JP3146626B2 - Transport vehicle for clean room and mobile robot for clean room - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a transport vehicle for a clean room and a mobile robot for a clean room, and more particularly to a clean room which is required to prevent scattering of dust and the like due to turbulence of air flow.
The present invention relates to suppressing turbulence in airflow due to movement of a transport vehicle or a mobile robot when transporting products or the like in a system.

[0002]

2. Description of the Related Art Generally, a clean room transport vehicle and a mobile robot are used for transport and work in a clean room, and are indispensable for unmanned operation. Also, since the product can be handled without human intervention, it is possible to prevent dust and the like from adhering. Although such transport vehicles and mobile robots have the above-mentioned advantages, turbulence of the downward airflow in the clean room due to their movement and work may cause a decrease in cleanliness in the clean room.

The prior art is disclosed in Japanese Patent Application Laid-Open No. 62-27728.
As described in Japanese Patent Application Publication No. 4 (1999) -1999, the apparatus for loading and unloading articles is moved up and down during movement and work, and the position of the apparatus is changed to suppress the expansion of the range of turbulence in airflow. However, there is no disclosure about actively preventing the turbulence of the air flow in the clean room by inhaling the air in the place where the turbulence develops.

[0004]

The turbulence of the airflow downward in the cleanroom due to the movement of the cleanroom transport vehicle and the mobile robot causes a large vortex to be generated in the rearward direction of the cleanroom. This also lowers the cleanliness in the clean room, such as the lifting of dust existing below the transport vehicle and the mobile robot, and the diffusion of dust generated during the work to a wide range.

[0005] Therefore, it is necessary to minimize the range of the turbulence of the air flow and to suppress a decrease in cleanliness in the clean room. In particular, in a clean room requiring a high cleanliness, movement at a speed higher than the lower air flow velocity in the clean room causes turbulence to spread over a considerably wide area.
Naturally, upper limits are set for movement and work speed, which hinders speeding up work.

An object of the present invention is to provide such a clean room.
The purpose of the present invention is to reduce the turbulence of the airflow in the system to a smaller extent.

[0007]

SUMMARY OF THE INVENTION An object of the present invention is to reduce the turbulence of the air flow by sucking the air flow generated by the movement of the clean room transport vehicle and the mobile robot into the transport vehicle and the mobile robot. Achieved.

[0008] The clean room transport vehicle of the present invention comprises a moving table having a moving mechanism, and an installation room fixed to the moving table and storing an object to be transported therein. Air is circulated between the tables, and a fan is placed in the moving table or the installation room. The fan sucks air from a part of the installation room, and a filter is provided.
, The cleanliness of the non-transported objects in the installation room is reduced from the upper side to the lower side by maintaining the cleanliness of the non-conveyed objects. Wherein the air sent to the installation chamber is taken in from outside from a portion of the movable table and the installation table corresponding to a part or a plurality of parts in the rear and side directions with respect to the traveling direction of the carrier, or The air sucked in from a part or a plurality of parts of the table and the installation table is blown downward to the outside from a part of the moving table and the installation table corresponding to a part or a plurality of parts in the rear and side directions with respect to the traveling direction of the carrier. It is characterized by having done.

Still another embodiment of the present invention provides a clean room transport vehicle comprising a movable platform having a movable mechanism, and an installation room fixed to the movable platform for storing a transported object therein.
It is characterized by having a rectifying plate for suppressing the turbulence of the rear airflow by adjusting the shape of the moving table and the installation room to the direction of the combined speed of the lower airflow speed in the clean room and the moving speed of the carrier.

Particularly important points are a moving table having a moving mechanism, and an installation room fixed to the moving table and storing an object to be transported therein, and air flows between the installation room and the moving table. A fan is provided in the moving table or the installation room, a filter is provided in a flow path including the fan, and both ends of the flow path are used as an air intake port and an air discharge port. A point provided in a part or a plurality of parts in the rear and side directions with respect to the direction to take in the air sent to the installation chamber from the outside, or the air outlet is located in one direction in the rear and side directions with respect to the traveling direction of the carrier. This is provided in a part or a plurality of parts so as to blow downward. In this case, it is preferable that there are a plurality of external air intake ports, the amount of air intake from each intake port can be adjusted according to the traveling direction, and the amount of air intake from each intake port can be adjusted according to the moving speed.

[0011] Further, in a clean room transport vehicle comprising a moving table having a moving mechanism and an installation room fixed to the moving table and storing an object to be transported therein, the moving table and the installation room are provided. It is preferable to have a rectifying plate for adjusting the shape to the direction of the combined speed of the lower airflow velocity in the clean room and the moving speed of the carrier, and to suppress the turbulence of the rear airflow.

