JP2953985B2 - Sandblasting device and method for manufacturing gas discharge type display device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sand blasting apparatus for selectively removing a surface material formed on a substrate by injecting abrasive sand powder such as glass beads using high-pressure air onto the surface material. In particular, the present invention relates to a sandblasting device capable of rapidly and finely processing a partition for forming a discharge cell of a gas discharge type display device and a method of manufacturing the gas discharge type display device.

[0002]

2. Description of the Related Art In recent years, a gas discharge type display device (plasma display panel, hereinafter referred to as PDP) has been used as a flat type display device for information terminals such as portable computers, and has a clear display and a liquid crystal panel. The field of application is expanding due to the wide viewing angle.

Further, as television receivers have become larger, projection-type televisions using a projection cathode ray tube or a liquid crystal panel have been commercialized in response to the increase in size. However, there remain problems in screen brightness and device size. I have.

[0004] On the other hand, PDP has recently been remarkably advanced in its color technology, and is now in the limelight as a display device capable of greatly reducing the depth in place of a cathode ray tube, and is attracting attention as the rightmost wing of a "wall-mounted television" for high definition television. It is expected that faithful color reproduction and improvement in brightness and life will be achieved.

Next, a DC type PD of a general memory drive system
An example of P will be described with reference to FIG. As shown in FIG. 4, a conventional direct current type PDP has a partition wall in which a group of cathode wires 2 formed on a front plate 1 made of transparent glass or the like and a group of anode buses 4a formed on a back plate 3 are orthogonal to each other. 5, a large number of discharge cells 6 are formed in a matrix at the intersection. The periphery of the combined front plate 1 and back plate 3 is sealed with a low melting point glass or the like, and a discharge gas mainly composed of a rare gas is sealed inside.

A display electrode body 7 is provided on the anode 4b on the back plate side of each discharge cell 6, and a resistor 8
Connected to the anode bus 4a by the
And a cathode wire 2 constitute a pair of discharge electrodes.
Therefore, the cathode line 2 becomes the cathode of the discharge electrode in the discharge cell 6, and the display electrode body 7 becomes the anode. The phosphor 9 is applied on the back plate 3 except for the display electrode body 7.

The portion of the front panel 1 other than the cathode ray 2 is transparent, and the surface of the phosphor 9 can be directly observed through the discharge cells 6. An interlayer insulating layer 10 is provided between the phosphor 9 and the back plate 3 on which the anode bus 4a, the anode electrode 4b, and the resistor 8 are formed, so that the plasma in the discharge cell 6 and the anode bus 4 a and the resistor 8 is prevented from being discharged.

[0008] Cathode wire 2, anode bus 4a, anode electrode 4
b, the display electrode body 7, the resistor 8, the interlayer insulating layer 10, the phosphor 9 and the partition 5 are formed on the front plate 1 or the back plate 3 made of a glass plate or the like by using a thick film printing technique.
It can be manufactured at very low cost.

In the above-mentioned structure, in order to increase the pixel density and reproduce a high-definition image like the above-mentioned high-definition television image, it is necessary to form a partition wall for forming a discharge cell constituting each pixel in an extremely fine manner. There is a height 160 ~
Fine partition walls having a shape and dimensions of 200 μm and a width of 50 to 60 μm must be formed. In particular, in order to display a color image, one dot must be composed of three discharge cells of R, G, and B. Therefore, if a high-definition display image is to be obtained, it is formed with extremely fine and high precision. Separated partitions are required.

Next, a method for manufacturing a conventional sandblasting device and a gas discharge type display device will be described with reference to the drawings. 5A to 5E show steps in a conventional manufacturing method, and FIG. 6 is a schematic view showing a sandblasting step. FIG. 5 shows a simplified process of forming the partition wall portion of the gas discharge display device.
The description of the components not related to the formation of the partition walls is omitted.

First, a rib paste 12 for forming a partition is applied by a knife coating method on a glass substrate serving as the back plate 3 provided with the anode electrode 4b by a knife coating method, and after drying and solidifying, the photosensitive film 13 is coated. Spread over (b). Next, the photosensitive film 13 is irradiated with ultraviolet rays through an exposure mask in which a partition pattern is formed,
The exposed portion is developed and removed to form a mask pattern 14 (c).

