JPH06176321A - Polishing device and polishing method for magnetic head - Google Patents

Abstract

PURPOSE:To enable the polishing of the floating surface of a magnetic head to an arbitrary projecting shape in the state of adhering the magnetic head to a supporting spring and to decrease the working level difference between a head substrate and a magnetic film. CONSTITUTION:The magnetic head 7 which is mounted with an X table 1, a Y table 2, a Z table 3, an theta motor 4 and a phi motor 5 and is adhered to the supporting spring 6 mounted to the theta motor 4 is oscillated in an orbit of an arbitrary function. The magnetic head 7 is pressed and oscillated to a diamond disk 9 for polishing mounted to an air spindle 8 and is brought into sliding contact therewith, by which the floating surface shape of the magnetic head is generated and polished.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a polishing apparatus for polishing an air bearing surface of a floating magnetic head into an arbitrary convex shape, and a polishing method using the polishing apparatus.

[0002]

2. Description of the Related Art Conventionally, high-precision machining of an air bearing surface of a magnetic head has been described, for example, in Trigger, 88-1, page 51, in which loose abrasive grains are put on a polishing plate made of soft metal. It was carried out by a polishing method of generating fine chips by pressing and sliding a magnetic head held by a holder while dropping a polishing liquid containing the. Then, the magnetic head thus polished is removed from the holder,
It is configured to be bonded to a support spring of the magnetic disk device to function as a floating magnetic head in the magnetic disk device.

FIG. 10 is a perspective view of a conventional flying type magnetic head. The magnetic head 7 is formed in a substantially rectangular parallelepiped shape, and has curved air bearing surfaces 15 formed on both sides of the surface facing the magnetic disk with a narrow width so that the magnetic disk side is convex. A gap G is provided on each downstream side in the rotation direction. Here, the shape of the air bearing surface 15 of the magnetic head 7, particularly the relationship between the crown height 16 and the flying height of the head, the crown height 16 of the air bearing surface 15 and the durability of the magnetic disk device, that is, until the magnetic disk device is broken. Minimum time MTBF
Considering the relationship with (Minimum Time Before Failure), it becomes as shown in FIGS. 11 and 12. Figure 11
Shows the relationship between crown height and flying height, and FIG. 12 shows the relationship between crown height and MTBF.

To reduce the flying height of the magnetic head 7,
It can be seen from FIG. 11 that the size of the crown height 16 needs to be reduced, and the MT of the magnetic disk device is reduced.
It can be seen from FIG. 12 that the crown height 16 needs to be increased in order to increase the BF. For example, in order to set the head flying height to 0.1 μm or less and the MTBF to 40,000 hours or more, it is necessary to create the crown height 16 in the range of 0.1 ± 0.05 μm as can be seen from the figure.

[0005]

By the way, when the magnetic head 7 is bonded to the support spring as described above, the magnetic head 7 is
Adhesion distortion may occur on the magnetic head 7, and as a result, the magnetic head 7 may have a shape different from that immediately after polishing. The magnitude of this adhesive strain is
The variation is very large, and as a result, the shape of the air bearing surface 15 of the magnetic head bonded to the support spring also varies greatly.

Further, in order to miniaturize the magnetic disk device, it is necessary to reduce the thickness of the magnetic head 7. However, if the thickness is reduced, the variation in the bonding strain becomes larger due to the reduction in thickness. In the conventional manufacturing method, It becomes impossible to manufacture the magnetic head 7.

That is, in the method of manufacturing a magnetic disk device in which the air bearing surface is polished as described above and then the magnetic head 7 is adhered to the support spring, the shape of the air bearing surface 15 of the magnetic head 7 is controlled with high accuracy as described above. It was impossible to do.

