JP2991834B2 - Rolling bearing - Google Patents
Rolling bearingInfo
- Publication number
- JP2991834B2 JP2991834B2 JP3264627A JP26462791A JP2991834B2 JP 2991834 B2 JP2991834 B2 JP 2991834B2 JP 3264627 A JP3264627 A JP 3264627A JP 26462791 A JP26462791 A JP 26462791A JP 2991834 B2 JP2991834 B2 JP 2991834B2
- Authority
- JP
- Japan
- Prior art keywords
- diamond
- carbon film
- rolling element
- rolling
- bearing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
- C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
- C04B41/5001—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials with carbon or carbonisable materials
- C04B41/5002—Diamond
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
- F16C33/30—Parts of ball or roller bearings
- F16C33/32—Balls
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C19/00—Bearings with rolling contact, for exclusively rotary movement
- F16C19/02—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows
- F16C19/04—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows for radial load mainly
- F16C19/06—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows for radial load mainly with a single row or balls
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2206/00—Materials with ceramics, cermets, hard carbon or similar non-metallic hard materials as main constituents
- F16C2206/02—Carbon based material
- F16C2206/04—Diamond like carbon [DLC]
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2206/00—Materials with ceramics, cermets, hard carbon or similar non-metallic hard materials as main constituents
- F16C2206/40—Ceramics, e.g. carbides, nitrides, oxides, borides of a metal
- F16C2206/58—Ceramics, e.g. carbides, nitrides, oxides, borides of a metal based on ceramic nitrides
- F16C2206/60—Silicon nitride (Si3N4)l
Description
【０００１】[0001]
【産業上の利用分野】本発明は、耐食材から成る軌道
輪、転動体および保持器を有し、高温環境下や真空等の
クリーン環境下等のグリース等の潤滑剤を使用できない
環境下で使用される転がり軸受に関し、特に、少なくと
も転動体が窒化ケイ素を主体とするセラミックスから成
る転がり軸受に係る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention has a bearing ring, a rolling element and a retainer made of a corrosion-resistant material, and is used in an environment where a lubricant such as grease cannot be used in a high temperature environment or a clean environment such as a vacuum. The present invention relates to a rolling bearing to be used, and more particularly to a rolling bearing in which at least a rolling element is made of ceramics mainly composed of silicon nitride.
【０００２】[0002]
【従来の技術】一般に、転がり軸受は、軌道輪、すなわ
ち内輪と外輪の間に転動体を介在し、転動体を保持器に
より保持してなる。近年では、転動体を窒化ケイ素（Ｓ
ｉ3 Ｎ 4 ）を主体とするセラミックスから形成したもの
が提案されている。2. Description of the Related Art Generally, rolling bearings are made of races,
A rolling element is interposed between the inner ring and the outer ring, and the rolling element is
More hold. In recent years, rolling elements have been replaced with silicon nitride (S
iThreeN Four) -Based ceramics
Has been proposed.
【０００３】[0003]
【発明が解決しようとする課題】上記窒化ケイ素を主体
とするセラミックスは、８００℃の耐熱性を有している
が、このセラミックス製の転動体の表面に潤滑膜を形成
することなく、高温環境下や真空等のクリーン環境下等
のグリース等の潤滑剤を使用できない環境下で上記転動
体を使用すると、軌道輪との間で摩耗を引き起し、それ
に隙間が大きくなるので、所望の軸受性能が期待でき
ず、軸受の寿命を確保することができない。The above-mentioned ceramics mainly composed of silicon nitride have a heat resistance of 800 ° C., but do not form a lubricating film on the surface of the rolling elements made of the ceramics. If the above rolling elements are used in an environment where lubricants such as grease cannot be used, such as under a clean environment such as under a vacuum or the like, wear occurs between the rolling elements and a raceway, and a gap is increased. Performance cannot be expected and bearing life cannot be ensured.
