JP2994764B2 - Method for forming transparent conductive film - Google Patents
Method for forming transparent conductive filmInfo
- Publication number
- JP2994764B2 JP2994764B2 JP3018317A JP1831791A JP2994764B2 JP 2994764 B2 JP2994764 B2 JP 2994764B2 JP 3018317 A JP3018317 A JP 3018317A JP 1831791 A JP1831791 A JP 1831791A JP 2994764 B2 JP2994764 B2 JP 2994764B2
- Authority
- JP
- Japan
- Prior art keywords
- conductive film
- transparent conductive
- ito
- paste
- resin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
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- Conductive Materials (AREA)
- Non-Insulated Conductors (AREA)
- Manufacturing Of Electric Cables (AREA)
Description
【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION
【０００１】[0001]
【産業上の利用分野】本発明は、特にインジウム錫酸化
物粒子（以下、ＩＴＯという）の透明導電膜を形成する
ための方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for forming a transparent conductive film of indium tin oxide particles (hereinafter referred to as ITO).
【０００２】[0002]
【従来の技術】一般に、この種の透明導電膜は液晶表示
装置等の各種表示装置における電極として広く用いられ
ている。そして通常、ポリエステル等の樹脂フィルム上
に形成されるＩＴＯ透明導電膜はマグネトロンスパッタ
法等のドライプロセスにより成膜される。ところが、上
記スパッタ法は真空状態下で行われるため、高価な装置
が必要になるばかりか、生産性が低い。そこで従来かか
るスパッタ法の代わりに所謂、ペースト法によるこの種
成膜方法の技術が開発されている。2. Description of the Related Art In general, this kind of transparent conductive film is widely used as an electrode in various display devices such as a liquid crystal display device. Usually, an ITO transparent conductive film formed on a resin film such as polyester is formed by a dry process such as a magnetron sputtering method. However, since the sputtering method is performed in a vacuum state, an expensive apparatus is required, and productivity is low. Therefore, instead of the conventional sputtering method, a technique of this kind of film forming method using a so-called paste method has been developed.
【０００３】即ちこのペースト法はＩＴＯ微粒子を樹脂
及び分散剤と一緒に溶剤中に均一に分散せしめてペース
ト状にし、これを基板上に塗布した後乾燥せしめること
により成膜する方法である。このペースト法によれば、
ＩＴＯ透明導電膜を安価に形成することができる上に、
製造工程における歩留りが高くなり生産性を向上するこ
とができる。[0003] That is, the paste method is a method in which ITO fine particles are uniformly dispersed in a solvent together with a resin and a dispersant to form a paste, which is coated on a substrate and dried to form a film. According to this paste method,
In addition to being able to form an ITO transparent conductive film at low cost,
The yield in the manufacturing process is increased, and the productivity can be improved.
【０００４】[0004]
【発明が解決しようとする課題】しかしながら、かかる
従来のペーストでは、形成された導電膜の導電原理はＩ
ＴＯ微粒子相互の接近作用によって行われるものである
ため、前記スパッタ法に比べて電気的抵抗値が大きくな
ると共に導電膜の膜厚が厚くなってしまう（１〜３μｍ
程度）という問題があった。又、導電膜の表面の凹凸や
導電膜内部のボイド（空隙）等によって光の散乱が生
じ、このため導電膜の全光線透過率及びヘーズ値（導電
膜の曇りの程度を表す数値）が著しく悪化してしまい、
前述したような透明電極としてはもはや実用化すること
ができないという不都合があった。尚、単なる帯電防止
用の膜等として比較的グレードが低い場合の用途は残さ
れている。However, in such a conventional paste, the conductive principle of the formed conductive film is as follows.
Since it is performed by the action of the mutual approach of the TO fine particles, the electric resistance value is increased and the thickness of the conductive film is increased (1 to 3 μm) as compared with the sputtering method.
Degree). In addition, light scattering occurs due to irregularities on the surface of the conductive film, voids (voids) in the conductive film, and the like, so that the total light transmittance and the haze value (a value indicating the degree of haze of the conductive film) of the conductive film are remarkable. Worsened,
There has been an inconvenience that the transparent electrode as described above cannot be used anymore. It should be noted that there are still applications where the grade is relatively low as a mere antistatic film or the like.
