JP2992154B2 - Appearance inspection device - Google Patents
Appearance inspection deviceInfo
- Publication number
- JP2992154B2 JP2992154B2 JP4002503A JP250392A JP2992154B2 JP 2992154 B2 JP2992154 B2 JP 2992154B2 JP 4002503 A JP4002503 A JP 4002503A JP 250392 A JP250392 A JP 250392A JP 2992154 B2 JP2992154 B2 JP 2992154B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- reference plane
- distance
- plane
- line
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Image Analysis (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Image Processing (AREA)
Description
【0001】[0001]
【産業上の利用分野】この発明は、対象物外表面を光切
断法を用いた三角測量法に基づいて撮像し、その画像処
理によって外観を検査する装置であって、とくに対象物
外表面で種々の高さに位置する各部位、主に対象物に設
定した基準平面と平行な各平面部の観測が同時に可能で
あるとともに、外観上の欠陥が観測されたとき、その欠
陥部位ないし欠陥平面部の高さ位置を求めることが可能
であり、かつ照明設定が容易である外観検査装置に関す
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a device for taking an image of an outer surface of an object based on a triangulation method using a light section method and inspecting the appearance by image processing. It is possible to simultaneously observe each part located at various heights, mainly each plane part parallel to the reference plane set on the object, and when a defect in appearance is observed, the defect part or defect plane The present invention relates to a visual inspection device capable of determining a height position of a part and easily setting lighting.
【0002】[0002]
【従来の技術】従来例では、対象物を所定方向からTV
カメラなどの撮像装置で撮像し、その画像処理によって
変形や傷,汚れなどの外観上の欠陥を検出し、その程度
の基準程度からの逸脱に基づいて合否が判定される。2. Description of the Related Art In a conventional example, an object is set on a TV from a predetermined direction.
An image is taken by an image pickup device such as a camera, and image processing detects appearance defects such as deformation, scratches, and dirt, and pass / fail is determined based on the deviation from the reference level.
【0003】[0003]
【発明が解決しようとする課題】従来例において、対象
物の欠陥を生じる部位が限定される場合には、その部位
に重点的に照明を当てて撮像すればよい。しかし、対象
物外表面で、基準平面からの種々の高さに位置する各部
位、たとえば高さの異なる種々な平行平面部に、欠陥が
生じる可能性がある場合には、その各部位ないし平行平
面部の形状特徴を画像的に表現させるために、照明の当
て方に関する調整が面倒になる。しかも、この調整には
熟練を要し、これが適切になされないと、正確な外観検
査が阻害されることになる。さらに、撮像された同一画
像において、欠陥のある各部位ないし平行平面部の高さ
位置を知ることができない、という不便さがある。In the conventional example, when a portion where a defect of an object is generated is limited, an image may be picked up by mainly illuminating the portion. However, if there is a possibility that a defect may occur at each part located at various heights from the reference plane on the outer surface of the object, for example, various parallel plane parts having different heights, the parts or the parallel parts may be formed. In order to express the shape characteristic of the plane portion in an image, adjustment regarding how to illuminate becomes troublesome. In addition, this adjustment requires skill, and if not properly performed, an accurate appearance inspection is hindered. Furthermore, there is an inconvenience that the height position of each defective portion or the parallel plane portion cannot be known in the same image taken.
【0004】この発明の課題は、従来の技術がもつ以上
の問題点を解消し、対象物外表面で種々の高さに位置す
る各部位、主に基準平面と平行な各平面部の観測が同時
に可能であるとともに、外観上の欠陥が観測されたと
き、その欠陥部位ないし欠陥平面部の高さ位置を求める
ことが可能であり、かつ照明設定が容易である外観検査
装置を提供することにある。An object of the present invention is to solve the above problems of the prior art, and to observe each part located at various heights on the outer surface of an object, mainly each plane part parallel to a reference plane. It is also possible to provide a visual inspection device that can simultaneously determine the height position of a defect site or a defect plane portion when an appearance defect is observed, and that can easily set lighting. is there.