In particular, a preferred clean room mobile robot according to the present invention includes a moving platform having a moving mechanism and a working device installed on the moving platform, and air flows between the working device and the moving platform. A fan is provided on the moving table or the working device, and both ends of the flow path including the fan are used as an air intake port and an air blowout port, and the air intake ports are located rearward and sideways with respect to the traveling direction of the mobile robot. It is characterized in that air sent from a part of the moving table and the working device to the fan is taken in from a part or a plurality of parts. In this case, there are a plurality of external air intake ports, and the amount of air intake from each intake port can be adjusted according to the traveling direction. It is desirable to take in the dust sent by the work at the same time as taking in the air sent to the air conditioner, and to be able to adjust the amount of air taken in from each intake port by the moving speed.

[0013] In particular, a mobile robot for a clean room according to the present invention comprises a moving table having a moving mechanism and a working device installed on the moving table. Air flows between the working device and the moving table. A fan is placed on the moving table or the working device, and the air pressurized by the fan is discharged to the outside from an air outlet provided in a part of the moving table. The point that the air sent to the fan from the moving table and the working device that corresponds to a part or a plurality of parts in the rear and side directions with respect to the moving robot traveling direction is taken in from the outside, or the air blowing port is the moving robot moving It is characterized in that it is provided at a part or a plurality of parts in the rear and side directions with respect to the direction and blows out downward to the outside. In addition, the clean-room mobile robot of the present invention can adopt the configuration of the above-described clean-room transport vehicle of the present invention.

In the above-described clean room transport vehicle and the clean room mobile robot, there are a plurality of external air intake ports, and the amount of air intake from each intake port can be adjusted depending on the traveling direction and the like. Did the above clear
In the mobile robot for a room, the air taken into the fan from a plurality of air intake ports provided in the moving table and the working device during the operation is taken in, and at the same time the dust generated by the operation is taken in. In a mobile robot for a car and a clean room, it is preferable that the amount of air taken in from each intake can be adjusted by the moving speed.

[0015]

The turbulence of the downward air flow in the clean room due to the movement is now widespread over a considerable range. This turbulence is caused by a vortex generated in the low-speed region of the downward airflow remaining after the clean room carrier and the mobile robot have moved. The use of a clean room transport vehicle and a mobile robot having a suction port in the lower air current low speed region allows the lower air flow low speed region to be sucked into the clean room transport vehicle and the mobile robot. In addition, the turbulence of the downward airflow can be reduced.

The size of the vortex generated in the low-speed region of the airflow below the airflow due to the movement is substantially determined by the moving speed of the clean room carrier, the moving robot, and the speed of the lower airflow in the clean room. It is determined. Therefore, if the cleanliness is to be maintained, the moving speed of the transporting vehicle for the clean room and the moving robot will be determined from the airflow velocity in the clean room. However, it is possible to reduce the size of the vortex generated in the low-speed area by sucking the low-speed area that would occur in the rear and side directions into the clean room transport vehicle and the mobile robot. At a moving speed of less, the range of the vortex is narrower (that is, the turbulence of the downward airflow in the clean room is smaller), and in the range of the same vortex, the carrier for the clean room at a higher speed, The mobile robot can move.

If the moving direction or the moving speed is not constant, the direction of the suction port and the suction flow rate are controlled in accordance with the moving direction and the speed, so that the work can be performed at a high speed where the progress of the working process is fast. It is possible to move in accordance with the work process, such as at a low speed where the progress of the process is slow.

[0018]

Embodiments of the present invention will be described below with reference to the drawings.

(First Embodiment) FIGS. 1, 2 and 3 are views showing a transport vehicle in a clean room according to an embodiment of the present invention.

The carrier has a moving table 11 having a moving mechanism,
An installation room 12 fixed to the moving table 11 and storing the transported object therein, a fan 13 installed on the moving table 11 for sucking air from outside, and an air suction port 1 from outside.
4, 15, 16; a downward air outlet 17; and a filtered air inlet 19 to the installation room. Reference numeral 18 denotes a non-transported object.

According to such a configuration, the air sucked from the air suction ports 14, 15, 16 from the outside is discharged downward from the air discharge port 17. Air suction ports 14, 15, 16 into the carrier are provided in the low speed region of the lower air flow in the clean room generated when moving, and the lower speed of the lower air flow in the clean room is provided from the respective suction ports to the inside of the carrier. Since the region is sucked, the vortex generated in the low speed region can be reduced.

