JP2932750B2 - Piezoelectric element for pulse droplet deposition device - Google Patents
Piezoelectric element for pulse droplet deposition deviceInfo
- Publication number
- JP2932750B2 JP2932750B2 JP3118529A JP11852991A JP2932750B2 JP 2932750 B2 JP2932750 B2 JP 2932750B2 JP 3118529 A JP3118529 A JP 3118529A JP 11852991 A JP11852991 A JP 11852991A JP 2932750 B2 JP2932750 B2 JP 2932750B2
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric element
- piezoelectric
- ink
- droplet deposition
- pulse
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000008021 deposition Effects 0.000 title description 15
- 239000000463 material Substances 0.000 claims description 44
- 230000005684 electric field Effects 0.000 claims description 10
- 238000000034 method Methods 0.000 description 15
- 238000000151 deposition Methods 0.000 description 14
- 229910002113 barium titanate Inorganic materials 0.000 description 10
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 10
- 230000010287 polarization Effects 0.000 description 9
- 239000010408 film Substances 0.000 description 8
- 239000004020 conductor Substances 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 5
- 230000002336 repolarization Effects 0.000 description 5
- 239000000919 ceramic Substances 0.000 description 4
- 229910010293 ceramic material Inorganic materials 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000003618 dip coating Methods 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000003921 oil Substances 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 150000001768 cations Chemical class 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 230000005621 ferroelectricity Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
- B41J2202/01—Embodiments of or processes related to ink-jet heads
- B41J2202/10—Finger type piezoelectric elements
Landscapes
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明は、パルス滴付着装置用圧
電素子に関し、より具体的には圧電材料のせん断変形を
利用したパルス滴インクジェットプリンタヘッド用圧電
素子に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a piezoelectric element for a pulse drop applying apparatus, and more particularly to a piezoelectric element for a pulse drop ink jet printer head utilizing a shear deformation of a piezoelectric material.
【０００２】[0002]
【従来の技術】従来、圧電素子のせん断変形を利用した
パルス滴付着装置の構成及び製造方法について特開昭６
３ー２４７０５１号公報に記載されている。該パルス滴
付着装置及び圧電素子の構成例を図７に示す。このパル
ス滴付着装置は多数のインク噴射孔７１を有する液滴噴
射ノズルプレート７２と、該液滴噴射ノズルプレート７
２が接続された多数のインク溝７３（圧力チャンバー）
と側面７４に駆動用電極が形成された圧電材料からなる
せん断変形圧電素子７５と、インク補充のための給液機
構（図示せず）から構成されている。上記パルス滴付着
装置は駆動電極に電界を印加すると圧電材料がせん断変
形を起こしインク溝７３の容積変化をひきおこす。その
結果としてインク溝７３中の液圧が変化しノズルプレー
トの噴射孔からインクが噴射される。2. Description of the Related Art Heretofore, a configuration and a manufacturing method of a pulse droplet deposition apparatus utilizing shear deformation of a piezoelectric element have been disclosed in Japanese Patent Application Laid-Open No. Sho 6 (1994).
No. 3,247,051. FIG. 7 shows a configuration example of the pulse droplet deposition device and the piezoelectric element. The pulse droplet applying apparatus includes a droplet ejecting nozzle plate 72 having a large number of ink ejecting holes 71,
Numerous ink grooves 73 (pressure chamber) connected to
And a shear deformation piezoelectric element 75 made of a piezoelectric material having a driving electrode formed on the side surface 74 and a liquid supply mechanism (not shown) for replenishing ink. When an electric field is applied to the driving electrode, the piezoelectric material undergoes shear deformation in the pulse droplet deposition device, causing a change in the volume of the ink groove 73 . As a result, the liquid pressure in the ink groove 73 changes, and ink is ejected from the ejection holes of the nozzle plate.
【０００３】従来、上記圧電素子の駆動電極としてはニ
ッケル等の導電性材料が使用されており、圧電素子に形
成された溝の側面にスパッタ法、メッキ法等の技術によ
り形成されていた。Conventionally, a conductive material such as nickel has been used as a drive electrode of the above-mentioned piezoelectric element, and has been formed on a side surface of a groove formed in the piezoelectric element by a technique such as a sputtering method or a plating method.
