JP2930356B2 - Processing jig - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention uses a rotating polishing platen to form a fine curved surface on a workpiece such as an optical component or an electronic component using free abrasive grains or fixed abrasive grains. The present invention relates to a processing jig for forming.

[Prior Art] The applicant has applied a processing jig as shown in FIG. 8 to Japanese Patent Application No. 62-87.
No. 7 proposed.

The piezoelectric element 20 is attached to one end of the lower surface of the plate 21 and the workpiece 22 is attached to the other end. The workpiece 22 is placed on the rotating polishing platen 1, and the voltage applied to the piezoelectric element 20 is changed. Controlling the amount of protrusion of the piezoelectric element 20,
It is intended to perform curved surface processing using loose abrasives or fixed abrasives.

[Problems to be solved by the invention]

However, the processing jig can basically be processed with high accuracy, but practically has the following problems.

a, Since the tip of the piezoelectric element also comes into contact with the polishing platen,
Long-term processing has its effect.

b, the amount of protrusion of the piezoelectric element is adjusted to make the amount of protrusion of the piezoelectric element from the lower surface of the plate equal to the length of the work to the work surface. Some of them cannot be processed because they exceed them.

c, it is not possible to process many workpieces at once.

In order to solve the above-described problems, the present invention enables a curved surface to be formed on a workpiece with high accuracy, and has little change with time.
It is another object of the present invention to provide a processing jig capable of simultaneously processing many workpieces.

[Means for solving the problem]

In order to achieve the above object, according to the present invention, a groove whose back portion is opposed to an intermediate portion of the processing jig is formed so that the processing jig is easily bent due to abrasion resistance generated at the time of lapping.

Further, a member for fixing the workpiece and a member for forming the groove are separately provided.

Furthermore, a second member having a first member for fixing the workpiece and an upper surface having a width smaller than the width of the lower surface of the first member.
A processing jig was constructed from the above members.

〔Example〕

 Hereinafter, embodiments according to the present invention will be described with reference to the drawings.

<First Embodiment> FIG. 1 is a schematic view showing a first embodiment of a processing jig according to the present invention. 15 is a processing jig made of a hard material such as metal or ceramics, and grooves 15a and 15b are formed from both sides so that the back part faces the middle part, and the upper and lower surfaces are finished to be smooth and parallel surfaces Have been. A workpiece (hereinafter referred to as a work) 13 is bonded and fixed to the upper surface of the processing jig 15 with wax or the like, and the lower surface is fastened to the jig holding member 10 by a fixing screw 16. The jig holding member 10 is made of metal or ceramics, and its upper and lower surfaces are finished to be smooth and parallel surfaces.
Therefore, by measuring the vertical displacement of this surface with a non-contact displacement meter, the polishing amount can be grasped. FIG. 2 shows an actual layout. On one surface of the jig holding member 10,
Six processing jigs 15 to which the work 13 is fixed are fixed screws 16
Has been concluded. Although a plurality of processing jigs 15 can be attached within an allowable range, it is necessary to consider the arrangement so that a load is uniformly applied during processing and that the arrangement is stable. . When lapping is performed on a platen (not shown) rotating in such a state, a jig holding member is used.
10 also rotates on its own due to the difference in circumferential speed of the surface plate. A moment force due to polishing resistance acts on the processing jig 15 which is fastened to the jig holding member 10 and rotates together, and its magnitude is maximum when the platen rotation direction and the groove forming direction are positioned at right angles. Become. The processing is performed by repeating this within a predetermined processing time, and the curved surface processing of a continuous arc can be performed.

FIG. 3 is a graph showing the results obtained when the lapping was actually performed and by the calculation. Polishing resistance during lap
300 [gr · f], jig material SKS-3, work width 4 [mm],
Under the conditions described above, a fine curved surface processing (hereinafter referred to as crown processing) was performed. When the thickness of the remaining portion of the groove of the processing jig 15 is w [mm], the length from the groove center to the upper surface of the work is 1 [mm], and the crown amount obtained after lapping is a [nm]. a and w / l
The result obtained by calculation is shown by a solid line, and the result obtained by actual processing is plotted. The measured values were slightly larger than the calculated values, but the trend was the same. The crown amount required in this embodiment is
Since it is 50 to 100 [nm], it can be understood that it is possible to sufficiently cope under this condition. Furthermore, the crown amount a can be changed over a wide range by controlling w / l or by changing the material of the processing jig 15 (changing the elastic coefficient).

Further, w / l under the above conditions is practically preferably w / l> 0.06 from the viewpoint of crown shape, dimensional stability and surface quality.

Although the crown amount changes depending on the groove width h, the crown amount is changed in this embodiment.

In the range of 1 [mm] ≦ h ≦ 2 [mm], there was almost no influence of h.