【0005】[0005]
【課題を解決するための手段】請求項1に係る外観検査
装置は、対象物の外表面を光切断法を用いた三角測量法
に基づいて撮像し、その画像処理によって外観を検査す
る装置であって、前記対象物に設定した基準平面に対し
スリット光を出射し、この出射光による前記基準平面で
の照射ラインと光軸が直交する投光部、および前記出射
光の前記基準平面でのスリット光としての一反射光を光
軸方向から受け、撮像素子としてのエリアセンサを具備
する受光部の組と;この投光部,受光部の組を一体的
に、前記出射光,一反射光の各光軸を含む平面内で前記
基準平面に対して相対的に平行移動させる移動手段と;
前記基準平面での一反射光がエリアセンサで受光される
基準ラインから、平行に各量だけ偏位したライン上の各
画素の光電信号の組を、前記投光部,受光部の組の移動
過程の各位置に応じて順次ずらせる形で二次元的に配
置,合成することによって、前記の投光部・対象物外表
面間の各距離に対応する距離画像として形成する距離画
像部と;この距離画像部によって形成された前記各距離
画像に基づき、前記対象物の外表面の外観上の合否を判
定する判定部と;を備える。According to a first aspect of the present invention, there is provided a visual inspection apparatus for photographing an outer surface of an object based on a triangulation method using a light section method, and inspecting the external appearance by image processing. There, a slit light is emitted to a reference plane set on the object, a light emitting unit in which an irradiation line of the emitted light on the reference plane is orthogonal to an optical axis, and the emitted light is emitted on the reference plane. A set of a light receiving unit that receives one reflected light as slit light from the optical axis direction and has an area sensor as an image sensor; and a set of the light projecting unit and the light receiving unit are integrated with the outgoing light and the one reflected light. Moving means for performing parallel translation relative to the reference plane in a plane including each optical axis of;
A set of photoelectric signals of each pixel on a line which is deflected in parallel by an amount from a reference line in which one reflection light on the reference plane is received by the area sensor is transferred to the set of the light projecting unit and the light receiving unit. A distance image portion formed as a distance image corresponding to each distance between the light projecting portion and the outer surface of the target object by two-dimensionally arranging and synthesizing the light source portion sequentially in accordance with each position in the process; A determination unit for determining whether or not the outer surface of the target object has an external appearance based on each of the distance images formed by the distance image unit.
【0006】請求項2に係る外観検査装置は、請求項1
に記載の装置において、対象物が、その基準平面と平行
な複数の平面部を有する。請求項3に係る外観検査装置
は、請求項1または2に記載の装置において、エリアセ
ンサの各偏位ラインの、基準ラインからの偏位量に基づ
き、その各偏位ラインに対応する対象物外表面の部位
と、基準平面との距離を求める距離演算部を備える。According to a second aspect of the present invention, there is provided a visual inspection apparatus.
In the apparatus described in (1), the object has a plurality of plane portions parallel to the reference plane. A visual inspection apparatus according to claim 3 is the apparatus according to claim 1 or 2, wherein the object corresponding to each of the deviation lines of the area sensor is based on the deviation amount of the deviation line from the reference line. A distance calculation unit is provided for calculating a distance between a portion on the outer surface and a reference plane.
【0007】請求項4に係る外観検査装置は、請求項1
ないし3のいずれかに記載の装置において、投光部,受
光部の組が、等速移動し、その移動過程の各位置が一定
時間間隔の各時点に対応する。According to a fourth aspect of the present invention, there is provided a visual inspection apparatus.
In the apparatus described in any one of (3) to (3), the set of the light projecting unit and the light receiving unit moves at a constant speed, and each position in the moving process corresponds to each time point at a fixed time interval.
【0008】[0008]
【作用】請求項1ないし3のいずれかに係る外観検査装
置では、移動手段によって、投光部,受光部の組が、対
象物に設定した基準平面に対し相対的に平行移動すると
き、距離画像部によって、基準平面での反射光がエリア
センサで受光される基準ラインから、平行に各量だけ偏
位したライン上の各画素の光電信号の組が、投光部,受
光部の組の移動過程の各位置に応じて順次ずらせる形で
二次元的に配置,合成され、投光部・対象物外表面間の
各距離に対応する距離画像として形成される;次に、こ
の距離画像部によって形成された各距離画像に基づき、
判定部によって、対象物の外表面の外観上の合否が判定
される。In the appearance inspection apparatus according to any one of the first to third aspects, when the set of the light projecting unit and the light receiving unit is moved in parallel relative to the reference plane set on the object by the moving means, the distance is set. Depending on the image area, the set of photoelectric signals of each pixel on a line deviated in parallel by an amount from the reference line at which the reflected light on the reference plane is received by the area sensor is used as the set of the light emitting section and light receiving section. The two-dimensionally arranged and synthesized two-dimensionally shifted in accordance with each position in the moving process, and formed as a distance image corresponding to each distance between the light emitting unit and the outer surface of the object; Based on each distance image formed by the part,
The pass / fail of the outer surface of the target object in appearance is determined by the determination unit.
