JP3036933B2 - Peeling-resistant coated member and method of manufacturing the same - Google Patents
Peeling-resistant coated member and method of manufacturing the sameInfo
- Publication number
- JP3036933B2 JP3036933B2 JP3326528A JP32652891A JP3036933B2 JP 3036933 B2 JP3036933 B2 JP 3036933B2 JP 3326528 A JP3326528 A JP 3326528A JP 32652891 A JP32652891 A JP 32652891A JP 3036933 B2 JP3036933 B2 JP 3036933B2
- Authority
- JP
- Japan
- Prior art keywords
- covering member
- peel
- vapor deposition
- inner layer
- coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
- C04B41/52—Multiple coating or impregnating multiple coating or impregnating with the same composition or with compositions only differing in the concentration of the constituents, is classified as single coating or impregnation
Description
【０００１】[0001]
【産業上の利用分野】本発明は、耐摩耗性，耐食性，耐
熱性及び耐剥離性に優れる被覆部材に関し、具体的に
は、切削工具，耐摩耗工具，機械部品，電気部品等に適
する耐剥離性被覆部材及びその製造方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a covering member having excellent wear resistance, corrosion resistance, heat resistance and peeling resistance. More specifically, the present invention relates to a coating member suitable for cutting tools, wear-resistant tools, mechanical parts, electric parts and the like. The present invention relates to a peelable covering member and a method for producing the same.
【０００２】[0002]
【従来の技術】従来から超硬合金，サーメット，高速度
鋼等の基材の表面に化学蒸着法（ＣＶＤ法）や物理蒸着
法（ＰＶＤ法）でもってセラミックスの被膜を被覆した
被覆材料が実用されている。これらの被覆材料は、基材
の表面に耐摩耗性の優れた被膜を被覆し、被膜の効果を
最大限に発揮させようとしたものである。この被覆材料
に関する提案が多数あり、その代表的なものに特開昭５
９−１１０７７６号公報及び特開昭５９−２５９７２号
公報がある。2. Description of the Related Art Conventionally, a coating material in which a ceramic film is coated on the surface of a base material such as a cemented carbide, a cermet, or a high-speed steel by a chemical vapor deposition method (CVD method) or a physical vapor deposition method (PVD method) is practical. Have been. These coating materials are intended to coat the surface of the substrate with a coating having excellent wear resistance and to maximize the effect of the coating. There have been many proposals regarding this coating material.
JP-A-9-110776 and JP-A-59-25972.
【０００３】[0003]
【発明が解決しようとする課題】特開昭５９−１１０７
７６号公報には、Ｔｉと、周期律表４ａ（Ｔｉは除
く），５ａ，６ａ族金属の一種以上の炭窒化物を硬質相
とし、Ｆｅ，Ｃｏ，Ｎｉ，Ｃｒ，Ｍｏ，Ｗ，Ｔｉ，Ａｌ
の一種以上の金属を結合相とする窒素含有サーメットの
表面に直接Ａｌ2Ｏ3及び／又はＺｒＯ2からなる厚み
０．１〜２０μｍの被膜を被覆した表面被覆焼結硬質合
金が記載されている。Problems to be Solved by the Invention
No. 76 discloses a hard phase of Ti and one or more carbonitrides of metals of the periodic table 4a (excluding Ti), 5a and 6a, and Fe, Co, Ni, Cr, Mo, W, Ti, Al
A surface-coated sintered hard alloy is described in which a surface of a nitrogen-containing cermet having at least one metal as a binder phase is coated directly with a coating of 0.1 to 20 μm of Al 2 O 3 and / or ZrO 2 on the surface. .
【０００４】同公報に記載の表面被覆焼結硬質合金は、
窒素含有サーメットでなる基材の表面に直接Ａｌ2Ｏ3及
び／又はＺｒＯ2からなる被膜を被覆し、被膜の優れた
耐摩耗性の効果を発揮させようとしたものであるが、基
材と被膜との密着性が劣るために耐摩耗性の向上が期待
できないという問題がある。[0004] The surface-coated sintered hard alloy described in the publication is
A coating made of Al 2 O 3 and / or ZrO 2 is directly coated on the surface of a base material made of a nitrogen-containing cermet so as to exert an excellent wear resistance effect of the coating. There is a problem that improvement in wear resistance cannot be expected due to poor adhesion to the coating.
