JP3006188B2 - High frequency dielectric ceramic composition - Google Patents

High frequency dielectric ceramic composition

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Publication number
JP3006188B2
JP3006188B2 JP3201274A JP20127491A JP3006188B2 JP 3006188 B2 JP3006188 B2 JP 3006188B2 JP 3201274 A JP3201274 A JP 3201274A JP 20127491 A JP20127491 A JP 20127491A JP 3006188 B2 JP3006188 B2 JP 3006188B2
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JP
Japan
Prior art keywords
high frequency
dielectric ceramic
sample
ceramic composition
temperature
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JP3201274A
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Japanese (ja)
Other versions
JPH0524904A (en
Inventor
本 宏 之 松
村 博 田
浪 直 勝 藤
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Murata Manufacturing Co Ltd
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Murata Manufacturing Co Ltd
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Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】この発明は高周波用誘電体磁器組
成物に関し、特に、たとえばマイクロ波やミリ波などの
高周波領域において誘電体共振器やMIC用誘電体基板
などに用いられる誘電体磁器を得ることができる、高周
波用誘電体磁器組成物に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a high frequency dielectric ceramic composition, and more particularly, to a dielectric ceramic used for a dielectric resonator or a MIC dielectric substrate in a high frequency region such as a microwave or a millimeter wave. The present invention relates to a high frequency dielectric ceramic composition that can be obtained.

【0002】[0002]

【従来の技術】従来、高周波用誘電体磁器組成物として
は、たとえば特公平2−60628号公報に開示されて
いるように、Ba〔(ZnX Mg1-X 1/3 (NbY
1-Y 2/3 〕O3 の一般式で表され、0≦X≦0.9
5、0≦Y≦0.4の範囲にあり、酸化バナジウムをV
2 5 換算で0.05〜2モル%含有させてなる組成物
があった。
2. Description of the Related Art Conventionally, as a high frequency dielectric porcelain composition, for example, as disclosed in Japanese Patent Publication No. 2-60628, Ba [(Zn x Mg 1 -x) 1/3 (Nb Y T
a 1-Y ) 2/3 ] O 3 , where 0 ≦ X ≦ 0.9
5, in the range of 0 ≦ Y ≦ 0.4, Vanadium oxide is V
There was a composition containing 0.05 to 2 mol% in terms of 2 O 5 .

【0003】また、特開昭60−124305号公報に
開示されているように、Ba(Sn X MgY TaZ )O
7/2-X/2-3Y/2(ただし、X+Y+Z=1)の一般式で表
され、0.04≦X≦0.26、0.23≦Y≦0.3
1、0.51≦Z≦0.65の範囲にある組成物があっ
た。
Further, Japanese Patent Application Laid-Open No. Sho 60-124305 discloses
As disclosed, Ba (Sn XMgYTaZ) O
7 / 2-X / 2-3Y / 2(However, X + Y + Z = 1)
0.04 ≦ X ≦ 0.26, 0.23 ≦ Y ≦ 0.3
1, there is a composition in the range of 0.51 ≦ Z ≦ 0.65.
Was.

【0004】これらの高周波用誘電体磁器組成物は、高
周波領域において大きな比誘電率と高いQ値とを有し、
共振周波数の温度係数が良好な誘電体磁器の材料であ
る。
[0004] These high frequency dielectric ceramic compositions have a large relative permittivity and a high Q value in a high frequency range,
This is a dielectric ceramic material having a good temperature coefficient of resonance frequency.

【0005】[0005]

【発明が解決しようとする課題】しかしながら、最近で
は使用する周波数領域がさらに高くなってきており、同
時に通信機器などの小型化の要求が強まっている。その
ため、これに対応して、さらに高いQ値と大きな比誘電
率とを有する材料が要求されている。また、前記の従来
の材料は、焼結に1600℃程度の高温が必要であり、
省エネルギの見地から不利であった。
However, recently, the frequency range to be used has been further increased, and at the same time, the demand for miniaturization of communication devices and the like has been increasing. Accordingly, there is a demand for a material having a higher Q value and a higher relative dielectric constant. In addition, the above conventional materials require a high temperature of about 1600 ° C. for sintering,
It was disadvantageous from the viewpoint of energy saving.