【０００４】そこで、上記に対処するため、セラミック
ス製の転動体の表面に、二硫化モリブデン（Ｍｏ
Ｓ2 ）、四フッ化エチレン樹脂（ＰＴＦＥ）あるいは
金、銀、銅等の軟質金属等の固体潤滑剤をコーティング
することも行われている。しかしながら、二硫化モリブ
デン（ＭｏＳ2 ）は、耐熱性に劣り使用温度は約４００
℃までであり、しかも転動体の表面から剥離しやすく軸
受内部で発塵するため、周辺機器に悪影響を及ぼす。ま
た、四フッ化エチレン樹脂も、耐熱性に劣り使用温度は
約２００℃までである。さらに、軟質金属は、摩耗が早
く、潤滑効果を長期間維持することができない。このよ
うに、高温環境下やクリーン環境下で使用される転がり
軸受については適当な固体潤滑剤がなく、充分な軸受寿
命を確保できないことら、産業上普及のネックとなって
いるのが実情である。Therefore, in order to cope with the above, molybdenum disulfide (Mo) is applied to the surface of a ceramic rolling element.
S 2 ), a solid lubricant such as a tetrafluoroethylene resin (PTFE) or a soft metal such as gold, silver, or copper is also used. However, molybdenum disulfide (MoS 2 ) is inferior in heat resistance and has a use temperature of about 400.
° C, and easily peels off from the surface of the rolling element and generates dust inside the bearing, which adversely affects peripheral devices. Also, the ethylene tetrafluoride resin is inferior in heat resistance and its use temperature is up to about 200 ° C. Furthermore, soft metals wear quickly and cannot maintain a lubricating effect for a long period of time. As described above, rolling bearings used in high-temperature environments or clean environments do not have an appropriate solid lubricant and cannot provide a sufficient bearing life. is there.
【０００５】本発明は、上記に鑑み、高温環境下やクリ
ーン環境下での軸受寿命を確保することができる転がり
軸受の提供を目的とする。[0005] In view of the above, an object of the present invention is to provide a rolling bearing that can ensure the bearing life in a high-temperature environment or a clean environment.
【０００６】[0006]
【課題を解決するための手段】本発明による課題解決手
段は、耐食材から成る軌道輪、転動体および保持器を有
する転がり軸受において、少なくとも転動体が、窒化ケ
イ素を主体とするセラミックスから成り、該転動体の表
面に、ダイヤモンドライクカーボン膜が形成されたもの
である。According to the present invention, there is provided a rolling bearing having a raceway, a rolling element and a retainer made of a corrosion-resistant material, wherein at least the rolling element is made of a ceramic mainly composed of silicon nitride, A diamond-like carbon film is formed on the surface of the rolling element.
【０００７】ただし、上記ダイヤモンドライクカーボン
膜は、ケイ素を含有するものや、フッ素を含有するのが
好ましい。However, it is preferable that the diamond-like carbon film contains silicon or fluorine.
【０００８】[0008]
【作用】上記の構成の転がり軸受であれば、転動体の表
面に形成したダイヤモンドライクカーボン膜によって、
軸受の潤滑性を確保することができる。このダイヤモン
ドライクカーボン膜は、転動体の表面から剥離しにくく
軸受内部で発塵しにくいと共に、硬度が高く、長期に渡
って良好な潤滑性を発揮することができる。さらに、耐
熱性にも優れているため、従来の固体潤滑剤より高温使
用に耐えることができる。In the rolling bearing having the above-described structure, the diamond-like carbon film formed on the surface of the rolling element allows
Lubricity of the bearing can be ensured. This diamond-like carbon film is hard to peel off from the surface of the rolling element, is hard to generate dust inside the bearing, has high hardness, and can exhibit good lubricity over a long period of time. Furthermore, since it has excellent heat resistance, it can withstand higher temperature use than conventional solid lubricants.
【０００９】また、ダイヤモンドライクカーボン膜が転
動体の主材としてのケイ素を含有している場合には、転
動体とダイヤモンドライクカーボン膜との密着力を高め
ることが可能となる。よって、ダイヤモンドライクカー
ボン膜を転動体の表面からより剥離しにくくして、発塵
性をより低くすることができる。さらに、ダイヤモンド
ライクカーボン膜がフッ素を含有している場合には、こ
のフッ素によってさらに良好な潤滑性を確保することが
可能となる。Further, when the diamond-like carbon film contains silicon as a main material of the rolling element, it is possible to increase the adhesion between the rolling element and the diamond-like carbon film. Therefore, the diamond-like carbon film is less likely to be separated from the surface of the rolling element, and the dust generation can be further reduced. Further, when the diamond-like carbon film contains fluorine, it is possible to secure better lubricity by the fluorine.
