JP3102147B2 - Method of manufacturing inkjet head - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing an ink jet head used in an ink jet recording apparatus.
2. Description of the Related Art An inkjet recording apparatus is an apparatus that performs recording by directly ejecting ink fine particles to a recording medium from a head that is not in contact with the recording medium. The ink jet recording type apparatus is characterized in that color printing can be easily realized as compared with other types of recording apparatuses, and high-resolution, high-quality printing can be obtained with low noise.

[0002]

2. Description of the Related Art An ink jet head used in a drop-on-demand type ink jet recording apparatus for selectively ejecting ink in a pressure chamber by displacement of a pressure generating means such as a piezoelectric element to perform recording on a recording medium is known. In recent years, miniaturization has progressed, and elaborate ones have been proposed.

One of the factors is the use of photosensitive glass that can be finely processed as a material for an ink jet head. However, rather than photosensitive glass,
Recently, photosensitivity has been increased due to (1) low material cost, (2) high-precision processing, and (3) low complexity of the manufacturing process and low processing cost. Photocurable resins have been used in place of glass.

FIG. 11 shows a conventional procedure for manufacturing an ink jet head using a photocurable resin. 11, 10 is a nozzle, 20 is a pressure chamber, 30 is a diaphragm,
40 is a pressure generating means (piezoelectric element), 41 is an electrode, 50 is a head substrate made of a photo-curing resin, 51 is a liquid photo-curing resin, 100 is a mask plate, and 110 is a light shielding for forming the nozzle unit 10. Reference numeral 150 denotes a mold for filling the liquid photocurable resin 51, reference numeral 155 denotes a convex portion for forming the pressure chamber 20 and the like, and reference numeral 160 denotes ultraviolet light to be applied to the liquid photocurable resin 51.

FIGS. 11A to 11E respectively correspond to manufacturing procedures (a) to (e) described below. (A) The mold 150 is filled with the liquid photocurable resin 51. (B) At the position where the nozzle 10 is to be formed, a mask plate 100 having a light-shielding portion 110 having the same diameter as the nozzle 10 is set.

The mask plate 100 is made of a material that transmits light, such as a glass plate. In addition, the light shielding unit 11
0 is formed by chromium evaporation or the like. (C) When the parallel light of the ultraviolet light 160 is irradiated from above the mask plate 100, the portion 50 that has received the ultraviolet light 160 is cured, and the nozzle unit 10 that has not received the ultraviolet light 160 by the light shielding unit 110 is not cured.

(D) The resin cured in the step (c) is
When the resin is removed from the nozzle 50 and washed with a solvent such as acetone, the uncured resin of the nozzle portion 10 is washed away, and a head substrate 50 having the nozzle 10 is completed. (E) The vibration plate 30 is adhered to the completed head substrate 50, the electrode 41 is formed on the vibration plate 30 with a silver paste or the like, and then the piezoelectric element 40 is adhered. Is completed.

[0008]

In the above-described conventional method of manufacturing an ink jet head, in order to strengthen the adhesive strength of the diaphragm 30 and enhance the pressing effect, it is necessary to apply the adhesive thinly and uniformly. It is. However, in the head substrate 50 completed in the above (d), the side 50a to which the vibration plate 30 is bonded is not a flat surface having a certain spread, and a depression such as the pressure chamber 20 and the ink supply path 25 is formed on almost one surface. It is a fine and complicated surface with many irregularities. The operation of applying the adhesive thinly and uniformly on such a complicated surface is very difficult, and includes the following problems that affect the quality of printing. (1) Since the application of the adhesive is inevitably caused, the adhesive between the vibrating plate 30 and the head substrate 50 is accompanied by the unevenness of the adhesive strength. (2) The applied adhesive easily protrudes from the edge of the pressure chamber 20 or the ink supply path 25, and the protruding adhesive deforms the fine shape of the pressure chamber 20 or the like, which adversely affects the ink ejection conditions. Effect.

