JP2965417B2 - Dielectric porcelain composition - Google Patents
Dielectric porcelain compositionInfo
- Publication number
- JP2965417B2 JP2965417B2 JP4063120A JP6312092A JP2965417B2 JP 2965417 B2 JP2965417 B2 JP 2965417B2 JP 4063120 A JP4063120 A JP 4063120A JP 6312092 A JP6312092 A JP 6312092A JP 2965417 B2 JP2965417 B2 JP 2965417B2
- Authority
- JP
- Japan
- Prior art keywords
- composition
- dielectric
- value
- variation
- dielectric porcelain
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Description
【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION
【0001】[0001]
【産業上の利用分野】本発明は、マイクロ波、ミリ波帯
などの高周波領域において使用される誘電体共振器、及
び誘電体フィルター等に好適な誘電体磁器組成物に関す
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a dielectric ceramic composition suitable for a dielectric resonator and a dielectric filter used in a high frequency region such as a microwave and a millimeter wave band.
【0002】[0002]
【従来の技術】従来から、高周波領域において、回路の
インピーダンス整合、誘電体共振器、及びフィルター等
に誘電体が応用されており、近年の通信の高周波化に伴
いQ値が大きく、かつ温度変化による共振周波数の変動
が小さい誘電体の開発が要請されている。2. Description of the Related Art Hitherto, dielectric materials have been applied to impedance matching of circuits, dielectric resonators, filters, and the like in the high frequency region. There is a demand for the development of a dielectric having a small fluctuation in the resonance frequency due to the above.
【0003】誘電体磁器組成物としては、特開昭53−
60544号公報にxBaO・yMgO・zTa2 O5
系が提案されている。この材料は高い無負荷Q値と小さ
な共振周波数の温度変化率を有している。As a dielectric porcelain composition, Japanese Patent Application Laid-Open No.
No. 60544 discloses xBaO.yMgO.zTa 2 O 5
A system has been proposed. This material has a high unloaded Q factor and a small rate of temperature change at the resonant frequency.
【0004】[0004]
【発明が解決しようとする課題】しかしながら、上記従
来の組成ではQ値のばらつきが大きいため、製造歩留低
下や、デバイスに実装した際の特性バラツキが拡大する
等、実用上問題があった。However, in the above-mentioned conventional composition, since the Q value has a large variation, there is a problem in practical use such as a decrease in manufacturing yield and an increase in variation in characteristics when mounted on a device.
【0005】本発明は、前記従来技術の課題を解決する
ため、Q値のばらつきが小さく、かつ大きなQ値を有す
る誘電体磁器組成物を提供することを目的とする。An object of the present invention is to provide a dielectric ceramic composition having a small Q value and a large Q value in order to solve the above-mentioned problems of the prior art.
【0006】[0006]
【課題を解決するための手段】前記課題を解決するた
め、本発明の第1番目の誘電体磁器組成物は、BaO,
MgO,TaO2.5 ,ZrO2 を含む誘電体磁器組成物
において、Ba(ZrxMgy Taz )w On と表わし
たとき(nは任意の数)、x+y+z=1、0.001 ≦x
≦0.02,0.292 ≦y≦0.335 ,0.664 ≦z≦0.688 、か
つ0.97≦w≦0.998 の範囲であるという構成を備えたも
のである。In order to solve the above-mentioned problems, the first dielectric ceramic composition of the present invention comprises BaO,
MgO, TaO 2.5, the dielectric ceramic composition containing ZrO 2, Ba (Zr x Mg y Ta z) when expressed as w O n (n is an arbitrary number), x + y + z = 1,0.001 ≦ x
≦ 0.02, 0.292 ≦ y ≦ 0.335, 0.664 ≦ z ≦ 0.688, and 0.97 ≦ w ≦ 0.998.
