JPH07270743A - Floating treatment device - Google Patents

Abstract

PURPOSE:To prevent damage of the rear surface of a work without adhering dust on this work by using an attracting means which sucks the work and holds the work in a contactless state by sucking gas. CONSTITUTION:The gas is supplied from a pipeline 22 to a gas ejection port 23 and is blown off toward the work 2 on a holding base 4. The work 2 is sucked y the attracting means 17 and is held in the contactless state. The work is then transferred into a floating treatment device 15 by extension of an arm 16. Next, a rod 20 extends and a door 8 falls to close an aperture 42 when the arm 16 emerges outside the floating treatment device 15. The floating treatment device 15 is then hermetically closed. The rod 20 contracts and the attracting means 17 is brought near the work 2 by movement of the arm 16 after the end of the treatment of the work 2. The gas is then blown off from the gas ejection port 23, thereby, the work 2 is received in the contactless state and is transferred to a receiving ad feeding base outside the floating treatment device 15. The blow-off of the gas is stopped and the work 2 is placed on the receiving and feeding base.

Description

Detailed Description of the Invention

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a floating processing device which processes a work while it is floating.

[0002]

2. Description of the Related Art Conventionally, in the manufacturing process of liquid crystal glass substrates, ceramic substrates, etc., there are processes such as surface modification treatment by ultraviolet irradiation or drying by heating.

Conventionally, a batch processing method in which the work is processed one by one employs a method of processing the work while the work is placed on a table.

Further, in a continuous processing system in which processing is performed continuously, the left and right ends of the work are placed on a belt to supply and discharge the work to the processing device.

[0005]

In the batch processing method in which the above-mentioned works are processed one by one, the work is carried out while the work is placed on the table, so that dust on the table is treated as work. When attaching to or processing the back side of the work,
There is a problem that the work before processing is damaged and the work is adversely affected. In the continuous processing system, when the thin work 2 is conveyed by a belt, the work side end Since the work is placed on the belt, the center of the work hangs down due to the weight of the work, and the work falls off the belt and is damaged.

[0006]

In order to solve the above-mentioned problems, in a batch processing system in which the work is processed one by one, the work is sucked by blowing out a gas, and the work is not contacted. By a floating processing device comprising a suction device held by the device, a guide disposed around the suction device and for restricting the horizontal movement of the work, and a processing device for processing the work, In a continuous processing method in which work is continuously supplied and processed, a plurality of the suction tools are arranged side by side in the work transfer direction, and front and rear ends of the suction tools are arranged on both left and right sides in the work transfer direction. A belt for traveling around the belt, and the upper running line of the belt is arranged above the upper surface of the suction tool to form a work transfer path, and a processing device is provided above the middle part of the work transfer path. It is possible to solve the problem by a floating processing device provided with.

[0007]

With the batch processing system having the above-described structure, in the present invention, when the work before transfer is transferred to the upper part of the adsorption tool in the floating processing apparatus by the transport tool, gas is blown out from the adsorption tool. The work is sucked and held in a non-contact state.

Since a guide for restricting the horizontal movement of the work is provided around the suction tool, the work is prevented from falling off the suction tool.

In this state, the work is subjected to a predetermined process by the processing action performed by the processing device disposed above the suction tool.

This solves the problems of dust adhesion and backside damage caused by the work placed on the table.

Further, in the continuous processing system, on the foremost end belt of the conveying path formed by the adsorbing tools arranged in parallel in the conveying direction and the belts provided on the left and right sides thereof,
When the unprocessed work is placed, it is blown out from the suction tool below the work and the work is sucked.

Since the sucked work is sucked and held in a non-contact state with a certain distance from the suction tool, the work is brought into close contact with the belt and slippage between the work and the belt is eliminated. At the same time, since the center of the work does not hang down more than a certain amount, it does not fall off the belt.

When the belt rotates in this state, the work is sent rearward, and the sensor senses when the tip of the work comes to the upper part of the next suction tool, and blows out gas from the gas jet port. The work is sucked, and the work is sent to the rear of the transport path.

A processing device is arranged above the central portion of the conveying path, and the work passing under the processing device is subjected to a predetermined processing by the processing action of the processing device and is sent to the rear.

The processed work is transferred to the next step at the end of the conveying path.

As described above, even in the case of a thin work, the central portion hangs down by its own weight, falls off the belt, and is not impossible to carry.

[0017]

Embodiment 1 An embodiment of the present invention will be described below with reference to the drawings.

FIG. 1 shows the entire structure of a batch processing type floating processing apparatus according to the present invention. This floating processing apparatus is a drying apparatus for drying a work such as a liquid crystal glass substrate by a batch processing method. Is.