【0009】とくに請求項2に係る外観検査装置では、
対象物が、その基準平面と平行な複数の平面部を有し、
この各平面部の外観検査がおこなわれる。とくに請求項
3に係る外観検査装置では、距離演算部によって、エリ
アセンサの各偏位ラインの、基準ラインからの偏位量に
基づき、その各偏位ラインに対応する対象物外表面の部
位と、基準平面との距離が求められる。[0009] In particular, in the appearance inspection apparatus according to claim 2,
The object has a plurality of plane portions parallel to the reference plane,
An appearance inspection of each of the flat portions is performed. In particular, in the visual inspection device according to claim 3, the distance calculation unit is configured to determine, based on the amount of deviation of each of the deviation lines of the area sensor from the reference line, a portion of the object outer surface corresponding to each of the deviation lines. , And the distance from the reference plane.
【0010】とくに請求項4に係る外観検査装置では、
投光部,受光部の組の移動過程の各位置が、移動速度と
一定時間間隔との積に相当する距離間隔で並ぶ。[0010] In particular, in the appearance inspection apparatus according to claim 4,
Each position of the moving process of the set of the light emitting unit and the light receiving unit is arranged at a distance interval corresponding to a product of the moving speed and the fixed time interval.
【0011】[0011]
【実施例】この発明に係る外観検査装置の実施例につい
て、以下に図を参照しながら説明する。図1は実施例の
構成図である。この図において、1はスリット光を出射
する投光部、2は受光部で、受光レンズ3とエリアセン
サ4とで代表される。7は搬送ベルト、9は対象物で、
搬送ベルト7の上に載置され左向き矢印方向に搬送され
る。したがって、投光部1,受光部2の組は一体的に、
対象物9に対し相対的に右方向に移動することになる。
さて、搬送ベルト7の上面が、発明における基準平面と
する。若干、補足すると、投光部1から出射されるスリ
ット光の光軸は、そのスリット光が基準平面を照射する
ラインに対し直角である。そして、出射光が基準平面で
反射し、その一反射光が受光部2の光軸の方向に進み、
エリアセンサ4で受光される位置を基準ラインとする。
そこで、投光部1からの出射光が、対象物9の外表面で
反射すると、受光部2に対して斜め方向に入射し、エリ
アセンサ4で基準ラインから偏位した位置に受光され
る。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of a visual inspection apparatus according to the present invention will be described below with reference to the drawings. FIG. 1 is a configuration diagram of an embodiment. In this figure, reference numeral 1 denotes a light projecting unit that emits slit light, 2 denotes a light receiving unit, and is represented by a light receiving lens 3 and an area sensor 4. 7 is a conveyor belt, 9 is an object,
It is placed on the conveyor belt 7 and is conveyed in the leftward arrow direction. Therefore, the set of the light emitting unit 1 and the light receiving unit 2 is integrally formed.
It will move rightward relative to the object 9.
Now, the upper surface of the conveyor belt 7 is a reference plane in the present invention. Supplementing a little, the optical axis of the slit light emitted from the light projecting unit 1 is perpendicular to the line on which the slit light illuminates the reference plane. Then, the outgoing light is reflected on the reference plane, and one reflected light travels in the direction of the optical axis of the light receiving unit 2,
The position where the light is received by the area sensor 4 is defined as a reference line.
Then, when the light emitted from the light projecting unit 1 is reflected on the outer surface of the object 9, the light is incident on the light receiving unit 2 in an oblique direction, and is received by the area sensor 4 at a position deviated from the reference line.
