JP2715672B2 - Optical semiconductor photodetector with built-in preamplifier - Google Patents

Optical semiconductor photodetector with built-in preamplifier

Info

Publication number
JP2715672B2
JP2715672B2 JP3014641A JP1464191A JP2715672B2 JP 2715672 B2 JP2715672 B2 JP 2715672B2 JP 3014641 A JP3014641 A JP 3014641A JP 1464191 A JP1464191 A JP 1464191A JP 2715672 B2 JP2715672 B2 JP 2715672B2
Authority
JP
Japan
Prior art keywords
light receiving
carrier
preamplifier
receiving element
external connection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP3014641A
Other languages
Japanese (ja)
Other versions
JPH04254384A (en
Inventor
和弘 小菅
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP3014641A priority Critical patent/JP2715672B2/en
Publication of JPH04254384A publication Critical patent/JPH04254384A/en
Application granted granted Critical
Publication of JP2715672B2 publication Critical patent/JP2715672B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は光半導体受光素子に関
し、特に前置増幅器を内蔵した高帯域用光半導体受光素
子装置に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical semiconductor photodetector and, more particularly, to a high band optical semiconductor photodetector having a built-in preamplifier.

【0002】[0002]

【従来の技術】近年、幹線系光通信においては高ビット
レート化が要求されており、高速対応の送受信素子の開
発がなされている。これらの素子をモジュール化するに
当っては特に受光素子モジュールでは受光素子と増幅器
との間における接続方法により大きく性能が左右され
る。
2. Description of the Related Art In recent years, higher bit rates have been demanded in trunk line optical communication, and transmission / reception elements capable of high speed have been developed. In modularizing these elements, the performance of the photodetector module is greatly affected by the connection method between the photodetector and the amplifier.

【0003】従来の受光素子モジュールでは、受光素子
のみをケース内に搭載し、ファイバ結合したもの、ある
いはPIN・FETモジュールに代表されるように前置
増幅器をケース内に搭載したものがある。この前置増幅
器内蔵のモジュール構造では、受光素子搭載基板と前置
増幅器搭載基板とが別々になっており受光素子は電気接
続のための電極パターンが形成されている素子搭載用基
板にマウントされ、前置増幅器素子は別の素子搭載のた
めの電極パターンが形成されている基板にマウントさ
れ、これらの素子搭載用基板がケース内に受光素子搭載
用キャリアは受光素子の受光面をファイバ端面方向に向
け、前置増幅器搭載基板とをケース内の底面あるいは他
の基板面上に半田等でマウントしている。受光素子の前
置増幅器との電気接続はそれぞれの電極パターンを介し
金属ワイヤで接続されている構造となっている。
In a conventional light receiving element module, there are a light receiving element alone mounted in a case and fiber-coupled, and a preamplifier mounted in a case as represented by a PIN / FET module. In this module structure with a built-in preamplifier, the light receiving element mounting substrate and the preamplifier mounting substrate are separate, and the light receiving element is mounted on an element mounting substrate on which an electrode pattern for electrical connection is formed, The preamplifier element is mounted on a substrate on which an electrode pattern for mounting another element is formed.These element mounting substrates are placed in a case, and the light receiving element mounting carrier has the light receiving surface of the light receiving element facing the fiber end face. For this purpose, a preamplifier mounting substrate is mounted on the bottom surface in the case or on another substrate surface with solder or the like. The light receiving element is electrically connected to the preamplifier by a metal wire via each electrode pattern.

【0004】[0004]

