JP2954075B2 - Terminal coplanarity measuring method and apparatus - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and an apparatus for measuring coplanarity (flatness) of a plurality of terminals arranged on an object to be inspected, and more particularly, to an arrangement of connectors and ICs (integrated circuit devices). And apparatus for measuring coplanarity for a plurality of terminals.

[0002]

2. Description of the Related Art In a conventional method of measuring the coplanarity of a terminal, a terminal of an object to be inspected is mounted on a reference surface, an image of the terminal is captured by a camera, and image processing is performed.

For example, Japanese Patent Application Laid-Open No. 5-166907 discloses a method of measuring coplanarity of a terminal as shown in FIG.

In FIG. 5, an inspection object 51 made of an IC is placed on a measurement stage 52 made of light-transmitting glass or the like.
Light is emitted from a light source 60 from one side, and an image of the inspection object 51 is obtained by a camera 59 arranged on the other side.

FIG. 6 shows an image of a reference plane 53 obtained by imaging the measurement stage 52 with the camera 59 in advance and inverting black and white with the image of the inspection object 51 taken with the camera 59. In this image, the image of the terminal 58 provided on the light source 60 side overlaps with the background of the image of the terminal 55 provided on the camera 59 side of the inspection object 51. FIG. 7 shows a binarized version of the image shown in FIG. 6. The interval between each terminal 55 and the reference plane 53 is calculated using the binarized image, and
Was gaining coplanarity.

[0006]

In the conventional method of measuring the coplanarity of a terminal using image processing, when the distance between the terminal and the reference plane is small, erroneous measurement occurs due to interference of irradiation light or insufficient transmitted light. There was a disadvantage that there was.

In the conventional terminal coplanarity measuring method shown in FIGS. 5 to 7, the terminal 58 on the opposite side overlaps with the terminal 55 to be inspected. There is a drawback that the measurement of a value lower than the value results in inaccurate measurement of coplanarity.

An object of the present invention is to eliminate the influence of irradiation light without using image processing, and even if terminals are arranged on both sides of an object to be inspected, the terminals on both sides may interfere with measurement with each other. It is an object of the present invention to provide a method for measuring coplanarity of a terminal that does not become impossible.

[0009]

According to the method for measuring the coplanarity of a terminal according to the present invention, an object to be inspected (FIG. 1) provided with a plurality of terminals (5 in FIG. 1) such that the contact portions are on the terminal contact surfaces. With respect to 1), a contact detection unit (3 in FIG. 1) having a contact detection surface parallel to the terminal contact surface is moved in a direction perpendicular to the terminal contact surface, and the terminal comes into contact with the contact detection surface. A plurality of pairs of pads (6, 7 in FIG. 1) preferably corresponding to positions of the contact detection surface corresponding to the contact portions of the plurality of terminals. ) Is provided, and by detecting that the paired pads are conducted through the corresponding one of the terminals, contact with the contact detection surface of the terminal is detected, and the contact detection unit is All of the plurality of terminals are Move the position of the plurality of terminals from a position not in contact with the touch detection surface to a position where all of the plurality of terminals are in contact with the contact detection surface, and measure the position of the contact detection unit when the terminal comes into contact with the terminal contact surface. Or, the contact detection unit may be moved from a position where all of the plurality of terminals are pressed by the contact detection surface and bent within the elastic limit range to a position where all of the plurality of terminals do not contact the contact detection surface. By moving the terminal, the position of the contact detection unit when the terminal comes into contact with the terminal contact surface can be measured.

In the above-described method of measuring the coplanarity of a terminal, the position of the terminal in a direction perpendicular to the terminal contact surface may be calculated from the position of the contact detection unit when the terminal contacts the terminal contact surface. , One of the terminals
The distance between the position of the contact detection unit when one contacts the contact detection surface and the position of the contact detection unit when all of the terminals contact the contact detection surface is perpendicular to the terminal contact surface. It can be calculated as the distance between the contact portion of the terminal at the bottom and the contact portion of the terminal at the top in the direction, and preferably a portion corresponding to the contact portion of the terminal on the contact detection surface or Variations in the position of the pad in the direction perpendicular to the terminal contact surface are determined in advance, and the position of the contact detection unit when the terminal contacts the terminal contact surface is corrected from the value corrected by the variation to determine the terminal contact. The distance between the position of the terminal in contact with the surface or the contact portion of the lowest terminal in the direction perpendicular to the terminal contact surface and the contact portion of the highest terminal is calculated. Good.