In the conventional free-abrasive-grain polishing, as will be described later, due to the action of rolling abrasive grains, a processing step as indicated by reference numeral 21 in FIG. 13 occurs between different materials forming the magnetic head 7, As shown in FIG. 14, the flying height of the magnetic head 7 (reference numeral 21 + reference numeral 2) is increased by the size of the processing step 21.
There is a problem in that the recording wavelength cannot be shortened due to the fact that 2) cannot be shortened substantially. For example, the same hardness as a magnetic film having a Vickers hardness of 200 kgf / mm is 1
Magnetic head 7 made of a substrate of 300 kgf / mm or more
Then, the step 21 of about 0.03 μm at maximum was generated in the magnetic film portion. 13 and 14, reference numeral 18 is a magnetic film, reference numeral 19 is a protective film, and reference numeral 2
Reference numeral 0 indicates a substrate, and reference numeral 23 indicates a magnetic disk.
13A is a perspective view of the magnetic head 7, and FIG.
FIG. 13B is an enlarged cross-sectional view of plane B in FIG.

FIG. 15 is a diagram showing the relationship between the flying height of the head and the limit length of the recording bit of the magnetic disk 23.
When the flying height is increased by 0.01 μm, the bit length becomes 0.
It shows an increase of 05 μm. Therefore, if there is a processing step 21 on the air bearing surface of the magnetic head of 0.03 μm, for example, the bit length is 0.1 as compared with the case without this step.
It becomes longer by 5 μm, and the recording density is reduced accordingly.

The present invention has been made in view of the above circumstances of the prior art. A first object of the present invention is to polish the air bearing surface of a magnetic head in a state in which the magnetic head is bonded to a support spring to obtain a predetermined shape. An object of the present invention is to provide a polishing apparatus and a polishing method capable of creating an air bearing surface.

A second object of the present invention is to provide a magnetic head polishing apparatus and a polishing method capable of reducing the working step of the air bearing surface of the magnetic head and substantially shortening the flying distance.

[0012]

In order to achieve the above object, the present invention provides a first moving table (X table) which can move in parallel in a predetermined direction, and a first moving table which is parallel to the moving direction of the first moving table. A second moving table (Y table) movable in a direction perpendicular to the moving direction in the plane, and a third movable table movable in a direction perpendicular to the moving directions of the first and second moving tables. Moving table (Z table), first rotating drive means (θ motor) having a rotating shaft that rotates about the moving direction of the first moving table as a normal, and moving direction of the second moving table. A second rotation drive means (φ motor) having a rotation axis that rotates about the normal line, and a magnetic head mounted on the rotation axis of the first or second rotation drive means and mounted on the tip side. Support spring and a magnetic head for polishing the air bearing surface A polishing disk having a polishing material on its surface, a rotation driving means for rotating the polishing disk, and a polishing control mechanism for rocking the magnetic head and the polishing disk while pressing the magnetic head are provided. There is.

During polishing, the first, second, and third tables are moved in parallel under the control of the polishing control mechanism, and the magnetic head is oscillated by the first and second rotation drive means. The air bearing surface of the magnetic head is polished into a predetermined curved shape by sliding it against a rotating polishing disk while moving it.

[0014]

By using the polishing apparatus configured as described above, the first to third moving tables, the first and second moving tables
The magnetic head can be moved by the 5-axis control by the rotation driving means. As a result, the air bearing surface of the magnetic head is in the same state as the attached state supported by the support spring.
It is possible to draw a locus represented by a linear combination of arbitrary functions such as in, cos, and log, which allows the magnetic head to arbitrarily form the air bearing surface even if it has an asymmetrical convex shape.

[0015]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings.

FIG. 1 is a perspective view of a polishing apparatus according to an embodiment. In the figure, the polishing apparatus includes an X table 1 as a first moving table and a Y table as a second moving table.
A table 2, a Z table 3 as a third moving table, a θ motor 4 as a first rotation driving unit that rotates about an X axis as a normal line, and a θ motor 4 that rotates about a Y axis as a normal direction. 2, a φ motor 5 as a rotation driving means, a magnetic head 7 rotatably attached by a rotation shaft of a θ motor 4 via a support spring 6, and a diamond as a polishing disk described later in detail. It comprises a disk 9, an air spindle 8 as a rotary driving means for rotationally driving the diamond disk 9, and a stone surface plate 11 for supporting each of these parts. The stone surface plate 11 further includes a damper 10 for the base 40.
Is supported through.

