JP3127481B2 - Flexible polishing disk processing equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a processing apparatus using a flexible polishing disk.

[0002]

2. Description of the Related Art As a processing device using a flexible fixed grindstone,
2. Description of the Related Art Conventionally, a polishing apparatus disclosed in Japanese Patent Application Laid-Open No. 62-27006 is known as a polishing apparatus for polishing an object to be polished such as a magnetic head. FIG. 8 is a plan view of a processing apparatus using such a conventional fixed fixed whetstone, and FIG. 9 is a perspective view of the processing apparatus.
8 and 9, a rotating jig 20, a polishing tape 22 guided by an arc-shaped guide cylinder 21, a supply reel 23 around which the polishing tape 22 is wound, and a take-up reel 26. A plurality of workpiece storage sections 20a are provided on the upper surface of the rotating jig 20, and the workpiece storage sections 20a are provided.
A magnetic head 24 as an object to be polished is sandwiched between the rotating jigs 20, and the tip of the magnetic head 24 slightly projects from the peripheral edge of the rotating jig 20. The guide cylinder 21 is formed in an arc shape, and a polishing tape 22 is wound thereon. A groove 21a is formed in the inner circumferential surface of the guide cylinder 21 in the circumferential direction, and the polishing surface of the polishing tape 22 is exposed from the groove 21a. The polishing tape 22 is guided by a plurality of guides 25 to form a tape running path, and a predetermined tension is applied.
23 and the take-up reel 26. Polishing tape
When the rotating jig 20 is run and the rotating jig 20 is brought into contact with the inner peripheral surface of the guide ring 21 via the polishing tape 22 and rotated at a high speed, the magnetic head 24 protruding from the peripheral edge of the rotating jig 20 The groove 21a contacts the polishing tape and is polished into a shape corresponding to the curved surface of the guide cylinder 21.

However, since the rotating jig 20 for fixing a plurality of magnetic heads 24 rotates at a high speed, when all of the plurality of magnetic heads 24 are not mounted, the dynamic balance is lost and vibration occurs, and polishing accuracy is reduced. There was a problem of doing. In addition, the running system of the polishing tape 22 is complicated and easily affected by the friction of the guide 25, and furthermore, it is difficult to make the tension of the running polishing tape 22 uniform and the polishing accuracy is further reduced. . Further, in the configuration in which the polishing is performed in accordance with the curved surface shape of the guide cylinder 21 for rotating the magnetic head 24, it is necessary to locally form a three-dimensional curved surface such as a head with a slider, or a spherical shape. However, there is a disadvantage that it is difficult to form a complicated shape. In addition, there is a problem that the structure is complicated and the cost is high.

[0004]

SUMMARY OF THE INVENTION The present invention has been made to solve such problems and disadvantages of the prior art, and is intended to provide a flexible polishing disk for polishing a surface to be polished into an arbitrary curved surface. It is an object to provide a processing device.

[0005]

According to the first aspect of the present invention, there is provided a flexible polishing disk processing apparatus having a predetermined distance in a radial direction.
A ring with a plurality of ring-shaped ribs on a concentric circle.
Front so as to cover the disk substrate and the plurality of ring-shaped ribs.
A polishing sheet fixed to the disk substrate;
A driving mechanism for rotating the substrate, and a work chuck for gripping the object to be polished and pressing the object to be polished against the polishing sheet. Also, the flexible abrasive disc processing apparatus according to claim 2 of the present invention, the disc
When three or more ring-shaped ribs are provided on the substrate,
The spacing between the ribs adjacent in the radial direction is
The feature is that the outside is widened.

[0006]

As described above, by giving an arbitrary rigidity curve to the polishing sheet, it is possible to polish the surface to be polished into pressure contact with the polishing sheet into an arbitrary curved surface shape.