【0006】それゆえに、この発明の主たる目的は、高
周波領域において優れた温度係数を有するとともにさら
に高いQ値と大きな比誘電率とを有する誘電体磁器を得
ることができ、より低温で焼成可能な、高周波用誘電体
磁器組成物を提供することである。
Therefore, a main object of the present invention is to provide a dielectric ceramic having an excellent temperature coefficient in a high frequency region, a higher Q value and a large relative permittivity, and which can be fired at a lower temperature. Another object of the present invention is to provide a high frequency dielectric ceramic composition.

【0007】[0007]

【課題を解決するための手段】この発明は、一般式をB
X SnY ZrZ ZnU NiV MgK NbL TaM W
(ただし、X+Y+Z+U+V+K+L+M=1、Wは
任意)と表したとき、X,Y,Z,U,V,K,L,M
がそれぞれ0.491≦X≦0.504、0≦Y≦0.
102、0≦Z≦0.075、0.021≦U≦0.1
56、0≦V≦0.050、0≦K≦0.127、0≦
L≦0.071、0.220≦M≦0.329(ただ
し、YとZが同時に0でなく、かつ、Y,Z,V,K,
Lのうち3つ以上が同時に0でない)範囲にある、高周
波用誘電体磁器組成物である。
According to the present invention, the general formula is represented by B
a X Sn Y Zr Z Zn U Ni V Mg K Nb L Ta M O W
(However, X + Y + Z + U + V + K + L + M = 1, W is arbitrary), X, Y, Z, U, V, K, L, M
Are 0.491 ≦ X ≦ 0.504, 0 ≦ Y ≦ 0.
102, 0 ≦ Z ≦ 0.075, 0.021 ≦ U ≦ 0.1
56, 0 ≦ V ≦ 0.050, 0 ≦ K ≦ 0.127, 0 ≦
L ≦ 0.071, 0.220 ≦ M ≦ 0.329 (where Y and Z are not 0 at the same time, and Y, Z, V, K,
Wherein three or more of L are not simultaneously 0).

【0008】ここで、上述の一般式のNiの一部または
全部をCoで置換し、Nbの一部または全部をSbで置
換してもよい。
Here, in the above general formula, part or all of Ni may be replaced with Co, and part or all of Nb may be replaced with Sb.

【0009】さらに、0〜3モル%の範囲でCaを添加
してもよい。
Further, Ca may be added in the range of 0 to 3 mol%.

【0010】[0010]

【発明の効果】この発明によれば、マイクロ波帯域にお
いてさらに高いQ値が得られ、しかも大きな比誘電率を
有し、共振周波数の温度係数が良好で、1〜20GHz
の広い範囲で使用可能な誘電体磁器を得ることができ
る、高周波用誘電体磁器組成物が得られる。しかも、こ
の発明にかかる組成物は、従来の組成物より低い温度で
優れた誘電特性を得ることができ、電気炉などの負担が
低減され、省エネルギの効果が大である。
According to the present invention, a higher Q value can be obtained in a microwave band, a large relative dielectric constant, a good temperature coefficient of resonance frequency, and 1 to 20 GHz.
Thus, a dielectric ceramic composition for high frequency can be obtained, which can be used for a wide range of dielectric ceramics. In addition, the composition according to the present invention can obtain excellent dielectric properties at a lower temperature than conventional compositions, reduce the burden on an electric furnace and the like, and have a large energy saving effect.

【0011】この発明の上述の目的,その他の目的,特
徴および利点は、以下の実施例の詳細な説明から一層明
らかとなろう。
The above and other objects, features and advantages of the present invention will become more apparent from the following detailed description of the embodiments.

