JP3079148U - Heating element for sealed heating furnace - Google Patents

Abstract

(57) [Problem] To provide a heating element for a closed-type heating furnace in which a heat source is hard to be damaged, and when installed in a heating furnace and used, the temperature is uniform and the temperature can be controlled depending on a place. SOLUTION: A heating element 1 is formed by coating a heat source 10 with a heat transfer refractory material 11, and a heating space 12 is formed in an inner peripheral portion surrounded by the heating element 1. A heat insulating refractory material 20 is provided between the heating furnace wall 2 and the heating furnace wall 2. The heating source 10 heats the heat transfer refractory material 11 to cause the heating element 1 to generate heat. Also, a large number of the heating elements 1 are provided in combination at predetermined positions in a heating furnace, and each heating element 1 is provided. The temperature is controlled independently by the power supply.

Description

[Detailed description of the invention]

[0001]

[Technical field to which the invention belongs]

 The present invention relates to a heating element for a closed-type heating furnace used for heating and firing semiconductor wafers, ceramics, and various other products.

[0002]

[Prior art]

 A heat source of a heating furnace having a known structure is fixed in the heating furnace with a refractory material. For example, a heat source is fixed in a groove or the like opened in the refractory material (for example, Japanese Patent No. 2964314). Alternatively, a heat source is provided directly on a heat-insulating refractory material (for example, Japanese Patent No. 3100177).

However, the surface of the heat source other than the fixed portion of the contact surface with the heat-insulating refractory material is exposed in the heating furnace, so that the object to be heated may fall down, In some cases, the gas may come into contact with the heat source and oxidize or damage the heat source. In other words, the conventional method has a great risk of shortening the life of the heat source. In order to avoid such danger, a furnace for ceramics using a high thermal conductive ceramic for a partition wall material is known (Japanese Patent No. 3086677).

[0004]

[Problems to be solved by the invention]

 In the method of fixing the heat source by providing a groove in the heat-insulating refractory material, the exposed area of the heat source is limited. In other words, heat cannot be dissipated in the part that comes into contact with the heat-insulating refractory material. Furthermore, in this method, the temperature of the portion of the heating furnace that receives direct heat is high, and the temperature of the portion far from the heat source tends to be relatively low, the temperature becomes uneven, and the temperature inside the heating furnace increases. If the heating is continued, the heat source will be burned, and the heat source in the heating furnace is integrated, and the temperature of a part of the heating space cannot be raised or lowered.

[0005] In the furnace for ceramics described in the above-mentioned Japanese Patent No. 3086677, since the partition wall material and the heating element are each supported by the support, the structure is complicated, and it is not easy to cope with a change in the accommodation volume of the heated object. . In addition, the heating efficiency is low because the heating is performed indirectly by the heating element behind the partition wall material. In view of these drawbacks, an object of the present invention is to provide a heating element for a closed-type heating furnace having a novel structure.

[Means for Solving the Problems]

 According to the present invention, a heating element that prevents a heat source from being broken, achieves uniform heating, can control a different temperature depending on the location of a heating space, and can easily cope with a change in the accommodation volume of an object to be heated. An object of the present invention is to provide a combined heating element for a closed heating furnace.

That is, the present invention provides a heating element in which the heat source is not exposed to the heating space for heating the object to be heated because the heat source is covered with a highly heat-conductive refractory material having a fixed outer shape. The heating space is formed by the inner peripheral surface of the heating element, which is placed in the heating furnace so as to surround the object to be heated, and the high thermal conductive refractory material directly transfers heat from the heating source. The heating element for a sealed heating furnace, wherein the heating element is caused to generate heat.

Further, the present invention is characterized in that the heating element is formed in a single shape in advance, and an appropriate number of the heating elements are mounted in combination at a predetermined position in the heating furnace. The heating element for a sealed heating furnace described above. Further, the present invention provides the above-mentioned heating element for a sealed heating furnace, wherein the appropriate number of heating elements are independently controlled in temperature by a power source, and the temperature in the heating space can be adjusted for each location. is there. Further, the present invention is the above-mentioned heating element for a closed-type heating furnace, wherein the heat-insulating refractory material is integrally formed with the high heat conductive refractory material on the side opposite to the heating space.