Next, as shown in FIG.
The sand blasting device provided with the abrasive 5 is used to blow abrasive sand made of glass beads or the like onto the rib paste 12 to cut the portion except for the portion where the mask pattern 14 is provided, whereby the partition 5 is formed on the back plate 3. (E). During the above process, the sand blasting device reciprocates the upper part of the rib paste 12 provided on the back plate 3 moving in one direction in a direction perpendicular to the moving direction of the back plate 3 as shown in FIG. Abrasive sand such as glass beads is sprayed from the nozzle of the spray gun 15 to cut and remove the rib paste 12 where the mask pattern 14 is not provided.

[0013]

However, the conventional P
As described above, when the rib paste 12 serving as a partition is once applied to the entire surface of the substrate as described above, unnecessary portions are removed by sandblasting, and when the partition is formed, the rib paste 12 is formed as shown in FIG. 5 or FIG. Is generally performed by a sandblasting apparatus having one injection gun 15. Next, FIG. 7 shows the influence of the injection pressure and the injection distance of the abrasive sand in sandblasting by one injection gun 15, that is, the distance between the rib paste 12 and the injection gun, on the cutting speed of the rib paste or the side etch amount of the partition wall. As is apparent from FIG. 7, the cutting rate is increased by increasing the injection pressure, but at the same time, the side etch amount of the partition wall is further increased more than the increase of the cutting rate. Therefore, if the relative value of the injection pressure is reduced to 3 or less where the side etching is small and the injection distance is shortened in order to increase the reduced cutting rate, the amount of side etching also increases as shown in FIG. As shown in (a), the partition, which should have a rectangular cross section, becomes an inverted drum-shaped partition having a concave curved surface as shown in (b), and the accuracy and strength of the partition deteriorate. There was a problem that.

SUMMARY OF THE INVENTION The present invention solves the above-mentioned conventional problems, and provides a sand blast device and a gas discharge capable of forming a partition structure required for forming a discharge cell suitable for displaying a high-definition color image. It is an object of the present invention to provide a method for manufacturing a type display device.

[0015]

In order to achieve the above object, a sand blasting apparatus of the present invention uses a high-pressure air to remove abrasive material from a surface material on a substrate other than a selectively required portion through a mask pattern or the like. In the sand blasting device for removing by spraying, the cutting speed of the surface
And a plurality of adjustable injection guns. The Ru der having a cutting speed that the plurality of spray gun is different. The cutting speed of each injection gun is
It is set by adjusting the ejection pressure of the ejection gun, the nozzle diameter , the distance between the nozzle tip and the surface material on the substrate , or the particle size of the abrasive sand ejected from the ejection gun .

Furthermore manufacturing <br/> method of gas discharge type display device of the present invention includes the steps of forming a partition wall layer made of a septum wall on the substrate,
A step of forming a sandblast-resistant mask pattern on the partition layer, and using a sandblasting device having a plurality of spray guns, cutting the partition layer at a portion where the mask pattern is not formed, thereby forming a partition wall. And forming the partition,
The cutting speed of the plurality of spray guns with respect to the partition layer is
The partition layer is cut by adjusting each of them.

[0017]

According to the present invention, therefore, a plurality of injection guns are provided in a sandblasting device for forming a partition wall, and the plurality of injection guns have an adjustable cutting speed, nozzle diameter, injection distance, and the like. By arbitrarily and finely adjusting these cutting conditions to an optimum state, the amount of side etching can be suppressed to a minimum, and a partition wall capable of forming an ultra-fine discharge cell with excellent dimensional accuracy can be reduced in throughput of the apparatus. It can be made without.

[0018]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A sand blasting apparatus according to one embodiment of the present invention will be described below with reference to the drawings. The difference of the present invention from the conventional one lies in the structure of the sandblasting device.
The same parts as those in the related art in the drawings are denoted by the same reference numerals and described.