The X table 1 is supported so as to be movable in a predetermined direction, in other words, in a preset X-axis direction, and is moved in the same direction by a polishing control mechanism (not shown) and then stopped. The Y table 2 is movably supported in a Y axis direction perpendicular to the X axis direction in a plane parallel to the X table 1, and the Z table 3 is movably supported in a Z axis perpendicular to the XY plane. Y table 2 and Z table 3
Both of them can be moved and stopped by a driving means (not shown) like the X table 1. The Y table 2 is mounted on the X table 1, the Z table 3 is mounted on the Y table 2, the φ motor 5 is mounted on the Z table, and the θ motor 4 is rotated by the drive shaft of the φ motor 5. It is mounted on a driven base 5a.

The magnetic head 7 is supported by the tip of a support spring 6 attached to a base 4a fixed to the rotating shaft of the θ motor 4 so that the air bearing surface 15 faces the diamond disk 9.

With this configuration, when the X, Y, Z tables 1, 2, 3 and the θ, φ motors 4, 5 are controlled and operated via the polishing control mechanism, the support spring 6 attached to the θ motor 4 is operated. The magnetic head 7 adhered to can be swung in a trajectory of an arbitrary function. The shape of the air bearing surface 15 of the magnetic head 7 can be creatively polished by pressing the magnetic head 7 against the diamond disk 9 for polishing, which will be described later, attached to the air spindle 8 and swinging the magnetic head 7. It should be noted that the damper 10 is provided for vibration isolation, and it is intended that the damper 10 can be processed on the stone surface plate 11 without being affected by external vibration. Further, although the polishing control mechanism is not particularly described, each table 1,
Any mechanism can be used as long as it can move 2 and 3 in parallel and rotate the motors 4 and 5 to control the 5 axes as described later to polish an arbitrary curved surface. Good.

With such a structure, when the five axes are controlled and the torsional rigidity of the support spring is taken into consideration, the air bearing surface 15 of the magnetic head is polished into an arbitrary convex shape of the following formula. That, (dθ / dt) · ( dφ / dt) = 4S · f x · f y · {(∂ 2 Z / ∂X 2) + P / G x} · {(∂ 2 Z / ∂Y 2) + P / _Gy } (Equation 1) where Z (X, Y): Magnetic head air bearing surface forming condition θ, φ: Swing angles fx _{, fy} : X, Y directions normal to the X, Y axes Oscillation frequency P: Polishing load dθ / dt, dφ / dt: Angular velocity of θ, φ G _x , G _y : Support spring torsional rigidity in the X and Y directions S: Area of the air bearing surface of the magnetic head. That is, θ, φ, dθ / dt, dφ / dt can be controlled by θ, φ motors 4, 5, f _x , f _y can be controlled by X, Y tables 1 and 2, and P can be controlled by Z table 3. Therefore, the air bearing surface 15 of the magnetic head 7 can be generated and polished into an arbitrary convex shape by the apparatus in this embodiment.

In this embodiment, the swing angle with the X-axis as the normal is θ = θ ₀ sin ωt, f _y = 0.3 Hz, Y-axis stroke 15 mm, polishing load P = 0.08 N, and disk rotation speed 1000 rpm. The result of polishing the magnetic head 7 is shown in FIG. As can be seen from this figure, the relationship between the magnetic head crown height and the maximum swing angle θ ₀ is very well in agreement with the experimental value and the theoretical value of (Equation 1). That is, according to the apparatus of this embodiment, the air bearing surface 15 of the magnetic head 7 bonded to the support spring 6 can be generated and polished into an arbitrary shape, and as a result, the flying height of the magnetic head 7 and the durability of the magnetic disk device can be improved. It is possible to manufacture the magnetic head 7 satisfying the above-mentioned predetermined performance, that is, the magnetic head having an air bearing surface crown height of 0.1 ± 0.05 μm. Further, with the miniaturization of the magnetic disk device, it is necessary to reduce the thickness of the magnetic head 7. However, according to the present invention, the variation in the shape of the magnetic head caused by the thin thickness is eliminated, so that the small magnetic disk device is realized. The magnetic head 7 that can be mounted can be manufactured. At present, in a magnetic disk device having a thickness of 3/4 inch in which a 2.5 inch disk is mounted, since the thickness of the magnetic head 7 is 0.42 mm, the limit mounting amount of the magnetic disk 23 is four. However, according to the present invention, since the magnetic head 7 having a thickness of 0.3 mm or less can be manufactured, the limit mounting amount of the magnetic disks 23 can be increased to five.

