JP2916217B2 - Blow cleaning equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Industrial application field) The present invention relates to a blow cleaning apparatus for removing dust by blowing a gas to an object to be cleaned.

(Prior Art) For example, in the case of manufacturing an image pickup element which is particularly dusty among semiconductors, in the assembling process, cleaning of the chip of the image pickup element, an envelope and the like is performed in order to prevent generation of defective products. Dust adhering to the object is removed, and as a means for this, a gas such as nitrogen is blown toward the object to be cleaned.

FIG. 10 shows a conventional blow cleaning apparatus.
That is, reference numeral 1 in the figure denotes a transport jig which is transported in the direction of the arrow by a transport mechanism (not shown). A plurality of envelopes 2 of an image sensor to be cleaned are mounted on the upper surface of the transfer jig 1 at predetermined intervals along the transfer direction. A nozzle body 3 is provided above the transfer jig 1. One end of a supply pipe 4 is connected to the nozzle body 3. The other end of the supply pipe 4 is connected to a nitrogen supply source (not shown).

A filter 5, a stop valve 6, a pressure gauge 7, a regulator 8, and the like are sequentially provided in the middle of the supply pipe 4 from a downstream side to an upstream side.

In such a configuration, if the transport jig 1 is transported and driven in a state in which nitrogen is ejected from the nozzle body 3, dust attached to the envelope 2 is blow-cleaned by the nitrogen ejected from the nozzle body 3. You can do it.

However, simply ejecting gas from the nozzle body 3 as described above causes the gas to remain in a constant state (particularly pressure).
However, since it only acts on the envelope 2 and it is difficult to reliably spray the entire envelope 2, a sufficient cleaning effect cannot be expected. Further, there is a possibility that dust blown off by the gas is likely to adhere to another envelope 2 located in the vicinity of the envelope 2 being blow-cleaned.

(Problems to be Solved by the Invention) As described above, conventionally, the gas was simply blown out from the nozzle body and sprayed onto the object to be cleaned. In some cases, the generated dust adhered to other objects to be cleaned.

The present invention has been made based on the above circumstances, and an object of the present invention is to reliably remove dust adhered to an object to be cleaned and to remove the removed dust to another object to be cleaned. An object of the present invention is to provide a blow cleaning device which is prevented from being attached.

[Constitution of the Invention] (Problems to be Solved by the Invention) In order to solve the above problems, the present invention provides a blow chamber, a transport mechanism for transporting an object to be cleaned into the blow chamber, and a cleaning mechanism within the blow chamber. A cleaning unit that introduces a clean gas, an exhaust port that exhausts the gas in the blow chamber, and a nozzle that is provided in the blow chamber and that ejects a clean gas toward the object to be cleaned that is transported by the transport mechanism. Body, a shutter member for covering an object to be cleaned other than the object to be blown by the nozzle body, and a drive mechanism provided outside the blow chamber for displacing and driving the nozzle body with respect to the object to be cleaned. And

Further, the displacement drive is driven in a direction of contacting and separating from the object to be cleaned.

Further, a blow chamber, a transport mechanism for transporting an object to be cleaned into the blow chamber, a cleaning unit for introducing a clean gas into the blow chamber, and an exhaust port for exhausting gas from the blow chamber. A nozzle body that is provided in the blow chamber and ejects a clean gas toward the object to be cleaned conveyed by the conveyance mechanism, and covers the object to be cleaned other than the object to be cleaned to which the gas is blown by the nozzle body. A shutter member and a support mechanism provided outside the blow chamber and slidably supporting the nozzle body are provided.

According to such a configuration, the nozzle body is driven by the drive mechanism, so that the gas ejected from the nozzle body is blown while fluctuating on the object to be cleaned, so that the cleaning effect can be improved. In addition, the object to be cleaned that is not cleaned is covered by the shutter member, thereby preventing the dust blown off from the other objects to be cleaned during cleaning from attaching thereto.