A terminal coplanarity measuring apparatus according to the present invention is a pedestal for holding an inspection object (1 in FIG. 1) provided with a plurality of terminals (5 in FIG. 1) such that a contact portion is on a terminal contact surface. (2 in FIG. 1); a contact detection unit (3 in FIG. 1) having a contact detection surface parallel to the terminal contact surface and moving in a direction perpendicular to the terminal contact surface; A plurality of pairs of pads (6, 7 in FIG. 1) provided in pairs at positions corresponding to the contact portions of the terminal, and a distance for measuring a position of the contact detection unit in a direction perpendicular to the terminal contact surface. And a detection unit (4 in FIG. 1), wherein a contact of the corresponding terminal with the contact detection surface is detected by conduction of the pair of pads.

[0012]

Next, embodiments of the present invention will be described in detail with reference to the drawings.

FIGS. 1A to 1C are front views of a terminal coplanarity inspection apparatus according to an embodiment of the present invention, respectively.
It is a top view and a side view.

Inspection object 1 consisting of a connector on cradle 2
Put the main body. Terminals 5 are arranged in line on one side surface of the inspection object 1. The tip of the terminal 5 forms a contact portion, and the DUT 1 is manufactured such that the contact portions of the plurality of terminals 5 are located on a plane (terminal contact surface). On one side of the cradle 2, a contact detection unit 3 parallel to the second cradle is provided so as to be vertically movable. The height of the contact detection unit 3 is measured by the distance measurement unit 4.

FIGS. 2A to 2C are enlarged views of the portions A, B and C shown in FIG. 1, respectively. On the upper surface of the contact detection unit 3 (corresponding to the contact detection surface described in the claims), a pair of contact pads 6 and 7 corresponding to the respective terminals 5 are provided.
And the pads 6 and 7 are located at positions where at least a part thereof overlaps with the corresponding terminal 5. When the contact detection unit 3 is moved upward, the pads 6 and 7 of the pair come into contact with the corresponding terminals 5, but at this time, the pads 6 and 7 become conductive with each other. Is detected, contact between the pads 6 and 7 and the terminal 5 can be detected.

FIG. 3 is a diagram showing a method of measuring coplanarity of a terminal using the apparatus shown in FIG. 1, and FIG. 3 (a1) to FIG.
3) shows a side view, and FIGS. 3 (b1) to (b3) show front views. In FIG. 3 (b1) to (b3), the terminal 5
Only the tip of the terminal 5 is shown (FIG. 4B1).
(The same applies to (b4)).

As shown in FIGS. 3 (a1) and 3 (b1), first, the main body of the inspection object 1 is placed on the receiving table 2 and set. At this time, the contact detection unit 3 is sufficiently lowered so that none of the pads 6 and 7 come into contact with the terminal 5. Next, the contact detection unit 3 is raised, and the height of the contact detection unit 3 when the contact between any of the terminals 5 and the pads 6 and 7 is detected as shown in FIGS. It is measured as the lower point (the position of the contact portion of the terminal 5 at the lowest position). Further, the contact detection unit 3 is raised, and the height of the contact detection unit 3 when the contact of all the pads 6 and 7 of the terminal 5 is detected as shown in FIGS. Measured as Thereafter, the difference between the height of the contact portion of the uppermost terminal 5 and the height of the contact portion of the lowermost terminal 5 is obtained by subtracting the height of the terminal lowermost point from the height of the terminal uppermost point. Is calculated.

In the method of measuring coplanarity of a terminal shown in FIG. 3, even if the terminal has an oxide film or the like and is physically in contact with the corresponding pad 6, 7 of the terminal 5, the pad 6, 7
If the terminals are not electrically conductive, the coplanarity of the terminals cannot be measured accurately.

FIG. 4 shows a method for measuring the coplanarity of other terminals using the apparatus shown in FIG. 1. In this method, electrical conduction between the pads 6 and 7 due to physical contact with the terminal 5 occurs in these terminals. It can accurately measure the coplanarity of the terminal even when the terminal is affected by an oxide film or the like. FIG.
(A1) to (a4) show side views, and FIG.
(B4) shows a front view.

