JP3001781B2 - Composite heat-resistant material mainly composed of MoSi2 - Google Patents

Composite heat-resistant material mainly composed of MoSi2

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Publication number
JP3001781B2
JP3001781B2 JP6243428A JP24342894A JP3001781B2 JP 3001781 B2 JP3001781 B2 JP 3001781B2 JP 6243428 A JP6243428 A JP 6243428A JP 24342894 A JP24342894 A JP 24342894A JP 3001781 B2 JP3001781 B2 JP 3001781B2
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JP
Japan
Prior art keywords
film
mosi
substrate
resistant material
composite heat
Prior art date
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JP6243428A
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Japanese (ja)
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JPH0881785A (en
Inventor
護 北條
一郎 澤村
晧嗣 北野
篤志 福嶋
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Eneos Corp
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Japan Energy Corp
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Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は、MoSi2 又はMoS
2 を主成分として70%以上含む基材を主体とする複
合耐熱材料に関するものであり、特にはMoSi2 基材
の酸化を防止するようにその上に保護皮膜を形成した複
合耐熱材料に関する。
This invention relates to MoSi 2 or MoS
i 2 relates composite refractory material mainly a substrate comprising 70% or more as a main component, in particular to a composite refractory material to form a protective coating on thereon to prevent oxidation of MoSi 2 substrate.

【0002】[0002]

【従来の技術】MoSi2 は1000〜1700℃の高
温において、酸化性雰囲気下で連続した保護性のSiO
2 皮膜を形成し、優れた耐酸化性を示す。このため超高
温耐熱構造材料として注目されている。しかし、その幾
つかの温度範囲での酸化挙動は異なり、300〜600
℃の低温ではSiO2 皮膜が形成されず急激に酸化が進
行し、元々バルクだったものが短時間のうちに酸化物粉
末になってしまい、これはペスト現象と呼ばれ、よく知
られている。
2. Description of the Related Art MoSi 2 is a high-temperature, high-temperature, 1000-1700 ° C., SiO.sub.
2 Form a film and show excellent oxidation resistance. For this reason, it is attracting attention as an ultra-high temperature heat-resistant structural material. However, its oxidation behavior in some temperature ranges is different, 300-600
At a low temperature of ° C., the SiO 2 film is not formed and oxidation proceeds rapidly, and what was originally bulk becomes oxide powder in a short time, which is called the plague phenomenon and is well known. .

【0003】例えば、D.A.Berztissらによ
る、「Materials Science Engi
neering」A155(1992)165〜181
頁に掲載された論文は、溶解法で製造したMoSi2
料とMoSi2 粉末をHIPして作ったMoSi2 材料
の500℃における酸化挙動を比較している。溶解法に
よるMoSi2 には微小亀裂が存在しており密度が低
く、HIP法によるものと比べ酸化速度が大きい。HI
P法によるMoSi2 は密度が高く、溶解法によるもの
に比べて酸化速度が小さい。この事実から、低温酸化を
遅くするには密度を高くしたほうがよいと広く提唱され
ている。しかしながらHIP法によるMoSi2 でも遅
くはなっても酸化は進行し、非保護性のMoO3 が形成
される。加えて、密度が高くなると靭性が低くなり、耐
熱衝撃性が悪くなってしまう。Berztissらは更
に、高温で形成されたSiO2 皮膜の500℃における
耐酸化性を評価しているが、70〜100hrでSiO
2 皮膜が剥離してしまい、酸化防止効果が持続しない。
[0003] For example, D. A. "Materials Science Engi" by Berztis et al.
nearing "A155 (1992) 165-181
Page papers published in the compares the oxidation behavior at 500 ° C. of MoSi 2 material a MoSi 2 Materials and MoSi 2 powder produced was made by HIP at dissolution method. MoSi 2 produced by the dissolution method has small cracks and a low density, and has a higher oxidation rate than that produced by the HIP method. HI
MoSi 2 obtained by the P method has a high density and a lower oxidation rate than that obtained by the dissolution method. From this fact, it has been widely proposed that a higher density is better to slow the low temperature oxidation. However, even with MoSi 2 by the HIP method, oxidation proceeds even if it is slow, and unprotected MoO 3 is formed. In addition, the higher the density, the lower the toughness and the lower the thermal shock resistance. Further evaluated the oxidation resistance of the SiO 2 film formed at high temperature at 500 ° C.
(2) The coating peels off and the antioxidant effect is not maintained.

