JP2973670B2 - Optical semiconductor photodetector with built-in preamplifier - Google Patents

Optical semiconductor photodetector with built-in preamplifier

Info

Publication number
JP2973670B2
JP2973670B2 JP4000055A JP5592A JP2973670B2 JP 2973670 B2 JP2973670 B2 JP 2973670B2 JP 4000055 A JP4000055 A JP 4000055A JP 5592 A JP5592 A JP 5592A JP 2973670 B2 JP2973670 B2 JP 2973670B2
Authority
JP
Japan
Prior art keywords
light receiving
receiving element
light
preamplifier
carrier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP4000055A
Other languages
Japanese (ja)
Other versions
JPH05241046A (en
Inventor
和弘 小菅
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP4000055A priority Critical patent/JP2973670B2/en
Publication of JPH05241046A publication Critical patent/JPH05241046A/en
Application granted granted Critical
Publication of JP2973670B2 publication Critical patent/JP2973670B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/49Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
    • H01L2224/491Disposition
    • H01L2224/4911Disposition the connectors being bonded to at least one common bonding area, e.g. daisy chain
    • H01L2224/49111Disposition the connectors being bonded to at least one common bonding area, e.g. daisy chain the connectors connecting two common bonding areas, e.g. Litz or braid wires
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/30Technical effects
    • H01L2924/301Electrical effects
    • H01L2924/30107Inductance
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/30Technical effects
    • H01L2924/301Electrical effects
    • H01L2924/3011Impedance
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/30Technical effects
    • H01L2924/301Electrical effects
    • H01L2924/3011Impedance
    • H01L2924/30111Impedance matching

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は高帯域用光半導体素子装
置に関し、特に前置増幅器を内蔵した光半導体受光素子
装置に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical semiconductor device for a high band, and more particularly to an optical semiconductor light receiving device having a built-in preamplifier.

【0002】[0002]

【従来の技術】近年、幹線系光通信においては光ビット
レート化が要求されており、高速対応の送受信素子の開
発がなされている。これらの素子をモジュール化するに
当っては特に受光素子モジュールでは光受光素子と増幅
器とのマウント方法ならびに素子間における接続方法に
より大きく性能が左右される。
2. Description of the Related Art In recent years, there has been a demand for a higher optical bit rate in trunk line optical communication, and transmission / reception elements capable of high speed have been developed. When these elements are modularized, the performance of the light receiving element module is greatly affected by the mounting method of the light receiving element and the amplifier and the connection method between the elements.

【0003】従来の光受光素子モジュールでは、受光素
子のみをキャンタイプのステムにマウントし、レンズ等
によりファイバ結合した同軸型受光モジュール、あるい
はPINFETモジュールに代表されるように前置増幅
をDIP型ケース内に搭載したものがある。この前置増
幅器内蔵のモジュール構造では光受光素子搭載基板と前
置増幅器搭載基板とが別々になっており、光受光素子は
電気接続のための電極パターンが形成されている素子搭
載用基板にマウントし、前置増幅器素子は素子搭載電極
パターンを形成した別の搭載基板にマウントした後、D
IP型ケース内部に光受光素子搭載基板は受光面をファ
イバ端面方向に向け、前置増幅器搭載基板は前記光受光
素子搭載基板の後側のケース内底面あるいは他の基板上
に半田等でマウントしている。光受光素子と前置増幅器
との接続はそれぞれの電極パターンを介して金属ワイヤ
ーで接続される構造となっている。
In a conventional light receiving element module, only a light receiving element is mounted on a can-type stem, and a preamplification is performed by a DIP type case as represented by a coaxial type light receiving module or a PINFET module which is fiber-coupled by a lens or the like. Some are mounted inside. In this module structure with a built-in preamplifier, the light receiving element mounting substrate and the preamplifier mounting substrate are separate, and the light receiving element is mounted on the element mounting substrate on which the electrode pattern for electrical connection is formed. The preamplifier element is mounted on another mounting substrate on which the element mounting electrode pattern is formed,
Inside the IP type case, the light receiving element mounting substrate faces the light receiving surface toward the fiber end face, and the preamplifier mounting substrate is mounted on the bottom surface inside the case on the rear side of the light receiving element mounting substrate or another substrate by soldering or the like. ing. The light receiving element and the preamplifier are connected to each other by metal wires via respective electrode patterns.