【００１０】[0010]
【実施例】以下、本発明の実施例を図１に基づいて説明
する。図１は本発明の実施例に係る転がり軸受の断面図
である。本実施例の転がり軸受は、図１の如く、軌道内
輪１と軌道外輪２の間に転動体３を介在し、該転動体３
を保持器４により保持して成り、グリース等の潤滑剤を
使用できない高温や真空等のクリーン環境下で使用され
るものである。An embodiment of the present invention will be described below with reference to FIG. FIG. 1 is a sectional view of a rolling bearing according to an embodiment of the present invention. In the rolling bearing of this embodiment, as shown in FIG. 1, a rolling element 3 is interposed between a raceway inner ring 1 and a raceway outer ring 2, and the rolling element 3
Is held by the retainer 4 and is used in a clean environment such as high temperature or vacuum where lubricant such as grease cannot be used.
【００１１】前記軌道内輪１および軌道外輪２は、ステ
ンレス鋼（ＳＵＳ４４０）等の耐食材から成る。また、
前記保持器４は、ステンレス鋼（ＳＵＳ３０４）等の耐
食材から成る。前記転動体３は、窒化ケイ素（Ｓｉ3 Ｎ
4 ）を主体とするセラミックスから成り、該転動体３の
表面に、ダイヤモンドライクカーボン膜（Ｄｉａｍｏｎ
ｄ Ｌｉｋｅ Ｃａｒｂｏｎ：ＤＬＣ）５が形成されて
いる。ダイヤモンドライクカーボン膜５は、硬度、絶縁
性、耐熱性、光透過性および化学的安定性等の点につい
てダイアモンドに似た優れた性質を有している。このダ
イヤモンドライクカーボン膜５の膜厚は、軸受の荷重、
回転数等に応じて種々設定されているが、通常はサブミ
クロン単位に設定されている。The inner race 1 and outer race 2 are made of a corrosion-resistant material such as stainless steel (SUS440). Also,
The retainer 4 is made of a corrosion-resistant material such as stainless steel (SUS304). The rolling element 3 is made of silicon nitride (Si 3 N
4 ) The main component of the ceramic is a diamond-like carbon film (Diamon).
d Like Carbon (DLC) 5 is formed. The diamond-like carbon film 5 has excellent properties similar to diamond in terms of hardness, insulation, heat resistance, light transmission, chemical stability and the like. The thickness of the diamond-like carbon film 5 depends on the load of the bearing,
Various settings are made in accordance with the number of rotations and the like, but are usually set in submicron units.
【００１２】上記構成において、転動体３の表面にダイ
ヤモンドライクカーボン膜５を形成するには、化学蒸着
（Ｃｈｅｍｉｃａｌ Ｖａｐｏｒ Ｄｅｐｏｓｉｔｉｏ
ｎ：ＣＶＤ）法、プラズマＣＶＤ法、イオンビーム形成
法、イオン化蒸着法等を用いることによりできるが、そ
の一例として、ＣＶＤ法による場合について説明する。In the above configuration, in order to form the diamond-like carbon film 5 on the surface of the rolling element 3, a chemical vapor deposition (Chemical Vapor Deposition) is used.
n: CVD) method, a plasma CVD method, an ion beam forming method, an ionization vapor deposition method, or the like. The case of the CVD method will be described as an example.
【００１３】例えばＣＨ4 等の炭素源またはこれに水素
等を混合した混合ガスに、必要に応じてキャリアーガス
として適量の不活性ガスを加え、これを１〜１０-3Ｔｏ
ｒｒ程度で、５００〜１１００℃程度に加熱された転動
体３の表面に流通する。そうすると、転動体３の表面に
炭素が強固に付着被覆し、ダイヤモンドライクカーボン
膜５が形成される。For example, if necessary, an appropriate amount of an inert gas is added as a carrier gas to a carbon source such as CH 4 or a mixed gas obtained by mixing hydrogen or the like, and the mixture is added with 1 to 10 −3 To.