In the figure, reference numeral 1 is a suction tool for sucking the work 2 by blowing out a gas and holding it in a non-contact state.

On the inner bottom surface of the floating processing device 15 surrounded by the wall 7, the suction tool 1 for sucking the work 2 and holding it in a non-contact state has the gas ejection port 3 directed upward. is set up.

The adsorber 1 sucks the work 2 by the Bernoulli effect by the gas flow by blowing the gas from the gas ejection port 3 toward the work 2, and holds the work 2 in a non-contact state. Is.

Around the suction tool 1, guides 5, 5, 5,
5 is provided to prevent the work 2 from moving in the horizontal direction so that the work 2 does not fall off the suction tool 1 from the suction tool 1.

An opening 42 is formed in the front wall 7 of the floating processing device 15, and a door 8 for opening and closing the work 2 when the work 2 is taken in and out is provided.

The upper part of the door 8 is the floating processing device 1.
5, the tip of the rod 20 of the cylinder 19 mounted by the bracket 21 is attached to the upper part of the rod 5.
The mechanism is such that the door 8 moves up and down by extension and contraction of 0.

Adsorption tool 1 in the floating processing device 15
A processing device 6 having a heating source is disposed on the upper part of the.

The pipe line 9 connected to the gas ejection port 3 is connected to the gas supply source 11 via the on-off valve 14, the heater 10 and the exhaust heat recovery device 11.

A pipe 12 for discharging the gas in the device is connected to the upper portion of the side wall 7 of the floating processing device 15, and the pipe 12 is connected to an air exhauster 13 via an exhaust heat recovery unit 11. There is.

The work 2 is taken in and out of the floating processing device 15 by the suction tool 17 mounted on the arm 16 of the robot 38.

The suction tool 17 sucks the work 2 by blowing out a gas from the gas ejection port 23 and holds the work 2 in a non-contact state.

A pipe line 22 is connected to the gas ejection port 23 of the adsorption tool 17, and the pipe line 23 is connected to a gas supply source (not shown) via an opening / closing valve 39.

In the above configuration, when the suction tool 17 attached to the arm 16 of the robot 38 approaches the unprocessed work 2 placed on the supply table 24, a sensor (not shown) is activated. It senses and opens the on-off valve 39.

Gas is supplied to the gas ejection port 23 from the pipe line 22 and is blown toward the work 2 on the supply table 4, and the work 2 is sucked by the suction tool 17.

The sucked work 2 is held in a non-contact state by a guide 18 provided around the suction tool 17 without being disengaged from the suction tool 17.

Next, the door 8 rises due to the contraction of the rod 20,
The opening 42 is opened, the arm 16 extends, and the work 2 held by the suction tool 17 is moved to directly above the suction tool 1 in the floating processing device 15.

In this state, the on-off valve 14 is opened to blow out the gas from the gas ejection port 3 of the adsorbing tool 1, and at the same time, the blowing of the gas from the gas ejection port 23 of the adsorbing tool 17 is stopped.

By the above operation, the work 2 is attached to the suction tool 17
Further, the work 2 is transferred to the suction tool 1, and the work 2 is held on the suction tool 1 in a non-contact state.

The arm 16 is the floating processing device 15.
When going out, the rod 20 extends, the door 8 descends, the opening 42 closes, and the floating processing device 15 is sealed.

In this state, the heating source of the processing device 6 is activated to heat the work 2.

The gas blown out from the gas jet port 3 is also heated to a predetermined temperature by the exhaust heat recovery unit 11 and the heater 10 and supplied to the adsorber 1 and blown out toward the work 2.

The exhaust device 13 is automatically operated according to the gas properties in the floating processing device 15, and the exhaust gas in the device enters the exhaust heat recovery device 36 from the pipe 12 and exchanges heat with the supply gas. And is discharged from the blower 13.

When the processing of the work 2 in the floating processing device 15 is completed, the rod 20 contracts and the door 8
Rises, the opening 42 is opened, and the suction tool 17 is moved by the movement of the arm 16 so that the suction tool 1 in the floating processing apparatus 15 moves.
The gas is blown out from the gas ejection port 23 in proximity to the work 2 held by the work 2, and the work 2 is received in a non-contact state and conveyed to a receiving table (not shown) outside the floating processing device 15. Then, the gas blowing from the gas ejection port 23 is stopped, and the work 2 is placed on the receiving table.

With the above, the processing operation for one work 2 is completed, and thereafter the same operation is repeated.

In the present embodiment, the floating processing device 1
The gas ejection port 3 of the adsorbent 1 was installed at the lower part of the apparatus 5 and the processing device 6 was arranged at the upper part. The processing device 6 may be disposed in the lower part of the device.