FIG. 1 schematically shows a sandblasting apparatus according to one embodiment of the present invention, and FIG. 2 shows a sandblasting step in a method of manufacturing a PDP according to one embodiment of the present invention. As shown in FIG. 1, this embodiment has four spray guns, and the sand blasting device is a rib paste 1 provided on a back plate 3 which moves in one direction.
2 while reciprocating in the direction perpendicular to the direction of movement of the back plate, the respective injection guns 16a, 16b, 16
Polishing sand such as glass beads is sprayed from the nozzles c and 16d to cut and remove the rib paste 12 where the mask pattern 14 is not provided. The cutting state at this time is shown in FIG. FIG. 2 shows a state in which the sandblasting step in FIG. 5 (d) illustrating a conventional method of manufacturing a PDP is performed using the sandblasting apparatus of the present embodiment. The rib paste 12 below the guns 16a, 16b, 16c, 16d is cut under different cutting conditions. FIG. 2 shows a state in which a plurality of injection guns perform cutting by setting different injection distances, respectively.
At the same time, the injection pressure, the diameter of the injection gun, the particle size of the abrasive sand, etc. are adjusted to adjust the respective injection guns, ie, 16a, 16a.
It is also possible to adjust the cutting speed of the rib paste 12 by b, 16c, 16d.

Next, a case where the injection conditions of a plurality of injection guns are changed will be described. First Example The injection pressure of each injection gun is shown as a relative value when the nozzle diameter of the injection gun is fixed at 9 mm and the average particle size of the polishing sand is 20 μm.

Injection gun 16a: 4.0 Injection gun 16b: 2.5 Injection gun 16c: 1.0 Injection gun 16d: 0.5 Second Embodiment Injection pressure constant (2 kg / cm ² ), average of abrasive sand Nozzle diameter of each injection gun when the particle size is 20 μm Injection gun 16a: 6 mm Injection gun 16b: 9 mm Injection gun 16c: 12 mm Injection gun 16d: 15 mm Third embodiment Injection pressure constant (2 kg / cm ² ), polishing Injection distance when the average particle diameter of sand is 20 μm and nozzle diameter is 9 mm Injection gun 16a: 50mm Injection gun 16b: 100mm Injection gun 16c: 150mm Injection gun 16d: 200mm Fourth embodiment Injection pressure constant (2 kg / cm ²⁾ ), Nozzle diameter 9mm,
Average particle size of abrasive sand when the injection distance is 100 mm Injection gun 16a: 15 μm Injection gun 16b: 35 μm Injection gun 16c: 60 μm Injection gun 16d: 100 μm Note that the particle size of the abrasive sand is provided with a mask pattern for forming partition walls. No effect is observed on the cutting speed of the rib paste 12 in the portion where the rib paste 12 is not formed, but in the portion surrounded by the mask pattern, the cutting speed of the rib paste 12 is generally higher when the particle size is smaller.

In each of the above embodiments, an experiment was conducted on the case where the opening size of the discharge cell of the gas discharge type display device was 550 μm × 450 μm and the height of the partition wall was 200 μm. FIG. 3 shows the present invention. 2 shows the throughput of the gas discharge type display device and the side-etched state of the partition wall obtained in the comparison with the conventional example. As is apparent from the figure, the partition of the gas discharge type display device obtained by the present invention is not affected by the throughput, whereas the side etch amount of the partition is increased when trying to increase the throughput of the device in the conventional manufacturing method. The dimensional accuracy is extremely high, and even if the throughput of the device is increased, the amount of side etching of the partition can be suppressed to an extremely small amount, which can contribute to the improvement of the mass productivity of the gas discharge type display device.

Although the above embodiment has been described with respect to an example in which four injection guns are used, it is also possible to use two to ten injection guns. It can be changed depending on the size of the gas discharge type display device to be used, the purpose of use, the shape of the discharge cell, and the like.

[0024]

According to the present invention, a plurality of spray guns are provided in a sandblasting apparatus for removing abrasive material by blowing high-pressure air to surface materials on a substrate other than those required selectively through a mask pattern or the like. By setting conditions such as injection pressure, injection distance, nozzle diameter of injection gun or particle size of abrasive sand, partition walls with extremely ultra-fine and accurate dimensions and shapes can be side-etched without lowering the throughput of manufacturing equipment. And can be easily formed without causing the problem, and is extremely effective in manufacturing a gas discharge type display device suitable for reproducing a high-definition television image.

[Brief description of the drawings]

FIG. 1 is a schematic explanatory view of a sandblasting apparatus according to one embodiment of the present invention.