【発明が解決しようとする課題】上述した従来の前置増
幅器光受光素子装置では、光受光素子面と前置増幅器搭
載面とが垂直面方向にマウントされているために、受光
素子と前置増幅器との電気接続は直接結ぶことができ
ず、結線用ワイヤーで接続し、また電極パターンを介し
ており、接続距離が長くなり電気接続のインダクタンス
が大きくなり高周波帯域での制約を受けるという問題が
あった。例えば、受光素子と前置増幅器との間を通常使
用される太さ約50μmφの結線用ワイヤーを用いた場
合、従来構造の場合では接続距離は5mm以上になり、
ワイヤー自身のインダクタンスは5nH以上となる。そ
のため、2〜3GHz程度に帯域が制限されてしまう。
In the above-described conventional preamplifier light receiving element device, the light receiving element surface and the preamplifier mounting surface are mounted in the vertical direction, so that the light receiving element and the preamplifier light receiving element are mounted in a vertical direction. The electrical connection with the amplifier cannot be directly connected, but is connected via a connection wire and via an electrode pattern.The problem is that the connection distance is long, the inductance of the electrical connection is large, and there is a restriction in the high frequency band. there were. For example, when a connection wire having a thickness of about 50 μmφ which is usually used between the light receiving element and the preamplifier is used, the connection distance becomes 5 mm or more in the case of the conventional structure,
The inductance of the wire itself is 5 nH or more. Therefore, the band is limited to about 2 to 3 GHz.

【0005】また、従来構造での素子の気密封止はケー
ス全体でとる方法で、ファイバピグテール部を半田等で
気密封止した構造である。したがってモジュール組立後
に気密封止試験を行いまたファイバ被覆が樹脂のためリ
ークテストができないため組立工数ならびに信頼性にか
けるという問題もある。
Further, the hermetic sealing of the element in the conventional structure is a method in which the fiber pigtail portion is hermetically sealed with solder or the like by a method of taking the whole case. Therefore, there is also a problem that a hermetic sealing test is performed after the module is assembled, and a leak test cannot be performed because the fiber coating is made of resin.

【0006】[0006]

【課題を解決するための手段】本発明の前置増幅器内蔵
光半導体受光素子装置は、電気素子搭載用の電極パター
ンが形成され、かつ外部接続用リード端子がマウント底
面部から少なくとも4本以上を有した収納キャリアに光
受光素子と前記受光素子の出力電気信号を増幅する前置
増幅用ICとコンデンサとが同一面上にマウントし、光
入射方向の上面部には透明なガラス板を貼付け前記受光
素子,前記前置増幅用IC,前記コンデンサが気密封止
されている一体型素子収納キャリア用いケース内にマウ
ントしている。
An optical semiconductor photodetector device with a built-in preamplifier according to the present invention has an electrode pattern for mounting an electric element and has at least four lead terminals for external connection from the bottom surface of the mount. A light receiving element, a preamplification IC for amplifying an output electric signal of the light receiving element, and a capacitor are mounted on the same carrier, and a transparent glass plate is attached to the upper surface in the light incident direction. The light receiving element, the preamplifier IC, and the capacitor are mounted in a case using an integrated element storage carrier in which the element is hermetically sealed.

【0007】[0007]

【実施例】次に、本発明について図面を参照して説明す
る。図1(a),(b)は本発明の一実施例の前置増幅
器内蔵光半導体受光素子装置の上面図(a)側面断面図
(b)で、図2(a),(b)は本発明の主要部である
素子収納キャリアの正面図とキャリア底面図である。
Next, the present invention will be described with reference to the drawings. 1 (a) and 1 (b) are a top view (a) and a side sectional view (b) of an optical semiconductor photodetector device with a built-in preamplifier according to an embodiment of the present invention, and FIGS. FIG. 3 is a front view and a bottom view of the element storage carrier which is a main part of the present invention.