【0004】[0004]

【発明が解決しようとする課題】上述した従来の前置増
幅器内蔵光受装置では光受光素子面と前置増幅器搭載面
とが垂直方向にマウントされる関係であるために光受光
素子と前置増幅素子との電気接続は直接結果用ワイヤー
で結ぶことができず、それぞれの搭載基板に形成された
電極パターンを介している。したがって、接続距離が長
くなり、電気接続のインダクタンスが大きくなり、高周
波帯域での制約を受けるという問題があった。例えば、
受光素子と前置増幅器との間を通常使用される太さ約3
0μmφの結線用ワイヤーを用いた場合、従来構造の場
合では接続距離は5mm以上になり、ワイヤ自身のイン
ダクタンスは5nH以上となる。そのため2〜3GHz
程度に帯域が制限されてしまう。また、受光素子と前置
増幅器間の接続距離が長いため各素子間でのインピダン
スミスマッチングによる反射周波数帯域が低くくなり信
号帯域の制限となってしまう。
In the above-described conventional light receiving device with a built-in preamplifier, the light receiving element surface and the preamplifier mounting surface are mounted vertically so that the light receiving element and the preamplifier mounting surface are mounted vertically. The electrical connection with the amplifying element cannot be directly connected with the result wire, but via an electrode pattern formed on each mounting substrate. Therefore, there has been a problem that the connection distance becomes long, the inductance of the electric connection becomes large, and there is a restriction in a high frequency band. For example,
The thickness usually used between the light receiving element and the preamplifier is about 3
When a connection wire of 0 μmφ is used, in the case of the conventional structure, the connection distance is 5 mm or more, and the inductance of the wire itself is 5 nH or more. Therefore 2-3GHz
The bandwidth is limited to a certain extent. Further, since the connection distance between the light receiving element and the preamplifier is long, the reflection frequency band due to impedance mismatch between the elements becomes low, and the signal band is limited.

【0005】さらに、従来構造での素子の気密封止はケ
ース全体でとる方法で、ファイバピグテール部を半田等
で気密封止し後にキャップをシームウェルダーで封止す
る方法である。この場合、気密封止試験はモジュール組
立後に行うことからファイバ被覆の樹脂によりファイン
リーク試験ができず組立工数ならびに信頼性に欠けると
いう問題もある。
Further, the hermetic sealing of the element in the conventional structure is a method of taking the whole case, and hermetically sealing the fiber pigtail portion with solder or the like, and then sealing the cap with a seam welder. In this case, since the hermetic sealing test is performed after the module is assembled, there is also a problem that a fine leak test cannot be performed due to the resin of the fiber coating and the number of assembly steps and reliability are lacking.

【0006】[0006]

【課題を解決するための手段】本発明の前置増幅器内蔵
光半導体受光素子装置は、受光素子および前記受光素子
の出力電気信号を増幅する前置増幅用ICが搭載された
キャリアと、レンズホルダーに固定された結合レンズと
フェルールを有する光入力用光ファイバとが箱型ケース
に内臓された光半導体受光素子装置であって、前記受光
素子と前置増幅用ICとは前記キャリア上に前記受光素
子の受光面および前記前置増幅用ICの搭載面とが平行
になるように搭載され、前記キャリアは前記受光素子の
受光面および前記前置増幅用ICの搭載面が前記光入力
用光ファイバからの光の出射方向に平行な面に対して垂
直になり、かつ前記受光素子に前記光入力用光ファイバ
からの光が入射されるように前記箱型ケース内に載置さ
れていることを特徴としている。
According to the present invention, there is provided an optical semiconductor light receiving device with a built-in preamplifier, comprising: a carrier on which a light receiving element and a preamplifier IC for amplifying an output electric signal of the light receiving element are mounted; An optical semiconductor light receiving device device having a coupling lens fixed to the optical fiber and a light input optical fiber having a ferrule incorporated in a box-shaped case, wherein the light receiving element and the preamplifier IC are provided on the carrier. The carrier is mounted so that the light receiving surface of the element and the mounting surface of the preamplifier IC are parallel to each other, and the carrier is mounted on the light receiving element.
The light receiving surface and the mounting surface of the preamplifier IC are
Perpendicular to the plane parallel to the light emission direction from the optical fiber
It is characterized in that it is placed in the box-shaped case so as to be straight and light from the optical input optical fiber is incident on the light receiving element.