The processing unit 6 of the floating processing unit
If the gas blown out from the gas ejection port can be used for processing, the processing device 6 may not be provided.

[0045]

[Embodiment 2] Another embodiment of the present invention will be described based on a number.

FIG. 2 shows the overall structure of a continuous processing type floating processing apparatus for continuously processing work according to the present invention.

FIG. 3 is a sectional view of the structure shown in FIG.

The processing device 6 is provided above the floating processing device 36 surrounded by the wall 35, and on the base 34 below the floating processing device 36, in the conveying direction of the work 2 (left and right in the figure). The adsorbing tools 26, 26, 26, ... Are arranged side by side with the gas ejection ports 37, 37, 37, ... facing upward, and the side ends of the work 2 are provided on both left and right sides of the adsorbing tool 26. Belts 27 and 2 that rotate at the front and rear ends at intervals where parts can be placed
7 to form a work transfer path 40, and the work transfer path 40 is connected to the front and rear walls 3 of the floating processing device 36.
It is installed so as to penetrate through the openings 41, 41 provided at 5, 35.

The upper running lines of the belts 27, 27 are arranged at a position slightly higher than the upper surface of the gas ejection port 37.

.. on the front side of the floating treatment device 36 are connected to the suction treatment devices 26, 26, 26 ,. Some suction tools 26, 26, 26, ...
Through the open / close valve 32 to the pipes 29, 29, 29, ...
However, the suction tool 2 on the rear side of the floating processing device 36
6, 26, 26, ...
0, 30, 30, ... Are connected, and the temperature of the gas passing through the pipeline is adjusted to a predetermined temperature and supplied.

With such a construction, the work 2 before processing
Is placed on the belt 27 at the foremost end of the work transfer path 40, and at the same time, gas is blown out from the gas outlet 37 of the suction tool 26 below the work 2 to suck the work 2. .

Although the work 2 is sucked down by the suction tool 26 and hangs down, since the work 2 is always held in a non-contact state with the suction tool 26 at a certain interval, it does not hang down more than a certain level. It is placed on the belts 27, 27 without coming off from the belts 27, 27 and dropping.

In this state, as the belts 27, 27 move backward, the work 2 is also moved backward, and the work 2
When the tip portion passes over the upper surface of the suction device 26 at the rear, a sensor (not shown) senses it, blows out gas from the gas outlet 37, sucks the work 2, and is sequentially sent to the rear.

In this way, the work 2 is transferred into the floating processing device 36, is processed by the processing device 6 while being transferred inside, is sent out from the floating processing device 36, and is the last end of the work transfer path 40. And is transferred to the next process.

The same operation is successively performed.

As described above, the work 2 includes the suction tool 26.
Since it is sucked and held in a non-contact state at a constant interval, it adheres to the belt 27 and is transferred without slipping, and the work 2 does not droop excessively during transfer. Also, it will not fall off the belt 27 and will not be damaged.

Although the transfer mechanism of this embodiment uses a belt, it has a mechanism for supporting both side parts of the work such as a mechanism for supporting the side part of the work by a roller which can be rotationally driven. If

It is also possible to provide a guide on the side of the suction tool and feed the work floated by the suction tool by a gas flow ejecting in the traveling direction.

[0059]

As described above, according to the present invention,
By sucking the work by blowing out a gas, by a floating processing device using an adsorption tool that holds in a non-contact state, without attaching dust to the work, without damaging the back surface of the work, In addition, a thin and large work piece can be transferred and processed in a non-contact state without being dropped and damaged due to bending due to its own weight.

[Brief description of drawings]

FIG. 1 is a cross-sectional view of an essential part of an embodiment of a floating processing device according to the present invention.

FIG. 2 is a sectional view showing a main part of another embodiment of the floating processing apparatus according to the present invention.

FIG. 3 is a sectional view taken along a line of FIG.

[Explanation of symbols]

 1, 17, 26 Adsorption tool 2 Work 3, 23, 37 Gas ejection port 5, 18 Guide 6 Processing device 7 Wall 15, 36 Floating processing device 27 Belt 40 Work transport path @@

Claims (2)

[Claims] 1. An apparatus for treating a work in a state where the work is levitated, the work being performed by blowing out a gas.
From a suction device that sucks the work and holds it in a non-contact state, and a processing device that is disposed around the suction device and that guides the work and a guide that restricts the horizontal movement of the work. Floating processing equipment. 2. A plurality of the suction tools are arranged side by side in the work transfer direction, and belts having front and rear ends are hung on both left and right sides of the suction tool in the work transfer direction, and the belt travels on the belt. A floating processing apparatus in which a line is disposed above the upper surface of the suction tool to form a work transfer path, and a processing apparatus is provided above an intermediate portion of the work transfer path.