【0008】素子収納キャリア1はファイバ端面側が凹
形状を有しており、この凹のへこみ部に素子搭載のパタ
ーンが形成されており、底面部のリード端子10に接続
配線されている。また底面部は素子収納キャリア1を固
定するときに底面部のリード端子10が短絡しないよう
に数mm厚のマウント板12が例えばAuCu半田付け
されている。前記素子収納キャリア1の素子搭載面に前
置増幅用IC14,受光素子15,コンデンサ16,1
7を例えばAuSn半田で固定し、ボンディングワイヤ
19でそれぞれ電気接続を行った後、窒素雰囲気中でメ
タライズされたガラスキャップ11を例えばARコート
されたサファイアガラスを封止面18でAuSn半田で
気密封止する。このように素子をマウントした素子収納
キャリア1での状態でBT選別した素子収納キャリア1
をマウント基板5にマウント板12面上をPbSn半田
により固定する。ファイバと受光素子の光学結合は、あ
らかじめロッドレンズで例えばセルフォックスレンズ
(商標)を固定したレンズホルダ3にファイバフェルー
ル4を嵌合し、半田あるいはYAG溶接により固定し、
素子収納キャリアが固定されたマウント基板5とファイ
バフェルール4を位置固定したレンズホルダ3とをスラ
イドリング6を介してYAG溶接固定する。この時の光
軸調整はファイバ端から光を入射させ受光素子の出力電
流を見ながら出力電流が最大になるようにX−Y−Z軸
方向に調整する。
The element storage carrier 1 has a concave shape on the fiber end face side, and a pattern for mounting the element is formed in the concave portion of the fiber, and is connected to the lead terminal 10 on the bottom surface. Further, a mount plate 12 having a thickness of several mm is, for example, AuCu soldered on the bottom portion so that the lead terminals 10 on the bottom portion do not short-circuit when the element storage carrier 1 is fixed. The preamplifier IC 14, the light receiving element 15, the capacitors 16, 1 are mounted on the element mounting surface of the element storage carrier 1.
7 is fixed with, for example, AuSn solder, and after electrical connection is made with each of the bonding wires 19, the glass cap 11 metallized in a nitrogen atmosphere is hermetically sealed with, for example, AR-coated sapphire glass on the sealing surface 18 with AuSn solder. Stop. BT-sorted element storage carrier 1 in the state of element storage carrier 1 on which elements are mounted as described above.
Is fixed to the mounting substrate 5 on the surface of the mounting plate 12 by PbSn solder. The optical coupling between the fiber and the light receiving element is performed by fitting a fiber ferrule 4 to a lens holder 3 to which, for example, a Selfox lens (trademark) is fixed in advance with a rod lens, and fixing the ferrule 4 by soldering or YAG welding.
The mount substrate 5 to which the element storage carrier is fixed and the lens holder 3 to which the fiber ferrule 4 is fixed are fixed by YAG welding via a slide ring 6. At this time, the optical axis is adjusted in the XYZ axis direction so that the output current is maximized while light is incident from the end of the fiber and the output current of the light receiving element is monitored.

【0009】以上のようにマウント基板5を介して組立
てた光学系部を外部リード端子10を有するケース7内
の底面に素子収納キャリア固定時の半田よりも融点の低
い半田、例えば、InSn半田で固定し、素子収納キャ
リアのリード端子13とケースリード端子10を半田あ
るいはYAG溶接で接続し、ケース口には低融点半田9
で封止しシームウェルダ等でキャップ8封止することに
より受光素子装置が出来上がる。
The optical system assembled as described above via the mount board 5 is soldered to the bottom of the case 7 having the external lead terminals 10 with solder having a lower melting point than the solder used when the element storage carrier is fixed, for example, InSn solder. After fixing, the lead terminals 13 of the element storage carrier and the case lead terminals 10 are connected by soldering or YAG welding.
And the cap 8 is sealed with a seam welder or the like to complete the light receiving device.

【0010】本実施例において、受光素子に三元AP
D、前置増幅器ICにSi−ICを用いた結果、2.4
Gb/Sで最小受信感度が−32dBm(BERが10
-11 において)の1.3μm波長で得られる前置増幅器
内蔵光半導体受光素子装置が得られた。
In this embodiment, a ternary AP is used for the light receiving element.
D, using Si-IC as preamplifier IC, 2.4
In Gb / S, the minimum receiving sensitivity is -32 dBm (BER is 10
-11 ), an optical semiconductor photodetector device with a built-in preamplifier obtained at a wavelength of 1.3 μm was obtained.

