JP2808208B2 - Manufacturing method of magnetic head - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

2. Description of the Related Art A magnetic head for a magnetic disk device used as an external storage device in an information processing system is supported by a thin leaf spring called a gimbal so that the magnetic disk floats by an air current when rotating at high speed. It has become. The present invention relates to a method of manufacturing a flying magnetic head for recording / reproducing information by causing a slider to fly by an air current generated by the rotation of a magnetic recording medium.

[0002]

2. Description of the Related Art FIG. 7 is a side view showing a state in which information is recorded / reproduced by a floating magnetic head. D
Is a magnetic disk, it is assumed that the high-speed rotation in the arrow a ₁ direction. The magnetic head H has a structure in which a core 3 around which a coil 2 for electromagnetic conversion is wound is adhered to the rear end of the slider 1 and has an inflow slope 9 at the front end. Slider 1
Attached to the spring arm 5 via the gimbal 4,
A spring arm 5 is mounted on the carriage arm 6.

When the carriage 7 reciprocates, the slider 1 is moved in a direction perpendicular to the plane of the drawing to perform a seek operation. When the magnetic disk D rotates at a high speed, the airflow generated between the slider 1 and the magnetic disk D causes the slider 1 to move by 1 μm.
m with a small gap G of less than m.
Recording / reproduction of information is performed by the reproduction gap 8.

As described above, when the magnetic head H is levitated by the airflow at the time of high-speed rotation of the magnetic disk D and the magnetic disk D is stopped, the magnetic head H is pressed against the magnetic disk surface by the spring force of the spring arm 5. I'm calling Meanwhile C
A lubricant is applied to the SS type magnetic recording medium in order to prevent abrasion when the slider 1 slides.

[0005]

However, the slider tends to be attracted to the slider when the magnetic disk is stopped by the lubricant, and is particularly remarkable when the flying surface of the slider is concave due to processing distortion or the like. If the suction by the lubricant occurs, the slider 1 is separated from the magnetic disk surface against the adhesive force at the time of startup, and the gimbal 4 is deformed or the slider 1 recoils when the slider 1 is separated from the magnetic disk surface. However, there is a possibility that the magnetic head collides with the magnetic disk surface and is damaged.

Also, since one or more magnetic heads are usually provided on each surface of a plurality of magnetic disks,
At the time of startup, a large number of magnetic heads must be simultaneously separated from the magnetic disk surface, and a spindle motor with a large startup torque must be used.

The above problem also occurs in a thin-film magnetic head as shown in FIG. The thin-film magnetic head has a head element section 10 formed by a thin-film technique at a rear end of the slider 1 and an inflow slope 9 formed at a front end of a rail-shaped floating surface 11. The flying surface 11 and the slope 9 for inflow of air are formed by polishing the slider 1.

In order to reduce the adhesive force of the slider as described above, a flattening process is performed with high precision so that the flying surface of the slider of the magnetic head does not have a concave curved surface.
No. 5857, JP-A-56-68961, JP-A-58-1280
As described in JP-A-51-51 and the like, attempts have been made to prevent the slider from attracting to the magnetic disk surface by making the flying surface of the slider a convex curved surface (crown shape).

However, in these thin-film magnetic heads, as shown in FIG. 9, a large number of head element sections 10 are simultaneously formed on a single substrate 12 by a thin-film technique and then cut along a matrix cutting line 13. The rail-shaped floating surface 11 is formed by grinding while the sliders 1 are cut one by one.

[0010] Thereafter, as shown in FIG.
In a state in which a plurality of separated sliders 1 are stuck on the rubber disc 15 stuck to the lap surface plate 4 as shown in FIG.
The weight 14 is rotated on a rotating lap surface plate 16 which is placed on the rotating lap surface 6 so that the floating surface 11 becomes a convex crown due to the flatness or elasticity of the elastic member 15. Work and remove the concave curved surface.

However, since such a jig is attached to each jig one by one, there is a problem that it is not suitable for mass production.

