JP3114216B2 - Manufacturing method of floating magnetic head - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a floating magnetic head used in a magnetic recording apparatus.

[0002]

2. Description of the Related Art A floating magnetic head using a conventional photolithography technique is shown in FIG. The core 1 serving as a slider portion and the core 2 serving as a winding portion use ferromagnetic ferrite, respectively. The core 1 serving as a slider portion and the core 2 serving as a winding portion are bonded via a gap 5.
The slider pattern 6 is formed by etching, and the difference between the slider ski surface and the etched surface is several μm. The difference controls the flying height of the flying magnetic head.

[0003] The manufacturing method will be described below with reference to FIG. Both the core 1 serving as the slider and the core 2 serving as the winding portion use ferromagnetic ferrite. Before laminating to either the core 1 serving as a slider or the core 2 serving as a winding part, a necessary shape processing is performed, and then bonding is performed with a reinforcing glass via a gap material, and a magnetic core as shown in FIG. Create The gap 3 is made of SiO ₂ , Al ₂ O ₃ or the like by a thin film forming method such as a sputtering method.

After that, the back surface and the front surface are mirror-finished to control the depth of the magnetic core. That is, FIG.
In the state of the magnetic core as shown in FIG. 3B, the upper surface shown in FIG. 3B is wrapped to regulate the depth. And
A slider shape and track width regulation processing is performed on the magnetic core after the depth regulation processing by ion etching using photolithography technology, and FIG.
The slider pattern 6 shown in FIG. Thereafter, as shown in FIG. 3D, the magnetic core is cut into a single magnetic head, and finally, as shown in FIG. Becomes

The floating magnetic head using the photolithography technology can form the track width regulation more accurately than the mechanical processing, and also enables the track to be narrowed, thereby realizing high-density recording.

[0006]

A floating magnetic head using the conventional photolithography technique cuts the magnetic head in a single state after restricting a slider pattern and a track width in a state of a magnetic core. In FIG. 4A, reference numeral 10 denotes a cutting line. In this cutting step, a portion of the slider surface close to the cut surface is deformed. FIG. 4 (b) is the same as FIG.
3 shows a cross section of the magnetic head after cutting along the line AA. After cutting, as shown in this figure, 50
Å About 8 jumps occur. FIG. 4C shows a cross section taken along the line BB of FIG. 4A. The cross section taken along the line BB is a portion close to the gap 5.
Is large and some are more than 100 mm. Further, when the gap is cut, the rails on the left and right sides of the slider are connected as shown in FIG.
5B, a twist occurs like the slider surface 12 shown in FIG. 5B after cutting from the state of the slider surface 11 before cutting. This twisting phenomenon is affected by a plurality of conditions at the time of gap formation, and various measures have been tried, but it has been technically extremely difficult to eliminate them.

That is, in the conventional manufacturing method, since the depth control is performed before cutting the magnetic head alone, the front surface cannot be processed thereafter. For this reason, when the notch for cutting and winding is processed, deformation of the slider surface due to splashing or twisting remains until the end.

As a result, in the conventional manufacturing method, a certain portion of the recording / reproducing gap 5 remains deformed. Therefore, when flying, the flying height of the gap portion differs due to the torsion of the left and right slider patterns, causing variations in characteristics. Further, in terms of reliability, since the slider surface 12 is deformed, in a low flying state, there is a problem that a crash is likely to occur and reliability is reduced.

The present invention solves these conventional problems and improves the flatness of the slider surface of a flying magnetic head using photolithography technology, and has high reliability without causing flash even at a low flying height. An object of the present invention is to provide a method for stably manufacturing a flying magnetic head.

[0010]

According to the present invention, there is provided a method for manufacturing a magnetic head for obtaining a plurality of magnetic heads from a magnetic core. In the cut portions on both sides of the cut portion forming the line portion, grooves extending from the core serving as the winding portion to the core serving as the slider beyond the gap are formed in advance before depth control.

[0011]

In the above means, a groove is machined in the gap portion before the depth machining in the state of the magnetic core. At this time, the surface of the magnetic core undergoes the same bounce as shown in FIGS. 4B and 4C and the same torsion as shown in FIG. 5B. However, after that, the surface is flattened by depth processing, and in this state, slider processing is performed, and cutting into a single magnetic head and cutting processing for winding are performed. In this step, since a groove is provided in advance in the gap portion that causes deformation of the slider surface, even if it is cut into a single magnetic head, it is also cut to form a cut portion for winding. However, almost no surface deformation occurs. That is, by adopting the manufacturing method as described above, the flatness in the state of the magnetic core can be maintained as it is even when the magnetic head is used alone.

