JP3076727B2 - Sample holder fixing device - Google Patents
Sample holder fixing deviceInfo
- Publication number
- JP3076727B2 JP3076727B2 JP06253335A JP25333594A JP3076727B2 JP 3076727 B2 JP3076727 B2 JP 3076727B2 JP 06253335 A JP06253335 A JP 06253335A JP 25333594 A JP25333594 A JP 25333594A JP 3076727 B2 JP3076727 B2 JP 3076727B2
- Authority
- JP
- Japan
- Prior art keywords
- sample holder
- stage
- holder
- electrostatic
- sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000010894 electron beam technology Methods 0.000 claims description 8
- 238000000034 method Methods 0.000 claims description 2
- 230000007246 mechanism Effects 0.000 description 27
- 230000007723 transport mechanism Effects 0.000 description 12
- 230000002093 peripheral effect Effects 0.000 description 7
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 4
- 239000011521 glass Substances 0.000 description 3
- 238000001514 detection method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000001771 impaired effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Sampling And Sample Adjustment (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Electron Beam Exposure (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明は、電子ビーム描画装置の
試料ホルダを、ステージ上に固定する試料ホルダの固定
装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sample holder fixing device for fixing a sample holder of an electron beam writing apparatus on a stage.
【０００２】[0002]
【従来の技術】電子ビーム描画装置においては、試料
（ガラスマスクやウエハ）を試料ホルダ（カセット）に
装填し、その試料ホルダを移動手段であるステージ（Ｘ
−Ｙテーブル）上に固定するようになっている。2. Description of the Related Art In an electron beam writing apparatus, a sample (glass mask or wafer) is loaded into a sample holder (cassette), and the sample holder is moved to a stage (X).
-Y table).
【０００３】従来、試料ホルダをステージ上に固定する
方法としては、例えば、特公平３−２２０４７号公報に
開示される機械的なクランプ機構を採用していた。すな
わち、図７及び図８に示すように、ステージａ上に試料
ホルダｂの両側部を押えるための押え板ｃを有した一対
のクランプ機構ｄ，ｄを配置する。押え板ｃ，ｃは、そ
れぞれステージａ上に突設されたベースブロックｅにピ
ンｆを介して連結された回動可能なアームｇに、ピンｈ
を介して連結されている。アームｇは、連結されたばね
体ｉにより、図８の状態において時計回り方向に付勢さ
れており、押え板ｃ，ｃをステージａ側に押付けるよう
になっている。Conventionally, as a method of fixing a sample holder on a stage, for example, a mechanical clamping mechanism disclosed in Japanese Patent Publication No. 3-22047 has been adopted. That is, as shown in FIGS. 7 and 8, a pair of clamp mechanisms d, d having a holding plate c for holding both sides of the sample holder b are arranged on the stage a. The holding plates c, c are respectively connected to a rotatable arm g, which is connected via a pin f to a base block e projecting from the stage a, to a pin h.
Are connected via The arm g is urged clockwise in the state of FIG. 8 by the connected spring body i so as to press the holding plates c, c against the stage a.
【０００４】そして、ステージａに載置された試料ホル
ダｂの両側部を、押え板ｃ，ｃとステージａとでクラン
プし、試料ホルダｂを所定位置に固定するようになって
いる。Then, both side portions of the sample holder b mounted on the stage a are clamped by the holding plates c, c and the stage a to fix the sample holder b at a predetermined position.
【０００５】しかしながら、上記した機械的なクランプ
機構ｄ，ｄを採用した従来の試料ホルダの固定装置は、
以下（イ）〜（ハ）で示すような問題があった。すなわ
ち、 （イ）クランプ機構ｄは、部品点数が多く機構が複雑で
あり、組立性が悪いと共に、製造コストの低減を図る上
での障害となり、しかも、ステージａ上が繁雑となり、
試料ホルダｄの送込み取出しの操作性が損なわれる。 （ロ）試料ホルダｂの周辺部分を挟む形となる為、モー
メントを発生し易く、その結果、試料ホルダｂが変形し
て、それが試料に影響して描画精度を低下させる。 （ハ）試料ホルダｂの変形を低減させるために、試料ホ
ルダｂやステージａの上部の剛性を上げなければなら
ず、その結果、重量の増加や部品の大型化を招く。さら
に、これに伴い、試料ホルダｂの搬送機構も大型化して
しまう。 という問題があった。[0005] However, a conventional sample holder fixing device employing the mechanical clamping mechanisms d, d described above,
There were the following problems (a) to (c). That is, (a) The clamp mechanism d has a large number of parts and a complicated mechanism, which is not only difficult to assemble, but also becomes an obstacle in reducing the manufacturing cost, and further, the stage a becomes complicated.
The operability of loading and unloading the sample holder d is impaired. (B) Since the peripheral portion of the sample holder b is sandwiched therebetween, a moment is easily generated. As a result, the sample holder b is deformed, which affects the sample and lowers the drawing accuracy. (C) In order to reduce the deformation of the sample holder b, it is necessary to increase the rigidity of the sample holder b and the upper part of the stage a. As a result, the weight increases and the size of parts increases. In addition, the transport mechanism of the sample holder b also becomes larger with this. There was a problem.
【０００６】[0006]
【発明が解決しようとする課題】上記したように、従来
の試料ホルダの固定装置は、部品点数が多く機構が複雑
なクランプ機構をステージ上に配置することにより生じ
る問題、試料ホルダの変形により生じる問題、及び試料
ホルダやステージ上部の剛性を上げることにより生じる
問題があった。As described above, the conventional sample holder fixing apparatus has a problem caused by disposing a clamp mechanism having a large number of parts and a complicated mechanism on a stage, and a problem caused by deformation of the sample holder. There were problems and problems caused by increasing the rigidity of the sample holder and the upper part of the stage.
