JP3041399B2 - Manufacturing method of electro-optical device - Google Patents
Manufacturing method of electro-optical deviceInfo
- Publication number
- JP3041399B2 JP3041399B2 JP2213000A JP21300090A JP3041399B2 JP 3041399 B2 JP3041399 B2 JP 3041399B2 JP 2213000 A JP2213000 A JP 2213000A JP 21300090 A JP21300090 A JP 21300090A JP 3041399 B2 JP3041399 B2 JP 3041399B2
- Authority
- JP
- Japan
- Prior art keywords
- alignment film
- liquid crystal
- manufacturing
- electron beam
- electro
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
- G02F1/133765—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers without a surface treatment
Landscapes
- Liquid Crystal (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 この発明はフラットパネルディスプレイや、光変調素
子として用いられる液晶を用いた電気光学装置の製造方
法に関する。Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a flat panel display and a method for manufacturing an electro-optical device using liquid crystal used as a light modulation element.
この発明は液晶を用いた電気光学装置の液晶配向膜の
製作方法において、液晶材料をゴミで汚染したりするこ
とがなく、基板面に凹凸があっても容易に配向出来る液
晶配向膜の製作方法を提供するものである。The present invention relates to a method for manufacturing a liquid crystal alignment film of an electro-optical device using a liquid crystal, wherein the liquid crystal material is not contaminated with dust and the liquid crystal alignment film can be easily aligned even if the substrate surface has irregularities. Is provided.
第２図に従来の液晶を用いた電気光学素子の配向膜の
製作方法を示す。従来の液晶配向膜の製作方法は、ガ
ラスなどの基板１の上にポリイミド，テフロンなどの樹
脂２を塗布する工程、塗布した膜を、布を巻き付けた
ローラ３を回転させながら該樹脂の上をこする工程から
なる。この結果、配向膜の上には微細な溝が無数に形成
され、これにより液晶が配向する。TN型の液晶表示パネ
ルは第３図に示すごとく、電極8,9の上の配向膜4,5を互
いに直交する方向に配向した２枚のガラス基板6,7の間
に液晶10を挟持して作られる。FIG. 2 shows a method of manufacturing an alignment film of an electro-optical element using a conventional liquid crystal. A conventional method of manufacturing a liquid crystal alignment film includes a process of applying a resin 2 such as polyimide or Teflon on a substrate 1 such as glass, and applying the applied film on the resin while rotating a roller 3 around which a cloth is wound. It consists of a rubbing step. As a result, countless fine grooves are formed on the alignment film, and the liquid crystal is aligned. As shown in FIG. 3, the TN type liquid crystal display panel has a liquid crystal 10 sandwiched between two glass substrates 6, 7 in which alignment films 4, 5 on electrodes 8, 9 are oriented in directions perpendicular to each other. Made
この従来の配向膜の製作方法は大面積にわたって、簡
便な方法で配向膜が形成できるので生産性に優れてい
る。This conventional method for manufacturing an alignment film is excellent in productivity because an alignment film can be formed over a large area by a simple method.
この方法によると、樹脂がけずられてゴミが発生し液
晶を汚染するなど不良の原因になるほか、樹脂を塗布し
た面に凹凸があると陰になる部分ができて配向出来ない
領域ができるという問題点があった。According to this method, in addition to causing defects such as dust being generated due to the resin being displaced and contaminating the liquid crystal, a region where alignment is not possible due to the formation of a shaded portion when the surface coated with the resin has irregularities is formed. There was a problem.
また、ローラの接触が完全に均一でないと場所により
配向状態は不均一になり、電気光学特性にむらができる
という問題点があった。Further, if the contact of the rollers is not completely uniform, there is a problem that the orientation state becomes non-uniform depending on the location and the electro-optical characteristics can be uneven.
そこでこの発明は、従来のこの様な欠点を可決するた
めになされたもので、ゴミを発生せず、基板面に凹凸が
あっても良好な配向膜が形成できる液晶配向膜の製作方
法を提供することである。Accordingly, the present invention has been made in order to resolve such a conventional drawback, and provides a method of manufacturing a liquid crystal alignment film which does not generate dust and can form a good alignment film even if the substrate surface has irregularities. It is to be.
上記問題点を解決するために、この発明は熱可塑性材
料を基板上に塗布した後、電子線を熱可塑性の材料に照
射し、電子線の熱で変形させて、凹凸を形成するもので
ある。In order to solve the above problems, the present invention is to apply a thermoplastic material onto a substrate, and then irradiate the thermoplastic material with an electron beam and deform it by the heat of the electron beam to form irregularities. .
この発明によれば、電子線のエネルギーによる熱変形
で配向膜を形成することで、基板に凹凸があっても実施
でき、ゴミを発生しない、安定した性能の配向膜が実現
出来る。According to the present invention, by forming the alignment film by thermal deformation due to the energy of the electron beam, the alignment film can be formed even if the substrate has irregularities, and a stable alignment film without dust is realized.
第１図に、本発明の液晶配向膜の製作方法を示す。 FIG. 1 shows a method for producing a liquid crystal alignment film of the present invention.
（ａ）ガラスなどの基板12の上にポリイミドなどの樹脂
14を塗布，乾燥，硬化する。(A) Resin such as polyimide on a substrate 12 such as glass
14 is applied, dried and cured.