【0012】5は距離画像部で、投光部1からの出射光
が基準平面で反射し、その反射光がエリアセンサ4で受
光される基準ラインから、各量だけ偏位したライン上の
各画素の光電信号の組を、詳しく後述するように、投光
部1,受光部2の組の移動過程の各位置に応じて順次ず
らせる形で二次元的に配置,合成することによって、投
光部1・対象物9の外表面間の各距離に対応する距離画
像として形成する。6は判定部で、距離画像部5によっ
て形成された各距離画像に基づき、対象物9の外表面の
外観上の合否を判定する。Numeral 5 denotes a distance image section, in which light emitted from the light projecting section 1 is reflected on a reference plane, and the reflected light is deviated by a certain amount from a reference line received by the area sensor 4 on a line. As will be described later in detail, the sets of photoelectric signals of the pixels are two-dimensionally arranged and combined in such a manner that they are sequentially shifted in accordance with the respective positions of the moving process of the set of the light projecting unit 1 and the light receiving unit 2. It is formed as a distance image corresponding to each distance between the light unit 1 and the outer surface of the object 9. Reference numeral 6 denotes a determination unit which determines whether or not the outer surface of the object 9 is acceptable on the basis of each distance image formed by the distance image unit 5.
【0013】図2は実施例の動作を模式的に示す側面図
である。ここでは、説明の便宜上、図1から次のように
変更してある。第1は、受光部2の光軸は、一点鎖線の
基準平面K(図1の搬送ベルト7の上面)と直角である
とし、第2は、投光部1,受光部2の組が、基準平面K
に対し右方向に等速で移動するものとし、第3は、対象
物の外表面が平面Sであるとする。いま、移動過程の各
位置P1,P2,P3 での投光部1の出射光が基準平面Kに
共通な入射角θで入射するとし、基準平面Kと上方に距
離Zだけ離れた平面Sでの入射点をM1,M2,M3 とす
る。また、エリアセンサ4における、基準平面Kでの反
射光の入射位置をO、平面Sでの反射光の入射位置をH
とする。この位置Oに対する位置Hの右寄りの偏位量Y
は、平面Sが基準平面Kと平行であるから常に一定であ
る。ここで、距離Zは、次のように求めることができ
る。図で、受光レンズ3・基準平面K間の距離をA、受
光レンズ3・エリアセンサ4間の距離をBとすると、Y
/B=Zsin θ/(A−Z)であるから、 Z=AY/(Bsin θ+Y) …(1) ところで、各位置P1,P2,P3 の隣り合うもの同士の距
離は共通なDであるとする。なお、各位置は時点で規定
することもでき、むしろ実際上はその方が便利であるか
ら、各位置P1,P2,P3 を各時点T1,T2,T3 で表す
と、投光部1,受光部2の組が一定な移動速度Vのと
き、各時点T1,T2,T3 の隣り合うもの同士の時間間隔
ΔTは、D/V となる。FIG. 2 is a side view schematically showing the operation of the embodiment. Here, for convenience of explanation, FIG. 1 is changed as follows. The first is that the optical axis of the light receiving section 2 is perpendicular to the dashed line reference plane K (the upper surface of the conveyor belt 7 in FIG. 1), and the second is that the set of the light projecting section 1 and the light receiving section 2 Reference plane K
Third, it is assumed that the outer surface of the object is a plane S. Now, it is assumed that the light emitted from the light projecting unit 1 at each of the positions P1, P2, and P3 in the moving process is incident on the reference plane K at a common incident angle θ. Are M1, M2 and M3. In the area sensor 4, the incident position of the reflected light on the reference plane K is O, and the incident position of the reflected light on the plane S is H.
And A deviation amount Y to the right of the position H with respect to the position O
Is always constant since the plane S is parallel to the reference plane K. Here, the distance Z can be obtained as follows. In the figure, if the distance between the light receiving lens 3 and the reference plane K is A, and the distance between the light receiving lens 3 and the area sensor 4 is B, Y
/ B = Z sin θ / (A−Z), Z = AY / (B sin θ + Y) (1) By the way, it is assumed that the distance between adjacent ones of the positions P1, P2, and P3 is a common D. I do. Since each position can be defined at a time point, it is more convenient in practice. Therefore, if each position P1, P2, P3 is represented by each time point T1, T2, T3, the light emitting portion 1, the light receiving portion When the set of the units 2 has a constant moving speed V, the time interval ΔT between adjacent ones at the respective time points T1, T2, T3 is D / V.