Therefore, in the above method, the pressure conditions applied to the pressure chambers 20 by the vibration plate 30 vary for each pressure chamber 20. As a result, the ejection conditions of the ink from the nozzles 10 are affected, and the print quality is degraded. The present invention has been made to solve the above-mentioned problem, and the vibration plate 30 is attached to the inkjet head substrate 50 by a simple operation.
A method for manufacturing an ink jet head which can adhere with high adhesion strength without unevenness of adhesion, and can obtain high printing quality under stable ink jetting conditions without deforming the shape of the pressure chamber 20 or the like. To provide.

[0010]

That is, a method of manufacturing an ink jet head according to the present invention has the following features. (1) Features of Claim 1 A projection 155 for forming the ink supply passage 25 and the pressure chamber 20 is formed on the vibration plate 30, and a spacer 170 is provided around the vibration plate 30.

After the vibrating plate 30 surrounded by the spacers 170 is filled with a photocurable resin 55 mixed with an ultraviolet curable adhesive, the light is first irradiated lightly to bring the resin 55 into a semi-cured state. Then, the photocurable resin 51 is filled. next,
The mask plate 100 for forming the nozzle 10 is set between the photocurable resin 51 and the light source, and the mask plate 100
The light source 160 irradiates light 160 to cure the resins 51 and 55 together to form the head substrate 50. (2) The feature of claim 2 The feature of claim 1, wherein the vibrating plate 30 surrounded by the spacer 170 is filled with a photocurable resin 55 mixed with an ultraviolet curable adhesive. The photocurable resin 51a having a low viscosity is filled.

Next, the mask plate 100 for forming the nozzle 10 is set between the photocurable resin 51a and the light source, and light 160 is irradiated from the light source through the mask plate 100 to form the resin 51a. And 55 are cured to form the head substrate 50. (3) The method of forming the convex portion 155 for forming the ink supply path 25 and the pressure chamber 20 on the vibration plate 30 according to the third embodiment.
A positive resist 155a is applied on the top of the positive resist 155, and the positive resist 155a is passed through the mask plate 105 on which the ink supply path 25 and the light shielding portion 115 of the pattern of the pressure chamber 20 are formed.
After irradiating light to a, the portion irradiated with light is washed away by alkali washing to form the convex portion 155. (4) The feature of claim 4 A positive resist is used as a material of the spacer 170 disposed around the diaphragm 30.

[0013]

According to the manufacturing method of the present invention, the photocurable resin 55 mixed with an ultraviolet curable adhesive is first placed on the diaphragm 30.
Is filled, and then the photo-curing resin 51 is filled.
By irradiating 60 and curing the resin 55, the diaphragm 30 and the head substrate are bonded.

Therefore, it is not necessary to perform a difficult work of applying the adhesive thinly and uniformly on the complicated surface of the head substrate as in the prior art, and furthermore, the diaphragm 30 and the head are provided with a high and uniform adhesive strength. The substrate and the substrate can be bonded to each other, and as a result, an ink jet head having good print quality can be obtained. The invention according to claim 1 relates to a manufacturing method in which the viscosity of the photocurable resin 55 mixed with the ultraviolet curable adhesive to be filled first is not higher than the viscosity of the photocurable resin 51 to be filled later. It is.

In this case, since the resin 51 to be filled later is mixed with the resin 55 to be charged earlier, the concentration of the ultraviolet curable adhesive in the filled resin is reduced.
The adhesive strength between the diaphragm 30 and the resin is reduced. Therefore, the photo-curing resin 55 mixed with the ultraviolet-curing adhesive previously filled is used.
First, the resin 55 is slightly irradiated with light to slightly increase the viscosity of the resin 55, and at least the resin 51 is filled even if the resin 51 is filled.
But do not mix with the resin 55.

Thereafter, the resin 51 is filled and irradiated with sufficient light to cure the resins 51 and 55 together, thereby forming the head substrate 50. The amount of the resin 55 to be filled first may be a necessary and sufficient amount for bonding the vibration plate 30. At this time, if the resin 55 is filled until the convex portion 155 formed on the vibration plate 30 is buried, the nozzle 10 on the convex portion 155 can be lightly irradiated with light.
Are also semi-cured, and after the head is completed, the nozzle 10
Is deformed, which adversely affects the ink ejection conditions.
For this reason, it is necessary to fill the resin 55 so that at least the portion where the nozzle 10 is formed is not buried on the convex portion 155 formed on the diaphragm 30.

