JP3144228U - Exhaust gas cleaner - Google Patents

Abstract

Provided is an exhaust gas cleaner having a simple configuration that not only removes impurities such as flux but also removes odors and efficiently cools exhaust gas back to the atmosphere.
A gas inlet P1 and a gas outlet for introducing and purifying exhaust gas discharged from an impurity gas generator such as a reflow furnace that internally generates a gas containing impurities to purify and release it to the atmosphere. An odor removal filter 3, a cooling member 5, and an impurity recovery mechanism 4 are provided on an internal flow path 9 formed between the P2 and the P2. Further, the cooling member 5 is formed in a flat plate shape so as to form a large number of gas through holes penetrating in the thickness direction, and the cooling member 5 is disposed obliquely with respect to the gas flow direction.
[Selection] Figure 2

Description

  The present invention relates to an exhaust gas cleaner for purifying exhaust gas containing impurities discharged from a reflow furnace or the like and externally cleaning the exhaust gas.

There are two types of reflow furnaces: an open type that introduces air one after another and heats it and releases excess gas to the outside, and an internal circulation type that circulates gas inside and does not discharge it outside. In these reflow furnaces, the flux etc. contained in the solder is vaporized and contained in the gas heated inside, but the flux concentration in the gas gradually increases particularly in the internal circulation type reflow furnace. In addition, since the flux is exposed due to a temperature difference between the zones and may adhere to the furnace inner wall or the substrate, as shown in Patent Document 1, a gas circulation path is provided inside, and the flux is placed on the circulation path. A removal mechanism is provided to remove the flux in the gas.
JP 10-335807 A

However, recently, open-type reflow furnaces are no longer used because impurities in the exhausted gas lead to environmental pollution and the like, and even an internal circulation type reflow furnace is used as a substrate carry-in port or a substrate carry-out port. There may be a problem with the internal gas leaking slightly.
Furthermore, no matter what is focused on the odor of the leaked internal gas in the conventional reflow furnace, regardless of whether it is an open type or an internal circulation type. For example, the above-described flux removing device described in Patent Document 1 is configured not to return the gas to the inside but also to discharge the gas to the outside, but the odor is not removed. Even if the flux is removed, the actual exhaust gas has a considerable odor, which can be a problem.

  The present invention has been made in view of such problems, and not only removes impurities such as flux, but also removes odors and then efficiently cools the exhaust gas and returns it to the atmosphere. The main goal is to provide an exhaust gas cleaner.

  That is, an exhaust gas cleaner according to the invention described in claim 1 of the present invention introduces and purifies exhaust gas discharged from an impurity gas generator such as a reflow furnace that internally generates a gas containing impurities, And a flow path formed between the gas inlet and the gas outlet, and an odor removal filter, a cooling member, and an impurity recovery mechanism provided on the flow path. And the said cooling member comprises flat form and formed many gas through-holes penetrated in the thickness direction, Comprising: This cooling member is inclined and arranged with respect to the gas distribution direction. Features.

  If it is such, while removing impurities, such as a smell and a flux, exhaust gas can be cooled and returned to air | atmosphere. In addition, the cooling efficiency can be greatly increased by inclining the cooling member. Furthermore, since this exhaust gas cleaner can be configured separately from an impurity gas generator such as a reflow furnace, an exhaust gas purification system can be easily constructed by retrofitting an existing reflow furnace or the like. it can.

In the exhaust gas cleaner according to the second aspect of the present invention, the cooling member is formed in a flat plate shape by arranging a plurality of flow pipes in which a cooling medium flows in parallel with a gap therebetween, and adjacent flow pipes A belt-like metal heat transfer plate is disposed between the bent metal heat transfer plates perpendicularly to the virtual flat plate surface and in a wave shape, and the gas through holes are formed between the bent metal heat transfer plates.
In such a configuration, since the cooling member is inclined, the exhaust gas hits the face plate portion of the metal heat transfer plate from an oblique direction, and the cooling efficiency is particularly improved.

In the exhaust gas cleaner according to the invention described in claim 3 of the present application, the impurity recovery mechanism includes a tray member and a plurality of upright walls provided on the tray member to form a tortuous flow path. Thus, the exhaust gas passing through the flow path is cooled, and impurities in the exhaust gas are liquefied or solidified to be revealed and collected by the tray member.
With such a configuration, impurities can be revealed and recovered with a relatively simple configuration.