【0007】次に本発明の第2番目の誘電体磁器組成物
は、BaO,MgO,CoO,TaO2.5 ,ZrO2 を
含む誘電体磁器組成物において、Ba[Zrx (Mg
1-v Cov )y Taz ]w On と表わしたとき(nは任
意の数)、x+y+z=1、0.001 ≦x≦0.025 ,0.28
7 ≦y≦0.335 ,0.665 ≦z≦0.689 ,0.01≦v≦0.2
5、かつ0.97≦w≦0.998 の範囲にあるという構成を備
えたものである。Next, a second dielectric porcelain composition of the present invention is a dielectric porcelain composition containing BaO, MgO, CoO, TaO 2.5 and ZrO 2 , wherein Ba [Zr x (Mg
1-v Co v) y Ta z] when expressed as w O n (n is an arbitrary number), x + y + z = 1,0.001 ≦ x ≦ 0.025, 0.28
7 ≤ y ≤ 0.335, 0.665 ≤ z ≤ 0.689, 0.01 ≤ v ≤ 0.2
5, and a configuration in which 0.97 ≦ w ≦ 0.998.
【0008】[0008]
【作用】前記した本発明の第1〜2番目の誘電体磁器組
成物によれば、無負荷Q値のばらつきが極めて小さく、
かつ高いQ値を有し、さらには良好な共振周波数の温度
変化率を有する高品質な磁器を得ることができる。According to the first and second dielectric ceramic compositions of the present invention, the variation of the unloaded Q value is extremely small,
In addition, a high-quality porcelain having a high Q value and a good temperature change rate of the resonance frequency can be obtained.
【0009】[0009]
【実施例】以下実施例を用いて本発明をさらに具体的に
説明する。 実施例1 出発原料として、化学的に高純度なBaCO3 ,ZrO
2 ,MgO,Ta2 O 5 を使用し、表1に示された所定
の組成に秤量を行い、これをボールミルを用い湿式混合
処理した。この混合物を乾燥し、800℃で2時間仮焼
成を行った後、この仮焼成粉をさらにボールミルで粉砕
し、脱水乾燥後に粘結材としてポリビニルアルコールを
適当量加え、1ton/cm2 の圧力を加えて、直径8
mm 、厚み4mm の円板に成形した。The present invention will be described more specifically with reference to the following examples.
explain. Example 1 As a starting material, chemically high purity BaCOThree, ZrO
Two, MgO, TaTwoO FiveUsing the specified
Weighed into the composition and wet-mixed using a ball mill.
Processed. The mixture is dried and calcined at 800 ° C. for 2 hours.
After calcination, this calcined powder is further pulverized with a ball mill.
After dehydration and drying, polyvinyl alcohol is used as a binder.
Add an appropriate amount, 1 ton / cmTwoPressure of 8
mm and a 4 mm thick disk.
【0010】この成形体を1500〜1550℃で12
時間本焼成を行い磁器試料を得た。なお、焼成は高温に
おける成分の蒸発を考慮して、同一組成の仮焼成粉体で
十分に充填された白金容器中に20個の同一組成成形体
試料を入れた状態で行った。The molded body is heated at 1500 to 1550 ° C. for 12 hours.
The sintering was performed for a time to obtain a porcelain sample. The calcination was carried out in a state in which 20 specimens of the same composition were placed in a platinum container sufficiently filled with the calcined powder of the same composition in consideration of the evaporation of the components at high temperatures.
【0011】各組成あたり20個の磁器試料について、
10GHzの周波数における比誘電率: εr 、無負荷:
Q、バラツキの指標として無負荷Qの平均値に対し±5
%以内に入らない試料数:S、及び−50℃〜50℃に
おける共振周波数の温度変化率: τf (ppm/ ℃) を測定
した。なお、εr 、Q、τf は20個の平均値を算出し
供試データとした(表1)。For 20 porcelain samples for each composition,
Relative permittivity at a frequency of 10 GHz: ε r , no load:
± 5% of the average value of no-load Q as an index of Q and variation
%, And the temperature change rate of the resonance frequency at -50 ° C to 50 ° C: τ f (ppm / ° C) was measured. In addition, ε r , Q, and τ f were used as test data by calculating an average of 20 values (Table 1).