The invention according to claim 2 relates to a manufacturing method in the case where the viscosity of the photocurable resin 55 to be charged first and mixed with the ultraviolet-curable adhesive is higher than the viscosity of the photocurable resin 51 to be charged later. belongs to. In this case, since the resin 51 to be charged later does not mix with the resin 55 charged earlier, after the resin 55 is charged, the resin 51 is subsequently charged, and one light irradiation is performed. The resin 5
By curing both 1 and 55, the formation of the head substrate 50 can be completed.

The amount of the resin 55 to be filled first may be a necessary and sufficient amount for bonding the diaphragm 30. According to the third aspect of the present invention, if the convex portion 155 is formed by using the positive resist 155a soluble in an aqueous alkaline solution, after the head substrate 50 is formed, unnecessary resist is washed away by washing with an aqueous alkaline solution. , Pressure chamber 20
And the ink supply path 25 can be formed.

Further, the convex portions 15 formed by the present method are provided.
5 can be formed with higher precision than a mold formed on a metal plate by etching or half-etching. Claim 4
According to the invention described in the above, if a positive resist is used as a material of the spacer 170 provided around the diaphragm 30, the spacer 17 can be cleaned by an alkaline aqueous solution.
0 and the formation of the projection 155 can be performed simultaneously,
This is where man-hours can be reduced.

Therefore, according to the method of claim 4,
After forming the head substrate 50, a step of removing the head substrate 50 from the spacer 170 can be omitted. Needless to say, a step of applying a release agent to the spacer 170 is unnecessary.

[0021]

FIG. 7 shows the shape of an ink jet head manufactured by the method for manufacturing an ink jet head according to the present invention. As shown in the cross-sectional view taken along the line CC of FIG. 7, the inkjet head has the most practical size with a nozzle length of 150 μm and a pressure chamber depth of 80 μm.

In FIG. 7, 10 is a nozzle, 20 is a pressure chamber, 25 is an ink supply path, 30 is a vibrating plate, 40 is a piezoelectric element, 41 is an electrode, 46 is an ink supply port, and 50 is a photo-curable resin. Is shown. FIG. 8 shows the appearance of a mask plate 100 used when forming the nozzles 10 in the method of manufacturing an ink jet head according to the present invention. FIG. 8A is a top view of the mask plate 100, and FIG. 8B is a side view of FIG. 8A.

The mask plate 100 is made of glass having a thickness of 1 mm, and has the same outer dimensions as those of the mold 170. Reference numeral 110 denotes a light-shielding portion for forming the nozzle 10, which is formed by depositing chromium in a circular shape having a diameter of 40 μm. Further, in the method of manufacturing an ink jet head according to the present invention, the mask plate 105 used when forming the convex portion 155 on the vibration plate 30 by using the positive resist 155a dissolved in the alkaline aqueous solution.
Is shown in FIG. FIG. 9A shows the mask plate 105.
9 (b) is a side view of FIG. 9 (a).

The mask plate 105 is the same as the mask plate 100
Similarly to the above, glass having a thickness of 1 mm was used, and the outer dimensions were formed to be the same as the outer dimensions of the spacer 170. Also,
Reference numeral 115 denotes a light-shielding portion for forming the convex portion 155, which is formed by depositing chromium on the glass plate. In addition to FIGS. 8 and 9, in FIGS. 1 to 3 showing a first embodiment to be described later and FIGS.
Is drawn thicker for convenience, but in practice 0.01 to
The thickness is about 0.05 μm.