The exhaust gas cleaner according to the fourth aspect of the present invention further includes an exhaust gas suction blower provided on the flow path.
In such a configuration, since the blower is integrally provided, it is only necessary to connect only the exhaust gas cleaner to the reflow furnace, and the usability is remarkably improved.

In the exhaust gas cleaner according to the invention described in claim 5 of the present application, an odor removal filter, an impurity recovery mechanism, and a cooling member are arranged in series in this order from the upstream side of the flow path, and a cooling member is disposed immediately above the impurity recovery mechanism. It is what.
If the odor removal filter, the impurity recovery mechanism, and the cooling member are arranged in this order, the exhaust gas passes through the odor removal filter while the temperature is high, so the odor removal factor contained in this filter becomes active. , Can remove the odor efficiently. In addition, if the cooling member is arranged upstream from the impurity recovery mechanism, many impurities appear in the cooling member and problems such as clogging are likely to occur.However, since the cooling member is arranged downstream from the impurity recovery mechanism, Can be suitably avoided. Furthermore, even if impurities are revealed by the cooling member, the impurities are dripped into the impurity recovery mechanism immediately below the impurities, so that it is possible to reliably prevent the impurities from leaking out.

In the exhaust gas cleaner according to the sixth aspect of the present invention, the impurity gas generator is a reflow furnace.
If it is such a thing, the effect of this invention will become especially remarkable.

An exhaust gas purification system according to a seventh aspect of the present invention includes the exhaust gas cleaner and a reflow furnace, and is opened near a substrate carry-in port and / or a substrate carry-out port in the reflow furnace. The exhaust gas suction duct having the other end connected to the gas inlet of the exhaust gas cleaner is provided.
If it is such, an exhaust gas cleaner can be retrofitted to an existing reflow furnace, and an exhaust gas purification system can be easily constructed.

In the exhaust gas purification system according to the seventh aspect of the present invention, the one end opening of the exhaust gas suction duct is disposed near and above the substrate carry-in port and / or the substrate carry-out port in the reflow furnace. Features.
Since the gas in the reflow furnace flows out from the substrate carry-in / out port because it is warm, with such a configuration, the exhaust gas can be sucked effectively.

  According to the present invention configured as described above, impurities such as odor and flux can be removed, and the exhaust gas can be cooled and returned to the atmosphere. In addition, the cooling efficiency can be greatly increased by inclining the cooling member. Furthermore, since this exhaust gas cleaner can be configured separately from an impurity gas generator such as a reflow furnace, an exhaust gas purification system can be easily constructed by retrofitting an existing reflow furnace or the like. it can.

  An embodiment of the present invention will be described below with reference to the drawings.

As shown in FIG. 1, the exhaust gas cleaner 100 according to this embodiment is connected to a reflow furnace 200 to constitute an exhaust gas purification system S, thereby purifying the gas discharged from the reflow furnace 200 to the atmosphere. To be released.
Specifically, as shown in FIGS. 2 to 4, the exhaust gas cleaner 100 includes a hollow casing 1 having a rectangular parallelepiped shape and an internal flow path 9 provided inside the casing 1. The blower 2, the odor removal filter 3, the impurity recovery mechanism 4, and the cooling member 5 are arranged in series on the internal flow path 9 in order from the upstream side.

  The exhaust gas from the reflow furnace 200 is introduced into the internal flow path 9 from the gas inlet P1 provided on the upper surface of the housing 1 by the suction force of the blower 2, and the odor removal filter 3, the impurity recovery mechanism 4, and The air is purified through the cooling member 5 and discharged from the gas outlet P2 provided on the upper surface of the housing 1 to the atmosphere.

  More specifically, a suction duct D for external connection is connected to the gas introduction port P1, and one end opening of the suction duct D is connected to the substrate carry-in port Pin and the substrate carry-out port Pout in the reflow furnace 200. It is arranged near and above. This is because, since the gas in the reflow furnace 200 is warm, it flows upward from the substrate carry-in port Pin and the substrate carry-out port Pout, and the exhaust gas can be effectively sucked by this configuration.