[0007]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to FIGS. First, FIG. 1 is a front view of a flexible polishing disk processing apparatus of the present invention, and FIG. 2 is a sectional view of FIG. 1 and 2, a flexible polishing disk processing apparatus according to the present invention includes a flexible polishing disk 1, a driving mechanism 2 for driving the same, and a work chuck 4 for gripping a workpiece 3 such as a magnetic head. Consisting of Flexible polishing disc 1
The polishing sheets 8 and 9 are fixed to the fixing surfaces 6 and 7 of the disk substrate 5 by applying tension in the radial direction. The material of the polishing sheets 8 and 9 used for the disk substrate 5 is 25 μm
Using a PET synthetic resin having a thickness of about 125 μm, a polishing grindstone such as chromium oxide, sodium oxide, boron carbide, silicon carbide, and aluminum oxide having a particle diameter of 0.1 μm or 0.3 μm is formed on the polishing sheets 8 and 9 using a binder. Coated. These are referred to as polishing sheets 8 and 9.
Ring-shaped ribs (fixed surface) of the disk substrate 5 in a state where a predetermined tension is applied in the radial direction of the polishing sheets 8 and 9.
The above-mentioned polishing sheets 8 and 9 are bonded and fixed to the sheet bonding reference surfaces 6 and 7. The diameter of this disk substrate 5 is φ50 to φ
Magnetic stainless steel of 300 mm and thickness of 5 mm was used. Here, the polishing sheets 8 and 9 are bonded to the bonding surfaces of the ring-shaped ribs (fixing surfaces) 6 and 7, and the surface of the PET synthetic resin is opposed to the bonding surfaces of the polishing sheets 8 and 9. Abrasive sheets 8, 9
Is the surface facing the object 3 to be polished. In addition, di
In the center of the disk substrate 5 having a hub hole 10, further, the hub hole 10
A lock hole 11 is provided at a position slightly deviated radially outward from the hole.

The drive mechanism 2 includes a drive motor inside the housing.
It has twelve. The drive motor 12 is screwed to the housing. The drive motor 12 includes a pulse generator and a frequency generator (not shown ). Reference numeral 13 denotes a rotation shaft of the drive motor 12, which has a hub and has a lock pin 14 projecting therefrom. Rotary shaft 13 and the lock pin 14 of the driving motor 12 are respectively fitted in the hub hole 10 and the lock hole 11 of the disk substrate 5, by the rotation of the rotary shaft 13 of the drive motor 12, the flexible abrasive disc 1 It is designed to rotate. Reference numeral 15 denotes a chucking magnet.

That is, the disk substrate 5 is placed in a radial direction.
Ring-shaped ribs 6, 7 provided at regular intervals are arranged on a concentric circle . The plurality of ring-shaped ribs 6, 7
Is a fixing surface for the plurality of polishing sheets 8 and 9, and the distance between the fixing surfaces 6 and 7 in the radial direction is set to an arbitrary interval, and the polishing sheets 8 and 9 are fixed to these fixing surfaces 6 and 7 to perform polishing. The sheets 8 and 9 have an arbitrary rigidity curve, and the object to be polished 3 is pressed against these polishing sheets 8 and 9 for polishing.

Next, the operation will be described . Work chuck 4
To be polished, such as a magnetic head, and the polishing sheet 8
When pressed against, the polishing surface of the polishing sheet 8 is adhesively supported by the fixed surface 6 of the disk substrate 5.
Is a clearance gap 5 between the fixing surfaces 6 and 7 and the fixing surfaces 6 and 7.
a and 5b. FIGS. 3 and 5 show a partially enlarged view of the disk substrate 5 where the pressing force is P ₀ and P ₁ and the amount of bending deformation is d ₀ and d ₁ . A polishing sheet 8 is provided on the workpiece 3
The rigidity (P ₀ / d ₀ , P ₁ , d ₁ ) of FIGS.
A pressing force as shown in the characteristic curve diagram shown in FIG. Note that l ₀ , l
₁ indicates the distance between the fixed surface 6 and the next fixed surface 6. Rotation of the abrasive sheet 8 in such a state, FIG. 4 and the object to be polished 3 curves to match the curve of the characteristic curve diagram shown in FIG. 6 is polished.

This characteristic curve is determined by the tensions of the polishing sheets 8 and 9 and the distances l ₀ and l ₁ when the polishing sheets 8 and 9 are applied with tension and adhered to the fixed surfaces 6 and 7. Polishing sheets 8 and 9 are provided on both sides of the disk substrate 5 so that a plurality of workpieces 3 can be polished simultaneously. In addition, the workability is improved by alternately using the polishing sheets 8 and 9 alternately, or the polishing sheets 8 and 9 are formed with separate polishing wheels so that they can be processed in accordance with the finishing process.

In this embodiment, the distances between the fixed surfaces 6 and 7 are defined as l ₀ and l _1. However, more fixed surfaces are formed and the distances are defined as l ₀ , l ₁ , l ₂ , l ₃ and l _n. As the polishing condition goes toward the inner circumference, l ₀ > l ₁ > l ₂ > l
If _3> l _n, can be processed to be processed surface of the object to be polished 3 freely selected curvature. Taking further increased l ₀ in FIG. 3 curve becomes flat, it is possible to polish the workpiece 3 in FIG. 3 in a plan view.