If the area of the air suction ports 14, 15, 16 or, for example, the suction port is formed by a perforated disk, suction is performed by changing the diameter of the holes, changing the resistance, or changing the number of holes. Air suction port 1
It can be changed every 4, 15 and 16, and it is possible to increase the flow rate of sucking air in the rear area where the speed is low, and to reduce the side direction in the relatively low speed area where the speed is small.

As described above, the air inlets 14, 15, 1
By adjusting 6, the generated vortex can be minimized. Further, by adjusting the flow rate of the air sucked from the air suction ports 14, 15, 16 by the fan 13 according to the moving speed of the transport vehicle in the clean room, it is possible to cope with a wide range of moving speed.

(Second Embodiment) FIGS. 4 and 5 show a mobile robot in a clean room according to another embodiment of the present invention.

The mobile robot includes a moving table 41 having a moving mechanism, a working device 42 installed on the moving table, a fan 43 installed on the moving table 41 for taking in external air, suction direction selection valves 44 and 45, air Suction port 46, 4
7, 48, 49 and an air outlet 50.

According to such a configuration, the low speed region of the downward airflow in the clean room generated when the mobile robot moves in the clean room is reduced as in the first embodiment, and the suction direction selection valve is provided. The suction direction can be controlled by opening the valves opposite to the moving direction of the moving units 44 and 45.

The moving speed is dealt with by adjusting the resolution of the suction direction selection valves 44 and 45 and adjusting the flow rate of the air sucked from the air suction port. The low speed region generated by the operation of the working device 42 is sucked into the working device through the air suction ports 46, 47, and 48 attached to the work table, and is discharged below the air discharge port 50.

By this action, the turbulence of the lower air flow in the clean room is reduced, and the suction direction selecting valve 4 is provided.
Opening both air inlets 46, 4
7, 48 also serve as a suction port for dust and the like generated during work,
It is possible to maintain cleanliness in the clean room.

(Third Embodiment) FIGS. 6 and 7 show a transport vehicle in a clean room according to another embodiment of the present invention. The carrier is a moving table 61 having a moving mechanism, a moving table 6
1, an installation chamber 62 for storing an object to be transported therein, a fan 63 installed on the moving table 61 for taking in external air, and an air suction port 6 with a filter into the installation chamber
4, an air outlet 65 and an air outlet 66.

According to such a configuration, the air sucked in from the air suction port 64 is discharged below the discharge port 65 and the air discharge port 66. This air outlet is provided in the low-speed region of the lower airflow in the clean room generated during movement, and the airflow in the low-speed region is accelerated by setting the blowing flow rate to a value close to the lower airflow speed in the clean room. , The occurrence of disturbance can be suppressed.

(Fourth Embodiment) FIGS. 8 and 9 show a carrier according to another embodiment of the present invention. The transport vehicle in the clean room is provided with a moving table 81 having a moving mechanism, an installation room 82 fixed to the moving table 81 and storing an object to be transported therein, and air in an installation room fixed to the moving table 81. It comprises a fan 83 for taking in air, an air intake port 84 to an installation room with a filter, an air exhaust port 85, and a rectifying plate 86.

According to such a configuration, the air sucked from the air suction port 84 is discharged from the discharge port 85. By installing the flow straightening plate 86 in the low-speed region generated during the movement, a flow is generated in the same direction as the downward airflow in the clean room. As a result, the low-speed region is accelerated, and the development of turbulence can be prevented.

(Fifth Embodiment) FIG. 10 shows a two-dimensional flow analysis method (ASMI) of the difference in the degree of turbulence between a carrier according to the present invention and a conventionally used carrier.
Winter Annual Meeting, Fluid
Engineering Division 66, 1988 (A
SME W. A. M. , FED 66, 1988)).

In the analysis area 100, the model 10 of the transport vehicle
There is one. The analysis is performed by the relative speed using the coordinates fixed to the carrier. 11 and 12 are enlarged views of a part (102) of the analysis area 100.

FIG. 11 is a vector diagram showing the result of analyzing the flow around the carrier according to the present invention. The flow vector 110 is a composite vector of the lower airflow velocity 111 in the clean room and the transporting vehicle moving speed 112 because of the relative speed. In addition, an air suction port 114 is provided at an upper rear portion of the transport vehicle 113. The air sucked in from the air inlet 114 is discharged from the air outlet 115. The flow is obstructed by the transport vehicle 113 and forms a vortex in the low-speed region behind the transport vehicle 113.

However, this low-speed region is attenuated in the vicinity of the suction port 114 without developing because it is sucked into the carrier 113.