【0007】[0007]

【実施例】次に本発明について、図面を参照して説明す
る。図1(a),(b)は本発明の一実施例の前置増幅
器内蔵光半導体受光素子装置の上面、側面の断面図で、
図2(a),(b),(c)は本発明の主要部である素
子収納キャリアの正面図、側面断面図ならびに底面図で
ある。
DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, the present invention will be described with reference to the drawings. 1A and 1B are cross-sectional views of the top and side surfaces of an optical semiconductor photodetector device with a built-in preamplifier according to an embodiment of the present invention.
2A, 2B, and 2C are a front view, a side sectional view, and a bottom view of an element storage carrier that is a main part of the present invention.

【0008】素子収納キャリア1はファイバ端面側が凹
形状を有しており、素子搭載面が金属の導伝体19で、
この回りに素子搭載面と同じかあるいは少し高い位置に
リード電極パターン21が形成され、底面部のリード端
子13にそれぞれ接続配線された絶縁体20がロー付け
されている。さらに底面部には素子収納キャリア1を固
定するときに底面部にリード端子13が短絡しないよう
に数mm厚のマウント板12がロー付けされている。な
お前置増幅素子の出力を接続するリード電極パターンは
ストリップラインでインピーダンスが50Ωとなってい
る。
The element storage carrier 1 has a concave shape on the fiber end face side, and the element mounting surface is a metal conductor 19.
Around this, a lead electrode pattern 21 is formed at a position that is the same as or slightly higher than the element mounting surface, and an insulator 20 connected and wired to each of the lead terminals 13 on the bottom surface is soldered. Further, a mounting plate 12 having a thickness of several mm is soldered to the bottom surface so that the lead terminals 13 are not short-circuited when the element storage carrier 1 is fixed. The lead electrode pattern for connecting the output of the preamplifier has a strip line and an impedance of 50Ω.

【0009】前述の素子収納キャリア1の素子搭載面に
あらかじめコンデンサ16,17上に例えばAuSn半
田等でマウントした光受光素子15、ならびに前置増幅
IC14を例えばAuSn半田で固定しボンディングワ
イヤでそれぞれ電気接続を行った後、窒素雰囲気中でメ
タライズされたガラスキャップ11を封止面18でAu
Sn半田で気密封止する。このように素子をマウントし
た素子収納キャリア1の状態でBT選別したものをマウ
ント基板5にマウント板12面上をPbSn半田により
固定する。
The light receiving element 15 and the preamplifier IC 14 previously mounted on the elements 16 and 17 on the element mounting surface of the element storage carrier 1 with, for example, AuSn solder or the like are fixed with, for example, AuSn solder and electrically connected with bonding wires. After making the connection, the glass cap 11 metallized in a nitrogen atmosphere is
Hermetically sealed with Sn solder. In the state of the element storage carrier 1 on which the elements are mounted as described above, BT selection is performed, and the surface of the mounting plate 12 is fixed to the mounting substrate 5 with PbSn solder.

