JP3761731B2 - Rolling bearing - Google Patents

Rolling bearing Download PDF

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Publication number
JP3761731B2
JP3761731B2 JP01015899A JP1015899A JP3761731B2 JP 3761731 B2 JP3761731 B2 JP 3761731B2 JP 01015899 A JP01015899 A JP 01015899A JP 1015899 A JP1015899 A JP 1015899A JP 3761731 B2 JP3761731 B2 JP 3761731B2
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Japan
Prior art keywords
rolling bearing
rolling
dlc film
diamond
carbon film
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Expired - Fee Related
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JP01015899A
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Japanese (ja)
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JP2000205277A (en
Inventor
一徳 林田
豊田　　泰
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JTEKT Corp
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JTEKT Corp
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/30—Parts of ball or roller bearings
    • F16C33/58—Raceways; Race rings
    • F16C33/583—Details of specific parts of races
    • F16C33/585—Details of specific parts of races of raceways, e.g. ribs to guide the rollers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/30—Parts of ball or roller bearings
    • F16C33/32—Balls
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C19/00—Bearings with rolling contact, for exclusively rotary movement
    • F16C19/02—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows
    • F16C19/04—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows for radial load mainly
    • F16C19/06—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows for radial load mainly with a single row or balls
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2206/00—Materials with ceramics, cermets, hard carbon or similar non-metallic hard materials as main constituents
    • F16C2206/02—Carbon based material
    • F16C2206/04—Diamond like carbon [DLC]
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2240/00—Specified values or numerical ranges of parameters; Relations between them
    • F16C2240/40—Linear dimensions, e.g. length, radius, thickness, gap
    • F16C2240/54—Surface roughness

Description

【０００１】
【発明の属する技術分野】
本発明は、転がり軸受に関する。この転がり軸受は、例えば真空、高温、清浄雰囲気などに配置される各種機器に用いられる。
【０００２】
【従来の技術】