【0004】Al溶射による皮膜は、耐酸化性皮膜とし
て幅広く種々の材料に適用されており、MoSi2 やM
oSi2 を70vol%以上含む複合材料に対してもあ
る程度の効果は期待できるが、緻密な溶射膜が作りにく
いこともあり完全とはいえない。高温で予備酸化してS
iO2 皮膜をつけておくことも提唱されたが、短時間の
うちに剥離し、その効果は十分でない。
[0004] Coatings by thermally sprayed Al is applied to the wide variety of materials as oxidation-resistant film, MoSi 2 and M
Although a certain effect can be expected for a composite material containing 70% by volume or more of oSi 2 , it is difficult to form a dense sprayed film, and it is not perfect. Pre-oxidation at high temperature
It has also been suggested that an iO 2 film be applied, but it peels off in a short time, and its effect is not sufficient.

【0005】[0005]

【発明が解決しようとする課題】上述したように、Mo
Si2 は高温、酸化性雰囲気下で保護性のSiO2 皮膜
を形成し、優れた耐酸化性を示すため超高温耐熱構造材
料として注目されているが、ペスト現象により、300
〜600℃の低温ではSiO2 皮膜が形成されず急激に
酸化が進行し、元々バルクだったものが短時間のうちに
酸化物粉末になってしまう。それゆえ、MoSi2 より
なる超高温耐熱構造のうち少なくとも300〜600℃
の低温に曝露される部分には何らかの酸化防止処理が必
要である。従来、この目的のために、MoSi2 を高密
度化すること、Al溶射による皮膜を形成すること、高
温で予備酸化してSiO2 皮膜をつけておくことなどの
手法が提唱されてきたが、高密度化した場合、靭性が低
下し耐熱衝撃性が低くなってしまう。また製造方法が制
限されることになり、製造コストが高くなってしまうこ
とも考えられる。Al溶射による皮膜は緻密な溶射膜が
作りにくい。予備酸化によるSiO2 皮膜は短時間のう
ちに剥離してしまい、長期間使用されるような部材には
有効ではない。
SUMMARY OF THE INVENTION As described above, Mo
Since Si 2 forms a protective SiO 2 film in a high-temperature, oxidizing atmosphere and exhibits excellent oxidation resistance, it is attracting attention as an ultra-high-temperature heat-resistant structural material.
At a low temperature of -600 ° C., the SiO 2 film is not formed, and oxidation proceeds rapidly, and what was originally bulk becomes oxide powder in a short time. Therefore, at least 300 to 600 ° C. of the ultra-high-temperature heat-resistant structure made of MoSi 2
The parts exposed to low temperatures require some antioxidant treatment. Conventionally, for this purpose, techniques such as increasing the density of MoSi 2 , forming a coating by Al spraying, and pre-oxidizing at a high temperature to form a SiO 2 coating have been proposed. When the density is increased, the toughness decreases and the thermal shock resistance decreases. In addition, the manufacturing method is limited, which may increase the manufacturing cost. It is difficult to form a dense sprayed film by the Al sprayed film. SiO 2 film by the preliminary oxidation will be peeled off in a short time, not effective for members such as used for a long time.

【0006】本発明の課題は、MoSi2 材料にその組
織、製造方法を問わず、長期間有効な低温酸化防止能を
付与する技術を確立することである。
An object of the present invention is to establish a technique for imparting a long-term effective low-temperature oxidation preventing ability to MoSi 2 material irrespective of its structure and manufacturing method.