【０００５】特開昭５９−２５９７２号公報には、超硬
合金，サーメット，セラミックスの基材の表面に、Ａｌ
2Ｏ3とＴｉＣ，ＴｉＮ，ＡｌＮ，ＺｒＮ，Ｓｉ3Ｎ4，Ｔ
ｉＯ，ＺｒＯ2から選ばれる１種又はそれ以上からなる
厚み１〜２０μｍの被覆層があり、被覆層中のＡｌ2Ｏ3
含有量が全体の５０〜９９．９％であり、基材に隣接す
る５μｍ以内のＡｌ2Ｏ3含有量が０．１〜２０％である
被覆硬質部材が記載されている。Japanese Patent Application Laid-Open No. 59-25972 discloses that a surface of a cemented carbide, cermet, or ceramic substrate is coated with Al.
2 O 3 and TiC, TiN, AlN, ZrN, Si 3 N 4 , T
There is a coating layer having a thickness of 1 to 20 μm made of one or more selected from iO and ZrO 2 , and Al 2 O 3 in the coating layer
A coated hard member is described in which the content is 50 to 99.9% of the whole and the content of Al 2 O 3 within 5 μm adjacent to the base material is 0.1 to 20%.
【０００６】同公報に記載の被覆硬質部材は、基材の表
面に直接金属酸化物の被膜を形成させずに、基材側の被
膜にはＡｌ2Ｏ3の含有量を少なくし、被膜の表面側には
Ａｌ2Ｏ3の含有量を多くし、基材と被膜との密着性並び
に被加工材と接触する被膜の表面側の耐摩耗性を考慮し
たものであるが、被膜の組成成分の制御が困難であるこ
と、被膜の厚さ制御が困難であること、及び基材と被膜
との密着性の向上が満足できるまで達してないという問
題がある。In the coated hard member described in the publication, the content of Al 2 O 3 is reduced in the coating on the substrate side without directly forming the metal oxide coating on the surface of the substrate, The content of Al 2 O 3 is increased on the surface side, and the adhesion between the substrate and the film and the wear resistance of the surface side of the film in contact with the workpiece are considered. Are difficult to control, the thickness of the coating is difficult to control, and the improvement in the adhesion between the substrate and the coating is not achieved until it is satisfactory.
【０００７】本発明は、上述のような問題点を解決した
もので具体的には、金属，合金又はセラミックス焼結体
の基材の表面に金属間化合物でなる内層と内層の表面に
セラミックスの外層を形成させて、基材と外層との密着
性及び外層の緻密性を高め、耐剥離性，耐摩耗性，強度
に優れるようにした被覆部材及びその製造方法の提供を
目的とする。The present invention has solved the above-mentioned problems, and more specifically, has an inner layer made of an intermetallic compound on a surface of a base material of a metal, an alloy or a ceramic sintered body and a ceramic on the surface of the inner layer. An object of the present invention is to provide a coating member having an outer layer formed thereon to improve the adhesion between a base material and the outer layer and the denseness of the outer layer so as to have excellent peeling resistance, abrasion resistance, and strength, and a method of manufacturing the same.
【０００８】[0008]
【課題を解決するための手段】本発明者は、被覆材料の
強度を低下させずに、被膜と基材との密着性を高めるこ
とについて検討していた所、金属間化合物がセラミック
スの被膜、特に金属酸化物でなるセラミックスの被膜と
の密着性を高めること、セラミックスの被膜の粒成長抑
制及び被膜の緻密性を高めるという知見を得た。本発明
は、この知見に基づいて完成したものである。Means for Solving the Problems The inventors of the present invention have been studying to enhance the adhesion between the coating and the substrate without reducing the strength of the coating material. In particular, it has been found that the adhesiveness to a ceramic film made of a metal oxide is enhanced, the grain growth of the ceramic film is suppressed, and the denseness of the film is increased. The present invention has been completed based on this finding.
【０００９】本発明の耐剥離性被覆部材は、金属，合金
又はセラミックス焼結体の基材にセラミックスの外層を
被覆してなる被覆部材であって、該基材と該外層との間
に物理蒸着法もしくは化学蒸着法により形成させた金属
間化合物でなる内層を介在させたことを特徴とするもの
である。The peeling-resistant covering member of the present invention is a covering member obtained by covering a metal, alloy or ceramics sintered body with a ceramic outer layer, wherein a physical layer is provided between the base material and the outer layer. The present invention is characterized in that an inner layer made of an intermetallic compound formed by a vapor deposition method or a chemical vapor deposition method is interposed.
