JP2975785B2 - Texture device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a texture device for polishing a disk-shaped material by reciprocating a contact roll at a high speed, and is particularly suitable for polishing a hard disk or the like.

[0002]

2. Description of the Related Art Normally, a hard disk is rotated at a high speed when used to float a magnetic head, and writing and reading of data to and from the hard disk are performed through the magnetic head.

In response to recent demands for high-density recording, it has been required to reduce the flying height, which is the height of the hard disk from the disk surface. For this reason, it is necessary to smooth the disk surface, and the substrate surface before the formation of the magnetic layer of the hard disk has conventionally been polished (textured). On the other hand, if the disk surface is too smooth, the magnetic head may adhere to the disk surface when the hard disk is started.

Accordingly, in order to form fine irregularities on the surface, the polishing is performed coaxially with the center of rotation of the hard disk by slowly swinging a polishing tape or a polishing pad (so-called polishing process). In addition to the circular processing method, a cross processing method is known in which a polishing tape or a polishing pad is reciprocated at a high speed so as to vibrate the polishing tape at a high speed so that the marks formed by the polishing tape or the like cross on the surface of the hard disk. I have.

FIG. 7 shows an example of this cloth processing method.
That is, as shown in FIG. 7, the contact roll 70 on which the polishing tape 104 is stretched reciprocates, and the striation A formed on the substrate 102 by being polished by the polishing tape 104 is formed.
(Hereinafter referred to as the cross hatch angle) θ
Usually, it has an angle of about 5 ° to 30 °, and this cross processing method has been widely used with high-density recording.

For this texturing, a polishing process using a polishing tape, a polishing pad having loose abrasive particles adhered to the surface and impregnated are used.

Further, a magnetic layer, a protective layer, a lubricating layer, and the like are placed on the substrate after the texture processing, thereby completing a hard disk.

[0008]

As described above, when polishing a substrate constituting a disk, a polishing tape or a polishing pad is applied to the substrate along the radial direction of the substrate while rotating the substrate. The polishing operation was performed by reciprocating.

However, conventionally, when the polishing tape or the like is reciprocated with respect to the substrate, not only the contact roll but also the entire apparatus is reciprocated.
The number of reciprocating motions was about the limit. Moreover, in order to obtain the same cross angle, the number of rotations of the spindle for rotating the substrate is
Since it must be set in accordance with the speed of this reciprocation, the limit is about 80 to 160 rpm.
For this reason, it has been difficult to improve the processing speed of the polishing process, and there has been a drawback that the productivity in continuously polishing a large number of substrates cannot be increased.

SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and has as its object to provide a texture device that enables a contact roll to reciprocate at a high speed and enhances productivity when polishing a disk-shaped material such as a substrate. I do.

[0011]

According to a first aspect of the present invention, there is provided a texturing apparatus for texturing a disk-shaped material.
A kissing device for holding an end of a polishing tape
A cradle for holding a tape reel, the polishing tape is stretched, a contact roll for pressing the polishing tape on the surface of the disk-shaped material, a support portion for supporting the contact roller is connected to said frame, The support
Rotation of the disc-shaped material relative to the gantry
An arm that supports reciprocally in a direction crossing the direction,
Connected to said frame, and having a drive means for reciprocating said contact roll through said support portion.

[0012]

[0013] Texture apparatus of claim 2, wherein
Item 1 is characterized in that the driving means is of a cam type.

[0014]

The operation according to the first aspect is as follows.

When the driving means is operated, the support portion reciprocates with respect to the gantry. Therefore, the contact roll reciprocates on the rotating disk surface integrally with the supporting portion, and the polishing tape stretched on the contact roll presses the disk surface to perform polishing.

That is, only the lightweight contact roll and the supporting portion supporting the contact roll reciprocate with respect to the gantry, and the inertia force during the reciprocation is reduced, so that reciprocation at a high speed is possible. Become.

[0017]

[0018]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A texture apparatus according to a first embodiment of the present invention is shown in FIGS. 1, 2, 3 and 5, and this embodiment will be described with reference to these figures. In this embodiment, a cam system is used as an example.

As shown in FIG. 1 showing the overall structure of this embodiment, a gantry 12 forming an outer frame of a texture device 10 is provided.
The drive motor 14 is fixed to the
The gear 20 is attached to the fourth rotation shaft 14A. A bracket 16 is screwed to the gantry 12 via a screw 32.
A gear 22 that meshes with 0 is rotatably supported. A pulley 26 is mounted on the gear 22 coaxially with the gear 22, and a rubber belt 24 is wound around the pulley 26.

