JP2951447B2 - Method for producing composite sintered body of boron nitride and silicon nitride - Google Patents

Method for producing composite sintered body of boron nitride and silicon nitride

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Publication number
JP2951447B2
JP2951447B2 JP3255913A JP25591391A JP2951447B2 JP 2951447 B2 JP2951447 B2 JP 2951447B2 JP 3255913 A JP3255913 A JP 3255913A JP 25591391 A JP25591391 A JP 25591391A JP 2951447 B2 JP2951447 B2 JP 2951447B2
Authority
JP
Japan
Prior art keywords
boron nitride
sintered body
silicon nitride
composite sintered
slurry
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP3255913A
Other languages
Japanese (ja)
Other versions
JPH0570234A (en
Inventor
正人 西川
康隆 渡島
保男 今村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denka Co Ltd
Original Assignee
Denki Kagaku Kogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denki Kagaku Kogyo KK filed Critical Denki Kagaku Kogyo KK
Priority to JP3255913A priority Critical patent/JP2951447B2/en
Publication of JPH0570234A publication Critical patent/JPH0570234A/en
Application granted granted Critical
Publication of JP2951447B2 publication Critical patent/JP2951447B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は、六方晶窒化ホウ素と窒
化ケイ素の複合焼結体の製造方法に関する。
The present invention relates to a method for producing a composite sintered body of hexagonal boron nitride and silicon nitride.

【0002】[0002]

【従来の技術】窒化ホウ素と窒化ケイ素の複合焼結体
は、窒化ホウ素の優れた耐食性、耐熱衝撃性、機械加工
性と窒化ケイ素の優れた機械的特性、耐摩耗性を兼ね備
えた材料として注目されている。
2. Description of the Related Art A composite sintered body of boron nitride and silicon nitride is attracting attention as a material having both the excellent corrosion resistance, thermal shock resistance, machinability, and the excellent mechanical properties and wear resistance of silicon nitride. Have been.

【0003】窒化ホウ素と窒化ケイ素の複合材は難焼結
体であるため、1600℃〜1800℃の温度で圧力を
かけるホットプレス法(特開昭61−77323号公
報)、焼結助剤を用いる常圧焼結法、金属ケイ素を出発
原料とする反応焼結法が知られているが、成形がホット
プレスあるいはCIPによるため複雑形状品が得られず
後加工が必要であった。そこで、後加工がほとんどいら
ない大型複雑形状品の成形法の開発が望まれていた。
[0003] Since the composite material of boron nitride and silicon nitride is a hard-to-sinter material, a hot press method of applying pressure at a temperature of 1600 ° C to 1800 ° C (JP-A-61-77323) and a sintering aid are used. The normal pressure sintering method used and the reaction sintering method using metal silicon as a starting material are known. However, since the molding is performed by hot pressing or CIP, a complicated-shaped product cannot be obtained and post-processing is required. Therefore, there has been a demand for the development of a molding method for a large-sized complicated-shaped product requiring almost no post-processing.

【0004】一般に、セラミックスの大型複雑形状品の
成形法としては、泥漿鋳込み成形法が知られているが、
これを単に窒化ホウ素と窒化ケイ素の複合焼結体の製造
に適用しようとしても、窒化ホウ素粉末の水への分散が
悪いため高密度の焼結体が得られないという問題があっ
た。
[0004] In general, a slurry casting method is known as a method for forming a large-sized complicated-shaped ceramic product.
Even if this is simply applied to the production of a composite sintered body of boron nitride and silicon nitride, there is a problem that a high-density sintered body cannot be obtained due to poor dispersion of boron nitride powder in water.

【0005】[0005]

【発明が解決しようとする課題】本発明は、以上の状況
に鑑みてなされたものであり、窒化ホウ素と窒化ケイ素
の複合粉末の水への分散性を改良し泥漿鋳込み成形法に
よる高密度の複合焼結体を提供することを目的とする。
SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and has been made to improve the dispersibility of a composite powder of boron nitride and silicon nitride in water and to provide a high-density slurry by a slurry casting method. An object is to provide a composite sintered body.