【0010】ファイバと受光素子の光学結合はあらかじ
めロッドレンズ2例えばセルフォックレンズ(商標名)
をAuSn半田で固定したレンズホルダ3にファイバフ
ェルール4を嵌合し、半田あるいはYAGレーザ溶接に
より固定し、素子収納キャリアが固定されたマウント基
板5とファイバーフェルール4を位置固定したレンズホ
ルダ3とをスライドリング6を介してYAGレーザ溶接
固定する。この時の光軸調整はファイバ端から光を入射
させ受光素子の出力電流を見ながら出力電流が最大にな
るようにX・Y・Z軸方向に調整する。
The optical coupling between the fiber and the light receiving element is performed in advance by using a rod lens 2 such as a SELFOC lens (trade name).
The fiber ferrule 4 is fitted to a lens holder 3 in which the fiber ferrule 4 is fixed by AuSn solder, and is fixed by soldering or YAG laser welding. The mount substrate 5 on which the element storage carrier is fixed and the lens holder 3 in which the fiber ferrule 4 is fixed in position. It is fixed by YAG laser welding via a slide ring 6. At this time, the optical axis is adjusted in the X, Y, and Z axis directions so that the output current is maximized while light is incident from the end of the fiber and the output current of the light receiving element is monitored.

【0011】以上のようにマウント基板5を介して組立
てた光学系部を外部リード端子10を有するケース7内
の底面に素子収納キャリア固定時の半田よりも融点の低
い半田例えばInSn半田で固定し、素子収納キャリア
のリード端子13とケースリード端子10を半田あるい
はYAGレーザ溶接で接続しケースロには低融点半田9
で封止し、シームウェルダ等で金属キャップ8封止する
ことにより受光素子装置が出来る。
The optical system assembled as described above via the mounting substrate 5 is fixed to the bottom surface of the case 7 having the external lead terminals 10 with solder having a lower melting point than the solder used when fixing the element storage carrier, for example, InSn solder. The lead terminal 13 of the element storage carrier and the case lead terminal 10 are connected by soldering or YAG laser welding, and the low melting point solder 9 is attached to the case.
And a metal cap 8 is sealed with a seam welder or the like, whereby a light receiving element device can be obtained.

【0012】本実施例において、受光素子に三元のAP
D、前置増幅ICにSi−ICを用いた結果、波長1.
3μmの2.488Gbpsで最小受信感度が−34d
Bm(ビットエラーレートが10-11 時)の前置増幅器
内蔵光半導体受光素子装置が得られた。
In this embodiment, a ternary AP is used for the light receiving element.
D. As a result of using Si-IC as the preamplifier IC, the wavelength 1.
The minimum receiving sensitivity is -34d at 2.488 Gbps of 3 μm.
An optical semiconductor light receiving device with a built-in preamplifier having a Bm (bit error rate of 10 −11 hour) was obtained.

【0013】図3、図4は本発明の実施例2で図3は素
子収納キャリアの底面図、図4は素子収納キャリアをフ
ァイバ結合アッセンブリするためのマウント基板に固定
した組立図である。
FIGS. 3 and 4 show a second embodiment of the present invention. FIG. 3 is a bottom view of the element storage carrier, and FIG. 4 is an assembly view in which the element storage carrier is fixed to a mount substrate for fiber coupling assembly.

【0014】素子収納キャリアの底面部にロー付けされ
ているマウント板22は素子収納キャリア底面の入射光
軸方向の外形よりも外に出ている形状になっている、マ
ウント基板5に固定する場合、初めに実施例1と同様に
は半田等で仮り固定し、次に上面方向からYAGレーザ
溶接によりYAGレーザ溶接部23を本固定することが
できる。したがって、本実施例では、素子収納キャリア
固定にYAGレーザ溶接を採用することができ固定部の
長期信頼性が向上しさらに以降に使用する半田の融点が
上げられるという利点がある。
The mounting plate 22 brazed to the bottom surface of the element storage carrier is fixed to the mounting substrate 5 which has a shape projecting outside the outer shape of the bottom surface of the element storage carrier in the direction of the incident optical axis. First, similarly to the first embodiment, the YAG laser welded portion 23 can be temporarily fixed by soldering or the like, and then the YAG laser welded portion 23 can be permanently fixed from the upper surface direction by YAG laser welding. Therefore, in the present embodiment, YAG laser welding can be employed for fixing the element storage carrier, so that there is an advantage that the long-term reliability of the fixing portion is improved and the melting point of the solder to be used later is raised.