【0012】[0012]

【実施例】まず、原料として、高純度のBaCO3 ,S
nO2 ,ZrO2 ,ZnO,NiO,MgCO3 ,Nb
2 5 ,Ta2 5 ,CoCO3 ,Sb2 3 およびC
aCO3 を準備した。これらの原料を表1,表2,表3
および表4に示す組成が得られるように秤量し、ボール
ミルで16時間湿式混合して混合物を得た。この混合物
を乾燥した後、1300℃で3時間仮焼して仮焼物を得
た。この仮焼物を水および有機バインダとともにボール
ミルに入れ、4時間湿式粉砕して粉砕物を得た。この粉
砕物を乾燥した後、50メッシュの網を通して造粒し、
得られた粉末を2000kg/cm2 の圧力で直径12
mm、厚さ5mmの円板状に成形して成形物を得た。こ
の成形物を1450〜1650℃で4〜10時間焼成し
て各試料を得た。
EXAMPLE First, high-purity BaCO 3 , S
nO 2 , ZrO 2 , ZnO, NiO, MgCO 3 , Nb
2 O 5 , Ta 2 O 5 , CoCO 3 , Sb 2 O 3 and C
aCO 3 was prepared. These raw materials are shown in Tables 1, 2 and 3.
Then, the mixture was weighed so that the composition shown in Table 4 was obtained, and wet-mixed with a ball mill for 16 hours to obtain a mixture. After drying this mixture, it was calcined at 1300 ° C. for 3 hours to obtain a calcined product. This calcined product was put into a ball mill together with water and an organic binder and wet-pulverized for 4 hours to obtain a pulverized product. After drying this pulverized material, it is granulated through a 50-mesh net,
The obtained powder was crushed at a pressure of 2000 kg / cm 2 to a diameter of 12 kg / cm 2.
It was molded into a disk having a thickness of 5 mm and a thickness of 5 mm to obtain a molded product. This molded product was fired at 1450 to 1650 ° C. for 4 to 10 hours to obtain each sample.

【0013】得られた試料について、周波数10GHz
において比誘電率εr、Q値および共振周波数の温度特
性τf ( ppm/℃)を測定した。それらの測定結果を表
1,表2,表3および表4に示す。なお、表中、番号に
*印を付した試料はこの発明の範囲外のものであり、そ
れ以外はこの発明の範囲内のものである。
With respect to the obtained sample, a frequency of 10 GHz
, The relative dielectric constant εr, the Q value, and the temperature characteristic τ f (ppm / ° C.) of the resonance frequency were measured. The measurement results are shown in Tables 1, 2, 3 and 4. In the table, samples with an asterisk (*) are out of the scope of the present invention, and the others are within the scope of the present invention.

【0014】[0014]

【表1】 [Table 1]

【表2】 [Table 2]

【表3】 [Table 3]

【表4】 [Table 4]

【0015】次に、この発明においてBaX SnY Zr
Z ZnU NiV MgK NbL TaM W (ただし、X+
Y+Z+U+V+K+L+M=1、Wは任意)で表され
る組成の範囲を限定した理由について、表1,表2,表
3および表4に基づいて説明する。
Next, according to the present invention, Ba X Sn Y Zr
Z Zn U Ni V Mg K Nb L Ta M OW (However, X +
The reason for limiting the range of the composition represented by Y + Z + U + V + K + L + M = 1, W is arbitrary) will be described based on Tables 1, 2, 3 and 4.

【0016】(1)試料番号5のように、Xが0.49
1より小さい場合には、Q値が小さくなり好ましくな
い。また、試料番号1のように、Xが0.504より大
きい場合には、焼結が不安定になり好ましくない。
(1) As shown in sample number 5, X is 0.49
When it is smaller than 1, the Q value becomes small, which is not preferable. If X is larger than 0.504 as in sample No. 1, sintering becomes unstable, which is not preferable.

【0017】(2)試料番号11のように、Yが0.1
02より大きい場合には、比誘電率εrが小さくなり好
ましくない。
(2) As shown in sample number 11, Y is 0.1
If it is larger than 02, the relative permittivity εr becomes small, which is not preferable.

【0018】(3)試料番号13のように、Zが0.0
75より大きい場合には、共振周波数の温度特性τf
正側に大きくなり好ましくない。
(3) As shown in sample number 13, Z is 0.0
If it is larger than 75, the temperature characteristic τ f of the resonance frequency becomes unfavorably large on the positive side.