【0014】投光部1,受光部2の組を移動させる過程
の各位置で、平面部分をもつ対象物に対し、スリット光
を照射させるときの照射ラインについて、以下に図を参
照しながら説明する。図3は照射ラインの移動を示す対
象物の平面図、図4は照射ラインの移動を示す対象物の
側面図である。これらの図における対象物10は、基準平
面( 搬送ベルト7 の上面) と平行な三つの平面をもつ。
つまり、搬送ベルト7の上面である基準平面からの高さ
の順に、第1は高さがZ1 の上平面11、第2は上平面11
に彫り込まれた高さがZ2 の凹部底面12、第3は高さが
Z3 の肩部平面13である。投光部1,受光部2の組が、
図2における各位置P1,P2,P3 をとるとき、または各
時点T1,T2,T3 での位置のときにおける、その各入射
スリット光1aが、図4に示される。各スリット光1aが、
上平面11、凹部底面12、肩部平面13を照射するときの照
射ラインを平面図で見たときが、図3に示される。各照
射ラインを区別しやすくするため、実線で上平面11に係
る照射ラインを、破線で凹部底面12に係る照射ライン
を、一点鎖線で肩部平面13に係る照射ラインをそれぞれ
表してある。ところで、これらの各照射ラインが直線状
になるのは、照射面が平面であるからであって、もし照
射面が湾曲面であれば、照射ラインは地図の等高線のよ
うに曲線状になる。At each position in the process of moving the set of the light projecting unit 1 and the light receiving unit 2, an irradiation line for irradiating an object having a plane portion with slit light will be described below with reference to the drawings. I do. FIG. 3 is a plan view of the object showing the movement of the irradiation line, and FIG. 4 is a side view of the object showing the movement of the irradiation line. The object 10 in these figures has three planes parallel to the reference plane (the upper surface of the conveyor belt 7).
That is, in the order of the height from the reference plane which is the upper surface of the conveyor belt 7, the first is the upper plane 11 having a height of Z1, and the second is the upper plane 11
The third is a shoulder bottom surface 13 having a height of Z3. The set of the light emitting part 1 and the light receiving part 2 is
FIG. 4 shows the respective incident slit lights 1a when the positions P1, P2, P3 in FIG. 2 are taken, or when the positions are at the time points T1, T2, T3. Each slit light 1a,
FIG. 3 shows a plan view of an irradiation line for irradiating the upper flat surface 11, the concave bottom surface 12, and the shoulder flat surface 13. In order to make it easy to distinguish the irradiation lines, the irradiation line on the upper plane 11 is represented by a solid line, the irradiation line on the concave bottom surface 12 is represented by a broken line, and the irradiation line on the shoulder plane 13 is represented by a dashed line. The reason why each of these irradiation lines is linear is that the irradiation surface is a plane, and if the irradiation surface is a curved surface, the irradiation line is curved like a contour line of a map.
【0015】図3,図4に示した対象物の各平面部での
照射ラインが、受光部2 で受光されたときの受像につい
て、以下に図5を参照しながら説明する。図5は実施例
におけるエリアセンサの受像に関し、(a) ,(b) ,(c)
は移動過程の各位置P1,P2,P3 における受像の模式図
である。図5 (a) において、エリアセンサ4 の縦の中央
線が、基準平面に対する照射ラインの受像である基準ラ
インを示す。この基準ラインからそれぞれY1,Y2,Y3
だけ偏位して、対象物10の上平面11、凹部底面12、肩部
平面13における各照射ラインの受像L1,L2,L3 が位置
する。この各受像とも、図3 における各照射ラインに対
応させ、実線, 破線, 一点鎖線で表してある。各偏位量
Y1,Y2,Y3 と、基準平面からの高さZ1,Z2,Z3 との
間には、式(1) で示される関係が成り立つ。言いかえれ
ば、各偏位量Y1,Y2,Y3 から、対応する各高さZ1,Z
2,Z3 を式(1) から求めることができる。An image received when the irradiation line on each plane portion of the object shown in FIGS. 3 and 4 is received by the light receiving section 2 will be described below with reference to FIG. FIG. 5 relates to image reception by the area sensor in the embodiment, and relates to (a), (b) and (c).
FIG. 5 is a schematic diagram of image reception at each position P1, P2, P3 in the moving process. In FIG. 5A, a vertical center line of the area sensor 4 indicates a reference line which is an image of the irradiation line with respect to the reference plane. From this reference line, Y1, Y2, Y3
The images L1, L2, and L3 of the respective irradiation lines on the upper plane 11, the concave bottom 12, and the shoulder plane 13 of the object 10 are positioned. Each of the received images corresponds to each irradiation line in FIG. 3 and is represented by a solid line, a broken line, and a dashed line. The relationship expressed by the equation (1) holds between each of the deviation amounts Y1, Y2, Y3 and the heights Z1, Z2, Z3 from the reference plane. In other words, from the displacement amounts Y1, Y2, Y3, the corresponding heights Z1, Z
2, Z3 can be obtained from equation (1).