【0015】[0015]

【発明の効果】以上説明したように本発明は、受光素子
と前置増幅素子とのベアチップを同一面上に近接実装す
ることで、素子の浮遊容量を低減でき、かつ受光素子の
出力と前置増幅素子の入力とを接続する結果用ワイヤの
長さが短かくなり、高周波帯域で問題となるインダクタ
ンスが小さくでき、かつ素子間のインピーダンスミスマ
ッチングに対する反射周波数帯域をも高くすることがで
き広帯域化することができる。また、前置増幅器の出力
インピーダンス50Ωに整合されたパッケージ出力端子
にしたことで外部接続増幅器とのインピーダンス整合が
容易となる。さらに、気密封止の素子収納キャリアにし
たことによりモジュール化における組立時の取り扱い容
易であり、かつ信頼性が優れたものができるという効果
がある。
As described above, according to the present invention, by mounting the bare chip of the light receiving element and the preamplifier close to the same surface, the stray capacitance of the element can be reduced, and the output of the light receiving element and the output power of the light receiving element can be reduced. As a result of connecting the input of the preamplifier to the input, the length of the wire becomes shorter, the inductance which is a problem in the high frequency band can be reduced, and the reflection frequency band for impedance mismatch between the elements can be increased. Can be In addition, the use of the package output terminal matched to the output impedance of the preamplifier of 50Ω facilitates impedance matching with the externally connected amplifier. Furthermore, the use of the hermetically sealed element storage carrier has an effect that it is easy to handle at the time of assembling in modularization and has excellent reliability.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の前置増幅器内蔵光半導体受光素子装置
の実装図。
FIG. 1 is a mounting diagram of an optical semiconductor photodetector device with a built-in preamplifier of the present invention.

【図2】図1に示した素子収納キャリアの素子搭載図。FIG. 2 is an element mounting view of the element storage carrier shown in FIG.

【図3】素子収納キャリアの実施例2の図。FIG. 3 is a diagram of an element storage carrier according to a second embodiment.

【図4】実施例2の素子収納キャリアとマウント基板と
の固定実装図。
FIG. 4 is a fixed mounting diagram of the element storage carrier and the mounting substrate according to the second embodiment.

【符号の説明】[Explanation of symbols]

1 素子収納用キャリア 2 レンズ 3 レンズホルダ 4 ファイバフェルール 5 マウント基板 6 スライドリング 7 ケース 8 キャップ 9 半田 10 外部リード端子 11 ガラスキャップ 12,22 マウント板 13 リード端子 14 前置増幅IC 15 光受光素子 16,17 コンデンサ 19 素子搭載ヒートブロック 21 リードパターン DESCRIPTION OF SYMBOLS 1 Element storage carrier 2 Lens 3 Lens holder 4 Fiber ferrule 5 Mounting board 6 Slide ring 7 Case 8 Cap 9 Solder 10 External lead terminal 11 Glass cap 12, 22 Mounting plate 13 Lead terminal 14 Preamplifier IC 15 Light receiving element 16 , 17 Capacitor 19 Element mounting heat block 21 Lead pattern