【0007】[0007]

【課題を解決するための手段】本発明者は、鋭意研究の
結果、MoSi2 材料に0.1μm以上の厚みを有す
る、Cr、Ni、Rh、Ir、Pt及びAuから選択さ
れた耐酸化性に優れる金属の緻密な保護皮膜を形成する
ことにより長期間有効な低温酸化防止能を付与しうるこ
とを見いだした。この知見に基づいて、本発明は、Mo
Si2 基材又はMoSi2 を主成分として70%以上含
む基材と、該基材の少なくとも一部上に形成されそして
0.1μm以上の厚みを有する、Cr、Ni、Rh、I
r、Pt及びAuから選択された金属の、耐酸化性に優
れる緻密な保護皮膜とから構成されることを特徴とする
複合耐熱材料を提供する。保護皮膜上にAl溶射膜を形
成することも有益である。好ましくは、耐酸化性に優れ
る金属の緻密な保護皮膜は溶射皮膜、めっき皮膜または
イオンプレーティング皮膜である。
Means for Solving the Problems The present inventor has conducted intensive studies and found that the MoSi 2 material has an oxidation resistance selected from Cr, Ni, Rh, Ir, Pt and Au having a thickness of 0.1 μm or more. It has been found that by forming a dense protective film of a metal having excellent resistance, a low-temperature antioxidant ability that is effective for a long period of time can be imparted. Based on this finding, the present invention provides Mo
A Si 2 substrate or a substrate containing 70% or more of MoSi 2 as a main component; and Cr, Ni, Rh, I formed on at least a part of the substrate and having a thickness of 0.1 μm or more.
Provided is a composite heat-resistant material comprising a metal selected from r, Pt, and Au, and a dense protective film having excellent oxidation resistance. It is also beneficial to form an Al sprayed coating on the protective coating. Preferably, the dense protective coating of a metal having excellent oxidation resistance is a thermal spray coating, a plating coating, or an ion plating coating.

【0008】[0008]

【作用】0.1μm以上の厚みを有する、Cr、Ni、
Rh、Ir、Pt及びAuから選択された金属の、耐酸
化性に優れる緻密な保護皮膜は、その厚みと協同して、
酸素の基材までの浸透を防止するバリヤー層として作用
し、ペスト現象を防止する。本発明の処理を施すことに
より、低密度のMoSi2 でも450℃、大気中で30
0時間以上さらされてもMoO3 の発生が見られなくな
る。
Effect: Cr, Ni, having a thickness of 0.1 μm or more
A dense protective film of a metal selected from Rh, Ir, Pt and Au, which has excellent oxidation resistance, cooperates with its thickness,
It acts as a barrier layer to prevent oxygen from penetrating into the substrate, preventing the plague phenomenon. By performing the treatment of the present invention, even at low density MoSi 2 ,
MoO 3 is not observed even if exposed for 0 hours or more.

【0009】[0009]