On the other hand, on the lower side of the bracket 16, another bracket 18 is screwed to the gantry 12 via a screw 32, and a pair of pulleys 28, 30 are integrated with each other on the tip side of the bracket 18. It is supported so that it can rotate. A rubber belt 24 is wound around the pulley 28, and the rotation of the pulley 26
8 and 30.

A connecting portion 36A of a cam support 36, which rotatably supports an eccentric cam 42 as a driving means, is screwed to a connecting piece 18A protruding below the bracket 18 via a rotating shaft 41. The cam support 36 is supported and fixed to the bracket 18 by the screwing. Then, as shown in FIG. 3, the amount of deviation of the center of the eccentric cam 42 with respect to the rotating shaft 41 is defined as an eccentric amount W, and the eccentric amount W is set to, for example, a value of 0.25 to 2.5 mm. Further, a pulley 40 is attached to the rotary shaft 41 coaxially with the rotary shaft 41, and a rubber belt 38 is wound around the pulley 40 so as to connect the pulley 40 and the pulley 30.

On the other hand, an arm 50 fixed to a mounting portion 48 protruding from the gantry 12 by screwing a screw 54 is located below the gantry 12. The distal end 50B of the arm 50 is bent and extends upward and downward in FIG.
A support body 60 in which slide bushes 76 and 86 are fitted is fixed to the arm 52 via a pair of screws 58.

As shown in FIG. 2, the slide bush 76 is provided with a slide pin 72 rotatably supporting the contact roll 70 at the left end side so as to be reciprocally movable in the left-right direction in FIG. As shown in FIG. 5, which conceptually shows a traveling system of the polishing tape, the contact roll 7
The polishing tape 104 sent from the supply reel 96 side via the guide roller 94 is wound around 0. The polishing tape 104 is wound on a take-up reel 98 rotated by a motor built in the gantry 12 via a tape feed roller 95 (not shown) in FIG. . Here, the polishing tape 104
As the type, those carrying alumina abrasive grains of about 2500 to 6000 ° are typically used .

The guide roller 94 on the supply reel 96 side
A mechanism such as a motor and a sliding mechanism (not shown) is provided in the gantry 12 so as to apply a predetermined tension to the polishing tape 104 fed between the tape and the tape feed roller 95 on the take-up reel 98 side. Therefore, the polishing tape 104 is wound on the winding reel 98 while being guided by the guide rollers 94 and being given a constant tension. Then, the contact roll 70 is
2 is in contact with the disk surface via the polishing tape 104.

Although a non-magnetic substrate is used as the substrate 102, the material of the substrate 102 is not particularly limited.
An aluminum alloy plate (for example, having a thickness of about 1 to 3 mm) provided with a nickel-phosphorus layer formed by electroless plating is used. However, a metal substrate such as copper or titanium, a glass substrate, a ceramic substrate, a carbonaceous substrate, a resin substrate, or the like can also be used.

As a more specific example, a nickel-phosphorous electroless plating film (for example, having a thickness of 20 to 30 μm) is formed on the surface of an aluminum-magnesium alloy substrate.
m), and a base film forming substrate (this substrate is also called a substrate) in which the base film is mirror-finished is used.

On the other hand, a cam contact body 80 rotatably supporting a roller 90 via a bearing 88 is fixed to the right end side of the slide pin 72 in FIG. 2, and is wound around the outer periphery of the slide pin 72. Coil spring 74
The cam contact body 80 and the slide pin 72 and the support 6
It is positioned so as to be separated from zero. Therefore, the roller 90 is pressed by the eccentric cam 4 by the pressing force of the coil spring 74.
2 comes into contact with the outer periphery. The spring constant of the coil spring 74 is usually about 0.05 to 0.3 kg / mm so that the roller 90 always contacts the eccentric cam 42 and reciprocates along the shape of the eccentric cam 42. Also,
The pressing load range when the coil spring 74 is attached is usually about 1 to 3 kgf.

Further, the cam contact body 80 has a slide pin 82 positioned so as to extend in parallel with the slide pin 72.
Is fixed at the right end, and the left end of the slide pin 82 is fitted into the slide bush 86. Accordingly, when the cam contact body 80 moves relative to the support body 60, the relative rotation between the support body 60 and the cam contact body 80 is suppressed because the pair of slide pins 72 and 82 are provided. In addition, the slide pins 72 and 82, the cam contact body 80, the roller 90, and the like serve as a support portion of the contact roll 70.