【0011】図3,図4は本発明の実施例2で、図3は
素子収納キャリアの底面図、図4は素子収納キャリア1
をマウント基板5に固定した組立図である。素子収納キ
ャリアの底面部に貼付けられるマウント板19は素子収
納キャリアの底面よりも外に出ている形状になっている
ため、マウント基板5に固定する場合、始めに実施例1
と同様に半田等で仮り固定し、次に上面方向からYAG
レーザ溶接により本固定することができる。したがっ
て、本実施例では素子収納キャリア固定にYAGレーザ
溶接をすることにより固定部の信頼性が向上しさらに以
降に使用する半田の融点が上げられるという利点があ
る。
3 and 4 show a second embodiment of the present invention. FIG. 3 is a bottom view of an element storage carrier, and FIG.
FIG. 3 is an assembly diagram in which is fixed to a mount substrate 5. Since the mounting plate 19 affixed to the bottom surface of the element storage carrier has a shape protruding outside the bottom surface of the element storage carrier, when fixing the mounting substrate 5 to the mounting substrate 5, the first embodiment is first performed.
Temporarily fix with solder etc. in the same manner as
It can be permanently fixed by laser welding. Therefore, in this embodiment, there is an advantage that the reliability of the fixing portion is improved by performing YAG laser welding for fixing the element storage carrier, and the melting point of the solder to be used thereafter can be increased.

【0012】[0012]

【発明の効果】以上説明したように本発明は受光素子と
前置増幅素子とを同一面上にマウントすることにより、
受光素子の出力と前置増幅器入力とを接続する結線用ワ
イヤの長さが短かくなり、高周波域で問題となるインダ
クタンスが小さくすることで広帯化できる。またベアチ
ップをマウントする素子収納キャリアで気密封止するこ
とによりモジュール化における組立時の取り扱いが容易
であり、かつ、信頼性が優れたものができるという効果
がある。
As described above, according to the present invention, the light receiving element and the preamplifier are mounted on the same surface,
The length of the connecting wire connecting the output of the light receiving element and the input of the preamplifier is shortened, and the inductance which becomes a problem in a high frequency range is reduced, so that the band can be widened. In addition, by hermetically sealing with an element storage carrier on which a bare chip is mounted, there is an effect that handling at the time of assembling in a module is easy and a device having excellent reliability can be obtained.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の前置増幅器内蔵光半導体受光素子装置
の実装図。
FIG. 1 is a mounting diagram of an optical semiconductor photodetector device with a built-in preamplifier of the present invention.

【図2】図1に示した素子収納キャリアの素子搭載図。FIG. 2 is an element mounting view of the element storage carrier shown in FIG.

【図3】素子収納キャリアの一例を示す図。FIG. 3 is a diagram showing an example of an element storage carrier.

【図4】図3に示した素子収納キャリアとマウント基板
との固定実装図。
FIG. 4 is a fixed mounting diagram of the element storage carrier and the mounting board shown in FIG. 3;

【符号の説明】[Explanation of symbols]

1 素子収納キャリア 2 レンズ 3 レンズホルダー 4 ファイバフェルール 5 マウント基板 6 スライドリング 7 ケース 8 キャップ 9 半田 10 外部リード端子 11 ガラスキャップ 12 マウント板 13 リード端子 14 前置増幅用IC 15 受光素子 16,17 コンデンサ 18 封止面 19 ボンディングワイヤー 21,22,23,24,25 YAG溶接部 DESCRIPTION OF SYMBOLS 1 Element storage carrier 2 Lens 3 Lens holder 4 Fiber ferrule 5 Mounting board 6 Slide ring 7 Case 8 Cap 9 Solder 10 External lead terminal 11 Glass cap 12 Mounting plate 13 Lead terminal 14 Preamplifier IC 15 Light receiving element 16, 17 Capacitor 18 Sealing surface 19 Bonding wire 21, 22, 23, 24, 25 YAG weld