上述した環境で用いられる転がり軸受では、軌道輪や転動体の表面に対して、金、銀、銅、鉛などの軟質金属やグラファイトや二硫化モリブデンなどのような固体潤滑剤をコーティングしている。
【０００３】
【発明が解決しようとする課題】
上述した転がり軸受では、固体潤滑剤が比較的軟質であって表面粗さが粗いために、転動体の転がり抵抗が大きく回転トルクが不安定になることが指摘されるとともに、転動体の転動、摺動動作に伴い固体潤滑剤が摩耗しやすいなど短寿命であることが指摘される。
【０００４】
したがって、本発明は、転がり軸受において、回転トルクの安定化ならびに耐摩耗性の向上を図ることを目的としている。
【０００５】
【課題を解決するための手段】
請求項１の発明にかかる転がり軸受は、無潤滑条件で使用される転がり軸受であって、軌道輪の軌道面あるいは転動体表面の少なくともいずれかに、転動体の転がり抵抗を低減すべくダイヤモンドライクカーボン膜が形成されており、このダイヤモンドライクカーボン膜の表面粗さが、Ｒａ（中心線平均粗さ）で０．００５μｍ以下に設定されている。
【０００６】
請求項２の発明にかかる転がり軸受は、軌道輪の軌道面あるいは転動体表面の少なくともいずれかに、ふっ素を含有したダイヤモンドライクカーボン膜が形成されており、このダイヤモンドライクカーボン膜の表面粗さが、Ｒａ（中心線平均粗さ）で０．００５μｍ以下に設定されて、かつ、軸受内部をふっ素系潤滑剤で潤滑する。
請求項３の発明にかかる転がり軸受は、請求項１または２に記載の転がりにおいて、前記ダイヤモンドライクカーボン膜の硬度が、Ｈｖ（ビッカース硬さ試験）で２０００以上に設定されている。
請求項４の発明に係る転がり軸受は、請求項１〜３のいずれかに記載の転がり軸受において、真空、高温または清浄雰囲気中に配置される。
【０００７】
以上、本発明では、軌道輪と転動体とがきわめて平滑なダイヤモンドライクカーボン膜を介して接触するから、転動体の転がり抵抗が軽減されるとともに、転動体が万一滑ったとしてもダイヤモンドライクカーボン膜の摩耗が抑制されることになる。
【０００９】
【発明の実施の形態】
本発明の詳細を図面に示す実施形態に基づいて説明する。
【００１０】
図１は本発明の一実施形態にかかる転がり軸受の上半分の縦断面図である。図中、Ａは転がり軸受の全体を示しており、深溝型玉軸受と呼ばれる形式を例示している。この転がり軸受Ａは、内輪１と、外輪２と、球状の転動体３と、波形の保持器４とを備えている。
【００１１】
上述した内・外輪１，２、転動体３は、各種の金属材で形成される。この金属材としては、例えばＪＩＳ規格ＳＵＳ４４０Ｃなどのマルテンサイト系ステンレス鋼、例えばＪＩＳ規格ＳＵＳ６３０などの析出硬化型ステンレス鋼に適当な硬化熱処理を施した金属材などが、ＪＩＳ規格ＳＫＨ４などの高速度工具鋼などが挙げられる。また、保持器４の材料としては、ＪＩＳ規格ＳＵＳ３０４などのオースナイト系ステンレス鋼などが挙げられる。
【００１２】
これらのうち、内輪１の外周面および外輪２の内周面には、ダイヤモンドライクカーボン（Ｄｉａｍｏｎｄ Ｌｉｋｅ Ｃａｒｂｏｎ：ＤＬＣ）膜５が形成されている。このＤＬＣ膜５は、例えば化学蒸着（ＣＶＤ）法、プラズマＣＶＤ法、イオンビーム形成法、イオン化蒸着法などにより形成することができる。
【００１３】
仮に、ＣＶＤ法でＤＬＣ膜５を形成する場合には、例えばＣＨ4などの炭素源またはこれに水素などを混合した混合ガスに、必要に応じてキャリアガスとして適量の不活性ガスを加え、これを１〜１０-3Ｔｏｒｒ程度で、２００〜１１００℃程度に加熱された対象部品に対して流通する。これにより、対象部品に炭素が付着されてＤＬＣ膜５が生成されることになる。このとき、ＤＬＣ膜５の膜厚は、例えば０．１〜１μｍ程度に管理され、また、表面粗さは、Ｒａ（中心線平均粗さ）で０．００５μｍに管理され、硬度は、Ｈｖ（ビッカース硬さ試験）で２０００以上に管理される。なお、ＤＬＣ膜５を対象部品に部分的に形成する場合には、適宜マスキングを施せばよい。
【００１４】
特に、母材を上述したような金属材とする場合には、母材そのものに含まれる炭素に対して上述したＤＬＣ膜５の炭素が結合することになり、そのために、ＤＬＣ膜５の母材に対する密着性がきわめて高くなる。しかも、ＤＬＣ膜５を構成する炭素原子相互の結合力が強いので、ＤＬＣ膜５そのものの摩耗や損傷が発生しにくくなる。また、ＤＬＣ膜５を上述したレベルに硬質にして表面を平滑にしているから、転動体３の転がり抵抗が軽減されて転動動作がきわめて円滑になるとともに、ＤＬＣ膜５が摩耗しにくくなる。
【００１５】
なお、ＤＬＣ膜の粗さおよび硬度は、ＤＬＣ膜形成時の成形雰囲気の圧力、温度、ガスの種類、印加電圧などを調整することで変えることができる。
【００１６】
図４に、ＤＬＣ膜の表面粗さと摩擦係数との関係を示している。このデータは、上述したようなＤＬＣ膜形成時の条件を種々変更して４種類の異なる組成のサンプルを作成し、それぞれについて、表面粗さＲａと摩擦係数μを測定したものである。なお、摩擦係数μは、図５に示すように、ＤＬＣ膜をコーティングしたディスクに鋼球またはアルミニウム球を押し当てて測定した。転がり軸受として回転トルクを安定させるためには、摩擦係数μを０．７以下にする必要があるが、図４からＤＬＣ膜の表面粗さＲａを０．００５μｍ以下にすると摩擦係数μが０．７以下となり、摩擦抵抗が少なく、回転トルクを安定させることができる。また、軌道面および転動体の表面粗さが０．００５μｍよりも粗いと、ＤＬＣ膜は硬度が高いので、接触相手面を著しく摩耗させてしまい軸受寿命が短くなってしまう。さらに、ＤＬＣ膜の硬度がＨｖ２０００以上であると耐摩耗性が向上し、軸受寿命のさらなる向上が可能になる。