【0016】次に、図1における距離画像部5によっ
て、対象物10の各平面部の画像が、どのように得られる
かについて、図6〜図8を参照しながら説明する。図6
は距離画像部によって得られる対象物の上平面の画像の
模式図、図7は距離画像部によって得られる対象物の凹
部底面の画像の模式図、図8は距離画像部によって得ら
れる対象物の肩部平面の画像の模式図である。図6 に
は、図5 (a),(b),(c) における各受像L1 を、図2 にお
ける距離Dに対応する間隔Gだけ順次ずらせる形で配
置, 合成してある。これが、図1 の距離画像部5 によっ
て得られた、図3,図4における対象物10の、基準平面か
ら高さZ1 に係る距離画像、言いかえれば上平面11の画
像である。もちろん、距離Dつまり間隔Gを細かくすれ
ばするほど、精密な距離画像が得られる。同様に、図7,
図8 には、図5 (a),(b),(c) における各受像L2,L3
を、間隔Gをもたせて配置, 合成して得られた、基準平
面から各高さZ2,Z3 に係る距離画像、言いかえれば対
象物10の凹部底面12, 肩部平面13の各画像が示される。
もちろん、図7,図8 における各距離画像は、それぞれ破
線,一点鎖線からなるように表示してあるが、これは区
別のためであって、実際にはいずれも実線である。Next, how an image of each plane portion of the object 10 is obtained by the distance image portion 5 in FIG. 1 will be described with reference to FIGS. FIG.
Is a schematic diagram of an image of the upper plane of the object obtained by the distance image unit, FIG. 7 is a schematic diagram of an image of the bottom surface of the concave portion of the object obtained by the distance image unit, and FIG. 8 is a diagram of the object obtained by the distance image unit. It is a schematic diagram of the image of a shoulder part plane. In FIG. 6, the received images L1 in FIGS. 5A, 5B, and 5C are arranged and combined in such a manner that they are sequentially shifted by an interval G corresponding to the distance D in FIG. This is the distance image of the object 10 in FIGS. 3 and 4 from the reference plane to the height Z1, which is the image of the upper plane 11, obtained by the distance image unit 5 in FIG. Of course, the finer the distance D, that is, the smaller the distance G, the more accurate a distance image can be obtained. Similarly, FIG.
FIG. 8 shows the respective images L2, L3 in FIGS. 5 (a), (b) and (c).
Are arranged at an interval G, and the distance images of the heights Z2 and Z3 from the reference plane obtained by synthesizing, that is, images of the concave bottom surface 12 and the shoulder plane 13 of the object 10 are shown. It is.
Of course, each of the distance images in FIGS. 7 and 8 is indicated by a dashed line and a dashed line, but this is for the sake of distinction, and both are actually solid lines.
【0017】以上のようにして、各平面部の距離画像が
得られると、これに基づき、判定部によって対象物10の
各平面部上平面11, 凹部底面12, 肩部平面13に係る外観
上の合否が判定され、外観検査がおこなわれる。この画
像に基づく外観上の合否判定については周知であるか
ら、ここで説明することは省略する。As described above, when the distance image of each plane portion is obtained, based on the obtained distance image, the judgment unit determines the appearance of the upper surface 11, the bottom surface 12 of the concave portion, and the shoulder plane 13 of the object 10. Is determined, and a visual inspection is performed. Since the appearance pass / fail judgment based on this image is well known, description thereof will be omitted here.
