JPH07210864A - Manufacturing apparatus of hard-disk medium - Google Patents

Abstract

PURPOSE: To efficiently form abrasive scratches on a substrate by reciprocating a spindle whose weight is small and making the maximum number of the reciprocating times of the spindle per unit time increase. CONSTITUTION: In a hard disk medium manufacturing device, the spindle 25 whose weight is small is reciprocated and therefor the maximum number of the reciprocating times of the spindle 25 per unit time is increased to be more than 20 times/sec. Thus, the maximum number of the reciprocating times (oscillation) of an abrasive tape 13 per unit time for the relative substrate 16 is increased to be more than 20 times/sec. When the maximum number of the reciprocating times of the abrasive tape 13 per unit time for the relative substrate 16 is increased, crossing angles θ1 and θ2 can be made optimum even if the rotary speed of the substrate 16 is increased. Thus, the abrasive scratches are efficiently formed on the substrate 16.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for manufacturing a hard disk medium for so-called texturing, in which a surface of a substrate of a hard disk medium for a hard disk recording apparatus is provided with scratches in a twill pattern.

[0002]

2. Description of the Related Art To manufacture a hard disk medium, A
After forming a base film made of a Ni-P plated film on the surface of a substrate made of an alloy of 1 or the like, polishing scratches having a checkerboard pattern are provided on the surface of the substrate, the substrate is washed and dried, and a magnetic film is formed by a sputtering method or the like. Is forming.

As described above, when the surface of the substrate is provided with polishing scratches in a checkerboard pattern before the magnetic film is formed on the surface of the substrate, the magnetic characteristics of the magnetic film are improved, and Since a gap is formed between the recording / reproducing magnetic head,
The recording / reproducing magnetic head easily floats, and the contact area between the substrate and the magnetic material film increases, so that the magnetic material film is less likely to peel off.

FIG. 6 is a front view showing a conventional hard disk medium manufacturing apparatus, FIG. 7 is a front view showing a part of the hard disk medium manufacturing apparatus shown in FIG. 6, and FIG. 8 is a hard disk medium manufacturing apparatus shown in FIG. It is a side view which shows a part. As shown in the figure, a motor 2 is provided on a base 1, and a spindle 4 is rotatably attached to the base 1.
Has a collet chuck for holding the hole of the substrate 16 of the hard disk medium, and the spindle 4 is rotated by the motor 2 via the belt 3. A pair of moving bodies 5a and 5b, to which tape drive machine bodies 9a and 9b movable in the left and right directions of the paper of FIGS. 6 and 7 are attached, are attached to the base 1, a motor 6 is provided on the base 1, and A ball screw 8 is rotatably attached to the base 1, and the ball screw 8 is a belt 7
Is rotated by a motor 6 via a ball screw 8 and opposite male screws (not shown) are formed on the ball screw 8. These male screws are respectively attached to female screws (not shown) provided on the moving bodies 5a and 5b. Engaged. A tape supply reel 10, a load roller 11, and a tape take-up reel 12 are provided on the tape drive main bodies 9a and 9b attached to the moving bodies 5a and 5b, and the tape supply reel 10, the load roller 11, and the tape take-up reel 12 are provided. The polishing tape 13 is wound. An automatic tape tension adjuster 14 is provided in the tape drive body 9a, 9b, and the automatic tape tension adjuster 14 adjusts the tape tension of the polishing tape 13. Then, the tape drive body 9a, 9b, the tape supply reel 1
0, the load roller 11, the tape take-up reel 12, and the tape tension automatic adjusting machine 14 constitute a tape driving machine 15 for polishing the surface of the substrate 16.

In this hard disk medium manufacturing apparatus, when the substrate 16 is attached to the spindle 4 and the motor 6 is rotated in a predetermined direction by a predetermined amount, the moving body 5a and the tape drive main body 9a move to the right in the drawing of FIG. The moving body 5b and the tape drive main body 9b move to the left in the plane of FIG. 6, the tape drive main bodies 9a and 9b are closed, and the polishing tape 13 wound around the load roller 11 applies even pressure to both front and back surfaces of the substrate 16. Clap. In this state, the motor 2 is operated and the tape drive 1
When the motor 5 is operated and the motor 6 is rotated in the forward and reverse directions, the substrate 16
6 rotates and the polishing tape 13 runs, and the tape drive main bodies 9a and 9b reciprocate in the left-right direction of the paper surface of FIG. 6, resulting in a scratched polishing scratch having a depth of 3 to 10 nm on the surface of the substrate 16. It is formed.