On the other hand, as shown in FIG. 11, in a state in which one row of sliders in FIG. 9 are connected in a block shape, after the floating surface 11 and the inflow slope 9 of each slider are processed, the slider A method has also been proposed in which the floating surface 11 is formed into a flat surface or a convex crown by lapping the blocks 17 as a unit, and finally cut from the position of the groove 18 between the sliders 1 and separated one by one. .

However, when the flying surface of the slider block is processed into a convex crown using a concave surface plate, the lapping amount at both ends becomes excessive because the slider block is processed straight. This makes it difficult to uniformly process the entire slider block.

A technical problem of the present invention is to realize a method capable of uniformly and efficiently processing the flying surface of a floating type magnetic head, paying attention to such a problem.

[0015]

FIG. 1 is a view for explaining the basic principle of a method of manufacturing a magnetic head according to the present invention. According to the first aspect of the present invention, as shown in FIG. 1 (a), a slider floating surface 11 is placed on a processing surface 21 of a lap surface plate 20 for processing a slider floating surface in a circumferential direction. -The floating surface is formed on the crown by reciprocating the block 17 or the separated slider 1 with respect to the processing surface 21 in the radial direction while holding the single flexible member 15 having viscosity.

According to the invention of claim 2, as shown in FIG.
The longitudinal direction of the slider blocks 17 is arranged in the circumferential direction while being held by the single viscous flexible member 15 installed on the weight 14, and the weight 14 is rotated on the rotating processing surface 21 by lapping. Work to form the air bearing surface on the crown.

According to a third aspect of the present invention, when the flying surface 11 of the floating magnetic head is machined, the slider block 17 is not separated into a plurality of sliders as shown in FIG. The back surface is attached to a flexible sheet 19, and the sliders 1.1 are cut and separated. In this way,
With the separated sliders 1 attached to the sheet 19, the plurality of sliders 1 are attached to the flexible member 1 having viscosity.
5 are adhered and held on the surface of the lap plate, and the floating surface is simultaneously processed on the processed surface of the lap platen.
Is removed from the sheet 19.

According to a fourth aspect of the present invention, as shown in FIG. 1 (a) or (b), a slider floating surface 11 is circumferentially mounted on a processing surface 21 of a lap surface plate 20 for processing a slider floating surface. To the rotating processing surface 21, or reciprocate in the radial direction with respect to the rotating processing surface 21 or rotate the processing surface 21.
Then, the flying surface is placed on the slider, and the slider is rotated in the longitudinal direction to form the flying surface in a crown.

At this time, the slider block 17 before being separated into a plurality of sliders is cut between the sliders while the back surface of the slider block 17 is adhered to a single thin sheet 19. The slider block 17 is adhered and held on a single flexible member 15 having viscosity while being attached to the sheet 19, and is processed into a crown on the processing surface 21 of the lapping plate 20. .

[0020]

According to the present invention, the processing surface 2 of the lapping platen 20 is provided.
The slider block 17 or the separated slider 1 which has the slider flying surface 11 placed on the slider 1 and adhered to a single viscous flexible member 15 is reciprocated in the radial direction with respect to the processing surface 21. In order to process the flying surface, the processing pressure is made uniform at each point on the processing surface 21, and the flying surface of the slider surely becomes a convex crown. Further, in the adhesive holding by the single flexible member 15 having viscosity, the holding force is weak,
Not only is it easy to attach and detach, and dirt hardly remains, but also distortion does not occur in the slider 1, and a precise finished shape after processing can be obtained.

Crown amount C obtained in the case of a conical surface plate
Is geometrically derived by the following equation assuming that the curvature of the surface of the surface plate is transferred. The actual crown amount is a value obtained by adding the crown amount of 5 to 10 nm obtained on the flat surface plate to C in this equation.

[0022]

(Equation 1)

Here, as shown in FIG. 2A, α is the gradient of the processing surface 21 of the surface plate, r is the distance from the center of the surface plate, and L is the work length (the length of the floating rail surface).

The air bearing surface may be processed in a single slider state. However, if crown processing is performed on the slider block 17 before separation into a plurality of sliders, a plurality of sliders can be processed at one time. Suitable for mass production.