【０００７】本発明は上記事情に基づきなされたもの
で、構成の簡素化及びこれに伴うステージ上の簡素化が
図れると共に、試料ホルダの変形を招くことがなく、ま
た、試料ホルダやステージの上部の剛性を上げなくてす
むようにした試料ホルダの固定装置を提供することを目
的とする。The present invention has been made on the basis of the above-mentioned circumstances, and can simplify the configuration and the stage on the stage, and do not cause deformation of the sample holder. It is an object of the present invention to provide a sample holder fixing device that does not need to increase the rigidity of the sample holder.
【０００８】[0008]
【課題を解決するための手段】本発明は上記課題を解決
するための第１の手段として、電子ビーム照射に供され
る試料を保持する試料ホルダを、ステージ上に固定する
試料ホルダの固定装置であって、前記ホルダと前記ステ
ージとの相互対向面間に位置して設けられ、前記試料ホ
ルダを前記ステージ上に静電力で吸着保持する静電吸着
手段を具備してなる構成としたものである。According to the present invention, as a first means for solving the above problems, a sample holder fixing device for fixing a sample holder for holding a sample to be subjected to electron beam irradiation on a stage. And a structure provided with electrostatic suction means provided between the mutually facing surfaces of the holder and the stage, and holding the sample holder on the stage by electrostatic force. is there.
【０００９】また、第２の手段として、電子ビーム照射
に供される試料を保持する試料ホルダを、ステージ上に
固定する試料ホルダの固定装置であって、前記ホルダと
前記ステージとの相互対向面間に位置し、かつ、前記試
料ホルダを３点支持する状態に設けられ、前記試料ホル
ダを前記ステージ上に静電力で吸着保持する複数の静電
チャックを具備してなる構成としたものである。As a second means, there is provided a sample holder fixing device for fixing a sample holder for holding a sample to be subjected to electron beam irradiation on a stage, wherein the holder and the stage are opposed to each other. A plurality of electrostatic chucks are provided between the two stages and are provided to support the sample holder at three points, and hold the sample holder on the stage by electrostatic force. .
【００１０】また、第３の手段として、電子ビーム照射
に供される試料を保持する試料ホルダを、ステージ上に
固定する試料ホルダの固定装置であって、前記ステージ
上に配設され、前記試料ホルダを３点支持するホルダ支
持手段と、このホルダ支持手段により３点支持された前
記試料ホルダの直交する２辺に対向する位置に配設さ
れ、前記試料ホルダを静電力で吸着保持する複数の静電
チャックとを具備してなる構成としたものである。As a third means, there is provided a sample holder fixing device for fixing a sample holder for holding a sample to be subjected to electron beam irradiation on a stage, wherein the device is provided on the stage, A plurality of holder support means for supporting the holder at three points, and a plurality of holder support means arranged at positions opposed to two orthogonal sides of the sample holder supported at three points by the holder support means, for attracting and holding the sample holder by electrostatic force It is configured to include an electrostatic chuck.
【００１１】[0011]
【作用】上記第１の手段の試料ホルダの固定装置によれ
ば、ホルダとステージとの相互対向面間に位置して静電
吸着手段を設け、試料ホルダをステージ上に静電力で吸
着保持するようにしたから、従来のように、部品点数が
多く機構が複雑な機械的クランプ機構をステージ上に配
置するものに比べ、構成の簡素化及びこれに伴うステー
ジ上の簡素化が図れる。これにより、組立性の容易化、
低コスト化、試料ホルダの送込み取出しの操作性の向上
が可能となる。According to the first means for fixing the sample holder of the first means, the electrostatic suction means is provided between the mutually facing surfaces of the holder and the stage, and the sample holder is suction-held on the stage by electrostatic force. Thus, the configuration and the accompanying simplification of the stage can be simplified as compared with the conventional arrangement in which a mechanical clamp mechanism having a large number of parts and a complicated mechanism is arranged on the stage. This facilitates assembly,
It is possible to reduce the cost and to improve the operability of sending and taking out the sample holder.
【００１２】また、試料ホルダをステージ上に静電力で
吸着保持するため、従来の機械的クランプ機構のように
試料ホルダの周辺部分を挟む必要がなく、モーメントの
発生による試料ホルダの変形を招くことがなく、試料ホ
ルダの変形に伴う描画精度の低下を防止し、精度の高い
描画が可能となる。Further, since the sample holder is attracted and held on the stage by electrostatic force, it is not necessary to pinch the peripheral portion of the sample holder unlike a conventional mechanical clamping mechanism, and the deformation of the sample holder due to generation of a moment is caused. Therefore, a decrease in drawing accuracy due to deformation of the sample holder is prevented, and highly accurate drawing can be performed.
【００１３】さらに、試料ホルダの変形を低減させるべ
く、試料ホルダやステージの上部の剛性を上げる必要が
なくなり、重量の軽減や部品の小形化、さらには試料ホ
ルダの搬送機構の小形化が可能となる。Furthermore, it is not necessary to increase the rigidity of the upper part of the sample holder and the stage in order to reduce the deformation of the sample holder, so that the weight can be reduced, the parts can be downsized, and further, the transport mechanism of the sample holder can be downsized. Become.