【０００５】本発明はかかる実情に鑑み、導電膜の電気
的特性及び光学特性の双方を改善し得る透明導電膜の成
膜方法を提供することを目的とする。The present invention has been made in view of the above circumstances, and has as its object to provide a method for forming a transparent conductive film capable of improving both the electrical and optical characteristics of the conductive film.
【０００６】[0006]
【課題を解決するための手段】本発明による透明導電膜
の成膜方法は、ＩＴＯの超微粒子粉を樹脂・溶剤に分散
せしめて成るペーストを樹脂フィルム上に塗布又は印刷
し、更に乾燥して後、スチールロールによって圧延処理
を施すことにより行われる。According to the method for forming a transparent conductive film of the present invention, a paste obtained by dispersing ultrafine particles of ITO in a resin or a solvent is applied or printed on a resin film, and further dried. Thereafter, rolling is performed by a steel roll.
【０００７】又、本発明方法において、上記ペーストの
固形成分中の上記ＩＴＯの体積含有率が６０〜８０％で
ある。[0007] In the method of the present invention, the volume content of the ITO in the solid component of the paste is 60 to 80%.
【０００８】更に、本発明方法は、上記スチールロール
による圧延処理における線圧力を３００ｋｇｆ／ｃｍ以
上に設定して行われる。Further, the method of the present invention is carried out by setting the linear pressure in the rolling treatment by the steel roll to 300 kgf / cm or more.
【０００９】[0009]
【作用】本発明によれば、先ず、透明導電膜を形成すべ
きＩＴＯの超微粒子粉を用いて塗膜状にしたものをロー
ルによって圧延することにより、ＩＴＯ微粒子を緻密化
し、これにより形成された導電膜内のボイド（空隙）の
発生を抑制することができる。又、かかるロールによる
圧延処理により導電膜表面を平滑にし、この結果透明導
電膜の電気的特性及び光学特性を改善することができ
る。尚、この場合、ＩＴＯの粒子径を、可視光線の波長
に比べて小さく０．１μｍ以下にすることにより光の散
乱をなくしている。According to the present invention, first, an ITO fine particle to be used for forming a transparent conductive film is formed into a coating film and rolled by a roll, thereby densifying the ITO fine particles. It is possible to suppress the generation of voids (voids) in the conductive film. In addition, the rolling process using the rolls smoothes the conductive film surface, and as a result, the electrical and optical characteristics of the transparent conductive film can be improved. In this case, scattering of light is eliminated by setting the particle diameter of ITO to 0.1 μm or less, which is smaller than the wavelength of visible light.
【００１０】又、本発明によれば、塗布されるペースト
の固形成分中のＩＴＯの含有率を所定比率に設定したこ
とにより、かかる電気的特性及び光学特性を有効且つ大
幅に向上させることができる。即ち上記圧延処理を行う
際に緻密化されるＩＴＯ粒子間の空隙を埋め尽くすだけ
の樹脂を必要とするが、この場合、ＩＴＯ粒子の量が多
すぎると樹脂がかかる空隙を完全に埋めることができ
ず、従ってボイドが発生して光線透過率及びヘーズ値が
悪くなる上に所謂、ポーラスな導電膜になってしまいそ
の強度が低下する。一方、ＩＴＯ粒子の量が少なすぎる
とかかるＩＴＯ粒子よりも過剰に存在する樹脂によって
ＩＴＯ粒子同士の相互接近が妨げられ、この場合には導
電膜の光学的特性は良好であっても電気的特性を向上さ
せることは出来ない。従って、ペーストの固形成分中の
樹脂とＩＴＯ粒子との含有割合を最適にする必要がある
が、このために本発明方法においてはＩＴＯの体積含有
率が６０〜８０％に設定されている。Further, according to the present invention, by setting the content of ITO in the solid component of the paste to be applied to a predetermined ratio, such electrical and optical characteristics can be effectively and significantly improved. . That is, a resin is required to completely fill the voids between the ITO particles to be densified during the rolling process. In this case, if the amount of the ITO particles is too large, the resin may completely fill the voids. Therefore, voids are generated, so that the light transmittance and the haze value are deteriorated, and a so-called porous conductive film is formed, and the strength is reduced. On the other hand, if the amount of the ITO particles is too small, the resin existing in excess of the ITO particles prevents the ITO particles from approaching each other. In this case, even if the optical characteristics of the conductive film are good, the electrical characteristics can be improved. Cannot be improved. Therefore, it is necessary to optimize the content ratio of the resin and the ITO particles in the solid component of the paste. For this purpose, in the method of the present invention, the volume content of ITO is set to 60 to 80%.