It flows around the surface of the rolling element 3 heated to about 500 to 1100 ° C. at about rr. Then, carbon is firmly adhered and coated on the surface of the rolling element 3, and the diamond-like carbon film 5 is formed.
【００１４】このように、転動体３の表面に形成したダ
イヤモンドライクカーボン膜５によって、軸受の潤滑性
を確保することができる。しかも、このダイヤモンドラ
イクカーボン膜５は、転動体３の表面から剥離しにくく
軸受内部で発塵しにくいと共に、硬度が高く、長期に渡
って良好な潤滑性を発揮することができる。さらに、耐
熱性にも優れているため、従来の固体潤滑剤より高温使
用に耐えることができる。As described above, the lubrication of the bearing can be ensured by the diamond-like carbon film 5 formed on the surface of the rolling element 3. In addition, the diamond-like carbon film 5 is hardly peeled off from the surface of the rolling element 3 and hardly generates dust inside the bearing, has high hardness, and can exhibit good lubricity over a long period of time. Furthermore, since it has excellent heat resistance, it can withstand higher temperature use than conventional solid lubricants.
【００１５】以上のように、ダイヤモンドライクカーボ
ン膜５は、窒化ケイ素を主体とするセラミックスから成
る転動体３の固体潤滑剤に適しており、高温環境下やク
リーン環境下での軸受寿命を長く確保することができ
る。また、上記実施例の応用例として、ダイヤモンドラ
イクカーボン膜５に、ケイ素を５〜２５％程度含有させ
てもよく、さらにこのケイ素を含有するダイヤモンドラ
イクカーボン膜５をプラズマフッ素雰囲気中で処理して
当該ダイヤモンドライクカーボン膜５にフッ素を含有さ
せてもよい。As described above, the diamond-like carbon film 5 is suitable for the solid lubricant of the rolling element 3 made of ceramics mainly composed of silicon nitride, and ensures a long bearing life in a high temperature environment or a clean environment. can do. Further, as an application example of the above embodiment, the diamond-like carbon film 5 may contain silicon in an amount of about 5 to 25%, and the silicon-containing diamond-like carbon film 5 is treated in a plasma fluorine atmosphere. The diamond-like carbon film 5 may contain fluorine.
【００１６】このように、ダイヤモンドライクカーボン
膜５に転動体３の主材としてのケイ素を含有させること
で、転動体３とダイヤモンドライクカーボン膜５との密
着力を高めることが可能となる。よって、前記実施例に
比べて、ダイヤモンドライクカーボン膜５が転動体３の
表面からより剥離しにくくして、発塵性をより低くする
ことができる。As described above, by including silicon as the main material of the rolling element 3 in the diamond-like carbon film 5, the adhesion between the rolling element 3 and the diamond-like carbon film 5 can be increased. Therefore, the diamond-like carbon film 5 is less likely to be separated from the surface of the rolling element 3 as compared with the above-described embodiment, and the dust generation can be further reduced.
【００１７】また、ダイヤモンドライクカーボン膜５に
フッ素を含有させると、さらに良好な潤滑性を確保する
ことが可能となり、転動時に下地となる転動体３を保護
し、かつ相手側の軌道輪１，２の摩耗も減少させること
ができる。なお、本発明は上記実施例に限定されるもの
ではなく、本発明の範囲内で上記実施例に多くの変更ま
たは修正を加え得ることは勿論である。Further, when fluorine is contained in the diamond-like carbon film 5, it is possible to secure better lubricity, to protect the rolling element 3 serving as a base during rolling, and to improve the raceway 1 on the mating side. , 2 can also be reduced. It should be noted that the present invention is not limited to the above embodiment, and it is needless to say that many changes or modifications can be made to the above embodiment within the scope of the present invention.