【発明の具体的な説明】本発明は、MoSi2 基材又は
MoSi2 を主成分として70%以上含む基材を対象と
する。本発明目的では、MoSi2 を70%以上含むも
のであればMoSi2 基材と性状的にほぼ均等とみなす
ことができるので、MoSi2 を主成分として70%以
上含む基材もここでは含めた。主成分の対象となるMo
Si2 の密度は問わない。低密度の基材でも保護皮膜形
成処理によりその酸化を十分に防止することができる。
MoSi2 の密度は、使用目的に応じてまた製造方法に
より適宜決定される。従って、鋳造材料、粉末冶金法に
より製造された材料(HIP材)、単結晶材などいずれ
をも基材として使用することができる。また、MoSi
2 被覆材も使用することができる。基材の形態も、そこ
に所定厚みの保護皮膜の形成が可能であれば任意であ
る。
DETAILED DESCRIPTION OF THE INVENTION The present invention is directed to a MoSi 2 substrate or a substrate containing 70% or more of MoSi 2 as a main component. In the present invention purposes, since the MoSi 2 can be regarded as almost equally MoSi and characterization to second substrate as long as it contains 70% or more, in this case also a substrate comprising 70% or more MoSi 2 as a main component including . Mo as the main component
The density of Si 2 does not matter. Even a low-density substrate can be sufficiently prevented from being oxidized by the protective film forming treatment.
The density of MoSi 2 is appropriately determined according to the purpose of use and the manufacturing method. Therefore, any of a casting material, a material (HIP material) manufactured by a powder metallurgy method, and a single crystal material can be used as the base material. Also, MoSi
Two coatings can also be used. The form of the substrate is also arbitrary as long as a protective film having a predetermined thickness can be formed thereon.

【0010】最初に述べたように、MoSi2 は高温、
酸化性雰囲気下で保護性のSiO2皮膜を形成し、優れ
た耐酸化性を示すが、ペスト現象により、300〜60
0℃の低温ではSiO2 皮膜が形成されず急激に酸化が
進行し、元々バルクだったものが短時間のうちに酸化物
粉末になる。本発明に従う保護皮膜は、基材が使用環境
の温度が定期的に変化して300〜600℃の低温に保
持される場合もしくは不慮にその可能性がある場合に表
面全体に形成される。基材の一部のみがそうした低温に
保持される場合には当該部分を覆うように局所的に保護
皮膜を形成することもできる。例えば、耐熱構造材の加
熱側とは反対側の表面のみに保護皮膜を形成してもよい
し、挿入体の外部に突出している部分のみに保護皮膜を
形成してもよい。
[0010] As stated earlier, MoSi 2 is high temperature,
A protective SiO 2 film is formed in an oxidizing atmosphere and exhibits excellent oxidation resistance.
At a low temperature of 0 ° C., the SiO 2 film is not formed and the oxidation proceeds rapidly, and the original bulk becomes oxide powder in a short time. The protective coating according to the present invention is formed on the entire surface when the substrate is kept at a low temperature of 300 to 600 ° C. due to a periodic change in the temperature of the use environment or when there is a possibility of accidental occurrence. When only a part of the substrate is kept at such a low temperature, a protective film can be locally formed so as to cover the part. For example, the protective film may be formed only on the surface of the heat-resistant structural material opposite to the heating side, or the protective film may be formed only on the portion protruding outside the insert.

【0011】必要であれば、金属皮膜を形成する前に、
付着性を増大するために表面全体もしくは金属皮膜形成
部分においてMoSi2 に表面粗化処理を施してもよ
い。
If necessary, before forming the metal film,
In order to increase the adhesion, MoSi 2 may be subjected to a surface roughening treatment on the entire surface or on the portion where the metal film is formed.

【0012】保護皮膜の形成は、メッキ、イオンプレー
ティング、溶射等の方法でCr、Ni、Rh、Ir、P
t及びAuから選択される金属の単層もしくは複層の皮
膜を形成する。皮膜はできるだけ緻密である必要があ
る。従って、メッキ、イオンプレーティング、溶射等に
おいて皮膜ができるだけ緻密になるようにプロセス条件
を管理することが必要である。例えば、メッキにおける
電流密度、イオンプレーティングおける電圧、溶射にお
ける温度及び使用粉末の粒度がより緻密な皮膜を形成す
るように管理される。また、膜厚は0.1μm以下では
効果がなく、1〜30μmが望ましい。保護皮膜の緻密
さと厚みとが協同して大気酸素の浸透に対するバリヤー
層を形成する。1μm以上で保護皮膜としての効果が生
じる。他方、30μmを超えると効果が飽和し、コスト
も増加する。
The protective film is formed by a method such as plating, ion plating, thermal spraying, etc., for Cr, Ni, Rh, Ir, P
A single or multiple layer film of a metal selected from t and Au is formed. The coating must be as dense as possible. Therefore, it is necessary to control the process conditions so that the film becomes as dense as possible in plating, ion plating, thermal spraying, and the like. For example, the current density in plating, the voltage in ion plating, the temperature in thermal spraying, and the particle size of the powder used are controlled so as to form a denser film. When the thickness is 0.1 μm or less, there is no effect, and the thickness is desirably 1 to 30 μm. The denseness and thickness of the protective coating work together to form a barrier layer to the penetration of atmospheric oxygen. When it is 1 μm or more, an effect as a protective film is produced. On the other hand, if it exceeds 30 μm, the effect is saturated and the cost increases.