[0006]

However, in such a hard disk medium manufacturing apparatus, the tape drive 1 is used.
Since the weight of No. 5 is large, if the number of reciprocating movements of the tape driving machine main bodies 9a and 9b per unit time is increased, the entire apparatus vibrates, and a constant, linear, smooth reciprocating movement cannot be obtained, and the tape Since the number of reciprocating movements of the drive body 9a, 9b per unit time cannot be set to 5 times / second or more,
Since the number of reciprocating movements (oscillation) of the polishing tape 13 relative to the substrate 16 per unit time cannot be set to 5 times / second or more, polishing scratches cannot be efficiently formed on the substrate 16. That is, it is optimum that the crossing angles θ ₁ and θ ₂ of the polishing scratches as shown in FIG. 9 are within the range of 10 to 55 °, but the polishing tape 13 relative to the substrate 16 is relatively large.
When the number of reciprocating movements per unit time is small, the crossing angles θ ₁ and θ ₂ cannot be optimized unless the rotation speed of the substrate 16 is reduced, so that polishing scratches are efficiently formed on the substrate 16. Can not do it. Further, as shown in FIG. 9, the intersection angle θ ₁ at the outer peripheral portion is smaller than the intersection angle θ _{2 at the} inner peripheral portion, but the relative number of reciprocating movements of the polishing tape 13 relative to the substrate 16 per unit time is 5 times. Since it is not possible to exceed the number of turns / second, it is difficult to set both the crossing angles θ ₁ and θ ₂ within the range of 10 to 55 °. That is, when the rotation speed of the substrate 16 and the number of reciprocating movements of the tape drive main bodies 9a and 9b per unit time are adjusted to optimize the crossing angle θ ₁ , the crossing angle θ ₂ becomes large, while the crossing angle θ ₂ becomes large. When θ ₂ is optimized, the crossing angle θ ₁ becomes smaller. And the outer diameter of the hard disk medium is about 65 mm (2.5 inches),
When the diameter is reduced to about 48 mm (1.89 inches),
It becomes more and more difficult to set both the crossing angles θ ₁ and θ ₂ within the range of 10 to 55 °.

The present invention has been made in order to solve the above-mentioned problems, and it is possible to efficiently form polishing scratches on a substrate, and to optimize both the crossing angle of the outer peripheral portion and the crossing angle of the inner peripheral portion. It is an object of the present invention to provide a hard disk medium manufacturing apparatus that can be easily manufactured.

[0008]

To achieve this object, in the present invention, an apparatus for manufacturing a hard disk medium having a spindle for holding and rotating a substrate of a hard disk medium and a polishing means for polishing the surface of the substrate. In, a spindle reciprocating means for reciprocating the spindle is provided.

In this case, a tape drive machine may be used as the polishing means.

Further, as the polishing means, one having a rotating polishing plate may be used.

[0011]

In this hard disk medium manufacturing apparatus,
Since the spindle having a small weight is moved back and forth, the maximum number of reciprocating movements of the spindle per unit time can be increased. Therefore, the maximum number of reciprocating movement (oscillation) of the polishing material with respect to the substrate per unit time can be increased. it can.

[0012]

1 is a front view showing a part of a hard disk medium manufacturing apparatus according to the present invention, FIG. 2 is a side view showing a part of the hard disk medium manufacturing apparatus shown in FIG. 1, and FIG.
FIG. 4 is a front view showing a part of the spindle drive unit of the hard disk medium manufacturing apparatus shown in FIG. 4, FIG. 4 is a plan view showing a part of the spindle drive section of the hard disk medium manufacturing apparatus shown in FIG. 1, and FIG. It is a side view which shows a part of spindle drive part of the hard disk medium manufacturing apparatus. As shown in the figure, a moving guide 21 is provided on the base 1, a moving body 22 is movably attached to the moving guide 21, a motor 23 is provided on the moving body 22, and a spindle 25 is rotatable on the moving body 22. The spindle 25 has a collet chuck for holding the hole of the substrate 16 of the hard disk medium, and the spindle 25 is rotated by the motor 23 via the belt 24. A spring 26 is provided between the base 1 and the moving body 22, a driven member 27 is provided on the moving body 22, a motor 28 is provided on the base 1, and a motor 28 is provided.
A cam 29 is provided on the output shaft of the cam 29 and the driven member 2
7, and a spindle reciprocating means 30 for reciprocating the spindle 25 in parallel with the surface of the substrate 16 is constituted by the moving guide 21, the moving body 22, the spring 26, the motor 28, the cam 29, and the like.

In this hard disk medium manufacturing apparatus, when the substrate 16 is attached to the spindle 25 and the motor 6 is rotated in a predetermined direction by a predetermined amount, the tape drive machine body 9 is rotated.
When a and 9b are closed, the polishing tape 13 wound around the load roller 11 sandwiches the front and back surfaces of the substrate 16 with a uniform pressure. In this state, the motor 6 is stopped, and the tape drive machine bodies 9a, 9
Stop b. Next, when the motor 23 is actuated, the tape drive machine 15 is actuated, and the motor 28 is actuated, the substrate 16 is rotated and the polishing tape 13 is run, and
Since the cam 29 rotates and the moving body 22 reciprocates, the spindle 25 reciprocates parallel to the surface of the substrate 16,
The surface of the substrate 16 has a graze pattern of polishing scratches with a depth of 3 to 10 nm.