【0006】[0006]

【課題を解決するための手段】すなわち、本発明は、六
方晶窒化ホウ素粉末と窒化ケイ素粉末を含む原料を泥漿
鋳込み成形後常圧又は加圧されたガス雰囲気下で焼結す
るに際し、上記六方晶窒化ホウ素粉末として結晶化度G
I値が5以下であるものを用いることを特徴とする窒化
ホウ素と窒化ケイ素の複合焼結体の製造方法である。
That is, the present invention relates to a method of sintering a raw material containing a hexagonal boron nitride powder and a silicon nitride powder under a normal pressure or a pressurized gas atmosphere after a slurry casting process. Crystallinity G as polycrystalline boron nitride powder
A method for producing a composite sintered body of boron nitride and silicon nitride, characterized by using a substance having an I value of 5 or less.

【0007】以下、さらに詳しく本発明について説明す
る。
Hereinafter, the present invention will be described in more detail.

【0008】本発明で使用される原料について説明する
と、窒化ホウ素粉末としては、六方晶で結晶化度GI値
が5以下であるものを用いることによって、高濃度かつ
低粘度の泥漿を得ることができる。結晶化度GI値が5
を超えると低濃度泥漿となり焼結体密度が低くなる。こ
れは六方晶窒化ホウ素の結晶化度GI値が5を超えると
水への分散が悪くなり低濃度泥漿になるためである。窒
化ホウ素の粒度としては20μm以下が好ましく、また
純度は95%以上が好ましい。
The raw material used in the present invention will be described. The use of boron nitride powder having a hexagonal crystallinity GI value of 5 or less makes it possible to obtain a high-concentration and low-viscosity slurry. it can. Crystallinity GI value is 5
If it exceeds, the slurry becomes a low-concentration slurry and the density of the sintered body decreases. This is because, when the crystallinity GI value of hexagonal boron nitride exceeds 5, dispersion in water becomes poor, resulting in low-concentration slurry. The particle size of boron nitride is preferably 20 μm or less, and the purity is preferably 95% or more.

【0009】窒化ケイ素粉末は、純度99%以上、平均
粒子4μm以下のものが好ましく、またAl2O3 、Y2O3
Mg2SiO4 等のように水への分散が良好な焼結助剤を使用
することは好ましいことである。
Preferably, the silicon nitride powder has a purity of 99% or more and an average particle size of 4 μm or less, and Al 2 O 3 , Y 2 O 3 ,
It is preferable to use a sintering aid that disperses well in water, such as Mg 2 SiO 4 .

【0010】泥漿のPHは、8.5〜13とするのがよ
く、これによって原料粉末の水への分散が良好となり高
濃度の泥漿が得られやすくなる。この理由は、窒化ケイ
素粒子が泥漿のPH8.5未満及びPH13を超えると
水への分散性が悪くなるためである。泥漿PHの調整方
法としては、K、Na、Ca等の塩基性化合物の水溶液
を添加して行うが、PH調整剤が焼結後金属不純物とな
りそれが焼結体の物性に悪影響を与える恐れが懸念され
る場合には、アンモニア水を用いるのが望ましい。
The pH of the slurry is preferably 8.5 to 13, so that the raw material powder can be well dispersed in water and a high-concentration slurry can be easily obtained. The reason for this is that if the silicon nitride particles have a pH of less than pH 8.5 and a pH of more than 13, the dispersibility in water becomes poor. The method of adjusting the slurry pH is performed by adding an aqueous solution of a basic compound such as K, Na, or Ca. However, the pH adjuster may become a metal impurity after sintering, which may have an adverse effect on the physical properties of the sintered body. If there is a concern, it is desirable to use aqueous ammonia.