【００１０】本発明の被覆部材における基材は、具体的
には、例えばＷ，Ｍｏ，Ｔｉ，Ｓｉ等の金属、超硬合
金，サーメット，ステンレス，ハイス，インコネル，ハ
ステロイ等の合金又はＡｌ2Ｏ3系セラミックス焼結体，
ＺｒＯ2系セラミックス焼結体，Ｓｉ3Ｎ4系セラミック
ス焼結体，ＳｉＣ系セラミックス焼結体，ＡｌＮ系セラ
ミックス焼結体を挙げることができる。これらの内、好
ましい基材は、内層の材質との組合わせで選定する必要
があるが、基材と内層との密着性から超硬合金，サーメ
ット，ステンレス，ハイス，耐熱合金，Ａｌ2Ｏ3系セラ
ミックス焼結体，Ｓｉ3Ｎ4系セラミックス焼結体であ
る。The base material of the coating member of the present invention is, for example, a metal such as W, Mo, Ti, or Si, a cemented carbide, an alloy such as cermet, stainless steel, high-speed steel, Inconel, or Hastelloy, or Al 2 O. 3 series ceramic sintered body,
Examples include a ZrO 2 ceramic sintered body, a Si 3 N 4 ceramic sintered body, a SiC ceramic sintered body, and an AlN ceramic sintered body. Of these, a preferable base material needs to be selected in combination with the material of the inner layer. However, from the adhesion between the base material and the inner layer, a cemented carbide, cermet, stainless steel, high-speed steel, heat-resistant alloy, Al 2 O 3 Ceramic sintered body and Si 3 N 4 ceramic sintered body.
【００１１】この基材の表面に形成される内層は、具体
的には、例えばＮｉＳｉ2，ＣｏＳｉ2，ＴｉＳｉ2，Ｍ
ｏＳｉ2，ＷＳｉ2，Ｆｅ3Ａｌ，ＮｉＡｌ，Ｎｉ3Ａｌ，
Ｎｉ3Ｎｂ，ＡｌＣｏ，Ａｌ5Ｃｏ2，Ａｌ9Ｃｏ2，Ａｌ
13Ｃｏ4，Ｃｏ3Ｔｉ，Ｚｒ3Ａｌ，Ｎｉ3Ｓｉ，Ｎｉ
3（Ａｌ，Ｗ），Ｎｉ2（Ａｌ，Ｔｉ），ＴｉＡｌ，Ｔｉ
Ａｌ3，Ｎｂ3Ａｌ，Ｖ3Ｓｉを挙げることができる。こ
の内層は、基材の材質と外層の材質により選定する必要
があるが、Ｆｅ，Ｎｉ，Ｃｏ，Ａｌ，Ｍｏ，Ｃｒ，Ｔ
ｉ，Ｓｉの中の少なくとも２種以上からなる金属間化合
物が好ましく、その厚さは、０．１〜１０μｍ、特に好
ましくは０．２〜５μｍである。この内層は、一部基材
の表面部に拡散した状態になっている場合があり、特に
基材が金属又は合金でなる場合には基材の表面部に拡散
させることが容易となり、この場合は基材と内層との密
着性を高める効果も大きいことから好ましいことであ
る。The inner layer formed on the surface of the base material is, for example, NiSi 2 , CoSi 2 , TiSi 2 , M
oSi 2 , WSi 2 , Fe 3 Al, NiAl, Ni 3 Al,
Ni 3 Nb, AlCo, Al 5 Co 2 , Al 9 Co 2 , Al
13 Co 4 , Co 3 Ti, Zr 3 Al, Ni 3 Si, Ni
3 (Al, W), Ni 2 (Al, Ti), TiAl, Ti
Al 3 , Nb 3 Al and V 3 Si can be mentioned. The inner layer needs to be selected according to the material of the base material and the material of the outer layer, but it is necessary to select Fe, Ni, Co, Al, Mo, Cr, T
Intermetallic compounds composed of at least two of i and Si are preferable, and the thickness thereof is 0.1 to 10 μm, particularly preferably 0.2 to 5 μm. This inner layer may be partially diffused on the surface of the base material, and particularly when the base material is made of metal or alloy, it is easy to diffuse on the surface of the base material. Is preferable because the effect of enhancing the adhesion between the base material and the inner layer is large.