  As shown in FIGS. 2 and 4, the blower 2 is disposed almost directly below the gas inlet P <b> 1 and in the vicinity of the bottom surface of the housing 1. The gas inlet P1 and the inlet 21 of the blower 2 are connected by a first pipe 91 which is a part of the internal flow path 9, and the exhaust gas from the reflow furnace 200 is sucked. Yes.

  As shown in FIGS. 2 to 4 and the like, a box-type channel 93 that extends vertically is provided on the side of the blower 2, and is near the bottom of the box-type channel 93. The discharge port 22 of the blower 2 is connected to the gas inlet 93 a provided in

  The odor removal filter 3 is, for example, a fiber material having a plate shape including various odor removal factors inside, and as shown in FIG. 2, the gas inlet 93a or the second pipe of the box-type channel 93 is used. 92. In this embodiment, the odor removal filter 3 is additionally fitted into the gas outlet P2.

  As shown in FIGS. 5 and 6 in particular, the impurity recovery mechanism 4 is fitted into the box-type channel 93 with almost no gap across the box-type channel 93 perpendicularly to the axial direction (gas flow direction). The labyrinth structure 4a includes a tray-shaped tray member 41 and a plurality of standing walls 42 that form a meandering channel standing on the tray member 41. In this embodiment, the impurity recovery mechanism 4 is configured by stacking the labyrinth structure 4a in a plurality of upper and lower stages (here, two stages).

  First, gas flows into the impurity recovery mechanism 4 from the gas inlet 93a into the lower labyrinth structure 4a (see FIG. 6A), and then the upper labyrinth structure 4a (see FIG. 6B). The gas flows into the upper labyrinth structure 4a from the through hole 41a formed at the corner of the tray member 41 in FIG. Then, the gas that has passed through the upper labyrinth structure 4a flows to the cooling member 5 described later through the flow hole 44a of the partition plate 44 disposed above.

  By the way, as shown in FIGS. 2 to 4 and 7, a water cooling pipe 43 is arranged around the impurity recovery mechanism 4 so that the labyrinth structure 4 a is cooled. . Thereby, in the process of passing through the impurity recovery mechanism 4, impurities such as flux contained in the gas are liquefied or solidified to be revealed and accumulated in the tray member 41.

  As shown in FIGS. 8 and 9, the cooling member 5 has a substantially flat plate shape, and a large number of gas through holes 5 a are penetrated in the thickness direction. The box-type flow path 93 is obliquely traversed immediately above the impurity recovery mechanism 4, that is, inclined with respect to the gas flow direction. More specifically, in this, a plurality of flow pipes 51 through which a cooling medium flows are arranged in parallel with a gap therebetween, and a strip-shaped metal heat transfer plate 52 is formed between adjacent flow pipes 51. The gas through-holes 5a are formed so as to be perpendicular to the virtual flat plate surface and bent in a wavy shape, and between the bent metal heat transfer plates.

  The exhaust gas that has passed through the cooling member 5 exits the box-type flow path 93 and is released to the atmosphere from the gas outlet P2.

  Thus, according to the exhaust gas cleaner 100 having such a configuration, impurities such as odor and flux of the gas discharged from the reflow furnace 200 can be removed, and the exhaust gas can be cooled and returned to the atmosphere. Further, since the cooling member 5 is disposed to be inclined with respect to the gas flow direction, the exhaust gas hits the face plate portion of the metal heat transfer plate 42 from an oblique direction, and the cooling efficiency can be greatly increased. Furthermore, since the exhaust gas cleaner 100 can be configured separately from an impurity gas generator such as the reflow furnace 200, the exhaust gas purification system S can be easily installed by retrofitting the existing reflow furnace 200 or the like. Can be built.

  In addition, the odor removing filter 3, the impurity recovery mechanism 4 and the cooling member 5 are arranged in series on the internal flow path 9 in this order from the upstream side. Since it passes through the filter 3, the odor removing factor contained in the odor removing filter 3 becomes active, and the odor can be efficiently removed. Further, if the cooling member 5 is arranged upstream of the impurity recovery mechanism 4, many impurities appear in the cooling member 5, and problems such as clogging are likely to occur. However, the impurity recovery mechanism 4 is arranged upstream of the cooling member 5. Therefore, the above problems can be avoided appropriately. Furthermore, even if impurities appear in the cooling member 5, the impurities are dropped and accumulated in the impurity recovery mechanism 4 immediately below, so that it is possible to reliably prevent the impurities from leaking out.