（ｂ）該基板を真空中にて、１ミクロン以下のビーム径
に絞った電子線11をCRT画面のごとくに走査し、電子線
により熱変形で溝13を形成する。即ち長方形の領域を電
子線の平行線13で満たす。この際、電子線のエネルギー
及び電流密度は樹脂14表面に熱変形を起こすに十分なも
のとする。(B) The substrate is scanned in a vacuum with an electron beam 11 having a beam diameter of 1 micron or less like a CRT screen, and a groove 13 is formed by thermal deformation using the electron beam. That is, the rectangular region is filled with the parallel lines 13 of the electron beam. At this time, the energy and current density of the electron beam are sufficient to cause thermal deformation on the resin 14 surface.
また、電子線のエネルギーが不十分である場合は、同
一線上を複数回、走査してもよい。この際、電子線の走
査のピッチが小さいほど（２ミクロン以下）液晶の配向
性がよくなることが観察された。電子線は基板の凹凸の
陰による影響を受けずに基板面上に照射できるので凹凸
の影響を受けずに配向膜を形成できる。また、熱変形の
過程でのゴミの発生は殆ど無い。If the energy of the electron beam is insufficient, the same line may be scanned a plurality of times. In this case, it was observed that the smaller the pitch of the electron beam scanning (2 μm or less), the better the orientation of the liquid crystal. Since the electron beam can be irradiated on the substrate surface without being affected by the shadow of the unevenness of the substrate, the alignment film can be formed without being affected by the unevenness. In addition, there is almost no generation of dust in the process of thermal deformation.
（ｃ）１回の長方形領域の走査のみで、所要の面積に配
向膜を形成できない場合は、上記（ｂ）の工程と基板の
x,y方向への平行移動を繰り返すことで所要の面積に配
向膜が形成できる。(C) In the case where the alignment film cannot be formed in a required area only by one scan of the rectangular area, the above-mentioned step (b)
By repeating the parallel movement in the x and y directions, an alignment film can be formed in a required area.
以上述べてきたように、本発明によると液晶配向膜を
ゴミの発生なく、安定した方法で基板表面に凹凸があっ
ても液晶配向膜の形成が可能になる。As described above, according to the present invention, the liquid crystal alignment film can be formed in a stable manner without any dust on the liquid crystal alignment film even if the substrate surface has irregularities.
第１図は本発明による配向膜の製作方法を説明するため
の斜視図、第２図は従来の配向膜の製作方法を説明する
ための斜視図、第３図はTN液晶セルの構造図を示す断面
図である。 11……電子線 13……電子線により熱変形で形成された溝 14……熱可塑性材料FIG. 1 is a perspective view for explaining a method for manufacturing an alignment film according to the present invention, FIG. 2 is a perspective view for explaining a method for manufacturing a conventional alignment film, and FIG. 3 is a structural diagram of a TN liquid crystal cell. FIG. 11 ... Electron beam 13 ... Groove formed by thermal deformation by electron beam 14 ... Thermoplastic material
Claims (3)
脂膜を１ミクロン以下のビーム径に絞った電子線で一定
方向に走査し前記樹脂膜に凹凸を形成する工程よりなる
ことを特徴とする液晶を用いた電気光学装置の製造方
法。1. A method comprising: forming a resin film on a substrate; and forming an unevenness on the resin film by scanning the resin film in a certain direction with an electron beam focused to a beam diameter of 1 micron or less. A method for manufacturing an electro-optical device using a liquid crystal as a feature.
１記載の電気光学装置の製造方法。2. The method according to claim 1, wherein the resin film is a thermoplastic resin.
下の走査である請求項１記載の電気光学装置の製造方
法。3. The method of manufacturing an electro-optical device according to claim 1, wherein the scanning of the electron beam is a scanning with a pitch of 2 μm or less.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2213000A JP3041399B2 (en) | 1990-08-09 | 1990-08-09 | Manufacturing method of electro-optical device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2213000A JP3041399B2 (en) | 1990-08-09 | 1990-08-09 | Manufacturing method of electro-optical device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0497130A JPH0497130A (en) | 1992-03-30 |
| JP3041399B2 true JP3041399B2 (en) | 2000-05-15 |
Family
ID=16631823
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2213000A Expired - Fee Related JP3041399B2 (en) | 1990-08-09 | 1990-08-09 | Manufacturing method of electro-optical device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3041399B2 (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08328005A (en) * | 1995-05-26 | 1996-12-13 | Hitachi Chem Co Ltd | Liquid crystal oriented film, treatment of liquid crystal oriented film, liquid crystal holding substrate, liquid crystal display element, production of liquid crystal display element and material for liquid crystal oriented film |
| TW522260B (en) | 2000-04-03 | 2003-03-01 | Konishiroku Photo Ind | Optical compensation sheet and liquid crystal display |
| WO2002014942A1 (en) * | 2000-08-17 | 2002-02-21 | Corning Incorporated | Method for generating homogenous alignment of liquid crystal materials |
| JP2007025045A (en) * | 2005-07-13 | 2007-02-01 | Sigma Recycle Gijutsu Kenkyusho:Kk | Porous regenerated cellulose film and liquid crystal alignment layer using the same |
| JP5280096B2 (en) * | 2008-05-08 | 2013-09-04 | 三菱レイヨン株式会社 | Method for producing irregularities on the surface of a coating film having a thin metal layer |
-
1990
- 1990-08-09 JP JP2213000A patent/JP3041399B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0497130A (en) | 1992-03-30 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| S533 | Written request for registration of change of name |
Free format text: JAPANESE INTERMEDIATE CODE: R313533 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
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| LAPS | Cancellation because of no payment of annual fees |