【0012】[0012]
【表1】 [Table 1]
【0013】表1から明かなようにw=1のBaとBa
以外の組成比が1:1の組成ではQ値のばらつきが大き
いく±5%に入らない試料が多数存在する。本実施例に
よるwが1より小さい領域では、ばらつきも小さく優れ
た特性が得られた。さらにはBaとBa以外の組成比
(w)が1:1組成より高い場合は好ましくなかった。As is apparent from Table 1, Ba and Ba at w = 1
With a composition having a composition ratio of 1: 1 other than the above, there are a large number of samples in which the variation of the Q value is large and does not fall within ± 5%. In the region where w is smaller than 1 according to the present embodiment, excellent characteristics were obtained with small variations. Further, when the composition ratio (w) other than Ba and Ba is higher than 1: 1 composition, it is not preferable.
【0014】また、x=0のZrO2 を全く含まない組
成でもQ値のばらつきが大きく、ZrO2 を含むことで
ばらつきは抑えられる。さらには、x>0.02の組成では
τf が急激に大きくなり、z>0.688 の組成では焼結性
が悪く、z<0.664 の組成ではQ値が著しく低下するた
め実用的ではない。[0014] Further, even when the composition does not contain ZrO 2 at x = 0, the variation of the Q value is large, and the variation can be suppressed by including ZrO 2 . Further, when the composition is x> 0.02, τ f is sharply increased, when the composition is z> 0.688, the sinterability is poor, and when the composition is z <0.664, the Q value is remarkably reduced, which is not practical.
【0015】本実施例による組成範囲ではいずれの組成
でもQ値が20000 以上で且つ、20個の試料の平均に対
するQ値のばらつきが±5%以下、さらには共振周波数
の温度変化率が4ppm/℃以下と非常に良好な電気的特性
を有していることが確認できた。In the composition range according to this embodiment, the Q value is 20,000 or more for any composition, the variation of the Q value with respect to the average of 20 samples is ± 5% or less, and the temperature change rate of the resonance frequency is 4 ppm / It was confirmed that the film had very good electrical characteristics of not more than ℃.
【0016】実施例2 出発原料として、化学的に高純度なBaCO3 ,ZrO
2 ,MgO,CoO,Ta2 O5 を使用した。次に表2
に示された所定の組成に秤量を行い、これをボールミル
を用い湿式混合処理した。以下実施例1と同様の方法で
供試試料を得た。表2に各組成毎の周波数10GHzに
おける比誘電率: εr 、無負荷Q: Q、ばらつきの指標
として無負荷Qの平均値に対し±6%以内に入らない試
料数:S、及び−50℃〜50℃における共振周波数の
温度変化率: τf (ppm/ ℃) を示す。なおεr 、Q、τ
f は20個の平均値を算出し供試データとした(表
2)。Example 2 As a starting material, chemically high-purity BaCO 3 , ZrO
2, MgO, CoO, using the Ta 2 O 5. Next, Table 2
Was weighed to a predetermined composition shown in Table 2, and this was subjected to wet mixing treatment using a ball mill. Hereinafter, test samples were obtained in the same manner as in Example 1. Table 2 shows the relative permittivity at a frequency of 10 GHz for each composition: ε r , the no-load Q: Q, the number of samples that do not fall within ± 6% of the average value of the no-load Q as an index of variation: S, and −50. It shows the temperature change rate of the resonance frequency from ℃ to 50 ℃: τ f (ppm / ℃). Note that ε r , Q, τ
For f, the average value of 20 samples was calculated and used as test data (Table 2).