That is, the radial sections of the polishing sheets 8 and 9 are deformed as shown in FIG. 3, and the radial sections of the workpiece 3 such as a magnetic head are formed by the polishing sheets 8 and 9 in FIG. As shown in the characteristic curve of FIG. The same applies to FIGS. 5 and 6. Here, the difference between FIG. 3 and FIG. 5 is that when l ₀ > l ₁ , the rigidity characteristic curves shown in FIG. 4 and FIG. 6 are obtained. Is larger than the object 3 shown in FIG. 3 than the object 3 shown in FIG.

Although not shown in detail in the drawings, the work check 4 is movable in X, Y, and Z directions.
You can also tilt. For example, in FIG. 2, using the same magnetic head (the object to be polished 3), the R-balance is polished as a video head with the outer work chuck 4, and the chamfering is polished at the position of the inner work chuck 4. You can do it too. FIG. 7 illustrates the video head thus polished. 16 is an R balance polished surface, and 17 is a chamfered polished surface.

[0015]

As described above, the apparatus for processing a flexible abrasive disc of the present invention has a predetermined spacing in the radial direction.
Disk substrate provided with a plurality of ring-shaped ribs on a concentric circle
And the disc so as to cover the plurality of ring-shaped ribs.
A polishing sheet fixed to a polishing substrate , a drive mechanism for rotating the disk substrate , and a work chuck for gripping the polishing object and pressing the polishing object against the polishing sheet. . By giving an arbitrary rigidity curve to the polishing sheet in this way, it is possible to polish the surface to be polished in pressure contact with the polishing sheet into an arbitrary curved surface shape, and the following effects are obtained.

(1) The polishing sheet is fixed to the disk substrate by uniformly applying a tension in the radial direction. Here, by arranging the fixing surfaces at arbitrary intervals in the radial direction, polishing with different rigidity curves is performed. Since the surface to be polished is pressed against the sheet, an arbitrary curved surface can be polished using the same disk substrate. (2) By disposing the abrasive sheets on both sides, the abrasive materials are different, the particle diameters are different, and further, the thickness of the abrasive sheets and the fixing interval are different, so that the sheet rigidity is different. By changing the conditions freely, it is possible to create a complicated curved surface.

(3) Using the same disk substrate, rough machining, medium machining, and final finishing can be performed. (4) The structure is simple and the cost can be reduced. (5) Since the processing is performed using a flexible polishing disk, no deteriorated layer is formed on the object to be polished.

[Brief description of the drawings]

FIG. 1 is a front view of a flexible polishing disk processing apparatus according to the present invention.

FIG. 2 is a sectional view of FIG.

FIG. 3 is a partially enlarged sectional view of the disk substrate of the present invention.

FIG. 4 is a graph showing a rigidity characteristic curve of the polishing sheet of the present invention.

FIG. 5 is a partially enlarged sectional view of another disk substrate of the present invention.

FIG. 6 is a rigidity characteristic curve diagram of another polishing sheet of the present invention.

FIG. 7 is a perspective view of a video head polished by the flexible polishing disk processing apparatus of the present invention.

FIG. 8 is a front view of a conventional flexible fixed grindstone processing apparatus.

FIG. 9 is a perspective view of a conventional flexible fixed grindstone processing apparatus.

[Explanation of symbols]

 REFERENCE SIGNS LIST 1 flexible polishing disk 2 drive mechanism 3 workpiece to be polished (magnetic head) 4 work check 5 disk substrate 6, 7 fixing surface 8, 9 polishing sheet 10 hub hole 11 lock hole 12 drive motor 13 rotation axis 14 lock pin 15 chucking Magnet 16 R Balanced polishing surface 17 Chamfered polishing surface

Claims (2)

(57) [Claims] A plurality of ridges are provided at predetermined intervals in a radial direction.
A disk substrate provided with ring-shaped ribs on a concentric circle, and the disk base so as to cover the plurality of ring-shaped ribs.
A polishing sheet fixed to a plate, a drive mechanism for rotating the disk substrate , and a work chuck for gripping an object to be polished and pressing the object to be polished against the polishing sheet. A flexible polishing disk processing apparatus characterized by the above-mentioned. (2) In the disk substrate, the ring-shaped
At least three ribs are provided, and the ribs
The feature is that the outer side is wider than the inner side in the radial direction
Flexible polishing disc processing equipment.