【００１１】更に、本発明によれば、スチールロールに
よる圧延処理における線圧力を３００ｋｇｆ／ｃｍ以上
に設定することにより、その上に導電膜が形成されるべ
き基板樹脂フィルムに機械的歪みを生じさせることな
く、透明導電膜の電気的特性及び光学特性の双方を向上
させることができる。Further, according to the present invention, by setting the linear pressure in the rolling process using a steel roll to 300 kgf / cm or more, a mechanical strain is caused on the substrate resin film on which the conductive film is to be formed. Without this, both the electrical characteristics and the optical characteristics of the transparent conductive film can be improved.
【００１２】[0012]
【実施例】以下、本発明による透明導電膜の成膜方法の
一実施例を詳細に説明する。先ず、基板である樹脂フィ
ルム上に塗布すべきペーストの構成成分であるＩＴＯの
超微粒子粉は、錫含有量２．８ｗｔ％で比表面積２３ｍ
2 ／ｇ，平均粒径０．０４μｍのものを用いる。そして
かかるＩＴＯ超微粒子粉をアクリル樹脂を混入した溶剤
中に分散せしめ、これによりアクリル樹脂系ペーストが
形成される。この場合、ペーストの固形成分中のＩＴＯ
粒子の体積含有率としては、６０〜８０％程度であるこ
とが好ましいが、ここでは５５％，６０％，７０％及び
７５％の４種類のペーストを形成した。次に、各ペース
トをスクリーン印刷法によりＰＥＴフィルム（厚さ１０
０μｍ）上に印刷し、７０°Ｃで３０分間赤外線により
加熱して乾燥せしめるが、いずれのペーストの場合も１
２ｃｍ×１５ｃｍ程度の広さの印刷領域を形成して行っ
た。尚、上記樹脂としては、熱可塑性のアクリル樹脂や
ポリエステル樹脂を用い得る。又、上記溶剤としては、
ミネラルスピリッツ，ｎ−ブチルアルコール，ミクロヘ
キシルアルコール，ブチルカルビノニルアセテート，ブ
チルセロソルブ，酢酸エチル，メチルエチルケトン，メ
チルイソブチルケトン又はシクロヘキサノン等を用い得
る。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the method for forming a transparent conductive film according to the present invention will be described below in detail. First, the ultrafine powder of ITO which is a component of the paste to be applied on the resin film as the substrate has a tin content of 2.8 wt% and a specific surface area of 23 m.
2 / g and an average particle size of 0.04 μm are used. The ITO ultrafine particles are dispersed in a solvent mixed with an acrylic resin, whereby an acrylic resin-based paste is formed. In this case, the ITO in the solid component of the paste
The volume content of the particles is preferably about 60 to 80%, but here, four types of pastes of 55%, 60%, 70% and 75% were formed. Next, each paste was applied to a PET film (thickness 10
0 μm), and dried by heating at 70 ° C. for 30 minutes with infrared rays.
The printing was performed by forming a printing area having a size of about 2 cm × 15 cm. Incidentally, as the resin, a thermoplastic acrylic resin or polyester resin can be used. Also, as the solvent,
Mineral spirits, n-butyl alcohol, microhexyl alcohol, butyl carbinonyl acetate, butyl cellosolve, ethyl acetate, methyl ethyl ketone, methyl isobutyl ketone or cyclohexanone can be used.