【0019】(4)試料番号14のように、Uが0.0
21より小さい場合には、比誘電率εrが小さくなり好
ましくない。また、試料番号21のように、Uが0.1
56より大きい場合には、Q値が小さくなり好ましくな
い。
(4) As shown in sample number 14, U is 0.0
If it is smaller than 21, the relative permittivity εr becomes small, which is not preferable. Further, as shown in sample number 21, U is 0.1
If it is larger than 56, the Q value becomes small, which is not preferable.

【0020】(5)試料番号22のように、Vが0.0
50より大きい場合には、比誘電率εrが小さくなり好
ましくない。
(5) As shown in sample number 22, V is 0.0
If it is larger than 50, the relative permittivity εr becomes small, which is not preferable.

【0021】(6)試料番号14のように、Kが0.1
27より大きい場合には、比誘電率εrが小さくなり好
ましくない。
(6) As shown in sample number 14, K is 0.1
If it is larger than 27, the relative permittivity εr becomes small, which is not preferable.

【0022】(7)試料番号25のように、Lが0.0
71より大きい場合には、共振周波数の温度特性τf
正側に大きくなり好ましくない。
(7) As shown in sample number 25, L is 0.0
If it is larger than 71, the temperature characteristic τ f of the resonance frequency is undesirably large on the positive side.

【0023】(8)試料番号27のように、Mが0.2
20より小さい場合には、共振周波数の温度特性τf
正側に大きくなり好ましくない。また、試料番号26の
ように、Mが0.329より大きい場合には、Q値が小
さくなり好ましくない。
(8) As shown in sample number 27, M is 0.2
If it is smaller than 20, the temperature characteristic τ f of the resonance frequency becomes undesirably large on the positive side. Further, when M is larger than 0.329 as in sample No. 26, the Q value becomes small, which is not preferable.

【0024】それに対して、この発明によれば、マイク
ロ波帯域で大きい比誘電率と高いQ値とを有し1〜20
GHz帯までの広い範囲での使用が可能な高周波用の誘
電体磁器を得ることができる、高周波用誘電体磁器組成
物が得られる。しかも、この発明にかかる高周波用誘電
体磁器組成物からは、共振周波数の温度特性が良好な誘
電体磁器を得ることができる。
On the other hand, according to the present invention, it has a large relative dielectric constant and a high Q value in the microwave band, and
A high frequency dielectric porcelain composition that can obtain a high frequency dielectric porcelain that can be used in a wide range up to the GHz band is obtained. Moreover, from the dielectric ceramic composition for high frequencies according to the present invention, it is possible to obtain a dielectric ceramic having good temperature characteristics of the resonance frequency.

【0025】表2は種々の条件で焼成した試料の誘電特
性を示す。
Table 2 shows the dielectric properties of the samples fired under various conditions.

【0026】(9)試料番号30のように、X,Y,
Z,U,V,K,L,Mが上記の組成幅にあるが、Z,
VおよびLが同時に0の場合には、1600℃の焼成温
度では優れた誘電特性を有するが、1550℃の焼成温
度ではQ値が小さくなり好ましくない。
(9) X, Y,
Z, U, V, K, L, and M are in the above composition range.
When V and L are both 0 at the same time, the sintering temperature of 1600 ° C. has excellent dielectric properties, but the sintering temperature of 1550 ° C. is not preferable because the Q value becomes small.

【0027】(10)試料番号31のように、Uが0.
021より小さく、Kが0.127より大きく、U,V
およびLが同時に0の場合には、1600℃の焼成温度
では優れた誘電特性を有するが、1550℃の焼成温度
ではQ値が小さくなり好ましくない。
(10) As shown in sample No. 31, U is equal to 0.
021, K is larger than 0.127, U, V
When L and L are both 0 at the same time, the sintering temperature of 1600 ° C has excellent dielectric properties, but the sintering temperature of 1550 ° C undesirably results in a small Q value.

【0028】(11)試料番号32のように、Uが0.
021より小さく、Kが0.127より大きく、Y,
Z,UおよびVが同時に0の場合には、1600℃以下
の焼成温度ではQ値が小さくなり好ましくない。
(11) As shown in sample No. 32, U is equal to 0.
021, K is larger than 0.127, and Y,
When Z, U and V are simultaneously 0, the calcination temperature of 1600 ° C. or lower undesirably reduces the Q value.