Next, the operation of this embodiment will be described. The gear 2 is driven through the gear 20 by the drive rotation of the drive motor 14.
2 rotates, and the pulley 26 rotates. For this reason, the pulley 4 is connected via the rubber belts 24, 38 and the pulleys 28, 30.
0 is rotated (for example, about 400 to 3000 rpm),
As a result, the eccentric cam 42 rotates, and the cam contact body 80 is guided by the slide bushes 76 and 86 and reciprocates with respect to the gantry 12 together with the roller 90 that contacts the eccentric cam 42.

Therefore, the cam contact member 80, the slide pin 7
The contact roll 70 reciprocates on the surface of the disk, which is the surface of the disk-shaped substrate 102, and the polishing tape 104 wrapped around the contact roll 70 polishes the surface of the disk. The width S of the reciprocation at this time is twice as large as the value of the amount of eccentricity W.

That is, only the lightweight contact roll 70 and the supporting portion for supporting the contact roll 70
Reciprocating with respect to the contact roll 7
As a result, the inertial force at the time of reciprocating at 0 is reduced, so that the contact roll 70 can reciprocate at a high speed. Specifically, even if the crosshatch angle θ is the same as the conventional one, the reciprocating motion of the contact roll 70 is 22 minutes per minute.
00 reciprocating motions can be performed.
The number of rotations of the spindle for driving and rotating the substrate 102 is 300
rpm.

Further, the slide pin 82 is
2, the contact roll 70, the coil spring 74, and the eccentric cam 42 are shifted from the straight line so that even if the eccentric cam 42 is rotated at a high speed, the contact roll 70, the slide pin 72, the coil spring 74, etc. When the contact roll 70 is rotated, the contact roll 70 does not rattle.
Is firmly attached.

Next, a texture device according to a second embodiment of the present invention is shown in FIG. 6, and this embodiment will be described with reference to FIG. Note that the same members as those in the first embodiment are denoted by the same reference numerals, and redundant description will be omitted.

FIG. 6 shows the overall configuration of this embodiment. A connecting portion 36B of a cam support 36 which rotatably supports an eccentric cam 42 is screwed to a lower right portion of the gantry 12 forming an outer frame of the texture device 10 via a rotary shaft 41. The cam support 3 is attached to the gantry 12 by screwing.
6 is supported and fixed.

A bracket 112 is fixed to the gantry 12 below the gantry 12. An arm 1 that penetrates the tip of the bracket 112 so as to be able to reciprocate.
50 is supported by the bracket 112. The distal end 150B of the arm 150 clamps the base end 52A of the arm 52 which is bent and extends downward in FIG. 1, and the arm 52 rotatably supports the contact roll 70.

On the other hand, a cam contact body 80 rotatably supporting a roller 90 via a bearing 88 (see FIG. 2) is fixed to the base end 150A of the arm 150.
A coil spring 74 wound around the outer periphery of the arm 150 causes a gap between the cam contact body 80 and the bracket 112 to move.
It is located to be separated.

On the other hand, the mounting portion 4 located below the mount 12
A linear motion bearing 110 which is constituted by, for example, an LM guide, a linear bush, or the like and is capable of linear movement is interposed between the connecting member 49 attached to the arm 8 and the arm 150.

In the present embodiment, the arms 52 and 150, the cam contact member 80, the roller 90, and the like serve as a support for the contact roll 70.

Next, the operation of this embodiment will be described. The gear 2 is driven through the gear 20 by the drive rotation of the drive motor 14.
2 rotates, and the pulley 26 rotates. For this reason, the pulley 40 is rotated via the rubber belt 38 (for example, 40
0 to 3000 rpm). As a result, the eccentric cam 42
The cam contact body 80 together with the roller 90 that contacts the eccentric cam 42 is rotated by the bracket 112 and the linear motion bearing 11.
0, and reciprocate with respect to the gantry 12.

Therefore, the cam contact member 80, the arms 52, 1
The contact roll 70 reciprocates on the disk surface, which is the surface of the disk-shaped substrate 102, and the polishing tape 104 wound around the contact roll 70.
Polishes the disk surface.