【００１３】次に、樹脂フィルム上に上記スクリーン印
刷法によって塗布されたペーストはスチールロールによ
って圧延処理されるが、このロール処理においてはその
表面がハードクロムメッキされた直径１５０ｍｍの２本
のスチールロールを使用し、その処理スピードが１０ｃ
ｍ／秒となるようにかかるスチールロールの回転速度を
設定した。このスチールロールによる圧延処理を行う場
合、スチールロールの線圧力は３００ｋｇｆ／ｃｍ以上
に設定して行われるが、特に５００〜８００ｋｇｆ／ｃ
ｍの範囲が好ましい。これは、かかる線圧力が低過ぎる
と所望の圧延効果を得ることができず、一方、線圧力が
高過ぎる場合には十分な圧延効果が得られて導電膜の電
気的特性及び光学特性を向上させることができるものの
基板である樹脂フィルムがスチールロールの圧力によっ
て機械的に歪められてしまうため実用上使用し得なくな
る。従って実用性を確保し且つ電気的特性等が向上する
ようにするためには上記のようにスチールロールの線圧
力を所定の大きさに設定して行う必要がある。Next, the paste applied on the resin film by the screen printing method is rolled by a steel roll. In this roll processing, two steel rolls 150 mm in diameter are hard chrome-plated on the surface. And the processing speed is 10c
The rotation speed of the steel roll was set so as to be m / sec. When performing the rolling treatment by the steel roll, the linear pressure of the steel roll is set to 300 kgf / cm or more, and particularly, 500 to 800 kgf / c.
The range of m is preferred. This is because if the line pressure is too low, the desired rolling effect cannot be obtained, while if the line pressure is too high, a sufficient rolling effect is obtained and the electrical and optical properties of the conductive film are improved. Although it can be performed, the resin film serving as the substrate is mechanically distorted by the pressure of the steel roll and cannot be used practically. Therefore, in order to ensure practicality and to improve electrical characteristics and the like, it is necessary to set the linear pressure of the steel roll to a predetermined value as described above.
【００１４】又、上記スチールロールの圧延処理に際し
て同時に加熱処理を行い、樹脂を硬化せしめるが、この
ための加熱処理温度は基板樹脂フィルムが加熱により歪
みを生じない温度範囲（１００°Ｃ以下）に選定され
る。即ち導電膜の光学特性は加熱処理温度が高い程向上
する傾向があり、一方、導電膜の表面抵抗は加熱処理温
度が高過ぎると大きくなって電気的特性が低下する傾向
があるため、光学特性及び電気的特性の双方を向上させ
るためには、加熱処理温度を適正に設定する必要があ
る。本発明によればそのような加熱処理を行うための温
度範囲は特に４０〜６０°Ｃであることが好ましい。表
面抵抗が上記のような傾向を示すのは、加熱処理温度が
高くなると基板樹脂フィルムが加熱変形を来し、上記圧
延処理により緻密化されるべきＩＴＯ粒子同士の相互接
近が阻害されるためである。Heat treatment is performed at the same time as the rolling treatment of the steel roll to cure the resin. The heat treatment temperature is set within a temperature range (100 ° C. or lower) where the substrate resin film is not distorted by heating. Selected. That is, the optical characteristics of the conductive film tend to improve as the heat treatment temperature increases, while the surface resistance of the conductive film tends to increase when the heat treatment temperature is too high, and the electrical characteristics tend to decrease. In order to improve both the electrical characteristics and the electrical characteristics, it is necessary to appropriately set the heat treatment temperature. According to the present invention, the temperature range for performing such a heat treatment is particularly preferably 40 to 60 ° C. The reason why the surface resistance shows the above tendency is that when the heat treatment temperature is increased, the substrate resin film undergoes heat deformation, which hinders the mutual approach of the ITO particles to be densified by the rolling treatment. is there.
【００１５】スチールロールによる圧延処理時の線圧力
及び加熱処理温度は上記のように設定されるが、これら
の条件を適宜選定して前記４種類のペーストを用いて種
々の透明導電膜を形成した。そしてその膜厚は約３μｍ
になった。The linear pressure and the heat treatment temperature at the time of the rolling treatment by the steel roll are set as described above. These conditions are appropriately selected, and various transparent conductive films are formed by using the above four kinds of pastes. . And its film thickness is about 3 μm
Became.