Next, an external view of the spacer 170 is shown in FIG. FIG. 10A is a top view of the spacer 170, and FIG. 10B is a cross-sectional view taken along a line DD of FIG. 10A. The inner dimension of the spacer 170 corresponds to the outer dimension of the substrate 50 of the inkjet head manufactured by the manufacturing method according to the present invention. The outer dimensions of the spacer 170 are as follows:
In order to facilitate installation of the spacer 170 on the vibration plate 30 in the process of manufacturing the ink jet head, the outer dimensions of the vibration plate 30 bonded to the substrate 50 of the head were made equal. Further, the thickness of the spacer 170 is 230 μm,
This corresponds to the thickness of the substrate 50 of the inkjet head.

Next, a first embodiment of a method of manufacturing an ink jet head according to the present invention is shown in FIGS. This figure is
FIG. 8 is a schematic diagram in which a part of the cross section AA of the ink jet head of FIG. 7 is enlarged. In this embodiment, the photo-curing resin 55 mixed with an ultraviolet-curing adhesive to be filled first is used.
Is an example of a manufacturing method in the case where the viscosity of is not higher than the viscosity of the photocurable resin 51 to be filled later.

1 to 3, reference numeral 10 denotes a nozzle;
Is a pressure chamber, 30 is a vibration plate, 40 is a piezoelectric element of a pressure generating means (piezoelectric element), 41 is an electrode, 50 is a head substrate made of a photocurable resin, 51 is a liquid photocurable resin, and 51a is
A photocurable resin having a lower viscosity than a resin 55 described later, 55 is a resin obtained by mixing a photocurable resin and an ultraviolet curable adhesive, 100 is a mask plate for forming the nozzle 10, and 105 is a convex portion 155 described later. 110, a light-shielding portion having the same diameter as the nozzle 10, 115 a light-shielding portion having the same shape as the ink supply passage 25 and the pressure chamber 20, and 155 a projection for forming the ink supply passage 25 and the pressure chamber 20. Reference numeral 155a denotes a positive resist applied on the vibration plate 30, 160 denotes ultraviolet rays applied to the photocurable resin 51, 51a, 55, and 170 denotes a spacer provided around the vibration plate 30.

FIGS. 1A to 1E and FIGS. 2F to 2J.
3 (K) to 3 (M) correspond to manufacturing procedures (A) to (M) described below. (A) Application of Positive Resist 155a on Vibration Plate 30 A liquid positive resist 155a is applied on the entire surface of the diaphragm 30. In addition, a glass plate having a thickness of 100 μm was used as the vibration plate 30, and a positive resist 155a (OFPR-800, manufactured by Tokyo Ohka Co., Ltd.)
To a thickness of

(B) Setting of the mask plate 105 A mask plate 105 on which a light shielding portion 115 having the shape of the pressure chamber 20 and the ink supply path 25 is formed by chromium vapor deposition or the like is overlaid on a glass plate coated with the positive resist 155a. (C) Irradiation of ultraviolet rays The mask plate 105 is irradiated with ultraviolet rays (60 mV / cm ² ) from an ultraviolet irradiation device (HB-25103BY, manufactured by Ushio Inc.).

(D) Formation of the convex portion 155 After the irradiation of the ultraviolet rays, the vibrating plate 30 is washed with an alkaline aqueous solution.
On the vibration plate 30, a convex portion 155 forming the pressure chamber 20 and the ink supply path 25 is formed. (E) Installation of Spacer 170 Around the vibrating plate 30 on which the convex portions 155 are formed, a spacer 170 having a thickness of 230 μm using a solid positive type resist is installed.

(F) Filling of Photocurable Resin 55 Mixed with Ultraviolet-Curable Adhesive The vibrating plate 30 surrounded by the spacer 170 is filled with the photocurable resin 55 mixed with the ultraviolet-curable adhesive. However, the resin 55 is provided on the projection 1 formed on the diaphragm 30.
Filling is performed so that at least the portion of the nozzle 55 where the nozzle 10 is formed is not buried.

(G) Irradiation of UV 160 The resin 55 is irradiated with UV 1 by the UV irradiator.
60 is irradiated for 1 second at a light quantity of 60 mW / cm ² . By this step, the viscosity of the resin 55 is slightly increased, and even if the photocurable resin 51 is filled in the next step (H), the resin 5
1 do not mix in the resin 55.