【０００４】[0004]
【発明が解決しようとする課題】しかしながら、上記で
示した様な圧電材料のせん断変形を利用した圧電素子で
は分極方向と駆動電界方向が直交する構成になってい
る。そのためパルス滴付着装置の組立工程中、熱処理な
どによって圧電素子の分極状態の劣化が起こった場合、
従来の導電性材料を電極に利用した圧電素子では再分極
処理によって分極状態を復帰させることが出来なかっ
た。また従来の導電性材料では多様化するインク成分に
対する耐食性も十分とは言えなかった。更にスパッタ法
やメッキ法で形成された駆動電極膜と圧電材料との接着
強度も満足できるものではなかった。However, the piezoelectric element utilizing the shear deformation of the piezoelectric material as described above has a configuration in which the direction of polarization is perpendicular to the direction of the driving electric field. Therefore, during the assembly process of the pulse droplet deposition device, if the polarization state of the piezoelectric element deteriorates due to heat treatment,
In a conventional piezoelectric element using a conductive material for an electrode, the polarization state cannot be restored by repolarization. Further, conventional conductive materials have not been able to say that the corrosion resistance to diversified ink components is sufficient. Further, the bonding strength between the driving electrode film formed by the sputtering method and the plating method and the piezoelectric material has not been satisfactory.
【０００５】本発明は、上述した問題点を解決するため
になされたものであり、圧電素子の駆動電極としてＰＴ
Ｃサーミスタ材料を用いることで再分極処理可能で、イ
ンクに対する耐食性が高く、圧電素子との接着強度に優
れた駆動電極を有するパルス滴付着装置用圧電素子を提
供することを目的とする。SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and has been developed as a driving electrode for a piezoelectric element.
It is an object of the present invention to provide a piezoelectric element for a pulse droplet deposition apparatus having a drive electrode that can be repolarized by using a C thermistor material, has high corrosion resistance to ink, and has excellent adhesive strength to a piezoelectric element.
【０００６】[0006]
【課題を解決するための手段】この目的を達成するため
に、本発明は、複数の圧電材料の壁間に複数のインク溝
を有し、前記壁の側面に該壁に電界を印加するための駆
動電極が形成され、前記壁が前記電界の印加方向と直交
する方向に分極されているパルス滴付着装置用圧電素子
に於いて、前記駆動電極をＰＴＣサーミスタ材料にて構
成したものである。 SUMMARY OF THE INVENTION To achieve this object, the present invention provides a method for forming a plurality of ink channels between a plurality of piezoelectric material walls.
And a drive for applying an electric field to the side of the wall.
A moving electrode is formed, and the wall is orthogonal to the direction of application of the electric field.
Element for pulse drop deposition device polarized in the direction of rotation
In the above, the driving electrode is made of a PTC thermistor material.
It has been achieved.
【０００７】[0007]
【作用】上記の手段を有する本発明の圧電素子は、圧電
材料の壁の高さ方向（溝の深さ方向）に分極されてい
る。圧電材料の壁の両側面の駆動電極間に電界を印加す
ることにより、電界の印加方向と直交する方向に分極さ
れた圧電材料の壁は高さ方向（厚み方向）の寸法変化を
伴わずにせん断変形する。この際２つの圧電材料の壁で
囲まれたインク溝は容積変化を引き起こす。つまりイン
ク溝をインクの流路及び圧力チャンバーとして作用させ
インク滴の噴射を行うわけである。また、ＰＴＣサーミ
スタ材料にて形成された駆動電極は、ＰＴＣサーミスタ
材料のキュリー温度を境に低温側では導電性、高温側で
は絶縁性を示すと言う性質を持っている。従って通常の
パルス滴付着装置の動作時には駆動電極として動作す
る。再分極の際には分極時の温度条件を、用いたＰＴＣ
サーミスタ材料のキュリー温度以上とすることでＰＴＣ
サーミスタ材料は単なる絶縁物として働くことになる。The piezoelectric element of the present invention having the above-mentioned means is polarized in the height direction of the wall of the piezoelectric material (the depth direction of the groove). By applying an electric field between the driving electrodes on both sides of the wall of the piezoelectric material , the polarization is made in a direction perpendicular to the direction of application of the electric field.