【0018】[0018]
【発明の効果】請求項1ないし3のいずれかに係る外観
検査装置では、移動手段によって、投光部,受光部の組
が、対象物に設定した基準平面に対し相対的に平行移動
するとき、距離画像部によって、基準平面での反射光が
エリアセンサで受光される基準ラインから、平行に各量
だけ偏位したライン上の各画素の光電信号の組が、投光
部,受光部の組の移動過程の各位置に応じて順次ずらせ
る形で二次元的に配置,合成され、投光部・対象物外表
面間の各距離に対応する距離画像として形成される;次
に、この距離画像部によって形成された各距離画像に基
づき、判定部によって、対象物の外表面の外観上の合否
が判定される。したがって、対象物外表面で種々の高さ
に位置する各部位、とくに請求項2におけるように、主
に基準平面と平行な各平面部の観測が同時に可能で、外
観検査が可能であり、かつ照明設定が容易になる。In the appearance inspection apparatus according to any one of the first to third aspects, when the set of the light projecting portion and the light receiving portion is moved in parallel relative to the reference plane set on the object by the moving means. The set of photoelectric signals of each pixel on a line deviated in parallel by each amount from the reference line where the reflected light on the reference plane is received by the area sensor by the distance image unit is formed by the light emitting unit and the light receiving unit. The two-dimensionally arranged and combined two-dimensionally displaced according to each position in the moving process of the set, and formed as a distance image corresponding to each distance between the light emitting unit and the outer surface of the object; Based on each distance image formed by the distance image unit, the determination unit determines whether or not the outer surface of the target object has an external appearance. Therefore, it is possible to simultaneously observe each part located at various heights on the outer surface of the object, particularly each plane part mainly parallel to the reference plane as in claim 2, and to perform an appearance inspection, and Lighting settings are easier.
【0019】とくに請求項3に係る外観検査装置では、
距離演算部によって、エリアセンサの各偏位ラインの、
基準ラインからの偏位量に基づき、その各偏位ラインに
対応する対象物外表面の部位と、基準平面との距離が求
められる。したがって、外観上の欠陥が観測されたと
き、その欠陥部位ないし欠陥平面部の高さ位置を求める
ことが可能である。In particular, in the visual inspection apparatus according to claim 3,
By the distance calculation unit, each deviation line of the area sensor is
Based on the amount of deviation from the reference line, the distance between the portion of the outer surface of the object corresponding to each deviation line and the reference plane is determined. Therefore, when a defect on the appearance is observed, it is possible to determine the height position of the defect site or the defect plane portion.
【0020】とくに請求項4に係る外観検査装置では、
投光部,受光部の組の移動過程の各位置が、移動速度と
一定時間間隔の積に相当する距離間隔で並ぶ。したがっ
て、距離画像部の動作が時系列的に制御されて好都合で
ある。In particular, in the visual inspection apparatus according to claim 4,
The respective positions of the moving process of the set of the light projecting unit and the light receiving unit are arranged at a distance interval corresponding to the product of the moving speed and the fixed time interval. Therefore, the operation of the distance image unit is controlled in a time series, which is convenient.
【図1】本発明に係る実施例の構成図FIG. 1 is a configuration diagram of an embodiment according to the present invention.
【図2】実施例の動作を模式的に示す側面図FIG. 2 is a side view schematically showing the operation of the embodiment.
【図3】照射ラインの移動を示す対象物の平面図FIG. 3 is a plan view of an object showing movement of an irradiation line.
【図4】照射ラインの移動を示す対象物の側面図FIG. 4 is a side view of an object showing movement of an irradiation line.
【図5】実施例におけるエリアセンサの受像に関し、
(a) ,(b) ,(c) は移動過程の各位置における受像の模
式図FIG. 5 relates to image reception of an area sensor in an embodiment.
(a), (b) and (c) are schematic diagrams of image reception at each position in the movement process.
【図6】距離画像部によって得られる対象物の上平面の
画像の模式図FIG. 6 is a schematic diagram of an image of an upper plane of an object obtained by a distance image unit.
【図7】距離画像部によって得られる対象物の凹部底面
の画像の模式図FIG. 7 is a schematic diagram of an image of a bottom surface of a concave portion of an object obtained by a distance image unit.
【図8】距離画像部によって得られる対象物の肩部平面
の画像の模式図FIG. 8 is a schematic view of an image of a shoulder plane of an object obtained by a distance image unit.