(H) Filling of Photocurable Resin 51 Subsequently, the photocurable resin 51 is filled on the vibrating plate 30 surrounded by the spacer 170. (I) Installation of mask plate 100 Light-shielding portion 1 having a diameter of 40 μm for forming nozzle 10
The mask plate 100 having 10 is placed on the spacer 170.

(J) Irradiation of ultraviolet rays 160 The mask plate 100 is irradiated with ultraviolet rays 160 at a light intensity of 60 mW / cm ^{2 for} 5 seconds by the ultraviolet irradiation apparatus. In this step, the photocurable resin 51 and the photocurable resin 55 mixed with the ultraviolet curable adhesive are cured together.

The distance between the mask plate and the lens of the ultraviolet irradiation device was set to 40 mm. (K) Formation of Nozzle 10 The mask plate 100 is peeled off from the cured resin, and washed with acetone for 40 seconds, whereby the uncured resin 51 is flown to form the nozzle 10.

(L) Formation of Pressure Chamber 20 and Ink Supply Path 25 The entire resin in which the nozzles 10 are formed is irradiated with ultraviolet rays at a light intensity of 60 mV / cm ^{2 for} 20 seconds, and then an alkaline aqueous solution (Tokyo Ohka Kogyo Co., Ltd.) After washing with NMD-3), the resist is dissolved and washed away. In this step, at the same time when the pressure chamber 20 and the ink supply path 25 are formed, the spacer 170 is caused to flow and the substrate 5 of the inkjet head is formed.
0 is completed.

(M) Adhesion of Piezoelectric Element 40 After the electrode 41 is formed on the completed diaphragm 30 of the head substrate 50 by using silver paste or the like, the piezoelectric element 40 is further adhered to use a photocurable resin as a material. The ink jet head is completed. Next, a second embodiment of the method for manufacturing an ink jet head according to the present invention is shown in FIGS. This figure is also a schematic diagram in which a part of the cross section AA of the ink jet head of FIG. 7 is enlarged.

The manufacturing apparatus and materials used in the second embodiment are all the same as those in the first embodiment. This embodiment is an example of a manufacturing method in the case where the viscosity of the photocurable resin 55 to be filled first and mixed with the ultraviolet curable adhesive is higher than the viscosity of the photocurable resin 51 to be filled later.

In the second embodiment, the steps (A) to (E) until the projection 155 is formed on the diaphragm 30 and the spacer 170 is installed are the same as the steps (A) in the first embodiment. ~
(E) is the same, and in the second embodiment, steps (G) to (K) from completion of filling the photocurable resin 51 to completion of the ink jet head are steps (I) of the first embodiment. Since (M) is the same, the description is simplified.

(A) Positive resist 15 on diaphragm 30
Application of 5a Liquid positive resist 155a is applied to the entire surface of diaphragm 30. (B) Setting of the mask plate 105 The mask plate 105 in which the light shielding portion 115 having the shape of the pressure chamber 20 and the ink supply path 25 is formed by chromium vapor deposition or the like is overlaid on the glass plate coated with the positive resist 155a.

(C) Irradiation of Ultraviolet Light The mask plate 105 is irradiated with ultraviolet light (60 mV / cm ² ) by an ultraviolet irradiation device. (D) Formation of the convex portion 155 After the irradiation of the ultraviolet rays, the vibration plate 30 is washed with an alkaline aqueous solution.
On the vibration plate 30, a convex portion 155 forming the pressure chamber 20 and the ink supply path 25 is formed.

(E) Installation of spacer 170 Around the vibrating plate 30 on which the convex portions 155 are formed, a spacer 170 of 230 μm in thickness using a solid positive resist is installed. (F) Filling of the photocurable resin 55 and the photocurable resin 51 mixed with the ultraviolet curable adhesive The photocurable resin 55 mixed with the ultraviolet curable adhesive is filled on the vibrating plate 30 surrounded by the spacer 170, Subsequently, a photocurable resin 51 having a lower viscosity than the resin 55 is filled.