That is, only the lightweight contact roll 70 and the supporting portion for supporting the contact roll 70
Reciprocating with respect to the contact roll 7
As a result of a reduction in the inertial force when the contact roll 70 reciprocates, the contact roll 70 can reciprocate at a high speed. Specifically, as in the first embodiment, even if the crosshatch angle θ is the same as the conventional one, the reciprocating motion of the contact roll 70 can be performed 2,200 reciprocating motions per minute. In addition, the rotational speed of the spindle for driving and rotating the substrate 102 was set to about 300 rpm.

In the first and second embodiments, the cam is circular and the eccentric cam is shifted from the axis. However, the present invention is not limited to this. For example, as shown in FIG.
May be provided with a protruding portion 110A at a part thereof,
As shown in FIG. 4B, an elliptical cam 112 may be used, and as shown in FIG.
May be used as the cam 114. When the contact roll 70 is an elliptical cam 112, the contact roll 70 reciprocates naturally twice with one rotation of the cam 112, and reciprocates three times with one rotation of the cam 114.

In the above embodiment, the driving means is a cam. However, the driving means may be a cam, an air cylinder, an electromagnet, or the like.

Further, in the above embodiment, the substrate 102
Although only one side of the polishing process has been described, another texture device 10 may be installed and both sides of the substrate 102 may be processed at the same time.

Further, in the above embodiment, the description has been made through the polishing process using a polishing tape. However, a polishing pad in which free abrasive grains are adhered to and impregnated on a surface, or a polishing roll having a roughened surface is a contact roll. The present invention may be applied to a polishing process in which a contact roll is brought into direct contact with a disk surface to perform polishing. Further, the polishing can be performed while pouring the aqueous solution of the surfactant on the contact surface between the disk and the polishing tape.

As the loose abrasive used in the polishing process, typically, an alumina slurry polypropylene 7 is used.
00 and Polypla 103 (both are registered trademarks of Fujimi Incorporated Co., Ltd.), diamond-based slurry, SiC-based slurry, and the like. As a polishing pad, typically, Surfin100 or SurfinX is used.
XX-5 (both are registered trademarks of Fujimi Incorporated) is used.

[0047]

As described above, the texture device of the present invention can reciprocate the contact roll at a high speed as a result of the configuration described above, and can increase the productivity when polishing a disk-shaped material. Was made possible.

[Brief description of the drawings]

FIG. 1 is an overall configuration side view of a texture device according to a first embodiment of the present invention.

FIG. 2 is a view taken in the direction of arrow 2-2 in FIG. 1;

FIG. 3 is a sectional view of a main part of the texture device according to the first embodiment of the present invention.

FIG. 4 is a front view showing a cam shape of the texture device according to the embodiment of the present invention.

FIG. 5 is a conceptual diagram showing a running system of a polishing tape in the texture device according to the first embodiment of the present invention.

FIG. 6 is a side view of the overall configuration of a texture device according to a second embodiment of the present invention.

FIG. 7 is a perspective view illustrating cloth processing.

[Explanation of symbols]

 Reference Signs List 10 texture device 12 gantry 14 drive motor 16 bracket 18 bracket 36 cam support 42 eccentric cam 52 arm (support) 60 support 70 contact roll 72 slide pin (support) 80 cam contact body (support) 82 slide pin (Supporting part) 90 Roller (Supporting part) 102 Substrate 104 Polishing tape 150 Arm (Supporting part) A Streak W Eccentricity θ Cross hatch angle

Continuation of the front page (72) Inventor Muneaki Morinaga 3-10, Utsudori, Kurashiki-shi, Okayama Prefecture Inside the Mizushima Plant of Mitsubishi Chemical Corporation (56) References JP-A-2-199617 (JP, A) JP-A-63- 200958 (JP, A) JP-A-1-115564 (JP, A) (58) Fields investigated (Int. Cl. ⁶ , DB name) B24B 21/00 B24B 35/00 G11B 5/84

Claims (2)

(57) [Claims] 1. A texturing apparatus for texturing a disk-shaped material, comprising: a gantry for holding a tape reel holding an end of a polishing tape; and a pedestal on which the polishing tape is stretched. A contact roll that presses the polishing tape, a support portion that supports the contact roll, and a support portion that is connected to the gantry, and moves the support portion relative to the gantry and in a direction that intersects the rotation direction of the disc-shaped material. A texture device, comprising: an arm that supports reciprocally; and a driving unit that is connected to the gantry and reciprocates the contact roll via the support. 2. The texture device according to claim 1, wherein the driving means is of a cam type.