【００１２】この内層の表面に形成される外層は、具体
的には、例えば周期律表４ａ，５ａ，６ａ族金属の炭化
物，窒化物，酸化物，硼化物，Ａｌの窒化物，酸化物，
硼化物，Ｓｉの炭化物，窒化物，酸化物，立方晶窒化硼
素，六方晶窒化硼素，二硫化タングステン，二硫化モリ
ブデン及びこれらの相互固溶体の中の少なくとも１種の
単層もしくは複層からなる外層を挙げることができる。
この外層の厚さは、用途や形状により異なるが、０．１
〜２０μｍ厚さ、特に好ましくは０．５〜１０μｍ厚さ
である。The outer layer formed on the surface of the inner layer may be, for example, carbides, nitrides, oxides, borides, Al nitrides, oxides, and the like of metals of Groups 4a, 5a, and 6a of the periodic table.
Outer layer comprising at least one single layer or multiple layers among borides, carbides of Si, nitrides, oxides, cubic boron nitride, hexagonal boron nitride, tungsten disulfide, molybdenum disulfide and their mutual solid solutions Can be mentioned.
The thickness of the outer layer varies depending on the application and the shape.
The thickness is preferably from 20 to 20 μm, particularly preferably from 0.5 to 10 μm.
【００１３】本発明の被覆部材は、従来から行われてい
る電解メッキ，無電解メッキ，ＣＶＤ法，ＰＶＤ法等の
方法と必要に応じて加熱処理とを組合わせることにより
作製することができるが、次の方法により行うと、バラ
ツキが少なく、安定した特性を有する被覆部材を得るこ
とができる。The covering member of the present invention can be produced by combining conventional methods such as electrolytic plating, electroless plating, CVD method, PVD method and the like and, if necessary, heat treatment. By performing the following method, it is possible to obtain a covering member having little variation and stable characteristics.
【００１４】本発明の被覆部材の製造方法は、金属，合
金又はセラミックス焼結体の基材表面にＰＶＤ法もしく
はＣＶＤ法でもって金属間化合物でなる内層を形成させ
た後、該内層の表面にＰＶＤ法あるいはＣＶＤ法でもっ
てセラミックスの外層を形成させる方法である。The method of manufacturing a coated member according to the present invention is characterized in that an inner layer made of an intermetallic compound is formed on a substrate surface of a metal, alloy or ceramic sintered body by a PVD method or a CVD method, and then the surface of the inner layer is formed. This is a method in which an outer layer of ceramics is formed by a PVD method or a CVD method.
【００１５】本発明の製造方法における内層の形成工程
は、ＣＶＤ法又はＰＶＤ法で作製する他に、必要に応じ
てＣＶＤ法又はＰＶＤ法の後に加熱処理工程を加えて内
層の一部を基材の表面部に拡散させることも好ましいこ
とである。In the step of forming the inner layer in the manufacturing method of the present invention, a part of the inner layer is formed by a heat treatment step after the CVD method or the PVD method, if necessary, in addition to the CVD method or the PVD method. It is also preferable to diffuse the surface.
【００１６】[0016]
【作用】本発明の耐剥離性被覆部材は、内層が基材と外
層との密着性を高める介在的作用をしていること、外層
の粒成長抑制及び異常成長抑制作用をしているものであ
る。The peel-resistant coating member according to the present invention is such that the inner layer has an intervening action to enhance the adhesion between the base material and the outer layer, and has the action of suppressing grain growth and abnormal growth of the outer layer. is there.
【００１７】[0017]
【実施例１】市販されているＳＮＧＮ１２０４１２形状
の超硬合金（ＪＩＳＫ１０相当品ＷＣ−ＴｉＣ−ＴａＣ
−Ｃｏ組成）の基材を用いて、下記の（Ａ）条件のアル
ミナイズ処理を施した後、（Ｂ）条件の被膜形成処理を
行って本発明品１を得た。 （Ａ）アルミナイズ処理条件 温度：１０８０℃，圧力：大気圧，時間：６０ｍｉｎ， 雰囲気ガス：ＡｌＣｌ3 ０．３３ ｌ／ｍｉｎ（約１
４ｖｏｌ％） Ｈ2 １．００ ｌ／ｍｉｎ（約４３ｖｏｌ％） Ａｒ １．００ ｌ／ｍｉｎ（約４３ｖｏｌ％） （Ｂ）被膜形成処理条件 温度：１０８０℃，圧力：１００Ｔｏｒｒ，時間：６０
ｍｉｎ， 雰囲気ガス：ＡｌＣｌ3 ０．２３ ｌ／ｍｉｎ（約４
ｖｏｌ％） Ｈ2 ５．３５ ｌ／ｍｉｎ（約８７ｖｏｌ％） ＣＯ2 ０．３ ｌ／ｍｉｎ（約５ｖｏｌ％） ＨＣｌ ０．２５ ｌ／ｍｉｎ（約４ｖｏｌ％） 比較として、上述の（Ａ）条件のみ除き、他は本発明品
１と同様にして比較品１を得た。Embodiment 1 A commercially available cemented carbide of SNGN 120412 shape (WC-TiC-TaC equivalent to JISK10)
(Co composition), aluminizing treatment under the following condition (A) was performed, and then film forming treatment under the condition (B) was performed to obtain the product 1 of the present invention. (A) Aluminizing treatment conditions: temperature: 1080 ° C., pressure: atmospheric pressure, time: 60 min, atmosphere gas: AlCl 3 0.33 l / min (about 1
4vol%) H 2 1.00 l / min ( about 43vol%) Ar 1.00 l / min ( about 43vol%) (B) film-forming treatment conditions Temperature: 1080 ° C., pressure: 100 Torr, time: 60
min, atmosphere gas: AlCl 3 0.23 l / min (about 4
vol%) H 2 5.35 l / min ( about 87vol%) CO 2 0.3 l / min ( about 5 vol%) as the HCl 0.25 l / min (about 4 vol%) compared, the above (A) Conditions A comparative product 1 was obtained in the same manner as the inventive product 1 except for the above.