【００１７】
以上説明した転がり軸受Ａでは、軸受構成要素の所要部位に平滑かつ硬質なＤＬＣ膜５を形成しているから、転がり軸受Ａの長期にわたる動作安定化を達成できるとともに、長寿命化を達成できるようになる。しかも、このような転がり軸受Ａは、無潤滑での使用に優れているから、真空、高温、清浄雰囲気となる半導体製造機器、あるいはそれと同様の雰囲気に配置される機器に好適に用いることができる。
【００１８】
なお、本発明は上記実施形態のみに限定されるものではなく、種々な応用や変形が考えられる。
【００１９】
（１） 上記実施形態では、軸受形式として深溝型玉軸受を引用しているが、その他の種類の転がり軸受に本発明を適用できる。
【００２０】
（２） 上記実施形態では、ＤＬＣ膜５を内・外輪１，２のみに形成しているが、図２に示すように転動体３のみに形成してもよいし、また、図３に示すように軸受構成要素１〜４のすべてに形成することができる。また、上記実施形態ではＤＬＣ膜５を内輪１の外周面と外輪２の内周面とに形成しているが、軌道面のみあるいは全外表面に形成することができる。また、保持器４にＤＬＣ膜５を形成する場合には、全表面に形成しても、あるいはポケット内面のみに形成してもよい。特に、ＤＬＣ膜５を軸受構成要素１〜４のすべてに形成した場合には、腐食環境での使用に十分耐え得るものにでき、そのため例えば母材を耐食性素材とせずに一般的な金属材などとして、コスト低減を図ることが可能になる。
【００２１】
（３） 上記実施形態での転がり軸受Ａについて、ふっ素系潤滑剤を塗布するようにしてもよい。その場合、ＤＬＣ膜５に対して軸受内部のふっ素系潤滑剤の濡れ性がきわめて良好になるので、仮に転動体３の滑りが発生しても、内・外輪１，２や転動体３の表面の潤滑油膜が途切れにくくなり、潤滑性を向上させることができる。なお、この場合、ＤＬＣ膜５に、ふっ素を含有させてもよい。この場合、膜中に含有するふっ素により、軸受内部に使用されるふっ素系潤滑剤の濡れ性がさらに良好となり、さらに潤滑油膜が途切れにくくなる。このようなふっ素含有のＤＬＣ膜５を得るには、上記実施形態でのＣＶＤ法での供給ガスにふっ素を混合させた状態としたり、あるいはＤＬＣ膜５を形成した後で当該ＤＬＣ膜５を例えばプラズマふっ素雰囲気中で処理することが考えられる。
【００２２】
（４） 上記実施形態での転がり軸受Ａにおいて、転動体３については、セラミックス材により形成することができる。このセラミックス材としては、焼結助剤として、イットリア（Ｙ2Ｏ3）およびアルミナ（Ａｌ2Ｏ3）、その他、適宜、窒化アルミ（ＡｌＮ）、酸化チタン（ＴｉＯ2）、スピネル（ＭｇＡｌ2Ｏ4）を用いた窒化けい素（Ｓｉ3Ｎ4）を主体とするものの他、アルミナ（Ａｌ2Ｏ3）や炭化けい素（ＳｉＣ）、ジルコニア（ＺｒＯ2）、窒化アルミ（ＡｌＮ）などを用いることができる。また、保持器４については、合成樹脂材料により形成することができる。その場合、保持器４の形状については冠形やもみ抜き形とするのが好ましい。この合成樹脂材料としては、耐熱性を有する熱可塑性樹脂、例えば５〜１０ｗｔ％のＰＴＦＥ（ポリテトラフルオロエチレン）および１０〜２０ｗｔ％のグラファイトが充填されたＴＰＩ（熱可塑性ポリイミド）樹脂の他、ポリテトラフルオロエチレン（以下、ＰＴＦＥと略称する）、エチレンテトラフルオロエチレン（ＥＴＦＥ）などのふっ素系樹脂やポリエーテルエーテルケトン（ＰＥＥＫ）、ポリフェニレンサルファイド（ＰＰＳ）、ポリエーテルサルフォン（ＰＥＳ）、ポリエーテルニトリル（ＰＥＮ）、ポリアミドイミド（ＰＡＩ）、ナイロン４６などのエンジニアリングプラスチックスなどが挙げられる。これらの樹脂には、適宜、ガラス繊維などの強化繊維が添加されてもよい。
【００２３】
（５） 上記実施形態では、転がり軸受Ａとして密封装置を持たない開放形のものを例示しているが、密封装置を装着したものとしてもよい。
【００２４】
【発明の効果】
請求項１および２の発明にかかる転がり軸受では、軌道輪と転動体との接触部位に平滑なダイヤモンドライクカーボン膜を形成することにより、軌道輪と転動体との転動、摺動時の摩擦係数を低減できるようにしており、それにより回転トルクの安定化ならびに耐摩耗性を向上できるようになるなど、長寿命化に貢献できるようになる。
【図面の簡単な説明】
【図１】本発明の一実施形態にかかる転がり軸受の上半分の縦断面図
【図２】本発明の他の実施形態にかかる転がり軸受の上半分の縦断面図
【図３】本発明のさらに他の実施形態にかかる転がり軸受の上半分の縦断面図
【図４】ＤＬＣ膜の表面粗さと摩擦係数との相関を示すグラフ
【図５】ＤＬＣ膜の摩擦係数の測定方法を示す図
【符号の説明】
Ａ 転がり軸受
１ 内輪
２ 外輪
３ 転動体
４ 保持器
５ ＤＬＣ膜[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a rolling bearing. This rolling bearing is used for various devices arranged in, for example, vacuum, high temperature, clean atmosphere, and the like.