【００１４】上記第２の手段の試料ホルダの固定装置に
よれば、ホルダとステージとの相互対向面間に位置して
複数の静電チャックを設け、試料ホルダをステージ上に
静電力で吸着保持するようにしたから、従来のように、
部品点数が多く機構が複雑な機械的クランプ機構をステ
ージ上に配置するものに比べ、構成の簡素化及びこれに
伴うステージ上の簡素化が図れる。これにより、組立性
の容易化、低コスト化、試料ホルダの送込み取出しの操
作性の向上が可能となる。According to the sample holder fixing device of the second means, a plurality of electrostatic chucks are provided between the opposing surfaces of the holder and the stage, and the sample holder is attracted and held on the stage by electrostatic force. So, as in the past,
Compared to a mechanical clamp mechanism having a large number of parts and a complicated mechanism arranged on the stage, the configuration can be simplified and the stage can be simplified accordingly. This makes it easy to assemble, reduce the cost, and improve the operability of loading and unloading the sample holder.
【００１５】また、試料ホルダをステージ上に静電力で
吸着保持するため、従来の機械的クランプ機構のように
試料ホルダの周辺部分を挟む必要がなく、モーメントの
発生による試料ホルダの変形を招くことがなく、試料ホ
ルダの変形に伴う描画精度の低下を防止し、精度の高い
描画が可能となる。Further, since the sample holder is attracted and held on the stage by electrostatic force, it is not necessary to pinch the peripheral portion of the sample holder unlike a conventional mechanical clamping mechanism, and deformation of the sample holder due to generation of a moment is caused. Therefore, a decrease in drawing accuracy due to deformation of the sample holder is prevented, and highly accurate drawing can be performed.
【００１６】さらに、試料ホルダの変形を低減させるべ
く、試料ホルダやステージの上部の剛性を上げる必要が
なくなり、重量の軽減や部品の小形化、さらには試料ホ
ルダの搬送機構の小形化が可能となる。Further, it is not necessary to increase the rigidity of the sample holder and the upper portion of the stage in order to reduce the deformation of the sample holder, and it is possible to reduce the weight, downsize parts, and further downsize the transport mechanism of the sample holder. Become.
【００１７】また、試料ホルダを３点支持する状態に静
電チャックを配置したから、試料ホルダの自重たわみを
最小におさえる３点を支持でき、これとは別に試料ホル
ダを安定的に支持するための支持手段を不要とすること
が可能となる。In addition, since the electrostatic chuck is arranged so as to support the sample holder at three points, three points for minimizing the deflection of the sample holder by its own weight can be supported. In addition to this, the sample holder can be stably supported. Can be eliminated.
【００１８】上記第３の手段の試料ホルダの固定装置に
よれば、ホルダ支持手段により３点支持されたステージ
上の試料ホルダの直交する２辺に対向するように位置さ
せて複数の静電チャックを設け、試料ホルダを静電力で
吸着保持するようにしたから、従来のように、部品点数
が多く機構が複雑な機械的クランプ機構をステージ上に
配置するものに比べ、構成の簡素化及びこれに伴うステ
ージ上の簡素化が図れる。これにより、組立性の容易
化、低コスト化、試料ホルダの送込み取出しの操作性の
向上が可能となる。According to the sample holder fixing device of the third means, the plurality of electrostatic chucks are positioned so as to face two orthogonal sides of the sample holder on the stage supported at three points by the holder supporting means. To hold the sample holder by electrostatic force, which simplifies the configuration and reduces the configuration compared to a conventional mechanical clamp mechanism with a large number of parts and a complicated mechanism arranged on the stage. Can be simplified on the stage. This makes it easy to assemble, reduce the cost, and improve the operability of loading and unloading the sample holder.
【００１９】また、試料ホルダをステージ上に静電力で
吸着保持するため、従来のように機械的クランプ機構の
ように試料ホルダの周辺部分を挟む必要がなく、モーメ
ントの発生による試料ホルダの変形を招くことがなく、
試料ホルダの変形に伴う描画精度の低下を防止し、精度
の高い描画が可能となる。Further, since the sample holder is attracted and held on the stage by electrostatic force, there is no need to pinch the peripheral portion of the sample holder as in a conventional mechanical clamping mechanism. Without inviting,
A decrease in drawing accuracy due to deformation of the sample holder is prevented, and highly accurate drawing can be performed.
【００２０】さらに、試料ホルダの変形を低減させるべ
く、試料ホルダやステージの上部の剛性を上げる必要が
なくなり、重量の軽減や部品の小形化、さらには試料ホ
ルダの搬送機構の小形化が可能となる。Furthermore, it is not necessary to increase the rigidity of the sample holder and the upper portion of the stage in order to reduce the deformation of the sample holder, and it is possible to reduce the weight, downsize parts, and downsize the transport mechanism of the sample holder. Become.
【００２１】[0021]
【実施例】以下、本発明の第１の実施例について図１な
いし図４を参照して説明する。図１ないし図３におい
て、図中１は例えばＸ−Ｙテ−ブルからなるステージで
あり、このステージ１の上面部には、直交する２辺に沿
って位置検出用の２本のレーザミラー２，４が配設され
ている。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A first embodiment of the present invention will be described below with reference to FIGS. 1 to 3, reference numeral 1 denotes a stage made of, for example, an XY table, and two laser mirrors 2 for position detection are provided on the upper surface of the stage 1 along two orthogonal sides. , 4 are provided.
【００２２】また、ステージ１の上面には、ステージ１
の中央部に、ガラスマスクやウエハ等の試料Ｗを装填し
た導電性の試料ホルダ（カセット）６を固定するための
静電吸着手段８を有する試料ホルダ固定装置１０が設け
られている。On the upper surface of the stage 1, the stage 1
A sample holder fixing device 10 having electrostatic suction means 8 for fixing a conductive sample holder (cassette) 6 loaded with a sample W such as a glass mask or a wafer is provided at the center of the sample holder.