【００１８】こうして得た本発明品１及び比較品１を光
学顕微鏡及びＸ線回拆法により調べた所、本発明品１
は、基材表面に約２μｍ厚さのＣｏ−Ａｌの内層と約４
μｍ厚さのＡｌ2Ｏ3の外層とが形成されていた。一方、
比較品１は、基材表面に約４μｍ厚みのＡｌ2Ｏ3層が形
成されていた。When the product 1 of the present invention and the comparative product 1 thus obtained were examined by an optical microscope and X-ray analysis, the product 1 of the present invention was obtained.
Is about 2 μm thick Co-Al inner layer and about 4 μm
An outer layer of Al 2 O 3 having a thickness of μm was formed. on the other hand,
Comparative product 1 had an Al 2 O 3 layer having a thickness of about 4 μm formed on the surface of the substrate.
【００１９】次に、先端径０．２ｍｍＲのダイヤモンド
コーンによるスクラッチテストでもつて被膜の剥離臨界
荷重（被膜が剥離する時の荷重）を求めた所、本発明品
１は、５ｋｇに対し、比較品１は布でこすりつけるとほ
ぼ全面に亘って剥離した。Next, when a critical load for peeling of the coating (load when the coating was peeled) was determined by a scratch test using a diamond cone having a tip diameter of 0.2 mmR, the product 1 of the present invention was compared with 5 kg in comparison with the comparative product. 1 was peeled over almost the entire surface when rubbed with a cloth.
【００２０】[0020]
【実施例２】約１０×１６×５ｍｍ形状のＳＵＳ４４０
Ｃの基材を用いて、実施例１の（Ａ）条件の時間１５ｍ
ｉｎ、（Ｂ）条件の時間６０ｍｉｎとした以外は、それ
ぞれ同条件にて処理して、本発明品２を得た。比較とし
て、（Ａ）条件の処理を除いて、他は本発明品２と同様
にして比較品２を得た。Embodiment 2 SUS440 having a shape of about 10 × 16 × 5 mm
Using the base material of C, the time of 15 m under the condition (A) of Example 1 was used.
Processing was performed under the same conditions except that the time of the in and (B) conditions was set to 60 min, thereby obtaining a product 2 of the present invention. As a comparison, a comparative product 2 was obtained in the same manner as the product 2 of the present invention except for the treatment under the condition (A).
【００２１】こうして得た本発明品２及び比較品２を実
施例１と同様にして調べた所、本発明品２は、基材表面
から約０．２μｍ厚さのＦｅ−Ａｌ，Ｎｉ−Ａｌと判断
される内層と約６μｍ厚さのＡｌ2Ｏ3外層が形成されて
いた。一方比較品２は、基材表面に約６μｍ厚さのＡｌ
2Ｏ3の層が形成されていた。When the product 2 of the present invention and the comparative product 2 thus obtained were examined in the same manner as in Example 1, the product 2 of the present invention was found to have a Fe-Al, Ni-Al An Al 2 O 3 outer layer having a thickness of about 6 μm was formed. On the other hand, the comparative product 2 has an approximately 6 μm thick Al
A layer of 2 O 3 was formed.