[0002]
[Prior art]
In the rolling bearing used in the above-described environment, the surface of the bearing ring or rolling element is coated with a soft metal such as gold, silver, copper, or lead, or a solid lubricant such as graphite or molybdenum disulfide. .
[0003]
[Problems to be solved by the invention]
In the rolling bearing described above, the solid lubricant is relatively soft and the surface roughness is rough. Therefore, it is pointed out that the rolling resistance of the rolling element is large and the rotational torque becomes unstable. It is pointed out that the solid lubricant has a short life, such as being easily worn with the sliding operation.
[0004]
Accordingly, an object of the present invention is to stabilize rotational torque and improve wear resistance in a rolling bearing.
[0005]
[Means for Solving the Problems]
The rolling bearing according to the first aspect of the present invention is a rolling bearing used under non-lubricated conditions, and is applied to at least one of the raceway surface and the rolling element surface of the bearing ring so as to reduce the rolling resistance of the rolling element. A carbon film is formed, and the surface roughness of the diamond-like carbon film is set to Ra (center line average roughness) of 0.005 μm or less.
[0006]
In the rolling bearing according to the second aspect of the present invention, a diamond-like carbon film containing fluorine is formed on at least one of the raceway surface of the raceway or the surface of the rolling element, and the surface roughness of the diamond-like carbon film is low. Ra (center line average roughness) is set to 0.005 μm or less, and the inside of the bearing is lubricated with a fluorine-based lubricant.
A rolling bearing according to a third aspect of the present invention is the rolling bearing according to the first or second aspect, wherein the hardness of the diamond-like carbon film is set to 2000 or more by Hv (Vickers hardness test).
A rolling bearing according to a fourth aspect of the present invention is the rolling bearing according to any one of the first to third aspects, wherein the rolling bearing is disposed in a vacuum, a high temperature, or a clean atmosphere.