【００２３】静電吸着手段８は、少なくとも４〜５ｋｇ
／ｃｍ2 の吸着力を発生する複数（この実施例では３
つ）の静電チャック１２…により構成されている。前記
静電チャック１２…は、試料ホルダ６の自重たわみを最
小に押える３点を支持し得る位置に配設されている。The electrostatic attraction means 8 is at least 4 to 5 kg.
/ Cm 2 (at 3 mm in this embodiment)
) Electrostatic chucks 12. The electrostatic chucks 12 are arranged at positions capable of supporting three points for minimizing the deflection of the sample holder 6 under its own weight.
【００２４】静電チャック１２は、図４に示すように、
絶縁材製のチャック本体であるブロック１２ａと、この
ブロック１２ａの上面に形成された平板状の内部電極１
２ｂと、この内部電極１２ｂの上面を覆う絶縁層からな
る膜状の強誘電体１２ｃと、内部電極１２ｂに一端を連
通し他端をブロック１２ａを貫通して外部に導出した給
電用のリード線１２ｄとからなる。The electrostatic chuck 12 is, as shown in FIG.
A block 12a which is a chuck body made of an insulating material, and a flat internal electrode 1 formed on an upper surface of the block 12a.
2b, a film-like ferroelectric material 12c made of an insulating layer covering the upper surface of the internal electrode 12b, and a power supply lead wire which is connected to the internal electrode 12b at one end and the other end passes through the block 12a and is led out to the outside. 12d.
【００２５】そして、複数の静電チャック１２…を、ス
テージ１に対して強誘電体１２ｃが上を向く状態、か
つ、同一水平高さとなる状態に配設したものとなってい
る。静電チャック１２…の各リード線１２ｄは、図２、
図３に示すように、スイッチ１４を介して直流電源から
なるチャック電源１６のプラス側に接続され、チャック
電源１６のマイナス側は接地されている。The plurality of electrostatic chucks 12 are arranged so that the ferroelectric substance 12c faces upward with respect to the stage 1 and has the same horizontal height. Each lead wire 12d of the electrostatic chucks 12 is shown in FIG.
As shown in FIG. 3, the positive side of a chuck power supply 16 composed of a DC power supply is connected via a switch 14, and the negative side of the chuck power supply 16 is grounded.
【００２６】また、ステージ１の上面には、接地された
アースピン１８が突設されており、図示しないホルダ搬
送機構を介して所定位置まで送り込まれた試料ホルダ６
の下面と接触するようになっている。On the upper surface of the stage 1, a grounded earth pin 18 protrudes, and the sample holder 6 fed to a predetermined position via a holder transport mechanism (not shown).
To be in contact with the lower surface of the.
【００２７】つぎに、試料ホルダ６をステージ１上に固
定する動作について説明する。まず、図３に示すよう
に、図示しないホルダ搬送機構を介して試料ホルダ６が
水平方向（矢印方向）に送り込まれる。この時、チャッ
ク電源１６と直列接続されたスイッチ１４が開（ＯＦ
Ｆ）状態となっており静電チャック１２…は非吸着動作
状態にある。Next, the operation of fixing the sample holder 6 on the stage 1 will be described. First, as shown in FIG. 3, the sample holder 6 is fed in a horizontal direction (arrow direction) via a holder transport mechanism (not shown). At this time, the switch 14 connected in series with the chuck power supply 16 is opened (OF).
F) and the electrostatic chucks 12 are in a non-sucking operation state.
【００２８】そして、試料ホルダ６が所定位置まで送込
まれると前記ホルダ搬送機構から解放され、試料ホルダ
６は、図２に示すように、静電チャック１２…により３
点支持された状態となる。また、この時、ホルダ接地用
のアースピン１８と接触した状態となる。When the sample holder 6 is fed to a predetermined position, it is released from the holder transfer mechanism, and the sample holder 6 is moved by the electrostatic chucks 12 as shown in FIG.
The point is supported. Further, at this time, the state is brought into contact with the earth pin 18 for grounding the holder.
【００２９】この後、スイッチ１４が閉（ＯＮ）状態と
なり、静電チャック１２…が吸着動作状態となる。すな
わち、スイッチ１４が閉（ＯＮ）状態となると、強誘電
体１２ｃの表面に置かれた導電性の試料ホルダ６と内部
電極１２ｂとの間に電位差が生じ静電吸引力が発生す
る。Thereafter, the switch 14 is closed (ON), and the electrostatic chucks 12 are in a suction operation state. That is, when the switch 14 is closed (ON), a potential difference is generated between the conductive sample holder 6 placed on the surface of the ferroelectric 12c and the internal electrode 12b, and an electrostatic attraction is generated.
【００３０】この時の静電チャック１２の吸引力ｆは、
次式で表される。 ｆ＝Ｋ×（ｎＶ2 ／（ｂ＋ｎａ2 ）） ただし、Ｋは定数、ｎは強誘電体１２ｃの誘電率、Ｖは
内部電極１２ｂと試料ホルダ６との間の電位差、ａは強
誘電体１２ｃの厚さ、ｂは強誘電体１２ｃと試料ホルダ
６との間の隙間である。At this time, the suction force f of the electrostatic chuck 12 is:
It is expressed by the following equation. f = K × (nV 2 / (b + na 2 )) where K is a constant, n is the dielectric constant of the ferroelectric 12c, V is the potential difference between the internal electrode 12b and the sample holder 6, and a is the ferroelectric 12c. Is a gap between the ferroelectric 12c and the sample holder 6.
【００３１】なお、静電チャックそのものについては、
例えば特公平６−１５１３０号公報等において公知であ
り、詳細な説明は省略する。この実施例において使用さ
れる静電チャック１２は、少なくとも４〜５ｋｇ／ｃｍ
2 の吸着力を発生するもので、試料ホルダ６は、ステー
ジ１上の平面内３点の少ない面積で十分な下方（図２の
矢印Ｚ方向）への吸引力が得られ、確実に固定されるこ
とになる。The electrostatic chuck itself is as follows.