[0012]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described with reference to FIG.
The steps up to the step of forming the gap 5 are exactly the same as those in the conventional manufacturing method, but before the depth regulation, that is, between the steps of FIGS. 3A and 3B of the conventional manufacturing method, FIG. Is performed. In the grooving step, in the state of the magnetic core shown in FIG. The grooves 3 and 4 are machined to a region where the tempered glass part of the bonding material is completely cut. At this point,
The vicinity of the gap 5 is greatly deformed by machining the grooves 3 and 4, and the bumps 8, 9 and twist shown in FIGS. 4B and 4C and FIG. 5B are generated. However, after that, mirror surface processing by wrapping the back surface and front surface and processing to a predetermined depth,
Deformation near the gap due to the processing of the grooves 3 and 4 is removed.

Thereafter, a slider forming process is performed. Photolithography technology is used in the slider forming process. That is, a resist of a photosensitive agent is applied to the magnetic core for which the depth regulation has been completed by a thin film coating method such as spin coating in the same manner as in the conventional manufacturing method. Then, a slider shape is formed of a resist, a slider pattern 6 is formed by an etching method such as ion milling, and then the magnetic head is cut into a single piece. As shown in FIG. 1B, the cutting method uses a grindstone having a smaller grindstone width than the width c of the cutting groove provided in advance, and cuts without touching the cutting groove. The machining of the notch 7 for winding is shown in FIG.
As shown in FIG. 1C, a grindstone having a width smaller than the width d is used.
This is performed by removing the hatched portions shown in FIG.

As described above, the flatness of the final slider surface is excellent even in the case of a floating magnetic head in which the front surface cannot be machined once the slider machining has been performed, since the flat state after the front lap machining is maintained. Flatness can be realized.

[0015]

As is apparent from the above description, according to the method of the present invention, the flatness of the magnetic core after the final depth processing is performed can be maintained even when the magnetic head is used alone. Therefore, the flatness of the slider surface of the narrow track magnetic head using the photolithography technology can be remarkably improved. Therefore, the flying magnetic head using the photolithography technology can satisfy both the narrow track, which is a condition for realizing high-density recording, and the low flying height by improving the flatness in the above invention, High reliability can be achieved.

Further, it is possible to reduce the variation in the flying height of each head, and to manufacture a magnetic head having stable characteristics and excellent mass productivity.

[Brief description of the drawings]

FIG. 1A is a perspective view of a magnetic core that has been subjected to groove processing before performing depth processing in an embodiment of a method of manufacturing a floating magnetic head according to the present invention; FIG. 1B is a magnetic core that has been subjected to groove processing; Fig. 4C is a plan view showing a process of forming a notch for winding after cutting a magnetic core as a single piece magnetic head.

FIG. 2 is a perspective view of a floating magnetic head using photolithography technology.

FIG. 3 is a process diagram of a conventional method of manufacturing a floating magnetic head.

FIG. 4A is a perspective view showing a cut portion in a conventional manufacturing method. FIG. 4B is a cross-sectional view showing occurrence of a slider jump after cutting in the conventional manufacturing method. FIG. Sectional view showing the occurrence of a jump in another part of the rear slider

FIG. 5A is a perspective view showing a state of a slider surface before cutting in a conventional manufacturing method. FIG. 5B is a perspective view showing a state of a slider surface after cutting in a conventional manufacturing method.

[Explanation of symbols]

 1 Core to be slider part 2 Core to be winding part 3, 4 Groove 5 Gap 7 Notch

Claims (2)

(57) [Claims] 1. A cutting the floating-type magnetic core and the core of the slider to become the core and the winding portion of the magnetic head is bonded via a recording gap obtain a plurality of magnetic heads having a predetermined shape floating magnetic head Cutting the magnetic core into the plurality of magnetic heads alone
On the line to be cut, and of the cut portion forming the winding portion
On the cut lines on both sides, the recording / reproducing gap
A method of manufacturing a floating magnetic head in which a groove is formed in advance to a predetermined position, and then depth processing, floating surface processing, and track width regulation are performed. 2. The method of manufacturing a floating magnetic head according to claim 1, wherein a photolithography technique is used for processing the air floating surface of the floating magnetic head.