As shown in FIGS. 4 (a1) and 4 (b1), the object to be inspected is placed on the receiving table 2 and set. At this time, the contact detection unit 3 is sufficiently lowered so that none of the pads 6 and 7 come into contact with the terminal 5. Next, the contact detection unit is further raised from the height at which all of the terminals 5 are in contact with the pads 6 and 7, and as shown in FIGS. 4 (a2) and 4 (b2), the terminal 5 is pushed to bend within the elastic deformation range. Raise to near. With this operation, the oxide film on the contact surface between the terminal 5 and the pads 6, 7 is broken by the contact pressure and sliding.

Thereafter, the contact detection unit 3 is lowered, and any one of the terminals 5 is connected as shown in FIGS. 4 (a3) and 4 (b3).
The height of the contact detection unit 3 when the pads 6 and 7 are no longer in contact is measured as the terminal uppermost point. Further, the contact detection unit 3 is lowered, and FIGS. 4 (a4) and (b4)
The height of the contact detection unit 3 when all of the terminals 5 are no longer in contact with the pads 6 and 7 is measured as the terminal lowest point. Thereafter, the height of the terminal bottom point is subtracted from the height of the terminal top point to calculate the coplanarity of the terminal.

In the terminal coplanarity measuring method shown in FIGS. 3 and 4, the height variations of a plurality of pairs of pads 6 and 7 provided on the contact detection unit 3 are measured in advance. Pad 6, which contacted terminal 5,
By correcting the height of the uppermost point of the terminal and the height of the lowermost point of the terminal based on the variation in the height of the pad 7, a more accurate terminal coplanarity excluding the influence of the dispersion in the height of the pads 6 and 7 can be obtained. it can.

FIG. 1 shows a terminal 5 on only one side of the object 1 to be inspected.
Are shown in a row, but the inspection object 1 is like an IC.
When the terminals 5 are arranged in a row on both side surfaces, the contact detection units 3 may be provided on both sides of the cradle 2, and the contact detection units 3 on both sides may be individually moved up and down. The present invention can be practiced even if it is vertically moved as a unit.

In the above-described embodiment, the inspection object 1 is fixed and the contact detection unit 3 is moved up and down. However, the contact detection unit 3 may be fixed and the inspection object 1 may be moved.

In the above-described embodiment, the height of the terminal at the lowest point is subtracted from the height of the terminal at the highest point, and the height of the contact portion of the terminal 5 at the top and the contact of the terminal 5 at the lowest are determined. The difference with the height of the part was determined and the coplanarity of the terminal was used,
It is also possible to calculate the height of each terminal 5 from the height of the contact detection unit when it comes into contact with the terminal 5 and obtain the coplanarity of the terminal.

[0026]

As described above, according to the present invention, the position of the contact portion of the terminal of the object to be inspected is calculated from the position at the time of contact with the terminal of the contact detection unit, and no optical image is used. Thus, even if terminals are provided on both side surfaces of the device, the coplanarity of the terminals can be measured without being limited by the shape of the object to be inspected, such that the coplanarity of the terminals can be accurately measured.

Further, the contact of the corresponding terminal with the contact detection unit can be detected by conduction between a plurality of pairs of pads provided on the contact detection unit, and furthermore, the contact is made until the terminal is bent within the elastic limit range. By moving the detection unit, the factors that hinder the conduction between the pad and the terminal, such as an oxide film, are removed, and the physical contact between the terminal and the contact detection unit accurately establishes electrical conduction between the terminal and the pad. Accurate terminal coplanarity can be measured.

In addition, by measuring in advance the variation in the position of the contact detection unit in the direction perpendicular to the terminal contact surface such as a pad, and correcting the position when the terminal of the contact detection unit comes into contact with this variation, Measurement accuracy of terminal coplanarity can be improved.

Further, since the present invention does not use an expensive optical device or image processing device, the cost of the terminal coplanarity measuring device can be reduced.

[Brief description of the drawings]

FIG. 1A is a front view of a terminal coplanarity measuring apparatus according to an embodiment of the present invention. FIG. 2B is a plan view of the terminal coplanarity measuring device according to the embodiment of the present invention. (C) is a side view of the terminal coplanarity measuring device according to the embodiment of the present invention.