For example, it is publicly known in Japanese Patent Publication No. 6-15130 or the like, and detailed description is omitted. The electrostatic chuck 12 used in this embodiment is at least 4-5 kg / cm
The sample holder 6 generates a sufficient suction force in a downward direction (arrow Z direction in FIG. 2) with a small area of three points on the plane of the stage 1 and is securely fixed. Will be.
【００３２】つぎに、本発明の第２の実施例について図
５及び図６を参照して説明する。図中１は例えばＸ−Ｙ
テ−ブルからなるステージであり、このステージ１の上
面部には、直交する２辺に沿って位置検出用の２本のレ
ーザミラー２，４が配設されている。Next, a second embodiment of the present invention will be described with reference to FIGS. In the figure, 1 is, for example, XY
The stage 1 is composed of a table. On the upper surface of the stage 1, two laser mirrors 2 and 4 for position detection are arranged along two orthogonal sides.
【００３３】また、ステージ１の上面には、ステージ１
の中央部に、ガラスマスクやウエハ等の試料Ｗを装填し
た導電性の試料ホルダ（カセット）６を固定するための
試料ホルダ固定装置１０が設けられている。On the upper surface of the stage 1, the stage 1
A sample holder fixing device 10 for fixing a conductive sample holder (cassette) 6 loaded with a sample W such as a glass mask or a wafer is provided at the center of the sample holder.
【００３４】この試料ホルダ固定装置１０は、前記ステ
ージ１上に配設された複数（実施例では３つ）の支持部
材２０…からなり、試料ホルダ６の自重たわみを最小に
押える３点を支持するホルダ支持手段２２と、このホル
ダ支持手段２２により３点支持された前記試料ホルダ６
の側端面部分を静電力で吸着保持する静電吸着手段８′
とを有する構成となっている。The sample holder fixing device 10 comprises a plurality of (three in the embodiment) support members 20 arranged on the stage 1, and supports three points for minimizing the deflection of the sample holder 6 by its own weight. Holder support means 22 to be mounted, and the sample holder 6 supported at three points by the holder support means 22
Electrostatic attraction means 8 'for attracting and holding the side end surface of the device by electrostatic force.
And a configuration having:
【００３５】静電吸着手段８′は、試料ホルダ６の直交
する２辺に対向する位置に配設され、少なくとも４〜５
ｋｇ／ｃｍ2 の吸着力を発生する複数（この実施例では
２つ）の静電チャック１２，１２により構成されてい
る。The electrostatic attraction means 8 'is disposed at a position facing two orthogonal sides of the sample holder 6, and at least 4 to 5
It is constituted by a plurality (two in this embodiment) of electrostatic chucks 12 and 12 that generate a suction force of kg / cm 2 .
【００３６】静電チャック１２は、図４を参照して前述
したように、絶縁材製のチャック本体であるブロック１
２ａと、このブロック１２ａの上面に形成された平板状
の内部電極１２ｂと、この内部電極１２ｂの上面を覆う
絶縁層からなる膜状の強誘電体１２ｃと、内部電極１２
ｂに一端を連通し他端をブロック１２ａを貫通して外部
に導出した給電用のリード線１２ｄとからなる。As described above with reference to FIG. 4, the electrostatic chuck 12 is a block 1 that is a chuck body made of an insulating material.
2a, a flat internal electrode 12b formed on the upper surface of the block 12a, a film-like ferroelectric material 12c made of an insulating layer covering the upper surface of the internal electrode 12b,
b, and a power supply lead wire 12d led to the outside through the block 12a at one end and the other end through the block 12a.
【００３７】そして、複数の静電チャック１２，１２
を、強誘電体１２ｃ，１２ｃが試料ホルダ６の直交する
２辺に対向する横向き状態に配設したものとなってい
る。静電チャック１２…の各リード線１２ｄは、図６に
示すように、スイッチ１４を介して直流電源からなるチ
ャック電源１６のプラス側に接続され、チャック電源１
６のマイナス側は接地されている。The plurality of electrostatic chucks 12, 12
Are arranged in a horizontal state in which the ferroelectrics 12 c and 12 c face two orthogonal sides of the sample holder 6. As shown in FIG. 6, each lead wire 12d of the electrostatic chucks 12 is connected to a plus side of a chuck power supply 16 composed of a DC power supply via a switch 14, and the chuck power supply 1
The negative side of 6 is grounded.
【００３８】また、ステージ１の上面には、接地された
アースピン１８が突設されており、図示しないホルダ搬
送機構を介して所定位置まで送り込まれた試料ホルダ６
の下面と接触するようになっている。A grounding pin 18 is provided on the upper surface of the stage 1 so as to be grounded. The sample holder 6 which has been fed to a predetermined position via a holder transport mechanism (not shown) is provided.
To be in contact with the lower surface of the.
【００３９】つぎに、試料ホルダ６をステージ１上に固
定する動作について説明する。まず、図６の二点鎖線で
示すように、図示しないホルダ搬送機構を介して試料ホ
ルダ６が水平方向（矢印方向）に送り込まれる。この
時、チャック電源１６と直列接続されたスイッチ１４が
開（ＯＦＦ）状態となっており静電チャック１２…は非
吸着動作状態にある。Next, the operation of fixing the sample holder 6 on the stage 1 will be described. First, as shown by a two-dot chain line in FIG. 6, the sample holder 6 is fed in a horizontal direction (arrow direction) via a holder transport mechanism (not shown). At this time, the switch 14 connected in series with the chuck power supply 16 is open (OFF), and the electrostatic chucks 12 are in the non-sucking operation state.