Also, the method of rotating the slider block 17 on the processing surface 21 of the lapping plate 20 as described in the item 2 allows a plurality of sliders to be processed into a crown at a time, which is suitable for mass production. Further, since the slider block 17 is softly held by a single flexible member having viscosity, the slider block 17 easily bends and the processing surface 2
Even if the block escapes from 1 and moves on the processing surface 21, the block is processed uniformly without applying excessive force to both ends.

Similarly, the crown amount formed when the work is rotated on the conical surface platen is the sum of the value shown in the equation (1) and the crown amount of 5 to 10 nm obtained by the plane platen. Become.

According to a third aspect of the present invention, the back surface of the integrated slider block 17 is attached to a flexible sheet 19 before being separated into a plurality of sliders. The sliders 1... Are connected via a sheet 19 in order to cut and separate the spaces 1.

As described above, in a state where each slider 1 is attached to the flexible sheet 19, a plurality of sliders 1.
Is adhered to the viscous flexible member 15 and the floating surface is simultaneously processed on the processing surface of the lap surface plate. Therefore, a load is uniformly applied to each slider 1 to uniformly process the floating surface. it can.

Since the sliders have been cut in advance, the sliders 1...
It is only necessary to remove the slider from the slider 9 and, unlike the method of cutting between the sliders after the air bearing surface is processed, there is no occurrence of processing distortion due to the cutting of the slider with the processed air bearing surface.

Further, while the back surface of the slider block 17 before being separated into a plurality of sliders is adhered to a single thin sheet 19, the space between the sliders 1 is cut off. When it is separated and attached to the sheet 19 and processed on the processing surface 21 of the lap surface plate 20, the entire slider block easily bends in its longitudinal direction, and a load is uniformly applied to all the sliders. Therefore, both the slider on the center side and the sliders on both ends can be crowned uniformly. Further, the sliders 1 attached to the sheet 19 are adhered and held on a single viscous flexible member 15, and the sliders 1 are rotated to perform lapping processing, whereby each point of the processing surface 21 is The processing pressure in the process can be made more uniform, and a precise finished shape after processing can be obtained.

[0031]

EXAMPLES Next, practical examples of how the magnetic head manufacturing method according to the present invention is embodied will be described with reference to examples. FIG. 3 is a perspective view and a longitudinal sectional view showing a state in which the flying surface 11 of the slider is crowned. Reference numeral 20 denotes a lap surface plate for crown processing, and the processing surface 21 is a conical concave curved surface.

When the slider 1 is placed on the conical concave surface 21 so that the flying surface of the slider 1 faces in the circumferential direction, and is reciprocated in the radial direction with respect to the rotating conical concave surface 21, the conical shape is obtained. A convex crown equivalent to the curvature of the concave curved surface 21 is formed.

In this case, there is a slight gap between the outer peripheral side and the inner peripheral side.
A conical surface with a dimensional difference h of (about 0.2 mm) is sufficient.
The angle of inclination of the cone is very small, about 1/1000.

The slider is configured to move in the radial direction on the conical concave curved surface 21. Reference numeral 26 denotes a jig for holding the slider, to which a rubber disk 27 is attached as shown in FIG. The slider separated as described above, a plurality of sliders separated on the sheet 19 as shown in FIG. 2, or a slider block 17 as shown in FIG. In the example shown,
A plurality of slider blocks 17 are attached in a fixed orientation.

As shown in FIG. 3B, the holding jig 2 is mounted on the lower surface of the tip of a swing arm 29 attached to a vertical drive shaft 28 outside the crown working platen 20.
6 is turned upside down.
Was used to swing back and forth.

The reciprocating swing of the arm 29 causes the holding jig 2
6 moves circularly on the conical concave curved surface 21 in the radial direction. However, since the arm 29 is sufficiently long, the circular motion approximates a linear motion, and a crown shape having no practical problem can be obtained.