【００１６】次に上述した方法により形成された透明導
電膜の電気的特性及び光学特性等についての測定結果を
図１乃至図４を参照して説明する。尚、これらの測定を
行うに際してＩＴＯ粒子の比表面積は米国カウンターク
ローム社製のＱｕａｎｔａｓｏｒｂ ＱＳ−１０によ
り、又、塗膜の全光線透過率及びヘーズ値（曇価）はＰ
ＥＴフィルムと一緒にスガ試験機株式会社製の直読ヘー
ズコンピュータＨＧＭ−ＺＤＰにより、更に表面抵抗は
透明導電膜が形成された上記ＰＥＴフィルムを５０ｍｍ
×５０ｍｍの寸法に切り出した後三菱油化製のローレス
タＭＣＰ−Ｔ４００によりそれぞれ測定した。Next, the measurement results of the electrical characteristics and optical characteristics of the transparent conductive film formed by the above-described method will be described with reference to FIGS. In carrying out these measurements, the specific surface area of the ITO particles was determined by Quantasorb QS-10 manufactured by Counterchrome, USA, and the total light transmittance and haze value (haze value) of the coating film were determined by P
With the ET film and the direct reading haze computer HGM-ZDP manufactured by Suga Test Instruments Co., Ltd., the surface resistance was further reduced by 50 mm to the PET film on which the transparent conductive film was formed.
After being cut out to a size of × 50 mm, each was measured with a Mitsubishi Corporation LORESTA MCP-T400.
【００１７】図１及び図２はそれぞれＩＴＯ粒子の体積
含有率が５５％及び７０％である２種類のペーストを用
いて透明導電膜を形成した場合の測定結果を示してい
る。これらの図に記載されたグラフはスチールロールに
よる圧延処理時の線圧力に対する電気的特性（表面抵
抗）及び光学特性（全光線透過率及びヘーズ値）の関係
を表している。又、図３は、図１及び図２により表され
た測定結果に基いてスチールロールによる圧延処理時の
加熱処理温度（２５°Ｃ，５０°Ｃ及び８０°Ｃ）に対
する電気的特性及び光学特性の関係を表したグラフであ
る。ここで、電気的特性としての表面抵抗の具体的数値
は一応の目安として５００Ω／□以下であることが好ま
しく、従って図１から明らかなようにＩＴＯ粒子の体積
含有率が５５％の場合はかかる表面抵抗値として良好な
結果が得られない。一方、ＩＴＯ粒子の体積含有率が７
０％の場合、図２から明らかなように線圧力が３００ｋ
ｇｆ／ｃｍ以上であると表面抵抗が著しく減少すると共
にる全光線透過率及びヘーズ値等の光学特性も良好な数
値を示している。以上の測定結果によれば、少なくとも
ＩＴＯ粒子の体積含有率が７０％の場合であってスチー
ルロールによる圧延処理時の線圧力を３００ｋｇｆ／ｃ
ｍ以上に設定することにより透明導電膜の電気的特性及
び光学特性の双方を向上させることができることが判明
した。又、ＩＴＯ粒子の体積含有率が６０％であるペー
ストにより形成した透明導電膜の電気的特性及び光学特
性は、上記５５％及び７０％の場合の測定結果の略中間
値になり、又、ＩＴＯ粒子の体積含有率が７５％のペー
ストの場合は上記７０％の場合と略同様な数値になっ
た。従ってＩＴＯ粒子の体積含有率は６０〜８０％程度
であることが電気的特性及び光学特性の双方を向上させ
る上で特に好ましい。FIGS. 1 and 2 show the measurement results when a transparent conductive film was formed using two kinds of pastes having a volume content of ITO particles of 55% and 70%, respectively. The graphs shown in these figures show the relationship between the electrical characteristics (surface resistance) and the optical characteristics (total light transmittance and haze value) with respect to the linear pressure during the rolling process using a steel roll. FIG. 3 is a graph showing the electrical and optical properties of the steel rolls at the heat treatment temperatures (25 ° C., 50 ° C. and 80 ° C.) based on the measurement results shown in FIGS. 6 is a graph showing the relationship of. Here, a specific numerical value of the surface resistance as an electrical characteristic is preferably 500 Ω / □ or less as a rough guide. Therefore, as apparent from FIG. 1, when the volume content of the ITO particles is 55%, such a value is required. Good results cannot be obtained as the surface resistance value. On the other hand, when the volume content of ITO particles is 7
In the case of 0%, as is apparent from FIG.
