JP2949850B2 - Air volume adjustment device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an air volume adjusting device, and more particularly to an air volume adjusting device which is inserted into a ventilation path from a push-in fan to a suction fan to adjust the amount of outside air taken in and thereby keep the air flow to the suction fan constant. Regarding the structure.

Such a device is required when the amount of air blown from a pushing fan fluctuates and the amount of discharge from a suction fan must be constant. For example, this corresponds to a case where a large amount of organic exhaust gas generated in a semiconductor device manufacturing process is blown to an exhaust treatment device. That is, the amount of air blown from the pushing fan fluctuates depending on the degree of operation of the semiconductor device manufacturing equipment requiring exhaust air, etc. On the other hand, in this organic exhaust treatment device (particularly, activated carbon fluidized bed adsorption device), the amount of air blown from the suction fan is reduced. If there is excess or deficiency, normal processing cannot be performed. Therefore, in such a case, it is necessary to absorb fluctuations in the amount of exhaust air in the air passage from the pushing fan to the suction fan.

[0003]

2. Description of the Related Art An example of a conventional apparatus will be described with reference to FIG. FIG. 2 is a schematic configuration diagram showing an example of a conventional apparatus, in which 1 is a push-in fan, 2 is a suction fan, 21
Is an air duct, 22 is a branch of an air duct, 23 is a slide damper, 24 is a sensor, 25 is a check damper, and M is equipment that requires a constant air volume.

In this apparatus, an appropriate amount of outside air is replenished from an opening of a branch 22 of an air duct provided in the middle of an air duct 21 to stabilize the amount of air blown to the inlet of the suction fan 2. The air volume is measured by a sensor 25 provided in the
The structure is such that the amount of outside air sucked in is increased or decreased by changing the opening degree of the opening. The check damper 25 is an air duct
This is for releasing air when the pressure inside the chamber 21 becomes abnormally high, and is normally closed.

[0005]

However, in such a conventional apparatus, the structure such as the need for a sensor and power wiring becomes complicated, and the opening degree of the slide damper 24 with respect to the variation in the amount of air blown from the pushing fan 1 is increased. There has been a problem that a time lag may occur in the change and the fluctuation of the air flow may not be fully absorbed.

An object of the present invention is to solve such a problem and to provide an air volume adjusting device having a simple structure and capable of absorbing air volume fluctuation without delay.

[0007]

According to the present invention, there is provided a cylindrical body 11 having both ends of an air inlet 11a and an air outlet 11b, and having an outside air inlet 12 on a side surface thereof. A blade 13 provided with a fin 14 that is rotatably mounted near the air inlet 11a from the outside air inlet 12 to change the opening of the outside air inlet 12 by rotation and receives a blast pressure on the surface. This is achieved by the characteristic air volume adjusting device.

[0008]

The opening degree of the outside air suction port is changed by the blades that rotate in response to the amount of air to be blown, so that there is no need to install a special sensor or power wiring, and the structure is simplified. Furthermore, by providing the fins on the blades, the resistance to the wind pressure of the blades increases, and even for a slight change in the blowing amount, the rotation angle of the blades,
That is, the opening degree of the outside air suction port can be changed, and no time lag occurs. Therefore, an appropriate amount of outside air can be sucked in and the amount of air blown to the suction fan can be made constant.

[0009]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described with reference to FIG. FIG. 1 is a schematic diagram showing an embodiment of the present invention,
(A) is a cross-sectional view showing the entire configuration, and (B) is a perspective view showing a blade. In the figure, 1 is a push-in fan, 2 is a suction fan, 3 is an air duct, 11 is a cylinder, 12 is an outside air inlet,
13 is a blade, 14 is a fin, 15 is an air vent, 16 is a check damper, and M is equipment that requires a constant air volume.