【００４０】そして、試料ホルダ６が所定位置まで送込
まれると前記ホルダ搬送機構から解放され、試料ホルダ
６は、図６の実線状態で示すように、支持部材２０…に
より３点支持された状態となる。また、この時、ホルダ
接地用のアースピン１８と接触した状態となる。When the sample holder 6 is fed to a predetermined position, it is released from the holder transport mechanism, and the sample holder 6 is supported at three points by the support members 20 as shown by the solid line in FIG. Becomes Further, at this time, the state is brought into contact with the earth pin 18 for grounding the holder.
【００４１】この後、スイッチ１４が閉（ＯＮ）状態と
なり、静電チャック１２，１２が吸着動作状態となる。
すなわち、スイッチ１４が閉（ＯＮ）状態となると、強
誘電体１２ｃの表面に置かれた導電性の試料ホルダ６と
内部電極１２ｂとの間に電位差が生じ静電吸引力が発生
する。Thereafter, the switch 14 is closed (ON), and the electrostatic chucks 12, 12 are in a suction operation state.
That is, when the switch 14 is closed (ON), a potential difference is generated between the conductive sample holder 6 placed on the surface of the ferroelectric 12c and the internal electrode 12b, and an electrostatic attraction is generated.
【００４２】この実施例において使用される静電チャッ
ク１２，１２は、少なくとも４〜５ｋｇ／ｃｍ2 の吸着
力を発生するもので、支持部材２０…により３点支持さ
れた試料ホルダ６は、直交する２辺が十分な吸引力で吸
着されることで、確実に固定されることになる。The electrostatic chucks 12, 12 used in this embodiment generate at least a suction force of 4 to 5 kg / cm 2 , and the sample holders 6 supported at three points by the support members 20 are orthogonal. The two sides are sucked with a sufficient suction force, so that they are securely fixed.
【００４３】なお、ステージ側に、静電チャックを設け
たものについて説明したが、試料ホルダ側に静電チャッ
クを設けることにより、試料ホルダを静電力で吸着保持
することも可能である。その他、本発明は上記実施例に
限らず、要旨を変えない範囲で種々変形実施可能なこと
は勿論である。Although the case where the electrostatic chuck is provided on the stage side has been described, it is also possible to hold the sample holder by electrostatic force by providing the electrostatic chuck on the sample holder side. In addition, the present invention is not limited to the above-described embodiment, and it goes without saying that various modifications can be made without departing from the scope of the invention.
【００４４】[0044]
【発明の効果】以上説明したように、本発明によれば、
つぎのような効果を奏する。請求項１記載の試料ホルダ
の固定装置によれば、ホルダとステージとの相互対向面
間に位置して静電吸着手段を設け、試料ホルダをステー
ジ上に静電力で吸着保持するようにしたから、従来のよ
うに、部品点数が多く機構が複雑な機械的クランプ機構
をステージ上に配置するものに比べ、構成の簡素化及び
これに伴うステージ上の簡素化が図れる。これにより、
組立性の容易化、低コスト化、試料ホルダの送込み取出
しの操作性の向上が図れる。As described above, according to the present invention,
The following effects are obtained. According to the sample holder fixing device of the first aspect, the electrostatic attraction means is provided between the opposing surfaces of the holder and the stage, and the sample holder is attracted and held on the stage by electrostatic force. As compared with a conventional arrangement in which a mechanical clamp mechanism having a large number of parts and a complicated mechanism is disposed on a stage, the configuration can be simplified and the stage can be simplified accordingly. This allows
The ease of assembly, the cost reduction, and the operability of feeding and taking out the sample holder can be improved.
【００４５】また、試料ホルダをステージ上に静電力で
吸着保持するため、従来のように機械的クランプ機構の
ように試料ホルダの周辺部分を挟む必要がなく、モーメ
ントの発生による試料ホルダの変形を招くことがなく、
試料ホルダの変形に伴う描画精度の低下を防止し、精度
の高い描画ができる。Further, since the sample holder is attracted and held on the stage by electrostatic force, it is not necessary to pinch the peripheral portion of the sample holder as in a conventional mechanical clamping mechanism. Without inviting,
A decrease in drawing accuracy due to deformation of the sample holder is prevented, and highly accurate drawing can be performed.
【００４６】さらに、試料ホルダの変形を低減させるべ
く、試料ホルダやステージの上部の剛性を上げる必要が
なくなり、重量の軽減や部品の小形化、さらには試料ホ
ルダの搬送機構の小形化が図れる。Further, in order to reduce the deformation of the sample holder, it is not necessary to increase the rigidity of the upper portion of the sample holder and the stage, so that the weight can be reduced, the size of parts can be reduced, and the transport mechanism of the sample holder can be reduced.
【００４７】また、請求項２記載の試料ホルダの固定装
置によれば、静電吸着手段を、少なくとも４〜５ｋｇ／
ｃｍ2 の吸着力を発生する複数の静電チャックで構成す
るようにしたから、請求項１記載の試料ホルダの固定装
置による効果に加え、吸着位置を選択できるため、より
安定した固定状態を得ることが可能となる。Further, according to the apparatus for fixing a sample holder according to the second aspect, the electrostatic attraction means is at least 4 to 5 kg / kg.
Since it is constituted by a plurality of electrostatic chucks generating a suction force of cm 2 , in addition to the effect of the fixing device of the sample holder according to claim 1, since a suction position can be selected, a more stable fixing state is obtained. It becomes possible.