If it is not less than gf / cm, the surface resistance is remarkably reduced, and the optical characteristics such as the total light transmittance and the haze value are also good. According to the above measurement results, at least when the volume content of the ITO particles is 70% and the linear pressure at the time of the rolling treatment by the steel roll is 300 kgf / c
It has been found that by setting the value to m or more, both the electrical characteristics and the optical characteristics of the transparent conductive film can be improved. Further, the electrical and optical characteristics of the transparent conductive film formed by the paste having a volume content of the ITO particles of 60% are substantially intermediate values of the measurement results at 55% and 70%. In the case of a paste having a volume content of particles of 75%, the values were almost the same as those in the case of 70%. Therefore, it is particularly preferable that the volume content of the ITO particles is about 60 to 80% in order to improve both the electrical characteristics and the optical characteristics.
【００１８】尚、図４はスチールロールによる圧延処理
を複数回繰り返し行った場合の表面抵抗の変化を表した
グラフであるが、図から明らかなように２回目以降の圧
延処理によっては有効な表面抵抗の向上を期待し得な
い。又、上記アクリル樹脂系ペーストの代わりに、ＰＥ
Ｔ樹脂系ペーストを用いて上記と同様に透明導電膜を形
成した場合にも電気的特性及び光学特性の双方を向上さ
せることができた。FIG. 4 is a graph showing the change in the surface resistance when the rolling process using a steel roll is repeated a plurality of times. As is apparent from the drawing, the effective surface is different depending on the second and subsequent rolling processes. No improvement in resistance can be expected. Also, instead of the acrylic resin-based paste, PE
Even when a transparent conductive film was formed using a T-resin-based paste in the same manner as described above, both the electrical characteristics and the optical characteristics could be improved.
【００１９】[0019]
【発明の効果】上述したように、本発明方法によればこ
の種導電膜の電気的特性及び光学特性の双方を有効に向
上させることができ、因みに表面抵抗５００Ω／□以
下，全光線透過率７０％以上，ヘーズ値１０％以下の優
れた特性を有するＩＴＯ透明導電膜を形成することがで
きた。又、かかる導電膜の膜厚を薄くすることにより、
更に全光線透過率を高くすると共にヘーズ値を低くする
ことができ、これにより種々の透明導電膜に対する応用
が可能である。As described above, according to the method of the present invention, both the electrical and optical characteristics of this kind of conductive film can be effectively improved. An ITO transparent conductive film having excellent properties of 70% or more and a haze value of 10% or less could be formed. Also, by reducing the thickness of the conductive film,
Further, the total light transmittance can be increased and the haze value can be reduced, thereby enabling application to various transparent conductive films.
【図１】本発明方法により形成したＩＴＯ粒子の体積含
有率５５％のＩＴＯ透明導電膜のロール線圧力に対する
電気的特性及び光学特性の関係を示すグラフである。FIG. 1 is a graph showing a relationship between an electrical property and an optical property with respect to a roll linear pressure of an ITO transparent conductive film having a volume content of 55% of ITO particles formed by the method of the present invention.
【図２】本発明方法により形成したＩＴＯ粒子の体積含
有率７０％のＩＴＯ透明導電膜のロール線圧力に対する
電気的特性及び光学特性の関係を示すグラフである。FIG. 2 is a graph showing a relationship between an electrical property and an optical property with respect to a roll line pressure of an ITO transparent conductive film having a volume content of 70% of ITO particles formed by the method of the present invention.
【図３】本発明方法により形成したＩＴＯ粒子の体積含
有率５５％及び７０％のＩＴＯ透明導電膜のロール処理
温度に対する電気的特性及び光学特性の関係を示すグラ
フである。FIG. 3 is a graph showing a relationship between an electrical property and an optical property with respect to a roll processing temperature of ITO transparent conductive films having a volume content of 55% and 70% of ITO particles formed by the method of the present invention.
【図４】本発明に係るロール処理回数に対する表面抵抗
の変化例を示すグラフである。FIG. 4 is a graph showing an example of a change in surface resistance with respect to the number of times of roll processing according to the present invention.
