JP2728850B2 - Hard disk media manufacturing equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for manufacturing a hard disk medium for so-called texturing, in which a surface of a substrate of a hard disk medium for a hard disk recording device is provided with a polishing scratch having a twill pattern.

[0002]

2. Description of the Related Art To manufacture a hard disk medium, A
After forming a base film made of a Ni-P plating film on the surface of a substrate made of an alloy or the like, a twill-patterned polishing scratch is provided on the surface of the substrate, the substrate is washed and dried, and a magnetic film is formed by a sputtering method or the like. Has formed.

As described above, when a twill-patterned polishing scratch is formed on the surface of the substrate before the magnetic film is formed on the surface of the substrate, the magnetic characteristics of the magnetic film are improved, and Since a gap is formed between the magnetic head for recording and reproduction,
Since the magnetic head for recording / reproducing becomes easier to float, and the contact area between the substrate and the magnetic film increases, the magnetic film hardly peels off.

FIG. 6 is a front view showing a conventional hard disk medium manufacturing apparatus, FIG. 7 is a front view showing a part of the hard disk medium manufacturing apparatus shown in FIG. 6, and FIG. 8 is a hard disk medium manufacturing apparatus shown in FIG. It is a side view which shows a part. As shown in the figure, a motor 2 is provided on a base 1, a spindle 4 is rotatably mounted on the base 1,
Has a collet chuck for holding a hole of a substrate 16 of a hard disk medium, and a spindle 4 is rotated by a motor 2 via a belt 3. A pair of moving bodies 5a and 5b each having a tape drive main body 9a and 9b movable in the left and right directions of FIGS. 6 and 7 are attached to the base 1, and a motor 6 is provided on the base 1, A ball screw 8 is rotatably attached to the base 1, and the ball screw 8 is a belt 7
Are rotated by the motor 6 through the motor, and a male screw (not shown) is formed in the ball screw 8 in the opposite direction, and these male screws are connected to female screws (not shown) provided on the moving bodies 5a and 5b, respectively. Is engaged. A tape supply reel 10, a load roller 11, and a tape take-up reel 12 are provided on the tape drive main bodies 9a, 9b attached to the moving bodies 5a, 5b, and the tape supply reel 10, the load roller 11, and the tape take-up reel 12 are provided. A polishing tape 13 is wound. The tape drive main bodies 9a and 9b are provided with an automatic tape tension adjusting device 14, and the tape tension automatic adjusting device 14 adjusts the tape tension of the polishing tape 13. Then, the tape drive main bodies 9a and 9b, the tape supply reel 1
The tape drive 15 for polishing the surface of the substrate 16 is constituted by the load roller 11, the tape winding reel 12, and the automatic tape tension adjusting device 14.

In this hard disk medium manufacturing apparatus, when the substrate 16 is mounted on the spindle 4 and the motor 6 is rotated by a predetermined amount in a predetermined direction, the moving body 5a and the main body 9a of the tape drive move rightward in FIG. The moving body 5b and the tape drive main body 9b move to the left in FIG. 6, the tape drive main bodies 9a and 9b are closed, and the polishing tape 13 wound on the load roller 11 causes the front and back surfaces of the substrate 16 to be uniformly pressed. Sandwich. In this state, the motor 2 is operated and the tape drive 1
5 is operated, and the motor 6 is further rotated in the normal and reverse directions.
Rotate, the polishing tape 13 travels, and the tape drive main bodies 9a and 9b reciprocate in the left-right direction on the paper surface of FIG. 6, so that the surface of the substrate 16 has a twill pattern polishing scratch having a depth of 3 to 10 nm. It is formed.