Further, in this apparatus, dθ / dt, dφ
Since / dt can be varied with respect to θ and φ, respectively, the size of the radius of curvature of the magnetic head air bearing surface 15 can be changed depending on the position on the magnetic head air bearing surface 15. For example, as can be seen from the perspective view of FIG. 4, the radius of curvature at a position close to the element side of the magnetic head 7 is increased (C in the figure).
_B), reducing the radius of curvature of the magnetic head floating front end (in the figure C _S) can be also. That is, it is possible to manufacture the magnetic head 7 having a smaller flying height than the conventional magnetic head 7 in which the top of the crown height 16 is located at the center of the head air bearing surface 15.

As shown in FIG. 2, the diamond disk 9 has an adhesive material (hereinafter referred to as a bond material) on the upper surface of the surface plate 12.
The diamond abrasive grains 13 are bonded via 14 to form the abrasive grains 13
It is formed so that the height difference H of is within 0.05 μm / 3 mm. By using the diamond disk 9 configured in this way, the above-mentioned FIG.
The processing step 21 shown in (b) can be reduced. Hereinafter, this will be described in detail.

In polishing a composite material such as the magnetic head 7, that is, a material composed of different materials having different hardnesses, the polishing efficiencies differ depending on the constituent materials under the same polishing pressure. On the other hand, the polishing pressure and the polishing efficiency are almost proportional to each other. By the way, when the polishing is in a steady state, the polishing efficiency must be the same for each material, so that there is a difference in polishing pressure between different materials so as to conform to this. This difference in polishing pressure causes a difference in the displacement of the abrasive grains supported by the polishing platen, which causes a processing step 21 on the polishing surface of the composite material. Therefore, it is considered that the processing step 21 can be reduced by reducing the displacement of the abrasive grains.

Then, observing the polishing phenomenon of the composite material by the abrasive grains, the conventional free abrasive polishing, that is, when the abrasive grains roll on the surface plate, that is, when the abrasive grains are rolling abrasive grains The difference in the force (polishing pressure) applied to the abrasive grains causes a difference in the amount of abrasive grains biting into the polishing platen, that is, the amount of plastic deformation of the platen. The difference in displacement between grains is also large. On the other hand, when the abrasive grains 13 are embedded in the polishing platen 12 like the diamond disk 9 in FIG. 2, that is, in the case of fixed abrasive grain polishing, the elasticity of the polishing platen 12 near the abrasive grains is large. Since there is only a difference in the amount of deformation, the difference in displacement between the abrasive grains 13 is extremely small. Therefore, by polishing with the fixed abrasive, the processing step 21
Can be made smaller.

The case of subsequently polishing the magnetic head will be described in detail with reference to FIGS. 5 and 6. FIG. 5 is a schematic diagram showing the operating principle of polishing with fixed abrasives according to the embodiment, and FIG. 6 is a schematic diagram showing the operating principle of polishing with rolling abrasives in conventional free abrasive polishing.