───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.6，ＤＢ名) H01B 13/00 503 H01B 5/14 ──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. 6 , DB name) H01B 13/00 503 H01B 5/14
Claims (3)
樹脂と共に溶剤中に分散せしめて成るペーストを樹脂フ
ィルム上に塗布又は印刷し、更に乾燥して後、スチール
ロールによって圧延処理を施して成る透明導電膜の成膜
方法。1. A paste obtained by dispersing ultrafine particles of indium tin oxide particles together with a resin in a solvent, is coated or printed on a resin film, dried, and then rolled by a steel roll. A method for forming a transparent conductive film.
ウム錫酸化物粒子の体積含有率が６０〜８０パーセント
であることを特徴とする請求項１に記載の透明導電膜の
成膜方法。2. The method according to claim 1, wherein a volume content of the indium tin oxide particles in a solid component of the paste is 60 to 80%.
ける線圧力を３００キログラム毎センチメートル以上に
設定して行うことを特徴とする請求項１に記載の透明導
電膜の成膜方法。3. The method for forming a transparent conductive film according to claim 1, wherein the linear pressure in the rolling treatment by the steel roll is set to 300 kg / cm or more.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3018317A JP2994764B2 (en) | 1991-01-18 | 1991-01-18 | Method for forming transparent conductive film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3018317A JP2994764B2 (en) | 1991-01-18 | 1991-01-18 | Method for forming transparent conductive film |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH04237908A JPH04237908A (en) | 1992-08-26 |
| JP2994764B2 true JP2994764B2 (en) | 1999-12-27 |
Family
ID=11968240
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3018317A Expired - Fee Related JP2994764B2 (en) | 1991-01-18 | 1991-01-18 | Method for forming transparent conductive film |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2994764B2 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001332133A (en) * | 2000-05-21 | 2001-11-30 | Tdk Corp | Transparent conductive laminate |
| US7205028B2 (en) | 2003-12-24 | 2007-04-17 | Tdk Corporation | Method for producing functional film |
| CN101783199A (en) * | 2009-01-19 | 2010-07-21 | 日立麦克赛尔株式会社 | Transparent conductive film and method of producing the same |
| JP2013140191A (en) * | 2011-12-05 | 2013-07-18 | Chiba Univ | Method of manufacturing electrochromic display element and electrochromic display element |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100504591B1 (en) * | 1999-12-28 | 2005-08-03 | 티디케이가부시기가이샤 | Transparent conductive film and production method thereof |
| JP2001332130A (en) | 2000-05-19 | 2001-11-30 | Tdk Corp | Functional film |
| JP4622039B2 (en) * | 2000-05-19 | 2011-02-02 | Ｔｄｋ株式会社 | Transparent conductive film and method for producing the same |
| JP4534305B2 (en) * | 2000-05-19 | 2010-09-01 | Ｔｄｋ株式会社 | Method for producing conductive film |
| JP4491910B2 (en) * | 2000-05-19 | 2010-06-30 | Ｔｄｋ株式会社 | Multilayer functional film and method for producing the same |
| JP2001332128A (en) * | 2000-05-19 | 2001-11-30 | Tdk Corp | Functional film |
| US6605341B2 (en) | 2000-05-19 | 2003-08-12 | Tdk Corporation | Functional film having specific surface dispersion ratio |
| JP6292443B2 (en) * | 2014-03-13 | 2018-03-14 | ナガセケムテックス株式会社 | Repair composition for transparent conductive film and transparent conductive film |
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1991
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001332133A (en) * | 2000-05-21 | 2001-11-30 | Tdk Corp | Transparent conductive laminate |
| US7205028B2 (en) | 2003-12-24 | 2007-04-17 | Tdk Corporation | Method for producing functional film |
| CN101783199A (en) * | 2009-01-19 | 2010-07-21 | 日立麦克赛尔株式会社 | Transparent conductive film and method of producing the same |
| CN101783199B (en) * | 2009-01-19 | 2013-11-06 | 日立麦克赛尔株式会社 | Transparent conductive film and method of producing the same |
| JP2013140191A (en) * | 2011-12-05 | 2013-07-18 | Chiba Univ | Method of manufacturing electrochromic display element and electrochromic display element |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH04237908A (en) | 1992-08-26 |
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