【0013】また、形成した皮膜の上に20〜300μ
mの厚みのAl溶射膜を形成することにより、単独のA
l溶射に比べ耐酸化性が向上する。高価な保護皮膜の厚
みを比較的薄めにして、その上に比較的に廉価なAl溶
射膜を形成することはコスト的に有利である。
Further, 20 to 300 μm is formed on the formed film.
By forming an Al sprayed film having a thickness of m
1 Oxidation resistance is improved as compared with thermal spraying. It is advantageous in terms of cost to make the thickness of the expensive protective film relatively thin and form a relatively inexpensive Al sprayed film thereon.

【0014】[0014]

【実施例】幾種かの金属をメッキ、イオンプレーティン
グ、溶射成膜方法により様々の膜厚でMoSi2 基材に
被覆したものを450℃で保持した(実施例1〜8)。
実施例9はNiメッキ膜の上にAl溶射膜を厚く(20
0μm)形成したものである。比較例1〜4として、皮
膜のない高密度MoSi2 基材、予備酸化膜付き高密度
MoSi2 基材、厚み0.05μmのNiメッキ付き高
密度MoSi2 基材及びAl溶射高密度MoSi2 基材
を同様に450℃で保持した例を併せて呈示した。45
0℃で3、5、10、100及び300時間保持した後
MoO3 の発生の有無を顕微鏡観察による表面状況から
調査した。各成膜条件並びに結果を表1に示す。
EXAMPLES holding the several kinds of metal plating, ion plating, a material obtained by coating the MoSi 2 substrate at a film thickness of various by spraying a film forming method at 450 ° C. (Examples 1-8).
In the ninth embodiment, the Al sprayed film is thickened on the Ni plating film (20
0 μm). As Comparative Examples 1-4, film-free high density MoSi 2 substrate, pre-oxidized film with a high density MoSi 2 substrate, with Ni plating having a thickness of 0.05μm dense MoSi 2 substrate and the thermally sprayed Al dense MoSi 2 group An example in which the material was similarly maintained at 450 ° C. was also presented. 45
After maintaining at 0 ° C. for 3, 5, 10, 100 and 300 hours, the presence or absence of generation of MoO 3 was examined from the surface condition by microscopic observation. Table 1 shows the film forming conditions and results.

【0015】[0015]

【表1】 [Table 1]

【0016】[0016]

【発明の効果】本発明の処理を施すことにより、低密度
のMoSi2 でも450℃、大気中で300時間以上さ
らされてもMoO3 の発生が見られなくなる。超高温耐
熱構造材料としてのMoSi2 材料の信頼性を保証す
る。
According to the treatment of the present invention, generation of MoO 3 is not observed even when exposed to low-density MoSi 2 at 450 ° C. in the air for 300 hours or more. Guarantees the reliability of MoSi 2 material as an ultra-high temperature heat resistant structural material.