[0007]
As described above, in the present invention, since the raceway and the rolling element come into contact with each other through a very smooth diamond-like carbon film, the rolling resistance of the rolling element is reduced, and even if the rolling element slips, the diamond-like carbon Abrasion of the film is suppressed.
[0009]
DETAILED DESCRIPTION OF THE INVENTION
The details of the present invention will be described based on embodiments shown in the drawings.
[0010]
FIG. 1 is a longitudinal sectional view of an upper half of a rolling bearing according to an embodiment of the present invention. In the figure, A indicates the entire rolling bearing, and illustrates a type called a deep groove type ball bearing. The rolling bearing A includes an inner ring 1, an outer ring 2, a spherical rolling element 3, and a corrugated cage 4.
[0011]
The inner / outer rings 1 and 2 and the rolling elements 3 described above are formed of various metal materials. Examples of the metal material include a martensitic stainless steel such as JIS standard SUS440C, a metal material obtained by subjecting a precipitation hardening type stainless steel such as JIS standard SUS630 to appropriate hardening heat treatment, and the like, and a high-speed tool such as JIS standard SKH4. For example, steel. Examples of the material of the cage 4 include austenitic stainless steel such as JIS standard SUS304.
[0012]
Among these, a diamond-like carbon (DLC) film 5 is formed on the outer peripheral surface of the inner ring 1 and the inner peripheral surface of the outer ring 2. The DLC film 5 can be formed by, for example, a chemical vapor deposition (CVD) method, a plasma CVD method, an ion beam forming method, an ionized vapor deposition method, or the like.
[0013]
If the DLC film 5 is formed by CVD, for example, an appropriate amount of inert gas is added as a carrier gas to a carbon source such as CH 4 or a mixed gas obtained by mixing hydrogen or the like, if necessary. Is distributed to the target component heated to about 200 to 1100 ° C. at about 1 to 10 −3 Torr. As a result, carbon adheres to the target part and the DLC film 5 is generated. At this time, the film thickness of the DLC film 5 is managed to be, for example, about 0.1 to 1 μm, the surface roughness is managed to be 0.005 μm in Ra (centerline average roughness), and the hardness is Hv ( Vickers hardness test) is controlled to 2000 or more. In addition, what is necessary is just to perform masking suitably, when forming DLC film 5 partially in object part.
[0014]
In particular, when the base material is a metal material as described above, the carbon of the DLC film 5 described above is bonded to the carbon contained in the base material itself. Adhesiveness to is extremely high. In addition, since the bonding force between the carbon atoms constituting the DLC film 5 is strong, the DLC film 5 itself is less likely to be worn or damaged. Further, since the DLC film 5 is hardened to the above-described level and the surface is smoothed, the rolling resistance of the rolling element 3 is reduced, the rolling operation becomes extremely smooth, and the DLC film 5 is hardly worn.
[0015]
Note that the roughness and hardness of the DLC film can be changed by adjusting the pressure, temperature, type of gas, applied voltage, and the like of the molding atmosphere when forming the DLC film.
[0016]
FIG. 4 shows the relationship between the surface roughness of the DLC film and the friction coefficient. In this data, samples having four different compositions were prepared by variously changing the conditions for forming the DLC film as described above, and the surface roughness Ra and the friction coefficient μ were measured for each sample. As shown in FIG. 5, the friction coefficient μ was measured by pressing a steel ball or an aluminum sphere against a disk coated with a DLC film. In order to stabilize rotational torque as a rolling bearing, it is necessary to make the friction coefficient μ 0.7 or less. However, when the surface roughness Ra of the DLC film is made 0.005 μm or less from FIG. The frictional resistance is small and the rotational torque can be stabilized. On the other hand, if the surface roughness of the raceway surface and the rolling element is more than 0.005 μm, the DLC film has a high hardness, so that the contact surface is significantly worn and the bearing life is shortened. Furthermore, when the hardness of the DLC film is Hv2000 or more, the wear resistance is improved, and the bearing life can be further improved.