【0029】(12)試料番号33のように、Yが0.
102より大きく、Lが0.071より大きく、Mが
0.220より小さく、Z,V,KおよびMが同時に0
の場合には、1500℃以下の焼成温度でも大きな比誘
電率εrを有し、共振周波数の温度特性τf が良好であ
るが、Q値が小さくなり好ましくない。
(12) As shown in sample number 33, Y is equal to 0.
Greater than 102, L is greater than 0.071, M is less than 0.220, and Z, V, K and M are simultaneously 0
In the case of (1), the material has a large relative dielectric constant εr even at a sintering temperature of 1500 ° C. or less, and the temperature characteristic τ f of the resonance frequency is good, but the Q value is undesirably small.

【0030】(13)試料番号34のように、Uが0.
021より小さく、Kが0.127より大きく、Y,
Z,UおよびMが同時に0の場合には、比誘電率εrが
小さくなり好ましくない。
(13) As shown in sample number 34, U is equal to 0.
021, K is larger than 0.127, and Y,
When Z, U and M are simultaneously 0, the relative dielectric constant εr is undesirably small.

【0031】それに対して、試料番号28および試料番
号29のように、この発明にかかる高周波用誘電体磁器
組成物では、焼成温度が1650℃〜1500℃の広い
温度域でも、大きい比誘電率と高いQ値とを有し、さら
に共振周波数の温度特性τf が良好な高周波用の誘電体
磁器を得ることができる。
On the other hand, as shown in Sample No. 28 and Sample No. 29, the high frequency dielectric ceramic composition according to the present invention has a large relative dielectric constant even in a wide temperature range of 1650 ° C. to 1500 ° C. It is possible to obtain a high frequency dielectric ceramic having a high Q value and a good resonance frequency temperature characteristic τ f .

【0032】表3はこの発明にかかる高周波用誘電体磁
器組成物のNi,NbをそれぞれCo,Sbで置換した
試料の誘電特性を示す。
Table 3 shows the dielectric properties of samples of the high frequency dielectric ceramic composition according to the present invention in which Ni and Nb were replaced by Co and Sb, respectively.

【0033】(14)試料番号35および試料番号36
のように、Niの一部または全部をCoで置換した場合
には、焼成温度が1600℃〜1500℃の広い温度域
でも、大きい比誘電率と高いQ値とを有し、さらに共振
周波数の温度特性τf が良好である。
(14) Sample No. 35 and Sample No. 36
In the case where part or all of Ni is replaced with Co, as described above, the sintering temperature has a large relative dielectric constant and a high Q value even in a wide temperature range of 1600 ° C. to 1500 ° C. The temperature characteristics τ f are good.

【0034】(15)試料番号37および試料番号38
のように、Nbの一部または全部をSbで置換した場合
には、焼成温度が1600℃〜1500℃の広い温度域
でも、大きい比誘電率と高いQ値とを有し、さらに共振
周波数の温度特性τf が良好である。
(15) Sample No. 37 and Sample No. 38
When a part or all of Nb is replaced with Sb as described above, even when the sintering temperature is as wide as 1600 ° C. to 1500 ° C., it has a large relative dielectric constant and a high Q value, and further has a resonance frequency. The temperature characteristics τ f are good.

【0035】(16)試料番号39および試料番号40
のように、Niの一部または全部をCoで、かつNbの
一部または全部をSbで置換した場合には、焼成温度が
1600℃〜1500℃の広い温度域でも、大きい比誘
電率と高いQ値とを有し、さらに共振周波数の温度特性
τf が良好である。
(16) Sample No. 39 and Sample No. 40
When part or all of Ni is replaced with Co and part or all of Nb is replaced with Sb as in the above, a large relative dielectric constant and a high dielectric constant are obtained even in a wide temperature range of 1600 ° C. to 1500 ° C. And the temperature characteristic τ f of the resonance frequency is good.

【0036】表4はCaを添加した試料の誘電特性を示
す。
Table 4 shows the dielectric properties of the samples to which Ca was added.