【００１８】例えば、上記実施例において、ダイヤモン
ドライクカーボン膜にケイ素のみを含有させてもよく、
またダイヤモンドライクカーボン膜にフッ素のみを含有
させてもよい。また、本発明は、軌道輪および保持器を
セラミックス製とした場合にも、適用できる。For example, in the above embodiment, the diamond-like carbon film may contain only silicon,
The diamond-like carbon film may contain only fluorine. Further, the present invention can be applied to a case where the bearing ring and the retainer are made of ceramics.
【００１９】[0019]
【発明の効果】以上の説明から明らかな通り、請求項１
記載の転がり軸受によれば、転動体の表面に形成したダ
イヤモンドライクカーボン膜によって、軸受の潤滑性を
確保することができる。しかも、このダイヤモンドライ
クカーボン膜は、転動体の表面から剥離しにくく軸受内
部で発塵しにくいと共に、硬度が高く、長期に渡って良
好な潤滑性を発揮することができる。さらに、耐熱性、
耐食性にも優れているため、従来の固体潤滑剤より高温
使用に耐えることができると共に、腐食性の激しい雰囲
気でも長期間にわたり使用に耐え得る。As is apparent from the above description, claim 1
According to the rolling bearing described, lubrication of the bearing can be ensured by the diamond-like carbon film formed on the surface of the rolling element. In addition, the diamond-like carbon film is hardly peeled off from the surface of the rolling element and hardly generates dust inside the bearing, has high hardness, and can exhibit good lubricity over a long period of time. In addition, heat resistance,
Because of its excellent corrosion resistance, it can withstand higher temperatures than conventional solid lubricants, and can withstand long-term use even in highly corrosive atmospheres.
【００２０】このように、ダイヤモンドライクカーボン
膜は、窒化ケイ素を主体とするセラミックスから成る転
動体の固体潤滑剤に適するから、高温環境下やクリーン
環境下での軸受寿命を長く確保することができるといっ
た優れた効果がある。請求項２記載の転がり軸受では、
ダイヤモンドライクカーボン膜に転動体の主材としての
ケイ素を含有させているので、転動体とダイヤモンドラ
イクカーボン膜との密着力を高めることが可能となる。
よって、ダイヤモンドライクカーボン膜が転動体の表面
からより剥離しにくくなり、発塵性をより低くすること
ができる。As described above, since the diamond-like carbon film is suitable for a solid lubricant of a rolling element made of ceramics mainly composed of silicon nitride, a long bearing life in a high-temperature environment or a clean environment can be ensured. There is such an excellent effect. In the rolling bearing according to claim 2,
Since the diamond-like carbon film contains silicon as the main material of the rolling element, it is possible to increase the adhesion between the rolling element and the diamond-like carbon film.
Therefore, the diamond-like carbon film is less likely to be separated from the surface of the rolling element, and the dust generation can be further reduced.
【００２１】請求項３記載の転がり軸受では、ダイヤモ
ンドライクカーボン膜にフッ素を含有させているので、
さらに良好な潤滑性を確保することが可能となる。In the rolling bearing according to the third aspect, since the diamond-like carbon film contains fluorine,
Further, good lubricity can be ensured.
【図１】本発明の実施例に係る転がり軸受の断面図であ
る。FIG. 1 is a cross-sectional view of a rolling bearing according to an embodiment of the present invention.
１ 軌道内輪 ２ 軌道外輪 ３ 転動体 ４ 保持器 ５ ダイヤモンドライクカーボン膜 Reference Signs List 1 inner raceway 2 outer raceway 3 rolling element 4 cage 5 diamond-like carbon film
───────────────────────────────────────────────────── フロントページの続き (72)発明者 角本 賢一 大阪市中央区南船場三丁目５番８号 光 洋精工株式会社内 (56)参考文献 特開 昭61−91354（ＪＰ，Ａ) (58)調査した分野(Int.Cl.6，ＤＢ名) F16C 33/32 F16C 33/66 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Kenichi Tsunomoto 3-5-8 Minamisenba, Chuo-ku, Osaka-shi Koyo Seiko Co., Ltd. (56) References JP-A-61-91354 (JP, A) (58) ) Surveyed field (Int.Cl. 6 , DB name) F16C 33/32 F16C 33/66
Claims (3)
器を有する転がり軸受において、少なくとも転動体が、
窒化ケイ素を主体とするセラミックスから成り、該転動
体の表面に、ダイヤモンドライクカーボン膜が形成され
たことを特徴とする転がり軸受。In a rolling bearing having a race, a rolling element and a retainer made of a corrosion-resistant material, at least the rolling element includes:
A rolling bearing comprising a ceramic mainly composed of silicon nitride, wherein a diamond-like carbon film is formed on a surface of the rolling element.