In the case of the prototype device, the length of the arm 29 is set to 70
0 mm, the outer diameter of the crown processing platen 20 was 400 mm, the inner diameter was 80 mm, and the concave amount h between the outer peripheral side and the inner peripheral side shown in FIG. 3B was 200 mm. As shown in FIG. Board 2
7, four slider blocks 17 having a flying surface length L of 3 mm were attached to the holding jig 26, and crown processing was performed at a position of r = 100 mm.

As a result, due to the reciprocation in the radial direction, 15
A crown amount of ２０20 nm was obtained. In addition, rubber disc 27
Is flexible, errors in slider thickness of about 1 μm were absorbed, and each slider block could be processed uniformly.

At the time of crown machining, the slider is mounted on a jig and reciprocated in the radial direction of the conical concave curved surface 21 via the jig. At this time, as shown in FIG. One or more sliders 1 may be attached to a jig, or one or more slider blocks 17 shown in FIG. 11 may be attached.

FIG. 4 shows a second embodiment of the present invention. This is a lapping method in which the slider block is rotated on the conical concave curved surface 21 to crown the flying surface. Also in this case, the flexible member 15 for holding the workpiece flexibly was used.

Since the slider block has an elongated shape, it tends to bend in the longitudinal direction, and when the slider block comes into contact with the curved surface plate, the work tends to escape from the surface of the surface plate.
It is difficult to transfer in the longitudinal direction of the workpiece.

On the other hand, since the slider block is unlikely to bend in its short direction, the curvature of the surface plate is easily transferred in this direction. Due to these features, a crown shape can be generated on the air bearing surface.

Using these features, the crown could be formed by a simple method of rotating the block on the surface of the conical platen. The method of rotating the workpiece has the advantage that the processing jig is simple and the cost can be reduced. The processing surface 21 of the lap surface plate in this case was a conical surface having a height difference between the inner and outer circumferences of about 0.2 mm, as in the case of FIG.

In each of the above embodiments, the conical concave curved surface 2
In No. 1, since the curvature is different between the inner peripheral side and the outer peripheral side, the crown shape of each slider is strictly different, but there is no practical problem. In particular, when the work is to be moved linearly, the holding jig 2 shown in FIG.
If the crown is turned again by 180 degrees, the uniformity of the amount of crown processing between the outer slider and the inner slider can be improved.

The reason why the concave curved surface is a conical surface is that its manufacture is easy. The conical surface has a feature that the curvature of the surface can be easily adjusted only by changing the gradient of the bite movement for creating the surface. When a spherical surface or a parabolic surface is used, the curvature is transferred to the air bearing surface, so that a crown can be formed. However, it is difficult to form a surface plate and the cost is high.

FIG. 5 is a perspective view showing an embodiment of the third aspect of the present invention in the order of steps. (1) is a slider block 17 before being divided into a plurality of sliders, in which a plurality of sliders 1 are integrated. Between each slider 1 ...
A groove 18 is formed on the floating surface 11 side, and the rail-shaped floating surface 11 and the inflow slope 9 are formed by grinding or polishing in this state.

On the back of the slider block 17,
A sheet 19 made of resin, metal, or the like is attached as shown in (2). In the state of being attached to the sheet 19 in this manner, the position of the groove 18 is cut, and the sliders 1 are separated as shown in (3). This separation is performed by relatively moving the slider block 17 in the direction of the groove 18 with respect to the rotating grindstone. At this time, by processing the rotating grindstone into the sheet 19 to form a shallow groove 22, adjacent sliders can be reliably separated.

As the sheet 19, a polyimide resin film having a thickness of 0.3 mm is used.
Is bonded with wax having a softening point of about 50 ° C.
By performing cutting so that the depth of each slider is about several μm to several tens μm, each slider 1... Can be surely separated.

As described above, since the slider block 17 is attached to the sheet 19 in a state, the attaching operation is easy, and the sliders are separated for each slider 1. When machining the air bearing surface,
Each slider can be processed uniformly. Further, as shown in FIG. 4D, when the sheet 19 to which the plurality of separated sliders 1 are attached is held by tweezers or the like,
Since the sheet 19 is flexible, each slider 1... Behaves independently as if it were completely separated.