As for fixed (embedded) abrasive grains, as shown in FIG. 5, since they are elastically supported by the surface plate 25, the head substrate 20 and the magnetic film 1 constituting the magnetic head 7 are composed.
The difference in the displacement of the fixed abrasive grains caused by the difference in the polishing pressure with _{respect to} 8, that is, the processing step δ _1, is δ ₁ = {3 (1-ν ² ) / 4E} √ (π · H _vL · ΔP) (Equation 2) ΔP = (H _{V1 to} H _V2 ) · π · d _max · R _max (Equation 3) However, for example, when tin is used for the polishing platen E: Young's modulus of the platen (= 6000 kgf / m
m ² ) V: surface plate Poisson's ratio (= 0.33) H _vL : surface plate hardness (= 15 kgf / mm ² ) H _v : head substrate hardness (= 1300 kgf / mm)
² ) H _v : hardness of magnetic film (= 200 kgf / mm ² ) d _max : maximum abrasive grain size (= 2 μm) R _max : maximum surface roughness (= 0.01 μm) of the surface to be polished.

By substituting these numerical values into (Equation 2) and (Equation 3), δ ₁ = 0.01 μm.

On the other hand, as for the rolling abrasive grains, as shown in FIG. 6, the rolling abrasive grains roll between the polishing platen 25 and the magnetic head 7. The difference in the amount of bite (that is, the amount of plastic deformation of the polishing platen 25), that is, the processing step δ _2, is δ ₂ = R _max {√ (H _v1 ) −√ (H _v2 )} / √ (H _vL ) (number 4) Substituting the above numerical value into this (Equation 4), δ ₂ =
It can be seen that it becomes 0.06 μm, which is much larger than the above δ ₁ = 0.01 μm. Therefore, it is possible to reduce the processing step by polishing with the fixed abrasive.

Therefore, in order to polish with fixed abrasive grains, in the present embodiment, a diamond in which diamond abrasive grains 13 having an average abrasive grain diameter of 0.1 μm are bonded by a bonding material 14 on an aluminum (A1050P) surface plate 12 is used. The disk 9 was manufactured and tested. 0.1μ on the cutting edge of diamond abrasive grain 13
If there is a variation of m / 3 mm or more, the maximum surface roughness Rmax of the polished magnetic head air bearing surface 15 becomes 0.01 μm or more. Therefore, in this embodiment, the surface plate 27 made of cast iron (FC20 or the like) is used. As shown in FIG. 7, by polishing the surface of the diamond disk 9 as described above, the diamond abrasive grains 13 having the cutting edges of 0.05 μm / 3 mm or less (FIG. 2) were used. Since carbon atoms forming diamond are easily diffused in cast iron, when the diamond disk 9 is polished by the cast iron surface plate 27, the cutting edges of the diamond abrasive grains 13 can be aligned.

The diamond disk 9 is mounted on the above-mentioned polishing apparatus, and the diamond disk 9 is rotated by the air spindle 8 at a rotation speed of 1000 rpm. The Y-axis swing cycle f _y = 0.3 Hz, the Y-axis stroke 15 mm, and the polishing pressure. When polished with 0.08 N, the processing step is 0.
It was 007 μm, and the processing step 21 was able to be made extremely small as compared with the case of polishing by conventional free abrasive grain polishing.

Conventionally, the processing step was 0.03 μm, the head flying height was 0.2 μm, and the actual flying height was 0.23 μm. According to this embodiment, the processing step is 0.007 μm.
m, the head flying height is 0.05 μm, that is, the actual flying height can be 0.057 μm. As a result, the conventional recording bit length of 1.0 μm can be increased to 0.025 μm, and the areal recording density of the magnetic disk 23 can be quadrupled. Currently, the limit value of areal recording density is 250 Mb
Although it is / in, it becomes possible to make this at least 1 G / in. Further, according to the present invention, since the disk mounting amount of the 2.5-inch disk device can be increased from four to five, the capacity of this type of disk device is currently 0.5 GB / 1 unit. This can be set to 0.5 GB / 1 unit × 1 Gb / in ÷ 250 Mb / in × (5/4) = 2.5 GB / 1 unit (Equation 5).

Further, a method of polishing by using the diamond disk 9 as described above will be described in detail below.