【0017】[0017]
【表2】 [Table 2]
【0018】表2から明かなように、実施例1と同様に
w=1のBaとBa以外の組成比が1:1の組成、及び
x=0のZrO2 を全く含まない組成ではQ値のばらつ
きが大きかった。As is clear from Table 2, as in Example 1, the Q value was determined for a composition in which the composition ratio of Ba to Ba was 1: 1 except for w = 1 and a composition containing no ZrO 2 at x = 0. Was large.
【0019】その他の挙動も実施例1と同様であるが、
本実施例ではx≧0.025 の組成までτf が良好であり、
実施例1に比べτf の小さい組成範囲が広がる。また、
v<0.25の組成において高いQ値を保ちながら、Coの
量に応じてτf、εr が変化するため、組成の制御によ
り任意のεr に対して必要なτf を得ることができる。Other behaviors are the same as in the first embodiment,
In this embodiment, τ f is good up to a composition of x ≧ 0.025,
The composition range in which τ f is smaller than in Example 1 is widened. Also,
Since τ f and ε r change according to the amount of Co while maintaining a high Q value in the composition of v <0.25, the required τ f for any ε r can be obtained by controlling the composition.
【0020】誘電体磁器を用いた高周波デバイスではデ
バイス自体から生じる温度依存性を有する場合もあり、
この場合、デバイスに必要な磁器の誘電率を保ちながら
誘電体の温度依存性で全体としての温度依存性を補償す
る必要がある。ゆえに任意のεr に対しτf を制御する
ことは、温度依存性のない高周波デバイスを設計するう
えで極めて有用なこととなる。A high-frequency device using a dielectric porcelain may have a temperature dependency generated from the device itself,
In this case, it is necessary to compensate for the temperature dependence of the whole by the temperature dependence of the dielectric while maintaining the dielectric constant of the porcelain required for the device. Therefore, controlling τ f for an arbitrary ε r is extremely useful in designing a high-frequency device having no temperature dependence.
【0021】本実施例による組成範囲ではいずれの組成
でもQ値が20000 以上で且つ、20個の試料の平均に対
するQ値のばらつきが±6%以下、さらには共振周波数
の温度変化率が2ppm/ ℃以下と非常に良好な電気的特性
を有している。In the composition range according to this embodiment, the Q value is 20,000 or more for any composition, the variation of the Q value with respect to the average of 20 samples is ± 6% or less, and the temperature change rate of the resonance frequency is 2 ppm / It has very good electrical characteristics of less than ℃.
【0022】以上説明した通り、本実施例によれば、組
成式Ba(Zrx Mgy Taz )wOn で表わされる誘
電体磁器組成物で特定のx,y,zの範囲において、B
aとBa以外の組成比が1よりわずかに小さい、特に0.
97≦w≦0.998 の範囲にあることを特徴とすることで、
Q値のばらつきが極めて小さく、かつ高いQ値を有し、
さらには良好な共振周波数の温度変化率を有する高品質
な誘電体磁器を得ることが可能となる。また、マイクロ
波、ミリ波帯などの高周波領域において使用される誘電
体共振器、及び誘電体フィルター等に好適な誘電体磁器
組成物に有用なものとなる。[0022] As described above, according to this embodiment, the composition formula Ba (Zr x Mg y Ta z ) w O n specific x in the dielectric ceramic composition represented by, y, in the range of z, B
The composition ratio other than a and Ba is slightly smaller than 1, especially 0.1.
By being in the range of 97 ≦ w ≦ 0.998,
The variation of the Q value is extremely small and has a high Q value,
Further, it is possible to obtain a high-quality dielectric porcelain having a good temperature change rate of the resonance frequency. Further, it is useful for a dielectric ceramic composition suitable for a dielectric resonator and a dielectric filter used in a high frequency region such as a microwave and a millimeter wave band.