[0008]

[Embodiment of the invention]

 FIG. 1 is a perspective view showing one embodiment of the heating element of the present invention, in which a heat source 10 is formed in a high heat conductive refractory material 11 molded into a cylindrical shape having a circular or elliptical horizontal cross section. The heating element 1 is covered and formed as one body. As the heat source, a coil-shaped heat wire wound spirally in the high heat conductive refractory material is used. An inner peripheral portion surrounded by the heating element 1 is a heating space 12 for heating an object to be heated, and a surface opposite to the heating space of the heating element, that is, between the heating element 1 and the heating furnace wall 2. Is provided integrally with a heat-insulating and refractory material 20.

[0009] The form of the heating element of the present invention is not limited to the illustrated one, and a combination of a cylindrical form or the like divided into several blocks may be combined. As the high heat conductive refractory material, a refractory material mainly composed of a known high heat conductive ceramic such as a silicon carbide ceramic can be used.

The heat source 10 heats the high heat conductive refractory material 11 with high efficiency by direct heat transfer, the high heat conductive refractory material 11 absorbs the heat of the heat source 10, Release evenly as a heating element. That is, since the heating element 1 uniformly emits heat, the heating temperature of the entire heating space 12 becomes uniform. Further, since the heat source 10 is sealed in the highly heat-conductive refractory material 11 and is covered with the heat source, it is not exposed to the heating space for heating the object to be heated. It also has the effect of preventing damage and oxidation of the heat source 10. It is sufficient that the heat source is not exposed, and it is preferable to provide the heat source near the surface of the high thermal conductive refractory material 11 on the side of the heating space from the viewpoint of heat generation efficiency.

Further, the heating element 1 has a single shape, and in use, as shown in FIG. 2, a number of the heating elements 1 are fixed on a bottom heat insulating material in a heating furnace. The heating elements 1 can be installed in combination with the positions, and the temperature of the heating elements 1 can be independently controlled by the power supply, and each position in the heating space 12 can be set to a different temperature.

[0012]

[Effect of the invention]

 According to the present invention, the heat source is protected and hardly damaged, and since the heat source and the highly heat-conductive refractory material are directly transferred, the heating efficiency is high and the temperature of the heating space can be made uniform. Further, since the temperature can be individually controlled by combining the heating elements, it is possible to control the temperature to be different depending on the location of the heating space, and it is possible to easily cope with a change in the storage capacity of the object to be heated.

[Brief description of the drawings]

FIG. 1 is a perspective view of a combination of a heating element for a closed-type heating furnace of the present invention and a heat insulating material.

FIG. 2 is a partial cross-sectional view after a plurality of heating elements for a closed-type heating furnace of the present invention are combined and installed in a heating furnace.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Heating element 10 Heat source 11 High thermal conductive refractory material 12 Heating space 2 Heating furnace wall 20 Insulated refractory material

Claims (4)

[Utility model registration claims] 1. A heating element which is not exposed to a heating space for heating an object to be heated, because the heat source is covered with a high-heat-conductivity refractory material having a fixed outer shape.
The heating space is formed in the heating furnace so as to surround the object to be heated, and the heating space is formed by the inner peripheral surface of the heating element, and the high heat conductive refractory material is caused to generate heat by direct heat transfer from the heating source. A heating element for a closed-type heating furnace, wherein 2. The heating element according to claim 1, wherein said heating element is previously formed into a single shape, and an appropriate number of said heating elements are mounted in combination at predetermined positions in a heating furnace. The heating element for a sealed heating furnace according to the above. 3. The heating unit for a sealed heating furnace according to claim 2, wherein the temperature of the appropriate number of heating elements is independently controlled by a power source, and the temperature in the heating space can be adjusted for each location. body. 4. The heating element for a sealed-type heating furnace according to claim 1, wherein a heat-insulating refractory material is integrally formed with the high thermal conductive refractory material on the side opposite to the heating space. .