[0017]
In the rolling bearing A described above, since the smooth and hard DLC film 5 is formed at a required portion of the bearing component, it is possible to achieve stable operation of the rolling bearing A over a long period of time and to achieve a long life. become. Moreover, since such a rolling bearing A is excellent in use without lubrication, it can be suitably used for semiconductor manufacturing equipment that is in a vacuum, high temperature, and clean atmosphere, or equipment that is placed in a similar atmosphere. .
[0018]
In addition, this invention is not limited only to the said embodiment, Various application and deformation | transformation can be considered.
[0019]
(1) Although the deep groove type ball bearing is cited as the bearing type in the above embodiment, the present invention can be applied to other types of rolling bearings.
[0020]
(2) In the above embodiment, the DLC film 5 is formed only on the inner and outer rings 1 and 2, but it may be formed only on the rolling element 3 as shown in FIG. 2, or as shown in FIG. 3. Thus, it can be formed on all of the bearing components 1 to 4. Moreover, in the said embodiment, although the DLC film 5 is formed in the outer peripheral surface of the inner ring | wheel 1 and the inner peripheral surface of the outer ring | wheel 2, it can form in only a track surface or all the outer surfaces. When the DLC film 5 is formed on the cage 4, it may be formed on the entire surface or only on the inner surface of the pocket. In particular, when the DLC film 5 is formed on all of the bearing components 1 to 4, the DLC film 5 can sufficiently withstand use in a corrosive environment. For this reason, for example, a general metal material without using a base material as a corrosion resistant material can be used. As a result, the cost can be reduced.
[0021]
(3) About the rolling bearing A in the said embodiment, you may make it apply | coat a fluorine-type lubricant. In this case, the wettability of the fluorine-based lubricant inside the bearing with respect to the DLC film 5 becomes extremely good, so even if the rolling element 3 slips, the inner and outer rings 1 and 2 and the surface of the rolling element 3 This makes it difficult for the lubricating oil film to be interrupted, thereby improving the lubricity. In this case, the DLC film 5 may contain fluorine. In this case, the fluorine contained in the film further improves the wettability of the fluorine-based lubricant used inside the bearing, and further makes the lubricating oil film difficult to break. In order to obtain such a fluorine-containing DLC film 5, fluorine is mixed with the supply gas in the CVD method in the above embodiment, or the DLC film 5 is formed after the DLC film 5 is formed, for example. It is conceivable to perform the treatment in a plasma fluorine atmosphere.
[0022]
(4) In the rolling bearing A in the above embodiment, the rolling element 3 can be formed of a ceramic material. As the ceramic material, yttria (Y 2 O 3 ) and alumina (Al 2 O 3 ) are used as sintering aids, and aluminum nitride (AlN), titanium oxide (TiO 2 ), spinel (MgAl 2 O), as appropriate. 4 ) In addition to silicon nitride (Si 3 N 4 ) mainly used, alumina (Al 2 O 3 ), silicon carbide (SiC), zirconia (ZrO 2 ), aluminum nitride (AlN), etc. are used. be able to. The cage 4 can be formed of a synthetic resin material. In that case, the shape of the cage 4 is preferably a crown shape or a hollow shape. Examples of the synthetic resin material include thermoplastic resins having heat resistance, such as TPI (thermoplastic polyimide) resin filled with 5 to 10 wt% PTFE (polytetrafluoroethylene) and 10 to 20 wt% graphite, Fluorine resins such as tetrafluoroethylene (hereinafter abbreviated as PTFE), ethylenetetrafluoroethylene (ETFE), polyether ether ketone (PEEK), polyphenylene sulfide (PPS), polyether sulfone (PES), polyether nitrile (PEN), polyamideimide (PAI), engineering plastics such as nylon 46, and the like. Reinforcing fibers such as glass fibers may be appropriately added to these resins.
[0023]
(5) In the said embodiment, although the open type thing which does not have a sealing device is illustrated as the rolling bearing A, it is good also as what attached the sealing device.