(Embodiment) Hereinafter, a first embodiment of the present invention will be described with reference to FIG. 1 to FIG. FIG. 1 schematically shows a blow cleaning apparatus. In FIG. 1, reference numeral 11 denotes a blow chamber in which a clean gas (eg, air) is constantly flowed from one side and exhausted from the other side. The blow chamber 11 has a rectangular box shape, a cleaning unit 12 is provided on a front end face thereof, and an exhaust port 13 is formed on a rear end side of the bottom face. The cleaning unit 12 includes a filter, a dust collector, and the like, and can remove dust from outside air introduced into the blow chamber 11. Exhaust port 13
Is connected to an exhaust duct (not shown). Therefore, a flow from the cleaning unit 12 to the exhaust port 13 is generated in the blow chamber 11.

A transport mechanism is located on the inner bottom in front of the blow chamber 11
A guide plate 15 constituting 14 is provided penetrating both side walls in the width direction. On both sides of the guide plate 15, a horizontal roller 16 having a horizontal axis as shown in FIG. 5 or FIG.
And vertical rollers 17 whose axes are perpendicular to each other are provided at predetermined intervals. The guide 15 has a lower surface joined to the horizontal roller 16 and both sides joined to the vertical roller 17 to provide a transport jig 18, whereby the transport jig 18 is driven along the guide 15. It has become.

On the upper surface of the transport jig 18, an envelope 19 of a solid-state imaging device is mounted as a cleaning object at predetermined intervals along the transport direction. Of the plurality of envelopes 19 on the transfer jig 18 transferred into the blow chamber 11, for example, two of them are blow-cleaned by gas ejected from a pair of nozzle bodies 21, respectively. The pair of nozzle bodies 21 are
As shown in FIG. 3 and FIG.
The lower end of a pair of gas conduits 22 provided through the upper wall 11a is provided, and each nozzle body 21 is provided with two ejection holes 21a.

A gantry 24 is provided on a portion of the upper surface of the blow chamber 11 where the gas conduit 22 protrudes. The gantry 24 is formed by connecting four corners of a lower plate 25 and an upper plate 26 which are vertically separated from each other by first connecting rods 27. From the upper plate 26, a pair of guide shafts 28 is provided vertically. An upper slide body 29 and a lower slide body 31 are slidably provided on the guide shaft. The upper end of the gas conduit 22 is attached and fixed to the upper slide 29, and the lower slide 31 is not pulled out from the lower end of the guide shaft 28. The upper end of the gas conduit 22 is connected to a supply source of a gas (not shown) such as nitrogen, and a clean gas is supplied from the supply source.
It is configured to be ejected from the ejection hole 21a of the nozzle body 21.

Note that, in a state where gas is jetted from the nozzle body 21 in the blow chamber 11, the amount of exhaust from the exhaust port 13 is controlled so that the internal pressure is always positive.

The lower slide body 31 is provided with a drive motor 32 with the drive shaft 33 being horizontal. The drive shaft of this drive motor 32
An eccentric cam 34 is attached to 33. The eccentric cam 34 is in contact with the lower surface of the upper slide body 29. Therefore, when the eccentric cam 34 is driven to rotate, the upper slide body 29 slides in the vertical direction according to the amount of eccentricity.
It is designed to be linked via.

The lower ends of the second connecting rods 35 are connected and fixed to both ends in the width direction of the lower slide body 21, respectively. A first connecting plate 36 is connected and fixed to the upper ends of the second connecting rods 35. The first connecting plate 36 has a first cylinder mounted on the upper plate 26 of the gantry 24.
27 rods 38 are connected. This first cylinder 37
When the rod 38 is driven in the immersion direction, the gas conduit 22 through the second connecting rod 35 and the pair of slide bodies 29, 31
At the same time, the nozzle body 21 can be raised with a larger stroke than the vertical movement by the eccentric cam 34. That is, the pair of nozzle bodies 21 can be largely separated from the transport jig 18.

On the other hand, a pair of shutter members 41 are disposed above the transport jig 18 on both sides in the width direction in the blow chamber 11. As shown in FIGS. 4 to 6, the shutter member 41 is longer than the width of the transfer jig 18 and is formed in a hollow shape with an open lower surface. A third connecting rod 42 is vertically suspended with its upper end connected and fixed. These third connecting rods 42 pass through the bottom wall of the blow chamber 11, and lower ends thereof are connected and fixed to the second connecting plate 43. This second connecting plate 43
Is connected and fixed to a rod 45 of a second cylinder 44. The second cylinder 44 is mounted on a mounting plate 45 with its axis perpendicular.