ン膜が、ケイ素を含有することを特徴とする転がり軸
受。2. The rolling bearing according to claim 1, wherein the diamond-like carbon film contains silicon.
ン膜が、フッ素を含有することを特徴とする転がり軸
受。3. The rolling bearing according to claim 1, wherein said diamond-like carbon film contains fluorine.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3264627A JP2991834B2 (en) | 1991-10-14 | 1991-10-14 | Rolling bearing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3264627A JP2991834B2 (en) | 1991-10-14 | 1991-10-14 | Rolling bearing |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH06341445A JPH06341445A (en) | 1994-12-13 |
| JP2991834B2 true JP2991834B2 (en) | 1999-12-20 |
Family
ID=17405970
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3264627A Expired - Fee Related JP2991834B2 (en) | 1991-10-14 | 1991-10-14 | Rolling bearing |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2991834B2 (en) |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0780586B1 (en) * | 1995-12-22 | 2001-11-07 | Samsung Electronics Co., Ltd. | Hemispherical fluid bearing |
| US6893720B1 (en) | 1997-06-27 | 2005-05-17 | Nissin Electric Co., Ltd. | Object coated with carbon film and method of manufacturing the same |
| NL1007046C2 (en) | 1997-09-16 | 1999-03-17 | Skf Ind Trading & Dev | Coated rolling bearing. |
| JP2001003169A (en) * | 1999-06-18 | 2001-01-09 | Sanyo Electric Co Ltd | Treatment of carbon coating film, carbon coating film and parts having carbon coating film |
| JP3931269B2 (en) * | 1999-09-17 | 2007-06-13 | 株式会社ジェイテクト | Gear device |
| WO2001033091A1 (en) * | 1999-10-29 | 2001-05-10 | The Timken Company | Antifriction bearing for use in a corrosive environment |
| JP2002340106A (en) * | 2001-05-15 | 2002-11-27 | Tsubakimoto Chain Co | Chain incorporating rolling elements |
| US6994474B2 (en) * | 2001-05-29 | 2006-02-07 | Nsk Ltd. | Rolling sliding member and rolling apparatus |
| NL1019860C2 (en) * | 2002-01-30 | 2003-08-05 | Skf Ab | Roller bearing with a ceramic rolling element and steel inner or outer ring. |
| DE102007015635A1 (en) | 2007-03-31 | 2008-10-02 | Schaeffler Kg | Coating of a hardened steel component and method of applying the coating |
| DE102007018716A1 (en) | 2007-04-20 | 2008-10-23 | Schaeffler Kg | Method for applying a wear-resistant coating |
| JP2012060772A (en) * | 2010-09-08 | 2012-03-22 | Mitsubishi Electric Corp | Rotor of motor, motor, air handling unit, and manufacturing method of rotor of motor |
| DE102010050689A1 (en) * | 2010-11-06 | 2012-05-10 | Schaeffler Technologies Gmbh & Co. Kg | Process for producing a ceramic rolling element |
| JP2012215289A (en) * | 2011-03-25 | 2012-11-08 | Jtekt Corp | Roller bearing |
| JP2016023685A (en) * | 2014-07-17 | 2016-02-08 | 日本精工株式会社 | Cylindrical roller bearing for turbo refrigerator |
| CN111876754A (en) * | 2020-08-04 | 2020-11-03 | 中国科学院兰州化学物理研究所 | Method for realizing macroscopic super-lubricity by matching nano metal coated steel ball and hydrogen-carbon-containing film |
-
1991
- 1991-10-14 JP JP3264627A patent/JP2991834B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH06341445A (en) | 1994-12-13 |
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