【0011】泥漿の配合の一例を示せば、重量基準で、
窒化ホウ素粉末10〜50部、窒化ケイ素粉末35〜9
0部、焼結助剤0〜15部、水45〜90部である。
An example of the composition of the slurry is as follows.
Boron nitride powder 10 to 50 parts, silicon nitride powder 35 to 9
0 parts, sintering aid 0 to 15 parts, water 45 to 90 parts.

【0012】鋳込み成形用型としては、石膏型、樹脂型
等の吸水性のあるものであれば特に限定するものでな
い。鋳込み方法についても排泥鋳込み、固形鋳込み、加
圧鋳込み、Vプロセスによる鋳込み等とくに限定される
ものではない。
The casting mold is not particularly limited as long as it has a water absorbing property, such as a gypsum mold or a resin mold. The casting method is not particularly limited, but is also limited to sludge casting, solid casting, pressure casting, casting by the V process, and the like.

【0013】焼結は、1600〜1900℃の非酸化雰
囲気で行う。非酸化雰囲気としてはHe、Ar、N2
の不活性雰囲気又は真空中であるが、望ましくは、窒化
ホウ素と窒化ケイ素の分解抑制効果のあるN2 雰囲気が
望ましい。
The sintering is performed in a non-oxidizing atmosphere at 1600 to 1900 ° C. The non-oxidizing atmosphere is an inert atmosphere such as He, Ar, or N 2 or a vacuum, and preferably an N 2 atmosphere having an effect of suppressing the decomposition of boron nitride and silicon nitride.

【0014】なお、本発明における結晶化度GI値と
は、X線回折において次式に示すように102回折線の
面積〔Area(102)〕と、100回折線と101
回折線を加えた面積〔Area(100+101)〕の
比で表されGI値が低いほど結晶化が進んでいる。 GI= Area(100+101)/Area(102)
The crystallinity GI value in the present invention is defined as the area [Area (102)] of the 102 diffraction lines, the 100 diffraction lines and the 101
It is expressed by the ratio of the area [Area (100 + 101)] to which the diffraction line is added, and the lower the GI value, the more the crystallization proceeds. GI = Area (100 + 101) / Area (102)

【0015】[0015]

【実施例】以下、実施例と比較例をあげてさらに具体的
に本発明を説明する。
The present invention will be described below more specifically with reference to examples and comparative examples.

【0016】実施例1 重量割合で、窒化ホウ素粉末(六方晶、純度99%、結
晶化度GI値0.9、比表面積3m2 /g)30部、窒
化ケイ素粉末(純度99%、平均粒子1.2μm)60
部、焼結助剤(Mg2SiO4 )10部、水68部、PH調整
剤(試薬1級NH4OH )4部、マレイン酸部分エステル系
分散剤(共栄社油脂製 KD270N)1部、及びポリ
エーテル系消泡剤0.05部をボ−ルミルにて3時間混
合して泥漿を調整した。この泥漿を脱泡後石膏型に注い
で6×6×100mmの成形体となし、乾燥後、窒素雰
囲気下、温度1750℃で12時間保持して複合焼結体
を製造した。
Example 1 30 parts by weight of boron nitride powder (hexagonal, purity 99%, crystallinity GI value 0.9, specific surface area 3 m 2 / g), silicon nitride powder (purity 99%, average particle size) 1.2 μm) 60
Parts, sintering aid (Mg 2 SiO 4 ) 10 parts, water 68 parts, PH adjuster (reagent first grade NH 4 OH) 4 parts, maleic acid partial ester-based dispersant (Kyoeisha Yushi Yushi KD270N) 1 part, and A slurry was prepared by mixing 0.05 part of a polyether-based antifoaming agent in a ball mill for 3 hours. The slurry was defoamed and poured into a gypsum mold to form a molded body of 6 × 6 × 100 mm. After drying, the composite was kept at 1750 ° C. for 12 hours in a nitrogen atmosphere to produce a composite sintered body.