[0006]

However, in such a hard disk medium manufacturing apparatus, the tape drive 1
Since the weight of the tape drive 5 is large, if the number of reciprocating movements of the tape drive main bodies 9a and 9b per unit time is increased, vibration occurs in the entire apparatus, and a constant, linear and smooth reciprocating movement cannot be obtained. Since the number of reciprocating movements per unit time of the driving body 9a, 9b cannot be more than 5 times / second,
Since the relative number of reciprocating movements (oscillation) of the polishing tape 13 with respect to the substrate 16 per unit time cannot be set to 5 times / second or more, polishing scratches cannot be efficiently formed on the substrate 16. That is, it is optimal that the crossing angles θ ₁ and θ ₂ of the polishing scratches shown in FIG. 9 are within the range of 10 to 55 °.
When the number of reciprocating movements per unit time is small, the intersection angles θ ₁ and θ ₂ cannot be optimized unless the rotation speed of the substrate 16 is reduced, so that polishing scratches are efficiently formed on the substrate 16. Can not do it. Further, as shown in FIG. 9, although the crossing angle θ ₁ of the outer peripheral portion is smaller than the crossing angle θ ₂ of the inner peripheral portion, the number of reciprocating movements of the polishing tape 13 with respect to the substrate 16 per unit time is 5 times. It is difficult to make both the crossing angles θ ₁ and θ ₂ within the range of 10 to 55 ° because the rotation speed cannot be increased to more than times / second. That is, the rotation speed of the substrate 16, by adjusting the tape driving machine main body 9a, the reciprocating frequency per unit time of 9b, when the optimum crossing angle theta ₁ is crossing angle theta ₂ is increased, it crosses the opposite angle when perfect the theta _2, the crossing angle theta ₁ is reduced. Then, the outer diameter of the hard disk medium is about 65 mm (2.5 inches),
When the diameter is reduced to about 48 mm (1.89 inches),
It is increasingly difficult to make both the intersection angles θ ₁ and θ ₂ in the range of 10 to 55 °.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and it is possible to efficiently form a polishing flaw on a substrate, and to set both the intersection angle of the outer periphery and the intersection angle of the inner periphery in an optimum range. It is an object of the present invention to provide a hard disk medium manufacturing apparatus which is easy to perform.

[0008]

In order to achieve this object, according to the present invention, there is provided a hard disk medium manufacturing apparatus having a spindle for holding and rotating a substrate of a hard disk medium and a polishing means for polishing the surface of the substrate. In, a moving guide is provided on the base and moved to the above moving guide.
Attach the moving body so that it can move, and
Rotatably mounts the spindle on the moving body.
A first motor for rotating the base, the base and the moving body
And a follower member is provided between the moving body and
A second motor is provided on the base, and the output of the second motor is provided.
A shaft is provided with a cam that contacts the driven member.

In this case, a tape drive may be used as the polishing means.

Further, a polishing means having a rotating polishing plate may be used as the polishing means.

[0011]

In this hard disk medium manufacturing apparatus,
Since the spindle with a small weight is reciprocated, the maximum number of reciprocating movements of the spindle per unit time can be increased, so that the maximum number of reciprocating movements (oscillation) of the abrasive on the substrate per unit time can be increased. Of the second motor, the diameter of the cam,
By arbitrarily setting the rotation speed of the motor 1
Dollar reciprocating speed, spindle reciprocating width, spin
The rotation speed of the dollar can be arbitrarily determined independently.

[0012]