The piezoelectric material wall undergoes shear deformation without a dimensional change in the height direction (thickness direction). At this time, the ink groove surrounded by the two piezoelectric material walls causes a volume change. In other words, the ink grooves are made to act as ink channels and pressure chambers to eject ink droplets. In addition, the drive electrode formed of the PTC thermistor material has a property of exhibiting conductivity at a low temperature side and insulating property at a high temperature side from the Curie temperature of the PTC thermistor material. Therefore, it operates as a drive electrode during the operation of a normal pulse droplet deposition apparatus. When re-polarizing, the temperature condition at the time of polarization
PTC by setting the temperature above the Curie temperature of thermistor material
The thermistor material will simply act as an insulator.
【０００８】[0008]
【実施例】以下、本発明を具体化した一実施例を図面を
参照して説明する。図１は圧電素子１１に形成された溝
１２の側面１４に皮膜形成を行う工程を示す図である。
圧電素子１１はチタン酸ジルコン酸鉛系の圧電セラミッ
クスであり外形寸法６×２５×１ｍｍである。６×２５
ｍｍの面に幅０．０８５ｍｍ、深さ０．１７ｍｍの溝１
２が３４本形成されている。圧電材料の壁寸法は幅０．
０８５ｍｍ、高さ０．１７ｍｍである。該圧電素子１１
をワイヤー１５で吊し容器１７中に調整されたチタン酸
バリウム系ＰＴＣサーミスタ材料のゾル−ゲル溶液１６
に浸せきし、一定速度で引き上げる。これはいわゆるデ
ィップコーティングといわれる手法で薄い均一な膜厚の
皮膜が形成される。本実施例では圧電素子１１の溝１２
の側面以外の部分をマスクし皮膜形成を行った。形成さ
れた皮膜は乾燥後の厚みで約０．８μｍであった。本実
施例ではディップコーティングにて皮膜形成を行った
が、多元スパッタ法等の他の手法を用いてもよい。図２
は熱処理後の圧電素子１１を示す図である。皮膜形成さ
れたチタン酸バリウム系ＰＴＣサーミスタ材料は５００
〜１０００℃で熱処理される。チタン酸バリウム系ＰＴ
Ｃサーミスタ材料は熱処理されることにより完全に結晶
化されるとともに、圧電セラミックス材料との界面にて
拡散反応が進み強固に接着される。熱処理後の皮膜の厚
みは約０．５μｍとなった。図２に示す圧電素子１１は
３４本の溝１２と３５個の圧電材料の壁１３を有し、溝
１２の側面にはチタン酸バリウム系ＰＴＣサーミスタ材
料にて構成される駆動電極２４が形成されている。なお
このＰＴＣサーミスタ材料はセラミックス材料なので耐
インク性に優れている。図３に本実施例で用いたチタン
酸バリウム系ＰＴＣサーミスタ材料の温度と比抵抗の特
性を示す。室温から５０℃程度までは数Ω−ｃｍ以下の
比抵抗を示し導電性材料として機能することがわかる。
本材料のキュリー温度は約８０℃であり該温度以上では
１０10Ω−ｃｍ程度の比抵抗を示し絶縁材料として機能
することがわかる。なお、チタン酸バリウム系ＰＴＣサ
ーミスタ材料のキュリー温度は微量添加物や陽イオンの
置換などの手法によってコントロールできることは良く
知られている。図４に圧電素子１１を分極する工程を示
す。溝１２の側面にチタン酸バリウム系ＰＴＣサーミス
タ材料にて構成される駆動電極２４が形成された圧電素
子１１をフレキシブル電極４２ａ、４２ｂに挟み絶縁性
シリコンオイルを満たしたオイルバス（図示せず）の中
に入れ、１００℃で１０ｍｉｎ、２．５ｋＶ／ｍｍの電
界を印加して分極処理した。フレキシブル電極４２ａを
陽極に、４２ｂを陰極にした場合、分極方向４３は厚み
方向で下向きとなる。図５に上記圧電素子を用いたパル
ス滴付着装置の構成例を示す。圧電素子１１はフレキシ
ブルな接着層５１を介してカバープレート５２と接着さ
れる。圧電素子１１の溝１２の長手方向の前面にインク
噴射孔５３を備えたノズルプレート５４を接着する。そ
の後バックカバー５５とバックプレート５６が接着され
る。DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a view showing a process of forming a film on a side surface 14 of a groove 12 formed in a piezoelectric element 11.