[0010] Both ends of the cylindrical body 11 have a ventilation inlet 11a and a ventilation outlet.
11b, and the air duct 3 is connected to each. An outside air suction port 12 is opened on the upper surface of the cylindrical body 11.
Further, a ventilation escape port 15 is opened on the lower surface of the cylindrical body 11,
It is normally closed by the check damper 16 and opens only when the pressure inside the air duct 3 becomes abnormally high.

The blade 13 is rotatably attached to the air inlet 11a from the outside air inlet 12 of the cylindrical body 11, and a fin 14 is fixed to the lower surface thereof in parallel with the axis of rotation.
The blade 13 has a tip portion provided on the lower inner surface of the cylindrical body 11 when no air is blown from the pushing fan 1.
The interior of the cylindrical body 11 is partitioned by contacting with d, and the inlet side and the outlet side are shut off. When the suction fan 2 is operated in this state, only the outside air is directed to the suction fan 2. Also, if air is blown from the push-in fan 1, the blade 13 receives the wind pressure and its tip rises to communicate between the inlet side and the outlet side. The outer air suction port 12 is configured to be in contact with a blade stopper 11c provided on the upper inner surface of the cylindrical body 11.

The rotation sensitivity of the blade 13 to the amount of air blow is
It is adjusted by the balance between the wind pressure resistance (total area, mounting angle, etc.) of 14 and the total weight of the blade 13. The inventor of the present invention used this apparatus by inserting a large amount of organic exhaust gas generated in a semiconductor device manufacturing process into an air passage for blowing an activated carbon fluidized bed adsorption type exhaust processing apparatus.

In the semiconductor device manufacturing process, a cleaning device or the like using an organic solvent is used. A trace amount of the organic solvent component contained in the exhaust gas is treated by the exhaust treatment device. For that purpose, the exhaust gas is blown to the exhaust treatment device by the pushing fan 1, and the amount of the blown air varies depending on the operation degree of the semiconductor device manufacturing equipment. On the other hand, this exhaust treatment device
A small amount of organic solvent components and the like in the exhaust gas are adsorbed on the spherical activated carbon when the exhaust gas passes through the continuously moving spherical activated carbon layer, and the air volume of the exhaust gas introduced into the activated carbon layer is more or less than a predetermined value. If not, normal adsorption is not performed. Therefore, the blower attached to this exhaust treatment device (the above-described suction fan 2)
At the inlet of (equivalent), the exhaust air must be adjusted to a predetermined air volume.

Therefore, the maximum value of the amount of air blown from the pushing fan 1 is configured to be equal to or less than the processing capacity of the exhaust processing device (that is, the optimal amount of introduced air), and an appropriate amount of outside air is replenished from the air volume adjusting device of the present invention. As a result, the amount of air blown to the inlet of the suction fan 2 is made constant. As a result, this exhaust treatment device could be operated stably.

[0015]

As described above, according to the present invention,
An air volume adjusting device having a simple structure and capable of absorbing air volume fluctuation without delay can be provided.

[Brief description of the drawings]

FIGS. 1A and 1B are schematic views showing an embodiment of the present invention, in which FIG. 1A is a cross-sectional view showing an overall configuration, and FIG. 1B is a perspective view showing a blade.

FIG. 2 is a schematic configuration diagram illustrating an example of a conventional device.

[Explanation of symbols]

 1 Push-in fan 2 Suction fan 3 Air duct 11 Cylindrical body 11a Ventilation inlet 11b Ventilation outlet 12 Outside air intake 13 Blade 14 Fin

Claims (1)

(57) [Claims] 1. A suction fan (2) from a pushing fan (1).
A device for keeping the amount of air blown to the suction fan (2) constant by inserting it into the air passage leading to the air blower (2), the air inlet (11a) and the air outlet (11b) at both ends, and the outside air inlet (12 ) And a tubular body (11), which is rotatably mounted near the air inlet (11a) from the outside air inlet (12) of the tubular body (11), and is rotatably attached to the outside air inlet (12). And a blade (13) having a fin (14) on its surface for receiving a blowing air pressure.