【0023】[0023]
【発明の効果】以上説明した通り、本発明によれば、無
負荷Q値のばらつきが極めて小さく、かつ高いQ値を有
し、さらには良好な共振周波数の温度変化率を有する高
品質な誘電体磁器を得ることが可能となる。As described above, according to the present invention, the variation of the no-load Q value is extremely small, the Q value is high, and the high-quality dielectric material having a good temperature change rate of the resonance frequency is obtained. It becomes possible to obtain a body porcelain.
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 昭60−105107(JP,A) 特開 平1−124272(JP,A) 特開 平5−198210(JP,A) (58)調査した分野(Int.Cl.6,DB名) H01B 3/12 312 C04B 35/495 H01P 7/10 ────────────────────────────────────────────────── ─── Continuation of the front page (56) References JP-A-60-105107 (JP, A) JP-A-1-124272 (JP, A) JP-A-5-198210 (JP, A) (58) Investigation Field (Int.Cl. 6 , DB name) H01B 3/12 312 C04B 35/495 H01P 7/10
Claims (2)
を含む誘電体磁器組成物において、Ba(Zrx Mgy
Taz )w On と表わしたとき(nは任意の数)、x+
y+z=1、0.001 ≦x≦0.02,0.292 ≦y≦0.335 ,
0.664 ≦z≦0.688 、かつ0.97≦w≦0.998 の範囲であ
る誘電体磁器組成物。1. BaO, MgO, TaO 2.5 , ZrO 2
In a dielectric porcelain composition containing: Ba (Zr x Mg y)
Ta z) when expressed as w O n (n is an arbitrary number), x +
y + z = 1, 0.001 ≦ x ≦ 0.02, 0.292 ≦ y ≦ 0.335,
A dielectric ceramic composition in which 0.664 ≦ z ≦ 0.688 and 0.97 ≦ w ≦ 0.998.
ZrO2 を含む誘電体磁器組成物において、Ba[Zr
x (Mg1-v Cov )y Taz ]w On と表わしたとき
(nは任意の数)、x+y+z=1、0.001 ≦x≦0.02
5 ,0.287 ≦y≦0.335 ,0.665 ≦z≦0.689 ,0.01≦
v≦0.25、かつ0.97≦w≦0.998 の範囲にある誘電体磁
器組成物。2. BaO, MgO, CoO, TaO 2.5 ,
In a dielectric porcelain composition containing ZrO 2 , Ba [Zr
x (Mg 1-v Co v ) y Ta z] when expressed as w O n (n is an arbitrary number), x + y + z = 1,0.001 ≦ x ≦ 0.02
5, 0.287 ≤ y ≤ 0.335, 0.665 ≤ z ≤ 0.689, 0.01 ≤
A dielectric ceramic composition in the range of v ≦ 0.25 and 0.97 ≦ w ≦ 0.998.
Priority Applications (1)
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JP4063120A JP2965417B2 (en) | 1992-03-19 | 1992-03-19 | Dielectric porcelain composition |
Applications Claiming Priority (1)
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JP4063120A JP2965417B2 (en) | 1992-03-19 | 1992-03-19 | Dielectric porcelain composition |
Publications (2)
Publication Number | Publication Date |
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JPH05266712A JPH05266712A (en) | 1993-10-15 |
JP2965417B2 true JP2965417B2 (en) | 1999-10-18 |
Family
ID=13220112
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7056852B2 (en) | 2003-04-23 | 2006-06-06 | Murata Manufacturing Co., Ltd. | High-frequency dielectric ceramic composition, dielectric resonator, dielectric filter, dielectric duplexer and communication system |
-
1992
- 1992-03-19 JP JP4063120A patent/JP2965417B2/en not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7056852B2 (en) | 2003-04-23 | 2006-06-06 | Murata Manufacturing Co., Ltd. | High-frequency dielectric ceramic composition, dielectric resonator, dielectric filter, dielectric duplexer and communication system |
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JPH05266712A (en) | 1993-10-15 |
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