The piezoelectric element 11 is a lead zirconate titanate-based piezoelectric ceramic and has an outer dimension of 6 × 25 × 1 mm. 6 × 25
1 mm groove with a width of 0.085 mm and a depth of 0.17 mm
34 are formed. The wall size of the piezoelectric material is 0.
085 mm, height 0.17 mm. The piezoelectric element 11
Sol-gel solution 16 of barium titanate-based PTC thermistor material adjusted in a container 17
Immersed in water and lifted at a constant speed. In this method, a thin film having a uniform thickness is formed by a technique called dip coating. In this embodiment, the groove 12 of the piezoelectric element 11
A film was formed by masking portions other than the side surfaces of the film. The formed film had a thickness of about 0.8 μm after drying. In this embodiment, the film is formed by dip coating, but another method such as multi-source sputtering may be used. FIG.
FIG. 3 is a view showing the piezoelectric element 11 after heat treatment. The coated barium titanate-based PTC thermistor material is 500
Heat treated at １０００1000 ° C. Barium titanate-based PT
The C thermistor material is completely crystallized by the heat treatment, and a diffusion reaction proceeds at the interface with the piezoelectric ceramic material, thereby firmly bonding the material. The thickness of the film after the heat treatment was about 0.5 μm. The piezoelectric element 11 shown in FIG. 2 has 34 grooves 12 and 35 piezoelectric material walls 13, and a drive electrode 24 made of a barium titanate-based PTC thermistor material is formed on a side surface of the groove 12. ing. Since the PTC thermistor material is a ceramic material, it has excellent ink resistance. FIG. 3 shows the temperature and specific resistance characteristics of the barium titanate-based PTC thermistor material used in this example. From room temperature to about 50 ° C., it shows a specific resistance of several Ω-cm or less, indicating that it functions as a conductive material.
The Curie temperature of this material is about 80 ° C., and above this temperature, the material exhibits a specific resistance of about 10 10 Ω-cm, indicating that it functions as an insulating material. It is well known that the Curie temperature of a barium titanate-based PTC thermistor material can be controlled by a technique such as the addition of a small amount of an additive or a cation. FIG. 4 shows a step of polarizing the piezoelectric element 11. An oil bath (not shown) in which the piezoelectric element 11 in which the drive electrode 24 made of a barium titanate-based PTC thermistor material is formed on the side surface of the groove 12 is sandwiched between flexible electrodes 42a and 42b and filled with insulating silicon oil. The substrate was put in the container and polarized at 100 ° C. for 10 minutes by applying an electric field of 2.5 kV / mm. When the flexible electrode 42a is used as an anode and the flexible electrode 42b is used as a cathode, the polarization direction 43 is downward in the thickness direction. FIG. 5 shows a configuration example of a pulse droplet deposition device using the piezoelectric element. The piezoelectric element 11 is bonded to a cover plate 52 via a flexible bonding layer 51. A nozzle plate 54 having an ink ejection hole 53 is bonded to the front surface of the groove 12 of the piezoelectric element 11 in the longitudinal direction. Thereafter, the back cover 55 and the back plate 56 are bonded.