FIG. 6 shows an example in which the flying surfaces of a plurality of sliders attached to the sheet 19 are processed flat. First, as shown in FIG. 1A, the back surface of the sheet 19 of FIG. 2 is attached to the elastic member 15 attached to the disc-shaped weight 14. At this time, a large amount of processing can be performed by simultaneously attaching a plurality of sheets 19 as shown in the figure. As the elastic member 15, a rubber plate was inherently viscous and was effective. Of course, other elastic members that have been subjected to adhesive treatment are also effective.

The weight 14 is turned upside down and, as shown in FIG. 2 (2), is placed on a rotating lap surface plate 16 and is rotated by itself. Become

During the lapping process, the sliders 1 are connected by a flexible sheet 19 and are attached to the weight 14 via an elastic member 15 having high elasticity. The load of the weight 14 acts independently of the sliders 1, so that each slider can be lapped in a substantially independent state. Therefore, each surface of the slider can be lapped uniformly, and processing variations between the sliders can be eliminated.

[0053]

As described above, according to the first aspect, the flying surface 11 of the slider is placed on the processing surface 21 of the lap surface plate 20, and is adhered to and held by the single viscous flexible member 15. Slider block 17 or slider 1 after separation
Is reciprocated in the radial direction with respect to the processing surface 21 to process the flying surface, so that the processing pressure is made uniform at each point of the processing surface 21, and the floating surface of the slider is reliably a convex crown. Therefore, it is not necessary to precisely control the shape of the surface plate, and it is possible to control the crown amount of the slider by rough surface plate size management, and to use the surface plate for a long time.
Further, in the adhesive holding by the single flexible member 15 having viscosity, no sticking jig is required, and since the holding force is weak, the attaching / detaching is easy, the dirt is hardly left, and the slider 1 is distorted. Without this, a precise finished shape after processing can be obtained. For this reason, the variation in the shape of the product is small, the yield is high, and the inspection of the shape can be completed by a very small number of sampling inspections.

According to the second aspect, the slider block 17 is softly held by a single flexible member having viscosity, and is processed while being rotated on the processing surface 21 of the lap surface plate 20. A plurality of sliders can be machined into a crown shape, and even if the slider block 17 easily deflects and escapes from the machining surface 21 and the block moves on the machining surface 21, excessive force is applied to both ends thereof. Can be prevented, and the block can be processed uniformly.

At this time, when the back surface of the slider block 17 is adhered to the flexible sheet 19, the sliders are cut and separated, and then the crown processing is performed on the concave curved surface 21. Since a load is uniformly applied to each slider, all the sliders can be crowned uniformly.

According to the third aspect of the present invention, each slider 1 has a rear surface attached to a thin flexible sheet 19 before being separated into a plurality of sliders.
.. Are cut and separated from each other, and a plurality of sliders 1... Are adhered and held on a viscous flexible member 15 in a state where the sliders 1 are attached to a sheet 19. Since the sliders 1 are detached from the sheet 19 after the air bearing surface processing is completed, the sliders can be uniformly processed on the air bearing surface, and unlike the method of cutting between the sliders after the air bearing surface processing, It is possible to prevent processing distortion from occurring in the slider on which the air bearing surface has been processed.

According to the fourth aspect, each slider 1... With the back surface of the slider block 17 before being separated into a plurality of sliders adhered to a single thin sheet 19.
A state in which the slider 1 is mounted on the processing surface 21 of the lapping plate 20 with the floating surface thereof facing the circumferential direction on the processing surface 21 of the lapping plate 20 in a state where the gap is cut and separated, and the sheet 19 is attached to the sheet 19. On which the sliders 1...
In contrast, each slider 1... Is reciprocated in the radial direction of the lap surface plate 20, and the processing surface 21 is rotated so that the sliders 1. Since the slider 1 is rotated and wrapped by rotating the slider 1,
The entire slider block easily bends in its longitudinal direction, a uniform load is applied to all the sliders, the center slider and the sliders at both ends can be uniformly crowned, The processing pressure can be made more uniform, and a precise finished shape after processing can be obtained.