【００２２】また、被膜の剥離臨界荷重を求めた所、本
発明品２は、２．５ｋｇであったのに対し、比較品２
は、０．８ｋｇであった。When the critical peeling load of the coating film was determined, the product of the present invention 2 was 2.5 kg, whereas the comparative product 2 was 2.5 kg.
Was 0.8 kg.
【００２３】[0023]
【発明の効果】本発明の耐剥離性被覆部材は、従来の被
覆部材に比べて被膜の耐剥離性が３倍以上も向上すると
いう効果を有している。このことから、本発明の耐剥離
性被覆部材は、従来の被覆部材の使用領域から、さらに
衝撃性又は高負荷の加わるような使用領域にまで効果を
発揮することができる。The peel-resistant coating member of the present invention has an effect that the peel resistance of the coating is improved more than three times as compared with the conventional coating member. From this, the peel-resistant covering member of the present invention can exert an effect from the use region of the conventional covering member to the use region where further impact or high load is applied.
Claims (6)
にセラミックスの外層を被覆してなる被覆部材におい
て、該基材と該外層との間に物理蒸着法もしくは化学蒸
着法により形成させた金属間化合物でなる内層を介在さ
せたことを特徴とする耐剥離性被覆部材。1. A coated member comprising a metal, alloy or ceramic sintered body coated with a ceramic outer layer, formed between the base material and the outer layer by physical vapor deposition or chemical vapor deposition. A peel-resistant covering member comprising an inner layer made of an intermetallic compound.
テンレス，ハイス又は耐熱合金からなることを特徴とす
る請求項１記載の耐剥離性被覆部材。2. The peel-resistant covering member according to claim 1, wherein said base material is made of a hard metal, a cermet, a stainless steel, a high-speed steel or a heat-resistant alloy.
族金属の炭化物，窒化物，酸化物，硼化物，Ａｌの窒化
物，酸化物，硼化物，Ｓｉの炭化物，窒化物，酸化物及
びこれらの相互固溶体の中の少なくとも１種の単層もし
くは複層でなることを特徴とする請求項１記載の耐剥離
性被覆部材。3. The periodic table 4a, 5a, 6a
A single layer or a plurality of at least one of group III metal carbides, nitrides, oxides, borides, Al nitrides, oxides, borides, Si carbides, nitrides, oxides, and mutual solid solutions thereof; 2. The peel-resistant covering member according to claim 1, wherein the covering member comprises a layer.
ｏ，Ａｌ，Ｍｏ，Ｃｒ，Ｔｉ，Ｓｉの中の少なくとも２
種からなることを特徴とする請求項１記載の耐剥離性被
覆部材。4. The method according to claim 1, wherein the intermetallic compound is Fe, Ni, C
at least 2 of o, Al, Mo, Cr, Ti, Si
2. The peel-resistant covering member according to claim 1, comprising a seed.
ことを特徴とする請求項１記載の耐剥離性被覆部材。5. The peel-resistant covering member according to claim 1, wherein said inner layer has a thickness of 0.2 to 5 μm.
材表面に物理蒸着法もしくは化学蒸着法でもって金属間
化合物でなる内層を形成させた後、該内層の表面に物理
蒸着法あるいは化学蒸着法でもってセラミックスの外層
を形成させることを特徴とする耐剥離性被覆部材の製造
方法。6. An inner layer made of an intermetallic compound is formed on a substrate surface of a metal, alloy or ceramic sintered body by a physical vapor deposition method or a chemical vapor deposition method, and then a physical vapor deposition method or a chemical vapor deposition is formed on the surface of the inner layer. A method for producing a peel-resistant covering member, comprising forming an outer layer of ceramic by a method.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3326528A JP3036933B2 (en) | 1991-11-14 | 1991-11-14 | Peeling-resistant coated member and method of manufacturing the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3326528A JP3036933B2 (en) | 1991-11-14 | 1991-11-14 | Peeling-resistant coated member and method of manufacturing the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH05140763A JPH05140763A (en) | 1993-06-08 |
| JP3036933B2 true JP3036933B2 (en) | 2000-04-24 |
Family
ID=18188842
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3326528A Expired - Fee Related JP3036933B2 (en) | 1991-11-14 | 1991-11-14 | Peeling-resistant coated member and method of manufacturing the same |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3036933B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8182911B2 (en) | 2006-03-28 | 2012-05-22 | Kyocera Corporation | Cutting tool, manufacturing method thereof and cutting method |
-
1991
- 1991-11-14 JP JP3326528A patent/JP3036933B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH05140763A (en) | 1993-06-08 |
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