【0017】得られた複合焼結体を研削し3×4×40
mmの試片を作製した後、アルキメデス法によるかさ比
重、JIS R1601による常温曲げ強さ、及び温度
1550℃の溶鋼に10分間浸漬させた場合における溶
鋼に対する溶損性を測定した。それらの結果を表1に示
す。
The obtained composite sintered body is ground and 3 × 4 × 40
After preparing a test piece of mm, the bulk specific gravity according to the Archimedes method, the room-temperature bending strength according to JIS R1601, and the erosion resistance to the molten steel when immersed in molten steel at a temperature of 1550 ° C. for 10 minutes were measured. Table 1 shows the results.

【0018】実施例2〜6 比較例1〜3 原料粉末の配合割合、窒化ホウ素の結晶化度と比表面積
を表1に示すようにしたこと以外は実施例1と同様にし
て複合焼結体を製造した。それらの結果を表1に示す。
Examples 2 to 6 Comparative Examples 1 to 3 A composite sintered body was prepared in the same manner as in Example 1 except that the mixing ratio of the raw material powder, the crystallinity of boron nitride and the specific surface area were as shown in Table 1. Was manufactured. Table 1 shows the results.

【0019】[0019]

【表1】 [Table 1]

【0020】[0020]

【発明の効果】本発明によれば、窒化ホウ素と窒化ケイ
素の複合粉末の泥漿鋳込み成形が可能となり、高品質、
低コストの常圧又は加圧されたガス雰囲気下での焼結に
よる大型複雑形状品を製造することが可能となる。本発
明によって得られた複合焼結体は、高密度かつ高強度で
あり、しかも溶鋼に対し極めて溶損しにくいという特長
がある。
According to the present invention, it is possible to perform a slurry casting of a composite powder of boron nitride and silicon nitride, and to obtain high quality,
It is possible to manufacture a large-sized complex-shaped product by sintering under a low-cost normal pressure or pressurized gas atmosphere. The composite sintered body obtained according to the present invention has a feature that it has a high density and a high strength and is extremely hard to be melted by molten steel.

───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.6,DB名) C04B 35/584 ──────────────────────────────────────────────────続 き Continued on front page (58) Field surveyed (Int.Cl. 6 , DB name) C04B 35/584

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 六方晶窒化ホウ素粉末と窒化ケイ素粉末
を含む原料を泥漿鋳込み成形後常圧又は加圧されたガス
雰囲気下で焼結するに際し、上記六方晶窒化ホウ素粉末
として結晶化度GI値が5以下であるものを用いること
を特徴とする窒化ホウ素と窒化ケイ素の複合焼結体の製
造方法。
When a raw material containing a hexagonal boron nitride powder and a silicon nitride powder is subjected to slurry casting and then sintered under normal pressure or a pressurized gas atmosphere, the crystallinity GI value of the hexagonal boron nitride powder is increased. The method for producing a composite sintered body of boron nitride and silicon nitride, wherein the composite sintered body has a particle size of 5 or less.
JP3255913A 1991-09-09 1991-09-09 Method for producing composite sintered body of boron nitride and silicon nitride Expired - Fee Related JP2951447B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3255913A JP2951447B2 (en) 1991-09-09 1991-09-09 Method for producing composite sintered body of boron nitride and silicon nitride

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3255913A JP2951447B2 (en) 1991-09-09 1991-09-09 Method for producing composite sintered body of boron nitride and silicon nitride

Publications (2)

Publication Number Publication Date
JPH0570234A JPH0570234A (en) 1993-03-23
JP2951447B2 true JP2951447B2 (en) 1999-09-20

Family

ID=17285313

Family Applications (1)

Application Number Title Priority Date Filing Date
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Country Status (1)

Country Link
JP (1) JP2951447B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4484665B2 (en) * 2004-10-27 2010-06-16 電気化学工業株式会社 Method for manufacturing member for group 3-5 compound semiconductor manufacturing apparatus

Also Published As

Publication number Publication date
JPH0570234A (en) 1993-03-23

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