When such a diamond disk 9 is used, the diamond disk 9 is provided with a rough polishing section 28, a final polishing section 29, a cleaning section 30, and an electrical characteristic measuring section 31, as shown in FIG. In this embodiment, the rough polishing portion 28 is formed by bonding the diamond abrasive grains 13 having an average grain size of 0.25 μm with the bonding material 14. The finish polishing section 29 combines the diamond abrasive grains 13 having an average particle diameter of 0.1 μm with the bonding material 14, and polishes the surface of the diamond abrasive grains 13 with the above-mentioned cast iron surface plate 27 so that the height of the cutting edge of the abrasive grains 13 is 0.05 μm.
It is kept within. The cleaning unit 30 is made of urethane foam, and the electric characteristic measuring unit 31 is coated with a magnetic medium. As a result, the magnetic head 7 is levitated by the electric characteristic measuring unit 31 and the electric signal is measured.

First, in the rough polishing section 28, the diamond disk 9 is rotated at 1000 rpm, and the magnetic head 7 is pressed and oscillated.
5 is roughly polished. Next, the magnetic head 7 is finished and the polishing unit 2
9 and move the diamond disk 9 to 100
By rotating at 0 rpm and oscillating the magnetic head 7, the air bearing surface crowning can be made to have a predetermined size and the processing step 21 can be made smaller than the conventional one by the above-mentioned processing principle.

Next, the magnetic head 7 is cleaned by the cleaning unit 30.
The diamond disk 9 to 1000
The magnetic head 7 is pressed and oscillated by rotating it at rpm. In this process, it is possible to remove foreign matter attached to the air bearing surface 15. FIG. 9 shows the diameters of adhering foreign matters immediately after polishing by the finish polishing section 29 and after cleaning. As described above, it is understood that the head air bearing surface 15 is reliably cleaned by providing the cleaning unit 30 for cleaning.

When the cleaning is completed, the magnetic head after cleaning is moved to the electric characteristic measuring section 31 at the innermost periphery of the magnetic disk 7, where the diamond disk 9 is set to 3000 to 50.
The magnetic head 7 is levitated by rotating it at 00 rpm. In this embodiment, as can be seen from FIG. 1 described above, the magnetic head 7 is bonded to the support spring 6, so that the electric signal S can be read from the terminal 32 of the head element. The flying characteristic of the magnetic head 7 can be measured using this electric signal S. The rough polishing section 28 and the finish polishing section 29
Is not only configured as in this embodiment, but, for example, the abrasive grains of the rough polishing portion 28 are diamond, and the finish polishing portion 29 is
May be soft abrasive grains such as alumina, silicon carbide, and silicon oxide, which are softer than diamond.

As described above, by providing the polishing parts 28 and 29, the cleaning part 30, and the electrical characteristic measuring part 31 in the diamond disk 9, the magnetic head 7 is removed from the apparatus in the three steps of polishing, cleaning and floating characteristic measurement. Without the need for continuous operation.

[0039]

As is apparent from the above description, according to the present invention configured as described above, the magnetic head is levitated by the 5-axis control in a state similar to the actual mounting state supported by the support spring. Since the surface can be polished, the air bearing surface can be generated and polished into an arbitrary convex shape.

Further, by fixing the diamond abrasive grains and placing the cutting edge of the abrasive grains within the range of a predetermined height, it becomes possible to reduce the processing step of the air bearing surface in the magnetic head, and to substantially reduce the flying distance. Can be narrowed to

[Brief description of drawings]

FIG. 1 is a perspective view showing an overall configuration of a polishing apparatus according to an embodiment of the present invention.

FIG. 2 is a sectional view showing a structure of a diamond disk according to an embodiment of the present invention.

FIG. 3 is a diagram showing a result of polishing a magnetic head with a polishing apparatus according to an example.

FIG. 4 is a perspective view showing an example of a magnetic head air bearing surface shape that can be processed by the polishing apparatus according to the embodiment.

FIG. 5 is an explanatory diagram showing an operating principle of polishing with fixed (embedded) abrasive grains.

FIG. 6 is an explanatory diagram showing an operating principle of polishing by rolling abrasive grains.

FIG. 7 is an explanatory view showing a polishing state of diamond abrasive grains by a cast iron surface plate.