[Brief description of the drawings]

FIG. 1 is a diagram illustrating a basic principle of a method for manufacturing a magnetic head according to the present invention.

FIG. 2 is a diagram illustrating the principle of crown processing according to the present invention.

FIG. 3 is a perspective view and a side view showing an embodiment of the first invention.

FIG. 4 is a perspective view showing an embodiment of claim 2;

FIG. 5 is a perspective view showing an embodiment according to the third aspect of the present invention.

FIG. 6 is a perspective view showing an embodiment of the fourth invention.

FIG. 7 is a side view of a magnetic disk drive provided with a floating magnetic head.

FIG. 8 is a perspective view showing a thin-film magnetic head.

FIG. 9 is a perspective view showing a conventional method for manufacturing a thin-film magnetic head.

FIG. 10 is a perspective view showing a conventional slider flying surface processing (flattening) method.

FIG. 11 is a perspective view showing a state of a slider block.

[Explanation of symbols]

 Reference Signs List 1 slider 8 recording / reproducing gap 9 inflow slope 10 head element section 11 rail-shaped floating surface e edge of rail-shaped floating surface 12 substrate 13 cutting line 14 weight 15 flexible member 16 lap plate 17 slider block 18 groove 19 flexible Pliable sheet 20 Wrap surface plate for crown processing 21 Conical concave curved surface (working surface) 22 Groove on sheet 23 Jig 26 Holding jig 27 Rubber disc 28 Drive shaft 29 Swing arm M Motor

──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Kikuo Yashiro 1015 Uedanaka, Nakahara-ku, Kawasaki City, Kanagawa Prefecture Inside Fujitsu Limited (72) Inventor Yasuo Okamoto 1015 Kamikodanaka, Nakahara-ku, Kawasaki City, Kanagawa Prefecture Fujitsu Limited (56) reference Patent flat 1-135467 (JP, a) JP flat 1-107309 (JP, a) JitsuHiraku Akira 62-61019 (JP, U) (58 ) investigated the field (Int.Cl. ⁶ G11B 5/60 G11B 21/21 101

Claims (4)

(57) [Claims] 1. A method for processing a floating surface of a floating magnetic head , comprising: a slider (1) provided on a processing surface (21) of a lap surface plate (20);
The slider block (17) or the separated slider (1), which is placed with its air bearing surface facing in the circumferential direction and is adhered and held to a single viscous flexible member (15), (21) A method for manufacturing a magnetic head, wherein the lapping process is performed by reciprocating in the radial direction. Wherein the slider block (17) and held by the adhesive on a single flexible member (15) having a viscosity, rat
A weight (14), which is a holder for the slider block (17), is rotated on the processing surface (21 ) of the platen (20) ,
A method of manufacturing a magnetic head, wherein a lapping plate (20) is simultaneously rotated to perform lapping. 3. After attaching the back surface to a single flexible sheet (19) in a state of the slider block (17) before being separated into a plurality of sliders, a gap between the sliders (1...) Is obtained. A plurality of sliders (1...) Are adhered and held on a single viscous flexible member (15) in a state of being cut and separated and attached to a sheet (19). Floating surface lapping is performed all at once on the surface, and after the processing is completed, each slider (1.
9) A method for manufacturing a magnetic head, comprising: 4. After attaching the back surface to a single flexible sheet (19) in the state of the slider block (17) before being separated into a plurality of sliders, the slider block (17) The sheet (1) is cut on a processing surface (21 ) of a lap plate (20) with the floating surface of the slider (1) facing in the circumferential direction.
The sliders (1...) Adhered to 9) are placed, and each slider (1) is placed on the rotating processing surface (21).
…) Is reciprocated in the radial direction of the lap platen (20), and the processing surface (21) is rotated to make the slider (1...) Adhered to the sheet (19) viscous. A method for manufacturing a magnetic head, comprising: holding a single flexible member (15) by sticking; and rotating the slider (1) to perform lapping.