FIG. 2A is an enlarged view of a portion A in FIG. FIG. 2B is an enlarged view of a portion B in FIG. 1. FIG. 2C is an enlarged view of a portion C in FIG.

FIG. 3 is a diagram showing a method for measuring coplanarity of a terminal using the apparatus shown in FIG. 1;

FIG. 4 is a diagram illustrating a method for measuring coplanarity of another terminal using the device illustrated in FIG. 1;

FIG. 5 is a configuration diagram showing a conventional method for measuring coplanarity of a terminal.

6 is a diagram showing an image obtained by a camera 59 in FIG.

FIG. 7 is a diagram showing a binarized image of the image of FIG. 6;

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Inspection object 2 Cradle 3 Contact detection unit 4 Distance detection unit 5 Terminal 6 Pad 7 Pad 51 Inspection object 52 Measurement stage 53 Reference plane 55, 58 Terminal 59 Camera 60 Light source

Claims (8)

(57) [Claims] 1. A contact detection unit having a contact detection surface parallel to the terminal contact surface with respect to an inspection object provided with a plurality of terminals such that contact portions are located on the terminal contact surface. Moving the terminal in a vertical direction and measuring a position of the contact detection unit when the terminal comes into contact with the contact detection surface. 2. A plurality of pairs of pads are provided at positions corresponding to the contact portions of the plurality of terminals on the contact detection surface, and the pads of the pair are electrically connected via corresponding ones of the terminals. 2. The terminal coplanarity measuring method according to claim 1, wherein a contact with the contact detection surface of the terminal is detected by detecting the contact. 3. The contact detection unit is moved from a position where all of the plurality of terminals are not in contact with the contact detection surface to a position where all of the plurality of terminals are in contact with the contact detection surface. The method for measuring coplanarity of a terminal according to claim 1, wherein a position of the contact detection unit when the terminal is in contact with the terminal contact surface is measured. 4. The contact detection unit according to claim 1, wherein all of the plurality of terminals contact the contact detection surface from a position where all of the plurality of terminals are pressed against the contact detection surface and are deflected within an elastic limit range. The method for measuring coplanarity of a terminal according to claim 1 or 2, wherein the position of the contact detection unit when the terminal comes into contact with the terminal contact surface is measured by moving the terminal to a non-contact position. 5. The terminal according to claim 1, wherein a position of the terminal in a direction perpendicular to the terminal contact surface is calculated from a position of the contact detection unit when the terminal contacts the terminal contact surface. The method for measuring coplanarity of a terminal described in any of the above. 6. A position of the contact detection unit when any one of the terminals contacts the contact detection surface and a position of the contact detection unit when all of the terminals contact the contact detection surface. The distance between the contact portions of the lowermost terminal in the direction perpendicular to the terminal contact surface and the contact portion of the uppermost terminal in a direction perpendicular to the terminal contact surface is calculated. Item 6. The method for measuring coplanarity of a terminal according to any one of Items 5 to 5. 7. Variations in positions of the contact detection surface corresponding to contact portions of the terminals or positions of the pads in a direction perpendicular to the terminal contact surfaces are determined in advance, and the terminals are connected to the terminal contact surfaces. From the value obtained by correcting the position of the contact detection unit at the time of contact with the variation, the position of the terminal contacting the terminal contact surface or the contact portion of the terminal at the bottom in the direction perpendicular to the terminal contact surface and the top. 8. The method for measuring the coplanarity of a terminal according to claim 5, wherein a distance between the terminal and a contact portion of the terminal is calculated. 8. A terminal contact surface, comprising: a pedestal for holding an object to be inspected provided with a plurality of terminals such that contact portions are located on the terminal contact surface; and a contact detection surface parallel to the terminal contact surface. A contact detection unit that moves in a direction perpendicular to the terminal; a plurality of pairs of pads provided on the contact detection surface in pairs corresponding to contact portions of the terminals; and a terminal contact surface of the contact detection unit. And a distance detection unit for measuring a position in a direction perpendicular to the terminal, and detecting contact of the corresponding terminal with the contact detection surface by conduction of the pair of pads.