【００４８】また、請求項３記載の試料ホルダの固定装
置によれば、ホルダとステージとの相互対向面間に位置
して複数の静電チャックを設け、試料ホルダをステージ
上に静電力で吸着保持するようにしたから、従来のよう
に、部品点数が多く機構が複雑な機械的クランプ機構を
ステージ上に配置するものに比べ、構成の簡素化及びこ
れに伴うステージ上の簡素化が図れる。これにより、組
立性の容易化、低コスト化、試料ホルダの送込み取出し
の操作性の向上が図れる。According to the apparatus for fixing a sample holder according to the third aspect, a plurality of electrostatic chucks are provided between the mutually facing surfaces of the holder and the stage, and the sample holder is attracted to the stage by electrostatic force. Since the holding mechanism is used, the structure can be simplified and the stage can be simplified in comparison with a conventional mechanical clamping mechanism having a large number of parts and a complicated mechanism arranged on the stage. This facilitates assembling, reduces cost, and improves the operability of loading and unloading the sample holder.
【００４９】また、試料ホルダをステージ上に静電力で
吸着保持するため、従来のように機械的クランプ機構の
ように試料ホルダの周辺部分を挟む必要がなく、モーメ
ントの発生による試料ホルダの変形を招くことがなく、
試料ホルダの変形に伴う描画精度の低下を防止し、精度
の高い描画ができる。Further, since the sample holder is attracted and held on the stage by electrostatic force, there is no need to sandwich the peripheral portion of the sample holder as in a conventional mechanical clamping mechanism. Without inviting,
A decrease in drawing accuracy due to deformation of the sample holder is prevented, and highly accurate drawing can be performed.
【００５０】さらに、試料ホルダの変形を低減させるべ
く、試料ホルダやステージの上部の剛性を上げる必要が
なくなり、重量の軽減や部品の小形化、さらには試料ホ
ルダの搬送機構の小形化が図れる。Further, in order to reduce the deformation of the sample holder, it is not necessary to increase the rigidity of the upper portion of the sample holder and the stage, so that the weight can be reduced, the size of parts can be reduced, and the transport mechanism of the sample holder can be reduced.
【００５１】また、試料ホルダを３点支持する状態に静
電チャックを配置したから、試料ホルダの自重たわみを
最小におさえる３点を支持でき、これとは別に試料ホル
ダを安定的に支持するための支持手段を不要とすること
ができる。Further, since the electrostatic chuck is arranged so as to support the sample holder at three points, three points for minimizing the deflection of the sample holder by its own weight can be supported. In addition to this, the sample holder can be stably supported. Support means can be dispensed with.
【００５２】また、請求項４記載の試料ホルダの固定装
置によれば、ホルダ支持手段により３点支持されたステ
ージ上の試料ホルダの直交する２辺に対向するように位
置させて複数の静電チャックを設け、試料ホルダを静電
力で吸着保持するようにしたから、従来のように、部品
点数が多く機構が複雑な機械的クランプ機構をステージ
上に配置するものに比べ、構成の簡素化及びこれに伴う
ステージ上の簡素化が図れる。これにより、組立性の容
易化、低コスト化、試料ホルダの送込み取出しの操作性
の向上が図れる。According to a fourth aspect of the present invention, there is provided a sample holder fixing device which is positioned so as to face two orthogonal sides of a sample holder on a stage which is supported at three points by holder supporting means. Since a chuck is provided to hold the sample holder by electrostatic force, the structure is simplified and compared to a conventional mechanical clamp mechanism with a large number of parts and a complicated mechanism arranged on the stage. Accordingly, simplification on the stage can be achieved. This facilitates assembling, reduces cost, and improves the operability of loading and unloading the sample holder.
【００５３】また、試料ホルダをステージ上に静電力で
吸着保持するため、従来のように機械的クランプ機構の
ように試料ホルダの周辺部分を挟む必要がなく、モーメ
ントの発生による試料ホルダの変形を招くことがなく、
試料ホルダの変形に伴う描画精度の低下を防止し、精度
の高い描画ができる。Further, since the sample holder is attracted and held on the stage by electrostatic force, there is no need to pinch the peripheral portion of the sample holder as in a conventional mechanical clamping mechanism. Without inviting,
A decrease in drawing accuracy due to deformation of the sample holder is prevented, and highly accurate drawing can be performed.
【００５４】さらに、試料ホルダの変形を低減させるべ
く、試料ホルダやステージの上部の剛性を上げる必要が
なくなり、重量の軽減や部品の小形化、さらには試料ホ
ルダの搬送機構の小形化が図れる。Further, in order to reduce the deformation of the sample holder, it is not necessary to increase the rigidity of the upper portion of the sample holder and the stage, so that the weight can be reduced, the size of parts can be reduced, and the transport mechanism of the sample holder can be reduced.
【図１】本発明の第１の実施例の試料ホルダ固定動作状
態を示す概略的平面図。FIG. 1 is a schematic plan view showing a sample holder fixing operation state according to a first embodiment of the present invention.
【図２】同実施例の試料ホルダ固定動作状態を示す概略
的側面図。FIG. 2 is a schematic side view showing a sample holder fixing operation state of the embodiment.
【図３】同実施例の試料ホルダ送込み時の動作状態を示
す概略的側面図。FIG. 3 is a schematic side view showing an operation state when the sample holder is fed in the embodiment.
【図４】同実施例の要部である静電チャックの構造を示
す概略的断面図。FIG. 4 is a schematic sectional view showing a structure of an electrostatic chuck which is a main part of the embodiment.
【図５】本発明の第２の実施例の試料ホルダ固定動作状
態を示す概略的平面図。FIG. 5 is a schematic plan view showing a sample holder fixing operation state according to a second embodiment of the present invention.
【図６】同実施例の試料ホルダ固定動作状態を示す概略
的側面図。FIG. 6 is a schematic side view showing a sample holder fixing operation state of the embodiment.