  The present invention is not limited to the above embodiment. For example, you may attach to impurity gas generators other than a reflow furnace. Further, it is not always necessary to provide the odor removal filter, the cooling member, and the impurity recovery mechanism in this order, and it may be better to change the order depending on the type of impurities. Furthermore, the odor removing filter is not limited to one place, and may be provided at a plurality of places, for example, between the impurity recovery mechanism and the cooling member. Further, the blower is not necessarily required and may be separately attached.

  In addition, it goes without saying that the present invention can be variously modified without departing from the spirit of the present invention.

1 is a schematic overall configuration diagram of an exhaust gas purification system according to an embodiment of the present invention. The front view which shows the internal structure of the exhaust gas cleaner in the same embodiment. The left view which shows the internal structure of the exhaust-gas cleaner in the same embodiment. The right view which shows the internal structure of the exhaust-gas cleaner in the same embodiment. The perspective view which shows the impurity collection | recovery mechanism in the same embodiment. The top view which shows the labyrinth structure in the same embodiment. The perspective view which shows the water cooling tube in the same embodiment. The perspective view which shows the cooling member in the embodiment. The partial detailed perspective view which shows the cooling member in the embodiment.

Explanation of symbols

200 ... Reflow furnace 2 ... Blower 3 ... Odor removal filter 4 ... Impurity recovery mechanism 41 ... Dish member 42 ... Standing wall 5 ... Cooling member 51 ... Flow pipe 52 ... Metal heat transfer plate 5a ... gas through hole 9 ... channel (internal channel)
P1 ... Gas inlet P2 ... Gas outlet

Claims (8)

It introduces and purifies exhaust gas discharged from an impurity gas generator such as a reflow furnace that internally generates a gas containing impurities, and releases it to the atmosphere.
Comprising a flow path formed between the gas inlet and the gas outlet, and an odor removal filter, a cooling member and an impurity recovery mechanism provided on the flow path,
The cooling member has a flat plate shape and is formed with a large number of gas through holes penetrating in the thickness direction, and the cooling member is disposed obliquely with respect to the gas flow direction. Exhaust gas cleaner.   The cooling member is formed in a flat plate shape by arranging a plurality of flow pipes through which a cooling medium flows inside with a gap therebetween, and a strip-shaped metal heat transfer plate is perpendicular to the virtual flat plate surface between adjacent flow pipes. 2. The exhaust gas cleaner according to claim 1, wherein the exhaust gas cleaner is configured such that the gas through hole is formed between the bent metal heat transfer plates.   The impurity recovery mechanism includes a tray member and a plurality of upstanding walls provided on the tray member to form a tortuous flow path, and the impurities in the exhaust gas pass through the flow path. The exhaust gas cleaner according to claim 1 or 2, wherein the exhaust gas cleaner is configured to be liquefied or solidified to be exposed and collected by the tray member.   The exhaust gas cleaner according to claim 1, further comprising a blower for exhaust gas suction provided on the flow path.   The exhaust gas cleaner according to claim 1, 2, 3, or 4, wherein an odor removal filter, an impurity recovery mechanism, and a cooling member are serially arranged in this order from the upstream side of the flow path, and a cooling member is disposed immediately above the impurity recovery mechanism. . 6. The exhaust gas cleaner according to claim 1, wherein the impurity gas generator is a reflow furnace. An exhaust gas purification system comprising the exhaust gas cleaner according to any one of claims 1 to 6 and a reflow furnace,
Exhaust gas purification characterized by comprising an exhaust gas suction duct having one end opened in the vicinity of the substrate inlet and / or substrate outlet in the reflow furnace and the other end connected to the gas inlet of the exhaust gas cleaner system.   The exhaust gas purification system according to claim 7, wherein one end opening of the exhaust gas suction duct is disposed near and above the substrate carry-in port and / or the substrate carry-out port in the reflow furnace.