───────────────────────────────────────────────────── フロントページの続き (72)発明者 福嶋 篤志 茨城県北茨城市華川町臼場187番地4株 式会社ジャパンエナジー磯原工場内 (58)調査した分野(Int.Cl.7,DB名) C23C 4/06,14/06,30/00 C22C 27/04 ────────────────────────────────────────────────── ─── Continued on the front page (72) Inventor Atsushi Fukushima 187-4 Usuba, Hachikawa-cho, Kitaibaraki-shi, Ibaraki Japan Energy Isohara Plant (58) Field surveyed (Int.Cl. 7 , DB name) C23C 4 / 06,14 / 06,30 / 00 C22C 27/04

Claims (4)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 MoSi2 基材又はMoSi2 を主成分
として70%以上含む基材と、該基材の少なくとも一部
上に形成されそして0.1μm以上の厚みを有する、C
r、Ni、Rh、Ir、Pt及びAuから選択された金
属の、耐酸化性に優れる緻密な保護皮膜とから構成され
ることを特徴とする複合耐熱材料。
1. A MoSi 2 substrate or a substrate containing 70% or more of MoSi 2 as a main component, and a C formed on at least a part of the substrate and having a thickness of 0.1 μm or more.
A composite heat-resistant material comprising a metal selected from r, Ni, Rh, Ir, Pt and Au, and a dense protective film having excellent oxidation resistance.
【請求項2】 耐酸化性に優れる金属の緻密な保護皮膜
が溶射皮膜、めっき皮膜またはイオンプレーティング皮
膜であることを特徴とする請求項1に記載の複合耐熱材
料。
2. The composite heat-resistant material according to claim 1, wherein the dense protective film made of a metal having excellent oxidation resistance is a thermal sprayed film, a plated film, or an ion-plated film.
【請求項3】 MoSi2 基材又はMoSi2 を主成分
として70%以上含む基材と、該基材の少なくとも一部
上に形成されそして0.1μm以上の厚みを有する、C
r、Ni、Rh、Ir、Pt及びAuから選択された金
属の、耐酸化性に優れる緻密な保護皮膜と、該保護皮膜
上のAl溶射膜とから構成されることを特徴とする複合
耐熱材料。
3. A MoSi 2 substrate or a substrate containing 70% or more of MoSi 2 as a main component and a C formed on at least a part of the substrate and having a thickness of 0.1 μm or more.
A composite heat resistant material comprising a dense protective film of a metal selected from r, Ni, Rh, Ir, Pt and Au having excellent oxidation resistance and an Al sprayed film on the protective film. .
【請求項4】 耐酸化性に優れる金属の緻密な保護皮膜
が溶射皮膜、めっき皮膜またはイオンプレーティング皮
膜であることを特徴とする請求項3に記載の複合耐熱材
料。
4. The composite heat-resistant material according to claim 3, wherein the dense protective film of the metal having excellent oxidation resistance is a thermal sprayed film, a plated film, or an ion-plated film.
JP6243428A 1994-09-13 1994-09-13 Composite heat-resistant material mainly composed of MoSi2 Expired - Fee Related JP3001781B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6243428A JP3001781B2 (en) 1994-09-13 1994-09-13 Composite heat-resistant material mainly composed of MoSi2

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6243428A JP3001781B2 (en) 1994-09-13 1994-09-13 Composite heat-resistant material mainly composed of MoSi2

Publications (2)

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JPH0881785A JPH0881785A (en) 1996-03-26
JP3001781B2 true JP3001781B2 (en) 2000-01-24

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Country Link
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016032756A (en) * 2015-11-19 2016-03-10 下村工業株式会社 Green onion cooker

Families Citing this family (2)

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Publication number Priority date Publication date Assignee Title
JP6384666B2 (en) * 2014-12-17 2018-09-05 日本電気硝子株式会社 Heating element and manufacturing method thereof
CN111074190B (en) * 2019-12-25 2021-12-21 江苏理工学院 MoSi on steel surface2Composite coating and preparation method thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016032756A (en) * 2015-11-19 2016-03-10 下村工業株式会社 Green onion cooker

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