Therefore, when the second cylinder 44 operates, the shutter member 41 is vertically driven via the third connecting rod 42. When the shutter member 41 is driven in the downward direction, a pair of the envelopes 19 that are joined to the upper surface of the transport jig 18 and that are opposed to the pair of nozzle bodies 21 among the envelopes 19 placed on the upper surface. The enclosure 19 except for is covered.

The mounting plate 45 is provided with a guide body 46 for guiding the vertical movement of the second connecting plate 43 when the shutter member 41 is lowered.

Next, the envelope 19 is blown by the blow cleaning device having the above configuration.
The operation of blow-cleaning will be described. First, before the transfer jig 18 is transferred into the blow chamber 11,
The shutter member 41 is in a raised state. In this state, when the transport jig 18 on which the plurality of envelopes 19 to be blow-cleaned are mounted is transported into the blow chamber 11 and stopped at a predetermined position, the second cylinder 44 is driven to release the shutter. The member 41 is driven in the descending direction. As a result, of the envelopes 19 placed on the transport jig 18, other envelopes except for the two envelopes 19 facing the pair of nozzle bodies 21
19 is covered and hidden by a pair of shutter members 41.

As described above, when the shutter member 41 is lowered, the drive motor 32 operates to rotate the eccentric cam 34, so that the upper slide body 29 is reciprocated vertically by the eccentric cam 34, and the gas is supplied to the upper slide body 29. A pair of nozzle bodies 21 connected via a conduit 22 are linked.

When the drive motor 32 operates, the nozzle body
Clean nitrogen is supplied to 21 from a supply source (not shown), and the nitrogen is ejected from the pair of ejection holes 21a toward the envelope 19.
The nitrogen ejected from the ejection holes 21a is supplied to the envelope 1 by the nozzle body 21.
Since it is driven in the direction of coming and going with respect to 9, the pressure of nitrogen acting on the envelope 19 acts repeatedly with fluctuations according to the change of the distance. Therefore, the envelope 19
The dust adhered to the surface is effectively blown off.

The dust blown from the envelope 19 is discharged from the blow chamber 11 along the flow from the cleaning unit 12 to the exhaust port 13 and the other envelope 19 placed on the transport jig 18. Are covered by the shutter member 41, so that they do not adhere to the envelope 19. That is, it is possible to prevent the cleaning jig placed on the transport jig 18 or the adhesion to the envelope 19 before the cleaning.

Further, a drive mechanism including a drive motor 32 for driving the nozzle body 21 and an eccentric cam 34, and a support mechanism including a guide shaft 28 that slidably supports the nozzle body 21 in the vertical direction and a pair of slide bodies 29 and 31. Is blow chamber 11
Is provided outside. As a result, dust generated from sliding portions of the driving mechanism and the supporting mechanism is blown into the blow chamber.
It does not adhere to the envelope 19 in the 11.

When the pair of envelopes 19 are blow-cleaned in this way, the shutter member 41 is raised and the transport jig 18 is driven by a predetermined amount along the guide 15, and then the uncleaned envelopes 19 are moved to the above-described state. Blow cleaning is performed by the same process as that described above.

8 and 9 show another embodiment of the present invention. That is, in this embodiment, the envelope 19a to be blow-cleaned is elongated, and in this case, the nozzle body 21 is driven in the front-back direction along the longitudinal direction of the envelope 19a. That is, the nozzle body 21 is attached to the tip of a pair of branch pipes 52 branched from one gas conduit 51. A filter 53 is provided in the middle of the gas conduit 51, and a guide plate 54 is fixedly attached to the filter 53. Both ends of the guide plate 54 are slidably supported by a pair of guide shafts 55 which are provided on the inner bottom of the blow chamber 11 along the front-rear direction.

The rear end of the gas conduit 51 penetrates through the rear wall of the blow chamber 11 and is connected to a block body 58 attached to a pair of rods 57 of a front-rear drive cylinder 56. A connection pipe 59 is connected to the block body 58. The connection pipe 59 is connected to a nitrogen supply source (not shown). When the front-rear drive cylinder 56 is operated, the nozzle body 21 is connected via the gas conduit 51. Are reciprocated along the length of the envelope 19a placed on the transport jig 18.