In such a hard disk medium manufacturing apparatus, since the spindle 25 having a small weight is reciprocated, the maximum number of reciprocating movements of the spindle 25 per unit time can be increased to 20 times / second or more.
The maximum number of reciprocal movements (oscillation) of the polishing tape 13 relative to the substrate 16 per unit time is 20 times /
It can be as large as a second or more. When the maximum number of reciprocating movements of the polishing tape 13 relative to the substrate 16 per unit time is increased, the intersection angles θ ₁ and θ ₂ can be optimized even if the rotation speed of the substrate 16 is increased. Therefore, polishing scratches can be efficiently formed on the substrate 16. Further, since the maximum number of reciprocating movements of the polishing tape 13 relative to the substrate 16 per unit time can be increased, the outer diameter of the hard disk medium is about 6
Even if the diameter is reduced to 5 mm or about 48 mm, it is easy to set both the outer peripheral intersection angle θ ₁ and the inner peripheral intersection angle θ _{2 in} the optimum ranges. In addition, the lightweight spindle 25
Since the substrate 16 is moved back and forth, the moving speed of the substrate 16 becomes constant, so that an appropriate polishing scratch can be provided on the surface of the substrate 16.

Here, the reciprocating speed of the spindle 25 is P, the reciprocating width of the spindle 25 is A, and the spindle 25 is
Where W is the rotation speed of, the crossing angle θ of the polishing scratches at the position of the radius r of the substrate 16 is expressed by the following equation.

[0016] ^{θ = 2tan ~ 1 (PA /} 2Wr) As a result of the outer diameter crossing angle theta ₁ of the outer peripheral portion of the polishing scratches of the substrate 16 of about 65 mm, a crossing angle theta ₂ of the inner peripheral portion was calculated by the formula Is as shown in Table 1, and the substrate 1 with an outer diameter of about 48 mm
Table 2 shows the results obtained by calculating the crossing angle θ _{1 of} the outer circumferential portion and the crossing angle θ ₂ of the inner circumferential portion of the polishing scratches of _No. 6 by the above formula. In addition,
In Tables 1 and 2, the unit of the intersection angles θ ₁ and θ ₂ is (°).

[0017]

[Table 1]

[0018]

[Table 2]

As is clear from Tables 1 and 2, the number of reciprocating movements of the spindle 25 per unit time, that is, the number of reciprocating movements of the polishing tape 13 relative to the substrate 16 per unit time is 5 times / second. When the rotation speed W of the spindle 25 is not significantly reduced, the intersection angle θ
₁ and θ ₂ cannot be in the optimum range. Further, when the number of reciprocating movements of the spindle 25 per unit time is 20 times / sec or more, both the outer peripheral intersection angle θ ₁ and the inner peripheral intersection angle θ ₂ can be easily set to the optimum ranges. .

Although the tape driving machine 15 is used as the polishing means in the above-described embodiment, a polishing machine having a rotating polishing plate may be used as the polishing means. Further, although the polishing tape 13 is used in the above-mentioned embodiment, the substrate 1
An abrasive grain suspension may be used when polishing 6.

[0021]

As described above, in the hard disk medium manufacturing apparatus according to the present invention, since the maximum number of reciprocating movements of the polishing material with respect to the substrate per unit time can be increased, the substrate can be efficiently scratched by polishing. Can be formed, and it is easy to set both the intersection angle of the outer peripheral portion and the intersection angle of the inner peripheral portion within the optimum range.

[Brief description of drawings]

FIG. 1 is a front view showing a part of a hard disk medium manufacturing apparatus according to the present invention.

FIG. 2 is a side view showing a part of the hard disk medium manufacturing apparatus shown in FIG.

FIG. 3 is a front view showing a part of a spindle drive unit of the hard disk medium manufacturing apparatus shown in FIG.

FIG. 4 is a plan view showing a part of a spindle drive unit of the hard disk medium manufacturing apparatus shown in FIG.

5 is a side view showing a part of a spindle drive unit of the hard disk medium manufacturing apparatus shown in FIG.

FIG. 6 is a front view showing a conventional hard disk medium manufacturing apparatus.

FIG. 7 is a front view showing a part of the hard disk medium manufacturing apparatus shown in FIG.

8 is a side view showing a part of the hard disk medium manufacturing apparatus shown in FIG.

FIG. 9 is a diagram showing polishing scratches formed on a substrate.

[Explanation of symbols]

 15 ... Tape drive machine 25 ... Spindle 30 ... Spindle reciprocating means

Front Page Continuation (72) Inventor John Hoshizaki United States 94402 San Mateo South Claremont Street 914 Exclusive Design Company Incorporated

Claims (3)

[Claims] 1. A hard disk medium manufacturing apparatus having a spindle for holding and rotating a substrate of a hard disk medium and polishing means for polishing the surface of the substrate, comprising spindle reciprocating means for reciprocating the spindle. A hard disk medium manufacturing apparatus characterized by performing oscillation. 2. The hard disk medium manufacturing apparatus according to claim 1, wherein a tape drive machine is used as the polishing means. 3. The hard disk medium manufacturing apparatus according to claim 1, wherein the polishing means has a rotating polishing plate.