FIG. 1 is a front view showing a part of a hard disk medium manufacturing apparatus according to the present invention, FIG. 2 is a side view showing a part of the hard disk medium manufacturing apparatus shown in FIG. 1, and FIG.
4 is a front view showing a part of a spindle drive unit of the hard disk medium manufacturing apparatus shown in FIG. 4, FIG. 4 is a plan view showing a part of the spindle drive unit of the hard disk medium manufacture apparatus shown in FIG. 1, and FIG. FIG. 4 is a side view showing a part of a spindle drive unit of the hard disk medium manufacturing apparatus. As shown in the figure, a moving guide 21 is provided on the base 1, a moving body 22 is movably mounted on the moving guide 21, a first motor 23 is provided on the moving body 22, and a spindle 25 is mounted on the moving body 22 . Is rotatably mounted on the spindle 25.
Has a collet chuck for holding a hole in the substrate 16 of the hard disk medium, and a spindle 25 is rotated by a motor 23 via a belt 24. Base 1 and moving body 2
2, a spring 26 is provided, a driven member 27 is provided on the moving body 22, a second motor 28 is provided on the base 1, a cam 29 is provided on an output shaft of the motor 28, and a cam 2 is provided.
The spindle 9 and the driven member 27 are in contact with each other, and a spindle reciprocating means 30 for reciprocating the spindle 25 in parallel with the surface of the substrate 16 by the moving guide 21, the moving body 22, the spring 26, the motor 28, the cam 29, and the like. ing.

In this hard disk medium manufacturing apparatus, when the substrate 16 is mounted on the spindle 25 and the motor 6 is rotated by a predetermined amount in a predetermined direction, the tape drive main body 9 is rotated.
A and 9b are closed, and the polishing tape 13 wound around the load roller 11 sandwiches the front and back surfaces of the substrate 16 with uniform pressure. In this state, the motor 6 is stopped and the tape drive main bodies 9a, 9
Stop b. Next, when the motor 23 is operated, the tape driving device 15 is operated, and further the motor 28 is operated, the substrate 16 rotates, and the polishing tape 13 travels.
Since the cam 29 rotates and the moving body 22 reciprocates, the spindle 25 reciprocates in parallel with the surface of the substrate 16,
On the surface of the substrate 16, polishing scratches having a twill pattern having a depth of 3 to 10 nm are formed.

In such an apparatus for manufacturing a hard disk medium, since the spindle 25 having a small weight is reciprocated, the maximum number of reciprocal movements of the spindle 25 per unit time can be increased to 20 times / second or more.
The maximum number of reciprocating movements (oscillation) of the polishing tape 13 with respect to the substrate 16 per unit time is 20 times /
It can be as large as seconds or more. When the relative maximum number of reciprocating movements of the polishing tape 13 with respect to the substrate 16 per unit time is increased, the intersection angles θ ₁ and θ ₂ can be optimized even if the rotation speed of the substrate 16 is increased. Accordingly, polishing scratches can be efficiently formed on the substrate 16. In addition, since the maximum number of reciprocating movements of the polishing tape 13 with respect to the substrate 16 per unit time can be increased, the outer diameter of the hard disk medium becomes
Even when the diameter is reduced to 5 mm or about 48 mm, it is easy to set both the intersection angle θ _{1 of} the outer peripheral portion and the intersection angle θ ₂ of the inner peripheral portion to the optimum ranges. Furthermore, a spindle 25 having a small weight
Is reciprocated, so that the moving speed of the substrate 16 becomes constant, so that an appropriate polishing flaw can be provided on the surface of the substrate 16.

Here, the reciprocating speed of the spindle 25 is P, the reciprocating width of the spindle 25 is A,
Assuming that the rotation speed is W, the intersection angle θ of the polishing flaw at the position of the radius r of the substrate 16 is expressed by the following equation.

[0016] ^{θ = 2tan ~ 1 (PA /} 2Wr) As a result of the outer diameter crossing angle theta ₁ of the outer peripheral portion of the polishing scratches of the substrate 16 of about 65 mm, a crossing angle theta ₂ of the inner peripheral portion was calculated by the formula Is as shown in Table 1, and the substrate 1 having an outer diameter of about 48 mm
Crossing angle theta ₁ of the outer peripheral portion of the polishing scratches 6, results of crossing angle theta ₂ of the inner peripheral portion was calculated by the above equation is shown in Table 2. In addition,
In Tables 1 and 2, the units of the intersection angles θ ₁ and θ ₂ are (°).