The resin 55 is a tricyclodecane dimethanol diacrylate resin (manufactured by Mitsubishi Yuka Co., Ltd., SA
-1002) and an ultraviolet curing adhesive (350, manufactured by Nippon Loctite Co., Ltd.) at a weight ratio of 1: 1. As the resin 51, the above tricyclodecane dimethanol diacrylate resin was used.

(G) Installation of mask plate 100 Light-shielding portion 1 having a diameter of 40 μm for forming nozzle 10
The mask plate 100 having 10 is placed on the spacer 170. (H) Irradiation of ultraviolet light 160 The mask plate 100 is irradiated with ultraviolet light 160 at a light intensity of 60 mW / cm ^{2 for} 5 seconds by the ultraviolet light irradiation device.

In this step, the photocurable resin 55 obtained by mixing the photocurable resin 51 and the ultraviolet curable adhesive is cured.
The distance between the mask plate and the lens of the ultraviolet irradiation device is 4
It was set to 0 mm. (I) Formation of Nozzle 10 The mask plate 100 is peeled off from the cured resin, and washed with acetone for 40 seconds, so that the uncured resin 51 is flown to form the nozzle 10.

In addition, as the above-mentioned cleaning agent, an organic solvent such as methyl ethyl ketone, toluene, isopropyl alcohol and ethyl alcohol can be used in addition to acetone. (J) Formation of Pressure Chamber 20 and Ink Supply Path 25 After irradiating the whole of the resin on which the nozzles 10 are formed with ultraviolet rays at a light intensity of 60 mV / cm ^{2 for} 20 seconds, an alkaline aqueous solution (NMD manufactured by Tokyo Ohka Kogyo Co., Ltd.) When washing is performed in step -3), the resist is dissolved and washed away.

In this step, at the same time when the pressure chambers 20 and the ink supply paths 25 are formed, the spacers 170 are flown to complete the substrate 50 of the ink jet head. (K) Adhesion of Piezoelectric Element 40 After an electrode 41 is formed on the diaphragm 30 of the completed head substrate 50 with silver paste or the like, the piezoelectric element 40 is further adhered, and an ink jet head made of a photocurable resin is obtained. Complete.

It should be noted that the present invention is not limited to the above-described embodiment, but can be implemented by the following method or the like. (1) In the above embodiment, ultraviolet rays were irradiated by the ultraviolet irradiation device. However, the same effect can be obtained by guiding and irradiating sunlight with an optical fiber or the like. (2) In addition, any light can be used as long as it can secure a sufficient amount of light to cure the resin as long as it contains ultraviolet light.

(3) In the above embodiment, a glass plate was used as the mask plate. However, any material such as an acrylic resin can be used as long as the material has translucency. (4) In the above embodiment, the light shielding portion is formed on the mask plate by chromium vapor deposition. However, a metal other than chromium such as nickel may be used as long as the light shielding portion can be formed by vapor deposition.

(5) The light-shielding portion can be formed by printing a light-shielding substance (carbon or the like) in addition to vapor deposition of metal. (6) The irradiation time of light such as ultraviolet rays is closely related to the light amount and irradiation distance. Therefore, the irradiation time can be variously changed by changing the light amount and the set position of the irradiation device.

[0051]

According to the manufacturing method of the present invention, it is not only unnecessary to carry out the difficult work of applying the adhesive thinly and uniformly to the complicated surface of the head substrate as in the prior art, but also to the high level and unevenness. The vibration plate 30 and the head substrate can be bonded with a low bonding strength, and as a result, an ink jet head with good print quality can be obtained.

[Brief description of the drawings]

FIGS. 1A to 1E are manufacturing procedures of an inkjet head according to a first embodiment of the present invention.

FIGS. 2A and 2B are manufacturing procedures (F) to (J) of an inkjet head according to a first embodiment of the present invention;

FIGS. 3A to 3C are manufacturing procedures (K) to (M) of the inkjet head according to the first embodiment of the present invention.