1 投光部 1a スリット光 2 受光部 3 受光レンズ 4 エリアセンサ 5 距離画像部 6 判定部 7 搬送ベルト 9 対象物 10 対象物 11 上平面 12 凹部底面 13 肩部平面 DESCRIPTION OF SYMBOLS 1 Projection part 1a Slit light 2 Light reception part 3 Light reception lens 4 Area sensor 5 Distance image part 6 Judgment part 7 Conveyor belt 9 Object 10 Object 11 Top plane 12 Concave bottom 13 Shoulder plane
フロントページの続き (58)調査した分野(Int.Cl.6,DB名) G01B 11/00 - 11/30 102 G06T 7/00 Continuation of the front page (58) Field surveyed (Int.Cl. 6 , DB name) G01B 11/00-11/30 102 G06T 7/00
Claims (4)
量法に基づいて撮像し、その画像処理によって外観を検
査する装置であって、 前記対象物に設定した基準平面に対しスリット光を出射
し、この出射光による前記基準平面での照射ラインと光
軸が直交する投光部、および前記出射光の前記基準平面
でのスリット光としての一反射光を光軸方向から受け、
撮像素子としてのエリアセンサを具備する受光部の組
と;この投光部,受光部の組を一体的に、前記出射光,
一反射光の各光軸を含む平面内で前記基準平面に対して
相対的に平行移動させる移動手段と;前記基準平面での
一反射光が前記エリアセンサで受光される基準ラインか
ら、平行に各量だけ偏位したライン上の各画素の光電信
号の組を、前記投光部,受光部の組の移動過程の各位置
に応じて順次ずらせる形で二次元的に配置,合成するこ
とによって、前記の投光部・対象物外表面間の各距離に
対応する距離画像として形成する距離画像部と;この距
離画像部によって形成された前記各距離画像に基づき、
前記対象物の外表面の外観上の合否を判定する判定部
と;を備えることを特徴とする外観検査装置。An apparatus for taking an image of an outer surface of an object based on a triangulation method using a light section method and inspecting an appearance by image processing, wherein a slit is formed with respect to a reference plane set on the object. Emitting light, a projection unit in which the irradiation line and the optical axis of the emitted light on the reference plane are orthogonal to each other, and receive one reflected light as slit light on the reference plane of the emitted light from the optical axis direction,
A set of a light receiving section having an area sensor as an image sensor; and a set of the light emitting section and the light receiving section,
Moving means for performing parallel translation relative to the reference plane within a plane including each optical axis of the one reflected light; and parallel from a reference line at which the one reflected light on the reference plane is received by the area sensor. Two-dimensionally arranging and synthesizing a set of photoelectric signals of each pixel on a line deviated by each amount according to each position in the moving process of the set of the light projecting unit and the light receiving unit. A distance image portion formed as a distance image corresponding to each distance between the light projecting portion and the outer surface of the object; based on each distance image formed by the distance image portion,
A determination unit for determining whether or not the outer surface of the object has an external appearance.
は、その基準平面と平行な複数の平面部を有することを
特徴とする外観検査装置。2. An appearance inspection apparatus according to claim 1, wherein the object has a plurality of plane portions parallel to the reference plane.
エリアセンサの各偏位ラインの、基準ラインからの偏位
量に基づき、その各偏位ラインに対応する対象物外表面
の部位と、基準平面との距離を求める距離演算部を備え
ることを特徴とする外観検査装置。3. The device according to claim 1, wherein
It is characterized in that it comprises a distance calculation unit for calculating a distance between a part of the outer surface of the object corresponding to each deviation line and a reference plane based on the amount of deviation of each deviation line of the area sensor from the reference line. Appearance inspection device.
において、投光部,受光部の組は、等速移動し、その移
動過程の各位置が一定時間間隔の各時点に対応すること
を特徴とする外観検査装置。4. The apparatus according to claim 1, wherein the light-emitting unit and the light-receiving unit are moved at a constant speed, and each position in the moving process corresponds to each time point at a fixed time interval. An appearance inspection apparatus characterized by the above-mentioned.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4002503A JP2992154B2 (en) | 1992-01-10 | 1992-01-10 | Appearance inspection device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4002503A JP2992154B2 (en) | 1992-01-10 | 1992-01-10 | Appearance inspection device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH05187831A JPH05187831A (en) | 1993-07-27 |
JP2992154B2 true JP2992154B2 (en) | 1999-12-20 |
Family
ID=11531167
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4002503A Expired - Lifetime JP2992154B2 (en) | 1992-01-10 | 1992-01-10 | Appearance inspection device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2992154B2 (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2859155B2 (en) * | 1995-02-21 | 1999-02-17 | 九州日本電気株式会社 | Evaluation equipment for semiconductor devices |
JPH09311109A (en) * | 1996-05-22 | 1997-12-02 | Matsushita Electric Ind Co Ltd | Defect inspection method and device utilizing light |
JP5574169B2 (en) * | 2010-06-14 | 2014-08-20 | 横浜ゴム株式会社 | Appearance shape inspection direction of belt-shaped member and apparatus therefor |
-
1992
- 1992-01-10 JP JP4002503A patent/JP2992154B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
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JPH05187831A (en) | 1993-07-27 |
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