【0037】(17)試料番号43のように、Caの添
加量が3モル%より大きい場合には、共振周波数の温度
特性τf が正側に大きくなり好ましくない。
(17) If the amount of Ca added is more than 3 mol% as in sample No. 43, the temperature characteristic τ f of the resonance frequency becomes undesirably large on the positive side.

【0038】それに対して、試料番号41および試料番
号42のように、この発明にかかる高周波用誘電体磁器
組成物では、焼成温度が1600℃〜1500℃の広い
温度域でも、大きい比誘電率と高いQ値とを有し、さら
に共振周波数の温度特性τf が良好な高周波用の誘電体
磁器を得ることができる。
On the other hand, as shown in Sample No. 41 and Sample No. 42, the high frequency dielectric ceramic composition according to the present invention has a large relative dielectric constant even in a wide temperature range of 1600 ° C. to 1500 ° C. It is possible to obtain a high frequency dielectric ceramic having a high Q value and a good resonance frequency temperature characteristic τ f .

フロントページの続き (56)参考文献 特開 昭63−222065(JP,A) (58)調査した分野(Int.Cl.7,DB名) C04B 35/00 Continuation of the front page (56) References JP-A-62-222065 (JP, A) (58) Fields investigated (Int. Cl. 7 , DB name) C04B 35/00

Claims (3)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 一般式をBaX SnY ZrZ ZnU Ni
V MgK NbLTaM W (ただし、X+Y+Z+U+
V+K+L+M=1、Wは任意)と表したとき、X,
Y,Z,U,V,K,L,Mがそれぞれ0.491≦X
≦0.504、0≦Y≦0.102、0≦Z≦0.07
5、0.021≦U≦0.156、0≦V≦0.05
0、0≦K≦0.127、0≦L≦0.071、0.2
20≦M≦0.329(ただし、YとZが同時に0でな
く、かつ、Y,Z,V,K,Lのうち3つ以上が同時に
0でない)範囲にある、高周波用誘電体磁器組成物。
The method according to claim 1 of the general formula Ba X Sn Y Zr Z Zn U Ni
V Mg K Nb L Ta M OW (However, X + Y + Z + U +
V + K + L + M = 1, W is arbitrary), X,
Y, Z, U, V, K, L, M are each 0.491 ≦ X
≤0.504, 0≤Y≤0.102, 0≤Z≤0.07
5, 0.021 ≦ U ≦ 0.156, 0 ≦ V ≦ 0.05
0, 0 ≦ K ≦ 0.127, 0 ≦ L ≦ 0.071, 0.2
20 ≦ M ≦ 0.329 (However, if Y and Z are
And three or more of Y, Z, V, K, and L are not simultaneously 0).
【請求項2】 前記一般式のNiの一部または全部をC
oで置換し、Nbの一部または全部をSbで置換した、
請求項1の高周波用誘電体磁器組成物。
2. A method according to claim 1, wherein a part or all of Ni in the general formula is C.
o, and part or all of Nb was replaced with Sb.
The dielectric ceramic composition for high frequencies according to claim 1.
【請求項3】 さらに、0〜3モル%のCaを添加し
た、請求項1または請求項2の高周波用誘電体磁器組成
物。
3. The high frequency dielectric ceramic composition according to claim 1, further comprising 0 to 3 mol% of Ca.
JP3201274A 1991-07-15 1991-07-15 High frequency dielectric ceramic composition Expired - Lifetime JP3006188B2 (en)

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JP3201274A JP3006188B2 (en) 1991-07-15 1991-07-15 High frequency dielectric ceramic composition

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JP3006188B2 true JP3006188B2 (en) 2000-02-07

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6720280B2 (en) 2001-06-20 2004-04-13 Ngk Spark Plug Co., Ltd. Dielectric composition for high frequency resonators

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE112005000009B4 (en) * 2004-03-31 2013-10-24 Murata Manufacturing Co., Ltd. Translucent ceramics, methods of making translucent ceramics, use of translucent ceramics for an optical device, and an optical device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6720280B2 (en) 2001-06-20 2004-04-13 Ngk Spark Plug Co., Ltd. Dielectric composition for high frequency resonators

Also Published As

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