FIGS. 4A to 4E are manufacturing procedures (A) to (E) of an inkjet head according to a second embodiment of the present invention;

FIGS. 5A to 5H are manufacturing procedures (F) to (H) of an inkjet head according to a second embodiment of the present invention;

FIGS. 6A and 6B are manufacturing procedures (I) to (K) of an inkjet head according to a second embodiment of the present invention.

FIG. 7 is an external view of an ink jet head manufactured according to the manufacturing procedure of the present invention.

FIG. 8 is an external view of a nozzle forming mask plate used for manufacturing an ink jet head according to the present invention.

FIG. 9 is an external view of a projection-forming mask plate used for manufacturing an inkjet head according to the present invention.

FIG. 10 is an external view of a spacer used for manufacturing an ink jet head according to the present invention.

FIG. 11 shows a conventional procedure for manufacturing an ink jet head.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Nozzle 20 Pressure chamber 30 Vibrating plate 40 Pressure generating means 50 Head substrate 51 Photocurable resin 51a Photocurable resin having lower viscosity than resin 55 55 Photocurable resin mixed with ultraviolet curable adhesive 100 Nozzle forming mask plate 105 Protrusion formation Mask plate 110, 115 Light shielding part 155 Convex part 160 Ultraviolet ray 170 Spacer

Continuation of front page (56) References JP-A-61-255868 (JP, A) JP-A-3-208660 (JP, A) JP-A-3-207659 (JP, A) JP-A-5-155029 (JP) JP-A-5-278219 (JP, A) JP-A-6-23995 (JP, A) (58) Fields investigated (Int. Cl. ⁷ , DB name) B41J 2/16 B41J 2/045 B41J 2/055

Claims (4)

(57) [Claims] A nozzle (10) for ejecting ink, a pressure chamber (20) communicating with the nozzle (10), an ink supply path (25) for supplying ink to the pressure chamber (20),
In a method for manufacturing an ink jet head having a diaphragm (30) for generating pressure in the pressure chamber (20), the ink supply path (25) and the pressure chamber (20) are provided on the diaphragm (30). After forming a convex portion (155) for forming a pattern, and installing a spacer (170) around the diaphragm (30), an ultraviolet-curing adhesive is mixed into a portion surrounded by the spacer (170). The light-cured resin (55) thus obtained is placed in the convex portion (15).
5) Fill at least the portion where the nozzle (10) is formed so as not to be buried, and apply light (160) from a light source to the resin (55).
After irradiation to the extent that 5) is semi-cured, the portion surrounded by the spacer (170) is filled with a photocurable resin (51), and the light-shielding portion (1) conforming to the cross-sectional shape of the nozzle (10) is filled.
A mask plate (100) formed of a light-transmitting substance on which 10) is disposed is set between the photocurable resin (51) and the light source, and light from the light source passes through the mask plate (100). 16
0) irradiation method. 2. The method of manufacturing an ink jet head according to claim 1, wherein a spacer is formed around a diaphragm (30) having a projection (155) for forming an ink supply path (25) and a pressure chamber (20). After the (170) is installed, the portion surrounded by the spacer (170) is filled with a photo-curing resin (55) mixed with an ultraviolet-curing adhesive. Resin (5
5) After filling the photocurable resin (51a) having a lower viscosity, the light shielding portion (1) conforming to the cross-sectional shape of the nozzle (10) is used.
A mask plate (100) formed of a translucent substance on which 10) is disposed is set between the photocurable resin (51) and a light source, and light (16) is transmitted from the light source through the mask plate (100).
0) irradiation method. 3. A method for manufacturing an ink jet head according to claim 1, wherein a step (155) for forming an ink supply path (25) and a pressure chamber (20) is formed on the vibration plate (30). However, a resist (155a) is applied on the vibration plate (30), and the pattern of the ink supply path (25) and the pressure chamber (20) is arranged as a light shielding portion (115). The formed mask plate (105) is removed from the resist (155).
a) setting between the vibrating plate (30) coated with a) and the light source, and light (160) from the light source through the mask plate (105).
And a method of manufacturing an ink jet head. 4. The method for manufacturing an ink jet head according to claim 1, wherein the material of the spacer (170) provided around the diaphragm (30) is a resist.