The structure in which the envelopes 19a other than the pair of envelopes 19a blow-cleaned by the nozzle body 21 are covered and hidden by the shutter member 41 is not shown, but is the same as that of the above-described embodiment.

According to such a configuration, the nozzle body 21 ejects nitrogen while being driven by the front-rear drive cylinder 56 in the front-rear direction, that is, along the length direction of the envelope 19a, so that the envelope 19a is blow-cleaned. And the dust blown off by the blow-cleaning
There is no such thing as sticking to.

In each of the above-described embodiments, the envelope of the solid-state imaging device has been described as the object to be cleaned to be blow-cleaned. However, the object to be cleaned may be any other material. The present invention can be applied to any device that needs to be blow-cleaned.

In another embodiment shown in FIGS. 8 and 9, a pair of guide shafts 55 may be provided outside the blow chamber 11.

[Effects of the Invention] As described above, the present invention forms a clean gas flow from a cleaning unit to an exhaust port in a blow chamber and ejects a gas toward an object to be cleaned. The object to be cleaned is displaced with respect to the object to be cleaned, and objects to be cleaned other than the object to be blown with gas are covered by the shutter member. Therefore,
Since the gas can be ejected to the object to be cleaned while changing the pressure or the spraying position, the cleaning effect can be increased. Further, since a clean gas flow can be formed in the blow chamber, the blown dust can be effectively discharged from the blow chamber. Furthermore, since the objects to be cleaned that are not cleaned are covered and hidden by the shutter member, it is possible to prevent dust scattered from other objects to be cleaned from attaching to these objects to be cleaned. In addition, since the driving mechanism for driving the nozzle body is provided outside the blow chamber, there is no possibility that dust generated at the sliding portion of the driving mechanism adheres to the object to be cleaned.

[Brief description of the drawings]

1 to 7 show an embodiment of the present invention, FIG. 1 is a schematic view of the entire apparatus, FIG. 2 is a front view of a mechanism for vertically driving a nozzle body, FIG. 4 is a front view of a mechanism for moving the shutter member up and down, FIG. 5 is a side view of the same, FIG. 6 is a plan view of the same, FIG. 7 is a plan view showing a part of a transport mechanism for transporting a transport jig. FIG. 8 is a plan view of a mechanism for driving a nozzle body according to another embodiment of the present invention, and FIG.
FIG. 10 is a side view thereof, and FIG. 10 is a schematic view of a conventional blow cleaning apparatus. 11 ... Blow chamber, 19, 19a ...
... Conveying mechanism, 15 ... Guide (conveying mechanism), 18 ... Conveying jig (conveying mechanism), 21 ... Nozzle body, 28 ... Guide shaft (supporting mechanism), 32 ... Driving motor (driving mechanism), 41: shutter member, 56: cylinder for driving back and forth (drive mechanism).

──────────────────────────────────────────────────続 き Continued on front page (58) Field surveyed (Int. Cl. ⁶ , DB name) B08B 5/02 H01L 21/304 341

Claims (3)

(57) [Claims] 1. A blow chamber, a transfer mechanism for transferring an object to be cleaned into the blow chamber, a cleaning unit for introducing a clean gas into the blow chamber, and an exhaust gas for exhausting the gas from the blow chamber. A mouth, a nozzle body for ejecting a clean gas toward the object to be cleaned conveyed by the conveyance mechanism provided in the blow chamber, and an object to be cleaned other than the object to be blown by the nozzle body. And a drive mechanism provided outside the blow chamber for displacing and driving the nozzle body with respect to the object to be cleaned. 2. The blow cleaning apparatus according to claim 1, wherein said displacement drive is performed in a direction of coming and going with respect to said object to be cleaned. 3. A blow chamber, a transport mechanism for transporting an object to be cleaned into the blow chamber, a cleaning unit for introducing a clean gas into the blow chamber, and an exhaust gas for exhausting the gas from the blow chamber. A mouth, a nozzle body that is provided in the blow chamber and ejects a clean gas toward the object to be washed conveyed by the conveyance mechanism, and an object to be washed other than the object to be washed, to which the gas is blown by the nozzle body. A blow cleaning apparatus comprising: a shutter member for covering and covering; and a support mechanism provided outside the blow chamber and slidably supporting the nozzle body.