【図７】従来例の試料ホルダ固定動作状態を示す概略的
平面図。FIG. 7 is a schematic plan view showing a sample holder fixing operation state of a conventional example.
【図８】同従来例の試料ホルダ固定動作状態を示す概略
的側面図。FIG. 8 is a schematic side view showing a sample holder fixing operation state of the conventional example.
Ｗ…試料、１…ステージ、６…試料ホルダ、８，８′…
静電吸着手段、１０…試料ホルダ固定装置、１２…静電
チャック、１４…スイッチ、１６…チャック電源、１８
…アースピン、２０…支持部材、２２…ホルダ支持手
段。W: sample, 1: stage, 6: sample holder, 8, 8 '...
Electrostatic suction means, 10: sample holder fixing device, 12: electrostatic chuck, 14: switch, 16: chuck power supply, 18
... Earth pin, 20 ... Support member, 22 ... Holder support means.
───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.7，ＤＢ名) H01L 21/027 G03F 7/20 G03F 9/00 ──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. 7 , DB name) H01L 21/027 G03F 7/20 G03F 9/00
Claims (4)
試料ホルダを、ステージ上に固定する試料ホルダの固定
装置であって、 前記ホルダと前記ステージとの相互対向面間に位置して
設けられ、前記試料ホルダを前記ステージ上に静電力で
吸着保持する静電吸着手段を具備してなることを特徴と
する試料ホルダの固定装置。An apparatus for fixing a sample holder, which holds a sample to be subjected to electron beam irradiation, on a stage, wherein the holder is provided between mutually facing surfaces of the holder and the stage. A fixing device for fixing the sample holder, comprising electrostatic attraction means for attracting and holding the sample holder on the stage by electrostatic force.
ｇ／ｃｍ2 の吸着力を発生する複数の静電チャックから
なることを特徴とする請求項１の試料ホルダの固定装
置。2. The method according to claim 1, wherein said electrostatic attraction means is at least 4 to 5 k.
2. The sample holder fixing device according to claim 1, comprising a plurality of electrostatic chucks generating a suction force of g / cm < 2 >.
試料ホルダを、ステージ上に固定する試料ホルダの固定
装置であって、 前記ホルダと前記ステージとの相互対向面間に位置し、
かつ、前記試料ホルダを３点支持する状態に設けられ、
前記試料ホルダを前記ステージ上に静電力で吸着保持す
る複数の静電チャックを具備してなることを特徴とする
試料ホルダの固定装置。3. A sample holder fixing device for fixing a sample holder for holding a sample to be subjected to electron beam irradiation on a stage, wherein the sample holder is located between mutually facing surfaces of the holder and the stage,
And it is provided in a state of supporting the sample holder at three points,
A device for fixing a sample holder, comprising: a plurality of electrostatic chucks for holding the sample holder on the stage by electrostatic force.
試料ホルダを、ステージ上に固定する試料ホルダの固定
装置であって、 前記ステージ上に配設され、前記試料ホルダを３点支持
するホルダ支持手段と、 このホルダ支持手段により３点支持された前記試料ホル
ダの直交する２辺に対向する位置に配設され、前記試料
ホルダを静電力で吸着保持する複数の静電チャックと、
を具備してなることを特徴とする試料ホルダの固定装
置。4. A sample holder fixing device for fixing a sample holder for holding a sample to be subjected to electron beam irradiation on a stage, wherein the sample holder is arranged on the stage and supports the sample holder at three points. A plurality of electrostatic chucks disposed at positions opposed to two orthogonal sides of the sample holder supported at three points by the holder supporting means, and holding the sample holder by electrostatic force;
A fixing device for a sample holder, comprising:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP06253335A JP3076727B2 (en) | 1994-10-19 | 1994-10-19 | Sample holder fixing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP06253335A JP3076727B2 (en) | 1994-10-19 | 1994-10-19 | Sample holder fixing device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH08115871A JPH08115871A (en) | 1996-05-07 |
| JP3076727B2 true JP3076727B2 (en) | 2000-08-14 |
Family
ID=17249889
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP06253335A Expired - Fee Related JP3076727B2 (en) | 1994-10-19 | 1994-10-19 | Sample holder fixing device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3076727B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7212277B2 (en) | 2003-09-17 | 2007-05-01 | Canon Kabushiki Kaisha | Substrate holding technique |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3470469B2 (en) * | 1995-09-27 | 2003-11-25 | 株式会社ニコン | Reticle holding device and holding method |
| JP4403531B2 (en) * | 2000-03-07 | 2010-01-27 | Ｔｏｔｏ株式会社 | Manufacturing method of electrostatic chuck unit |
| FR2929758B1 (en) * | 2008-04-07 | 2011-02-11 | Commissariat Energie Atomique | TRANSFER METHOD USING A FERROELECTRIC SUBSTRATE |
| JP5288191B2 (en) * | 2009-03-17 | 2013-09-11 | 大日本印刷株式会社 | Substrate fixing device |
| JP5565495B2 (en) * | 2013-04-12 | 2014-08-06 | 大日本印刷株式会社 | Substrate fixing device |
| JP6742214B2 (en) * | 2016-10-04 | 2020-08-19 | 株式会社ディスコ | Power supply device for electrostatic chuck plate |
-
1994
- 1994-10-19 JP JP06253335A patent/JP3076727B2/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7212277B2 (en) | 2003-09-17 | 2007-05-01 | Canon Kabushiki Kaisha | Substrate holding technique |
| US7999919B2 (en) | 2003-09-17 | 2011-08-16 | Canon Kabushiki Kaisha | Substrate holding technique |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH08115871A (en) | 1996-05-07 |
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