に第1の接続端子群が密集した状態で形成
され、その反対側の面の少なくとも外周部に第2の接続
端子群が形成され、第1の接続端子群と第2の接続端子
群とがスルーホールを介して電気的に接続されてなる電
子回路部品搭載用基板において、 前記ベース基板の両面には、内層導体層と絶縁層とが交
互に積層され、内層導体層同士がバイアホールにて電気
的に接続され、また内層導体層がスルーホールと電気的
に接続されたビルドアップ多層配線層が形成されてな
り、 前記第1の接続端子群及び第2の接続端子群は、それぞ
れ該ビルドアップ多層配線層の最外層に形成されるとと
もに、前記第1の接続端子群の中央部に位置する接続端
子及び第2の接続端子群を構成する各接続端子は、バイ
アホールを介して前記ビルドアップ多層配線層の内層導
体層と電気的に接続され、前記第1の接続端子群の中央
部に位置する接続端子よりも外側に位置する接続端子
は、基板外 周部に向かって延びる外層導体層に接続され
てなることを特徴とする電子回路部品搭載用基板。
2. The first connection terminal group is formed at a predetermined position on one surface of a base substrate having a through hole in a dense state, and the second connection terminal group is formed on at least the outer peripheral portion of the opposite surface. An electronic circuit component mounting board formed, wherein the first connection terminal group and the second connection terminal group are electrically connected via through holes, wherein an inner conductor layer is provided on both surfaces of the base substrate. Insulating layers are alternately laminated, the inner conductor layers are electrically connected to each other through via holes, and the build-up multilayer wiring layer in which the inner conductor layers are electrically connected to the through holes is formed. The first connection terminal group and the second connection terminal group are respectively formed on the outermost layer of the build-up multilayer wiring layer, and the connection terminal and the second connection terminal located at the center of the first connection terminal group are respectively formed. Configure connection terminals Connection terminal is electrically connected to the inner conductor layer of the build-up multilayer interconnection layer through the via hole, a center of the first connecting terminal groups
Connection terminal located outside of the connection terminal located in the section
An electronic circuit component mounting board, characterized in that connected to the outer conducting layer extending toward the substrate outside peripheral portion becomes Te <br/>.
JP15189995A 1995-06-19 1995-06-19 Substrate for mounting electronic circuit components Ceased JP3181193B2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP15189995A JP3181193B2 (en) 1995-06-19 1995-06-19 Substrate for mounting electronic circuit components
PCT/JP1996/002608 WO1998011605A1 (en) 1995-06-19 1996-09-12 Circuit board for mounting electronic parts
US09/412,877 US6384344B1 (en) 1995-06-19 1999-10-05 Circuit board for mounting electronic parts

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP15189995A JP3181193B2 (en) 1995-06-19 1995-06-19 Substrate for mounting electronic circuit components
PCT/JP1996/002608 WO1998011605A1 (en) 1995-06-19 1996-09-12 Circuit board for mounting electronic parts

Publications (2)

Publication Number Publication Date
JPH098459A JPH098459A (en) 1997-01-10
JP3181193B2 true JP3181193B2 (en) 2001-07-03

Family

ID=26437241

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15189995A Ceased JP3181193B2 (en) 1995-06-19 1995-06-19 Substrate for mounting electronic circuit components

Country Status (1)

Country Link
JP (1) JP3181193B2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6376049B1 (en) 1997-10-14 2002-04-23 Ibiden Co., Ltd. Multilayer printed wiring board and its manufacturing method, and resin composition for filling through-hole
JP4521017B2 (en) * 2007-06-06 2010-08-11 日本特殊陶業株式会社 Wiring substrate manufacturing method, capacitor built-in core substrate manufacturing method
JP4751474B2 (en) * 2010-04-05 2011-08-17 日本特殊陶業株式会社 Wiring board, core board with built-in capacitor

Also Published As

Publication number Publication date
JPH098459A (en) 1997-01-10

Similar Documents

Publication Publication Date Title
EP1250033B1 (en) Printed circuit board and electronic component
TWI430728B (en) Method of making circuitized substrate with solder paste connections
WO1998011605A1 (en) Circuit board for mounting electronic parts
JP3181194B2 (en) Substrate for mounting electronic components
JP2005236067A (en) Wiring substrate, its manufacturing method and semiconductor package
JP3064780B2 (en) Manufacturing method of flex-rigid multilayer printed wiring board
JP3317652B2 (en) Multilayer printed wiring board
JP3181193B2 (en) Substrate for mounting electronic circuit components
JP4458582B2 (en) Package substrate
JP4480207B2 (en) Resin package substrate
JP3312022B2 (en) Substrate for mounting electronic components
JP4386525B2 (en) Printed wiring board
JPH06314883A (en) Multilayer printed wiring board and manufacture thereof
JP2005236220A (en) Wiring substrate and its manufacturing method, and semiconductor package
JP3091051B2 (en) Substrate for mounting electronic components
JP3135739B2 (en) Substrate for mounting electronic components
JPH11251754A (en) Multilayered printed wiring board
JP2000183532A (en) Printed wiring board
JP2001244635A (en) Method for manufacturing printed circuit board
JP2000315867A (en) Multilayered printed board
JP4554741B2 (en) Package substrate
JP4181149B2 (en) Semiconductor package
JP4148591B2 (en) Package substrate
JP3718254B2 (en) Semiconductor package and semiconductor device
JP2000353775A (en) Conductive connecting pin and package substrate

Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

RVOP Cancellation by post-grant opposition