Claims (2)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 受光素子および前記受光素子の出力電気
信号を増幅する前置増幅用ICが搭載されたキャリア
と、レンズホルダーに固定された結合レンズとフェルー
ルを有する光入力用光ファイバとが箱型ケースに内臓さ
れた光半導体受光素子装置であって、前記受光素子と前
置増幅用ICとは前記キャリア上に前記受光素子の受光
面および前記前置増幅用ICの搭載面とが平行になるよ
うに搭載され、前記キャリアは前記受光素子の受光面お
よび前記前置増幅用ICの搭載面が前記光入力用光ファ
イバからの光の出射方向に平行な面に対して垂直にな
り、かつ前記受光素子に前記光入力用光ファイバからの
光が入射されるように前記箱型ケース内に載置されてい
ることを特徴とする前置増幅器内蔵光半導体受光素子装
置。
A carrier on which a light receiving element and a pre-amplification IC for amplifying an output electric signal of the light receiving element are mounted, and a light input optical fiber having a coupling lens and a ferrule fixed to a lens holder are provided. An optical semiconductor light-receiving element device incorporated in a mold case, wherein the light-receiving element and the preamplification IC are arranged such that a light-receiving surface of the light-receiving element and a mounting surface of the preamplification IC are parallel on the carrier. And the carrier is mounted on the light receiving surface of the light receiving element.
And the mounting surface of the preamplifier IC is the optical input optical fiber.
Perpendicular to the plane parallel to the light
An optical semiconductor light receiving device with a built-in preamplifier, wherein the light receiving device is mounted in the box-shaped case so that light from the optical input optical fiber is incident on the light receiving device.
【請求項2】 受光素子の搭載された受光素子収納キャ
リアと、レンズホルダーに固定された結合レンズとフェ
ルールを有する光入力用光ファイバとが複数の外部接続
リード端子を底面に有する箱型ケースに内蔵され該箱型
ケースの上面がキャップにより封止された光半導体受光
素子装置であって、前記受光素子収納キャリアは、複数
のリード端子が設けられた第1の面と、前記複数のリー
ド端子の各々と電気的に接続された複数のリードパター
ンが設けられた前記第1の面と垂直な第2の面とを備
え、前記第2の面上に前記受光素子と前記受光素子の出
力電気信号を増幅する前置増幅用ICとが前記受光素子
の受光面および前記前置増幅用ICの搭載面が前記第2
の面と平行になるように搭載され、前記受光素子、前記
前置増幅用ICおよび前記複数のリードパターンがそれ
ぞれボンディングワイヤにより接続され、前記第2の面
上をガラスキャップにより封止されて、前記複数のリー
ド端子が前記箱型ケースの前記複数の外部接続リード端
子と各々電気的に接続するように前記箱型ケースに収納
されていることを特徴とする前置増幅器内蔵光半導体受
光素子装置。
2. A box-shaped case having a plurality of external connection lead terminals on a bottom surface of a light receiving element storage carrier having a light receiving element mounted thereon and an optical fiber for input light having a coupling lens and a ferrule fixed to a lens holder. An optical semiconductor light-receiving device device having a built-in box-shaped case and an upper surface thereof sealed by a cap, wherein the light-receiving device housing carrier includes a first surface provided with a plurality of lead terminals, and the plurality of lead terminals. A second surface perpendicular to the first surface on which a plurality of lead patterns electrically connected to each other are provided, and the light receiving element and the output electricity of the light receiving element are provided on the second surface. The preamplification IC for amplifying a signal is the light receiving surface of the light receiving element and the mounting surface of the preamplification IC is the second
The light receiving element, the preamplifier IC and the plurality of lead patterns are respectively connected by bonding wires, and the second surface is sealed with a glass cap, An optical semiconductor photodetector device with a built-in preamplifier, wherein the plurality of lead terminals are housed in the box-shaped case so as to be electrically connected to the plurality of external connection lead terminals of the box-shaped case. .
JP4000055A 1992-01-06 1992-01-06 Optical semiconductor photodetector with built-in preamplifier Expired - Fee Related JP2973670B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4000055A JP2973670B2 (en) 1992-01-06 1992-01-06 Optical semiconductor photodetector with built-in preamplifier

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4000055A JP2973670B2 (en) 1992-01-06 1992-01-06 Optical semiconductor photodetector with built-in preamplifier

Publications (2)

Publication Number Publication Date
JPH05241046A JPH05241046A (en) 1993-09-21
JP2973670B2 true JP2973670B2 (en) 1999-11-08

Family

ID=11463544

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4000055A Expired - Fee Related JP2973670B2 (en) 1992-01-06 1992-01-06 Optical semiconductor photodetector with built-in preamplifier

Country Status (1)

Country Link
JP (1) JP2973670B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100442467C (en) * 2005-11-11 2008-12-10 中国辐射防护研究院 A processing technique for moisture-proof insulation of preamplifier

Also Published As

Publication number Publication date
JPH05241046A (en) 1993-09-21

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