FIG. 8 is an explanatory diagram showing a disk having a polishing section, a cleaning section, and an electrical characteristic measuring section, and a method of polishing a magnetic head using the disk.

FIG. 9 is a diagram showing a cleaning effect when the diamond disk according to the example of the present invention is used.

FIG. 10 is a perspective view showing the appearance of a magnetic head.

FIG. 11 is a diagram showing a relationship between crown height and flying height.

FIG. 12 is a diagram showing a relationship between crown height and MTBF.

FIG. 13 is a diagram showing a state of a processed step of the magnetic head.

FIG. 14 is an explanatory diagram showing a flying state of a magnetic head.

FIG. 15 is a diagram showing the relationship between the flying height of a magnetic head and the recording bit length.

[Explanation of symbols]

 1 X Table 2 Y Table 3 Z Table 4 θ Motor 5 φ Motor 6 Support Spring 7 Magnetic Head 8 Air Spindle 9 Diamond Disk 10 Damper 11 Stone Surface Plate 12 Surface Plate 13 Diamond Abrasive Grains 14 bond material 15 air bearing surface 16 crown height 18 magnetic film 19 protective film 20 substrate 21 processing step 22 flying height 23 magnetic disk 24 fixed abrasive 25 polishing surface plate 26 rolling abrasive particle 27 cast iron surface plate 28 rough polishing portion 29 finish polishing Part 30 cleaning part 31 electrical characteristic measuring part 32 terminal

Front page continued (72) Inventor Minoru Yamasaka 2880 Kozu, Odawara City, Kanagawa Stock Company Hitachi Ltd. Odawara Plant

Claims (7)

[Claims] 1. A magnetic head polishing apparatus for polishing an air bearing surface of a magnetic head into a curved surface, comprising: a first moving table that can move in parallel in a preset direction; and a plane parallel to the moving direction of the first moving table. A second moving table movable in a direction perpendicular to the moving direction, a third moving table movable in a direction perpendicular to the moving directions of the first and second moving tables, A first rotation drive unit having a rotation axis that rotates about the moving direction of the first moving table as a normal line, and a second rotation drive unit that rotates about the moving direction of the second moving table as a normal line. Rotation drive means, a support spring mounted on the rotation shaft of the first or second rotation drive means and having a magnetic head mounted on the tip side, and an abrasive for polishing the air bearing surface of the magnetic head. Polishing disc on the surface A rotation driving means for rotating the abrasive disc, magnetic head polishing apparatus characterized by comprising a polishing control mechanism for swinging while pressing the magnetic head to said abrasive disc. 2. The polishing disk is formed by adhering diamond abrasive grains to a surface plate with an adhesive and polishing the adhered diamond abrasive particles with another surface plate made of a material in which carbon atoms easily diffuse. 2. The magnetic head polishing apparatus according to claim 1, wherein the magnetic head polishing apparatus comprises a diamond disk. 3. The magnetic head polishing apparatus according to claim 2, wherein the height difference of the cutting edges of the diamond abrasive grains is formed within 0.05 μm. 4. A rough polishing part is provided on the surface of the polishing disk,
2. The magnetic head polishing apparatus according to claim 1, wherein the finish polishing section, the cleaning section, and the magnetic head electrical characteristic measuring section are formed in a concentric shape. 5. The magnetic head polishing apparatus according to claim 1, wherein the first, second and third tables are respectively moved in parallel, and the magnetic head is shaken by the first and second rotation drive means. A method of polishing a magnetic head, which is brought into sliding contact with a polishing disk that rotates while moving to polish the air bearing surface of the magnetic head into a predetermined curved surface shape. 6. The method of polishing a magnetic head according to claim 5, wherein the predetermined curved surface shape is set to have a different curvature depending on the position of the air bearing surface. 7. A magnetic head polishing apparatus according to claim 4, wherein the magnetic head is polished, the magnetic head is cleaned,
And a method of polishing a magnetic head, characterized in that the electrical characteristics of the magnetic head are measured in one step.