[0017]

[Table 1]

[0018]

[Table 2]

As is clear from Tables 1 and 2, the number of reciprocating movements of the spindle 25 per unit time, that is, the relative number of reciprocating movements of the polishing tape 13 with respect to the substrate 16 per unit time is 5 times / sec. If the rotation speed W of the spindle 25 is not considerably reduced, the intersection angle θ
₁ and θ ₂ cannot be in the optimum range. When the number of reciprocating movements per unit time of the spindle 25 is set to 20 times / second or more, both the intersection angle θ _{1 of} the outer peripheral portion and the intersection angle θ ₂ of the inner peripheral portion can be easily set to the optimum ranges. . Ma
In addition, by setting the rotation speed of the motor 28 arbitrarily,
If the rotation speed of 29 is determined arbitrarily, the reciprocation of the spindle 25
The moving speed P can be arbitrarily determined.
If the diameter is arbitrarily determined, the reciprocating movement width A of the spindle 25
Can be arbitrarily determined independently of the reciprocating speed P.
If the rotation speed of the motor 23 is arbitrarily determined,
The rotational speed W of the handle 25 is the reciprocating speed P, the reciprocating width.
Since it can be arbitrarily determined independently of A,
As is clear from the equation for calculating the intersection angle θ,
It can be set easily and easily.

In the above-described embodiment, the tape drive 15 is used as the polishing means, but a polishing machine having a rotating polishing plate may be used. In the above embodiment, the polishing tape 13 was used.
When polishing No. 6, an abrasive suspension may be used.

[0021]

As described above, in the hard disk medium manufacturing apparatus according to the present invention, the maximum number of reciprocating movements of the abrasive with respect to the substrate per unit time can be increased. It is easy to set both the intersection angle of the outer periphery and the intersection angle of the inner periphery to the optimum range, and
Return speed, spindle reciprocating width, spindle rotation
Since the rolling speed can be set independently and arbitrarily,
The corners can be set arbitrarily and easily.

[Brief description of the drawings]

FIG. 1 is a front view showing a part of a hard disk medium manufacturing apparatus according to the present invention.

FIG. 2 is a side view showing a part of the hard disk medium manufacturing apparatus shown in FIG.

FIG. 3 is a front view showing a part of a spindle drive unit of the hard disk medium manufacturing apparatus shown in FIG.

FIG. 4 is a plan view showing a part of a spindle drive unit of the hard disk medium manufacturing apparatus shown in FIG.

5 is a side view showing a part of a spindle drive unit of the hard disk medium manufacturing apparatus shown in FIG.

FIG. 6 is a front view showing a conventional hard disk medium manufacturing apparatus.

FIG. 7 is a front view showing a part of the hard disk medium manufacturing apparatus shown in FIG. 6;

FIG. 8 is a side view showing a part of the hard disk medium manufacturing apparatus shown in FIG.

FIG. 9 is a view showing polishing scratches formed on a substrate.

[Explanation of symbols]

 15 ... Tape drive 25 ... Spindle 30 ... Spindle reciprocating means

Continued on the front page (72) Inventor John Hoshizaki United States 94402 California San Mateo South Claremont Street 914 Exclusive Design Company Inc. (56) References JP-A-6-150305 (JP, A)

Claims (3)

(57) [Claims] A spindle which holds and rotates the substrate of the hard disk medium [1 claim], in a hard disk medium manufacturing device having a polishing means for polishing the surface of the substrate, base
Is provided with a moving guide, and the moving body can be moved to the above moving guide.
No., the above-mentioned spindle can be rotated on the above-mentioned moving body
To move the spindle to the moving body.
And a spring between the base and the moving body.
And a driven member is provided on the moving body, and a second
And the driven shaft is driven by the output shaft of the second motor.
An apparatus for manufacturing a hard disk medium, comprising a cam for contacting a member . 2. The apparatus for manufacturing a hard disk medium according to claim 1, wherein a tape drive is used as said polishing means. 3. A hard disk medium manufacturing apparatus according to claim 1, wherein said polishing means has a rotating polishing plate.