[0024]
【The invention's effect】
In the rolling bearing according to the first and second aspects of the present invention, a smooth diamond-like carbon film is formed at the contact portion between the race ring and the rolling element, so that the friction between the race ring and the rolling element is reduced. The coefficient can be reduced, so that the rotational torque can be stabilized and the wear resistance can be improved.
[Brief description of the drawings]
FIG. 1 is a longitudinal sectional view of an upper half of a rolling bearing according to an embodiment of the present invention. FIG. 2 is a longitudinal sectional view of an upper half of a rolling bearing according to another embodiment of the present invention. FIG. 4 is a graph showing a correlation between the surface roughness of the DLC film and the friction coefficient. FIG. 5 is a diagram showing a method for measuring the friction coefficient of the DLC film. Explanation of symbols]
A Rolling bearing 1 Inner ring 2 Outer ring 3 Rolling element 4 Cage 5 DLC film

Claims (4)

無潤滑条件で使用される転がり軸受であって、
軌道輪の軌道面あるいは転動体表面の少なくともいずれかに、転動体の転がり抵抗を低減すべくダイヤモンドライクカーボン膜が形成されており、このダイヤモンドライクカーボン膜の表面粗さが、Ｒａ（中心線平均粗さ）で０．００５μｍ以下に設定されている、ことを特徴とする転がり軸受。 A rolling bearing used under non-lubricated conditions,
A diamond-like carbon film is formed on at least one of the raceway surface of the raceway and the surface of the rolling element so as to reduce the rolling resistance of the rolling element. The surface roughness of the diamond-like carbon film is Ra (center line average). A rolling bearing characterized in that the roughness is set to 0.005 μm or less. 軌道輪の軌道面あるいは転動体表面の少なくともいずれかに、ふっ素を含有したダイヤモンドライクカーボン膜が形成されており、このダイヤモンドライクカーボン膜の表面粗さが、Ｒａ（中心線平均粗さ）で０．００５μｍ以下に設定されて、かつ、軸受内部をふっ素系潤滑剤で潤滑する、ことを特徴とする転がり軸受。 A diamond-like carbon film containing fluorine is formed on at least one of the raceway surface and the rolling element surface of the raceway, and the surface roughness of this diamond-like carbon film is 0 in terms of Ra (centerline average roughness). A rolling bearing characterized by being set to 0.005 μm or less and lubricating the inside of the bearing with a fluorine-based lubricant . 請求項１または２に記載の転がり軸受において、
前記ダイヤモンドライクカーボン膜の硬度が、Ｈｖ（ビッカース硬さ試験）で２０００以上に設定されている、ことを特徴とする転がり軸受。In the rolling bearing according to claim 1 or 2,
A rolling bearing characterized in that the hardness of the diamond-like carbon film is set to 2000 or higher in terms of Hv (Vickers hardness test). 真空、高温または清浄雰囲気中に配置される、ことを特徴とする請求項１〜３のいずれかに記載の転がり軸受。  The rolling bearing according to claim 1, wherein the rolling bearing is disposed in a vacuum, a high temperature, or a clean atmosphere.
JP01015899A 1999-01-19 1999-01-19 Rolling bearing Expired - Fee Related JP3761731B2 (en)

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JP2002349289A (en) * 2001-05-21 2002-12-04 Toshiba Corp Sole plate for turbine and power generation plant apparatus using the sole plate
JP4807689B2 (en) * 2001-05-23 2011-11-02 株式会社ハーモニック・ドライブ・システムズ Lubrication-type wave gear device
US6994474B2 (en) * 2001-05-29 2006-02-07 Nsk Ltd. Rolling sliding member and rolling apparatus
CN103261712A (en) * 2010-12-24 2013-08-21 本田技研工业株式会社 Ball joint
JP2014020258A (en) * 2012-07-17 2014-02-03 Furukawa Industrial Machinery Systems Co Ltd Uniaxial eccentric screw pump
CN111876754A (en) * 2020-08-04 2020-11-03 中国科学院兰州化学物理研究所 Method for realizing macroscopic super-lubricity by matching nano metal coated steel ball and hydrogen-carbon-containing film

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