FIG. 12 is a vector diagram showing the result of analyzing the flow around a conventional carrier by the same method. The flow vector 120 is a combined vector of the lower airflow velocity 121 in the clean room and the transporting vehicle moving speed 122 because of the relative speed. Further, an air suction port 124 is provided in an upper part of the transport vehicle 123. Air inlet 124
The air that has been sucked in is discharged from the air discharge port 125.

The flow is obstructed by the transport vehicle 123 and forms a vortex in the low-speed region behind the transport vehicle 123. This low-velocity region has developed into a fairly large area, and large eddies disturb the airflow. Comparing FIG. 11 and FIG. 12, the effect of providing the suction can be understood.

[0039]

According to the present invention, it is possible to suppress the turbulence of the downward air flow in the clean room caused by the movement and the operation of the transport vehicle and the mobile robot in the clean room, and to suppress the decrease in cleanliness. It becomes possible.

[Brief description of the drawings]

FIG. 1 is a longitudinal sectional view showing a carrier according to a first embodiment of the present invention.

FIG. 2 is a cross-sectional view showing the carrier according to the first embodiment of the present invention.

FIG. 3 is a side view showing the carrier according to the first embodiment of the present invention.

FIG. 4 is a longitudinal sectional view showing a mobile robot according to a second embodiment of the present invention.

FIG. 5 is a transverse sectional view showing a mobile robot according to a second embodiment of the present invention.

FIG. 6 is a longitudinal sectional view showing a carrier according to a third embodiment of the present invention.

FIG. 7 is a side view showing a carrier according to a third embodiment of the present invention.

FIG. 8 is a longitudinal sectional view showing a carrier according to a fourth embodiment of the present invention.

FIG. 9 is a side view showing a carrier according to a fourth embodiment of the present invention.

FIG. 10 is a diagram of an analysis area showing the effect of the carrier according to the fifth embodiment of the present invention by numerical simulation.

FIG. 11 is a vector diagram of a flow showing an effect of the carrier according to the fifth embodiment of the present invention by numerical simulation.

FIG. 12 is a vector diagram of a flow in a conventional carrier according to a numerical simulation.

[Explanation of symbols]

Reference numeral 11: a moving table having a moving mechanism; 12, an installation room for storing an article to be transported; 13, a fan; 14, 15, 16; an air inlet; 17, an air outlet;
… Air inlet to the installation room with filter, 41… moving table with moving mechanism, 42… working device, 43… fan, 44, 45… suction direction selection valves, 46, 4
7, 48, 49: air inlet, 50: air outlet,
Reference numeral 61: a moving table having a moving mechanism; 62, an installation room for storing non-conveyed objects; 63, a fan; 64, an air intake port to an installation room with a filter; 65, an air outlet; 67, an air intake, 81 ... Movable table with moving mechanism, 82 ...
Installation room for storing non-transported objects, 83 ... Fan, 84 ... Air intake port to installation room with filter, 85 ... Air outlet, 86 ... Rectifier plate, 100 ... Flow vector, 101
... airflow speed, 102 ... moving speed, 103 ... carrier, 10
4 ... inlet, 105 ... air outlet, 110 ... flow vector, 111 ... air velocity, 112 ... moving speed, 11
3 ... Carrier, 114 ... Suction port, 115 ... Air discharge port.

Continuation of front page (72) Inventor Yukio Masuyama 2880 Kozu, Odawara-shi, Kanagawa Pref. Hitachi, Ltd. Odawara Plant (56) References JP-A-60-166554 (JP, A) JP-A-59-140434 (JP, U) (58) Fields investigated (Int. Cl. ⁷ , DB name) H01L 21/68 B25J 19/00 B61D 27/00 B62D 37/02

Claims (2)

(57) [Claims] A moving table having a moving mechanism; and a working device installed on the moving table, wherein air flows between the working device and the moving table. In a mobile robot for a clean room in which a fan is provided in a working device and both ends of a flow path including the fan are an air intake port and an air outlet, a plurality of the air intake ports are provided in the front-rear direction and the side in the traveling direction of the mobile robot. A selection valve for selecting a suction direction so as to perform suction from the outside on the rear side and the side according to the moving direction of the robot, and the sucked air is blown downward to the outside. Mobile robot for clean room. 2. A transfer vehicle for a clean room, comprising a moving table having a moving mechanism and an installation room fixed to the moving table and storing an object to be conveyed therein, wherein the shape of the moving table and the installation room is within the clean room. A clean room transport vehicle, characterized in that it has a rectifying plate for suppressing the turbulence of the rear air flow according to the direction of the resultant force of the downward air flow velocity and the moving velocity of the transport vehicle.