【０００９】次にこのパルス滴付着装置の作用を説明す
ると、このパルス滴付着装置は圧電素子１１の溝１２の
側面に形成されたチタン酸バリウム系ＰＴＣサーミスタ
材料の駆動電極２４に電圧を印加することで、圧電材料
の壁１３のせん断変形を引き起こす。溝１２及びカバー
プレート５２で形成された部分はインクの流路、インク
チャンバーとして動作し、上述の圧電材料の壁１３のせ
ん断変形に伴い容積変化を起こす。容積変化に伴う圧力
の発生によりインク噴射孔５３からインク滴の噴射が行
われる。図６に圧電素子の再分極の様子を示す。圧電素
子１１はパルス滴付着装置へ組み込まれるとき、種々の
接着工程を経る。通常この様な圧電素子に使用される圧
電セラミックスは３００℃程度のキュリー温度を持つも
のが多い。接着工程は熱処理を伴って行われる場合が多
い。分極処理された圧電セラミックスはキュリー温度以
上で完全に強誘電性を失うが、１００〜２００℃の温度
にさらされた場合でも分極状態の劣化が起こる。従って
用いた圧電セラミックスの圧電特性をフルに活用しよう
とする場合に組立工程後に再分極する必要が生じる。し
かしながら本実施例の圧電素子のように圧電材料の変形
モードの内せん断モードを利用する場合、分極方向と駆
動電界印加方向が直交するため駆動電極として従来の導
電性材料を使用した場合簡単には再分極できなかった。
しかるに本実施例の圧電素子は駆動電極としてチタン酸
バリウム系ＰＴＣサーミスタ材料を用いているため再分
極処理を容易に実施することが出来る。図５に示したパ
ルス滴付着装置のカバープレート５２の上面及び圧電素
子１１の下面にフレキシブル電極４２ａ、４２ｂを接触
させ軽く押えながら圧電素子１１の厚み方向に２．５ｋ
Ｖ／ｍｍの電界が印加されるようにした。この再分極処
理は１００℃のオーブン中にて１０ｍｉｎ行った。上記
再分極処理に於て圧電素子１１の溝１２の側面に形成さ
れたチタン酸バリウム系ＰＴＣサーミスタ材料の駆動電
極２４は絶縁物として作用し良好な再分極処理が実現で
きた。従って用いた圧電セラミックス材料の圧電特性を
最大限に利用したパルス滴付着装置が実現できた。Next, the operation of the pulse drop applying apparatus will be described. The pulse drop applying apparatus applies a voltage to the drive electrode 24 made of barium titanate-based PTC thermistor material formed on the side surface of the groove 12 of the piezoelectric element 11. This causes shear deformation of the wall 13 of the piezoelectric material. The portion formed by the groove 12 and the cover plate 52 operates as an ink flow path and an ink chamber, and causes a volume change due to the shear deformation of the piezoelectric material wall 13 described above. Ink droplets are ejected from the ink ejection holes 53 by the generation of pressure due to the change in volume. FIG. 6 shows how the piezoelectric element is repolarized. When the piezoelectric element 11 is incorporated into the pulse droplet deposition device, it goes through various bonding processes. Usually, many piezoelectric ceramics used for such a piezoelectric element have a Curie temperature of about 300 ° C. The bonding process is often performed with heat treatment. Polarized piezoelectric ceramics completely lose ferroelectricity above the Curie temperature, but the polarization state deteriorates even when exposed to a temperature of 100 to 200 ° C. Therefore, in order to make full use of the piezoelectric characteristics of the used piezoelectric ceramics, it is necessary to repolarize after the assembling process. However, when utilizing the internal shear mode of deformation mode of the piezoelectric material as the piezoelectric element of this embodiment, the easy if the polarization direction and the driving direction of the electric field application is using conventional conductive material as a drive electrode for orthogonal Could not repolarize.
However, since the piezoelectric element of this embodiment uses a barium titanate-based PTC thermistor material as the drive electrode, repolarization can be easily performed. The flexible electrodes 42a and 42b are brought into contact with the upper surface of the cover plate 52 and the lower surface of the piezoelectric element 11 of the pulse droplet applying apparatus shown in FIG.
An electric field of V / mm was applied. This repolarization treatment was performed in an oven at 100 ° C. for 10 minutes. In the repolarization process, the drive electrode 24 of the barium titanate-based PTC thermistor material formed on the side surface of the groove 12 of the piezoelectric element 11 acts as an insulator, and a good repolarization process can be realized. Therefore, a pulse droplet deposition device that makes maximum use of the piezoelectric characteristics of the used piezoelectric ceramic material was realized.
【００１０】[0010]
【発明の効果】以上説明したことから明かなように、本
発明の圧電材料のせん断変形を利用したパルス滴付着装
置用圧電素子は駆動電極をＰＴＣサーミスタ材料にて構
成することにより、圧電素子の再分極処理が可能であ
り、圧電特性を最大限に利用できかつ、圧電材料との接
着強度に優れ、耐インク性に優れた駆動電極を有するパ
ルス滴付着装置用圧電素子となる。As is apparent from the above description, the piezoelectric element of the present invention for a pulse droplet deposition apparatus utilizing the shear deformation of a piezoelectric material has a drive electrode made of a PTC thermistor material. A piezoelectric element for a pulse droplet deposition apparatus having a drive electrode that can be repolarized, can make maximum use of piezoelectric characteristics, has excellent adhesive strength to a piezoelectric material, and has excellent ink resistance.