Further, the cross-sectional shape of the grooves 15a and 15b shown in the figure is a U-shape, but is not limited to this shape.

Second Embodiment FIG. 4 is a schematic diagram showing a second embodiment according to the present invention. The processing jig in this embodiment includes a first member 11 and a second member 14. During processing, the first member 11 and the second member 14 are integrally fixed to the holding member 10 with screws. The first member 11 is for processing a plane. The second member 14 has a symmetrical groove whose back is opposed to both sides of the intermediate part. The crown amount can be controlled by changing various conditions as in the first embodiment.

Since the processing jig in the present embodiment includes the first member 11 for planar processing and the second member 14 having elasticity, it can be used for both planar processing and crown processing.

Third Embodiment FIG. 5 shows a third embodiment. This embodiment comprises the first member 11 and the second member 24 as in the second embodiment, but the second member 24 has a width c smaller than the lower surface width b of the first member 11. It is different in that it has a rectangular parallelepiped member. However, since the width c of the second member 24 is smaller than the width b of the lower surface of the first member 11, a symmetrical groove can be formed as in the first and second embodiments. Therefore, crown processing becomes possible, and plane processing is also possible as in the second embodiment.

In this embodiment, since the second member 24 is a rectangular parallelepiped, the upper surface of the second member 24, that is, the mounting surface of the first member 11 is easily formed in parallel with the upper surface of the jig holding member 10. be able to.

<Fourth embodiment> Fig. 6 shows a fourth embodiment. This embodiment, like the second embodiment, comprises a first member 11 and a second member 17, but differs from the second embodiment in that a plurality of protrusions 17a having grooves are formed in the second member 17. Different. The protrusion 17a and the groove of the protrusion 17a can be easily processed by electric discharge machining (in the case of metal) or ultrasonic machining (in the case of ceramics). In this embodiment, many works 13 can be processed at one time.

FIG. 7 is a plan view showing the actual work arrangement of this embodiment. The first member 11 to which the work 13 is fixed is arranged in parallel on the second member 17 and fastened by a fixing screw 18. Further, the second member 17 is fastened to the jig holding member 19 from the back surface by a fixing screw (not shown).

In the above-described embodiment, the method of screwing and fixing the processing jig to the jig holding member is adopted. However, other methods such as bonding may be used, or the processing jig may be directly formed on the jig holding member.

〔The invention's effect〕

As described above, according to the present invention, since it can be carried out only by forming the groove whose back part is opposed to the middle part of the processing jig, without using a special jig and a processing method as in the prior art In addition, high-quality crown processing with less variation in accuracy has been made possible by a general lapping method.

Further, by separately providing a member for fixing the workpiece and a member for forming the groove, the member can be used not only for curved surface processing but also for parallel processing.

Furthermore, a second member having a first member for fixing the workpiece and an upper surface having a width smaller than the width of the lower surface of the first member.
By configuring the processing jig with the above member, the surface for fixing the workpiece can be easily formed in parallel with the polishing platen.

[Brief description of the drawings]

FIG. 1 is a schematic view showing a first embodiment of a processing jig according to the present invention, FIG. 2 is a plan view showing a jig arrangement of the first embodiment, and FIG. A diagram showing a processing result based on
FIG. 4 is a schematic diagram showing the second embodiment, FIG. 5 is a schematic diagram showing the third embodiment, FIG. 6 is a schematic diagram showing the fourth embodiment, and FIG. FIG. 8 is a plan view showing an example of a jig arrangement, and FIG. 8 is a schematic view showing a conventional technique. 1, polishing table, 10, 19, jig holding member, 11, first member, 13, 22, workpiece (work), 14, 17, 24, second member, 15 …… a processing jig.

Claims (3)

(57) [Claims] 1. A processing jig for fixing one end to a jig holding member, fixing a workpiece to the other end, and pressing the workpiece against a rotating polishing platen for polishing. In order to form a minute curved surface on the workpiece, a groove facing the middle portion of the processing jig is formed so that the processing jig is bent by polishing resistance generated during the polishing processing. A processing jig characterized in that: 2. The processing jig according to claim 1, wherein an end portion for fixing the workpiece and a facing groove are provided on members different from each other. 3. A processing jig for fixing one end to a jig holding member, fixing a workpiece to the other end, and pressing the workpiece against a rotating polishing platen for polishing. A first member for fixing the workpiece so that the processing jig bends due to a polishing resistance generated during the polishing to form a minute curved surface on the workpiece; A second member, which is a rectangular parallelepiped member having an upper surface having a width smaller than the width of the lower surface of the member, joining the lower surface of the first member and the upper surface of the second member to form a processing jig; A processing jig, wherein a workpiece is fixed to an upper surface of a member, and a lower surface of the second member is fixed to a jig holding member.