Claims (2)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 キャリアに搭載された受光素子と、レン
ズホルダーに固定された結合レンズと、フェルールを有
する光入力用光ファイバとが、外部接続リード端子を有
する箱型ケースに内蔵され光半導体受光素子装置にお
いて、前記素子収納キャリアは、光入射側である光ファ
イバ側が凹んだ形状で、素子搭載面である凹み深部に電
極パターンが形成され、かつ、外部接続用リード端子
が、素子収納キャリア取り付け面である底面部から少な
くとも4本以上を有しており、前記素子収納キャリア
素子搭載面に受光素子と前記受光素子の出力電気信号を
増幅する前置増幅用ICと、コンデンサとが同一面上
搭載され、前記素子収納キャリアの光入射方向に透明
なガラス板を貼付け前記受光素子、前置増幅用IC、
コンデンサを前記素子収納キャリア内に気密封止し、前
記素子収納キャリアを前記箱形ケース内に収納して、
記収納キャリアの外部接続用リード端子を、前記箱型ケ
ースの外部接続リード端子に固着・接続していることを
特徴とする前置増幅器内蔵光半導体受光素子装置。
And 1. A light receiving element mounted on the carrier, and the immobilized binding lenses in the lens holder, and a light input optical fiber having a ferrule, an optical semiconductor incorporated in a box-type case having an external connection lead terminals in the light receiving element unit, before Kimoto child storage carrier, a light incident side fiber-
In driver side recessed shape, the electrode pattern is formed on the recess deep an element mounting surface, or One lead terminal external connection
But has at least 4 or more from the bottom part is an element housed carrier mounting surface, of the device housing carrier
An IC for preamplification for amplifying an output electrical signal of said light receiving element and the light receiving element on the element mounting surface, and a capacitor is <br/> mounted on the same surface, transparent to the light incident direction side of the element housing carrier Attaching a glass plate to the light receiving element, preamplifier IC,
The capacitor is hermetically sealed in the element storage carrier, and
A preamplifier , wherein the element storage carrier is stored in the box-shaped case, and an external connection lead terminal of the storage carrier is fixedly connected to an external connection lead terminal of the box-shaped case. Built-in optical semiconductor light receiving device.
【請求項2】 キャリアに搭載された受光素子と、レン
ズホルダーに固定された結合レンズと、フェルールを有
する光入力用光ファイバとが、外部接続リード端子を有
する箱型ケースに内蔵された光半導体受光素子装置にお
いて、前記素子収納キャリアは、光入射側である光ファ
イバ側が凹んだ形状で、素子搭載面である凹み深部に電
極パターンが形成され、かつ、外部接続用リード端子
が、素子収納キャリア取り付け面である底面部から少な
くとも4本以上を有し、かつ、前記底面部に、底面外形
から外に突起する形状の金属板を貼り付けており、前記
素子収納キャリアの素子搭載面に受光素子と前記受光素
子の出力電気信号を増幅する前置増幅用ICと、コンデ
ンサとが同一面上で搭載され、前記素子収納キャリアの
光入射方向側に透明なガラス板を貼付けて前記受光素
子、前置増幅用IC、コンデンサを前記素子収納キャリ
ア内に気密封止し、前記素子収納キャリアを前記箱形ケ
ース内に収納して、前記収納キャリアの外部接続用リー
ド端子を、前記箱型ケースの外部接続リード端子に固着
・接続していることを特徴とする前置増幅器内蔵光半導
体受光素子装置。
2. A light receiving element mounted on a carrier and a lens.
With a coupling lens fixed to the holder and a ferrule
Optical input optical fiber has external connection lead terminals.
Optical semiconductor light-receiving device built in a box-shaped case
The element storage carrier has an optical fiber on the light incident side.
The recessed side of the device has a concave shape.
A pole pattern is formed and the external connection lead terminal
However, there is a small amount from the bottom
At least four or more, and the bottom part has a bottom contour
A metal plate with a shape protruding outward from the
A light receiving element and the light receiving element are mounted on the element mounting surface of the element storage carrier.
A preamplifier IC for amplifying the output electric signal of the
Sensor is mounted on the same surface,
Paste a transparent glass plate on the light incident direction side and
Element, pre-amplification IC, and capacitor
A) and hermetically sealed in the box.
Stored in the storage case, and
Fixed to the external connection lead terminal of the box-shaped case.
.Optical semiconductor integrated with a preamplifier, characterized by being connected
Body light receiving device.
JP3014641A 1991-02-06 1991-02-06 Optical semiconductor photodetector with built-in preamplifier Expired - Fee Related JP2715672B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3014641A JP2715672B2 (en) 1991-02-06 1991-02-06 Optical semiconductor photodetector with built-in preamplifier

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3014641A JP2715672B2 (en) 1991-02-06 1991-02-06 Optical semiconductor photodetector with built-in preamplifier

Publications (2)

Publication Number Publication Date
JPH04254384A JPH04254384A (en) 1992-09-09
JP2715672B2 true JP2715672B2 (en) 1998-02-18

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Country Link
JP (1) JP2715672B2 (en)

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