【図１】本実施例の皮膜形成工程を示す概略図である。FIG. 1 is a schematic view showing a film forming step of the present embodiment.
【図２】本実施例の溝の側面にＰＴＣサーミスタ材料の
駆動電極が形成された圧電素子を示す概略図である。FIG. 2 is a schematic view showing a piezoelectric element in which a drive electrode made of a PTC thermistor material is formed on a side surface of a groove according to the present embodiment.
【図３】本実施例に用いたＰＴＣサーミスタ材料の比抵
抗と温度の関係を示す図である。FIG. 3 is a diagram showing a relationship between specific resistance and temperature of a PTC thermistor material used in the present embodiment.
【図４】本実施例の圧電素子の分極工程を示す概略図で
ある。FIG. 4 is a schematic view showing a polarization step of the piezoelectric element of the present embodiment.
【図５】本実施例の圧電素子を用いたパルス滴付着装置
の構成例を示す概略図である。FIG. 5 is a schematic diagram illustrating a configuration example of a pulse droplet deposition device using a piezoelectric element according to the present embodiment.
【図６】本実施例の組み付け後の圧電素子を再分極する
工程を示す概略図である。FIG. 6 is a schematic view showing a step of repolarizing the assembled piezoelectric element according to the embodiment.
【図７】従来例の圧電素子を用いたパルス滴付着装置の
構成例を示す概略図である。FIG. 7 is a schematic diagram illustrating a configuration example of a pulse droplet deposition device using a conventional piezoelectric element.
１１ 圧電素子 １２ インク溝 １３ 圧電材料の壁 １４ 溝の側面 ２４ 駆動電極（ＰＴＣサーミスタ材料） Reference Signs List 11 piezoelectric element 12 ink groove 13 wall of piezoelectric material 14 side surface of groove 24 drive electrode (PTC thermistor material)
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 平２−150355（ＪＰ，Ａ) 特開 昭63−178571（ＪＰ，Ａ) 特開 平３−49957（ＪＰ，Ａ) (58)調査した分野(Int.Cl.6，ＤＢ名) B41J 2/045 B41J 2/055 H01L 41/09 ──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-2-150355 (JP, A) JP-A-63-178571 (JP, A) JP-A-3-49957 (JP, A) (58) Field (Int.Cl. 6 , DB name) B41J 2/045 B41J 2/055 H01L 41/09
Claims (1)
を有し、前記壁の側面に該壁に電界を印加するための駆
動電極が形成され、前記壁が前記電界の印加方向と直交
する方向に分極されているパルス滴付着装置用圧電素子
に於いて、前記駆動電極がＰＴＣサーミスタ材料にて構
成されていることを特徴とするパルス滴付着装置用圧電
素子。[Claim 1 further comprising a plurality of ink grooves <br/> between the walls of a plurality of piezoelectric material, said wall drive electrodes for applying an electric field is formed on a side surface of said wall, said wall said field Orthogonal to the application direction
A piezoelectric element for a pulse drop applying apparatus, wherein the driving electrode is made of a PTC thermistor material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3118529A JP2932750B2 (en) | 1991-05-23 | 1991-05-23 | Piezoelectric element for pulse droplet deposition device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3118529A JP2932750B2 (en) | 1991-05-23 | 1991-05-23 | Piezoelectric element for pulse droplet deposition device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH04345852A JPH04345852A (en) | 1992-12-01 |
| JP2932750B2 true JP2932750B2 (en) | 1999-08-09 |
Family
ID=14738858
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3118529A Expired - Lifetime JP2932750B2 (en) | 1991-05-23 | 1991-05-23 | Piezoelectric element for pulse droplet deposition device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2932750B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6802585B1 (en) | 1999-09-03 | 2004-10-12 | Videojet Systems International, Inc. | Print head ink temperature control device |
-
1991
- 1991-05-23 JP JP3118529A patent/JP2932750B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH04345852A (en) | 1992-12-01 |
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