FIG. 2 is a gas discharge type display device according to an embodiment of the present invention.
Sectional view showing sand blasting process showing manufacturing method

FIG. 3 is a characteristic diagram showing the relationship between the throughput of the apparatus and the side etch amount of the partition wall in the embodiment and the conventional example.

FIG. 4 is a partial cross-sectional view of a general gas discharge type display device.

FIG. 5 is a process sectional view showing a method for manufacturing a conventional gas discharge display device.

FIG. 6 is a schematic explanatory view of a conventional sandblasting device.

FIG. 7 is a characteristic diagram showing a relationship between an injection pressure, a cutting rate, and a side etch amount.

FIG. 8 is a characteristic diagram showing a relationship between an injection distance, a cutting rate, and a side etch amount.

FIG. 9 is a cross-sectional view showing a normal state and a side-etched state of the partition wall.

[Explanation of symbols]

 3 Back plate 12 Rib paste 14 Mask pattern 16 Multiple injection guns

────────────────────────────────────────────────── ─── Continuation of the front page (56) References JP-A-6-126623 (JP, A) JP-A-5-128966 (JP, A) JP-A-7-45190 (JP, A) JP-A-4- 58438 (JP, A) JP-A-6-210567 (JP, A) JP-A-4-123744 (JP, A) JP-A-7-205027 (JP, A) JP-A-60-76961 (JP, A) JP-A-6-55446 (JP, A) (58) Fields investigated (Int. Cl. ⁶ , DB name) B24C 5/02 B24C 1/04 B24C 3/32 H01J 9/02

Claims (9)

(57) [Claims] 1. In a sandblasting apparatus for removing a surface material on a substrate other than a portion selectively required through a mask pattern or the like by blowing abrasive sand with high-pressure air, a cutting speed of the surface material can be adjusted. sandblast device having a plurality of spray gun such. 2. It is selectively required through a mask pattern or the like.
Surface material on the substrate other than the part
Sandblasting equipment that removes sand by blowing sand
And a plurality of injection guns having different cutting speeds . 3. Changing the injection pressure of the injection gun.
The sandblasting device according to claim 1 , wherein the cutting speed of the injection gun is set . 4. The method of claim 1, wherein the nozzle diameter of the injection gun is changed.
2. The cutting speed of the spray gun is set by the following method.
Or the sandblasting device according to 2 . 5. A nozzle tip before Ki噴 morphism cancer by varying the distance between the surface material of the substrate, wherein the injection gas
The sand blasting device according to claim 1 or 2 , wherein a cutting speed of the blade is set . 6. The particle size of abrasive sand sprayed from said spray gun.
The cutting speed of the injection gun by changing
The sand blasting device according to claim 1 or 2, wherein Forming a 7. partition layer comprising a septum wall on a substrate, forming a sandblast resistance of the mask pattern on the partition wall layer using a sandblast apparatus having a plurality of spray gun Forming a partition by cutting a portion of the partition layer where the mask pattern is not formed , and forming the partition in the step of forming the partition.
Cutting speed of the plurality of injection guns with respect to the partition layer.
A method for manufacturing a gas discharge type display device in which the partition wall layer is cut by adjusting the degree of each . Forming a partition wall layer 8. A substrate becomes septum wall, forming a sandblast resistance of the mask pattern on said partition wall layer, the cutting speed with respect to the partition wall layer
There using sandblasting apparatus having a plurality of spray gun respectively different, pre SL Pneumatic fluid discharge display device that includes a step of forming the partition wall by cutting the partition wall layer portion is not formed in the mask pattern Manufacturing method. 9. A process for forming a partition wall layer made of a septum wall on a substrate, forming a sandblast resistance of the mask pattern on said partition wall layer, the cutting speed with respect to the partition wall layer
Forming a partition by cutting the partition layer at a portion where the mask pattern is not formed, using a sand blasting apparatus having a plurality of different spray guns, and forming the partition. , Place
The above partition wall layer is sprayed by a spray gun set at a constant cutting speed.
After cutting, the cutting speed smaller than the predetermined cutting speed
The partition layer is further cut by another spray gun set to
Manufacturing method of a gas discharge type display device to be cut .